EP3924623B1 - Scrollpumpe - Google Patents

Scrollpumpe Download PDF

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Publication number
EP3924623B1
EP3924623B1 EP20707775.1A EP20707775A EP3924623B1 EP 3924623 B1 EP3924623 B1 EP 3924623B1 EP 20707775 A EP20707775 A EP 20707775A EP 3924623 B1 EP3924623 B1 EP 3924623B1
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EP
European Patent Office
Prior art keywords
flexible
flexible member
inner portion
pump according
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP20707775.1A
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English (en)
French (fr)
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EP3924623A1 (de
Inventor
Peter David Jones
Richard Glyn Horler
Peter Charles LAMB
Ian David Stones
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
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Edwards Ltd
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Filing date
Publication date
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Publication of EP3924623A1 publication Critical patent/EP3924623A1/de
Application granted granted Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0054—Special features particularities of the flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/02—Rotary-piston machines or pumps of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C2/025—Rotary-piston machines or pumps of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents the moving and the stationary member having co-operating elements in spiral form

Definitions

  • the field of the invention relates to scroll pumps.
  • a traditional scroll pump uses two rigid matched spiral scrolls that mesh together.
  • One of the scrolls has an orbital motion with respect to the other thereby trapping and pumping pockets of fluid between the involutes or scrolls.
  • one of the scrolls is fixed, while the other is mounted on a drive shaft with an eccentric centre such that it orbits eccentrically without rotating.
  • Another method for producing the relative orbiting motion is by co-rotating the scrolls, in synchronous motion, but with offset axes of rotation.
  • the two scrolls are mounted on parallel shafts and the relative motion is the same as if one were orbiting and the other stationary.
  • the document WO 2017/111744 A1 discloses a peristaltic pump as known in the art.
  • the peristaltic pump has a spiral spring acting as a pumping element which is activated by means of a magnetic field.
  • the document US 2007/048153 A1 discloses an insulin pump as known in the art.
  • the driving mechanism of the pump may use a spiral spring to help press fluid out of a pumping tube.
  • a first aspect provides a pump comprising: two plates mounted parallel to and separated from each other; an outer member surrounding at least one flexible member arranged between and substantially perpendicular to said two plates, said at least one flexible member having a spiral form, said at least one flexible member forming at least one side wall of a channel running from an inlet to an outlet of said pump; a driving member configured to drive an inner portion of said flexible member such that said inner portion processes around a path within said outer member such that a distance between said inner portion and said outer member is reduced on one side of said inner portion and increased on the other side of said inner portion; wherein said reduced distance causes a cross section of said at least one channel to be reduced and a constriction to be formed in said at least one channel, movement of said inner portion causing corresponding movement of said restriction such that a fluid is pushed along said at least one channel as said inner portion processes.
  • the inventors of the present invention recognised that were a flexible scroll to be used in a scroll pump, then the ability to distort the scroll in response to the centre following a rotating path could allow the two rigid scrolls of a scroll pump to be replaced by a single flexible scroll, distortion of the flexible scroll allowing the channel(s) formed by the flexible scroll to be correspondingly distorted.
  • the inner portion of the flexible scroll moving closer to the outer member causes different portions of the scroll between the inner portion and outer member to be squashed closer together, which leads to one or more constrictions within the one or more channels, which constriction(s) move with the moving inner portion and pump the fluid along the channel(s).
  • the pump comprises a single flexible member, said single flexible member forming the side walls of said channel running from said inlet to said outlet.
  • processing of said inner portion causes a distance between adjacent wraps of said flexible member across a diameter of said spiral to become closer together on one side of said inner portion and further apart on an opposing side of said inner portion, movement of said inner portion causing said closer together wraps to move along a corresponding path and push a fluid along said channel from said inlet to said outlet.
  • the flexible scroll may be formed of a single spiral such that where the inner portion moves towards the outer member overlapping wraps of a flexible member are pushed towards each other. Movement of the inner portion may be such that all the wraps are pushed close together or contact each other such that a plurality of constrictions are formed and a plurality of discrete pockets of fluid are provided pumping fluid along the channel from the inlet to the outlet. Alternatively, it may be that only a subset of the flexible wraps become close enough to form a constriction to provide effective pumping and in this case the pump may still operate effectively but with fewer pockets.
  • the pump may be a multiple start pump with a plurality of inlets and a plurality of channels with a spiral form.
  • the advantage of having multiple inlets is that the capacity of the pump is increased.
  • the formation of the pumping mechanism from a flexible member allows a variety of designs of scrolls to be used with a single or multiple channels depending on the requirements of pumping capacity or pressure differential.
  • said at least one flexible member is formed such that a resistance to lateral deformation is substantially uniform from an outer portion to said inner portion.
  • the flexible spiral member is formed as a uniform member then owing to its shape it is more easily distorted in its outer portions where it has a straighter form than it is in its inner portions where it follows a tighter arc. This can have consequences when the flexible member is distorted by the inner portion moving around a rotating offset path.
  • the outer flexible members forming the outer channels may be pushed more closely together than the inner members leading to either the inner members not forming an effective constriction or to friction between the contacting outer members which can lead to higher power requirements for the motor driving the pump and potentially to damage of the flexible member. This can be addressed by varying the properties of the flexible member(s) along their length to compensate for the differences due to their changing curvature.
  • the flexible member may be formed such that a resistance to lateral deformation is substantially uniform along its length, in this regard substantially uniform is taken to be that the variation in lateral deformation is within a 20% range.
  • substantially uniform is taken to be that the variation in lateral deformation is within a 20% range.
  • said at least one flexible member is configured such that a radial thickness of said flexible member decreases from said outer portion towards said inner portion.
  • said at least one flexible member is formed of one or more materials structured such that a stiffness of said material decreases from said outer portion to said inner portion.
  • said two plates are mounted on either side of said outer member.
  • the outer member and plates provide an outer envelope for the pumping of the fluid and in some embodiments the outer member may act as a supporting member for the plates.
  • said outer member has a height dimension perpendicular to said plates that is greater than a corresponding dimension of said at least one flexible member.
  • the height dimension of the outer member can be used to set the plate separation and to provide a simple yet accurate way of controlling the axial gap between the flexible member and the plates.
  • leakage in such a pump will occur both circumferentially between the constricted flexible members and also radially between the flexible member and the plates.
  • the radial leakage occurs across the whole length of the flexible member.
  • this radial gap has been controlled with the use of tip seals on rigid scrolls which tip seals wear over time reducing the lifetime of the pump and causing debris within it.
  • the use of an outer member which can be machined to dimensions which are closely aligned but different to that of the flexible member allows the axial clearances to be accurately controlled in a simple and inexpensive manner. It thereby allows tip seals to be dispensed with.
  • said outer member has a height perpendicular to said plates that is the same as a corresponding dimension of said at least one flexible member, said plates being mounted on shims resting on said peripheral outer member.
  • the clearance distances can be controlled by controlling the difference in height of the outer member and of the flexible member, they may alternatively be formed of the same height, indeed they may be formed from a single sheet and shims may be used between the outer member and the plates to provide the low clearances required.
  • said plates are held apart by a distance that is greater than a height of said at least one flexible member, said distance being less than 100 microns more, preferably less than 50 microns.
  • the clearances between the flexible member and the plates can be controlled by the difference in height of the outer member and the flexible member.
  • This difference in height can be controlled to high tolerances such that the difference may be less than 100 microns and preferable less than 50 microns. In some cases it may be as low as 10 microns.
  • said outer member and said at least one flexible member are formed from a single sheet of material, one or more spirals being cut out of said sheet to form said one or more channels.
  • the outer member and flexible member may be formed of a single sheet of material and this may be machined such that the flexible member has a different height than the outer member. Machining techniques are such that this can be done to high accuracy in a relatively straightforward manner allowing differences in heights of tens of microns to be accurately achieved. Alternatively, they may be machined to a single uniform height and shims may be used to provide the clearances between the flexible member and the plates.
  • the spiral may be a circular involute. In other embodiments, it may be an elliptical involute or archimedes type spiral or it may have some other spiral shape.
  • said driving member is configured to drive said inner portion around an offset circular orbit, such that wraps of said flexible member move towards each other in phase with said offset.
  • the driving member may be configured to drive the inner portion around a circle that is offset from the centre of the outer member, that is it may be a circular path around the centre but it is not at the centre.
  • said driving member comprises a motor and crankshaft.
  • the motor may have a crankshaft and the crankshaft may have an offset which provides the offset circular motion.
  • said pump comprises two adjacent flexible members, and wherein said driving member is configured to drive said two adjacent flexible members such that the distance between said two adjacent flexible members is between 10 and 200 microns of each other at a closest point.
  • the driving member and in particular the path of rotation that it is configured to follow can be selected such that the distance between the flexible members forming the channel can be controlled to provide an appropriate constriction.
  • the distance between adjacent flexible members is small but finite such that they do not contact.
  • knowledge of the stiffness of the flexible members and the size of the axial offset of the crankshaft can be used to set the distance between adjacent flexible members and thus, the size of the constriction used in the pumping to a certain value.
  • the distance between adjacent flexible members is set to be between 10 and 200 microns of each other at the closest point. This sets the constriction size and affects the efficiency of the pumping.
  • each of the overlapping flexible members along the radius where the inner portion is closest to the outer member are separated by a distance of between 10 and 200 microns of each other.
  • said driving member comprises a rotating electromagnetic field generator mounted around an exterior of said outer member and a magnet mounted within said outer member and plates and configured to drive said inner portion of said at least one flexible member in response to said rotating electromagnetic field.
  • An alternative to providing the driving member as a motor and a crankshaft is to provide the flexible member with a magnetic inner portion or attach it to a magnetic hub, such that an external rotating magnetic field drives this inner portion around a rotating path.
  • this driving mechanism there may be less accuracy in the positional control of the inner portion using this driving mechanism, but it does have the advantage of not requiring moving parts to pass through the plates forming the pumping envelope and thus, there may be improved sealing for such a pump.
  • said inlet is towards an outer edge of said at least one flexible member and said outlet is towards a centre of said at least one flexible member, while in other embodiments the inlet may be towards the centre with the outlets towards the outer edge.
  • fluids may be pumped either from an outer edge towards the centre or from the centre towards the outer edge.
  • the pump may be a vacuum pump and in other embodiments it may be a compressor.
  • Embodiments provide a scroll-type vacuum pump with a single flexible scroll, that may be formed of one or more flexible members each having a spiral form.
  • a traditional scroll pump requires two rigid matched spirals in the form of interleaving scrolls that mesh together.
  • Embodiments employ a single flexible scroll, which in some embodiments also comprises a central hub driven in an orbiting motion attached to a central portion of the flexible scroll.
  • the orbiting motion has a large enough orbit to push at least some of the adjacent flexible wraps or members along the constricted radius together in phase with the offset.
  • all of the flexible members or wraps are pushed together.
  • flexible members are considered to be pushed together where they contact each other or are within 200 microns of each other.
  • a crescent-shaped inlet volume is swallowed at the inlet which in some embodiments is located at the outer diameter, and compressed through one or more successive revolutions to an outlet which in some embodiments is towards the centre, in the same manner as a scroll pump.
  • Figure 1 schematically shows a pump according to an embodiment.
  • gas is compressed and moved by a single flexible spiral element.
  • It has similar form constraints to a traditional rigid scroll: these tend to be circular involutes, but some other shapes (e.g elliptical involute, Archimedes spiral) are also valid.
  • the pump comprises a static outer circular part 10, an orbiting circular part 20, and a flexible spiral forming plural wraps 40.
  • a wrap is a 360° portion of the spiral.
  • the crank is at 3 o'clock and the orbiting inner part is close to the outer static part at this point 30. This results in the wraps within portion 30 being compressed together leading to reduced radial clearances between them. These reduced radial clearances acts as an obstacle to fluid flow and a pumping chamber is formed between the wraps of the involute that pushes the fluid around the spiral of the involute as the inner circular part rotates.
  • the drive member and crank are configured so that the outer involutes move very close to each other and the inner involutes remain remote from each other. This reduces the number of active wraps of the pump, but does allow reduced wear and can still provide effective pumping. In effect the distance of the gas path through the pump is reduced and as compression happens along the path the total amount of compression is reduced too.
  • the flexible member is configured so that the forces required to move all of the wraps of the spiral are similar, and the distance between the involutes on compression is substantially uniform. This provides for an increased number of active wraps within the pump while allowing reduced wear. This can be achieved by the use of flexible members which have reduced stiffness towards the centre where they form a lower radius arc. This reduced stiffness may be achieved by reduced thickness of the flexible member or by a change in the material or structure of the material forming the flexible member. The latter is readily achieved using techniques such as 3D printing.
  • the flexible element has circular outer and inner parts connected by a single spiral.
  • the central circular hub is driven in a circular orbit by a crankshaft connected to a motor.
  • the outer circular ring is fixed, so the displacement of each part of the spiral varies with radial position (see figures 1 and 2 ).
  • crank is offset so that the displaced centre pushes all the spiral wraps together in phase with the offset, with minimal radial clearance to combat back-leakage.
  • a clearance is desirable to reduce friction, but some contact may be tolerated if a polymer spiral is used.
  • the combination of radial offset and orbiting motion pushes gas along the pump channel in a manner similar to peristaltic pumps.
  • Figure 3 shows a vacuum enclosure that is formed by plates 50 sandwiching an inner flexible spiral with circular inner and outer rings formed from a sheet 60.
  • the outer ring member forms the support for the plates.50 and provides a sealed enclosure 70.
  • the difference in dimensions of the flexible spiral and outer member machined into the sheet set the small running clearances 80 which allow the inner portion of the flexible spiral to slide freely while keeping axial clearances and leakage low.
  • Stiff polymers e.g. polyamides
  • the polymer wall could be reinforced with longitudinal fibres to resist gas pressure distortion (although this should be carefully managed as the increase in stiffness may have a detrimental effect on power requirements); or a moulded/extruded scroll form could be used where the wall has some internal hollow structure to increase buckling resistance. Dynamic behaviour and stress may dictate shaft rotational speed.
  • the spirals near the centre are stiffer than the outer portions because the curvature is tighter. If the radial wall thickness is constant and the material is uniform, stresses will be higher near the centre. However, it may be possible to vary wall thickness to modify stiffness.
  • a traditional scroll pump requires accurate control of the relative rotational positions of the scrolls ('timing'), usually achieved using bellows or multiple cranks.
  • the pump of embodiments may not need any such timing mechanism.
  • stages may be stacked in parallel or series to compensate for this and increase capacity.
  • Series stages would allow different geometry (e.g. the exhaust stage may be tuned for small outlet volume, to reduce power); stacked stages could be out of phase for balance, and could have different geometry and crank offsets.
  • the scroll deformation is driven by a rotating electromagnetic field rather than a mechanical shaft and crank.
  • a permanent magnet positioned within the hub of the flexible element would be attracted to a rotating electromagnetic field on the exterior of the scroll form, operating in a similar manner to an electric motor.
  • An embodiment of the design with a magnetic drive could provide further significant part consolidation and design simplification, reducing cost further.
  • the magnetic drive may be configured to provide a radial force to drive the various flexible members or wraps of the involute into contact.
  • the flexible element would have to endure this sliding contact, but this is potentially an embodiment that would provide better sealing against back-leakage.
  • Figure 4 shows an alternative multi-start embodiment, where multiple inlets 90 and multiple spiral flexible members 95 provide a scroll pump with increased capacity.
  • the channels are formed between adjacent flexible members and multiple paths between multiple inlets and a single outlet are provided.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Rotary Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (15)

  1. Eine Pumpe, die Folgendes aufweist:
    zwei Platten (50), die parallel und voneinander getrennt montiert sind;
    ein äußeres Element (10), das mindestens ein flexibles Element (95) umgibt, welches zwischen und im Wesentlichen senkrecht zu den beiden Platten angeordnet ist, wobei das mindestens eine flexible Element eine Spiralform aufweist, wobei das mindestens eine flexible Element mindestens eine Seitenwand eines Kanals bildet, der von einem Einlass (90) zu einem Auslass der Pumpe verläuft;
    ein Antriebselement, das dazu konfiguriert ist, einen inneren Abschnitt (20) des flexiblen Elements so anzutreiben, dass sich der innere Abschnitt um einen Weg innerhalb des äußeren Elements fortbewegt, so dass ein Abstand zwischen dem inneren Abschnitt und dem äußeren Element auf einer Seite des inneren Abschnitts reduziert und auf der anderen Seite des inneren Abschnitts vergrößert wird; wobei
    der reduzierte Abstand bewirkt, dass ein Querschnitt des mindestens einen Kanals reduziert wird und eine Verengung in dem mindestens einen Kanal gebildet wird, wobei die Bewegung des inneren Abschnitts eine entsprechende Bewegung der Verengung bewirkt, so dass ein Fluid entlang des mindestens einen Kanals gedrückt wird, wenn sich der innere Abschnitt bewegt.
  2. Pumpe nach Anspruch 1, die ein einzelnes flexibles Element aufweist, wobei das einzelne flexible Element die Seitenwände des vom Einlass zum Auslass verlaufenden Kanals bildet, oder die eine Mehrzahl flexibler Elemente aufweist, welche Spiralformen und eine entsprechende Mehrzahl von Einlässen aufweisen, wobei die Mehrzahl flexibler Elemente miteinander verschränkt ist und die Seitenwände einer Mehrzahl von Kanälen bildet, die von der Mehrzahl von Einlässen zum Auslass verlaufen.
  3. Pumpe nach einem der vorhergehenden Ansprüche, wobei das mindestens eine flexible Element so gebildet ist, dass ein Widerstand gegen seitliche Verformung von einem äußeren Abschnitt zu dem inneren Abschnitt im Wesentlichen gleichmäßig ist.
  4. Pumpe nach einem der vorhergehenden Ansprüche, wobei das mindestens eine flexible Element so konfiguriert ist, dass eine radiale Dicke des flexiblen Elements von dem äußeren Abschnitt zu dem inneren Abschnitt hin abnimmt.
  5. Pumpe nach einem der vorhergehenden Ansprüche, wobei das mindestens eine flexible Element aus einem oder mehreren Materialien gebildet ist, die so strukturiert sind, dass eine Steifigkeit des Materials von dem äußeren Abschnitt zu dem inneren Abschnitt abnimmt.
  6. Pumpe nach einem der vorhergehenden Ansprüche, wobei die beiden Platten beidseits des äußeren Abschnitts montiert sind.
  7. Pumpe nach Anspruch 6, wobei das äußere Element eine Höhenabmessung senkrecht zu den Platten hat, die größer als eine entsprechende Abmessung des mindestens einen flexiblen Elements ist, oder wobei das äußere Element eine Höhe senkrecht zu den Platten hat, die die gleiche wie eine entsprechende Abmessung des mindestens einen flexiblen Elements ist, wobei die Platten auf Abstandsstücke montiert sind, die auf dem peripheren äußeren Element ruhen.
  8. Pumpe nach Anspruch 7, wobei die Platten in einem Abstand voneinander gehalten werden, der größer als eine Höhe des mindestens einen flexiblen Elements ist, wobei der Abstand weniger als 100 Mikrometer, vorzugsweise weniger als 50 Mikrometer, beträgt.
  9. Pumpe nach einem der Ansprüche 6 bis 8, wobei das äußere Element und das mindestens eine flexible Element aus einem einzigen Materialblech (60) geformt sind und eine oder mehrere Spiralen aus dem Blech ausgeschnitten sind, um den einen oder die mehreren Kanäle zu bilden.
  10. Pumpe nach einem der vorhergehenden Ansprüche, wobei die Spirale eine Kreisspirale ist.
  11. Pumpe nach einem der vorhergehenden Ansprüche, wobei das Antriebselement dazu konfiguriert ist, den inneren Abschnitt auf einer versetzten Kreisbahn anzutreiben, so dass sich Windungen (40) des flexiblen Elements phasengleich mit dem Versatz aufeinander zu bewegen.
  12. Pumpe nach einem der vorhergehenden Ansprüche, wobei das Antriebselement einen Motor und eine Kurbelwelle aufweist.
  13. Pumpe nach Anspruch 12, wobei die Pumpe zwei benachbarte flexible Elemente aufweist und wobei das Antriebselement dazu konfiguriert ist, die beiden benachbarten flexiblen Elemente so anzutreiben, dass der Abstand zwischen den beiden benachbarten flexiblen Elementen an einem engsten Punkt zwischen 10 und 200 Mikrometer beträgt.
  14. Pumpe nach einem der Ansprüche 1 bis 12, wobei das Antriebselement einen Generator mit rotierendem elektromagnetischem Feld, der außen um das äußere Element herum montiert ist, und einen Magneten aufweist, der innerhalb des äußeren Elements und der Platten montiert ist und dazu konfiguriert ist, den inneren Abschnitt des mindestens einen flexiblen Elements in Reaktion auf das rotierende elektromagnetische Feld anzutreiben.
  15. Pumpe nach einem der vorhergehenden Ansprüche, wobei der Einlass in Richtung einer Außenkante des mindestens einen flexiblen Elements und der Auslass in Richtung einer Mitte des mindestens einen flexiblen Elements liegt.
EP20707775.1A 2019-02-15 2020-02-13 Scrollpumpe Active EP3924623B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1902135.1A GB2581387B (en) 2019-02-15 2019-02-15 Scroll pump
PCT/GB2020/050336 WO2020165590A1 (en) 2019-02-15 2020-02-13 Scroll pump

Publications (2)

Publication Number Publication Date
EP3924623A1 EP3924623A1 (de) 2021-12-22
EP3924623B1 true EP3924623B1 (de) 2024-04-03

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Family Applications (1)

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EP20707775.1A Active EP3924623B1 (de) 2019-02-15 2020-02-13 Scrollpumpe

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Country Link
EP (1) EP3924623B1 (de)
CN (1) CN113396282B (de)
GB (1) GB2581387B (de)
WO (1) WO2020165590A1 (de)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60243301A (ja) * 1984-05-18 1985-12-03 Mitsubishi Electric Corp スクロール流体機械及びその流体機械の組立て方法
US6068459A (en) * 1998-02-19 2000-05-30 Varian, Inc. Tip seal for scroll-type vacuum pump
JPH11280669A (ja) * 1998-03-25 1999-10-15 Tokico Ltd スクロール式流体機械
CN2360638Y (zh) * 1999-03-09 2000-01-26 钱利民 汽车空调压缩机涡盘密封装置
US20070048153A1 (en) * 2005-08-29 2007-03-01 Dr.Showway Yeh Thin and Foldable Fluid Pump Carried under User's Clothes
CN101375055A (zh) * 2006-01-26 2009-02-25 大金工业株式会社 压缩机的滑动部件的制造方法和压缩机
JP2008057465A (ja) * 2006-08-31 2008-03-13 Hitachi Ltd スクロール式流体機械
WO2017111744A1 (en) * 2015-12-25 2017-06-29 Oral Nahit Kursat Peristaltic pump working with lorentz force

Also Published As

Publication number Publication date
GB2581387A (en) 2020-08-19
GB2581387B (en) 2021-08-18
WO2020165590A1 (en) 2020-08-20
CN113396282A (zh) 2021-09-14
EP3924623A1 (de) 2021-12-22
CN113396282B (zh) 2023-06-09
GB201902135D0 (en) 2019-04-03

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