TW201829961A - Steam generator and reactor - Google Patents

Abstract

A method of producing an active chemical species, steam or superheated steam includes flowing one or more fluids through a conduit, locating one or more incandescent lights in close proximity to the conduit, and using at least a portion of the heat emitted from the one or more incandescent lights to heat the one or more fluids flowing through the conduit so that the fluid or fluids are disassociated into chemical components, associated into a new compound, or converted into steam.

Description

   Steam generator and reactor   

The present invention relates to a method for producing superheated steam and a generator to implement the method.

A steam generator is a device that uses heat to boil liquid water and converts it into steam. Heat typically comes from fossil fuels, electricity, nuclear energy, or renewable energy. There are many different types of steam generators, which are operated under a wide range of operating pressures to achieve a wide range of steam quality production. Most steam generators are high-pressure vessels constructed of various steels, and steam generators take a long time, typically in the range of minutes to hours, in order to obtain steam at a predetermined stable operating pressure and temperature. .

For example, small steam generators typically use electricity and take several minutes to produce saturated steam at near atmospheric pressure and close to 100 degrees Celsius. Small superheated steam generators typically output steam at temperatures of about 500 degrees Celsius or higher. It takes longer to reach the required boiler pressure and can produce the required superheated steam temperature.

One of the importance of superheated steam is that it can release a large amount of internal energy, which is used to drive mechanical systems such as turbines and reciprocating piston engines. By keeping the condensation temperature of the water vapor above the operating pressure of these systems, superheated steam avoids the formation of water droplets, which will damage this due to incompressibility (under such operating pressures). And other systems. Especially when driving a reciprocating engine or turbine, the compressibility of superheated steam is of paramount importance.

Therefore, this delay will limit the application of superheated steam, in which the process of superheated steam injection is required, such as in the manufacture of typical semiconductors.

Therefore, there is a need to produce steam, especially superheated steam, in a faster way.

In one embodiment of the present invention, a method for producing an active chemical substance, steam, or superheated steam includes: circulating one or more fluids through a conduit, placing one or more incandescent lamps very close to the conduit, and using the At least a portion of the heat emitted by the one or more incandescent lamps heats the one or more fluids flowing through the conduit, causing the one or more fluids to separate into chemical components, combine into a new compound, or convert into steam.

In one aspect of the present invention, the so-called placing one or more incandescent lamps includes placing one or more tungsten halogen lamps so as to be very close to the duct.

In a further aspect of the present invention, the so-called arranging one or more tungsten halogen lamps very close to the duct includes placing at least two tungsten halogen lamps very close to the duct; optionally Place at least four tungsten halogen lamps very close to the conduit; or choose six or more tungsten halogen lamps very close to the conduit.

In another aspect of the present invention, the so-called display lamp system includes a display lamp that surrounds the duct.

In yet another aspect of the invention, the method includes surrounding the lamps with the conduit.

According to yet another aspect of the present invention, the so-called arranging the lamp may include surrounding the lamps with the first portion of the guide tube, and arranging the lamps to surround the second portion of the tube.

In still another embodiment of the present invention, the so-called display lamp may include surrounding each lamp with a first portion of the conduit, and surrounding the first portion of the conduit with a second portion of the conduit.

In a further aspect of the invention, the so-called circulating one or more fluids through the conduit includes circulating the one or more fluids through a second portion of the conduit, wherein the second portion of the conduit forms an inlet of the conduit. In this manner, the second portion of the conduit forms an insulation layer surrounding the first portion of the conduit.

In another embodiment, the so-called circulation of the one or more fluid systems includes circulation of the one or more fluids through two conduits, and the lamp is arranged so as to be very close to at least one of the conduits, or alternatively Close to two catheters.

In any of the above situations, the method may include placing radiation shields between the ends of the tubes and the conduit, to shield the ends of the lamps to avoid at least some of the radiation irradiated by the lamps and The heat emanating from the duct.

In another embodiment, a generator includes a conduit having an inlet and an outlet, and one or more incandescent lamps placed very close to the conduit. The inlet is in fluid communication with a fluid source or fluid sources, wherein at least some of the heat emitted by the one or more incandescent lamps is used to heat one or more fluids flowing through the conduit.

In one aspect of the invention, the one or more incandescent lamps include one or more tungsten halogen lamps placed very close to the conduit.

In a further aspect of the present invention, the one or more tungsten halogen lamps include at least two tungsten halogen lamps very close to the duct, and at least four tungsten halogen lamps very close to the duct are selected, or selected There are at least six or more tungsten halogen lamps very close to the conduit.

In another aspect of the invention, each lamp system is disposed around the conduit. For example, the generator further includes first and second mounting bases for fixing opposite ends of the lamps. In one aspect of the present invention, each of the mounting bases is made of a ceramic material, such as a machineable glass ceramic.

In yet another aspect of the invention, the catheter includes two parts-a first part, which extends between the lamps and surrounds the lamps with the first part of the catheter; and a second Partly, it surrounds each lamp.

Therefore, the generator can quickly heat and convert gas and / or liquid, such as converting water to steam, that is, superheated steam.

10‧‧‧Steam generator

12‧‧‧ incandescent lamp

14‧‧‧handling catheter

14a‧‧‧Entrance

14b‧‧‧Export

16‧‧‧Computer Control System

18‧‧‧ tungsten halogen lamp

18a‧‧‧Quartz cylindrical case

18b‧‧‧Ceramic Cover

18c‧‧‧electrode

18d‧‧‧electrode

20‧‧‧layer film

22‧‧‧ base

24‧‧‧ opening

26‧‧‧Central opening of choice

28‧‧‧ annular groove

30‧‧‧ Central access

32‧‧‧ enclosure

34a‧‧‧ end wall

34b‧‧‧ end wall

36‧‧‧Peripheral wall

110‧‧‧ generator

114‧‧‧handling catheter

114a‧‧‧Entrance

114b‧‧‧Export

210‧‧‧ generator

214‧‧‧handling catheter

216‧‧‧The first coiled part

216a‧‧‧Entrance

218‧‧‧Straight part

220‧‧‧Part III

232‧‧‧ Surrounding

234b‧‧‧end wall

236‧‧‧peripheral wall

310‧‧‧ generator

314‧‧‧handling catheter

316‧‧‧The first coiled part

318‧‧‧Second coiled part

340‧‧‧radiation shielding

350‧‧‧thermocouple

Figure 1 is a schematic diagram of a typical commercial high temperature tungsten halogen lamp; Figure 2 is an enlarged plan view of an end base for multiple lamps: Figure 2A is a cross-sectional view taken along the line IIA-IIA of Figure 2; 3 is a schematic diagram of a lamp arrangement system installed between two bases; FIG. 4 is a schematic diagram of a lamp arrangement system having a treatment duct passing therethrough; FIG. 5 is a lamp arrangement system and a treatment duct shown in FIG. 4 enclosed in a paddock Fig. 6 is a schematic diagram of a lamp arrangement system according to another embodiment of a processing duct; Fig. 7 is a schematic diagram of a lamp arrangement system according to a third embodiment of a processing duct; and Fig. 8 is provided by a processing duct A schematic diagram of a lamp arrangement system according to a fourth embodiment.

Referring to FIG. 4, reference numeral 10 generally designates a generator or a reactor that heats one or more fluids, such as a liquid or a gas. The described embodiment describes here the content of a steam generator that heats water to generate steam, especially superheated steam, but it should be understood that one or more gases, or a gas and a liquid, The same technology can be used to heat to separate or combine the gas or gases and / or liquids into other desired components. Moreover, the steam generator of the present invention can heat water at a rapid rate to generate steam, especially superheated steam. For example, the steam generator 10 can produce superheated steam in seconds, compared to several minutes in combination with a conventional steam generator. As will be described in greater detail below, the generator 10 is configured to produce steam at a temperature ranging from one hundred degrees Celsius to several hundred degrees Celsius at approximately one atmospheric pressure, and in particular, to produce superheated steam almost instantaneously. Several examples of steam volume, steam temperature, and steam production rate will be described later.

As best shown in FIG. 4, the generator 10 includes one or more incandescent lights 12 (see FIG. 1), which are positioned very close to a process conduit 14 and direct heat to the process Catheter 14. The treatment conduit 14 includes an inlet or inlet 14a for connection to a gas and / or liquid source, such as water; and an outlet 14b for output of a heated product, such as steam, therefrom. For example, suitable gases for binding or separation may include gases associated with, for example, semiconductor processes.

Referring to FIG. 3 and FIG. 4, the electric power is carried to the one or more incandescent lamps via a computer control system 16. The computer control system 16 is connected to a power source (not shown) and is connected to each lamp The electrode, 俾 regulates the power delivered to the lamp or lamps, for example based on the water flow rate and the desired superheated steam outlet temperature. The computer control system 16 includes a microprocessor controller, and may include one or more sensors in communication with the microprocessor controller to detect one or more processing parameters. For example, the computer control system 16 may include one or more sensors to detect the water flow rate at or near the input port, and include one or more temperature sensors to detect the outlet or The temperature of the steam is close to the outlet, and the temperature of the duct and / or each lamp can be selectively detected. The computer control system 16 may also include other electronic components, which are programmed to perform the functions described herein, or which support the microprocessor and / or other electronic products. These other electronic components include, but are not limited to, one or more discrete circuits, integrated circuits, application specific integrated circuits (ASICs), and / or other hardware, software, or firmware It is well known to anyone skilled in this art. These components may be specifically constructed in any suitable manner, such as mounted on one or more circuit boards, or otherwise provided, or combined on a generator as a control unit, or distributed on multiple Control units. Such components may be located on the generator; or they may be separate from the generator, for example, remote from the generator. When separated, these components can use any suitable serial or parallel communication protocol for communication (any suitable serial or parallel communication protocol).

In the described embodiment, each of the lamps 12 includes a plurality of tungsten halogen lamps 18 (as shown in FIGS. 1, 3, and 4), including, for example, high-temperature tungsten halogen lamps. The so-called halogen lamp means an incandescent tungsten lamp which has a tungsten wire and a small amount of halogen gas, such as iodine or bromine added. Adding halogen gas to tungsten wire can generate halogen cycle chemical reaction, which increases the service life of the bulb. High-temperature bulbs are commercially available from many companies, such as the American company Fannon or the Japanese company Ushio.

For selection, please refer to Figure 1. Each lamp 18 can be made of a completely transparent quartz cylindrical bulb or housing 18a, or the inside of the housing is coated with a film 20, such as a part of a gold film. The emitted energy is focused in a desired direction. In addition, or in addition, an external reflective film, such as a gold film, can be used as the exterior of the housing. As mentioned, each lamp 18, which is a known person, may include a ceramic cover 18b at each end of each lamp 18, and the filament end is penetrated into the ceramic cover 8b and connected to the electrodes 18c, 18d. A power supply is controlled by the control system 16.

In order to support the lamps arranged in a spaced relationship around the processing duct 14, the generator 10 includes a first and a second base 22 (as shown in FIG. 2). Each base 22 may be made of a ceramic material, including mica or a processable ceramic material, such as a processable glass ceramic, which is sold under the trade name "Macor". As best shown in FIGS. 2 and 2A, the base 22 includes a plurality of openings 24, and each lamp electrode extends through each opening 24 to connect the power supply. In the illustrated embodiment, the base 22 is made of a disc-shaped member and has an optional central opening 26 for receiving the treatment catheter 14 and an annular groove 28 extending therefrom. Around the opening 26 to receive the end cap of each lamp 18. As understood, the shape, size, and number of each opening, and the position of each base opening, are changed according to the size and number of lamps used and the form of the processing pipeline, as described more fully below.

Each opening 22 is located in the annular groove 28 of the base 22 and surrounds the opening 26 in a radial pattern. Therefore, when each lamp is mounted to each end seat 22, each lamp 18 will be provided around the opening 26 to form therebetween A central passage 30 (shown in FIGS. 3 and 4) to receive the treatment catheter 14. Therefore, in the present embodiment, the lamps 18 surround the processing duct 14. Therefore, the reflective coating 20 can be applied to the outside of each lamp, so the heat emitted by each lamp is directed inward toward the processing pipe. The number of each bulb may vary, including at least two lamps, at least four lamps, and optionally six or more lamps, as shown in the described embodiment.

In order to increase heat transfer, each lamp 18 is positioned very close to the processing duct 14 as shown in FIG. 4. For example, "very close" means in the range of 5 to 10 mm, in the range of 2 to 30 mm, or in the range of 1 to 7 mm. In this way, when combined with the use of a reflective coating, most (though not all) of the heat emitted by each lamp is directed towards the processing duct 14.

Please refer to FIG. 4 again. In the described embodiment, the processing conduit 14 includes a straight tube, such as a tube made of various materials, such as steel, stainless steel alloy, aluminum, copper, glass, quartz , Alumina, silicon carbide, zirconia, or the like, which can pass through the passage (30) (see Figs. 3 and 4), and through the following Enclosure. The diameter and wall thickness of the tube can be changed according to the specific process requirements and the desired chemical reaction results, but should not be less than about 6.35mm (0.25in.) Diameter. For example, the diameter of the tube can typically fall within the range of 150mm to 300mm, the range of 100mm to 1500mm, or optionally the range of 300mm to 600mm; and the thickness of the tube can fall from 0.12mm to 0.75mm Within the range of 0.002mm to 2.54mm, or optionally within the range of 0.25mm to 0.5mm.

In order to reduce heat loss and further avoid the risk of injury to persons who are in close proximity to the generator 10, the generator 10 may optionally include an enclosure 32 (see FIG. 5). The enclosure 32 includes opposite end walls 34a and 34b and a perimeter wall 36, which extends between the two end walls 34a and 34b, and covers and surrounds each of the lamps 18, the treatment duct 14 、 与 each of the base 22. The end walls 34a and 34b include openings for the processing duct 14 as an inlet end and an outlet end, so the generator is completely contained within the enclosure 32 except for the inlet and outlet ends. Optionally, the enclosure 32 may be made of a thermally insulating material such as various ceramics. In addition, the enclosure 32 may include an internal insulating material such as quartz wools or the like. Alternatively, the enclosure 32 may include an outer water-cooled jacket formed inside the peripheral wall 36, or it may extend around the peripheral wall 36 to provide insulation or additional insulation.

Tests performed on the generator constructed according to the first embodiment of the present invention, that is, operating at 40% power with a 1000W tungsten halogen lamp and 120cm ³ water inflow per minute in less than 15 seconds It can produce nearly 500 ℃ superheated steam, which is roughly equivalent to 200 liters of superheated steam per minute.

According to the generator of the second embodiment of the present invention, the processing duct 14 may be configured to surround each lamp. As shown in FIG. 6, the generator 110 includes a processing duct 114 configured as a coil, forming an inlet 114a with a first straight portion and an outlet 114b with a second straight portion, These extend beyond the end wall of the enclosure 130, as in the previous embodiment. In this manner, the processing duct 114 surrounds each of the lamps 18. With this configuration, the surface area of the processing duct 114 is greatly increased, so that the heat emitted from each lamp can be more absorbed by the liquid flowing through the processing duct 114. In addition, with this configuration, the reflection films can be eliminated or their positions can be changed. For example, each reflective film may be provided on the inner side of each lamp, so that the heat emitted by each lamp is guided to the outer side by being guided by the outer side of each lamp.

In order to maximize the heat absorbed by the processing tube, the coil portion of the processing tube must be sized to cover most (though not all) of the heating length of each lamp (see Figure 1).

According to another embodiment of the generator 210, the processing catheter may be configured in two parts-a first part surrounding each lamp and a second part surrounding each lamp. As shown in FIG. 7, the processing duct 214 of the generator 210 includes a first coiled portion 216 which is coiled to surround each lamp 18, and a second straight portion which extends to each Between and surrounded by the lamps, similar to the first embodiment. The coiled portion of the processing catheter is connected to the straight portion of the processing catheter via a third portion 220, which has an inverted L-shaped configuration. It is clear that the shape of the third portion 220 is changeable. In this manner, the coiled portion 216 and the straight portion 218 of the processing catheter 214 are continuous.

In the described embodiment, the coiled portion 216 includes an inlet 216a for liquid communication with the water supply through the peripheral wall 236 of the enclosure 232, and the straight portion 218 of the processing conduit 214 extends downwardly through the enclosure. The end wall 234b of the object 232 outputs steam. The enclosure 232 is similar in structure to the enclosure 32, and can provide an insulating enclosure for each lamp 18 and an insulating enclosure for the processing conduit, but does not provide an insulating enclosure for the entrance and exit. Therefore, only the enclosure 32 is described as incidental description.

By increasing the surface area of the processing duct, the generator 210 can produce high-temperature superheated steam at a very high volumetric flow rate. In a test, a generator of the type described here (with six kilowatts of tungsten halogen lamps) was able to produce 400 liters of superheated steam at a temperature of approximately 500 ° C per minute at 60% lamp power.

In another embodiment of the generator, the processing conduit may include a first portion surrounding the lamps, and a second portion surrounding the first portion of the processing conduit. Please refer to FIG. 8, the number 310 generally designates a generator of another embodiment. The generator 310 includes a first coiled portion 316 surrounding each of the lamps 18, and a second coiled portion 318 surrounding the first coiled portion 316 of the processing conduit 314. In the described embodiment, the size of the first coiled portion 316 can extend across the entire heating length of each individual lamp, similar to the second and third embodiments. The size of the second coiled portion 318 can extend beyond the first coiled portion 316 and substantially extend across the entire length of each lamp 18. Therefore, the length of the coiled outer ring portion is greater than the length of the coiled inner ring portion. In addition, the diameter of the second coiled portion 318 may be larger than the diameter of the first coiled portion 316, so that it completely surrounds the coiled inner ring portion (as described and illustrated). In addition, before the coiled outer ring portion is to be loaded into the enclosure, an insulation can be added to the coiled outer ring portion (not shown in the figure, but the insulation of the enclosure example described in the previous embodiment can be referred to)物). In the described embodiment, the inlet end and the outlet end of the treatment duct extend through one of the end walls of the enclosure, thereby ejecting the generator from the same side.

By guiding water through the outer coiled portion 318 and along the inner coiled portion 316, the outer coiled portion 318 of the processing duct 314 can be used as an insulator to reduce heat transfer to the enclosure during operation, In order to be safe in processing, and further increase the thermal efficiency of heat conduction from each lamp to the processing duct 314.

Alternatively, the generator 310 may include one or more radiation shields 340, and each of the radiation shields 340 may include various plates, such as a circular plate, and be composed of a high-temperature ceramic material, including mica or a processable ceramic material, including Machinable glass ceramic is similar to the material that can form each base. Each radiation shield 340 is located between the end of each lamp and the processing duct so as to block the end of each lamp to block the radiation emitted by each lamp and block the heat emitted by the processing duct. Therefore, these radiation shields minimize the direct radiation heat loss to the outer coiled part and the generator enclosure. The job is to increase the external coiled part, so that the high-temperature insulation between the coiled part and the radiation shield can cool the ends of the lamps, otherwise it can't be cooled, so it can extend the life of the lamps.

In any one of the generators of the above embodiments, each enclosure can be incorporated into a ventilating fan, which can draw external ambient air into the interior space of the enclosure between the heat-insulating treatment duct and the enclosure, and The ends are cooled, thus extending the life of each lamp.

Any of the above generators, such as the generator shown at 310, can be added with a thermocouple tube 350 to be coupled to the processing conduit, such as the internal coiled portion of the described embodiment, and coupled to the computer control system (e.g. The computer system 16 can be used for this generator or each of the above generators). The thermocouple tube 350 can provide greater control of each lamp and steam production by providing the temperature feedback of the processing tube to the control system. As mentioned above, the temperature of the processing tube is used to control the generator. .

Therefore, the generator described herein can produce superheated steam within a few seconds, for example, within as little as ten seconds, depending on the percentage of lamp power applied and the water flow rate. By turning off the water flow and lamp power, the generators can be turned off almost instantaneously. Variable cycle times can be used in each production cycle, or continuous superheated steam flow rates can be produced at a constant temperature. This can be easily achieved by using the above-mentioned computer control system, which is based on the water flow rate and the desired temperature of each hot vapor discharge to control the percentage of power delivered to each lamp. These generators can produce superheated steam at an atmospheric pressure and therefore do not require any expensive high-pressure superheated steam generator certification. It should be understood, however, that each generator may utilize back pressure at or from the outlet to change the pressure within the treatment catheter. Regarding the present invention, in various commercial applications, from steam health spas to chemical, biological, and semiconductor processes, at least a few are selected, which are highly competitive in price and easy to install.

Claims (17)

    A method for producing an active chemical substance, steam or superheated vapor, comprising: circulating one or more fluids through a duct; placing one or more incandescent lamps in close proximity to the duct; and using the one or more incandescent lamps to emit At least a portion of the heat is used to heat the one or more fluids flowing through the conduit, thereby separating the one or more fluids into chemical components, combining into a new compound, or converting into steam.         The method according to item 1 of the scope of patent application, wherein the so-called placing of one or more incandescent lamps includes placing one or more tungsten halogen lamps very close to the duct.         The method according to item 2 of the scope of patent application, in which the so-called one or more tungsten halogen lamps are placed very close to the duct, which includes placing at least two tungsten halogen lamps very close to the duct; Four tungsten halogen lamps are placed very close to the conduit; or six or more tungsten halogen lamps are chosen to be placed very close to the conduit.         The method according to any one of the above patent application scopes, wherein the so-called display lamp includes positioning the lamp so as to surround the duct.         The method according to item 1, 2, or 3 of the scope of patent application, further comprising surrounding the lamps with the duct.         The method according to item 2 of the patent application, wherein the so-called arranging lamps may include surrounding each lamp with a first part of the duct, and arranging each lamp to surround a second part of the duct.         The method according to item 2 of the scope of patent application, wherein the so-called arranging lamps includes surrounding each lamp with a first part of the catheter, and surrounding the first part of the catheter with a second part of the catheter.         The method according to item 7 of the scope of patent application, wherein the so-called circulating one or more fluids through the conduit includes circulating the one or more fluids through the second portion of the conduit, wherein the second portion of the conduit forms the The entrance of the duct.         The method according to any one of the above patent applications, wherein the so-called circulating the water system includes circulating the fluid or fluids through two conduits, and placing the lamp very close to at least one of the conduits, or optionally Ground close to both ducts.         The method according to any one of the above patent application scopes, which includes placing radiation shields between the ends of the tubes and the duct, and shielding the ends of the lamps to avoid at least some of the radiation irradiated by the lamps and the duct Emitting heat.         A generator includes: a conduit having an inlet and an outlet in fluid communication with a fluid source or multiple fluid sources through the inlet; and one or more incandescent lamps placed very close to the conduit, wherein the one or At least some of the heat emitted by the plurality of incandescent lamps is used to heat one or more fluids flowing through the conduit.         The generator according to item 11 of the scope of the patent application, wherein the so-called one or more incandescent lamps include one or more tungsten halogen lamps placed very close to the duct.         The generator according to item 12 of the scope of patent application, wherein the so-called one or more tungsten halogen lamps include at least two tungsten halogen lamps very close to the duct; at least four tungsten halogen lamps can also be selected very close to the duct; Alternatively, choose six or more tungsten halogen lamps that are very close to the tube.         The generator according to claim 11 or 12, wherein each lamp is arranged to surround the duct.         The generator according to any one of claims 12 to 14, wherein the generator further includes first and second mounting bases for fixing opposite ends of each of the lamps.         The generator according to item 15 of the patent application scope, wherein each of the mounting bases is made of a ceramic material, such as a machinable glass ceramic.         The generator according to item 12 of the patent application scope, wherein the duct includes a first part and a second part, the first part extends between the lamps and surrounds the first part of the duct; and Two parts surround each lamp.