EP3976511A1 - Transport device - Google Patents
Transport deviceInfo
- Publication number
- EP3976511A1 EP3976511A1 EP20730405.6A EP20730405A EP3976511A1 EP 3976511 A1 EP3976511 A1 EP 3976511A1 EP 20730405 A EP20730405 A EP 20730405A EP 3976511 A1 EP3976511 A1 EP 3976511A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- transport
- unit
- planar motor
- acting
- planar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- 101100381920 Arabidopsis thaliana BPA1 gene Proteins 0.000 description 3
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K16/00—Machines with more than one rotor or stator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
- H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information
Definitions
- the invention relates to a transport device with at least two planar motors, which each form a transport plane in the at least one transport unit
- the invention further relates to a transport unit for a transport device with at least two planar motors with mutually facing transport levels and a method for operating a transport device.
- Planar motors are basically known in the prior art.
- US Pat. No. 9,202,719 B2 discloses the basic structure and mode of operation of such a planar motor.
- a planar motor essentially has a transport plane in which one or more transport units can be moved two-dimensionally.
- drive coils are provided on the planar motor, distributed in the transport plane, which are controlled by a control unit in order to generate a moving magnetic field
- drive magnets permanent magnets or electromagnets
- the drive coils and the drive magnets are advantageously arranged so that next to a
- One-dimensional movement along the axes spanned by the transport plane also include more complex two-dimensional movements of the transport unit in the
- a planar motor can be used, for example, as a transport device in a production process, whereby very flexible transport processes with complex movement profiles can be implemented.
- planar motor as a transport device
- two planar motors are arranged adjacent to one another and transport units can be moved on both planar motors. This enables transport units to move independently of one another on two levels.
- a planar motor and one or more continuous conveyors interact in order to manipulate products in a certain way.
- the transport units of the planar motor can each be individually moved two-dimensionally in a vertical plane.
- the planar motor allows a very flexible movement in the vertical plane, but the continuous conveyor limits flexibility.
- WO 2018/176137 A1 discloses a transport device with two spaced parallel planar motor stators, each of which forms a transport plane in which a transport unit can be moved.
- the transport units are articulated with a connecting body on which an object can be transported. By moving the transport units relative to each other, the object can be moved in the direction normal to the transport levels.
- DE 195 31 520 A1 discloses a similar transport device, the
- Transport units are movable in the same transport plane.
- the object is achieved in that the transport levels of the at least two planar motors face each other, with at least one first transport unit being provided in the transport level of a first planar motor, which is connected to at least one second transport unit provided in the transport level of a second planar motor by means of a connection unit is.
- the connected transport units allow very flexible and complex movement sequences, for example a movement profile of a point on the connection unit is made up of the superimposed ones
- Arrangement angle provided which is a maximum of 45 °, the arrangement angle preferably being 0 °, in that the transport planes are arranged opposite and parallel to one another.
- connection unit is advantageously adjustable in order to adapt a connection unit length during the movement of the at least two transport units to a variable distance between the at least two transport units. This creates a greater degree of freedom in the movement of the connected transport units.
- At least one receiving unit for receiving an object is preferably provided on the connecting unit.
- two planar motors are provided with transport planes adjoining one another and inclined at an angle of abutment to one another, with at least one multi-acting
- Transport unit is provided, with the multi-acting transport unit at least first drive magnets are provided to interact electromagnetically with the drive coils of a first planar motor and at least second drive magnets are provided to interact electromagnetically with the drive coils of a second planar motor, and that the multi-acting transport unit in the
- Transport plane of one of the planar motors can be moved two-dimensionally or at the same time can be moved one-dimensionally in the adjacent transport planes of the first and second planar motors.
- This enables very flexible and complex movement sequences, for example a multi-acting transport unit can be moved in a conventional manner in only one of the adjacent transport levels.
- Transport unit can be one-dimensional in both adjoining
- Transport levels are moved, for example in order to generate a greater driving force. Furthermore, it is particularly advantageous that the multiply acting transport unit can also be transferred from one transport level to an adjacent transport level.
- a double-acting transport unit is preferably used as a multiple-acting transport unit
- Transport unit is provided on which a base body with two legs is provided, which are arranged at an angle to one another which corresponds to the angle of abutment between two adjacent transport planes, the first on one leg
- the multiple-acting transport unit can be decoupled into at least two single-acting transport units, at least one coupling device being provided on each of the at least two single-acting transport units in order to releasably couple the transport units to one another in order to form the multiple-acting transport unit.
- Transport unit can be used.
- the single-acting transport units can be coupled again to form the multiple-acting transport unit in order to use the greater potential of the driving force.
- the angle of abutment between the two adjoining transport levels is advantageously between 30 ° and 150 °, particularly preferably 90 °. This enables a simple structure, for example with orthogonal transport levels.
- Per planar motor there is preferably at least one planar motor control unit for
- planar motor control units of the at least two planar motors being connected to exchange control information for controlling transport units of the respective planar motor and / or that the planar motor control units with a
- Superordinate transport device control unit connected or integrated into this.
- control commands can be exchanged and synchronized between individual planar motors in order to coordinate the movement profiles of the transport units with one another.
- At least one planar motor is preferably made up of a plurality of one another
- Transport segment planar motors with different sized transport levels can be created.
- the object with a transport unit is achieved in that the
- Transport unit by means of a connection unit with at least one other
- Transport unit is connected, which is movable in the other transport level of the facing transport levels.
- the object is also achieved in that at least one transport unit that is moved in the transport plane of one of the planar motors is connected by means of a connecting unit to at least one transport unit that is moved in the transport plane of the at least one other planar motor, the drive coils of the planar motors from the corresponding planar motor control unit are controlled in order to generate a propulsive force with the drive magnets of the transport units
- FIGS. 1 to 6 are advantageous by way of example, schematically and not by way of limitation
- Fig.1a-1c an example of a transport device according to the invention in a
- FIG. 2 shows an arrangement of drive coils on a transport segment of a
- 3a shows a single-acting transport unit of a planar motor in one
- FIG. 5 shows a coupling process of transport units on the basis of a side view of a transport device
- FIG. 6 shows a further example of a transport device according to the invention with two transport units connected by means of a connecting unit.
- a transport device 1 In Fig.la an exemplary embodiment of a transport device 1 according to the invention is shown in a sectional view along the section line A-A in Fig.1c.
- a first planar motor 2A is provided, which is a first
- Transport level TEA trains.
- the first transport plane TEA is a vertical plane with a vertical axis Z and a longitudinal axis X.
- the first planar motor 2A is made up of a plurality i of transport segments TSi which adjoin one another in order to form the first transport plane TEA.
- a planar motor 2 can be constructed in a modular manner and transport levels TEi of different sizes can be implemented.
- this modular structure is only optional and a planar motor 2 could also be formed by just a single assembly or a single transport segment TSi.
- transport units 3 can be moved two-dimensionally. For example, a movement would only be in one
- drive coils 6, which are controlled by a control unit 5A, are provided on the first planar motor 2A. An electrical voltage can be applied to the drive coils 6 in order to generate a magnetic field.
- a substantially moving magnetic field can be generated.
- the drive coils 6 are
- the transport plane TEi is not to be understood here as a plane in the mathematical sense, but rather a planar transport surface delimited by the respective planar motor 2 on which the transport units 3 can move.
- Drive magnets 4 for example permanent magnets, which interact with the drive coils 6 in order to exert a driving force on the transport unit 3, are arranged on the transport units 3.
- a moving magnetic field is generated that interacts with the drive magnets 4 in order to move the transport unit 3.
- the transport units 3 In addition to the two-dimensional movement in the transport plane TEA (or generally TEi), a certain movement of the transport units 3 in the vertical direction is also possible, that is to say normal to the transport plane TEi.
- the air gap By appropriately controlling the drive magnets 6, the air gap can be increased and decreased to a limited extent, as a result of which the transport unit 3 can be moved in the vertical direction.
- the size of the available freedom of movement in the vertical direction depends essentially on the structural design of the transport device 1, in particular on the maximum magnetic field that can be generated by the drive coils 6 and the drive magnets 4, as well as the mass and load on the transport unit (e.g. the weight of a transported object).
- the available range of motion in the vertical direction can be, for example, in the range from a few mm to several centimeters.
- the transport units 3 can be held in any way on the planar motor 2 or on the transport plane TE, for example in order to maintain the air gap.
- any suitable guide elements can be provided on the transport units 3.
- a planar motor 2 always has a stator as a fixed component and has at least one transport unit 3 as a movable component.
- the stator forms the transport plane TE in which the at least one transport unit 3 can be moved by the electromagnetic interaction of the drive coils 6 and the drive magnets 4.
- the drive coils 6 are usually arranged on the stator and the drive magnets 4 are usually arranged on the transport unit 3.
- the opposite variant is also conceivable, with the drive coils 6 on the transport unit 3 and the drive magnets 4 on the stator.
- An exemplary arrangement of drive coils 6 on a transport segment TSi is shown in FIG. 2 and will be described in detail below.
- At least one second planar motor 2 is also provided, which forms a transport plane TEi.
- at least two planar motors 2 are provided with facing transport levels TEi, with at least one in the transport level TEi of a planar motor 2
- Transport unit 3 is provided, which by means of a connection unit 15 with at least one, in the transport plane TEi of the at least one other planar motor 2
- planar motor control units 5 are provided to control the drive coils 6 of the planar motors 2 to with
- the mutually facing transport planes TEi are also arranged at a distance from one another, so they preferably do not adjoin one another or do not intersect.
- Transport levels TEi are arranged opposite and parallel to one another.
- the angle of arrangement g is to be understood as the angle between the normal vectors of the respective facing transport planes TEi.
- Transport units 3A3, 3A4 are provided, the single-acting transport unit 3A3 being movable in the transport plane TEA of the first planar motor 2A and the
- Transport unit 3A4 is movable in the transport plane TEE of a fifth planar motor 2E.
- the fifth planar motor 2E is arranged relative to the first planar motor 2A in such a way that the transport levels TEA, TEE face one another and are arranged parallel to one another, as shown in FIGS. 1a-c, the arrangement angle g is thus 0 °.
- the transport levels TEA, TEE could also be inclined towards one another.
- the planar motors 2A, 2E could, for example, also be arranged in such a way that the mutually facing transport planes TEA, TEE are inclined to one another at an arrangement angle g of a maximum of 45 °, as indicated by dashed lines in FIGS. 1 b and 1 c.
- the fifth planar motor 2E could for example be arranged relative to the first planar motor 2A in such a way that the transport plane TEE of the fifth planar motor 2E 'is inclined at an arrangement angle g z about the Z axis to the transport plane TEA of the first planar motor 2A (FIG. 1 b) and / or at an arrangement angle gc around the X axis to
- Transport plane TEA of the first planar motor 2A is inclined (Fig.1c). Rotation relative to one another about the Y axis is not limited, since the arrangement angle g between the transport planes TEA, TEE does not change as a result.
- the connection unit 15 is designed here as a substantially rigid connecting rod that is articulated to both transport units 3A3, 3A4. Preferably the
- Connection unit 15 also designed to be adjustable in order to adapt a connection unit length during the movement of the transport units 3A3, 3A4 to a variable distance between the at least two transport units 3A3, 3A4, as indicated in FIG. 1c by the length difference AL.
- a receiving unit 16 can also be provided on the connecting unit 15 in order to receive and transport an object (not shown).
- the receiving unit 16 is only indicated in FIG. 1c; the specific configuration naturally depends on the application of the transport device 1 and is at the discretion of the person skilled in the art.
- the function of the connection unit 15 is explained in more detail below using the example in FIG.
- connection unit 15 a rigid or flexible product that is connected to two or more transport units 3 could also be provided directly as the connection unit 15.
- flexible plastic film or textiles could be transported and / or e.g. are stretched or stretched by transport units 3.
- ropes, cables, wires, etc. are provided as the connection unit 15 and these are twisted, for example, by the relative movement of the transport units 3.
- a separate planar motor 2 could be provided as the connection unit 15 between at least two transport units 3.
- the planar motor 2 could then be moved by the transport units 3 and a transport unit 3 could in turn be moved two-dimensionally on the transport plane TEi of the planar motor 2.
- a known long stator linear motor could also be provided as the connection unit 15.
- a plurality of drive coils are usually arranged one behind the other in a direction of movement, which can be energized in order to generate a moving magnetic field.
- a transport unit on which several drive magnets are arranged one behind the other, can be moved one-dimensionally along the stator in the direction of movement as a function of the magnetic field generated by the drive coils.
- a continuous conveyor e.g. a belt conveyor or a chain conveyor could be provided as the connecting unit 15. It can be seen from this that a connection unit 15 can be used in a wide variety of ways
- planar motors 2 can of course also be provided, each of which forms a transport plane TEi in which one or more transport units 3 can be moved two-dimensionally.
- a second planar motor 2B is provided, which forms a second transport plane TEB, the transport planes TEA, TEB of the planar motors 2A, 2B adjoining one another and are inclined to each other at a certain angle a.
- the at least two planar motors 2A, 2B do not have to be designed as structurally separate units, but could, for example, also be implemented in the form of an integral unit on which the transport levels TEA, TEB are provided.
- Drive coils 6 are provided on the second planar motor 2B in a manner analogous to that on the first planar motor 2A, which are controlled by a planar motor control unit 5B in order to interact electromagnetically with drive magnets 4 of the transport units 3 to move the transport units 3 two-dimensionally in the second transport plane TEB to move.
- planar motors 2 can also be provided, here for example a third planar motor 2C, a fourth planar motor 2D.
- the transport levels TEC, TED of the third and fourth planar motor 2C, 2D likewise directly adjoin the transport level TEA of the first planar motor 2A and stand on it normally.
- the third planar motor 2C here also directly adjoins the second planar motor 2B, so that parallel transport planes TEB, TEC that are opposite to one another result.
- the planar motors 2B, 2C, 2D are designed here essentially identically with the same dimensions in vertical, longitudinal and
- the fourth planar motor 2D is here offset in the longitudinal direction X to the second and third planar motor 2B, 2C.
- the fifth planar motor 2E is arranged such that its transport plane TEE faces the transport plane TEA of the first planar motor 2A and lies parallel to it, as has already been described. This results in an essentially symmetrical transport device 1 with a plane of symmetry SYM (FIG. 1 b).
- the other planar motors 2B, 2C, 2D, 2E are also made up of several mutually adjacent
- Transport segments TSi constructed on each of which drive coils 6 are provided. Due to the modular structure, for example, only one type of
- Transport segment TSi a transport device 1 with several planar motors 2, each with differently sized transport levels, can be realized.
- a planar motor control unit 5A-5E is provided for each planar motor 2A-2E, with which the drive coils 6 of the respective planar motor 2A-2E can be controlled, as shown in FIG.
- Planar motor control units 5A-5E are here with a superordinate
- Transport device control unit 7 connected.
- the planar motor control units 5A-5E could of course also be integrated into the higher-level transport device control unit 7. It can also be provided that for each Transport segment TSi, or a group of transport segments TSi, one each Transport segment TSi, or a group of transport segments TSi, one each Transport segment TSi, or a group of transport segments TSi, one each
- Segment control unit is provided, which can also be integrated in a planar motor control unit 5A-5E.
- the transport device control unit 7 is here connected to a user interface 8, for example a computer, via which the
- Transport unit 1 can be controlled. Via the transport device control unit 7, the movement profiles of transport units 3, which are based on different
- Planar motors 2A-2E moved are synchronized with one another or coordinated with one another, for example in order to avoid a collision between transport units 3 or objects transported therewith.
- a control program that realizes the desired movement profiles of the transport units 3 runs on each of the planar motor control units 5A-5E.
- Various transport units 3 can be moved simultaneously and independently of one another on the transport device 1.
- a single-acting transport unit 3A1, 3A2 is provided on each of the first and second planar motors 2A, 2B.
- the single-acting transport units 3A1, 3A2 can thus be used in the
- the single-acting transport unit 3A1 shown on the first planar motor 2A can, for example, be moved in accordance with the movement profile BPA with a coordinate in the vertical direction Z and a coordinate in the longitudinal direction X in the first transport plane TEA, as indicated in FIG.
- the single-acting transport unit 3A1 shown on the second planar motor 2A can, for example, according to that shown in FIG
- Movement profile BPA with a coordinate in the transverse direction Y and a coordinate in the longitudinal direction X are moved in the second transport plane TEB.
- a single-acting transport unit 3A has drive magnets 4 only on one side, as is shown by way of example in FIGS. 4a + 4b.
- a single-acting transport unit 3A can thus only be moved in a transport plane TEi in that the drive magnets 4 of the single-acting transport unit 3A interact with the drive coils 6 of the corresponding planar motor 2.
- a movement of a single-acting transport unit 3A for example from the first transport level TEA to the second transport level TEB is not possible.
- a single-acting transport unit 3A could of course be picked up manually, for example by a user or a manipulation device (e.g. crane or robot), from the transport level TEi of a planar motor 2 and placed on the transport level TEi of another planar motor 2 and moved on there.
- a multiply acting transport unit 3B, 3C can also be provided in the transport device 1, which is either in the transport plane TEi of a planar motor 2
- At least first drive magnets 4, which are provided to interact electromagnetically with the drive coils 6 of a planar motor 2, and at least second drive magnets 4, which are provided to co-operate with the drive coils 6 of a planar motor 2, are arranged on the multiply acting transport unit 3 B, 3C adjacent transport level TEi to interact electromagnetically.
- a double-acting transport unit 3B which has an essentially L-shaped base body 9.
- first drive magnets 4 are provided, which interact with the drive coils 6 of the first planar motor 2A.
- second drive magnets 4 are provided, which interact with the drive coils 6 of the second planar motor 2B.
- the angle between the legs 9A, 9B of the L-shaped base body 9 essentially corresponds to the adjoining angle ⁇ between the first and second transport plane TEA, TEB, here e.g. 90 degrees.
- the double-acting transport unit 3B in the example shown can now, for example, only be moved in the first transport plane TEA of the first planar motor 2A.
- the drive coils 6 of the first planar motor 2A are accordingly of the
- Planar motor control unit 5A (or the transport device control unit 7) controlled in order to interact with the first drive magnets 4 on the first leg 9A of the double-acting transport unit 3B in order to generate a driving force.
- the double-acting transport unit 3B could thus for example according to the
- Movement profile BPB1 with the coordinates Z, X are moved in the first transport plane TEA.
- the double-acting transport unit 3B could, for example, also only be moved in the second transport plane TEB of the second planar motor 2B.
- the drive coils 6 of the second planar motor 2B are accordingly of the
- Planar motor control unit 5B (or the transport device control unit 7) controlled in order to interact with the second drive magnets 4 on the second leg 9B of the double-acting transport unit 3B in order to generate a driving force.
- the double-acting transport unit 3B could, for example, according to FIG.
- Movement profile BPB2 with the coordinates X, Y are moved in the second transport plane TEB.
- the double-acting transport unit 3B can also be moved one-dimensionally on the first transport plane TEA of the first planar motor 2A and the second transport plane TEB of the second planar motor 2B.
- the drive coils 6 of the first planar motor 2A and / or the drive coils 6 of the second planar motor 6 are correspondingly controlled by the planar motor control unit 5A and / or the planar motor control unit 5B (or the transport device control unit 7) to interact with the first drive magnets 4 on the first leg 9A and / or with the drive magnets 4 on the second leg 9B of the double-acting transport unit 3B in order to generate a drive force.
- Transport unit 3B could thus be moved with the X coordinate according to the movement profile BPB3, for example. This essentially corresponds to a one-dimensional movement in the direction of the intersection of the two adjacent transport levels TEA,
- the area of the adjacent transport levels TEA, TEB can also be used as a transfer point U (see FIG. 1c) to move a double (or multiple) acting transport unit 3B, for example from the transport level TEA to the adjacent transport level TEB. This can make them relatively complex
- Movement patterns are realized.
- Transport unit 3B are first moved in the second transport plane TEB of the second planar motor 2B in the transverse direction Y to the transfer point U (from right to left in FIG. 1c), the movement being controlled via the drive coils 6 of the second planar motor 2B.
- the double-acting transport unit 3B In the transfer point U, the double-acting transport unit 3B
- the double-acting transport unit 3B can be moved in the transport plane TEA of the first planar motor 2A, the movement being controlled via the drive coils 6 of the first planar motor 2B. From the transport level TEA of the first planar motor 2A, the double-acting transport unit 3B could in turn go to the transport level TED of the fourth
- Planar motor 2D etc.
- Transport unit 3B can be moved in the longitudinal direction X according to the movement profile BPB3, the drive being able to take place via the drive coils 6 of the second planar motor 2B and / or via the drive coils 6 of the first planar motor 2A.
- the drive being able to take place via the drive coils 6 of the second planar motor 2B and / or via the drive coils 6 of the first planar motor 2A.
- Planar motor 2B in the longitudinal direction X could drive the first planar motor 2A
- the double-acting transport unit 3B could be moved further in the longitudinal direction X and / or in the vertical direction Z by the drive coils 6 of the first planar motor 2A. In this case, there would be no need to stop at the handover.
- a triple-acting transport unit 3C is also shown.
- the triple-acting transport unit 3C has an essentially U-shaped base body 10 with three legs 10A, 10B, 10C, on each of which drive magnets 4 are provided are.
- a simultaneous drive by means of three planar motors 2A, 2C, 2D (or 2E, 2C, 2D would be possible.
- the triple-acting transport unit 3C could also only be in a single transport plane TEA-TEE are moved.
- x-fold acting transport unit 3 (not shown) would also be conceivable, which has drive magnets 4 on 4, 6,... X sides.
- the x-fold acting transport unit 3 could thus be moved one-dimensionally in x transport levels TEi at the same time or two-dimensionally in each of the x transport levels TEi.
- the number of sides on which drive magnets 4 are provided is advantageously coordinated with the available planar motors 2 and their transport planes TEi arranged relative to one another.
- a multiple-acting transport unit 3B, 3C could also be connected to another (multiple or single-acting)
- Transport unit 3 are connected, which is movable in another transport plane TEi.
- the double-acting transport unit 3B shown could be connected to another (not shown) opposite double-acting transport unit 3B, which can be moved in the transport plane TEB of the second planar motor 2B and / or in the transport plane TEE of the fifth planar motor 2E.
- TEB transport plane of the second planar motor 2B
- TEE transport plane of the fifth planar motor 2E.
- Connection unit 15 is connected in an articulated manner to the respective transport units 3.
- the connecting unit 15 is designed to be adjustable in order to enable a change in length, for example when the connected
- the adjustability of the connecting unit 15 can furthermore also be advantageous in order to be able to use the connected transport units 3 on different transport devices 1, their structural
- Refinements differ, in particular with regard to the distances between two mutually facing transport levels TEi on which the connected transport units 3 are moved.
- FIG. 1 An exemplary arrangement of drive coils 6 on a transport segment TSi is shown in FIG.
- the transport segment TSi is arranged on the planar motor 2 in such a way that the drive coils 6 face the drive magnets 4 of the transport units 3 during operation in order to form a transport plane TEi.
- the transport segment TSi has an essentially square base area, but any other shape is of course also possible.
- the drive coils 6 are divided into coil groups 6a, 6b.
- Coil groups 6A, 6B each have a certain number of drive coils 6, the alignment of the drive coils 6 of the coil groups 6A, 6B differing.
- four drive coils 6 are provided for each coil group 6A, 6B and the drive coils 6 of the coil groups 6A, 6B are rotated by 90 degrees with respect to one another.
- drive coils 6 could also be provided, which are arranged one above the other.
- a further layer of drive coils 6 could be provided, for example under (or above) the drive coils 6 shown in the Z direction.
- the coil groups 6A, 6B could advantageously alternate in the Z direction.
- an essentially continuous moving magnetic field could be generated in the axis directions Y and X.
- the arrangement also allows a two-dimensional movement profile of the
- Transport units 3 in the transport plane TEi here with coordinates in X and Y.
- a rotation of transport units 3 around an axis normal to the transport plane TEi is also possible (here around the Z-axis).
- the drive coils 6 are preferably designed as so-called air coils without an iron core in order to reduce the permanent magnetic force of attraction between the transport units 3 and the transport segments TSi.
- the transport units 3 are less strongly attracted by the drive magnets 4 in the direction of the transport plane TEi, which is particularly advantageous in the case of multiple-acting transport units 3B, 3C in order to facilitate a transfer from one transport plane TEi to an adjacent transport plane TEi.
- FIG. 3a a single-acting transport unit 3A is shown in a side view
- FIG. 3b shows the single-acting transport unit 3A in a plan view from below onto the drive magnets 4.
- the single-acting transport unit 3A has a base body 9 with an essentially rectangular base area.
- Drive magnets 4 arranged.
- an object O to be transported can be arranged on the opposite upper side of the base body 9. Similar to the drive coils 6 on the transport segment TSi, the drive magnets 4 are also shown in FIG.
- Magnet groups 4A, 4B divided. In each magnet group 4A, 4B a certain number of drive magnets 4 is provided, with drive magnets 4 of different magnetic polarity alternating, as indicated in FIG. 4b by the hatched and non-hatched drive magnets 4.
- the drive magnets 4 one
- Magnet groups 4A are oriented differently than the drive magnets 4 of the other magnet groups 4B.
- the drive magnets 4 are at an angle of 90 degrees to one another.
- the magnet groups 4B are here for a movement of the transport unit 3A in Y-direction provided, the magnet groups 4A for a movement of the transport unit 3A in the X-direction. Again, there would be an arrangement of several layers of
- Magnet groups 4A, 4B conceivable, analogous to the previously described coil groups 6A, 6B of the drive coils 6. As a result, a higher drive force can be generated and a more uniform movement and a more precise positioning of the transport unit 3A take place.
- the single-acting transport unit 3A shown is only to be understood as an example, and other forms and other arrangements of FIG
- Drive magnets 4 could then be arranged in a ring, with magnet groups 4A, 4B alternating in the circumferential direction.
- FIG. 4 shows a double-acting transport unit 3B, which has already been described with reference to FIGS. 1a-c.
- the double-acting transport unit 3B has an L-shaped base body 9, on the legs 9A, 9B of which drive magnets 4 are provided.
- the angle between the legs 9A, 9B of course preferably corresponds to the adjoining angle a between two adjacent transport planes TEi on which the double-acting transport unit 3B is to be moved.
- Drive magnets 4 on the respective legs 9A, 9B essentially correspond to the arrangement of the single-acting transport unit 3A from FIGS. 3a + 3b. Again, a different shape of the base body 9 and / or a different arrangement of the drive magnets 4 could of course also be provided here. Since the function of a planar motor 2 is basically known in the prior art, it will not be discussed in more detail at this point.
- a double-acting transport unit 3B does not necessarily have to have identically configured legs 9A, 9B. It would be conceivable, for example, that one of the legs 9A,
- both legs 9A, 9B could also be made longer (9A1, 9B1) in order to increase the number of drive magnets 4 in each case.
- One leg, here the first leg 9A could for example also be extended laterally, as indicated by the dashed line
- leg section 9A2 is indicated in Figure 4.
- leg 9B could be extended analogously on the same side or, for example, additionally or alternatively on the opposite side, as is indicated by the leg section 9B2.
- the legs could, however, also differ in the number and / or size of the drive magnets 4. It can be seen from this that there are many possibilities, such as one multiple acting transport unit can be configured.
- the specific structural design is of course at the discretion of the person skilled in the art and is advantageously adapted to a particular planned application.
- FIG. 1 Another advantageous embodiment of the invention is shown in FIG. The
- the transport device 1 in FIG. 5 essentially corresponds to that in FIG. 1 c, only the relevant upper left area from FIG. 1 c being shown.
- a double-acting transport unit 3B is arranged in the area of the adjacent transport levels TEA, TEB.
- the double-acting transport unit 3B differs from that in FIGS. 1a-1c in that the double-acting transport unit 3B is divided into at least two single-acting ones
- Transport units 3Ax, 3Ay can be decoupled.
- at least one coupling device 11 is provided on each of the at least two single-acting transport units 3Ax, 3Ay in order to releasably couple the transport units 3Ax, 3Ay to one another in order to form the multiply-acting transport unit 3B.
- the single-acting transport unit 3Ax can be moved two-dimensionally in the conventional manner in the transport plane TEA of the first planar motor 2A.
- the other single-acting transport unit 3Ay can analogously in the
- Transport plane TEB of the second planar motor 2B are moved.
- the drive and the movement control take place via the drive coils 6 of the respective planar motor 2A, 2B.
- the coupling devices 11 are only indicated schematically here.
- the coupling devices 11 are preferably standardized and identical on each transport unit 3Ax, 3Ay in order to be able to couple any transport units 3A to one another to form a multiply acting transport unit.
- the coupling / decoupling can take place through the movement itself or can also take place actively, for example by means of appropriate actuators on the coupling devices 11.
- the structural design can essentially be of any desired type, e.g. a mechanical coupling device 11, for example positively or non-positively or also a magnetic coupling device 11.
- the transport units 3Ax, 3Ay can of course also be coupled again to form a double-acting transport unit 3B.
- the transport units 3Ax, 3Ay are moved towards one another, for example on the respective transport level TEA, TEB, so that they meet in the area where the two transport levels TEA, TEB adjoin one another, as symbolized by the arrows.
- the coupling is preferably carried out automatically, for example when the two transport units 3Ax, 3Ay come into contact.
- the two transport units 3Ax, 3Ay can be moved together, essentially creating a transport unit assembly 3Axy, which corresponds to a double-acting transport unit 3B.
- the possibilities for moving the coupled transport unit assembly 3Axy essentially correspond to those of the double-acting transport unit 3B described above with reference to FIGS. 1a-c.
- the coupled transport unit assembly 3Axy can be released again and each transport unit 3Ax, 3Ay can again be moved individually on the corresponding transport level TEA, TEB.
- the coupling of two transport units 3Ax, 3Ay can be advantageous compared to the previously shown double-acting transport unit 3B. On the one hand, the higher can be
- Driving force potential of the double drive (by the drive coils 6 of the first and second planar motors 2A, 2B) can be used when the transport unit assembly 3Axy is moved in the longitudinal direction X along both transport planes TEA, TEB.
- the transport unit network 3Axy can be released again for the movement in only one transport level TEA, TEB.
- the better weight distribution of a single-acting transport unit 3A can be used, for example during movement in the (here) vertical transport plane TEA, since the center of gravity is closer to the transport plane TEA than with a multi-acting transport unit 3B, 3C.
- the L-shaped profile of the base body 9 (in particular the legs 9B) of the double-acting transport unit 3B in FIG. 1c has a compared to the single-acting transport unit 3A in the Y-direction further removed from the transport plane TEA
- Transport units 3 must be taken into account. A coupling of single-acting
- Transport units 3A to a transport unit group is advantageous because the
- Transport unit group for the movement in only one transport level TEi can be released again.
- single or multiple acting transport units 3, each having one or more coupling devices 1 1, could be connected by means of a connecting unit 15 to one or more other single or multiple acting transport units 3 (with or without coupling devices 1 1) that are in another Transport level TEi are movable. This further increases the flexibility of the transport device 1, since many different combinations are possible.
- Another embodiment of a transport device 1 is shown in FIG. The
- the transport planes TEF, TEG it would also be possible for the transport planes TEF, TEG to be inclined relative to one another at an arrangement angle g ⁇ 45 °, as was shown with reference to the fifth planar motor 2E ‘FIG. 1 c and FIG. 1 b.
- TEG of the planar motors 2F, 2G there are each single-acting
- Transport units 3A1, 3A2 provided, the two-dimensional in the respective
- Transport level TEF TEG are movable.
- the movement is controlled as in the examples shown above via two planar motor control units (not shown) and / or via a higher-level transport unit control unit which controls the drive coils of the planar motors 2F, 2G in order to interact with the drive magnets 4 of the transport units 3A1, 3A2.
- the planar motors 2F, 2G can in turn also be constructed in a modular manner from transport segments TSi. A more detailed description of the functionality is not given at this point.
- connection unit 15 can be rigid or flexible.
- connection unit 15 could have an essentially rigid rod which is connected in an articulated manner to both transport units 3A1, 3A2, as shown in FIG.
- connection unit 15 is preferably designed to be adjustable, so that a length of the connection unit 15 can be changed during the movement of the transport units 3A1, 3A2. This is advantageous since the distance between the transport units 3A can change during the movement.
- the transport unit 3A of the first planar motor 2F can carry out the indicated movement profile BPA1 and the transport unit 3A of the second planar motor 2G carry out the indicated movement profile BPA2. With that the two would be identical to the transport unit 3A of the first planar motor 2F and the transport unit 3A of the second planar motor 2G carry out the indicated movement profile BPA2. With that the two would be identical to the transport unit 3A of the first planar motor 2F and the transport unit 3A of the second planar motor 2G carry out the indicated movement profile BPA2. With that the two would be
- Transport units 3A1, 3A2 are moved essentially in opposite directions, whereby the distance between the transport units 3A1, 3A2 increases, as indicated by the difference in length AL in FIG.
- the distance could also be reduced, for example if the transport levels TEF, TEG are not arranged parallel, but are arranged inclined to one another. In the illustrated case of the parallel
- Transport levels TEF, TEG, the length of the connecting unit 15 is preferably adjustable between a minimum length and a maximum length.
- the minimum length corresponds, for example, to the distance between directly opposite transport units 3A1, 3A2 and the maximum length corresponds to the distance between the transport units 3A1, 3A2 if these are located at diagonally opposite corner points EPF, EPG of the transport levels TEF, TEG.
- connection unit 15 By arranging a connection unit 15, very complex movement patterns can be carried out. For example, by specifying certain movement profiles BPA1, BPA2 for the two transport units 3A1, 3A2, a desired resulting movement profile of a center point MP (or any other point) of the connection unit 15 can be generated, which results from an overlay of the
- Movement profiles BPA1, BPA2 result.
- one or more receiving units 16 could also be provided on the connecting unit 15 in order to receive and transport one or more objects, for example a hook as shown. Since a planar motor 2 also enables the transport unit 3A to be rotated about the vertical axis, e.g. a pivoting movement of a receiving unit 16 can also be carried out, as shown in FIG. 6 by the arrow on the transport unit 3A1 and the dashed line
- a second pair of transport units 3B, 3A4 with a connection unit 15 could also be provided, the connection units 15 naturally also being designed differently.
- the double-acting transport unit 3B and the single-acting transport unit 3A4 are e.g. connected to a rigid beam. A certain relative movement between two connecting units 15 would thus also be possible, whereby the flexibility of the transport device 1 can be increased further.
- the receiving unit 16 of one connecting unit 15 transfers an object to a receiving unit 16 of another connecting unit 15, etc.
- the transport units 3A1, 3A2 could be moved in such a way that an object 01, which is transported on the second connecting unit 15, is picked up by means of the receiving unit 16 provided on the connecting unit 15.
- the receiving unit 16 is designed as a hook and an eyelet for engaging the hook is arranged on the object 01.
- a separate planar motor 2 long stator linear motor or a continuous conveyor can also be provided. This could move the two
- Transport units 3B, 3A4 are superimposed by a further or more degrees of freedom of movement.
- planar motors 2 would also be conceivable, for example by connecting the two planar motors 2F, 2G by means of a further planar motor 2H, which forms a (lower horizontal) transport level TEH, which is then normal to the transport levels TEF, TEG.
- transport level TEH could
- a single-acting transport unit 3A3 can again be provided, by means of which a further object 02 is moved, which can be picked up by the pick-up unit 16 with appropriate synchronization of the movement profiles.
- more than two transport units 3 by means of one or more
- Connection units 15 can be connected or one or more
- Coupling devices 11 can be provided on the transport units 3. It can be seen from this that, in addition to the variants shown, many other configurations are possible. The specific selection, number and combination of planar motors 2, (single and / or multiple acting) transport units 3, coupling devices 11 and connection units 15 is of course at the discretion of the person skilled in the art.
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- Engineering & Computer Science (AREA)
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- Chemical & Material Sciences (AREA)
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Abstract
Description
Claims
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Application Number | Priority Date | Filing Date | Title |
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AT504892019 | 2019-05-28 | ||
PCT/EP2020/064883 WO2020239933A1 (en) | 2019-05-28 | 2020-05-28 | Transport device |
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EP3976511A1 true EP3976511A1 (en) | 2022-04-06 |
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EP20730405.6A Pending EP3976511A1 (en) | 2019-05-28 | 2020-05-28 | Transport device |
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US (1) | US20220239212A1 (en) |
EP (1) | EP3976511A1 (en) |
JP (1) | JP2022534399A (en) |
CN (1) | CN113950455B (en) |
CA (1) | CA3141948A1 (en) |
WO (1) | WO2020239933A1 (en) |
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DE102020205002A1 (en) | 2020-04-21 | 2021-10-21 | Robert Bosch Gesellschaft mit beschränkter Haftung | Transport system |
DE102021202915A1 (en) | 2021-03-25 | 2022-09-29 | Robert Bosch Gesellschaft mit beschränkter Haftung | Non-contact conveyor |
DE102022119231A1 (en) * | 2022-08-01 | 2024-02-01 | Krones Aktiengesellschaft | Device and method for transporting containers |
IT202200018624A1 (en) * | 2022-09-13 | 2024-03-13 | I M A Industria Macch Automatiche S P A In Sigla Ima S P A | EQUIPMENT FOR TRANSPORTING OBJECTS |
DE102022129508A1 (en) | 2022-11-08 | 2024-05-08 | Beckhoff Automation Gmbh | Method for operating a planar drive system and planar drive system |
Family Cites Families (11)
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DE19531520A1 (en) | 1995-07-20 | 1997-01-23 | Heisel Uwe Prof Dr Ing Dr H C | Device for positioning and fixing bodies |
AT409043B (en) | 2000-02-07 | 2002-05-27 | Heinz Peter Dipl Brandstetter | DEVICE AND METHOD FOR DETERMINING TWO-DIMENSIONAL POSITIONS |
KR101829030B1 (en) | 2011-10-27 | 2018-03-29 | 더 유니버시티 오브 브리티쉬 콜롬비아 | Displacement devices and methods for fabrication, use and control of same |
JP5723426B2 (en) * | 2013-09-02 | 2015-05-27 | 株式会社カイジョー | Drive mechanism and manufacturing apparatus |
CN106660648B (en) * | 2014-07-25 | 2020-07-03 | 罗伯特·博世有限公司 | Transport device |
DE102014214696A1 (en) | 2014-07-25 | 2016-01-28 | Robert Bosch Gmbh | Device for transporting a container relative to a filling station |
DE102014214693A1 (en) * | 2014-07-25 | 2016-01-28 | Robert Bosch Gmbh | Device for weighing a container |
TWI732285B (en) * | 2015-01-23 | 2021-07-01 | 美商應用材料股份有限公司 | Semiconductor process equipment |
US9633878B1 (en) * | 2016-04-21 | 2017-04-25 | Texas Instuments Incorporated | Conveyor apparatus and method for transporting leadframe |
DE102016224951A1 (en) * | 2016-12-14 | 2018-06-14 | Robert Bosch Gmbh | Conveying device with a stator for the controlled transport of a transport body relative to the stator |
EP3602759B1 (en) | 2017-03-27 | 2023-06-07 | Planar Motor Incorporated | Robotic devices and methods for fabrication, use and control of same |
-
2020
- 2020-05-28 CN CN202080038449.0A patent/CN113950455B/en active Active
- 2020-05-28 WO PCT/EP2020/064883 patent/WO2020239933A1/en unknown
- 2020-05-28 CA CA3141948A patent/CA3141948A1/en active Pending
- 2020-05-28 EP EP20730405.6A patent/EP3976511A1/en active Pending
- 2020-05-28 JP JP2021570133A patent/JP2022534399A/en active Pending
- 2020-05-28 US US17/614,408 patent/US20220239212A1/en active Pending
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US20220239212A1 (en) | 2022-07-28 |
CN113950455A (en) | 2022-01-18 |
CN113950455B (en) | 2023-08-04 |
CA3141948A1 (en) | 2020-12-03 |
JP2022534399A (en) | 2022-07-29 |
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