EP4006350B1 - Pompe à vide - Google Patents
Pompe à vide Download PDFInfo
- Publication number
- EP4006350B1 EP4006350B1 EP21213446.4A EP21213446A EP4006350B1 EP 4006350 B1 EP4006350 B1 EP 4006350B1 EP 21213446 A EP21213446 A EP 21213446A EP 4006350 B1 EP4006350 B1 EP 4006350B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- interface
- vacuum pump
- controller
- interference suppression
- accordance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000001629 suppression Effects 0.000 claims description 39
- 239000003990 capacitor Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 description 5
- 230000003068 static effect Effects 0.000 description 5
- 230000004913 activation Effects 0.000 description 4
- 230000003213 activating effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
Definitions
- the invention relates to a vacuum pump, which is in particular a turbomolecular pump and which is equipped with an interface to connect the vacuum pump to an accessory device.
- Many vacuum pumps can be electrically connected to accessories, for example to acquire data used to control the vacuum pump or a vacuum system in which the vacuum pump is located, or to control the vacuum pump together with the accessory.
- accessories are pressure measuring devices, flood valves and fans.
- vacuum pumps are able to carry out automatic accessory detection when connecting an accessory device, in which a controller of the vacuum pump automatically determines which type of accessory device is currently connected to an interface of the vacuum pump. After automatic accessory recognition, correct characteristics can, for example, be selected to control the accessory device.
- the automatic accessory recognition can be carried out using analog signals and characteristic resistors that are present in the accessory device and are read out via the vacuum pump interface.
- the accessory recognition can be carried out using digital signals that are requested from the vacuum pump via the interface and sent by the accessory device in the form of digital data packets to the controller of the vacuum pump.
- a generic vacuum pump is used by EP 3 647 600 A1 disclosed.
- connection poles or data lines in standardized interfaces or plug-in connections it is often necessary to use a common line for accessory recognition, i.e. both for analog accessory recognition using identification resistors and for accessory recognition with digital data packets.
- malfunctions can occur during operation of the vacuum pump, i.e. when the drive motor is switched on, for example due to output stage pulse width modulation in turbomolecular pumps to control the drive motor.
- the interference can be reduced by using a suitable, permanently connected capacitor in the area of the interface of the vacuum pump.
- a permanently installed capacitor causes digital signals at the vacuum pump interface to be short-circuited and automatic accessory recognition using the digital data packets is prevented.
- An object of the invention is to create a vacuum pump in which automatic accessory recognition can be carried out reliably during operation of the vacuum pump even if different types of signals, in particular analog or digital signals, are available at an interface of the vacuum pump.
- the vacuum pump which is in particular a turbomolecular pump, has an interface for connecting the vacuum pump to an accessory device, a controller which is connected to the interface, and an interference suppression device which is connected to the interface and the controller.
- the controller is designed to recognize at least two different types of a signal that is present at the interface of the vacuum pump and to activate the interference suppression device depending on the recognized type of signal present at the interface.
- the respective connections between the interface, the controller and the interference suppression device can be electrical or electronic connections.
- the interface can be a standardized interface, such as a micro-USB plug connection.
- the interface can be automatically adapted to this signal type by activating or deactivating the interference suppression device using the controller according to the signal type. For example, attenuation of digital data packets when connecting "intelligent" accessories can be prevented, while possible interference with static, analog signals can be suppressed using the interference suppression device. Due to the suppression of the interference, it is also possible, for example when using analog signals and characteristic resistors in the accessory device, to distinguish a larger number of types of the accessory device.
- the vacuum pump can further have a switching device that is connected to the interference suppression device and the controller.
- the controller can be designed to selectively activate the interference suppression device by means of the switching device.
- the interference suppression device can therefore be reliably activated or deactivated via the switching device.
- the switching device can further comprise a transistor. It has been shown that a commercially available transistor can be particularly suitable as a switching device, since such a transistor takes up little space within the vacuum pump. Alternatively, the switching device can also be designed as a switch or optocoupler.
- the controller can also be designed to detect whether the accessory device has a characteristic resistor based on the signal present at the interface. If the presence of a resistor is detected, an analog signal type may be present at the interface. Conversely, if it is detected that the accessory device does not have a characteristic resistor, a digital signal type may be present at the interface. In this embodiment, the controller can therefore recognize which type of signal is present at the interface based on the presence of the identification resistor and activate or deactivate the interference suppression device accordingly. Specifically, the controller can use the interference suppression device activate if the accessory device has the identification resistor, and deactivate the interference suppression device if the accessory device does not have the identification resistor. The presence of the identification resistor can therefore represent a clear and reliable condition for the activation of the interference suppression device.
- the controller can identify the identification resistance of the accessory device based on a voltage that is present between two input lines of the interface. For example, a voltage in a predetermined range can be assigned to a specific type of accessory device. In this embodiment, the controller is therefore not only able to distinguish at least two different signal types, but also different types of accessory devices that provide the same signal type at the interface. However, if no voltage can be measured on the two input lines of the interface, for example because the two input lines are open, the controller can determine that there is no identifying resistor in the accessory device and therefore that a digital signal type is present on the interface.
- the interference suppression device can comprise a capacitor. Since there are no special requirements for such a capacitor, the interference suppression device can therefore be implemented cost-effectively. Furthermore, the interference suppression device can be designed as a low pass. In addition to a capacitor, the interference suppression device can therefore comprise a resistor, which in turn has no special requirements. However, the size of the resistor and capacitor determines the cutoff frequency of the low pass. In order to suppress interference caused by a drive motor of a turbomolecular pump, the resistor and the capacitor of a low pass can be dimensioned in this way As an interference suppression device, it may be useful for the low pass to have a cutoff frequency of approximately 1 kHz.
- the at least two different types of the signal present at the interface include an analog signal and a digital signal. If the controller detects the analog signal, the suppressor can be activated, and if the controller detects the digital signal, the suppressor can be deactivated. Regardless of whether an analog or digital signal is present at the interface, a common data line can be used or maintained for these signals at the interface. This allows the use or retention of a standardized interface.
- the interface can be designed, for example, as a micro-USB interface. Such an interface, for example, has a 5-pin connection, where one pin can be used together for analog and digital input signals.
- the invention further relates to a system with a vacuum pump, as described above, and with an accessory device.
- the vacuum pump and the accessory device are connected to one another via the interface, which can be an electrical or electronic connection.
- the vacuum pump is designed by means of the controller to recognize at least two different types of a signal present at the interface, for example an analog signal or a digital signal, and to activate the interference suppression device in accordance with the recognized type of signal present at the interface activate.
- the vacuum pump can also be designed to recognize a type of accessory device based on the signal present at the interface. For example, the controller of the vacuum pump can detect whether the
- Accessory device has an identification resistor, and identify the type of accessory device based on the identification resistor, or it can request a digital signal and then read it out to identify the accessory device.
- the accessory device can include a pressure measuring device, which, for example, provides a digital signal at the interface.
- the accessory device can include a flood valve or a fan, which, for example, provides an analog signal at the interface and has a characteristic resistor.
- Fig. 1 shows schematically a vacuum pump 11, which is connected via an interface 13 to an accessory device 15, which has a plug 16 for this purpose.
- the vacuum pump 11 also has a microcontroller 17, which is connected to the interface 13.
- the vacuum pump 11 is intended to be connected to different types of the accessory device 15 via the interface 13 and to automatically recognize the respective type of the accessory device 15 by means of the microcontroller 17.
- accessory device 15 To recognize the accessory device 15, certain types of the accessory device 15 have an identification resistor 19.
- Such accessories 15 are, for example, a flood valve or a fan, which provide an analog signal for the microcontroller 17 at the interface 13, which reflects the size of the characteristic resistor 19. Based on this analog signal, the microcontroller 17 recognizes the size of the characteristic resistor 19 and thus the type of the accessory device 15.
- accessory device 15 which can also be viewed as "intelligent" accessory devices and are equipped with a serial interface, send digital data packets via interface 13 to microcontroller 17 of vacuum pump 11 after a corresponding request.
- the microcontroller identifies on the basis of the digital data packets 17 the type of accessory device 15.
- Such an accessory device 15 is, for example, a pressure measuring device or pressure measuring tube.
- the interface 13 is designed as a micro-USB plug connection and includes five poles or connection connections, which are designated X4:1 to X4:5.
- the plug 16 of the accessory device 15 has corresponding connection connections X3:1 to X3:5, which, however, are assigned or used differently depending on the type of accessory device 15.
- the connection connections X4:1 and X4:4 are intended for supply lines 21, 22.
- the supply line 21 is used to supply an “intelligent” or “digital” accessory device 15, for example a pressure gauge, with a voltage of +5V.
- the supply line 22, on the other hand, is intended to supply an "analog” accessory device 15 with +24V, as is necessary for a flood valve or a fan.
- connection connections X4:2 for a transmission line 23 and X4:3 for a reception line 24 are provided at the interface 13, while the connection connection X4:5 is connected to ground (GND) via a ground line 25.
- the transmission line 23 serves, in the case of a "digital" accessory device 15, to send a request to the accessory device 15 that the accessory device 15 should output digital data packets for accessory recognition to the microcontroller 17 via the receiving line 24.
- the interface 13 actually have two different connections X4:3 for different reception lines 24 in order to detect both digital data packets and analog signals corresponding to the characteristic resistor 19.
- the connections X4:1 and X4:4 for the two supply lines 21, 22, the connection X4:2 for the transmission line 23 and the connection
- the standardized micro-USB connector is only 5-pin, it is necessary to use a common connection X4:3 and a common receiving line 24 for both the digital and the analog signals.
- the receiving line 24 thus serves, on the one hand, to detect a static, analog voltage in the event that the accessory device 15 has a characteristic resistor 19, as shown for example in Fig. 1 is shown.
- the analog voltage detected via the input line 24 is typically assigned to six different values between 0.38 and 2.74 V to thereby identify the characteristic resistor 19 and thus the type of accessory device, for example a flood valve or a fan.
- Fig. 2A shows the signal on the receiving line 24 related to ground (GND) over the time after switching on the drive motor of the vacuum pump 11.
- this signal has interference with such an amplitude that a clear evaluation of the voltage signal on line 24 is no longer possible.
- the interference does not allow the voltage detected on the receiving line 24 to be assigned to one of the six different voltage ranges within the interval from 0.38 V to 2.74 V. Consequently, with the in Fig. 2A In the case shown, the type of accessory device 15 cannot be recognized based on the signal present on the receiving line 24 and based on the corresponding characteristic resistor 19.
- the vacuum pump 11 has an interference suppression device in the form of a low pass 31 (cf. Fig. 1 ), which, based on the receiving line 24, comprises a series-connected resistor 33 and a parallel-connected capacitor 35.
- the vacuum pump 11 has a switching device 37, which includes a transistor 39 and a control line 41, which in turn is connected to the microcontroller 17.
- the capacitor is connected to ground (GND), so that the low pass 31 is activated as a suppression device. If, on the other hand, the transistor 39 is blocked or is switched non-conducting by means of the control line 41, the capacitor 35 and thus also the low pass 31 are deactivated as a suppression device.
- Fig. 2B is the signal on the receiving line 24 as a voltage signal 27 behind the low pass 31 (cf. Fig. 1 ) shown after its activation, as measured by the microcontroller 17.
- the fluctuations or disturbances in the analog voltage signal 27 are significantly smaller after activation of the low pass 31 (cf. Fig. 2B ) than without activation of the low pass 31 (cf. Fig. 2A ).
- the microcontroller 17 and the interface 13 of the vacuum pump 11 are also intended to identify those accessory devices 15 that send digital data packets, which are also detected via the receiving line 24 by means of the microcontroller 17.
- the microcontroller 17 sends a signal to the accessory device 15 via the transmission line 23 in order to trigger the sending of the digital data packets via the reception line 24. Capturing the digital data packets on the receiving line 24 allows the corresponding accessory device 15 to be clearly identified by means of the controller 17.
- the low pass 31 is activated as a suppression device by switching on the switching device 37, that is, if the transistor 39 is switched on by means of the control line 41, the digital signals on the receiving line 24 are short-circuited, as shown in FIG Fig. 3B is shown.
- digital signals are plotted over time, ie the voltage signal 27 behind the low pass 31 over time in the event that a "digital" accessory device 15 such as a pressure gauge is connected to the vacuum pump 11 via the interface 13.
- the digital signals are short-circuited via the capacitor 35 of the low-pass filter 31 when the low-pass filter 31 is activated via the conductive transistor 39, it is not possible to identify the accessory device 15 based on the digital data packets that are detected via the receiving line 24. To prevent this, the low pass 31 is deactivated when digital data packets are to be captured via the receiving line 24.
- the microcontroller 17 determines whether a characteristic resistor 19 is in the accessory device 15 is present. To determine this, the microcontroller 17 checks whether there is a measurable voltage between the receiving line 24 and ground (GND) or whether the receiving line 24 is open to ground. If a voltage between the receiving line 24 and ground can be measured, the accessory device 15 has the identification resistor 19, so that a static, analog signal can be detected on the receiving line 24. In this case, the microcontroller 17 activates the low pass 31 via the control line 41 by turning the transistor 39 on. This results in the static analog signal being suppressed by means of the low pass 31, as shown in Fig. 2B is shown.
- GND receiving line 24 and ground
- the accessory device 15 does not have a characteristic resistor 19
- the receiving line 24 is open to ground, and in this case the microcontroller 17 cannot determine a voltage that corresponds to a specific characteristic resistor 19. Consequently, in this case, digital data packets must be detected on the receiving line 24, so that the microcontroller 17 deactivates the low pass 31 via the control line 41 by switching the transistor 39 to "non-conducting". As a result, the low pass 31 does not affect the digital data packets, which can therefore be captured unhindered, as shown in Fig. 3A is shown.
- the microcontroller 17 determines based on the signal on the receiving line 24 whether the accessory device 15 has an identification resistor 19 or not, and activates or deactivates the low pass 31 accordingly in order to either produce an undisturbed analog signal (cf. Fig. 2B ) or an undisturbed digital data packet (cf. Fig. 3A ) to be able to capture.
- an undisturbed analog signal cf. Fig. 2B
- an undisturbed digital data packet cf. Fig. 3A
- the cutoff frequency of the low-pass filter 31 can be determined in such a way that possible interference with the analog signal (cf. Fig. 2A ) can be suitably suppressed.
- a resistor with 820 ⁇ and a capacitor with 220 nF were chosen, so that a cutoff frequency of 882 Hz for the low pass 31 results. It has been shown that to suppress the interference that can be caused by the pulse width modulated signals for the drive motor of a turbomolecular pump, a cutoff frequency of 1 kHz of the low pass 31 is sufficient.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Claims (15)
- Pompe à vide (11), en particulier pompe turbomoléculaire, comprenantune interface (13) pour relier la pompe à vide (11) à un dispositif accessoire (15), etun contrôleur (17) qui est en communication avec l'interface (13),le contrôleur (17) étant conçu pour reconnaître au moins deux types différents d'un signal appliqué à l'interface (13),caractérisée en ce quela pompe à vide comprend un dispositif d'antiparasitage (31) qui est relié à l'interface (13) et au contrôleur (17),et en ce que le contrôleur (17) est conçu pour activer sélectivement le dispositif d'antiparasitage (31) en fonction du type reconnu de signal appliqué à l'interface (13).
- Pompe à vide (11) selon la revendication 1,comprenant en outre un dispositif de commutation (37) qui est relié au dispositif d'antiparasitage (31) et au contrôleur (17),le contrôleur (17) étant conçu pour activer sélectivement le dispositif d'antiparasitage (31) au moyen du dispositif de commutation (37).
- Pompe à vide (11) selon la revendication 2,
dans laquelle le dispositif de commutation (37) comprend un transistor (39). - Pompe à vide (11) selon l'une des revendications 1 à 3,
dans laquelle le contrôleur (17) est conçu pour reconnaître, à partir du signal appliqué à l'interface (13), si le dispositif accessoire (15) présente une résistance caractéristique (19). - Pompe à vide (11) selon la revendication 4,
dans laquelle le contrôleur (17) active le dispositif d'antiparasitage (31) si le dispositif accessoire (15) présente la résistance caractéristique (19), et désactive le dispositif d'antiparasitage (31) si le dispositif accessoire (15) ne présente pas de résistance caractéristique (19). - Pompe à vide (11) selon la revendication 4 ou 5,
dans laquelle le contrôleur (17) identifie la résistance caractéristique (19) du dispositif accessoire (15) à partir d'une tension (27) appliquée entre deux lignes d'entrée (24, 25) de l'interface (13). - Pompe à vide (11) selon l'une des revendications 1 à 6,
dans laquelle le dispositif d'antiparasitage (31) comprend un condensateur (35). - Pompe à vide (11) selon l'une des revendications 1 à 7,
dans laquelle le dispositif d'antiparasitage (31) est conçu comme un filtre passe-bas. - Pompe à vide (11) selon l'une des revendications 1 à 8,
dans laquelle lesdits au moins deux types différents de signal appliqué à l'interface (13) incluent un signal analogique et un signal numérique. - Pompe à vide (11) selon la revendication 9,dans laquelle le dispositif d'antiparasitage (31) est activé lorsque le contrôleur (17) reconnaît le signal analogique, etle dispositif d'antiparasitage (31) est désactivé lorsque le contrôleur (17) reconnaît le signal numérique.
- Pompe à vide (11) selon l'une des revendications 1 à 10,
dans laquelle l'interface (13) est conçue comme une interface micro-USB. - Système comprenant une pompe à vide (11) selon l'une des revendications 1 à 11 et un dispositif accessoire (15),
dans lequel la pompe à vide (11) et le dispositif accessoire (15) sont reliés entre eux par l'interface (13). - Système selon la revendication 12,
dans lequel la pompe à vide (11) est conçue pour reconnaître un type de dispositif accessoire (15) à partir du signal appliqué à l'interface (13). - Système selon la revendication 12 ou 13,
dans lequel le dispositif accessoire (15) comprend un dispositif de mesure de pression, une vanne d'admission ou un ventilateur. - Procédé de fonctionnement d'une pompe à vide (11), en particulier d'une pompe turbomoléculaire, dans lequelune interface (13) de la pompe à vide (11) est reliée à un dispositif accessoire (15),un contrôleur (17) est en communication avec l'interface (13),un dispositif d'antiparasitage (31) est relié à l'interface (13) et au contrôleur (17),le contrôleur (17) reconnaît au moins deux types différents d'un signal appliqué à l'interface (13) et active sélectivement le dispositif d'antiparasitage (31) en fonction du type reconnu de signal appliqué à l'interface (13).
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP21213446.4A EP4006350B1 (fr) | 2021-12-09 | 2021-12-09 | Pompe à vide |
JP2022103401A JP7515540B2 (ja) | 2021-12-09 | 2022-06-28 | 真空ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP21213446.4A EP4006350B1 (fr) | 2021-12-09 | 2021-12-09 | Pompe à vide |
Publications (2)
Publication Number | Publication Date |
---|---|
EP4006350A1 EP4006350A1 (fr) | 2022-06-01 |
EP4006350B1 true EP4006350B1 (fr) | 2023-09-13 |
Family
ID=78827985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP21213446.4A Active EP4006350B1 (fr) | 2021-12-09 | 2021-12-09 | Pompe à vide |
Country Status (1)
Country | Link |
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EP (1) | EP4006350B1 (fr) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8467890B2 (en) * | 2008-11-10 | 2013-06-18 | Broadcom Corporation | Method and system for detecting interrupts from detachable electronic accessories or peripherals |
GB2502983A (en) * | 2012-06-12 | 2013-12-18 | Incus Lab Ltd | Electronic host device with flexible interface for accessory connection |
EP3647600B1 (fr) * | 2019-10-08 | 2022-05-18 | Pfeiffer Vacuum Gmbh | Identification d'un périphérique connecté électriquement |
-
2021
- 2021-12-09 EP EP21213446.4A patent/EP4006350B1/fr active Active
Also Published As
Publication number | Publication date |
---|---|
JP2023086079A (ja) | 2023-06-21 |
EP4006350A1 (fr) | 2022-06-01 |
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