EP3961175A4 - Drucksensor - Google Patents

Drucksensor Download PDF

Info

Publication number
EP3961175A4
EP3961175A4 EP20796367.9A EP20796367A EP3961175A4 EP 3961175 A4 EP3961175 A4 EP 3961175A4 EP 20796367 A EP20796367 A EP 20796367A EP 3961175 A4 EP3961175 A4 EP 3961175A4
Authority
EP
European Patent Office
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20796367.9A
Other languages
English (en)
French (fr)
Other versions
EP3961175A1 (de
Inventor
Hiroshi Kodama
Naoki Yoshida
Kaori MIYASHITA
Eiji Takeda
Nobuaki Yamada
Yoshihiro Tomomatsu
Yasushi Yanagisawa
Yusuke MIDORIKAWA
Shirou KAMANARU
Kenichi Yokoyama
Inao Toyoda
Hisayuki Takeuchi
Naohisa NIIMI
Masao Takahashi
Yasutake Ura
Kouji Asano
Yukihiro KAMADA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Nagano Keiki Co Ltd
Original Assignee
Denso Corp
Nagano Keiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2020071350A external-priority patent/JP7226385B2/ja
Application filed by Denso Corp, Nagano Keiki Co Ltd filed Critical Denso Corp
Publication of EP3961175A1 publication Critical patent/EP3961175A1/de
Publication of EP3961175A4 publication Critical patent/EP3961175A4/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/18—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by resistance strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Measuring Fluid Pressure (AREA)
EP20796367.9A 2019-04-26 2020-04-24 Drucksensor Pending EP3961175A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019085904 2019-04-26
JP2020071350A JP7226385B2 (ja) 2019-04-26 2020-04-10 圧力センサ
PCT/JP2020/017819 WO2020218570A1 (ja) 2019-04-26 2020-04-24 圧力センサ

Publications (2)

Publication Number Publication Date
EP3961175A1 EP3961175A1 (de) 2022-03-02
EP3961175A4 true EP3961175A4 (de) 2022-06-22

Family

ID=72942812

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20796367.9A Pending EP3961175A4 (de) 2019-04-26 2020-04-24 Drucksensor

Country Status (3)

Country Link
US (1) US11940347B2 (de)
EP (1) EP3961175A4 (de)
WO (1) WO2020218570A1 (de)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4003127A (en) * 1974-11-25 1977-01-18 General Motors Corporation Polycrystalline silicon pressure transducer
US5518951A (en) * 1991-08-26 1996-05-21 Span Instruments, Inc. Method for making thin film piezoresistive sensor
US5681997A (en) * 1994-12-20 1997-10-28 The Foxboro Company Excitation of polysilicon based piezoresistive pressure sensors
US6022756A (en) * 1998-07-31 2000-02-08 Delco Electronics Corp. Metal diaphragm sensor with polysilicon sensing elements and methods therefor

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037177A (ja) 1983-08-09 1985-02-26 Nec Corp 半導体圧力センサ
JP3114403B2 (ja) 1992-12-22 2000-12-04 富士電機株式会社 半導体圧力センサ
US5867886A (en) * 1997-10-20 1999-02-09 Delco Electronics Corp. Method of making a thick film pressure sensor
JP2001223449A (ja) 2000-02-09 2001-08-17 Toshiba Corp 多層プリント基板
DE10014984A1 (de) * 2000-03-25 2001-10-18 Bosch Gmbh Robert Herstellungsverfahren für ein Dünnschicht-Bauelement, insbesondere einen Dünnschicht-Hochdrucksensor
JP4356238B2 (ja) * 2000-12-25 2009-11-04 株式会社デンソー 圧力センサ
JP2002222910A (ja) 2001-01-25 2002-08-09 Mitsubishi Electric Corp 半導体装置
JP2002350257A (ja) * 2001-05-24 2002-12-04 Denso Corp 圧力センサ
JP4452526B2 (ja) 2004-03-03 2010-04-21 長野計器株式会社 歪検出素子及び圧力センサ
US7192819B1 (en) * 2004-07-20 2007-03-20 National Semiconductor Corporation Semiconductor sensor device using MEMS technology
JP4431592B2 (ja) 2007-03-26 2010-03-17 長野計器株式会社 センサ及びセンサの製造方法
JP4383461B2 (ja) 2007-03-14 2009-12-16 長野計器株式会社 センサ及びセンサの製造方法
JP4719727B2 (ja) * 2007-09-05 2011-07-06 長野計器株式会社 圧力センサの製造方法および圧力センサ
US9746390B2 (en) 2015-02-26 2017-08-29 Sensata Technologies, Inc. Microfused silicon strain gauge (MSG) pressure sensor package
JP2017032489A (ja) 2015-08-05 2017-02-09 株式会社デンソー 圧力センサ、圧力センサの製造方法
JP2017129540A (ja) 2016-01-22 2017-07-27 セイコーエプソン株式会社 圧力センサー、高度計、電子機器および移動体
JP2018151191A (ja) 2017-03-10 2018-09-27 株式会社デンソー 圧力センサおよびその製造方法
US10508958B2 (en) 2017-03-16 2019-12-17 Fuji Electric Co., Ltd. Semiconductor pressure sensor with piezo-resistive portions with conductive shields
JP2018165681A (ja) 2017-03-28 2018-10-25 セイコーエプソン株式会社 圧力センサー、圧力センサーの製造方法、圧力センサーモジュール、電子機器および移動体
US10781094B2 (en) * 2017-10-23 2020-09-22 Te Connectivity Corporation Pressure sensor assembly mounted to a ceramic substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4003127A (en) * 1974-11-25 1977-01-18 General Motors Corporation Polycrystalline silicon pressure transducer
US5518951A (en) * 1991-08-26 1996-05-21 Span Instruments, Inc. Method for making thin film piezoresistive sensor
US5681997A (en) * 1994-12-20 1997-10-28 The Foxboro Company Excitation of polysilicon based piezoresistive pressure sensors
US6022756A (en) * 1998-07-31 2000-02-08 Delco Electronics Corp. Metal diaphragm sensor with polysilicon sensing elements and methods therefor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2020218570A1 *

Also Published As

Publication number Publication date
WO2020218570A1 (ja) 2020-10-29
US11940347B2 (en) 2024-03-26
EP3961175A1 (de) 2022-03-02
US20220042868A1 (en) 2022-02-10

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