EP3763944B1 - Fastening rail with eccentric device - Google Patents

Description

The invention relates to a fastening rail for fastening a flange section of a first component of a vacuum system to a surface section of a second component of a vacuum system.

Such a fastening rail is known in principle and is used, for example, to fasten a vacuum pump, in particular a turbomolecular pump, to a vacuum chamber. Known fastening rails often have the disadvantage that various assembly steps must be followed in the correct sequence for assembly and disassembly of the vacuum pump and, in addition, other components of the vacuum system may have to be removed in order to gain sufficient access to the vacuum pump. In addition, known mounting rails are often only designed to accommodate a single vacuum pump, with additional mounting parts, such as mounting brackets or screws, being required to mount the vacuum pump in addition to the mounting rail. This impairs the user-friendliness of known rail systems, in particular in the case of service or revision and during repair work, and limits the variability of the rail fastening.

the EP 3 030 789 A1 discloses a safety device for a vacuum system for vacuum-tight attachment of a vacuum pump to a recipient. The securing device includes a support rail for receiving a pump flange. A shaft with sections of different diameters is guided in the support rail, on which ring-shaped, force-exerting elements are displaceably arranged and which are lifted in a clamping position by the shaft in such a way that they press the pump flange against the recipient. One object of the present invention is to provide a fastening rail for a vacuum system, which is characterized by increased ease of use and more flexible application options.

To achieve the object, a fastening rail with the features of claim 1 is provided according to the invention and, quite specifically, a fastening rail for fastening a flange section of a first component of a Vacuum system on a surface portion of a second component of the vacuum system. The fastening rail has a guide section, which is designed to interact with a side of the flange section facing away from the surface section, and also a fastening section, which is designed to fasten the fastening rail to the second vacuum component in such a way that the flange section can be inserted between the guide section and the surface section , In particular, can be inserted. Furthermore, the fastening rail according to the invention comprises a rotatably mounted eccentric device which can be rotated between a clamped state and a released state and which is set up to apply a holding force directed in the direction of the surface section to the flange section via at least one active surface in its clamped state and to act in its released state Release flange section. In particular, a stroke of the flange section is generated by the clamping.

Basically, the invention is based on the idea that only the eccentric device rotatably integrated into the fastening rail is required in order to press a flange section of a first component of a vacuum system onto a surface section of a second component of a vacuum system. Other retaining clips, screws or similar components are not absolutely necessary. The operation of the fastening rail is thus very convenient, in particular, to mount a first component of the vacuum system, only a flange section of the first component has to be pushed onto the guide section of the fastening rail in the released state and then the eccentric device has to be rotated into the clamping state. As a result, the installation space of the vacuum system can advantageously be made more compact, resulting in direct cost advantages. In addition, the flange section is held securely in the fastening rail, which results in increased operational reliability of the vacuum system even in the event of a fault, for example a rotor crash.

The surface section, which can also be designed as a flange section, can in principle have an opening to a vacuum chamber or to a vacuum pump. In addition, sealing means can be provided on the flange section and/or on the surface section, in particular in the area of openings, which ensure sealing contact of the flange section and the surface section in the clamped state. The flange section can advantageously be at least approximately rectangular--this embodiment is particularly advantageous in the case of a split flow--or at least have a straight section which can be guided in the fastening rail. This is advantageous for a particularly simple and secure attachment and with regard to the achievable pumping speed of the vacuum system.

In the clamped state, the holding force acting on the flange section is generated in particular by a lifting movement effected by means of the eccentric device, in which the effective surface of the eccentric device interacts with the flange section either directly or indirectly in order to press it in the direction of the surface section. In the case of an indirect introduction of force, the lifting movement resulting from the twisting of the eccentric device can be transmitted, for example, to an intermediate element which is connected in particular to the eccentric device and passed on by it to the flange section. As a result, the stroke can be increased, for example.

The first and the second component of the vacuum system can be, for example, a vacuum pump, in particular a turbomolecular pump, and a vacuum chamber or recipient. In this case, either the vacuum pump or the vacuum chamber can have the flange section and the respective other component can have the surface section on which the fastening rail can again be attached. Is it the first component having the flange section is a turbomolecular pump, the direction of insertion into the fastening rail can be arranged parallel or perpendicular to the rotor axis.

For example, a fastening rail arrangement can be selected in such a way that the surface section is assigned two fastening rails running parallel to one another, which hold the flange section inserted between them from two opposite sides and, when the fastening rails are in the clamped state, press it against the surface section on two sides. and thus prevent tilting of the flange section due to one-sided pressing and enable tight contact with the surface section. In principle, several fastening rails can be combined to form a rail system.

The fastening rail can be fastened to the second component and in particular to the surface section by means of its fastening section, for example screwed to it in a detachable manner or welded thereto. It is also conceivable that the fastening section or the entire fastening rail is connected in one piece to the surface section, it being possible for the fastening rail to be formed onto the surface section to a certain extent as part of the second component of the vacuum system.

The flange section can be positioned flexibly in the direction of insertion along the mounting rail, so that vacuum components of different dimensions can be used in the same mounting rail. Furthermore, an adapter piece can be introduced between the surface section and the fastening rail in order to adapt openings which are present in the surface section and on the flange section to one another, if necessary. Such an adapter piece can be designed to be vibration-damping and/or thermally insulating and/or electrically insulating. The mounting rail can also be provided with elements that have such properties.

In particular, several, in particular different, components of the vacuum system can also be pushed into the same fastening rail and thus fastened, it being possible for them to be pushed in, for example, from different end regions of a fastening rail. Thus, great flexibility can be achieved in the design of the vacuum system.

For example, in larger vacuum arrangements in which several vacuum components are fastened to one another by means of one or more fastening rails, in particular several vacuum pumps are fastened in the arrangement by means of fastening rails, the convenient operating concept enables simple and uncomplicated maintenance or replacement of individual vacuum components. This is of particular advantage in the case of particularly high-maintenance vacuum arrangements.

In order to rotate the eccentric device from the release state to the clamped state—and vice versa—the eccentric device can have an actuating device which can be arranged, for example, in an end area of the eccentric device, in particular in an end area with respect to a longitudinal axis of the eccentric device. This can be designed particularly simply as a receiving device for a tool, for example as a coupling for a hexagonal or square key, which then serves to initiate the rotational movement of the eccentric device about its longitudinal axis. Operation is even more convenient if the actuating device is in the form of a lever arrangement which can be permanently installed on the eccentric device. Lever end positions, which correspond, for example, to the clamping state or the release state of the eccentric device, can have latching points.

In order to alert an operator of the fastening rail to the end positions of the eccentric device or to relevant positions of the eccentric device, for example latching points or end points, or to generally indicate an angle of rotation of the eccentric device, the actuating device and/or the guide device can have corresponding markings, for example arrows or scales.

In order to enable the eccentric device to be actuated from different sides of the eccentric device, each end section of the eccentric device can have an actuating device.

In principle, however, a single actuating device is sufficient for an eccentric device, so that access to the actuating device is only required from one side for assembly or disassembly, which means that access in the event of service or repairs is conveniently possible, while the space required for the vacuum system is advantageously compact can be.

A rotation of the eccentric device is made possible by a rotatable mounting of the eccentric device in the fastening rail. For this purpose, the eccentric device can be arranged in the fastening rail so that it can slide over the entire surface or can be mounted by means of roller bearings, for example ball, roller or nail bearings. The eccentric device can be secured against axial displacement or removal from the fastening rail by a blocking element, for example a screw head of a screw, a washer or the like, which can be arranged in particular with enough play in the area of an end section of the eccentric device to continue to prevent rotation of the to allow eccentric device.

Advantageous developments of the invention can be found in the dependent claims, the description and the drawing.

According to the invention, the eccentric device is arranged in the guide section of the fastening rail. The guide surface can be arranged parallel to the surface section and, for example, can be attached to and spaced from the surface section by means of the attachment section. The guide section can have a guide surface on which the flange section slides along the longitudinal axis of the fastening rail when it is pushed into it. An eccentric device arranged in the guide section can thus apply a force in the direction of the surface section to the flange section in the clamped state.

According to the invention, the eccentric device comprises at least one eccentric section, the cross section of which is configured eccentrically in a plane perpendicular to a longitudinal axis of the eccentric device. The eccentric section can be arranged eccentrically in a plane perpendicular to a longitudinal axis of the eccentric device.

According to the invention, a curvature of the eccentric portion varies in its circumferential direction. In particular, the at least one active surface is at least partially arranged on the eccentric section. For example, the eccentric shape in cross section can be produced from two—or more—different radii running tangentially into one another, or also, at least in sections, can have an at least essentially continuously changing radius. The cross-sectional area may also be an appropriate free-form area.

The eccentric device can in particular be designed such that the active surface in the release state is flush with the guide surface of the guide section or at least such that the active surface on the side facing the flange section does not protrude beyond the guide surface or the guide section.

To generate a holding force in the direction of the surface section, the eccentric device can be designed such that the active surface rises above the guide surface on the side facing the flange section in the clamped state and thus generates a lifting movement of the flange section. The shape of the eccentric section is therefore decisive for the kinematics of the fixing or fastening function, ie for releasing and holding the flange section.

According to an advantageous embodiment, the eccentric device and/or the guide section can have means by which an insertion movement of the flange section between the guide section and the surface section can be converted into a rotation of the eccentric device into the clamping state. Such means can be used for self-locking of the fastening rail by automatically generating a lifting and/or holding force on the flange section when the same is pushed in. It can thus be ensured that a vacuum component having the flange portion is reliably secured in the mounting rail without any additional action having to be taken. The flange section can be raised or clamped, for example, up to the self-locking of the eccentric device or just so far until the required angle of rotation of the eccentric device for securely fastening the flange section to the surface section is reached. Alternatively, a complete self-locking of the eccentric device into the clamped state cannot be provided by such means, but a pre-locking so that the angle of rotation of the eccentric device, which must be generated by the actuating device until the clamped state is reached, can be reduced.

The conversion of the insertion movement into the twisting of the eccentric device can be achieved in very different constructive ways via a form fit and/or a friction fit. For example, the funds can Drivers, in particular a driver or the like that protrudes beyond the guide surface of the guide section, which is arranged on the eccentric device and which, when the flange section is pushed in, is gripped by the latter and taken along, so that the eccentric device is rotated as a result. The flange section itself can, for example, also have a guide for the driver, in particular a recess into which the driver can engage and through which it can optionally be slidably guided as the flange section continues to be pushed in.

Alternatively or additionally, the eccentric device can also be designed in such a way that the active surface does not end flush with the guide surface of the guide section in the release state, but instead protrudes at least partially beyond the guide surface. Thus, when the flange section is pushed in, the active surface itself can also serve as a driver, so that the pushing in of the flange section causes the eccentric device to rotate. This can be implemented in a structurally particularly uncomplicated manner if the longitudinal axis of the eccentric device is arranged perpendicularly to the direction of insertion. Alternatively or additionally, the twisting of the eccentric device can also be produced by a frictional connection with the flange section. The surfaces involved can be treated and/or structured accordingly to increase the friction acting between them.

The longitudinal axis of the eccentric device and/or the eccentric section can be arranged at least essentially parallel to a longitudinal axis of the fastening rail and/or the guide section. The direction of the longitudinal axis of the fastening rail advantageously also corresponds to the insertion direction of the flange section. Thus, depending on the specific configuration of the eccentric device, a holding force can be generated on a flange section at one, all or more positions along the longitudinal extent of the fastening rail, with actuation of the parallel to the fastening rail arranged eccentric device by means of a single, on the front side of the mounting rail, ie on the insertion side for the flange portion, arranged actuating device is possible.

According to a further embodiment, the longitudinal axis of the eccentric device and/or the eccentric section is arranged at least essentially perpendicular to a longitudinal axis of the fastening rail and/or the guide section. The eccentric device and/or the eccentric section can thus be arranged at a suitable point along the longitudinal extent of the fastening rail, for example directly in the insertion area for the flange section or at the opposite end of the fastening rail.

In principle, the longitudinal axis of the eccentric device and/or the eccentric section and the fastening rail and/or the guide section can be arranged at any desired angle to one another, as a result of which an optimal adaptation to spatial conditions is possible.

The eccentric section can extend in the direction of the longitudinal axis of the eccentric device at least essentially over the entire extension of the fastening rail and/or the guide section and/or can be continuous. If the eccentric device extends along the fastening rail, a single eccentric device can be sufficient to provide a holding force for one or more flange sections over the entire length of the rail. With the eccentric device running transversely to the fastening rail, contact pressure is possible over at least approximately the entire width of the inserted flange, i.e. over the extension of the flange transversely to the direction of insertion.

The eccentric device can also have at least two eccentric sections arranged at a distance from one another. For example, the eccentric device comprise a one-piece eccentric shaft, which has only sections of eccentric sections and intermediate connecting sections. Such an interrupted or stepped eccentric shaft can advantageously reduce the friction when the eccentric device rotates, while a holding force can be generated on a flange section distributed over the extent of the eccentric device.

In principle, the eccentric section or sections or possibly the entire eccentric shaft can be made of brass, bronze, steel, stainless steel, nickel-plated steel, hardened steel or aluminum. For further optimization, the eccentric section(s) or possibly the entire eccentric shaft can be made from a friction-reducing and/or wear-resistant material or can be coated with such a material.

According to a further embodiment, the eccentric device has at least one latching element which defines an end position of the eccentric section in the clamping state and/or an end position of the eccentric section in the release state. The latching elements can be formed in particular by the eccentric shape of the eccentric section and, for example, as latching surfaces formed tangentially on the cross-sectional area. A stop or several stops can also be provided, by means of which certain positions of the flange section relative to the components of the fastening rail or certain positions of the eccentric device can be defined.

Alternatively or additionally, a position, in particular an end position of the eccentric section or the reaching of the stop can be detected by means of a sensor device. In particular, the basic attachment status of an eccentric device can be queried electronically using suitable sensors. For example, light barriers, contact detection sensors, angle of rotation sensors or other known sensor devices can be used for this purpose will. This has the advantage, particularly in connection with large vacuum arrangements that have numerous vacuum components that are connected to one another by means of fastening rails, that central monitoring of the entire system becomes possible. Increased system safety and reliability can thus be achieved, particularly in the case of vacuum arrangements which, for example, require intensive maintenance due to harsh process conditions, particularly in semiconductor or coating processes.

The angle of rotation of the eccentric device can be limited so that, for example, an "over-rotation" of the eccentric device is prevented. This can also be defined by the design of the eccentric shape. In particular, the maximum angle of rotation of the eccentric device between the release state and the clamped state can be less than 360 degrees, in particular less than 270 degrees or less than 225 degrees. In addition, the end positions in the clamped and/or released state can be indicated by markings, which are attached in particular in the area of an actuating device, for easier operation.

Alternatively or additionally, over-rotation of the eccentric device can also be prevented by means of geometric stops which are arranged on the eccentric device, the guide section and/or the fastening section and which can define end positions of the eccentric section. Reaching a stop can be detected by means of a suitable sensor device.

Furthermore, the shape of the at least one eccentric section can also vary in the longitudinal direction of the eccentric device. For example, the eccentric section can be angularly twisted along a longitudinal axis in such a way that any torsion that may occur along the longitudinal extent of the eccentric section is compensated for when a rotary movement is initiated from an end section of the eccentric device. The torque to be applied can thus also be reduced or controlled as a function of the angle. In other words can the design of the eccentric section can vary in the axial direction in such a way that a torsion that occurs when the section is twisted is compensated for and so that the same contact pressure force is generated everywhere along the eccentric section. This also applies analogously to eccentric devices with two or more eccentric sections.

The eccentric device can be designed in several parts. The eccentric device can have a multi-part eccentric shaft, which can in particular be composed of standard eccentric parts. In addition, it is also conceivable for the eccentric device to comprise an in particular helical shaft on which one or more eccentric sections are attached in a positive or non-positive manner. A particularly cost-effective production is thus possible.

In addition, an eccentric device can be configured particularly cost-effectively using known eccentric screws. In this case, an eccentric screw itself can serve as an eccentric device, in particular a screw head of the eccentric screw can have the active surface of the eccentric device. Alternatively or additionally, the eccentric screw can be screwed to an additional eccentric section that forms the active surface or at least part of it. In the simplest case, for example, this can be a round rod with an internal thread that sits eccentrically on the eccentric screw. Other configurations of the eccentric section that is additionally screwed on are also possible.

In order to secure a flange section particularly reliably in the fastening rail, the at least one eccentric section can be shaped in such a way that clamping achieved in the clamped state is self-locking. The self-locking can be achieved, for example, by a friction fit, in particular between the eccentric device and the flange section or the eccentric device and the guide section. A friction fit can can be advantageously increased through the use of knurled or otherwise surface-structured contact surfaces. Structures of this type that produce a form fit or friction fit can also contribute to conveying the flange section in a preferred direction into a defined end position. That is, the structures can be designed in such a way that the flange section is pulled (supportingly) by twisting the eccentric device.

According to a further embodiment, the fastening rail can have at least two eccentric devices, the longitudinal axes of which are in particular arranged parallel to one another. While this is generally possible, the use of several eccentric devices is of particular relevance if the eccentric devices are arranged transversely to the direction of insertion and/or transversely to the longitudinal axis of the fastening rail. In this case, several eccentric devices can be used to ensure that a flange section is raised sufficiently evenly against the surface section over its entire extent arranged in the fastening rail. The multiple eccentric devices can be arranged in the insertion area and at the opposite end of the fastening rail or, depending on accessibility, also in the middle rail area.

A guide surface of the guide section that interacts with the flange section can have a bevel and/or a curvature at least in sections. For example, a slope arranged on the guide surface can serve to push a flange section onto a plateau arranged at the end of the slope when it is pushed into the fastening rail, which already presses the flange section in the region of the plateau against the surface section or a seal arranged on the surface section. In this case, an eccentric device arranged in the insertion area can suffice to lift the flange section completely and sealingly against the surface section. One in the insertion area of the mounting rail arranged bevel can serve as a guide to facilitate the introduction of the flange portion in the mounting rail. Appropriate curvature can produce the same effect in each case.

Basically, it should be noted that one or more seals can be provided, which are arranged at least in sections between the flange section and the surface section in order to achieve a reliable sealing effect

In addition, the fastening rail, for example the guide surface, can have a stop which facilitates positioning of the flange section in the longitudinal direction, i.e. in the direction of insertion, of the fastening rail and in particular prevents the flange section from being pushed too far, for example beyond the end of the fastening rail.

A further aspect of the invention relates to a fastening system for fastening a first component of a vacuum system to a second component of a vacuum system, in particular one of the components being a vacuum pump. The fastening system comprises a flange section which is arranged on the first component, a surface section which is arranged on the second component and which can be brought into contact with a contact surface of the flange section, and at least one fastening rail which is fastened to the second component.

In particular, the fastening system is designed so that two or more first vacuum components and two or more second vacuum components can be fastened to one another by means of at least one fastening rail. For example, multiple vacuum pumps, each having a flange portion, can be assembled into a mounting rail or assembly "threaded" from a plurality of mounting rails attached to one or more second vacuum components.

Yet another aspect of the invention relates to a vacuum assembly having a first vacuum component and a second vacuum component coupled together by a fastening system as previously described.

Fig. 1

eine Frontalansicht einer Vakuumanordnung mit einer Vakuumpumpe und einer Vakuumkammer, die mittels Befestigungsschienen miteinander gekoppelt sind;

Fig. 2A

eine perspektivische Darstellung einer Befestigungsschiene mit einem durchgehenden Exzenterabschnitt gemäß einer ersten Ausführungsform;

Fig. 2B

eine Detailansicht einer Betätigungseinrichtung des Exzenterabschnitts von Fig. 2A;

Fig. 2C

eine Seitenansicht der Befestigungsschiene von Fig. 2A;

Fig. 2D

eine Frontalansicht und eine Draufsicht auf die Befestigungsschiene von Fig. 2A;

Fig. 2E

eine perspektivische Frontalansicht der Befestigungsschiene von Fig. 2A mit in einem Freigabezustand befindlicher Exzentereinrichtung;

Fig. 2F

eine perspektivische Frontalansicht der Befestigungsschiene von Fig. 2A mit in einem Klemmzustand befindlicher Exzentereinrichtung;

Fig. 3A

eine perspektivische Darstellung einer Befestigungsschiene mit drei beabstandet angeordneten Exzenterabschnitten gemäß einer zweiten Ausführungsform;

Fig. 3B

eine Detailansicht einer Betätigungseinrichtung des Exzenterabschnitts von Fig. 3A;

Fig. 3C

eine Seitenansicht der Befestigungsschiene von Fig. 3A;

Fig. 3D

eine Frontalansicht und eine Draufsicht auf die Befestigungsschiene von Fig. 3A;

Fig. 3E

eine perspektivische Frontalansicht der Befestigungsschiene von Fig. 3A mit in einem Freigabezustand befindlicher Exzentereinrichtung;

Fig. 3F

eine perspektivische Frontalansicht der Befestigungsschiene von Fig. 3A mit in einem Klemmzustand befindlicher Exzentereinrichtung;

Fig. 4A

eine perspektivische Darstellung einer Befestigungsschiene gemäß einer dritten Ausführungsform mit einem Exzenterabschnitt, dessen Längsachse sich senkrecht zu einer Längsachse der Befestigungsschiene erstreckt;

Fig. 4B

eine Detailansicht der Exzentereinrichtung der Befestigungsschiene von Fig. 4A;

Fig. 4C

eine Seitenansicht der Befestigungsschiene von Fig. 4A;

Fig. 4D

eine Frontalansicht und eine Draufsicht auf die Befestigungsschiene von Fig. 4A;

Fig.4E

eine perspektivische Darstellung der Befestigungsschiene von Fig. 4A mit einer Betätigungseinrichtung der Exzentereinrichtung;

Fig. 5A

eine perspektivische Darstellung einer Befestigungsschiene gemäß einer vierten Ausführungsform mit einem ersten und einem zweiten Exzenterabschnitt, deren Längsachsen sich jeweils senkrecht zu einer Längsachse der Befestigungsschiene erstrecken;

Fig. 5B

eine Detailansicht der Betätigungseinrichtungen des ersten und des zweiten Exzenterabschnitts von Fig. 5A;

Fig. 6A

eine Querschnittsansicht eines Exzenterabschnitts für eine Befestigungsschiene gemäß einer fünften Ausführungsform;

Fig. 6B

eine Querschnittsansicht eines Exzenterabschnitts für eine Befestigungsschiene gemäß einer sechsten Ausführungsform;

Fig. 7A

eine perspektivische Darstellung einer Exzenterschraube für eine Befestigungsschiene gemäß einer siebten Ausführungsform; und

Fig. 7B

eine Draufsicht auf eine Befestigungsschiene mit der Exzenterschraube von Fig. 7A.

The invention is described below purely by way of example using possible embodiments with reference to the accompanying drawings. Show it:

1

a front view of a vacuum arrangement with a vacuum pump and a vacuum chamber, which are coupled to one another by means of fastening rails;

Figure 2A

a perspective view of a mounting rail with a continuous eccentric section according to a first embodiment;

Figure 2B

a detailed view of an actuating device of the eccentric section of FIG Figure 2A ;

Figure 2C

a side view of the mounting rail of Figure 2A ;

2D

a front view and a plan view of the mounting rail of Figure 2A ;

Figure 2E

a perspective front view of the mounting rail of Figure 2A with the eccentric device being in a release state;

Figure 2F

a perspective front view of the mounting rail of Figure 2A with the eccentric device located in a clamped state;

Figure 3A

a perspective view of a mounting rail with three spaced eccentric sections according to a second embodiment;

Figure 3B

a detailed view of an actuating device of the eccentric section of FIG Figure 3A ;

Figure 3C

a side view of the mounting rail of Figure 3A ;

3D

a front view and a plan view of the mounting rail of Figure 3A ;

Figure 3E

a perspective front view of the mounting rail of Figure 3A with the eccentric device being in a release state;

Figure 3F

a perspective front view of the mounting rail of Figure 3A with the eccentric device located in a clamped state;

Figure 4A

a perspective view of a mounting rail according to a third embodiment with an eccentric section whose longitudinal axis extends perpendicularly to a longitudinal axis of the mounting rail;

Figure 4B

a detailed view of the eccentric device of the mounting rail of Figure 4A ;

Figure 4C

a side view of the mounting rail of Figure 4A ;

Figure 4D

a front view and a plan view of the mounting rail of Figure 4A ;

Figure 4E

a perspective view of the mounting rail of Figure 4A with an actuating device of the eccentric device;

Figure 5A

a perspective view of a mounting rail according to a fourth embodiment with a first and a second eccentric section, whose longitudinal axes each extend perpendicular to a longitudinal axis of the mounting rail;

Figure 5B

a detailed view of the actuating devices of the first and the second eccentric section of FIG Figure 5A ;

Figure 6A

a cross-sectional view of an eccentric portion for a mounting rail according to a fifth embodiment;

Figure 6B

a cross-sectional view of an eccentric portion for a mounting rail according to a sixth embodiment;

Figure 7A

a perspective view of an eccentric screw for a mounting rail according to a seventh embodiment; and

Figure 7B

a plan view of a mounting rail with the eccentric screw of Figure 7A .

1 shows a vacuum arrangement 10, comprising a first vacuum component, here a vacuum pump, specifically a turbomolecular pump 12, and a second vacuum component, here a vacuum chamber 16, which are connected to one another by means of a fastening system 20.

The turbomolecular pump 12 includes a rotor arrangement whose rotor axis R extends perpendicular to the plane of the drawing. A rectangular pump flange 14 is provided at a pump top and has a plurality of openings to a rotor accommodating space (not shown). Each of these openings is provided with a sealant and is intended to connect the rotor space of the turbomolecular pump 12 to a recipient, here to the vacuum chamber 16 .

The fastening system 20 for fastening the turbomolecular pump 12 to the vacuum chamber 16 comprises on the one hand the flange section 14 of the turbomolecular pump 12 and on the other hand a surface section 18 of the vacuum chamber 16, which also has one or more openings in order to communicate with the rotor space of the turbomolecular pump 12 (not shown). and which can be brought into abutment with a contact surface of the flange portion 14 . In addition, the fastening system 20 comprises a first fastening rail 22 and a second fastening rail 22'.

The first and second fastening rails 22 and 22' each have a guide section 26, 26' which cooperates with the side of the flange section 14 which faces away from the surface section 18 and which guides the flange section 14 during assembly in the fastening rail 22, 22'. respectively. The fastening rails 22, 22' are fastened to the vacuum chamber 16 by means of a fastening section 24, 24'. The fastening rails 22, 22' are approximately L-shaped, with the guide section 26, 26' and the fastening section 24, 24' being aligned essentially perpendicularly to one another. Thus, the flange portion 14 of the turbomolecular pump 12 between the guide portions 26, 26 'of the mounting rails 22, 22' and the Surface portion 18 of the vacuum chamber 16 are inserted and recorded.

In addition, each of the fastening rails 22, 22' has a rotatably mounted eccentric device 28, 28', which is arranged in the guide section 26, 26' of the fastening rail 22, 22'. In 1 the eccentric device 28, 28' is shown in its clamped state, in which it applies a force directed towards the surface section 18 to the flange section 14 and thus clamps the flange section 14 and the surface section 18 together in a sealing manner. In the clamped state, an active surface 48 of the eccentric devices 28, 28' protrudes (see e.g Figures 2E, 2F ) in the direction of the flange section 14 beyond the guide sections 26, 26' and thus leads to a lifting of the flange section 14.

By rotating, the eccentric device 28, 28' can be brought into a release state in which the holding force acting upwards is removed from the flange section 14 and this is released. This is based on the detailed drawings of the Figures 2 to 6 clarified.

Figure 2A 12 shows a first embodiment of a fastening rail 22 with a fastening section 24 for fastening to a surface section 18 (not shown). The fastening section has bores 30 here, by means of which the fastening rail 22 can be firmly screwed to the surface section 18 . The guide section 26 has a guide surface 32 which is arranged spaced parallel to the surface section 18 when the fastening rail 22 is in a mounted state. The flange section 14 , for example of a turbomolecular pump 12 , can be introduced into the fastening rail 22 from an end face 34 of the fastening rail 22 , being guided by the guide surface 32 in the process.

On an end section of the fastening rail 22 opposite the end face 34 (seen along a longitudinal axis B of the rail 22), the latter has an axial stop 36 which prevents the flange section 14 from being pushed beyond the end of the fastening rail 22. In the area of the end face 34, ie from the insertion side of the flange section 14, the fastening section 24 has a bevel 38 which facilitates the introduction of the flange section 14 into the fastening rail 22.

The eccentric device 28 is embedded in the guide section 26 and is rotatably mounted therein. A longitudinal axis E of the eccentric device 22 (see 2D ) is arranged parallel to the longitudinal axis B of the fastening rail 22 and also of the guide section 26 in the first embodiment. In the area of the end face 34, the eccentric device has an actuating device 40, which is designed here as a hexagonal opening ( Figure 2B ). With a corresponding tool, the eccentric device 28 can be rotated by means of the actuating device 40 between the clamping state and the release state--and vice versa--the associated end positions of the eccentric device 22 being marked with 0 and 1 for increased user-friendliness. In the embodiment shown, the actuating device 40 and the entire fastening rail 22 can be operated from the insertion side of the flange section 14 .

As a safeguard against the eccentric device 28 being pulled out axially from the fastening rail 22 Figure 2C a locking screw 42, which is subject to play to the extent that rotation of the eccentric device 28 as intended is possible.

According to the first embodiment of Figures 2A to 2F the eccentric device 22 has a single eccentric section 44 with an effective surface 48 . The eccentric section 44 extends in the direction of the longitudinal axis E of the eccentric device 22 ( 2D ) essentially over the entire extension length of the fastening rail 22 and the guide section 26 and is designed to be continuous or uninterrupted. As a result, in the clamped state, the flange section 14 can be uniformly subjected to a holding force over its entire length and thus optimally pressed against the surface section 18 (not shown). At the same time, any positioning of the flange section 14 within the fastening rail 22 is possible without any disadvantage for the fastening and/or sealing of the connection.

In Figures 2E and 2F the cross-sectional shape or area 46 of the eccentric section 44 can be seen in each case (in a plane perpendicular to the longitudinal axis E). The cross-sectional area 46 is designed and arranged eccentrically, the eccentric shape of the cross-section 46 being characterized in that its curvature varies in the circumferential direction. In some sections, the eccentric shape has different radii that (continuously) merge into one another (see also examples Figure 6B ). In other sections, in turn, the eccentric shape is provided with latching elements, with the latching elements each defining an end position of the eccentric device 22 . A first end face 50 defines the release state ( Figure 2E ) and a second, less pronounced end surface 52 the clamped state (see Figure 2F ).

in the in Figure 2E In the release state shown, the latching surface 50 together with the guide surface 32 forms a flat surface on which the flange section 14 can slide without the application of force. in the in Figure 2F In the clamping state shown, the effective surface 48 of the eccentric device 28 protrudes beyond the guide surface 32, so that the flange section 14 is subjected to a holding force upwards, i.e. in the direction of the surface section 18 (not shown), and is pressed against the surface section 18. An achieved clamping in the clamped state can be self-locking through a suitable eccentric geometry.

Figures 3A to 3F show a mounting rail 22 according to a second embodiment. While these are largely related to the first embodiment ( Figures 2A to 2F ) matches, the eccentric device 28 in particular has a different configuration. The eccentric device 28 according to the second embodiment has a plurality of eccentric sections 44 which are arranged at a distance from one another ( Figures 3E, 3F ). Thus, when the eccentric device 28 mounted in the guide section 26 rotates, the friction is significantly lower, while other properties of the eccentric device 28 remain essentially unchanged, at least functionally. During the clamping process, the holding force is also introduced continuously, since the effective surface 48 is not segmented. The sections 44 merge into the surface 48 at their ends.

In the embodiment shown, the eccentric device 28 is formed in one piece despite the eccentric sections 44 being spaced apart. In principle, however, such an eccentric device 28 could also be made in several parts, in that various standard eccentric parts are joined together, for example by means of screw threads, with elements that serve as eccentric section 44 and connecting elements lying in between being joined together alternately.

Figures 4A to 4E show a fastening rail 22 according to a third embodiment with an eccentric device 28, the longitudinal axis E of which is arranged perpendicularly to the longitudinal axis B of the fastening rail 22. The eccentric device 28 has an eccentric section 44 which extends along the eccentric device 28 over the entire length of the eccentric device 28 and essentially over the entire width of the fastening rail.

The actuating device 40 corresponds to that of the first and second embodiment. However, it is not on the end face 34, but in an end portion of the Eccentric device 28, which is accessible from a longitudinal side 54 of the mounting rail 22 ( Figure 4E ).

In its clamped state, the eccentric device 28 according to the third embodiment generates an upwardly directed holding force, which acts on an inserted flange section 14, only in the area of the end face 34, ie in the insertion area of the fastening rail 22. For effective pressing of the flange section 14 against a surface section 18 , the fastening rail 22 also has a bevel 56 and a plateau 58 in the area of the axial stop 36 . When a flange section 14 is pushed into the fastening rail 22 in the released state, the flange section 14 is lifted by the bevel 56 and finally lifted onto the plateau 58 . Bevel 56 and plateau 58 are dimensioned in such a way that flange section 14 is already effectively pressed against surface section 18 in the region of plateau 58 .

Twisting the eccentric device 28 into the clamping state causes a lifting movement on the flange section 14 in the insertion area of the fastening rail 22 by the effective surface 48 of the eccentric device 28 protruding from the guide surface 32. The flange section 14 is then reliably fixed to the surface section 18.

Figures 5A and 5B show a fastening rail 22 according to a fourth embodiment. The fastening rail 22 has two eccentric devices 28 and 28" whose longitudinal axes E are arranged parallel to one another but perpendicular to the longitudinal axis B of the fastening rail 22. The eccentric devices 28, 28" each have an actuating device 40, 40" on the longitudinal side 54 of the An actuating device is also conceivable, by means of which the eccentric devices 28, 28'' can be actuated together.

In the specific embodiment shown, the eccentric devices 28 and 28" are both arranged in the area of the end face 34 of the fastening rail 22 and are only spaced apart from one another by a slight axial offset x with respect to the longitudinal axis B of the fastening rail 22. In principle, however, the axial distance x between the eccentric devices 28 and 28" can be adjusted as desired. For example, the eccentric device 28'' can be arranged in a central area of the fastening rail 22 with respect to the longitudinal extension.

In Figures 6A and B possible cross-sectional shapes 46 for eccentric sections 44 are shown. Figure 6A shows an eccentric shape that is formed from two (continuously) merging circular surfaces with different radii Rx and Ry, which have a center distance e.

Another possible eccentric shape is in Figure 6B shown, wherein the cross-sectional shape 46 has a radius of curvature Rx in sections in the circumferential direction, which decreases continuously in a further section from a radius Rx4 to a radius Rx1, with the radii respectively merging into one another. In a third section, the cross-sectional area 46 has the end face 50, which in the present exemplary embodiment defines the release state.

The cross-sectional areas 46 of an eccentric section 44 can fundamentally vary in the direction of the longitudinal axis E of the eccentric device 28 . For example, an eccentric section 44 can have an in Figure 6B have the eccentric shape shown, with the cross-sectional area 46 being arranged continuously rotated by a small angle along the longitudinal axis E. Such an angularly twisted eccentric section 44 can be advantageous in order to compensate for torsion of the eccentric device 28 when a rotation is initiated via an actuating device 40 arranged in an end section of the eccentric device 28 . In principle, this is conceivable with any cross-sectional shape 46 .

In Figure 7A An eccentric screw 60 is shown, which has a screw head 62 and a threaded portion 64 which is arranged eccentrically with respect to the screw head 62 . A hexagonal opening which is also arranged eccentrically in the screw head 62 serves as an actuating device 40. The hexagonal opening and the threaded section 64 are arranged coaxially.

Figure 7B shows a fastening rail 22 in a plan view with an eccentric device 28 which is designed as an eccentric screw 60 . The screw head 62 lies in a recess in the guide section 26 and forms the effective surface 48 . At the same time, the screw head 62 also has the actuating device 40 . The threaded section 64 is screwed to the guide section 26 and serves to guide the eccentric screw 60. When the eccentric screw 60 is rotated, the effective surface 48 of the screw head 62 rises to different degrees, depending on the angle of rotation, above the guide surface 32 of the guide section 26, so that an inserted flange section is lifted and can thus be subjected to a holding force and pressed against a surface section.

Reference List

10

vacuum arrangement

12

turbomolecular pump

14

Pump flange/flange section

16

vacuum chamber

18

surface section

20

fastening system

22, 22'

mounting rail

24, 24'

attachment section

26, 26'

guide section

28, 28', 28"

eccentric device

30

drilling

32

guide surface

34

face

36

axial stop

38

bevel

40, 40"

actuating device

42

locking screw

44

eccentric section

46

Cross-section or cross-sectional shape/area

48

effective area

50, 52

end face

54

long side

56

oblique

58

plateau

60

eccentric screw

62

screw head

64

threaded section

R

rotor axis

B, E

longitudinal axis

x

offset

Rx, Ry Rx1 to Rx4

radius

e

center distance

Claims (14)

1. A fastening rail (22) for fastening a flange section (14) of a first component of a vacuum system (10) to a surface section (18) of a second component of the vacuum system (10), said fastening rail (22) comprising

   a guide section (26) which is configured to cooperate with a side of the flange section (14) facing away from the surface section (18);

   a fastening section (24) which is configured to fasten the fastening rail (22) to the second vacuum component such that the flange section (14) can be inserted, in particular can be pushed in, between the guide section (26) and the surface section (18); and

   a rotatably supported eccentric device (28) which is arranged in the guide section (26), and which is rotatable between a clamping state and a release state and which is adapted to apply, via at least one effective area (48), a holding force directed into the direction of the surface section (18) to the flange section (14) in its clamping state, in particular to generate a stroke of the flange section, and to release the flange section (14) in its release state,

   wherein the eccentric device (28) comprises at least one eccentric section (44) whose cross-section (46) is eccentrically designed in a plane perpendicular to a longitudinal axis (E) of the eccentric device (28), characterized in that

   a curvature of the eccentric section (44) varies in the peripheral direction of the eccentric section (44).
2. A fastening rail (22) in accordance with claim 1,
   wherein the cross-section (46) of the at least one eccentric section (44) is eccentrically arranged in a plane perpendicular to a longitudinal axis (E) of the eccentric device (28).
3. A fastening rail (22) in accordance with claim 1 or claim 2,
   wherein the eccentric device (28) and/or the guide section (26) has/have means by which a push-in movement of the flange section (14) between the guide section (26) and the surface section (18) can be converted into a rotation of the eccentric device (28) into the clamping state.
4. A fastening rail (22) in accordance with at least one of the preceding claims, wherein the longitudinal axis (E) of the eccentric device (28) and/or of the eccentric section (44) is arranged at least substantially in parallel with a longitudinal axis (B) of the fastening rail (22) and/or of the guide section (26), or wherein the longitudinal axis (E) of the eccentric device (28) and/or of the eccentric section (44) is arranged at least substantially perpendicular to a longitudinal axis (B) of the fastening rail (22) and/or of the guide section (26).
5. A fastening rail (22) in accordance with at least one of the preceding claims, wherein the eccentric section (44) extends at least substantially over the total extent of the fastening rail (22) and/or of the guide section (26) in the direction of the longitudinal axis (E) of the eccentric device (28) and/or is formed continuously.
6. A fastening rail (22) in accordance with at least one of the claims 1 to 4,
   wherein the eccentric device (28) has at least two eccentric sections (44) arranged spaced apart.
7. A fastening rail (22) in accordance with at least one of the preceding claims, wherein the eccentric device (28) has at least one latch element which defines an end position of the eccentric section (44) in the clamping state and/or an end position of the eccentric section (44) in the release state, and/or wherein a position, in particular an end position of the eccentric section (44), can be detected by means of a sensor device.
8. A fastening rail (22) in accordance with at least one of the preceding claims, wherein a shape of the at least one eccentric section (44) varies in the longitudinal direction of the eccentric device (28).
9. A fastening rail (22) in accordance with at least one of the preceding claims, wherein the eccentric device (28) is formed in multiple parts.
10. A fastening rail (22) in accordance with at least one of the preceding claims, wherein a shape of the at least one eccentric section (44) is selected such that a clamping achieved in the clamping state is self-locking.
11. A fastening rail (22) in accordance with at least one of the preceding claims, wherein the fastening rail (22) has at least two eccentric devices (28), in particular wherein their longitudinal axes (E) are arranged in parallel with one another.
12. A fastening rail (22) in accordance with at least one of the preceding claims, wherein a guide surface (32) of the guide section (26) cooperating with the flange section (14) at least sectionally has a slope (56) and/or a curvature.
13. A fastening system (20) for fastening a first component to a second component of a vacuum system (10), in particular wherein one of the components is a vacuum pump (12), said fastening system (20) comprising

    a flange section (14) which is arranged at the first component;

    a surface section (18) which is arranged at the second component and which can be brought into contact with a contact surface of the flange section (14); and

    at least one fastening rail (22) in accordance with at least one of the preceding claims which is fastened to the second component.
14. A vacuum arrangement (10) comprising a first vacuum component and a second vacuum component which are coupled to one another by means of a fastening system (20) in accordance with claim 13.

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