EP3976511A1 - Dispositif de transport - Google Patents
Dispositif de transportInfo
- Publication number
- EP3976511A1 EP3976511A1 EP20730405.6A EP20730405A EP3976511A1 EP 3976511 A1 EP3976511 A1 EP 3976511A1 EP 20730405 A EP20730405 A EP 20730405A EP 3976511 A1 EP3976511 A1 EP 3976511A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- transport
- unit
- planar motor
- acting
- planar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010168 coupling process Methods 0.000 claims description 20
- 230000008878 coupling Effects 0.000 claims description 19
- 238000005859 coupling reaction Methods 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 6
- 230000001141 propulsive effect Effects 0.000 claims description 2
- 101100381920 Arabidopsis thaliana BPA1 gene Proteins 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 1
- 101100218522 Schizosaccharomyces pombe (strain 972 / ATCC 24843) bpb1 gene Proteins 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229920002457 flexible plastic Polymers 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 239000013598 vector Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K16/00—Machines with more than one rotor or stator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
- H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information
Abstract
L'invention concerne un dispositif de transport (1) pourvu d'un moteur planaire (2), ce dispositif permettant d'obtenir une flexibilité accrue dans le déplacement des unités de transport (3) grâce à au moins deux moteurs planaires (2A, 2E) présentant des plans de transport (TEA, TEE) se faisant face, au moins une première unité de transport (3A3) étant placée dans le plan de transport (TEA) d'un premier moteur planaire (2A) et reliée à au moins une deuxième unité de transport (3A4) placée dans le plan de transport (TEE) d'un deuxième moteur planaire (2E) au moyen d'une unité de liaison (15).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT504892019 | 2019-05-28 | ||
| PCT/EP2020/064883 WO2020239933A1 (fr) | 2019-05-28 | 2020-05-28 | Dispositif de transport |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP3976511A1 true EP3976511A1 (fr) | 2022-04-06 |
Family
ID=70977514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP20730405.6A Pending EP3976511A1 (fr) | 2019-05-28 | 2020-05-28 | Dispositif de transport |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20220239212A1 (fr) |
| EP (1) | EP3976511A1 (fr) |
| JP (1) | JP2022534399A (fr) |
| CN (1) | CN113950455B (fr) |
| CA (1) | CA3141948A1 (fr) |
| WO (1) | WO2020239933A1 (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102020205002A1 (de) | 2020-04-21 | 2021-10-21 | Robert Bosch Gesellschaft mit beschränkter Haftung | Transportsystem |
| DE102021202915A1 (de) | 2021-03-25 | 2022-09-29 | Robert Bosch Gesellschaft mit beschränkter Haftung | Berührungslose Beförderungsvorrichtung |
| DE102022119231A1 (de) * | 2022-08-01 | 2024-02-01 | Krones Aktiengesellschaft | Vorrichtung und Verfahren zum Transportieren von Behältern |
| DE102022129508A1 (de) | 2022-11-08 | 2024-05-08 | Beckhoff Automation Gmbh | Verfahren zum Betreiben eines Planarantriebssystems und Planarantriebssystem |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19531520A1 (de) | 1995-07-20 | 1997-01-23 | Heisel Uwe Prof Dr Ing Dr H C | Vorrichtung zum Positionieren und Fixieren von Körpern |
| AT409043B (de) | 2000-02-07 | 2002-05-27 | Heinz Peter Dipl Brandstetter | Vorrichtung und verfahren zur zweidimensionalen positionsbestimmung |
| KR101829030B1 (ko) | 2011-10-27 | 2018-03-29 | 더 유니버시티 오브 브리티쉬 콜롬비아 | 변위 장치 및 변위 장치의 제조, 사용 그리고 제어를 위한 방법 |
| JP5723426B2 (ja) * | 2013-09-02 | 2015-05-27 | 株式会社カイジョー | 駆動機構及び製造装置 |
| US9828192B2 (en) | 2014-07-25 | 2017-11-28 | Robert Bosch Gmbh | Conveying arrangement |
| DE102014214693A1 (de) * | 2014-07-25 | 2016-01-28 | Robert Bosch Gmbh | Vorrichtung zum Wiegen eines Behältnisses |
| DE102014214696A1 (de) | 2014-07-25 | 2016-01-28 | Robert Bosch Gmbh | Vorrichtung zum Transport eines Behältnisses relativ zu einer Füllstation |
| TWI732285B (zh) * | 2015-01-23 | 2021-07-01 | 美商應用材料股份有限公司 | 半導體處理設備 |
| US9633878B1 (en) * | 2016-04-21 | 2017-04-25 | Texas Instuments Incorporated | Conveyor apparatus and method for transporting leadframe |
| DE102016224951A1 (de) * | 2016-12-14 | 2018-06-14 | Robert Bosch Gmbh | Beförderungsvorrichtung mit einem Stator zur kontrollierten Beförderung eines Transportkörpers relativ zum Stator |
| CN115085508A (zh) | 2017-03-27 | 2022-09-20 | 平面电机公司 | 机器人装置和用于制造、使用和控制其的方法 |
-
2020
- 2020-05-28 US US17/614,408 patent/US20220239212A1/en active Pending
- 2020-05-28 CN CN202080038449.0A patent/CN113950455B/zh active Active
- 2020-05-28 CA CA3141948A patent/CA3141948A1/fr active Pending
- 2020-05-28 EP EP20730405.6A patent/EP3976511A1/fr active Pending
- 2020-05-28 JP JP2021570133A patent/JP2022534399A/ja active Pending
- 2020-05-28 WO PCT/EP2020/064883 patent/WO2020239933A1/fr unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CA3141948A1 (fr) | 2020-12-03 |
| US20220239212A1 (en) | 2022-07-28 |
| JP2022534399A (ja) | 2022-07-29 |
| WO2020239933A1 (fr) | 2020-12-03 |
| CN113950455B (zh) | 2023-08-04 |
| CN113950455A (zh) | 2022-01-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: UNKNOWN |
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| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
|
| 17P | Request for examination filed |
Effective date: 20211125 |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
| DAV | Request for validation of the european patent (deleted) | ||
| DAX | Request for extension of the european patent (deleted) | ||
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: EXAMINATION IS IN PROGRESS |
|
| 17Q | First examination report despatched |
Effective date: 20240220 |