JP6997043B2 - 角速度センサ - Google Patents
角速度センサ Download PDFInfo
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- JP6997043B2 JP6997043B2 JP2018123784A JP2018123784A JP6997043B2 JP 6997043 B2 JP6997043 B2 JP 6997043B2 JP 2018123784 A JP2018123784 A JP 2018123784A JP 2018123784 A JP2018123784 A JP 2018123784A JP 6997043 B2 JP6997043 B2 JP 6997043B2
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- annular
- angular velocity
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- velocity sensor
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- 230000001939 inductive effect Effects 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 230000008719 thickening Effects 0.000 description 6
- 238000000708 deep reactive-ion etching Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
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- 230000035939 shock Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
Description
本開示の実施例による環状共振器であるロバストSGH03をモデル化した。モデル化された環状共振器の寸法は、16個の支持構造の円周方向部分の厚さが22μm、支持構造の半径方向部分の厚さが27μmであり、環状部材の厚さが120μmである。
Claims (15)
- 振動型角速度センサ用の環状共振器であって、
X-Y平面内に位置する平面状の環状部材と、
前記環状部材を前記X-Y平面内で柔軟に支持するように配置された1つ以上の支持構造とを備え、
前記1つ以上の支持構造はそれぞれ、前記環状部材から半径方向に延び、前記X-Y平面における第1の厚さを有する半径方向部分と、前記半径方向部分から円周方向に延び、前記X-Y平面における第2の厚さを有する円周方向部分とを備えており、前記第1の厚さが前記第2の厚さよりも大きい、振動型角速度センサ用の環状共振器。 - 前記1つ以上の支持構造はそれぞれ、前記円周方向部分から半径方向に延びる追加の半径方向部分を備える、請求項1に記載の環状共振器。
- 前記追加の半径方向部分は、前記半径方向部分と同じ方向に半径方向に延びる、請求項2に記載の環状共振器。
- 前記環状部材の周囲に対で配置された偶数個の支持構造を備える、先行請求項のいずれかに記載の環状共振器。
- 支持構造の各対は、時計回りの支持構造と反時計回りの支持構造とを備える、請求項4に記載の環状共振器。
- 8対の支持構造を備える、請求項4または5に記載の環状共振器。
- 前記支持構造、または対の支持構造は、前記環状部材の周りに等角度間隔で配置される、先行請求項のいずれかに記載の環状共振器。
- 前記第1の厚さが前記第2の厚さよりも少なくとも20%、30%、40%または50%大きい、先行請求項のいずれかに記載の環状共振器。
- 前記半径方向部分は、接続部によって前記環状部材に接続されており、前記支持構造は、前記接続部で幅が大きく、前記接続部から離れたところで幅が小さくなるように先細る、先行請求項のいずれかに記載の環状共振器。
- 前記1つ以上の支持構造は、接続部によって固定支持体に接続されており、前記支持構造は、前記接続部で幅が大きく、前記接続部から離れたところで幅が小さくなるように先細る、先行請求項のいずれかに記載の環状共振器。
- 前記接続部は、楕円形のフィレットを備える、請求項9または10に記載の環状共振器。
- 先行請求項のいずれかに記載の環状共振器を備える、振動型角速度センサ。
- 前記センサは容量型角速度センサである、請求項12に記載の振動型角速度センサ。
- 前記センサは誘導型角速度センサである、請求項12に記載の振動型角速度センサ。
- 前記環状共振器は、Cos2θモードで共振するように構成されている、請求項12から14のいずれかに記載の振動型角速度センサ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1712670.7A GB2565298B (en) | 2017-08-07 | 2017-08-07 | Angular rate sensors |
GB1712670.7 | 2017-08-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019032302A JP2019032302A (ja) | 2019-02-28 |
JP6997043B2 true JP6997043B2 (ja) | 2022-01-17 |
Family
ID=59894771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018123784A Active JP6997043B2 (ja) | 2017-08-07 | 2018-06-29 | 角速度センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US10816339B2 (ja) |
EP (1) | EP3441719B1 (ja) |
JP (1) | JP6997043B2 (ja) |
KR (1) | KR102483095B1 (ja) |
GB (1) | GB2565298B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110058041A (zh) * | 2019-04-08 | 2019-07-26 | 瑞声科技(新加坡)有限公司 | 陀螺仪 |
CN110044346A (zh) * | 2019-04-08 | 2019-07-23 | 瑞声科技(新加坡)有限公司 | 陀螺仪 |
CN109900262B (zh) * | 2019-04-08 | 2021-08-10 | 瑞声科技(新加坡)有限公司 | 陀螺仪 |
US20230358539A1 (en) | 2020-07-03 | 2023-11-09 | Sumitomo Precision Products Co., Ltd. | Vibrating-type gyroscope element and angular velocity sensor including same |
WO2022004563A1 (ja) | 2020-07-03 | 2022-01-06 | 住友精密工業株式会社 | 振動型ジャイロ素子及びこれを備えた角速度センサ |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69806936D1 (de) | 1997-06-12 | 2002-09-05 | Bae Systems Plc Farnborough | Vibrationsstrukturkreisel mit schwingungsdämpfersystem |
US20040144174A1 (en) | 2001-09-14 | 2004-07-29 | Fell Christopher P | Vibratory gyroscopic rate sensor |
US20100107761A1 (en) | 2007-02-15 | 2010-05-06 | Elbit Systems Electro-Optics Elop Ltd. | Vibratory gyroscopic device for determining angular velocity |
JP2010190774A (ja) | 2009-02-19 | 2010-09-02 | Toshiba Corp | 慣性センサおよび慣性測定装置 |
US20110167911A1 (en) | 2008-07-12 | 2011-07-14 | Atlantic Inertial Systems Limited | Vibrating structure gyroscopes |
US20150040663A1 (en) | 2012-03-22 | 2015-02-12 | Atlantic Inertial Systems Limited | Vibratory ring structure |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
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GB2292609B (en) | 1994-08-24 | 1998-04-15 | British Aerospace | Method for matching vibration mode frequencies on a vibrating structure |
GB2318184B (en) * | 1996-10-08 | 2000-07-05 | British Aerospace | A rate sensor |
JPH10115526A (ja) * | 1996-10-15 | 1998-05-06 | Ngk Insulators Ltd | 振動ジャイロ・センサ及び振動ジャイロ・センサの製造方法 |
GB9817347D0 (en) * | 1998-08-11 | 1998-10-07 | British Aerospace | An angular rate sensor |
GB9828478D0 (en) | 1998-12-24 | 1999-02-17 | British Aerospace | Method of manufacturing a vibrating structure gyroscope |
US6272925B1 (en) | 1999-09-16 | 2001-08-14 | William S. Watson | High Q angular rate sensing gyroscope |
GB0122256D0 (en) | 2001-09-14 | 2001-11-07 | Bae Systems Plc | Vibratory gyroscopic rate sensor |
GB0122253D0 (en) | 2001-09-14 | 2001-11-07 | Bae Systems Plc | Vibratory gyroscopic rate sensor |
WO2006039560A2 (en) | 2004-09-30 | 2006-04-13 | University Of Southern California | Silicon inertial sensors formed using mems |
JP5630267B2 (ja) * | 2008-12-09 | 2014-11-26 | 株式会社村田製作所 | 振動ジャイロ素子及びその製造方法 |
GB201307773D0 (en) * | 2013-04-30 | 2013-06-12 | Atlantic Inertial Systems Ltd | MEMS sensors |
-
2017
- 2017-08-07 GB GB1712670.7A patent/GB2565298B/en not_active Expired - Fee Related
-
2018
- 2018-06-27 KR KR1020180073736A patent/KR102483095B1/ko active IP Right Grant
- 2018-06-29 JP JP2018123784A patent/JP6997043B2/ja active Active
- 2018-07-09 US US16/029,711 patent/US10816339B2/en active Active
- 2018-08-07 EP EP18187856.2A patent/EP3441719B1/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69806936D1 (de) | 1997-06-12 | 2002-09-05 | Bae Systems Plc Farnborough | Vibrationsstrukturkreisel mit schwingungsdämpfersystem |
US20040144174A1 (en) | 2001-09-14 | 2004-07-29 | Fell Christopher P | Vibratory gyroscopic rate sensor |
JP2005503550A (ja) | 2001-09-14 | 2005-02-03 | ビ−エイイ− システムズ パブリック リミテッド カンパニ− | 振動ジャイロスコープレートセンサ |
US20100107761A1 (en) | 2007-02-15 | 2010-05-06 | Elbit Systems Electro-Optics Elop Ltd. | Vibratory gyroscopic device for determining angular velocity |
US20110167911A1 (en) | 2008-07-12 | 2011-07-14 | Atlantic Inertial Systems Limited | Vibrating structure gyroscopes |
JP2011528103A (ja) | 2008-07-12 | 2011-11-10 | アトランティック・イナーシャル・システムズ・リミテッド | 振動構造ジャイロスコープの、又は振動構造ジャイロスコープに関する改良 |
JP2010190774A (ja) | 2009-02-19 | 2010-09-02 | Toshiba Corp | 慣性センサおよび慣性測定装置 |
US20150040663A1 (en) | 2012-03-22 | 2015-02-12 | Atlantic Inertial Systems Limited | Vibratory ring structure |
JP2015511023A (ja) | 2012-03-22 | 2015-04-13 | アトランティック イナーシャル システムズ リミテッドAtlantic Inertial Systems Limited | 振動リング構造体 |
Also Published As
Publication number | Publication date |
---|---|
US20190041212A1 (en) | 2019-02-07 |
EP3441719B1 (en) | 2022-02-16 |
GB2565298A (en) | 2019-02-13 |
JP2019032302A (ja) | 2019-02-28 |
EP3441719A1 (en) | 2019-02-13 |
GB2565298B (en) | 2022-03-16 |
US10816339B2 (en) | 2020-10-27 |
KR102483095B1 (ko) | 2023-01-03 |
KR20190015992A (ko) | 2019-02-15 |
GB201712670D0 (en) | 2017-09-20 |
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