EP3665437A1 - Gyroscope vibratoire à facteur de qualité élevé, en forme de fleur de vie, en silicium, pour système micro-électromécanique (mems) - Google Patents

Gyroscope vibratoire à facteur de qualité élevé, en forme de fleur de vie, en silicium, pour système micro-électromécanique (mems)

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Publication number
EP3665437A1
EP3665437A1 EP18845128.0A EP18845128A EP3665437A1 EP 3665437 A1 EP3665437 A1 EP 3665437A1 EP 18845128 A EP18845128 A EP 18845128A EP 3665437 A1 EP3665437 A1 EP 3665437A1
Authority
EP
European Patent Office
Prior art keywords
stiffener ring
anchor
resonator
curved
springs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP18845128.0A
Other languages
German (de)
English (en)
Other versions
EP3665437B1 (fr
EP3665437A4 (fr
Inventor
Lian X. Huang
Logan D. Sorenson
Raviv Perahia
Hung Nguyen
David T. Chang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HRL Laboratories LLC
Original Assignee
HRL Laboratories LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of EP3665437A1 publication Critical patent/EP3665437A1/fr
Publication of EP3665437A4 publication Critical patent/EP3665437A4/fr
Application granted granted Critical
Publication of EP3665437B1 publication Critical patent/EP3665437B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
    • H03H3/0077—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients by tuning of resonance frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2431—Ring resonators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02283—Vibrating means
    • H03H2009/0233—Vibrating means comprising perforations
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H2009/0244—Anchor loss

Definitions

  • This disclosure relates to resonators and
  • gyroscopes and. in particular vibratory gyroscopes
  • Prior art vibratory gyroscopes include silicon disk resonator gyroscopes (DRGs), and example prior art silicon DRGs are described in U.S. Patent No. 6,944,931B2, issued September 20, 2005 and U.S. Patent No. 7,040,163B2, issued May 9, 2006, which are incorporated herein by reference.
  • DRGs silicon disk resonator gyroscopes
  • prior art silicon DRGs may have resonance frequencies of around 14 kHz and Q-factors of around 80,000. DRGs are sensitive to vibration, shock, and temperature. Also due to their natural frequency, silicon DRGs do not operate well under harsh vibration and thermal conditions. To reduce these vibration, shock, and temperature effects, prior art DRGs require an undesirable, size, weight and volume to provide some mitigation,
  • a resonator comprises an anchor, an outer stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring.
  • the outer stiffener ring has a first diameter and the anchor is concentric with the outer
  • stiffener ring and has a second diameter less than the first diameter .
  • the resonator further comprises at least one inner stiffener ring concentric with the outer stiffener ring, wherein the plurality of curved springs are coupled to the at least one inner stiffener ring, and wherein the outer stiffener ring has a first diameter that is greater than a second diameter of the inner stiffener ring,
  • the plurality of curved springs comprise a first set of springs each having a clockwise curvature between the anchor and the outer
  • the plurality of curved springs comprise a first set of curved springs each having a convex curvature between the anchor and the outer stiffener ring, and a second set of curved springs each having a concave curvature between the anchor and the outer stiffener ring, and the plurality of curved springs are arranged between the anchor and the outer stiffener ring such that a respective spring having a convex curvature intersects a respective spring having a concave curvature at a same location on the inner stiffener.
  • the outer stiffener ring has a diameter ranging from 1 to 20 millimeters, the anchor has a diameter ranging from 0.1-10 millimeters , the outer stiffener ring has a width ranging from 1-500 micrometers, the
  • plurality of springs have a width ranging from 1-500
  • the resonator has a thickness ranging from 10-500 micrometers.
  • the outer stiffener ring has a aspect ratio ranging from 1:500 to 50:1, wherein the aspect ratio is the ratio of the width to the thickness of the outer stiffener ring, the plurality of curved springs with an aspect ratio ranging from 1:500 to 50:1, wherein the aspect ratio is the ratio of the width to the thickness of the springs .
  • the plurality of curved springs have a rotational symmetry about a center axis with an N fold of symmetry, where is a positive integer.
  • the resonator comprises a plurality of inner stiffener rings each concentric with the outer stiffener ring, wherein a pitch between each adjacent inner stiffener ring, or between the outer stiffener ring and a respective inner stiffener ring adjacent to the outer stiffener ring, or between the anchor and a respective inner stiffener ring adjacent to the anchor is the same.
  • the resonator comprises a plurality of electrodes outside the outer perimeter of the resonator, wherein the plurality of electrodes are not in physical contact with the outer stiffener ring, and wherein a gap is between each electrode and the outer stiffener ring.
  • the gap is filled with a gas or a vacuum.
  • the resonator comprises a plurality of internal electrodes, wherein each internal electrode is located between a curved spring and another curved spring and the at least one inner stiffener ring, or between a curved spring and another curved and the anchor, or between a curved spring and another curved and the outer stiffener ring, wherein the plurality of inner electrodes are not in physical contact with the curved springs, the inner stiffener ring, the anchor or the outer stiffener ring, and wherein a gap is between each inner electrode and adjacent curved springs, the at least one inner stiffener ring, the anchor and the outer stiffener ring,
  • the resonator has a
  • thermoelastic damping limited quality factor (QTED) greater than 150,000.
  • the resonator has a resonance frequency greater than 30 kHz.
  • the resonator comprises silicon- on- insulator (SOI).
  • SOI silicon- on- insulator
  • the resonator comprises silicon, quartz, or SiC.
  • thermoelastic damping limited quality factor (QTED) and a resonance frequency of the resonator increases with increasing width of the curved springs ,
  • the outer stiffener ring has a width greater than a width of each of the curved springs.
  • the plurality of curved springs comprise a plurality of convex springs coupled to the outer stiffener ring and pointing towards the anchor.
  • the plurality of curved springs comprise a plurality of convex springs coupled to the anchor and pointing towards the outer stiffener ring.
  • a resonator comprises an anchor, an outer stiffener ring on. an outer perimeter of the resonator, and a plurality of curved springs organized in a flower-of ⁇ life pattern,
  • the flower-of-life pattern is configured by overlapped curved springs that form outlines of leaf shapes, wherein the outlines of the leaf shapes formed include but not limited to linear, elliptical, oval, ovate, deltoid, cordate, oblong, rhomboid, obovate, oblanceolate, orbicular, lanceolate, reniform, spathulate outlines, or combinations thereof, wherein the outline of leaf shapes formed are symmetric and syromet ically arranged around the anchor, wherein the flower-of-life pattern has a rotational symmetry about a center axis with N fold of symmetry, where N is a positive integer,
  • a method of providing a resonator comprises providing a silicon-on- insulator (SOI) wafer comprising an insulator with backside silicon on one side of the insulator and front side silicon on another side of the insulator
  • the method further comprises
  • Patterning can be a form of etching or depositing.
  • depositing and patterning front side metal on the front side silicon comprises depositing metal for electrical contact to an electrode and for
  • the insulator is silicon dioxide (Si0 2 )
  • the etchant is hydrofluoric acid (HF) .
  • the outer stiffener ring has a first diameter
  • the anchor is concentric with the outer stiffener ring and has a second diameter less than the first diameter
  • patterning the front side silicon using deep reactive ion etching further comprises patterning to form at least one inner stiffener ring concentric with the outer stiffener ring, wherein the plurality of curved springs are coupled to the at least one inner stiffener ring, and wherein the outer stiffener ring has a first diameter that is greater than a second diameter of the inner stiffener ring.
  • patterning can be a form of etching or depositing.
  • the plurality of curved springs comprise a first set of springs each having a clockwise curvature between the anchor and the outer stiffener ring, and a second set of curved springs each having a counterclockwise curvature between the anchor and the outer
  • the plurality of curved springs comprise a first set of curved springs each having a convex curvature between the anchor and the outer stiffener ring, and a second set of curved springs each having a concave curvature between the anchor and the outer stiffener ring; and the plurality of curved springs are arranged between the anchor and the outer stiffener ring such that a respective spring having a convex curvature intersects a respective spring having a concave curvature at a same location on the inner stiffener,
  • the outer stiffener ring has a diameter ranging from 1 to 20 millimeters
  • the anchor has a diameter ranging from 0,1-10 millimeters
  • the outer stiffener ring has a width ranging from 1-500 micrometers
  • the resonator has a thickness ranging from 10-500 micrometers.
  • the plurality of curved springs have a rotational symmetry about a center axis with an N fold of symmetry, where N is a positive integer.
  • the method further comprises patterning a plurality of inner stiffener rings each
  • Patterning can be a form of etching or
  • the method further comprises forming a plurality of electrodes outside the outer perimeter of the resonator, wherein the plurality of electrodes are not in physical contact with the outer stiffener ring, and wherein a gap is between each electrode and the outer stiffener ring.
  • the gap is filled with a gas or a vacuum
  • the method further comprises forming a plurality of internal electrodes, wherein each internal electrode is located between a curved spring and another curved and the at least one inner stiffener ring, or between a curved spring and another curved and the anchor, or between a curved spring and another curved and the outer stiffener ring, wherein the plurality of inner electrodes are not in physical contact with the curved springs, the inner stiffener ring, the anchor or the outer stiffener ring, and wherein a gap is between each inner electrode and adjacent curved springs, the at least one inner stiffener ring, the anchor and the outer stiffener ring.
  • the outer stiffener ring has a width greater than a width of each of the curved springs
  • the plurality of curved springs comprise a plurality of convex springs coupled to the outer stiffener ring and pointing towards the anchor,
  • the plurality of curved springs comprise a plurality of convex springs coupled to the anchor and pointing towards the outer stiffener ring.
  • a method of providing a resonator comprises providing a wafer comprising an insulator with backside wafer on one side of the insulator and front side wafer on another side of the insulator, depositing and patterning front side metal on the front side wafer, patterning the front side wafer to expose the
  • insulator and to form an anchor, an outer stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring, removing a portion of the insulator to release a resonant portion of the resonator from the backside wafer, and leaving an anchor portion of the resonator attached to the backside wafer.
  • the frontside wafer comprises Si, quartz, or SiC
  • the backside wafer comprises Si, quartz, or SiC
  • FIGs . 1A and IB show a top and a tilted view, respectively, of a Flower-of-1 i fe Vibratory Gyroscope (FVG) resonator design in accordance with the present disclosure
  • FIG, 2 shows another FVG resonator design with stiffeners having a uniform pitch or uniform increase in diameter from one stiffener to another in accordance with the present disclosure
  • FIG. 3A shows a FVG resonator with peripheral electrodes
  • FIG. 3B shows an expanded view of a portion o f FIG, 3A in accordance with the present disclosure
  • FIG. 4A shows a FVG resonator with both peripheral electrodes and internal electrodes
  • FIG. 4B shows an expanded view of a portion of FIG, 4A in accordance with the present disclosure
  • FIGs. 5A, 5B, 5C and 5D show a process flow for making a Flower-of-iife Vibratory Gyroscope (FVG) resonator in accordance with the present discio
  • FVG Flower-of-iife Vibratory Gyroscope
  • FIG. 6 shows a graph of the quality factor limited by thermo-elastic damping (QTED) and resonance frequency of the Flower-of-life Vibratory Gyroscope (FVG) compared with prior art Disk Resonator Gyroscopes (DRGs) in accordance with the present disclosure;
  • FIG, 7A shows a FVG resonator without any inner stiffener
  • FIG. 7 B shows a FVG resonator having a Sun Burst design
  • FIG. 7C shows a FVG resonator having an Inverse Sun Burst design
  • FIGs. 7D, 7E and 7F show FVG resonator designs corresponding to FIGs, 7A, 7B and 7C and having a wider outside ring in accordance with the present disclosure
  • FIG. 8 shows a graph of QTED vs frequency for FVG resonator designs having different ring widths (RW) in accordance with the present disclosure.
  • FIG, 9 shows a FVG resonator design illustrating clockwise and counter-clockwise springs in accordance with the present disclosure.
  • the present disclosure describes a high-Q (Quality Factor) Micro-Electro-Mechanical Systems (MEMS) silicon Flower-of-life Vibratory Gyroscope (FVG) resonator.
  • MEMS Micro-Electro-Mechanical Systems
  • FVG Flower-of-life Vibratory Gyroscope
  • the FVG resonator design allows deformation of its structure without twisting to reduce strain-induced thermal gradients, resulting in a high thermoelastic damping limited quality factor (QTED) .
  • the QTED for the FVG may be greater than 150,000, If the FVG resonator includes cross-linked FVG springs, the effective stiffness of the FVG is enhanced while the mass is reduced compared to the prior art disk resonator gyroscopes (DRGs) .
  • DDGs disk resonator gyroscopes
  • FVGs with thicknesses of 350 um (micrometers) or more may have reduced acceleration sensitivity, up to 50,000 Gs in any acceleration direction, compared to the prior art.
  • the FVG design has a much higher electrostatic frequency tuning range due to a lower mass compared to prior art silicon gyro designs, which has the benefit of cancelling frequency splits caused by fabrication defects, vibration, and thermal effects.
  • a frequency tuning range can be achieved for the FVG through dynamic electrical means rather than static mechanical trimming.
  • the FVG design may have a high adiabatic QTED since a wider ring width of greater than 100 una has a resonance frequency greater than 100 kHz.
  • the FVG provides a high-Q silicon vibratory gyroscope and resonator structure in frequency ranges previously not thought to be possible.
  • MEMS Micro-Electro- Mechanical Systems
  • CVGs gyroscopes
  • Prior art CVGs include silicon disk resonator gyroscopes (DRGs) with resonance frequencies around 14 kHz and Q-factors of around 80,000, Due to their natural resonance frequency of around 14 kHz, Si-DRGs may not operate well under harsh vibration and thermal conditions.
  • the lower bound of the EVG resonance frequency is near 35 kHz, which is more than double that of the typical DRG vibration frequency, so the FVG performance is not affected by typical vibrations, Prior art DRGs need vibration and thermal isolation mechanisms to achieve same bias stability.
  • the FVG may have a 155,000 Q-factor, which is 2 to 2,5 time that obtained by prior art DRGs.
  • the upper bound of a FVG Q- factor may oniy be limited by thermoelastic dissipation
  • the FVGs of the present disclosure are significantly less sensitive to vibration and shock, and their tuning capability means that they can be tuned to accommodate any temperature induced drift.
  • the MEMS Flower-of-life Vibratory Gyroscope ( FVG ) is so called due to its geometry, as shown, for example in FIGs. 1A and IB..
  • the FVG has a high thermal elastic damping quality factor (QTED) and a high anchor quality factor
  • the Flower-of-life Vibratory Gyroscope is so- called due to the curved springs formed in the geometric flower-of-life pattern.
  • the pattern is produced by the overlapped curved springs that form the outline of common leaf shapes.
  • the common leaf shapes include but not limited to linear, elliptical, oval, ovate, deltoid, cordate, oblong, rhomboid, obovate, oblanceolate , orbicular, lanceolate, reniform, spathuiate, or combinations thereof.
  • the leaf shapes must be symmetrical and symmetrically arranged around the anchor.
  • the radial balance of the plurality of curved springs provide rotational symmetry about a center axis with N fold symmetry, where N is a positive integer.
  • the FVG resonator 10 shown in FIG. 1A has an anchor 12, springs 14 and stiffener rings 16.
  • the anchor 12 is a solid cylinder at the center of the gyro 10.
  • a silicon FVG resonator design may have an 8mm outer diameter and a 2mm anchor diameter, although the outer diameter and anchor may have other dimensions.
  • 6 sets of stiffener rings 16 are shown, including the outer perimeter 17, each having a ring width of lOura and a thickness of 350 um and an aspect- ratio of 1:35, where the aspect ratio is the ratio of the width to the thickness.
  • the thickness of the stiffener rings 16 is best understood as the distance between a top 18 of the FVG and a bottom 20 of the FVG, as shown in the tilted view in FIG. IB, and also shown in FIG, 5D poison
  • the thickness of the FVG 10, including the springs 14, may be the same as the thickness of the stiffener rings 16.
  • the ring width is the dimension of the stiffener ring 16 orthogonal to the
  • the springs 14 are connected to the anchor 12 and to each stiffener ring 16 including the stiffener ring 16 on the outer perimeter 17.
  • the springs 14 are curved.
  • Each pair of springs 14, such as the pair of springs 22 and 24, are in the form of a circle, which has its circumference not entirely closed because of the intersection of springs 14 with the anchor 12.
  • Each pair of springs 14 includes a spring 22 having a convex curvature, and a spring 24 having a concave curvature.
  • the FVG may be described as having pairs of springs, such as the pair of springs 22 and 23, shown in FIG.
  • FIG. 1A having a clockwise curvature 102 and having a counter-clockwise curvature 100, respectively, as shown in FIG. 9.
  • Each such pair of springs in FIGs. 4A, 4B, 7A and 7D also may be described as a spring 102 having a clockwise curvature 102, which follows a path originating at the anchor and curving in a clockwise direction toward the outer ring 17, and a spring 100 having a counter-clockwise curvature 100, which follows a path originating at the anchor and curving in a counterclockwise direction toward the outer ring 17, as shown in FIG, 9.
  • inner stiffener rings 16 are included between the stiffener ring on the outer perimeter 17 (the outer stiffener ring) and the anchor 12, then the curved springs 14 are arranged between the anchor 12 and the outer stiffener ring 17 such that a respective spring 14 having a convex curvature intersects a respective spring 14 having a concave curvature and respective inner stiffener ring 16 at a same location on the respective inner stiffener ring 16.
  • the number of pairs of springs 14 may be any number and the spacing between the pairs of springs 14 may vary from that shown in FICs. 1A and IB.
  • the springs 14 shown in FIG, 1A and IB have a rotational symmetry about a center axis with an 8 times N fold of symmetry, where N is a positive integer.
  • the springs 14 may have an aspect ratio ranging from 1:500 to 50:1, where the aspect ratio is the ratio of the width to the thickness .
  • the diameter of the outer perimeter 17 of the FVG may range from 1-20 millimeters (ram) , the anchor 12 diameter may range from 0.1-10 mm, the stiffener ring 16 width may range from 1-500 micrometers (um) , and the device thickness, which is the same as the stiffener ring 16 thickness may range from 10-500 um.
  • the aspect ratio of the stiffener ring 16 may be from 1:500 to 50:1, where the aspect ratio is the ratio of the width to the thickness,
  • the number of stiffener rings 16 can be 1-20. In the case of only one stiffener ring 16, the stiffener ring 16 would preferably be on the outer perimeter 17 of the FVG resonator 10.
  • the rotational symmetry of the FVG may be any positive integer
  • the stiffener rings 16 are concentric with another and concentric with the anchor 12.
  • the stiffener rings 16 may be located so that the stiffener rings 16 intersect the springs 14 at locations where one spring 14 intersects another spring 14, to stiffen the springs.
  • Spring stiffeners or stiffener rings 16 are important for gyro performance at low frequency ( ⁇ 50 kHz) since the stiffener rings 16 increase the stiffness of the gyro structure with only a slight increment of mass, resulting in a high resonance frequency and a high frequency tuning range.
  • Increasing the number of stiffener rings 16 can reduce anchor and TED loss.
  • the location of each stiffener is preferably chosen to minimize any extra intersections for heat loss.
  • the FVG resonator design is such that all the springs 14 and stiffeners 16 are joined seamlessly, unlike prior art DRGs that may have a "dog-bone" shape as a
  • the curvature of the springs 14 can be varied so there is a uniform pitch 30 between the concentric stiffener rings 16, which distributes mass uniformly in the radial direction. Also coupling between the anchor 12 and the FVG resonance structure can be reduced by modifying the curvature of the springs 14 so that near the anchor 12 a curved triangle formed by the intersection of the springs 14 is a wider angle rather than a narrow angle.
  • FIGs. 3 ⁇ and 3B which is an expanded view of a portion of FIG. 3A, show a FVG resonator with peripheral electrodes 34.
  • the peripheral electrodes 34 are connected to metal contacts 35 and are not in physical contact with the FVG outer diameter or the outer stiffener 16.
  • a gap 36 is between the FVG and the peripheral electrodes 34 and may be filled with a gas, such as air, or the gap 36 may be a vacuum.
  • An electrode set gap 37 is between the peripheral electrodes 34 and ground electrodes 38 and may be filled with a gas, such as air, or the electrode set gap 37 may be a vacuum.
  • the dimension of the electrode set gap 37 may be greater than or equal to the gap 36.
  • FIG. 4A and FIG. 4B which is an expanded view of a portion of FIG. 4A, show a FVG resonator with both peripheral electrodes 34 and internal electrodes 40.
  • the peripheral electrodes 34 are connected to metal contacts 35 and are not in physical contact with the FVG outer diameter or the outer stiffener 16, and a gap 36 is between the FVG and the peripheral electrodes 34 and may be filled with a gas, such as air, or the gap 36 may be a vacuum.
  • An electrode set gap 37 is between the peripheral electrodes 34 and ground electrodes 38 and may be filled with a gas, such as air, or the electrode set gap 37 may be a vacuum.
  • the dimension of the electrode set gap 37 may be greater than or equal to the gap 36.
  • the internal electrodes 40 are in spaces between the springs 14 and the stiffener rings 16. Gaps 42 are between each internal electrode 40 and any adjacent springs 14 or
  • the gaps 42 may be filled with a gas, such as air, or the gaps 42 may be a vacuum.
  • FIGs. 5A, 5B, 5C and 5D show a fabrication example for a silicon-on-insulator (SOI)
  • Si0 2 and Au shown may be any appropriate insulator or metal, respectively. It should also be
  • a backside alignment target 50 is formed by patterning silicon (Si) 54 on the backside of a wafer, which may be a silicon-on- insulator
  • the SOI wafer has backside silicon 54, which is used as a handle, and frontside Si 60. Both the frontside Si 54 and the backside Si 60 are on insulator 56, Then backside metal 52 may be patterned and deposited, The backside metal 52 is for die attachment to a Leadless Chip Carrier (LCC) package,
  • LCC Leadless Chip Carrier
  • a front side alignment target 62 is etched in Si 60 on the front side of the SOI wafer.
  • front side metal is patterned and deposited for electrical contacts 35, some of which are coupled to the peripheral electrodes 34.
  • the FVG resonator 10 is formed by Deep Reactive-Ion Etching (DRIE) of the frontside Si 60, and exposing the buried insulator 56, which may be silicon dioxide (SiOa) .
  • DRIE Deep Reactive-Ion Etching
  • a portion 66 of the buried insulator 56 is removed by using a hydrofluoric (HF) acid undercut to release the FVG structure 10 from the Si handle 54.
  • Another portion 68 is left intact between the resonator structure 10 and the backside Si 54 of the SOI wafer to provide mechanical support.
  • HF hydrofluoric
  • the Flower-of-life vibratory gyroscope using the FVG resonator has better gyro performance than prior art DRGs, in terms of quality factors QTED and Qanchor and less acceleration sensitivity-
  • FIG, 6 shows that a FVG resonator may achieve a quality factor (Q) of 155,000 (1.55E5) at a frequency of 35 kHz, as shown by triangle 70.
  • Q quality factor
  • the FVG resonator is 2.5 times higher than the prior art DRGs in terms of IN 2 mode resonance frequency, and 2.0 times the prior art in terms of thermo- elastic damping quality (QTED) .
  • the triangle 70 marks the QTED for a FVG design having the following geometry
  • FIG. 6 represent prior art DRG designs with the black circle 72 marking the best to date prior art DRG design.
  • the FVG design enables a high Q silicon MEMS gyroscope to operate at a frequency greater than 20 kHz without compromising other performance aspects, including vibration insensitivity and electrical frequency tuning range ,
  • FIG. 7A shows a FVG without any stiffeners 16, except for the outer ring 16.
  • FIG. 7B shows a FVG with a socalled sun burst spring 14 pattern between the outer ring 16 and the anchor 12
  • FIG.. 7C shows a FVG with a socalled inverse sun burst spring 14 pattern between the outer ring 16 and the anchor 12.
  • the sun burst spring pattern of FIG. 7B has convex springs pointing toward the anchor 12
  • the inverse sun burst spring pattern of FIG. 7C has convex springs pointing away from the anchor 12.
  • FIGs. 7D, 7E and 7F show FVG designs that are the same as FIGs. 7A, 7B and 7C,
  • the FVG without an inner stiffener has a unit cell of a diamond shape with curve edges, as shown in FIG 7A.
  • Sun Burst designs and Inverse Sun burst designs have unit cells having a curved triangle shape, like a paper fan, as shown in FIGs, 7B and 7C.
  • the dome part of each unit cell points towards the center of the resonator structure for Sun Burst designs, as shown in FIGs. 7B and 7E, but the dome part of each unit cell points away from the center of the resonator structure for Inverse Sun Burst designs, as shown in FIGs. 7C and 7F,
  • Ring width, stiffener ring number, radius of curvature, and inner and outer diameter are the key design parameters to understand the relationship to quality factor, acceleration sensitivity, and frequency tunability of the. MEMS gyroscope,
  • FIG. 8 shows a graph of QTED vs frequency for FVG designs for various ring and spring widths.
  • both the springs and the outer stiffener ring are configured to have the same thickness and both are increased from lOum to 400um.
  • FIG. 8 shows that a high adiabatic.
  • QTED can be achieved for the FVG by increasing the width of the springs 14, for example to 300um, without the need to add any stiffeners, other than the outside ring 16. As shown in FIG.
  • a FVG having springs 14 with a wid h of 400um, as shown by triangle 80 has a higher QTED and resonance frequency than a FVG having springs 14 with a width of 300um, as shown by triangle 82.
  • a FVG having springs 14 with a width of 300um has a higher QTED and resonance frequency than a FVG having a springs with a width of 10urn, as shown by triangles 82 and 84, respectively.
  • the QTED and resonance frequency for a prior art disk resonator gyroscope (DRG) as shown by black dot 86, which has a much lower QTED and resonance frequency than that achieved by the FVG designs.
  • a resonator including an anchor, an outer resonator, and an outer resonator
  • stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring,
  • a resonator comprising:
  • the outer stiffener ring has a first diameter; and the anchor is concentric with the outer stiffener ring and has a second diameter less than the first diameter.
  • outer stiffener ring has a first diameter that is greater than a second diameter of the inner stiffener ring
  • the resonator of concept 3 further comprising: a plurality of internal electrodes;
  • each internal electrode is located between a curved spring and another curved spring and the at least one inner stiffener ring, or between a curved spring and another curved and the anchor, or between a curved spring and another curved and the outer stiffener ring;
  • the plurality of inner electrodes are not in physical contact with the curved springs, the inner stiffener ring, the anchor or the outer stiffener ring;
  • the outer stiffener ring has an aspect ratio ranging from 1:500 to 50:1;
  • each of the curved springs of the plurality of curved springs has an aspect ratio ranging from 1:500 to 50:1.
  • the plurality of curved springs comprise a plurality of convex springs coupled to the outer stiffener ring and pointing towards the anchor.
  • the plurality of curved springs comprise a plurality of convex springs coupled to the anchor and pointing towards the outer stiffener ring.
  • a resonator comprising:
  • a plurality of curved springs configured in a flower-of- life pattern between the anchor and the outer stiffener ring.
  • the flower-of -life pattern is configured by overlapping the plurality of curved springs to form outlines of leaf shapes ;
  • the outlines of leaf shapes formed comprise linear, elliptical, oval, ovate, deltoid, cordate, oblong, rhomboid, obovate, oblanceolate, orbicular, lanceolate, reniform, or spathulate outlines, or combinations thereof; wherein the outlines of leaf shapes formed are symmetric and symmetrically arranged around the anchor; and
  • the flower-of-life pattern has a rotational symmetry about a center axis with N fold of symmetry, where N is a positive integer.
  • outer stiffener ring has a -first diameter that is greater than a second diameter of the inner stiffener ring .
  • each internal electrode is located between a curved spring and another curved spring and the at. least one inner stiffener ring, or between a curved spring and another curved and the anchor, or between a curved spring and another curved and the outer stiffener ring;
  • the plurality of inner electrodes are not in physical contact with the curved springs, the inner stiffener ring, the anchor or the outer stiffener ring;
  • a gap is between each inner electrode and adjacent curved springs, the at least one inner stiffener ring, the anchor and the outer stiffener ring.
  • a method of providing a resonator comprising: providing a wafer comprising an insulator with backside wafer on one side of the insulator and front side wafer on another side of the insulator;
  • front side metal depositing and patterning front side metal on the front. side wafer; patterning the front side wafer to expose the insulator and to form an anchor, an outer stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring;
  • concept 19 The method of concept 18 further comprising: patterning a backside alignment target on the backside wafer;
  • Concept 20 The method of concepts 18 or 19 wherein depositing and patterning front side metal on the front side wafer comprises:
  • the insulator is silicon dioxide (Si0 2 ) .
  • the outer stiffener ring has a first diameter; and the anchor is concentric with the outer stiffener ring and has a second diameter less than the first diameter.
  • Patterning the front side wafer further comprises; patterning to form at least one inner stiffener ring concentric with the outer stiffener ring;
  • outer stiffener ring has a first diameter that is greater than a second diameter of the inner stiffener ring
  • the plurality of curved springs comprise a first set of springs each having a clockwise curvature between the anchor and the outer stiffener ring, and a second set of curved springs each having a counter-clockwise curvature between the anchor and the outer stiffener ring.
  • the plurality of curved springs have a rotational symmetry about a center axis with an N fold of symmetry, where N is a positive integer.
  • each internal electrode is located between a curved spring and another curved and the at least one inner stiffener ring, or between a curved spring and another curved and the anchor, or between a curved spring and another curved and the outer stiffener ring;
  • the plurality of inner electrodes are not in physical contact with the curved springs, the inner stiffener ring, the anchor or the outer stiffener ring;
  • a gap is between each inner electrode and adjacent curved springs, the at. least one inner stiffener ring, the anchor and the outer stiffener ring.
  • the plurality of curved springs comprise a plurality of convex springs coupled to the outer stiffener ring and pointing towards the anchor .
  • Concept 30 The method of concepts 18, 19, 20, 21, 22, 23, 24, 25, 26, 27 or 28 wherein;
  • the plurality of curved springs comprise a plurality of convex springs coupled to the anchor and pointing towards the outer stiffener ring.
  • the frontside wafer comprises Si, quartz, or SiC; and the backside wafer comprises Si, quartz, or SiC.

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Abstract

L'invention concerne un résonateur comprenant une ancre, une bague extérieure de renforcement située sur un périmètre extérieur du résonateur, et une pluralité de ressorts incurvés situés entre l'ancre et la bague extérieure de renforcement.
EP18845128.0A 2017-08-08 2018-06-07 Gyroscope vibratoire à facteur de qualité élevé, en forme de fleur de vie, en silicium, pour système micro-électromécanique (mems) Active EP3665437B1 (fr)

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CN110998231A (zh) 2020-04-10
EP3665437B1 (fr) 2023-05-03
US10655964B2 (en) 2020-05-19
EP3665437A4 (fr) 2021-06-30
US20190049247A1 (en) 2019-02-14
US20200256676A1 (en) 2020-08-13
CN110998231B (zh) 2023-11-10
WO2019032177A1 (fr) 2019-02-14
US11561095B2 (en) 2023-01-24

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