EP3532777A4 - Steam generator and reactor - Google Patents
Steam generator and reactor Download PDFInfo
- Publication number
- EP3532777A4 EP3532777A4 EP17863868.0A EP17863868A EP3532777A4 EP 3532777 A4 EP3532777 A4 EP 3532777A4 EP 17863868 A EP17863868 A EP 17863868A EP 3532777 A4 EP3532777 A4 EP 3532777A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- reactor
- steam generator
- steam
- generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/281—Methods of steam generation characterised by form of heating method in boilers heated electrically other than by electrical resistances or electrodes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/284—Methods of steam generation characterised by form of heating method in boilers heated electrically with water in reservoirs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/282—Methods of steam generation characterised by form of heating method in boilers heated electrically with water or steam circulating in tubes or ducts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/30—Electrode boilers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B37/00—Component parts or details of steam boilers
- F22B37/02—Component parts or details of steam boilers applicable to more than one kind or type of steam boiler
- F22B37/10—Water tubes; Accessories therefor
- F22B37/12—Forms of water tubes, e.g. of varying cross-section
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22G—SUPERHEATING OF STEAM
- F22G1/00—Steam superheating characterised by heating method
- F22G1/06—Steam superheating characterised by heating method with heat supply predominantly by radiation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
- F24H1/14—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
- F24H1/142—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form using electric energy supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
- F24H1/14—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
- F24H1/16—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled
- F24H1/162—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled using electrical energy supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/22—Water heaters other than continuous-flow or water-storage heaters, e.g. water heaters for central heating
- F24H1/40—Water heaters other than continuous-flow or water-storage heaters, e.g. water heaters for central heating with water tube or tubes
- F24H1/43—Water heaters other than continuous-flow or water-storage heaters, e.g. water heaters for central heating with water tube or tubes helically or spirally coiled
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
- H05B3/0052—Heating devices using lamps for industrial applications for fluid treatments
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H2250/00—Electrical heat generating means
- F24H2250/14—Lamps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Sustainable Energy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Resistance Heating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662412526P | 2016-10-25 | 2016-10-25 | |
PCT/US2017/057356 WO2018080885A1 (en) | 2016-10-25 | 2017-10-19 | Steam generator and reactor |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3532777A1 EP3532777A1 (en) | 2019-09-04 |
EP3532777A4 true EP3532777A4 (en) | 2020-03-25 |
Family
ID=62025398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP17863868.0A Withdrawn EP3532777A4 (en) | 2016-10-25 | 2017-10-19 | Steam generator and reactor |
Country Status (7)
Country | Link |
---|---|
US (1) | US20190249863A1 (en) |
EP (1) | EP3532777A4 (en) |
JP (1) | JP2019537700A (en) |
KR (1) | KR20190075995A (en) |
CN (1) | CN110023689A (en) |
TW (1) | TW201829961A (en) |
WO (1) | WO2018080885A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7908847B2 (en) | 2004-01-13 | 2011-03-22 | Emcon Technologies Llc | Method and apparatus for starting up a fuel-fired burner of an emission abatement assembly |
US7685811B2 (en) | 2004-01-13 | 2010-03-30 | Emcon Technologies Llc | Method and apparatus for controlling a fuel-fired burner of an emission abatement assembly |
CN114207839A (en) | 2019-06-06 | 2022-03-18 | 科利百利股份有限公司 | Liquid filtering device for gas/solid separation of semiconductor process |
NL2023510B1 (en) * | 2019-07-16 | 2021-02-08 | Reflexy Nederland B V | Heating device for liquids |
US11705345B2 (en) | 2020-04-30 | 2023-07-18 | Edwards Vacuum Llc | Semiconductor system with steam generator and reactor |
US11931682B2 (en) | 2020-09-22 | 2024-03-19 | Edwards Vacuum Llc | Waste gas abatement technology for semiconductor processing |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2954826A (en) * | 1957-12-02 | 1960-10-04 | William E Sievers | Heated well production string |
US5054107A (en) * | 1989-05-19 | 1991-10-01 | Geoffrey Batchelder | Radiating lamp fluid heating system |
DE102009010989A1 (en) * | 2009-02-19 | 2010-09-02 | E.G.O. Elektro-Gerätebau GmbH | Method for steam generation in steamer, coffee dispenser, washing machine and laundry dryer, involves operating elongated heating element as radiant heating element |
US20120063754A1 (en) * | 2010-09-13 | 2012-03-15 | Tokyo Electron Limited | Liquid Heating Unit, Liquid Processing Apparatus Including the Same, and Liquid Processing Method |
US20140029924A1 (en) * | 2011-03-25 | 2014-01-30 | Kurita Water Industries Ltd | Liquid heating method, liquid heating apparatus, and heated liquid supplying apparatus |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4835363A (en) * | 1985-11-23 | 1989-05-30 | Robert Krups Stiftung & Co. Kg. | Electric steam iron heated by halogen lamp and having a ceramic sole plate |
JP2583159B2 (en) * | 1991-02-08 | 1997-02-19 | 株式会社小松製作所 | Fluid heater |
US5590240A (en) * | 1995-05-30 | 1996-12-31 | Process Technology Inc | Ultra pure water heater with coaxial helical flow paths |
IT246360Y1 (en) * | 1998-11-25 | 2002-04-08 | Andrea Gerosa | DEVICE TO CREATE STEAM INSTANTLY |
JP4743495B2 (en) * | 2005-07-08 | 2011-08-10 | 東京エレクトロン株式会社 | Fluid heating device |
CN100520173C (en) * | 2005-12-28 | 2009-07-29 | 海尔集团公司 | Method for quickly producing superheated steam and equipment therefor |
JP5138515B2 (en) * | 2008-09-05 | 2013-02-06 | 東京エレクトロン株式会社 | Steam generator, steam generating method and substrate processing apparatus |
-
2017
- 2017-10-17 TW TW106135393A patent/TW201829961A/en unknown
- 2017-10-19 CN CN201780066320.9A patent/CN110023689A/en active Pending
- 2017-10-19 KR KR1020197014815A patent/KR20190075995A/en unknown
- 2017-10-19 WO PCT/US2017/057356 patent/WO2018080885A1/en unknown
- 2017-10-19 EP EP17863868.0A patent/EP3532777A4/en not_active Withdrawn
- 2017-10-19 JP JP2019543172A patent/JP2019537700A/en active Pending
-
2019
- 2019-04-24 US US16/392,917 patent/US20190249863A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2954826A (en) * | 1957-12-02 | 1960-10-04 | William E Sievers | Heated well production string |
US5054107A (en) * | 1989-05-19 | 1991-10-01 | Geoffrey Batchelder | Radiating lamp fluid heating system |
DE102009010989A1 (en) * | 2009-02-19 | 2010-09-02 | E.G.O. Elektro-Gerätebau GmbH | Method for steam generation in steamer, coffee dispenser, washing machine and laundry dryer, involves operating elongated heating element as radiant heating element |
US20120063754A1 (en) * | 2010-09-13 | 2012-03-15 | Tokyo Electron Limited | Liquid Heating Unit, Liquid Processing Apparatus Including the Same, and Liquid Processing Method |
US20140029924A1 (en) * | 2011-03-25 | 2014-01-30 | Kurita Water Industries Ltd | Liquid heating method, liquid heating apparatus, and heated liquid supplying apparatus |
Non-Patent Citations (1)
Title |
---|
See also references of WO2018080885A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2018080885A1 (en) | 2018-05-03 |
KR20190075995A (en) | 2019-07-01 |
CN110023689A (en) | 2019-07-16 |
US20190249863A1 (en) | 2019-08-15 |
EP3532777A1 (en) | 2019-09-04 |
JP2019537700A (en) | 2019-12-26 |
TW201829961A (en) | 2018-08-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
|
17P | Request for examination filed |
Effective date: 20190516 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
AX | Request for extension of the european patent |
Extension state: BA ME |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: QOLIBRI, INC. |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: QOLIBRI, INC. |
|
DAV | Request for validation of the european patent (deleted) | ||
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20200226 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: F22B 1/30 20060101ALI20200220BHEP Ipc: H05B 3/40 20060101ALI20200220BHEP Ipc: F24H 1/10 20060101ALI20200220BHEP Ipc: F22B 1/28 20060101ALI20200220BHEP Ipc: F24H 1/16 20060101ALI20200220BHEP Ipc: F24H 1/12 20060101AFI20200220BHEP Ipc: F24H 1/14 20060101ALI20200220BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20200929 |