EP3948934A1 - Elektrode für eine gasentladungslampe und gasentladungslampe - Google Patents
Elektrode für eine gasentladungslampe und gasentladungslampeInfo
- Publication number
- EP3948934A1 EP3948934A1 EP20711117.0A EP20711117A EP3948934A1 EP 3948934 A1 EP3948934 A1 EP 3948934A1 EP 20711117 A EP20711117 A EP 20711117A EP 3948934 A1 EP3948934 A1 EP 3948934A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrode
- chambers
- anode
- plateau
- base body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
- H01J61/523—Heating or cooling particular parts of the lamp
- H01J61/526—Heating or cooling particular parts of the lamp heating or cooling of electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
Definitions
- the invention is directed to discharge lamps and the electrodes arranged therein.
- the electrodes arranged therein are directed to discharge lamps and the electrodes arranged therein.
- Electrodes such as for example at
- Short arc discharge lamps is the case. Examples are mercury discharge lamps (e.g. OSRAM HBO ®) and
- Xenon discharge lamps e.g. OSRAM XBO®
- photolithographic applications microchips
- Projection applications can be used.
- the invention can be used in all lamp-like light sources in which at least one electrode is arranged in a translucent vessel (e.g. a glass bulb).
- a translucent vessel e.g. a glass bulb
- the invention can also be used in laser-based plasma light sources (so-called laser-sustained plasma light sources).
- the electrodes especially the anodes in the case of
- Lead discharge vessel which can result in a decrease in light and / or a reduction in lamp life.
- the aim of the invention is therefore to ensure the best possible cooling (heat dissipation) from the front electrode area close to the discharge arc, in particular the
- Thermal conductivity of the electrode should be improved.
- approaches that are intended to improve the cooling of the electrode ie heat dissipation from the electrode.
- One possibility is to coat the anode with materials that have better emissivity in the
- Heat radiation used serve to radiate heat from the surface of the electrode.
- Another approach aims to improve the
- the electrode can have an inner section or a core area
- An example are anodes which have a hermetically sealed interior which is covered with a low-melting metal, e.g. Silver or copper
- the low-melting metal enclosed in the interior melts and can in some cases also change into the gaseous state of aggregation.
- thermal energy is absorbed by the low-melting metal and, among other things, by convection processes from the front, the discharge arc
- FIG. 18 schematically shows a gas discharge lamp 10 with electrodes 1 and 2.
- the gas discharge lamp 10 which is preferably as
- High-pressure mercury gas discharge lamp is formed, represents a vertically operated discharge lamp 10, so that the electrode axes of the two that run parallel to one another, in particular run on a line Electrodes 1 and 2 are also aligned vertically.
- the electrode 1 is a cathode with a cathode tip 11 and a cylindrical tip
- Area 12 is formed, while the electrode 2 represents the anode and has an anode plateau 14 and also a cylindrical area 13.
- the anode 2 is
- the two electrodes 1 and 2 are in a discharge vessel 7, for example one
- Discharge vessel 7 are a cathode holding rod 3 and a
- Anode holding rod 4 is provided. These are internal
- Power supply lines 5 and 6 are electrically connected to the connection sockets 8 and 9, the connection sockets 8, 9 in turn being able to be connected to an energy source via suitable external power supply lines (not shown) for operating the discharge lamp 10.
- the high-pressure gas discharge lamp 10 is preferably operated with high power, in particular in the kilowatt range. This results in very high levels above all at the anode 2
- the object of the present invention is therefore to provide a
- One aspect is the best possible cooling of the electrode, especially the front,
- the thermal conductivity of the electrode is to be improved.
- the invention is also directed to a gas discharge lamp with at least one
- the invention described below aims at a
- Anode / electrode in the interior of their usually cylindrical base body on two or more chambers should be such that a more strongly directed convection is achieved for more efficient heat transport. Furthermore, local heating should be avoided and greater flexibility with regard to the lamp burning position should be achieved. It also enables
- Multi-chamber design provides greater stability in the critical area of the electrode near the plateau.
- the anode should have n chambers with 2 ⁇ n
- the anode comprises a first
- Anode part, the closure part or cover, and a second anode part, the vessel part or pot (recess in the
- the chambers are hermetically connected to each other.
- the chambers are located in the lower part of the anode (pot).
- the multi-chamber design according to the invention has the advantage of a very high degree of flexibility in terms of configuration, so that depending on the specific application - conditional
- the chambers can all have the same shape and the same depth, for example, which is particularly easy to implement in terms of production technology.
- the chambers can also have different shapes and / or depths from one another (see, for example, FIGS. 7, 12). Possible shapes can, for example, through their cross-sectional area
- Suitable manufacturing processes are, for example, drilling, turning or milling.
- Chamber shapes (angular, semicircular etc.) can e.g. when
- feedstock anodes are produced.
- a powder is made up of the carrier material (e.g. tungsten) and a binder by e.g. Molds can be designed in almost any way.
- the binder is then extracted and the blank is re-compacted.
- Electrode is formed out (and whereby a vessel or pot or a pot-like recess is created in the base body) and those processes in which the individual chambers are produced outside the base body of the electrode and inserted into the base body of the electrode in a subsequent process step, the base body must have a suitably dimensioned cavity for this purpose.
- the multi-chamber design has a high degree of flexibility in terms of configuration, since basically all geometric and non-geometric properties of the chamber are individually adapted and so is the overall system
- the length of the individual chambers can be adjusted, among other things, in order to achieve an optimal compromise between the best possible cooling and stability of the electrode depending on the respective position of the chamber in the (usually cylindrical) base body of the electrode.
- chambers that are close to the symmetry axis of the electrode can be adjusted, among other things, in order to achieve an optimal compromise between the best possible cooling and stability of the electrode depending on the respective position of the chamber in the (usually cylindrical) base body of the electrode.
- Electrode base body are shorter than chambers that have a greater distance to the axis of symmetry of the electrode base body (see Fig. 12).
- the distance Si of the individual chambers i can be optimized depending on their position in relation to the arc attachment point in order to prevent the risk of deformation or even leakage in this area.
- the arrangement of the individual chambers i in the interior of the electrode is preferably configured symmetrically, in particular rotationally symmetrical to the longitudinal axis of the electrode. This has the advantage that, in the case of a vertical burning position that often occurs in practice, the heat flow is uniform over the
- Electrode cross-section (for example, seen in a plane perpendicular to the longitudinal axis of the electrode) can be distributed in order to achieve efficient cooling of the electrode and to to avoid local heating and damage. Conceivable arrangements are shown in FIGS. 3 to 6, 8 and 9.
- Arrangement of the chambers help reduce the convection currents and heat flows in relation to the direction of gravity
- a greater number of chambers can be made available on that side of the electrode that comes closest to the floor in the case of a lamp inclined away from the vertical than on the opposite side of the electrode (see FIG. 7, the the electrode side shown to the right of the dashed line in the figure is the side that comes closest to the ground).
- each of the chambers can be filled independently of the other chambers. This relates both to the type of materials filled in as well as to their quantity (% by volume or% by mass).
- Heat transport is particularly low-melting metals such as silver, copper, gold and others
- a protective gas for example a noble gas such as argon, can be enclosed in the respective chamber.
- additional heat conductors can be non-metallic materials such as diamond or ceramic materials such as boron nitride,
- Aluminum nitride, etc. are preferably introduced into the respective chamber in a powdery form. Details on this are disclosed in DE10 2018 220 944.8.
- a roughening or structuring of the surface can be created, for example by mechanical processes (e.g. sandblasting, sputtering, grinding, etc.), chemical processes (e.g. etching) or other physical processes (e.g. laser structuring,
- Inner surfaces of the chambers i are arranged to be suitable.
- Corresponding concepts are disclosed in DE 102007038909 A1, for example.
- An optimal number of chambers basically depends on various factors, including the
- geometric properties of the individual chambers i e.g. diameter, length, shape, etc.
- the filling of the individual chambers i material type, filling level, additional
- the nature of the walls of the chambers i and the arrangement of the individual chambers i belong to one another.
- the individual factors can influence each other. For example, there is an achievable
- the packing density of chambers i in the base body of the electrode depends on the diameter and shape of the individual chambers i. In addition, the ratio of the chamber interior surface to
- Chamber volumes play a role when it comes to achieving efficient, directional heat flow. Furthermore, the ratio of the chamber volume to the surrounding
- Tungsten volume play a role with regard to the current carrying capacity of the anode. As already mentioned, all of these considerations can also depend on the operating conditions of the lamp, in particular on its burning position.
- the conventional solution with only one chamber carries the risk of plateau deformation.
- the tendency to deformation can be reduced by
- Plateaus is.
- the projection of the chamber cross-sections onto the The plateau has the areas Ai, A2, A 3 ... A n ,
- 0.1 ⁇ A s / A p ⁇ 0.9, particularly advantageously 0.3 ⁇ A s / A p ⁇ 0.8 should apply.
- the heat can no longer be efficiently dissipated through the material in the chambers. Is this
- the distance a ⁇ j between the chambers can be chosen to be small, with a lower limit mainly due to the
- Processing is determined or by the risk of
- the distance Si of the chambers to the anode plateau is influenced by two things: on the one hand, the distance should be small in order to dissipate the heat as effectively as possible.
- the tendency to deform now increases with the diameter (or the greatest extent) di of the chamber, ie by choosing a smaller diameter one can also reduce the distance to the plateau.
- the distance Si should advantageously now be at least 3mm or at least di / 3, that is Si> di / 3 and Si> 2mm.
- the distance ri of the chambers to the edge should - like that to the plateau - be chosen to be small, because heat radiation via the jacket of the anode also effectively contributes to the temperature reduction at the plateau.
- the tendency to deform is due to the lower temperatures - compared to the plateau - and the lack of pressure from the plasma. However, cracks due to tension must be avoided, so that the following relationship should advantageously be maintained: Si> di / 4 and Si> 2mm.
- Si> di / 4 and Si> 2mm Alternatively or in addition to those described above
- FIG. 17B an example is shown in which an anode has four chambers K1 to K4, which along a
- the chambers each have the same dimensions (length, width, depth) and have a rectangular cross section. As already described in detail above, there is also a wide range for these embodiments
- the individual chambers i can have different geometric and non-geometric features, so for example chambers in the vicinity of the anode plateau can have different geometric dimensions than those which are further away from the anode plateau.
- This groove now houses a spiral made of one
- solder material must be selected so that it does not liquefy again during later operation.
- Mercury discharge lamps would be molybdenum / ruthenium, titanium / tungsten, zirconium / tungsten or platinum / tungsten. The temperatures depend on the respective area of application
- solder is not introduced in the form of a helix, but rather as a metal foil that is wrapped around the stopper and pressed into the chamber with it.
- the plug shape can be cylindrical or conical.
- the sealing is achieved as under a) by a thermal step (e.g. furnace annealing).
- a third possibility is to apply solder to the end face of the pot so that all chambers are separated from one another after the soldering process, but are closed with one and the same stopper (here the end face of the pot).
- the solder is introduced spherically into depressions, see, for example, FIG. 14.
- the dashed lines here show depressions into which the solder is filled in the form of small spheres.
- Another possibility is to provide the stopper and the respective chamber with a screw thread so that the stopper can be screwed into the chamber.
- the plug can also be sealed with solder.
- the conventional variant with one chamber has the disadvantage that the high thermal load can deform the plateau. With a corresponding load, the resulting depression in the plateau area can become so large that the material is no longer mechanically
- the distance s ⁇ between the chambers and the plateau can be selected to be smaller, without such deformations and possible lamp failure.
- FIG. 1A shows a schematic illustration of a plan view of an anode according to an exemplary embodiment of the invention
- FIG. 1B is a schematic representation of a sectional view of the anode from FIG. 1A;
- Fig. IC a schematic representation of a
- FIG. 2A shows a schematic illustration of a plan view of an anode according to a second exemplary embodiment of the invention
- FIG. 2B shows a schematic illustration of a longitudinal section of the anode from FIG. 2A;
- Fig. 2C is a schematic representation of a
- Fig. 3-9 each a schematic representation of a
- Fig. 10 is a schematic representation of a
- FIG. 12 shows a schematic representation of a sectional view of an anode with chambers of different lengths according to an exemplary embodiment of the invention
- FIG. 13 shows a schematic representation of a sectional view of an anode with a separate stopper in a chamber and an additional cover according to another
- Embodiment of the invention shows a schematic illustration of a plan view of an end face of an anode with three chambers according to an exemplary embodiment of the invention
- 17A, 17B each show a schematic representation of a
- FIG. 18 shows a schematic illustration of a plan view of a gas discharge lamp according to a
- Figures 1A and 1B each show a schematic
- the anode 2 consists of a circular cylindrical vessel part 22, the pot, and a closure part 24, the lid.
- the pot 22 has a
- the two tubular chambers 221 and 222 are partially filled with silver 26 (symbolized as a dotted area).
- the opposite end of the pot 22 is closed with the cover 24.
- the cover 24 also closes
- the cover 24 has a bore 241 for the anode holder (not shown here).
- L mean the length of the anode 2 from
- FIG. 2A shows a plan view and FIGS. 2B and 2C schematically show a longitudinal or cross section of an anode 20 according to a second exemplary embodiment of the invention.
- pot 22 of the anode 20 has five chambers 221-225, each of which has a circular cross-section and is closed separately with an associated stopper 261-265 (only two plugs 261 and 262 are shown in FIG. 2B).
- FIGS. 3 to 9 each show a schematic representation of a cross section of an anode (similar to FIG. 2c) according to seven further exemplary embodiments of the invention. They differ in the number and / or shape and / or the diameter of the chambers. In order to make the chambers easier to see, the cross section is laid through the part filled with silver, the silver being symbolized as a dotted area as in FIG. 1B. Fig. 3 shows one
- Anode pot 22 with five chambers 221-225 similar to that already shown in FIG. 2C. 4 shows an anode pot 22 with six chambers 221-226, the chamber 226 having a smaller diameter in the center of the axis than the remaining five chambers 221-225.
- FIG. 5 shows an anode pot 22 with seven chambers 221-227, all of which have have the same diameter.
- 6 shows an anode pot 22 with only three chambers 221-223. The respective diameter of these three chambers 221-223 is greater than the respective diameter of the seven chambers 221-227 in the previous one
- Embodiment. 7 shows an anode pot 22 likewise with three chambers 221-223.
- a chamber 221 is designed with an oval diameter that is adapted to the curvature of the anode pot 22.
- the other two chambers 222 and 223, however, have a circular cross-section, as in the previous exemplary embodiments.
- two chambers 221, 222 are provided which are designed with mutually complementary semicircular cross-sections.
- FIG. 9 shows an anode pot 22 with three chambers 221, 222 and 223, which are designed as separate complementary parts of a cylinder-like arrangement with a composite circular cross section.
- FIGS. 10 and 11 each show, in a schematic representation, a partial section of an anode 2 ′ and 2 ′′ according to two further exemplary embodiments of the invention. These are special anode designs that im
- the sectional view has an anode trough 14 'in an angular shape
- the anode trough 14 ′′ has a round shape.
- Figure 12 shows a schematic representation of a
- Two chambers 221, 222 have the same diameter di , 2 and the same
- Figure 13 shows a schematic representation of a
- FIG. 1 Sectional view of an anode 200 according to a variant in which a chamber 221 with an associated separate stopper 266 is locked.
- a solder wire coil 2661 is provided, which is wound around the circumference of the plug 266.
- the pot 22 of the anode 200 is closed with a lid 24 which also covers the stopper 266 of the chamber 221.
- FIG 14 shows, in a schematic representation, a top view of an anode pot 220 with three chambers 221-223. The end face of the anode pot 220 is shown, onto which for
- anode cover is put on and connected by means of solder (the latter is not shown here).
- the dashed lines 230 symbolize depressions in the base body of the anode pot 220 into which solder in the form of small spheres is filled (the latter are not shown here).
- FIGS. 15 and 16 each show the projection areas A1, A2, A3 in a schematic representation
- FIGS. 17A and 17B show a schematic representation of a plan view and a longitudinal section along the line
- Embodiment of the invention Here four chambers K1 - K4 are arranged one behind the other in the direction of the longitudinal axis A within the anode pot 22.
- Figure 18 shows a schematic representation of a
- the anode 2 corresponds to one of those according to the invention shown in FIGS. 1 to 17 Embodiments.
- the anode 2 that cannot be seen here, reference is made to the corresponding passages in the associated description of the figures and the general description.
- Gas discharge lamp 10 is referred to the corresponding description above.
- the invention relates to an electrode, in particular anode, for a gas discharge lamp, the electrode being a
- Has base body which includes several chambers.
- the chambers can be arranged parallel to one another or in series with respect to a longitudinal axis of the electrode and are coated with a low-melting metal, e.g. Silver or copper, at least partially filled.
- a low-melting metal e.g. Silver or copper
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Discharge Lamp (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102019203992 | 2019-03-25 | ||
| PCT/EP2020/056387 WO2020193121A1 (de) | 2019-03-25 | 2020-03-10 | Elektrode für eine gasentladungslampe und gasentladungslampe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP3948934A1 true EP3948934A1 (de) | 2022-02-09 |
| EP3948934B1 EP3948934B1 (de) | 2025-06-25 |
Family
ID=69810834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP20711117.0A Active EP3948934B1 (de) | 2019-03-25 | 2020-03-10 | Elektrode für eine gasentladungslampe und gasentladungslampe |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP3948934B1 (de) |
| JP (1) | JP7223162B2 (de) |
| CN (1) | CN113711334B (de) |
| WO (1) | WO2020193121A1 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7688840B2 (ja) * | 2021-10-04 | 2025-06-05 | ウシオ電機株式会社 | 放電ランプ、放電ランプに用いられる電極、及び放電ランプの製造方法 |
| JP7702070B2 (ja) * | 2021-11-29 | 2025-07-03 | ウシオ電機株式会社 | 放電ランプ、及び当該放電ランプに使用される電極 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3311769A (en) * | 1965-04-12 | 1967-03-28 | John A Schmidtlein | Gaseous discharge lamp with internally cooled eletrodes |
| JPS5247911Y2 (de) * | 1972-11-14 | 1977-10-31 | ||
| JPS5299673A (en) * | 1976-02-17 | 1977-08-20 | Ushio Electric Inc | Water cooled electrode type high pressure discharge lamp |
| JPH10208696A (ja) * | 1997-01-27 | 1998-08-07 | Ushio Inc | ショートアーク型放電ランプ |
| WO2003007332A1 (en) * | 2001-07-13 | 2003-01-23 | Mel Lighting Ltd. | Gas discharge lamp |
| JP3838110B2 (ja) | 2002-01-31 | 2006-10-25 | ウシオ電機株式会社 | 放電ランプ用陽電極およびショートアーク放電ランプ |
| JP3994880B2 (ja) | 2002-04-26 | 2007-10-24 | ウシオ電機株式会社 | 放電ランプ |
| US20060170361A1 (en) * | 2005-01-31 | 2006-08-03 | Osram Sylvania Inc. | Single-ended Arc Discharge Vessel with a Divider Wall |
| GB0523478D0 (en) * | 2005-11-18 | 2005-12-28 | Lg Philips Displays B V | Improvements in and relating to electrodes |
| US7495396B2 (en) * | 2005-12-14 | 2009-02-24 | General Electric Company | Dielectric barrier discharge lamp |
| DE102007038909B4 (de) | 2007-08-17 | 2021-07-15 | Osram Gmbh | Wärmeleitrohr und Anordnung mit Wärmeleitrohr |
| DE102009021235B4 (de) | 2009-05-14 | 2018-07-26 | Osram Gmbh | Entladungslampe mit beschichteter Elektrode |
| JP4998840B2 (ja) * | 2010-07-23 | 2012-08-15 | ウシオ電機株式会社 | ショートアーク型放電ランプ |
| JP2013118202A (ja) * | 2013-03-22 | 2013-06-13 | Yumex Inc | ショートアーク型放電灯用電極 |
| TWI601183B (zh) | 2013-04-24 | 2017-10-01 | Orc Manufacturing Co Ltd | Discharge lamp |
| TWI627656B (zh) | 2013-09-24 | 2018-06-21 | Orc Manufacturing Co Ltd | Discharge lamp tube, electrode for discharge lamp tube and method of manufacturing the same |
| JP6098676B2 (ja) * | 2015-06-29 | 2017-03-22 | ウシオ電機株式会社 | ショートアーク型放電ランプ |
-
2020
- 2020-03-10 WO PCT/EP2020/056387 patent/WO2020193121A1/de not_active Ceased
- 2020-03-10 JP JP2021557148A patent/JP7223162B2/ja active Active
- 2020-03-10 EP EP20711117.0A patent/EP3948934B1/de active Active
- 2020-03-10 CN CN202080022906.7A patent/CN113711334B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP7223162B2 (ja) | 2023-02-15 |
| CN113711334B (zh) | 2024-06-28 |
| CN113711334A (zh) | 2021-11-26 |
| EP3948934B1 (de) | 2025-06-25 |
| WO2020193121A1 (de) | 2020-10-01 |
| JP2022525981A (ja) | 2022-05-20 |
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