EP3867531B1 - Procédé de contrôle de la température d'une pompe à vide, pompe à vide et installation associées - Google Patents

Procédé de contrôle de la température d'une pompe à vide, pompe à vide et installation associées Download PDF

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Publication number
EP3867531B1
EP3867531B1 EP19773440.3A EP19773440A EP3867531B1 EP 3867531 B1 EP3867531 B1 EP 3867531B1 EP 19773440 A EP19773440 A EP 19773440A EP 3867531 B1 EP3867531 B1 EP 3867531B1
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EP
European Patent Office
Prior art keywords
temperature
vacuum pump
stator
pumping
cooling element
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Application number
EP19773440.3A
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German (de)
English (en)
French (fr)
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EP3867531A1 (fr
Inventor
Yannick GRENIER
Paul DECORDE
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Pfeiffer Vacuum SAS
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Pfeiffer Vacuum SAS
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F04D25/0666—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump a sensor is integrated into the pump/motor design
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/01—Load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/02—Power
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F04C2270/075—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature
    • F04C2270/195—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Definitions

  • the present invention relates to a method for controlling the temperature of a dry-type vacuum pump.
  • the invention also relates to a dry-type vacuum pump comprising means for implementing said control method.
  • the invention also relates to an installation comprising said vacuum pump.
  • Primary vacuum pumps of the dry type comprise several pumping stages in series in which a gas to be pumped circulates between a suction and a discharge.
  • a gas to be pumped circulates between a suction and a discharge.
  • One distinguishes among the known primary vacuum pumps those with rotary lobes also known under the name “Roots” with two lobes or more or those with beak, also known under the name “Claw” or those with screw.
  • Roots Blower type vacuum pumps are also known which are used upstream of the primary vacuum pumps, to increase the pumping capacity in a situation of very high flow.
  • More and more applications require the ability to vary the gas flows to be pumped significantly and quickly, between, on the one hand, process steps for which the vacuum pump must cycle large gas flows, such as of the order of several slm (for "standard liter per minute” in English) or several tens of slm, and on the other hand, waiting stages (or “idle” in English) for which the vacuum pump is in so-called “limit vacuum pressure” operation, the flow of gas to be pumped being zero or very low.
  • the stator is generally cooled by circulating water at ambient temperature in cooling circuits in thermal contact with the stator.
  • This temperature difference between the rotors and the stator can be accentuated by the fact that the temperature measurement point used to control the cooling circuits is not necessarily located at a favorable location allowing a rapid change in temperature due to a change in pumping load.
  • the measured temperature can thus be overestimated and lead to the continuation of the control of the cooling of the stator although at the level of the bearings for example, the temperature has already dropped significantly.
  • the reaction time necessary to actually notice a drop in temperature of the stator can be relatively long, which can lead to the aggravation of the difference between the temperatures.
  • This temperature difference can cause a loss of play between the stator and the rotors due to the different thermomechanical behaviors, and in particular a loss of axial play because the cooling circuits are generally arranged at each axial end of the vacuum pump at the level of the bearings. , as well as a reduction in the center distance due to the retraction of the shaft supports. These clearance losses can lead to the pump seizing or impingement between rotors.
  • WO 2006/082366 A1 and US 6,056,510A describe devices for controlling a pumping installation.
  • One of the aims of the present invention is to propose a vacuum pump of the dry type and a method for controlling the temperature of the vacuum pump making it possible to solve at least one of the aforementioned drawbacks, in particular by limiting the losses of play and the seizing .
  • the change in temperature setpoint thus makes it possible to cut off the cooling of the stator by the cooling element as soon as possible, leaving the stator to heat up close to the cooling element.
  • the increase in the temperature setpoint during low pumping load stages makes it possible to keep the stator as hot as during high load stages, which makes it possible to limit the risks of seizing or contact between rotors.
  • This temperature which is kept high during low load stages, also makes it possible to avoid the creation of cold zones where the polluting condensable species could solidify or condense.
  • the triggering of the temperature setpoint change carried out by monitoring the pumping load also makes it possible to be very reactive.
  • This monitoring can further be carried out from the information already available by the sensors of the vacuum pump, by integrating the thermal behavior of the vacuum pump in the determination of the temperature control, without requiring the addition of temperature sensors. additional, without information of the process taking place in the enclosure and without changing the positioning of the at least one temperature sensor or the structure of the cooling elements.
  • the temperature control method may further comprise one or more characteristics described below, taken alone or in combination.
  • the temperature set point is increased at least for temperature control by means of a cooling element coupled to a so-called low-pressure pumping stage of the vacuum pump.
  • the temperature setpoint after increasing the temperature setpoint, it is monitored whether the value of the parameter representative of the pumping load is greater than the load threshold and, if the value of the parameter representative of the pumping load is greater than the threshold load then an increased temperature setpoint is maintained for a predefined additional period.
  • the predefined additional duration is for example greater than ten minutes.
  • the increase in the temperature setpoint is for example greater than 3°C.
  • the increase in the temperature setpoint is for example less than 20°C.
  • the dry-type vacuum pump can be a multistage primary vacuum pump, ie comprising at least two pumping stages connected in series.
  • the vacuum pump can also be a Roots compressor type vacuum pump comprising one or two pumping stages connected in series.
  • the dry-type vacuum pump comprises two cooling elements coupled to the stator, a cooling element being arranged at each axial end of the vacuum pump.
  • the present invention also relates to an installation comprising an enclosure characterized in that it comprises a vacuum pump of the dry type as described previously, connected to the enclosure for its pumping.
  • the Figure 1 represents a first example of an installation 1 comprising a vacuum pump 2 of the dry type and an enclosure 3 to which the vacuum pump 2 is connected for example via a valve 4, for pumping the enclosure 3.
  • process steps P1, P2 can precede and follow so-called “waiting I” (or “idle”) steps during which the gas flows introduced are low or zero.
  • the vacuum pump 2 is in so-called “limit vacuum pressure” operation for periods longer than several minutes, for example to allow the enclosure 3 to be cleaned.
  • the succession of these steps intervenes for example during semiconductor manufacturing processes, such as so-called “HarpXT” processes.
  • the vacuum pump 2 comprises a stator 5, at least one pumping stage T1-T5, two shafts 6, 7 extending in the at least one pumping stage T1-T5 and respectively carrying at least one rotor 8, at at least one cooling element 11a, 11b coupled to the stator 5, at least one temperature sensor 12a, 12b configured to take a measurement of the temperature of the stator 5 and a control unit 13 configured to control the temperature of the stator 5 by means of at least one at least one cooling element 11a, 11b and at least one temperature sensor 12a, 12b.
  • the rotors 8 are configured to rotate synchronously in the opposite direction in the stator 5 to cause a gas to be pumped G from a suction 9 of the vacuum pump 2 to a discharge 10 of the pump 2.
  • the rotors 8 have, for example, lobes with identical profiles, such as of the “Roots” type (cross-section in the shape of an “eight” or “bean”) or of the “Claw” type. According to another example, the pumping rotors 8 are of the "screw” type.
  • the vacuum pump 2 comprises for example at least two pumping stages, such as five pumping stages.
  • Each pumping stage T1-T5 includes a respective input and output.
  • the successive pumping stages T1-T5 are connected in series one after the other through respective inter-stage channels 14 connecting the outlet (or discharge) of the preceding pumping stage to the inlet (or suction) of the following stage.
  • the gas sucked in from the inlet is trapped in the volume generated by the rotors 8, then is driven by the rotors 8 towards the discharge 10 (the direction of gas circulation is illustrated by the arrows G on the Figures 1 and 2 ).
  • the vacuum pump 2 is in particular called “dry” because in operation, the rotors 8 turn inside the stator 5 without any mechanical contact between them or with the stator 5, which makes it possible not to use oil in the pumping stages T1-T5.
  • the vacuum pump 2 of the dry type is a multistage primary vacuum pump.
  • a primary vacuum pump is a volumetric vacuum pump which, using two rotors, draws in, transfers and then delivers the gas to be pumped at atmospheric pressure.
  • the vacuum pump 2 is of the Roots compressor type and comprises one or two pumping stages. Roots compressor type vacuum pumps are connected in series and upstream of a rough vacuum pump.
  • the cooling element 11a, 11b comprises a hydraulic circuit 16 to allow water to circulate, for example at room temperature ( Figure 2 ).
  • the hydraulic circuit 16 is for example integrated in the stator 5. It has for example a "U" shape surrounding the bearings of the shafts 6, 7 to cool them.
  • the cooling element 11a, 11b further comprises, for example, a controllable valve 17 to authorize or cut off the circulation of water (regulation known as “all or nothing”).
  • the vacuum pump 2 comprises for example two cooling elements 11a, 11b coupled to the stator 5, a cooling element 11a, 11b being arranged at each axial end of the vacuum pump 2 ( Figure 2 ).
  • a cooling element 11a is coupled to a so-called low-pressure pumping stage T1, the inlet of which communicates with the suction 9 of the pump 2.
  • a cooling element 11b is coupled to a so-called high-pressure pumping stage T5, whose the outlet communicates with delivery 10 of pump 2.
  • the vacuum pump 2 comprises for example two temperature sensors 12a, 12b arranged on the stator 5 and spaced apart from each other.
  • a temperature sensor 12a is for example associated with the cooling element 11a located on the suction side 9.
  • the temperature sensor 12a is for example mounted on stator 5 at low pressure pumping stage T1 (suction side 9).
  • a temperature sensor 12b is for example associated with the cooling element 11b located on the discharge side 10.
  • the temperature sensor 12b is for example mounted on the stator 5 at the level of the high pressure pumping stage T5 (discharge side 10) .
  • the temperature sensors 12a, 12b are for example located on the stator 5 at a midpoint between the two shafts 6, 7, aligned on a straight line parallel to the axes of the shafts 6, 7 ( Figure 1 ).
  • the control unit 13 comprises one or more controllers or microcontrollers or processors and a memory for executing sequences of program instructions implementing a method for controlling the temperature 100 of the vacuum pump 2 in which the temperature is controlled of the vacuum pump 2 subjected to variable pumping loads by means of said at least one cooling element 11a, 11b coupled to the stator 5, according to a temperature set point and a measurement of the temperature of the stator 5.
  • control unit 13 is connected to at least one temperature sensor 12a, 12b to receive a measurement of the temperature of the stator 5 and is connected to at least one cooling element 11a, 11b, for example to control the opening/closing of the valve 17 of the associated hydraulic circuit 16.
  • the temperature control can be carried out independently on each cooling element 11a, 11b according to a specific temperature setpoint and an associated specific temperature measurement.
  • the vacuum pump 2 is subjected to variable pumping loads, which can vary between strong or weak gas flows.
  • the control unit 13 monitors whether the value of a parameter representative of the pumping load is lower than a load threshold S (diagnostic step 101, Figure 3 ).
  • the parameter representative of the pumping load is for example the current consumed by the vacuum pump 2 or the power consumed by the vacuum pump 2.
  • the control unit 13 calculates for example an average of the current or of the power consumed over a duration equal to or greater than the duration of a cycle of a process step P1, P2.
  • the control unit 13 is for example connected to an output of a speed variator of the motor of the vacuum pump 2.
  • control unit 13 controls the temperature of the vacuum pump 2 to reach the temperature setpoint by means of the cooling elements 11a, 11b, for example by closing the valves 17 to cut off the circulation of water when the temperature measurement is lower than the temperature setpoint and by opening the valves 17 to authorize the circulation of water when the temperature measurement is equal to or higher than the temperature setpoint (process regulation step 102).
  • the temperature setpoint is for example greater than 70°C.
  • the unit control 13 increases the temperature setpoint for controlling the temperature of the vacuum pump 2 by means of at least one cooling element 11a (standby regulation step 103).
  • the temperature setpoint can be increased for temperature control by means of the two cooling elements 11a, 11b or just one, but preferably at least by means of the cooling element 11a coupled to the pumping stage T1 of low pressure, which is more difficult to regulate in temperature because of the poorer heat exchange capacities between the rotors 8 and the stator 5 at low pressure.
  • the increase in the temperature setpoint corresponds for example to at least 3% of the temperature setpoint, such as for example to more than 3°C.
  • the increase in the temperature setpoint corresponds for example to at most 20% of the temperature setpoint, such as for example at less than 20° C.
  • the increase in the temperature setpoint is for example of the order of 6% of the temperature setpoint, such as 5°C.
  • the control unit 13 controls the temperature of the vacuum pump 2 to reach the increased temperature setpoint as carried out during the process step P1, P2, by means of the cooling elements 11a, 11b, for example by actuating the valves 17 for water circulation.
  • the additional time is predefined, eliminating the need for a sensor. It is for example greater than 10 minutes, such as 15 minutes.
  • This reconditioning step 104 makes it possible to allow time for the stator 5 to heat up due to the higher pumping load of the process step P1, P2. This makes it possible to avoid generating a new temperature difference between the rotors 8 and the stator 5 when returning to the initial temperature set point.
  • a gas flow of 80slm (135.12 Pa.m 3 /s) is introduced cyclically into enclosure 3.
  • the gas flow thus alternates between 80slm for 5 minutes and 0slm for 3 minutes.
  • the power consumed, representative of the pumping load therefore varies in steps between 500 and 2000W (curve A), above a load threshold of, for example, 600W over a period of more than 3 minutes (duration equal to one phase without process step flow).
  • the control unit 13 controls the temperature of the vacuum pump 2 to reach a temperature set point of 83° C. by means of the cooling elements 11a, 11b (process control step 102). It can be seen that the temperature of the stator 5 measured by the temperature sensor 12a thus fluctuates between 81° C. and 86° C. around the set temperature due to the on/off regulation mode (curve B). It can also be seen that the temperature measured at the center of the cooling element 11a (by way of indication), fluctuates between 84 and 87° C. (curves C and D).
  • the control unit 13 concludes from this that a waiting stage I takes place in the enclosure 3.
  • the control unit 13 then increases the setpoint of temperature of 5°C (standby regulation step 103) and controls the temperature of the vacuum pump 2 to 88°C by means of the cooler element 11a of the low pressure pumping stage T1 and to 83°C or 88°C by means of the cooling element 11b of the high pressure pumping stage T5.
  • the change in temperature set point thus makes it possible to cut off the cooling of the stator 5 by the cooling element 11a as soon as possible, leaving the stator 5 to heat up close to the cooling element 11a.
  • the temperature of the stator 5 measured at the level of the cooling element 11a has not, or only slightly, decreased below the temperature of the process step P1.
  • the temperature difference between the stator 5 and the rotors 8 is therefore substantially the same during the process step P1 as during the waiting step I since the rotors 8 remain hot.
  • step reconditioning 104 there is a rise in the temperatures of the stator 5 at the level of the cooling element 11a with the heating of the vacuum pump 2 (curves C and D).
  • the control unit 13 decrements the temperature setpoint which returns to 83° C (process control step 102).
  • the temperatures at the center of the cooling element 11a decrease by the temperature setpoint difference, then rise slowly with the setpoint value at 83°C.
  • the temperature remained above 83° C. at the level of the stator 5 near the cooling element 11a.
  • the increase in the temperature setpoint during the low pumping load waiting step I makes it possible to keep the stator 5 as hot in the center of the cooling element 11a as during the process steps P1, P2 , which makes it possible to limit the risks of seizing or of hits between rotors 8 during the waiting stage I linked to the differences in thermal expansion between the rotors 8 and the stator 5.
  • This temperature which is kept high during the waiting stage I, also makes it possible to avoid the creation of cold zones where the polluting condensable species could solidify or condense.
  • the triggering of the temperature setpoint change carried out by monitoring the pumping load also makes it possible to be very reactive.
  • This monitoring can further be carried out from the information already available by the sensors of the vacuum pump 2, by integrating the thermal behavior of the vacuum pump 2 in the determination of the temperature control, without requiring the addition of sensors additional temperature, without process information taking place in the enclosure 3 and without changing the positioning of at least one temperature sensor 12a, 12b or the structure of the cooling elements 11a, 11b.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
EP19773440.3A 2018-10-17 2019-09-26 Procédé de contrôle de la température d'une pompe à vide, pompe à vide et installation associées Active EP3867531B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1859617A FR3087504B1 (fr) 2018-10-17 2018-10-17 Procede de controle de la temperature d’une pompe a vide, pompe a vide et installation associees
PCT/EP2019/076111 WO2020078689A1 (fr) 2018-10-17 2019-09-26 Procédé de contrôle de la température d'une pompe à vide, pompe à vide et installation associées

Publications (2)

Publication Number Publication Date
EP3867531A1 EP3867531A1 (fr) 2021-08-25
EP3867531B1 true EP3867531B1 (fr) 2022-06-01

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EP19773440.3A Active EP3867531B1 (fr) 2018-10-17 2019-09-26 Procédé de contrôle de la température d'une pompe à vide, pompe à vide et installation associées

Country Status (8)

Country Link
US (1) US20210404476A1 (zh)
EP (1) EP3867531B1 (zh)
JP (1) JP2022505202A (zh)
KR (1) KR20210074368A (zh)
CN (1) CN112805472B (zh)
FR (1) FR3087504B1 (zh)
TW (1) TWI798487B (zh)
WO (1) WO2020078689A1 (zh)

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Publication number Priority date Publication date Assignee Title
TWI815109B (zh) * 2021-04-28 2023-09-11 華碩電腦股份有限公司 散熱檢測方法以及電子裝置
FR3128745A1 (fr) * 2021-10-29 2023-05-05 Pfeiffer Vacuum Pompe à vide sèche
CN115145201B (zh) * 2022-07-19 2023-03-28 长沙昌佳自动化设备有限公司 一种干式真空泵专用控制器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060269424A1 (en) 2005-05-27 2006-11-30 Michael Henry North Vacuum pump
JP4673011B2 (ja) 2004-07-05 2011-04-20 株式会社島津製作所 ターボ分子ポンプの温度制御装置
JP2014118929A (ja) 2012-12-19 2014-06-30 Ebara Corp ドライポンプ装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2637655B1 (fr) * 1988-10-07 1994-01-28 Alcatel Cit Machine rotative du type pompe a vis
CN1103872C (zh) * 1995-11-29 2003-03-26 日本真空技术株式会社 油密封旋转式真空泵的冷却装置
JP3767052B2 (ja) * 1996-11-30 2006-04-19 アイシン精機株式会社 多段式真空ポンプ
JP2003083273A (ja) * 2001-09-12 2003-03-19 Ebara Corp ドライ真空ポンプ
GB0326061D0 (en) * 2003-11-10 2003-12-10 Boc Group Plc Improvements in screw pumps
KR100497982B1 (ko) * 2004-10-01 2005-07-01 (주)엘오티베큠 루츠형 로터와 스크루형 로터를 지닌 복합 드라이 진공펌프
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
TW200905079A (en) * 2007-07-18 2009-02-01 Shanorm Tech Co Ltd Dry vacuum pump device and cooling method thereof
DE102009053268A1 (de) * 2009-11-13 2011-05-26 Bayerische Motoren Werke Aktiengesellschaft Klimaanlage für Kraftfahrzeuge
GB2498807A (en) * 2012-01-30 2013-07-31 Edwards Ltd Multi-stage vacuum pump with solid stator
WO2017031807A1 (zh) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 一种多驱动腔非共轴真空泵
KR101712962B1 (ko) * 2015-09-24 2017-03-07 이인철 냉각장치를 갖춘 진공펌프
DE202015007606U1 (de) * 2015-11-03 2017-02-06 Leybold Gmbh Trockenvakuumpumpe
US10590955B2 (en) * 2017-02-23 2020-03-17 Shimadzu Corporation Turbo-molecular pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4673011B2 (ja) 2004-07-05 2011-04-20 株式会社島津製作所 ターボ分子ポンプの温度制御装置
US20060269424A1 (en) 2005-05-27 2006-11-30 Michael Henry North Vacuum pump
JP2014118929A (ja) 2012-12-19 2014-06-30 Ebara Corp ドライポンプ装置

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CN112805472A (zh) 2021-05-14
WO2020078689A1 (fr) 2020-04-23
EP3867531A1 (fr) 2021-08-25
FR3087504B1 (fr) 2020-10-30
TWI798487B (zh) 2023-04-11
JP2022505202A (ja) 2022-01-14
FR3087504A1 (fr) 2020-04-24
KR20210074368A (ko) 2021-06-21
CN112805472B (zh) 2023-01-24
TW202018186A (zh) 2020-05-16

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