WO2017115282A1 - Système, appareil, et procédé de fabrication de gyroscope à anneau vibrant mems de faible puissance - Google Patents

Système, appareil, et procédé de fabrication de gyroscope à anneau vibrant mems de faible puissance Download PDF

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Publication number
WO2017115282A1
WO2017115282A1 PCT/IB2016/058026 IB2016058026W WO2017115282A1 WO 2017115282 A1 WO2017115282 A1 WO 2017115282A1 IB 2016058026 W IB2016058026 W IB 2016058026W WO 2017115282 A1 WO2017115282 A1 WO 2017115282A1
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WO
WIPO (PCT)
Prior art keywords
vrg
ring
μπι
gyroscope
shaped anchor
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Application number
PCT/IB2016/058026
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English (en)
Inventor
Daniel Sunghoi CHOI
Boohyun AN
Jisung Lee
Waqas Amin GILL
Aveek Naith CHATTERJEE
Seungoh HAN
Hyun Kee Chang
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Masdar Institute Of Science And Technology
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Publication of WO2017115282A1 publication Critical patent/WO2017115282A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators

Definitions

  • the present application relates to vibrating ring gyroscopes, and more particularly, to vibrating ring gyroscopes on a (100) single crystalline silicon having an octagonal star- shaped anchor.
  • MEMS vibrating ring gyroscope is an attractive candidate of inertial sensors for measuring and maintaining the position of the device/ using of Coriolis forces to tune the properties of vibrating structures in the presence of rotation rates. Due to the symmetrical structure MEMS VRG provides lots of advantages than other vibrating gyroscopes, including excellent mode matching, high resolution, high thermal stability, and high performance in harsh environment. The ideal VRG should have perfect mode matching for its two identical flexural modes, however due to complex and exhaustive fabrication processes, there is always a mismatch between these two modal frequencies.
  • FIG. 1A illustrates an exemplary embodiment of a vibrating ring gyroscope consistent with at least one embodiment of the present disclosure
  • FIG. IB illustrates an exemplary embodiment of a vibrating ring gyroscope including various dimension consistent with at least one embodiment of the present disclosure
  • FIG. 2 shows the results from modal analyses in ⁇ 110> direction consistent with at least one embodiment of the present disclosure
  • FIG. 3A illustrates an exemplary embodiment of variation of modal frequencies with spring widths of ⁇ 1 10> and ⁇ 100> consistent with at least one embodiment of the present disclosure
  • FIG. 3B illustrates an exemplary embodiment of process sensitivities of the devices on vaiied widths of the support spring consistent with at least one embodiment of the present disclosure
  • FIG. 3C illustrates an exemplary embodiment of fine tuning of modal frequency by controlling of radii of the support spring consistent with at least one embodiment of the present disclosure
  • FIG. 4 illustrates one embodiment of the electrodes on a VRG consistent with at least one embodiment of the present disclosure
  • FIG. 5 illustrates one embodiment of an interface electronics in Simulink model consistent with at least one embodiment of the present disclosure
  • FIG. 6 illustrates one embodiment of the demodulated voltage output from sinusoidal angular velocity input waveform with 100 7s of amplitude (i.e., the demodulated voltage output due to sinusoidal angular velocity input, consistent with at least one embodiment of the present disclosure
  • FIG. 7 illustrates the demodulated output plot of simulated voltage vs. varied angular velocity input of 0.01, 0.1, 1, 10, 100, 1000 7s, consistent with at least one embodiment of the present disclosure.
  • GPS Global positioning system
  • IMU inertial measurement unit
  • a gyroscope is an integral part of IMU that tends to be used for measuring and controlling positions of moving objects when they are subjected to rotation.
  • MEMS micro-electromechanical systems
  • VRG vibrating ring gyroscope Due to the symmetrical structure, MEMS VRG can provide lots of advantages such as excellent mode matching, high resolution, and high thermal stability compared with other vibrating gyroscopes.
  • VRG utilizes a resonance vibration mode pair in the driving and sensing modes to maximize energy transfer between the two modes.
  • a resonance pair of vibration modes refers to two modes, so-called wine-glass modes that have distinct mode shapes but identical natural frequencies. Ideally, these two identical modes should have the same value of a resonance frequency in VRG with symmetric shapes.
  • This frequency mismatch can be electrostatically tuned by applying optimum bias through tuning electrodes.
  • High aspect ratio poly crystalline and (111) oriented single crystal silicon VRG may demonstrate high gyroscopic performance, however, the respective microfabrication requires additional processes for etching and packaging compared with other know (e.g., conventional) (100) single crystal silicon-based technology.
  • fabrication of a symmetric structure gyroscope based on a (100) silicon wafer has more variations that should be controlled because of its inherent mechanical anisotropy which leads the frequency split to untunable values and makes etch-rate differences between crystalline directions of the wafer.
  • Frequency tuning methods have been proposed to overcome the mechanical anisotropy by adjusting the width and position of spokes in the disk resonance gyroscope (DRG) structure designed on (100) silicon wafer.
  • a (100) single crystal silicon vibrating ring gyroscope therefore has a significant mismatch between two flexural modes frequencies due to the mechanical anisotropy of the material.
  • Previous VRGs have used a circular anchor for the attachment of the support springs.
  • a VRG consistent with the present disclosure includes a fine-tuned VRG on a (100) single crystalline silicon using an octagonal star-shaped anchor.
  • the circular anchors of previous VRG were replaced by octagonal star-shaped anchors with respective radii to accommodate the varied values of support spring at ⁇ 110> and ⁇ 100>.
  • VRGs having octagonal star-shaped anchors achieved enhanced matching in between two identical flexural modes frequencies.
  • the unique shape of the anchor of the present disclosure facilitates the independent controls of widths and radii of the support-springs that enable fine tuning of wine-glass modal frequencies between ⁇ 110> direction and ⁇ 100> direction which has 45° difference to each other.
  • a VRG consistent with at least one embodiment of the present disclosure comprises support-springs and a ring structure surrounded with one or more (e.g., a plurality) of electrodes.
  • the electrodes are used for driving electrodes, sensing electrodes and tuning electrodes of the gyroscope.
  • the operation of the ring gyroscope relies on two elliptically shaped vibration modes, ⁇ 110> direction mode and ⁇ 100> direction mode, which are also called the driving and sensing modes, respectively.
  • Those flexural modes have identical natural frequencies due to the symmetry of the ring.
  • Silicon (100) material has mechanical anisotropy that brings different resonant behaviors in different crystallographic directions of the wafer. Since circular shapes were commonly used for anchor structures that join the support springs with the substrate in previous works, there was a limitation on independent modification in two identical directions of modes.
  • FIG. 1(A) generally illustrates one embodiment of a vibrating ring gyroscope 10 with an octagonal star-shaped anchor 12, a plurality of support springs 16 (e.g., but not limited to, eight supported springs), and a plurality of electrodes 18 (e.g., but not limited to, sixteen electrodes).
  • the octagonal star- shaped anchor 12 may include a plurality of tip regions 20 (e.g., but not limited to, eight tip regions). For example, each tip region 20 may correspond to a respective one of the eight sides of the octagon.
  • the tip regions 20 each have a triangular shape, e.g., such that the anchor 12 has an overall octagonal star-shape.
  • the triangular shape of the tip regions 20 may include a right triangle.
  • Exemplary design parameters listed for the (100) single crystal silicon VRG 10 e.g., generally illustrated in FIG. IB are listed in Table 1 below.
  • the widths for both the designs of the support spring beams 16 at ⁇ 110> and ⁇ 100> directions were varied from 4 ⁇ to 7 ⁇ (with an increment of 0.1 ⁇ ) and radii for support spring beams 16 were also varied from 265 ⁇ to 310 ⁇ (with an increment of 1 ⁇ ).
  • the extensive parametric study by varying the design parameters was done by CoventorWareTM and MATLABTM.
  • FIG. 3A generally illustrates variation of modal frequencies with spring widths of ⁇ 110> and ⁇ 100>
  • FIG. 3B generally illustrates process sensitivities of the devices on vaiied widths of the support spring
  • FIG. 3C generally illustrates fine tuning of modal frequency by controlling of radii of the support spring 16.
  • Device A has a support spring with the radius of 273 ⁇ in ⁇ 110>, and 278 ⁇ at ⁇ 100> and the width of the support spring in ⁇ 110> is 5.0 ⁇ and at ⁇ 100> is 5.6 ⁇ .
  • Device B has the support spring with the radius of 297 ⁇ in ⁇ 110> and 295 ⁇ in ⁇ 100> and the width of the support spring in ⁇ 110> is 5.0 ⁇ and in ⁇ 100> is 5.4 ⁇ . It should be appreciated that the instant application is not limited to these dimensions unless specifically claimed as such.
  • Electrodes 4 is a representation of the electrodes 18 on the VRG 10, in which the electrodes for 'Driving' are represented as electrodes Dl a -b and D2 a -b, the electrodes for 'Sensing' are represented as electrodes Sl a -b and Sl a -b, and the electrodes for tuning are represented as electrodes Tl a _b, T2 a _b, T3 a _b, and T4 a _b.
  • a DC bias voltage of 1 V was applied to center of the ring structure in order to decrease stiffness of the ring structure and a DC tuning bias voltage of 0.27 V was applied to a couple of tuning electrodes, which compensates frequency mismatching by DC bias for Device A.
  • the MEMS+ ® model was imported into Simulink with Simscape tools of transimpedance amplifier and demodulator as shown in FIG. 5.
  • the differential capacitance changes between the sensing electrodes in different directions (45° and 135°) according to angular velocity input is measured by voltage meter after the amplifier. Then the amplified voltage signal is passed through a filter and demodulated.
  • FIG. 6 shows one embodiment of the demodulated voltage output from sinusoidal angular velocity input waveform with 100 7s of amplitude (i.e., the demodulated voltage output 60 due to sinusoidal angular velocity input 62). The output corresponds well with input waveform without delays after the initial stage of driving with the resonance frequency.
  • FIG. 7 which generally illustrates the demodulated output plot of simulated voltage vs. varied angular velocity input of 0.01, 0.1, 1, 10, 100, 1000 7s.
  • the demodulated voltage output proportionally changes as angular velocity input increases in the range of ⁇ 1000 7s.
  • Table 1 illustrates a parametric study for a VRG 10 consistent with at least one embodiment of the present disclosure.
  • the modal frequencies of two modes are sensitively changed by controlling the widths of the support springs 16 and the frequency splits of the VRG structure 10 could be tuned as 11.5 Hz (Device A) and 12.4 Hz (Device B) on the calculated structures by controlling of the radii of the support springs 16 (FIGS. 3A- 3C) from hundreds of Hz on un-tuned structures.
  • the modal frequencies of Device A and Device B are around 24.5 kHz and 21.9 kHz, respectively.
  • the orthogonal star-shaped anchor 12 is shown in FIG. 1 which was used to facilitate the spring beam radii to decrease the split as much as with the widths of the support springs.
  • VRG structure 10 comprises octagonal star-shaped anchor 12
  • the octagonal star-shaped anchor 12 allows respective control of spring radii 16 on driving and sensing axes
  • the octagonal star-shaped anchor 12 allows for frequency tuning on anisotropic materials
  • the inventors have discovered a MEMS based method to fine-tune the operating frequency of a vibrating ring gyroscope 10 on a (100) single crystalline silicon using an octagonal star-shaped anchor 12.
  • the unique shape of the anchor 12 facilitates the respective control of radii of the support springs 16 that enables fine tuning of wine-glass modal frequencies between two axes on the gyroscope.
  • the VRG 10 platform provides a design feature to match the resonant frequency of drive and sense mode. This ensures low power operation as electrostatic spring softening can be avoided.
  • the VRG 10 consistent with the present disclosure may be used for build up internal platform.
  • the VRG 10 consistent with the present disclosure may be used with MEMS customer to co-develop next generation device.
  • At least one embodiment of the present disclosure features a highly symmetric structure of a (100) silicon vibrating ring gyroscope with an octagonal star-shaped anchor to minimize the mode mismatch in operational resonance frequencies. Due to the mechanical anisotropy of a (100) silicon, Young's modulus varies in different directions and affects the stiffness of the support springs.
  • the octagonal star-shaped anchor in the vibrating ring gyroscope enables to adjust the radius and width of the support springs in the crystallographic directions of ⁇ 110> and ⁇ 100> to compensate the anisotropy of a (100) silicon.
  • the extensive parametric study of various designing parameters was done with MEMS+ ® and MATLAB ® . A significant decrease in the mode mismatch from 1.56 kHz to 11.6 Hz ( ⁇ 0.05 % of 24.5 kHz resonant frequency) was achieved.
  • Circular anchors were replaced by octagonal star-shaped anchors with respective radii to accommodate the varied values of support spring in the crystallographic directions of ⁇ 110> and ⁇ 100>.
  • An optimum design of a VRG was achieved that has mode-mismatching under 13 Hz between two identical flexural modes frequencies by this structural modification.
  • interface electronics of the designed VRG were simulated with angular velocity input in the Simulink.
  • a “circuit” or “circuitry” may comprise, for example, singly or in any combination, hardwired circuitry, programmable circuitry, state machine circuitry, and/or firmware that stores instructions executed by programmable circuitry.
  • Coupled refers to any connection, coupling, link or the like by which signals carried by one system element are imparted to the “coupled” element.
  • Such “coupled” devices, or signals and devices are not necessarily directly connected to one another and may be separated by intermediate components or devices that may manipulate or modify such signals.
  • the terms “connected” or “coupled” as used herein in regard to mechanical or physical connections or couplings is a relative term and does not require a direct physical connection.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

Un gyroscope à anneau vibrant (VRG) comprenant un anneau, un ancrage en forme d'étoile octogonale, une pluralité de ressorts supportés disposés entre l'anneau et l'ancrage en forme d'étoile octogonale, et une pluralité d'électrodes couplées à l'anneau.
PCT/IB2016/058026 2015-12-28 2016-12-27 Système, appareil, et procédé de fabrication de gyroscope à anneau vibrant mems de faible puissance WO2017115282A1 (fr)

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US62/271,788 2015-12-28

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CN109596115A (zh) * 2018-12-17 2019-04-09 中国人民解放军国防科技大学 一种嵌套环式振动陀螺非线性效应抑制方法
CN110998231A (zh) * 2017-08-08 2020-04-10 Hrl实验室有限责任公司 高品质因数mems硅生命之花式振动陀螺仪
WO2021134675A1 (fr) * 2019-12-31 2021-07-08 瑞声声学科技(深圳)有限公司 Gyroscope mems

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110998231A (zh) * 2017-08-08 2020-04-10 Hrl实验室有限责任公司 高品质因数mems硅生命之花式振动陀螺仪
CN110998231B (zh) * 2017-08-08 2023-11-10 Hrl实验室有限责任公司 高品质因数mems硅生命之花式振动陀螺仪
CN109596115A (zh) * 2018-12-17 2019-04-09 中国人民解放军国防科技大学 一种嵌套环式振动陀螺非线性效应抑制方法
WO2021134675A1 (fr) * 2019-12-31 2021-07-08 瑞声声学科技(深圳)有限公司 Gyroscope mems

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