EP3532777A1 - Steam generator and reactor - Google Patents
Steam generator and reactorInfo
- Publication number
- EP3532777A1 EP3532777A1 EP17863868.0A EP17863868A EP3532777A1 EP 3532777 A1 EP3532777 A1 EP 3532777A1 EP 17863868 A EP17863868 A EP 17863868A EP 3532777 A1 EP3532777 A1 EP 3532777A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- conduit
- lamps
- locating
- close proximity
- fluids
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 claims abstract description 65
- 239000012530 fluid Substances 0.000 claims abstract description 36
- 150000001875 compounds Chemical class 0.000 claims abstract description 4
- 239000000126 substance Substances 0.000 claims abstract description 4
- 239000013626 chemical specie Substances 0.000 claims abstract description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 29
- 229910052721 tungsten Inorganic materials 0.000 claims description 28
- 239000010937 tungsten Substances 0.000 claims description 28
- -1 tungsten halogen Chemical class 0.000 claims description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 230000005855 radiation Effects 0.000 claims description 9
- 229910010293 ceramic material Inorganic materials 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 5
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- 239000000463 material Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000006091 Macor Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010793 Steam injection (oil industry) Methods 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002803 fossil fuel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
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- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
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- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/284—Methods of steam generation characterised by form of heating method in boilers heated electrically with water in reservoirs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/281—Methods of steam generation characterised by form of heating method in boilers heated electrically other than by electrical resistances or electrodes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/282—Methods of steam generation characterised by form of heating method in boilers heated electrically with water or steam circulating in tubes or ducts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/30—Electrode boilers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B37/00—Component parts or details of steam boilers
- F22B37/02—Component parts or details of steam boilers applicable to more than one kind or type of steam boiler
- F22B37/10—Water tubes; Accessories therefor
- F22B37/12—Forms of water tubes, e.g. of varying cross-section
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22G—SUPERHEATING OF STEAM
- F22G1/00—Steam superheating characterised by heating method
- F22G1/06—Steam superheating characterised by heating method with heat supply predominantly by radiation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
- F24H1/14—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
- F24H1/142—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form using electric energy supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
- F24H1/14—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
- F24H1/16—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled
- F24H1/162—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled using electrical energy supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/22—Water heaters other than continuous-flow or water-storage heaters, e.g. water heaters for central heating
- F24H1/40—Water heaters other than continuous-flow or water-storage heaters, e.g. water heaters for central heating with water tube or tubes
- F24H1/43—Water heaters other than continuous-flow or water-storage heaters, e.g. water heaters for central heating with water tube or tubes helically or spirally coiled
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
- H05B3/0052—Heating devices using lamps for industrial applications for fluid treatments
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H2250/00—Electrical heat generating means
- F24H2250/14—Lamps
Definitions
- Steam generators are devices that use heat to boil liquid water and convert it into steam.
- the heat is typically from fossil fuels, electricity, nuclear energy, or renewal energy.
- Most steam generators are high pressure vessels constructed out of a variety of steels. Steam generators take a long time typically in the range of several minutes to hours to achieve steam at a predetermined stable operating pressure and temperature.
- small steam generators which typically use electricity, take several minutes to produce saturated steam at approximately one atmosphere and nearly 100 degrees centigrade.
- Small superheated steam generators which typically output steam at steam at about 500 degrees centigrade or greater, take a much longer time to achieve the desired boiler pressure that produces the desired superheated steam temperatures.
- a method of producing an active chemical species, steam or superheated steam includes flowing one or more fluids through a conduit, locating one or more incandescent lights in close proximity to the conduit, and using at least a portion of the heat emitted from the one or more incandescent lights to heat the fluid or fluids flowing through the conduit so that the fluid or fluids are disassociated into chemical components, associated into a new compound, or converted into steam.
- locating one or more incandescent lights includes locating one or more tungsten halogen lamps in close proximity to the conduit.
- locating one or more tungsten halogen lamps in close proximity to the conduit includes locating at least two tungsten halogen lamps in close proximity to the conduit, optionally locating at least four tungsten halogen lamps in close proximity to the conduit, or optionally locating six or more tungsten halogen lamps in close proximity to the conduit.
- locating the lamps includes locating the lamps around the conduit.
- the method includes surrounding the lamps with the conduit.
- locating the lamps may include surrounding the lamps with a first portion of the conduit, and locating the lamps around a second portion of the conduit.
- locating the lamps may include surrounding the lamps with a first portion of the conduit, and surrounding the first portion of the conduit with a second portion of the conduit.
- flowing the fluid or fluids through the conduit includes flowing the fluid or fluids into the second portion of the conduit wherein the second portion of the conduit forms the inlet to the conduit. In this manner, the second portion of the conduit forms an insulation layer around the first portion of the conduit.
- flowing the fluid or fluids includes flowing fluid or fluids through two conduits, and locating the light in close proximity to at least one of the conduits, and optionally both conduits.
- the method may include locating radiation shields between the end of the lamps and the conduit to shield the ends of the lamps from at least some of the radiation emitted by the lamps and heat emitted from the conduit.
- a generator in another embodiment, includes a conduit having an inlet and an outlet and one or more incandescent lights located in close proximity to the conduit.
- the inlet is in fluid communication with a source of fluid or fluids wherein at least some of the heat emitted from the one or more incandescent lights is used to heat the fluid or fluids flowing through the conduit.
- the one or more incandescent lights include one or more tungsten halogen lamps located in close proximity to the conduit.
- the one or more tungsten halogen lamps includes at least two tungsten halogen lamps in close proximity to the conduit, optionally at least four tungsten halogen lamps are in close proximity to the conduit, or optionally six or more tungsten halogen lamps are in close proximity to the conduit.
- the lamps are arranged around the conduit.
- the generator further includes first and second mounting bases for holding the opposed ends of the lamps.
- the bases are formed from a ceramic material, such as a machineable glass ceramic.
- the conduit includes two portions— a first portion that extends between the lamps with the lamps surrounding the first portion of the conduit, and a second portion that surrounds the lamps.
- the generator can quickly heat and convert gases and/or liquids, such water into steam, namely superheated steam.
- FIG. 1 is a schematic drawing of a typical commercial tungsten halogen high temperature lamp
- FIG. 2 is an enlarged plan view of an end base for a plurality of lamps
- FIG. 2 A is a cross-section view taken through line IIA - IIA of FIG. 2;
- FIG. 3 is a schematic drawing of the lamp array system mounted between two end bases
- FIG. 4 is a schematic drawing of a lamp array system with a process conduit extending there through;
- FIG. 5 is a schematic drawing of the lamp array system and process conduit of FIG. 4 shown housed in enclosure;
- FIG. 6 is a schematic drawing of the lamp array system with another embodiment of a process conduit
- FIG. 7 is a schematic drawing of the lamp array system with a third embodiment of a process conduit.
- FIG. 8 is a schematic drawing of the lamp array system with a fourth embodiment of the process conduit.
- the numeral 10 generally designates a generator or reactor that heats a fluid or fluids, such as liquids or gases.
- a fluid or fluids such as liquids or gases.
- the illustrated embodiment is described herein in the context of a steam generator that heats water to generate steam, specifically superheated steam, but it should be understood that a gas or gases or a gas and liquid may be heated using the same technology to disassociate or associate the gas, gases and/or liquids into other desired compounds.
- the present steam generator can heat water to generate steam, specifically superheated steam, at a rapid rate.
- steam generator 10 can generate superheated steam in seconds versus minutes, which is associated with conventional steam generators.
- generator 10 is configured to produce nearly instantaneous steam and, more specifically, nearly instantaneous superheated steam at about one atmosphere and at a temperature in a range of 100 C to several hundred degrees centigrade.
- amount of steam, the temperature of the steam, and the rate of steam production are provided below.
- generator 10 includes one or more incandescent lights 12 (see FIG. 1) that are located in close proximity to a process conduit 14 for directing heat to the process conduit.
- Process conduit 14 includes an inlet or input 14a for coupling to a source of gas and/or liquid, such as water, and an outlet 14b from which the heated product, such as steam, is output from the generator.
- suitable gases for association or disassociation may include gases associated with, for example, semiconductor processing.
- Computer-based control system 16 includes a microprocessor based controller and may include one or more a sensors in communication with the controller to detect one or more process parameters.
- computer-based control system 16 may include one or more sensors to detect the flow rate of the water at or near the input and one or more temperature sensors to detect the steam's temperature at or near the outlet, and optionally to detect the temperature of the conduit and/or the lamps.
- Computer-based control system 16 may also include other electronic components that are programmed to carry out the functions described herein, or that support the microprocessor and/or other electronics.
- the other electronic components include, but are not limited to, one or more discrete circuitry, integrated circuits, application specific integrated circuits (ASICs) and/or other hardware, software, or firmware, as would be known to one of ordinary skill in the art.
- ASICs application specific integrated circuits
- Such components can be physically configured in any suitable manner, such as by mounting them to one or more circuit boards, or arranging them in other manners, whether combined into a single unit at the generator in a control unit or distributed across multiple control units.
- Such components may be located at the generator or they may reside separately from the generator, for example, in remote location from the generator. When located separately, the components may communicate using any suitable serial or parallel communication protocol.
- lights 12 comprise a plurality of tungsten halogen lamps 18 (e.g. see FIGS. 1, 3, and 4), including for example tungsten halogen high temperature lamps.
- a halogen lamp is incandescent tungsten lamp that has tungsten filament and a small amount of halogen gas, such as iodine or bromine added. The addition of the halogen gases to the tungsten filament produces a halogen cycle chemical reaction that increases the operating life of the lamp.
- High temperature lamps are commercially available from a variety of companies, for example Fannon in the US or Ushio of Japan.
- lamps 18 may be manufactured with a totally clear quartz cylindrical bulb or housing 18a or may have portion of the inside of the housing coated with a film 20, such as partial gold thin-film, to focus the energy emitted from the filament inside the housing in a desired direction.
- a film 20 such as partial gold thin-film
- an external reflective coating such as a thin gold film, may be applied to the exterior of the housing.
- Lamps 18, which as noted are conventional, may include a ceramic cap 18b on each end into which the ends of the filament extend and couple to electrodes 18c, 18d for coupling the respective lamp to a power supply as controlled by control system 16.
- generator 10 includes first and second end bases 22, such as shown in FIG. 2.
- Each end base 22 may be formed from a ceramic material, including mica or a machineable ceramic material, such as a machineable glass ceramic, which is available under the trademark Macor.
- end bases 22 include a plurality of openings 24 through which the lamp electrodes extend for coupling the power supply.
- end bases 22 are formed from a disk shaped member with an optional central opening 26 for receiving the process conduit and an annular recess 28 that extends around opening 26 for receiving the respective end caps of lamps 18.
- the shape, size, number of openings and location of the openings in the end bases may vary depending on the size and number of lamps that are used, and the type of process conduit, as will be more fully described below.
- Openings 24 are located in an annular recess 28 of end base 22 and arranged around radially spaced from opening 26 so that when the lamps are mounted to the respective end bases 22, lamps 18 will be arranged around opening 26 to form a central passage 30 (FIGS. 3 and 4 ) there between to receive process conduit 14.
- the lamps 18 surround the process conduit 14.
- the reflective coating 20 may be applied to the outer side of the respective lamps so that the heat emitted by the lamps is directed inwardly toward the process conduit.
- the number of lamps may be varied, including at least two lamps, at least four lamp, and optionally six or more lamps, as shown in the illustrated embodiment.
- lamp 18 are located in close proximity to process conduit 14 in Fig. 4.
- close proximity means in a range of 5 to 10 mm, in a range of 2 to 30 mm, or optionally in a range of 1 to 7 mm. In this manner when combined with the use of the reflective coatings, most if not all, the heat emitted from the lamps is directed toward the process conduit.
- process conduit 14 comprises a straight tube, such as a tube formed from a variety of materials, such as steel, stainless steel alloys, aluminum, copper, glass, quartz, alumina, silicon carbine, zirconia or the like, that extends through passage 30 (FIGS. 3 and 4) and through the enclosure described below.
- the diameter and wall thickness of the tube may vary, and depend on the specific process requirements and the desired chemical reaction result to be achieved, but should be no less than about 6.35 mm (0.25 inches) in diameter.
- the diameter of the tube may typically fall in a range of 150 to 300 mm, in a range of 100 to 1500 mm, or optionally in a range of 300 to 600 mm with a wall thickness falling in a range of 0.12 to 0.75 mm, in a range of 0.02 to 2.54 mm, or optionally in a range of 0.25 to 0.5 mm.
- generator 10 optionally includes an enclosure 32 (FIG. 5).
- Enclosure 32 includes opposed ends walls 34a and 34b and perimeter wall 36 that extends between the two end walls 34a, 34b to house and enclose lamps 18, process conduit 14, and end bases 22.
- End walls 34a, 34b include openings for the inlet end of process conduit 14 and for the outlet end of process conduit 14 so that the generator, with the exception of the inlet and outlet ends, is fully contained within the enclosure.
- the enclosure may be formed from thermally insulated material, such as various ceramics.
- enclosure 30 may include internal insulation material, such as quartz wools or the like.
- enclosure 30 may include an outer water-cooled jacket formed in perimeter wall 36, or that extends around perimeter wall 36, to provide insulation or additional insulation.
- the process conduit may be configured to surround the lamps.
- generator 110 includes a process conduit 114 is configured as a coil with a first linear portion that forms the input 114a and a second linear portion 14b that forms output 114b, which extend through the end walls of enclosure 130 similar to the previous embodiment.
- process conduit 114 surrounds lamps 18.
- the surface area of the process conduit is greatly increased and, therefore, more heat emitted from the lamps may be absorbed by the fluid flowing through the process conduit.
- the reflective coatings may be eliminated or their location may be varied.
- the reflective coatings may be provided on the inwardly facing side of each respective lamp so that all the heat emitted by the lamps is directed outwardly through the outwardly facing sides of the lamps.
- the coiled portion of the process conduit is sized such that it covers the majority, if not all, of the heated lengths of the respective lamps (see FIG. 1).
- the process conduit may be configured with two portions— a first portion that surrounds the lamps, and a second portion which is surrounded by the lamps.
- process conduit 214 of generator 210 includes a first, coiled portion 216 that is coiled and surrounds the lamps 18, and a second straight portion 218 that extends between the lamps 18 and is surrounded by the lamps, similar to the first embodiment.
- the coiled portion of the process conduit is joined with the straight portion of the process conduit by a third portion 220, which has an inverted L-shaped
- the shape of the third portion may vary.
- the coiled portion 216 is in series the straight portion 218 of process conduit 214.
- the coiled portion 216 includes the inlet 216a for fluid communication with the water supply through the perimeter wall 236 of enclosure 230, and the straight portion 218 of process conduit 214 extends downwardly through the end wall 234b of enclosure 232 to output the steam.
- Enclosure 232 is of similar construction to enclosure 32 and provides an insulated enclosure for the lamps 18 and for most of the process conduit, with the exception of the inlet and outlets. Therefore, reference is made to enclosure 32 for any additional details.
- generator 210 may produce a very high temperature superheated steam at a very high volumetric flow rate.
- a generator of the type described herein (with the six 1000 W tungsten halogen lamps) can generate 400 L per minute of superheated steam at 60% lamp power at temperature of nearly 500°C.
- the process conduit may include a first portion that surrounds the lamps and a second portion that surrounds the first portion of the process conduit.
- the numeral 310 generally designates another embodiment of a generator.
- Generator 310 includes a first coiled portion 316 that surrounds the lamps 18 and a second coiled portion 318 that surrounds the first coiled portion 316 of the process conduit 314.
- first coiled portion 316 is sized to extend over the heated length of each of the respective lamps, similar to the second and third embodiment.
- Second coiled portion 318 is sized to extend over first coiled portion 316 and substantially the full length of the lamps 18.
- the outer coiled portion is longer in coil length than the inner coiled portion.
- the diameter of the second coiled portion may be greater than the diameter of the first coiled portion so that it completely surrounds the inner coiled portion as described and shown.
- insulation may be added to the outer coiled portion prior to installing it within the enclosure (not shown, but reference is made to the enclosures of the previous embodiments for examples of insulation).
- both the inlet and outlet ends of the process conduit extend through one of the end walls of the enclosure and, therefore, exit the generator from the same side.
- the outer coiled portion 318 of the process conduit 314 may act as an insulator to reduce heat from reaching the enclosure for safe handling during operation and, further, to increase the thermal efficiency of heat transfer from lamps to the process conduit.
- generator 310 may include one or more radiation shields 340.
- Shields 340 may comprise plates, such as circular plates, and be constructed of high temperature ceramic materials, including mica or other machineable ceramic material, including machineable glass ceramic similar to the material that may from the end bases. Shields 340 are located between the end of the lamps and the process conduit to shield the ends of the lamps from at least some of the radiation emitted by the lamps and heat emitted from the process conduit. These radiation shields, therefore, minimize the amount direct radiation heat loss that can reach the outer coil and the generator's enclosure. Accordingly, with the addition of the outer coil, the high temperature insulation between the coils, and the radiation shields the lamps' ends can be cooler than they would otherwise and, therefore, can extend the life of the lamps.
- a ventilation fan may be incorporated into the enclosures, which draws outside ambient air into the space inside the enclosure between the insulated process conduit and the enclosure to cool the end of the lamps, which may extend the life of the lamps.
- thermocouple tubes 350 may be added and coupled to the process conduit, such as the inner coiled portion in the illustrated embodiment, and to the computer based control system (e.g. the control system 16 referenced above, which may be used in this and any of the above generators).
- the thermocouple tubes 350 may allow for greater control over the operation of the respective lamps and steam production by providing feedback on the temperature of the process conduit to the control system, which as noted above may use the temperature of the process conduit to control the generator.
- the generators described herein can produce superheated steam in a matter of seconds, for example in as little as 10 seconds, depending on the percent of lamp power employed and water input flow rate.
- the generators also can be turned off nearly instantaneously by turning off the water flow and the lamp power. It can be used in production cycles with variable cycle times or it can be used to produce continuous flow rate of superheated steam at constant temperature. This can be achieved readily by the use of the computer control system described above, that controls the percent power delivered to the lamps based on the water flow rate and desired superheated steam outlet temperature.
- These generators can produce superheated steam at one atmosphere and therefore do not require any of the costly certifications of the high pressure superheated generators.
- the generators may use back pressure at the outlet or downstream from the outlet to vary the pressure in the process conduit. It is also highly competitive in costs and ease of installation in a variety of commercial applications from steam health spas to chemical, biological and semiconductor processing to name a select few.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Resistance Heating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662412526P | 2016-10-25 | 2016-10-25 | |
PCT/US2017/057356 WO2018080885A1 (en) | 2016-10-25 | 2017-10-19 | Steam generator and reactor |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3532777A1 true EP3532777A1 (en) | 2019-09-04 |
EP3532777A4 EP3532777A4 (en) | 2020-03-25 |
Family
ID=62025398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP17863868.0A Withdrawn EP3532777A4 (en) | 2016-10-25 | 2017-10-19 | Steam generator and reactor |
Country Status (7)
Country | Link |
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US (1) | US20190249863A1 (en) |
EP (1) | EP3532777A4 (en) |
JP (1) | JP2019537700A (en) |
KR (1) | KR20190075995A (en) |
CN (1) | CN110023689A (en) |
TW (1) | TW201829961A (en) |
WO (1) | WO2018080885A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7685811B2 (en) | 2004-01-13 | 2010-03-30 | Emcon Technologies Llc | Method and apparatus for controlling a fuel-fired burner of an emission abatement assembly |
US7908847B2 (en) | 2004-01-13 | 2011-03-22 | Emcon Technologies Llc | Method and apparatus for starting up a fuel-fired burner of an emission abatement assembly |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3991210A4 (en) | 2019-06-06 | 2023-08-16 | Edwards Vacuum LLC | Liquid filter apparatus for gas/solid separation for semiconductor processes |
NL2023510B1 (en) * | 2019-07-16 | 2021-02-08 | Reflexy Nederland B V | Heating device for liquids |
CN114930985A (en) * | 2019-11-26 | 2022-08-19 | 纳科斯达格医药股份有限公司 | Heater apparatus, method and system |
US11705345B2 (en) | 2020-04-30 | 2023-07-18 | Edwards Vacuum Llc | Semiconductor system with steam generator and reactor |
US11931682B2 (en) | 2020-09-22 | 2024-03-19 | Edwards Vacuum Llc | Waste gas abatement technology for semiconductor processing |
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US2954826A (en) * | 1957-12-02 | 1960-10-04 | William E Sievers | Heated well production string |
US4835363A (en) * | 1985-11-23 | 1989-05-30 | Robert Krups Stiftung & Co. Kg. | Electric steam iron heated by halogen lamp and having a ceramic sole plate |
US5054107A (en) * | 1989-05-19 | 1991-10-01 | Geoffrey Batchelder | Radiating lamp fluid heating system |
JP2583159B2 (en) * | 1991-02-08 | 1997-02-19 | 株式会社小松製作所 | Fluid heater |
US5590240A (en) * | 1995-05-30 | 1996-12-31 | Process Technology Inc | Ultra pure water heater with coaxial helical flow paths |
IT246360Y1 (en) * | 1998-11-25 | 2002-04-08 | Andrea Gerosa | DEVICE TO CREATE STEAM INSTANTLY |
JP4743495B2 (en) * | 2005-07-08 | 2011-08-10 | 東京エレクトロン株式会社 | Fluid heating device |
CN100520173C (en) * | 2005-12-28 | 2009-07-29 | 海尔集团公司 | Method for quickly producing superheated steam and equipment therefor |
JP5138515B2 (en) * | 2008-09-05 | 2013-02-06 | 東京エレクトロン株式会社 | Steam generator, steam generating method and substrate processing apparatus |
DE102009010989B4 (en) * | 2009-02-19 | 2012-08-23 | E.G.O. Elektro-Gerätebau GmbH | Process and apparatus for steam generation |
JP5307780B2 (en) * | 2010-09-13 | 2013-10-02 | 東京エレクトロン株式会社 | Liquid heating unit, liquid processing apparatus including the same, and liquid processing method |
JP5019082B1 (en) * | 2011-03-25 | 2012-09-05 | 栗田工業株式会社 | Liquid heating method, liquid heating apparatus, and heated liquid supply apparatus |
-
2017
- 2017-10-17 TW TW106135393A patent/TW201829961A/en unknown
- 2017-10-19 EP EP17863868.0A patent/EP3532777A4/en not_active Withdrawn
- 2017-10-19 JP JP2019543172A patent/JP2019537700A/en active Pending
- 2017-10-19 WO PCT/US2017/057356 patent/WO2018080885A1/en unknown
- 2017-10-19 KR KR1020197014815A patent/KR20190075995A/en unknown
- 2017-10-19 CN CN201780066320.9A patent/CN110023689A/en active Pending
-
2019
- 2019-04-24 US US16/392,917 patent/US20190249863A1/en not_active Abandoned
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7685811B2 (en) | 2004-01-13 | 2010-03-30 | Emcon Technologies Llc | Method and apparatus for controlling a fuel-fired burner of an emission abatement assembly |
US7908847B2 (en) | 2004-01-13 | 2011-03-22 | Emcon Technologies Llc | Method and apparatus for starting up a fuel-fired burner of an emission abatement assembly |
Also Published As
Publication number | Publication date |
---|---|
TW201829961A (en) | 2018-08-16 |
EP3532777A4 (en) | 2020-03-25 |
CN110023689A (en) | 2019-07-16 |
KR20190075995A (en) | 2019-07-01 |
US20190249863A1 (en) | 2019-08-15 |
WO2018080885A1 (en) | 2018-05-03 |
JP2019537700A (en) | 2019-12-26 |
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