Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16J—PISTONS; CYLINDERS; SEALINGS
  • F16J15/00—Sealings
  • F16J15/02—Sealings between relatively-stationary surfaces
  • F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
  • F16J15/028—Sealings between relatively-stationary surfaces with elastic packing the packing being mechanically expanded against the sealing surface
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B81—MICROSTRUCTURAL TECHNOLOGY
  • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
  • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
  • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
  • B81B3/0059—Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16J—PISTONS; CYLINDERS; SEALINGS
  • F16J15/00—Sealings
  • F16J15/02—Sealings between relatively-stationary surfaces
  • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
  • F16J15/062—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16J—PISTONS; CYLINDERS; SEALINGS
  • F16J15/00—Sealings
  • F16J15/02—Sealings between relatively-stationary surfaces
  • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
  • F16J15/064—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces the packing combining the sealing function with other functions
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
  • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
  • F16L55/10—Means for stopping flow from or in pipes or hoses
  • F16L55/12—Means for stopping flow from or in pipes or hoses by introducing into the pipe a member expandable in situ
  • F16L55/128—Means for stopping flow from or in pipes or hoses by introducing into the pipe a member expandable in situ introduced axially into the pipe or hose
  • F16L55/13—Means for stopping flow from or in pipes or hoses by introducing into the pipe a member expandable in situ introduced axially into the pipe or hose the closure device being a plug fixed by plastic deformation
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
  • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
  • G01L19/0007—Fluidic connecting means
  • G01L19/0046—Fluidic connecting means using isolation membranes
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B81—MICROSTRUCTURAL TECHNOLOGY
  • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
  • B81B2201/00—Specific applications of microelectromechanical systems
  • B81B2201/02—Sensors
  • B81B2201/0264—Pressure sensors

Definitions

• the present invention relates to a sealing device for sealing a fluid-filled space in a MEMS sensor assembly.
• the invention further relates to a pressure sensor, in particular for use in
• Air conditioners or the like preferably in vehicles.
• the invention also relates to a method for sealing a space filled with a fluid in a MEMS sensor arrangement.
• Vehicle air conditioning systems increase the comfort of vehicle occupants, especially in the summer months by lowering the vehicle's interior temperature in strong sunlight.
• a refrigerant is used in the vehicle air conditioning.
• Known vehicle air conditioning systems also include pressure sensors for measuring the pressure of the refrigerant of the air conditioner in the vehicle to detect leaks can.
• the pressure sensor element located, for example, on a printed circuit board is physically separated from the cooling medium by a so-called oil reservoir in order to protect the sensor element by the effects of the refrigerant.
• the oil template is filled with oil and then sealed.
• the invention provides a sealing device
• Sealing a fluid-filled space in a MEMS sensor assembly comprising a sealing device, the sealing device comprising a channel connected to the one space, and wherein in the channel
• Sealing element for sealing the channel is arranged such that the channel and / or the sealing element are formed such that the sealing element is sealingly fixed in the channel at least by a mechanical clamping.
• the invention provides a pressure sensor
• a vehicle comprising, a sensor element, which is arranged in a space and is surrounded by a fluid at least partially, and wherein the space is sealed by a sealing means, and wherein the sealing means comprises a channel, which is connected to the space, and wherein in the channel, a sealing element for sealing the channel is arranged such that the channel and / or the sealing element are formed such that the sealing element is sealingly fixed in the channel at least by a mechanical clamping.
• the invention provides a method for sealing two spaces filled with different fluids in a MEMS sensor arrangement comprising the steps of: Providing a fluid connection to a closed space,
• the sealing device Arranging a sealing device in the fluid connection, wherein the sealing device comprises a channel which is connected to the space,
• the channel and the sealing element are formed so that the sealing element is sealingly fixed in the channel by an at least partial positive locking.
• the advantage of this is that it allows a simple and at the same time extremely reliable fixing of the sealing element and thus a reliable and durable seal.
• the wall thickness of the channel is designed to form the at least partial positive connection.
• the sealing element has a smaller elasticity than at least the portion of the channel adjacent to the sealing element.
• the sealing element made of metal, in particular steel, and / or the channel is made of plastic. This allows a particularly simple way to insert and set the sealing element in the channel. At the same time, the channel can be manufactured extremely inexpensively, for example by injection molding.
• Sealing element adjacent area a recess for at least partially receiving the sealing element.
• the sealing element is designed in the form of a ball and the channel has a substantially circular cross-section.
• the sealing device has an insertion chamfer adapted to the sealing element, which in particular is funnel-shaped.
• the diameter of the ball is greater than the diameter of the channel.
• Figure 1 shows a device according to an embodiment of the present invention in cross section
• Figure 2 shows a part of a pressure sensor according to an embodiment of
• FIG. 3 steps of a method according to an embodiment of the present invention.
• Figure 1 shows a device according to an embodiment of the present invention in cross section.
• FIG. 1 shows a device 1 for sealing two spaces 2, 3 filled with different fluids.
• the spaces 2, 3 are fluidly connected to one another via a channel 5 of a sealing device 4.
• a ball 6 is inserted, whose diameter 10 is greater than the inner diameter 11 of the channel 5.
• the ball 6 is made of metal, the channel 5 made of plastic.
• Wall thickness 5 'of the channel 5 is chosen or designed so that a part of an elastic deformation of the channel 5 in the region 5a of the position of the ball 6 is made possible. This will cause a relaxation of the
• Plastic ie a shrinking back of the channel 5 after insertion of the ball 6 allows, which provides a positive connection of the ball 6 with the channel 5. additionally can in order to support the positive connection a recess 7, for example, circular segment-shaped, in the region 5a of the desired fixing position of the ball 6 in the channel 5 are arranged. This recess 7 allows the ball 6 is additionally held in its axial position within the channel 5 when pressurized.
• a Ein beneficiafase 8 is arranged, which is funnel-shaped and which serves to provide a simple insertion of the ball 6 in the channel 5.
• the angle of the funnel-shaped Einstockedfase 8 is approximately 45 °, wherein the height of the funnel, ie parallel to the axis of the channel 5 is approximately 25% based on the total length of the channel 5.
• the offset of the ball 6 in the channel 5 is approximately 50% of the total length of the channel 5. Die
• Wall thickness 5 'in relation to the inner diameter 11 is about 33%.
• Deviations of up to 75%, in particular up to 50%, preferably up to 25%, can occur here.
• Figure 2 shows a part of a pressure sensor according to an embodiment of the present invention in cross section.
• an oil frame 102 is arranged, which comprises a space 2, which is used as an oil reservoir.
• a sensor element in the form of a PorSi chip 101 is connected to this space 2, - PorSi denotes porous silicon -
• a sealing device 4 is arranged on the side of the space 2 facing away from the sensor element 101 for sealing the same, which comprises a channel 5 which is sealed with a ball 6 made of steel and so the space 2, the oil reservoir, against a second space 3 seals.
• FIG. 3 shows steps of a method according to an embodiment of the present invention.
• a method for sealing two spaces filled with different fluids in a MEMS sensor arrangement is shown in FIG.
• a first step S1 provision is made of a fluid connection to a closed space.
• a second step S2 arranging a
• Sealing means in the fluid connection wherein the sealing means comprises a channel which is connected to the space.
• a sealing element is introduced into the channel.
• a setting of the sealing element in the channel to seal the channel by a mechanical clamping takes place.
• At least one of the embodiments of the invention has at least one of the following advantages: Physical separation of a sensor element and a cooling medium.

Landscapes

• Engineering & Computer Science (AREA)
• General Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Physics & Mathematics (AREA)
• Geometry (AREA)
• General Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Measuring Fluid Pressure (AREA)
• Gasket Seals (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=65020140

Family Applications (1)

Country Status (6)

Families Citing this family (1)

Family Cites Families (30)

• 2018
  • 2018-04-26 DE DE102018206477.6A patent/DE102018206477B3/de active Active
• 2019
  • 2019-04-15 CN CN201980028265.3A patent/CN112041597B/zh active Active
  • 2019-04-15 JP JP2020559497A patent/JP6997344B2/ja active Active
  • 2019-04-15 WO PCT/EP2019/059684 patent/WO2019206721A1/de active Application Filing
  • 2019-04-15 US US17/040,333 patent/US11796060B2/en active Active
  • 2019-04-15 EP EP19720463.9A patent/EP3784931A1/de not_active Withdrawn

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