KR20190075995A - Steam generator and reactor - Google Patents

Abstract

A method of producing an active species, vapor, or superheated vapor includes flowing one or more fluids through a conduit; Positioning one or more incandescent lamps proximate the conduit; And heating at least one fluid flowing through the conduit using at least a portion of the heat released from the at least one incandescent lamp such that the fluid is decomposed into a chemical component, associated with a new compound, and converted to vapor.

Description

Steam generator and reactor

The present invention relates to a steam generator and a reactor.

A steam generator is a device that uses heat to boil liquid water and convert it to steam. Heat is generally generated from fossil fuel, electricity, nuclear energy or renewable energy. There are various types of steam generators that operate under a wide range of operating pressures to produce a wide range of steam pressures. Most steam generators are high-pressure vessels composed of various iron. It takes a long time, typically in the range of a few minutes to a few hours, for the steam generator to obtain steam at a predetermined stable operating pressure and temperature.

For example, small steam generators, which typically use electricity, take several minutes to produce saturated steam at about 1 atmosphere and at about 100 < 0 > C. Generally, a small overheated steam generator that drains the steam at about 500 ° C or more will take more time to achieve the desired boiler pressure to produce the desired superheat steam temperature.

One of the values of superheated steam is its ability to emit huge amounts of internal energy that can be used to drive mechanical systems such as turbines and reciprocating piston engines. By keeping these systems above the condensing temperature of the water vapor at the working pressure, the superheated steam avoids the formation of water droplets, which can damage these systems due to their uncompressed nature (at their operating pressure). Thus, when driving a reciprocating engine or turbine in particular, the compressive nature of superheated steam is inherently critical.

Thus, this delay can limit the application of superheated steam in processes that require rapid superheated steam injection, as is typically the case in semiconductor manufacturing.

Thus, there is a need to produce steam, especially superheated steam, more quickly.

It is an object of the present invention to provide a steam generator and a reactor capable of generating superheated steam more rapidly.

In one embodiment, a method of producing an active species, vapor, or superheated vapor includes flowing one or more fluids through a conduit; Positioning one or more incandescent lamps proximate the conduit; And heating at least one fluid flowing through the conduit using at least a portion of the heat released from the at least one incandescent lamp such that the fluid is decomposed into a chemical component, associated with a new compound, and converted to vapor.

In one embodiment, the step of positioning one or more incandescent lamps includes positioning at least one tungsten halogen lamp proximate the conduit.

In another aspect, positioning at least one tungsten halogen lamp proximate to the conduit includes positioning at least two tungsten halogen lamps proximate the conduit, or alternatively, placing at least four tungsten halogen lamps in proximity to the conduit , Or alternatively, placing at least six tungsten halogen lamps close to the conduit.

In another aspect, the step of locating the lamp includes locating the lamp around the conduit.

In another aspect, the above-described method further comprises surrounding the lamp with a conduit.

In another aspect, positioning the lamp includes enclosing the lamp with a first portion of the conduit, and locating the lamp around the second portion of the conduit.

In another aspect, positioning the lamp includes enclosing the lamp with a first portion of the conduit, and surrounding the first portion of the conduit with the second portion of the conduit.

In another aspect, flowing at least one fluid through the conduit comprises flowing the at least one fluid into a second portion of the conduit. In this method, the second portion of the conduit forms an inlet to the conduit.

In another aspect, flowing water comprises flowing one or more fluids through two conduits, and locating the illumination in proximity to at least one or, optionally, two conduits of the conduits.

In one of the foregoing aspects, the method further comprises positioning the radiation shield between the end of the lamp and the conduit to shield the end of the lamp from radiation emitted by the lamp and from at least a portion of the heat emitted from the conduit.

In another embodiment, the generator includes a conduit having an inlet and an outlet, and one or more incandescent lamps disposed proximate the conduit. The inlet is in fluid communication with a source of one or more fluids and at least a portion of the heat emitted from the one or more incandescent lamps is used to heat one or more fluids flowing through the conduit.

In one embodiment, the at least one incandescent lamp comprises at least one tungsten halogen lamp positioned proximate the conduit.

In another embodiment, the at least one tungsten halogen lamp comprises at least two tungsten halogen lamps proximate the conduit, optionally at least four tungsten halogen lamps proximate to the conduit, proximate to the conduit, or optionally at least six tungsten halogen lamps, The halogen lamp is close to the conduit.

In another aspect, the lamp is disposed around the conduit. For example, the generator further includes first and second mounting bases for holding opposite ends of the lamp. In one embodiment, the base is formed of a ceramic material, such as a machinable glass ceramic.

In another aspect, the conduit includes a first portion and a second portion, wherein the first portion extends between lamps surrounding the first portion of the conduit, and the second portion surrounds the lamp.

Thus, the generator can quickly heat and convert gas and / or liquid, i.e. water, into steam, i.e. superheated steam.

According to the present invention, the above-described object can be achieved.

1 is a schematic diagram of a typical commercial tungsten halogen high temperature lamp.
2 is an enlarged plan view of an end base of a plurality of lamps.
FIG. 2A is a cross-sectional view taken along line IIA-IIA of FIG. 2. FIG.
Figure 3 is a schematic diagram of a lamp array system mounted between two end bases.
Figure 4 is a schematic diagram of a lamp array system having a process conduit extending therethrough.
Figure 5 is a schematic view of the lamp array system and process conduit of Figure 4 housed within an enclosure.
6 is a schematic diagram of a lamp array system having another embodiment of a process conduit.
Figure 7 is a schematic diagram of a lamp array system having a third embodiment of a process conduit. and
8 is a schematic diagram of a lamp array system having a fourth embodiment of a process conduit.

Referring to Fig. 4, reference numeral 10 generally denotes a generator or reactor for heating fluids or fluids such as liquids or gases. Although the illustrated embodiment is described herein in the context of a steam generator, particularly a steam generator that heats water to generate superheated steam, the gas or gases or the gas and liquid are heated using the same technique, And / or disassociate or associate the liquid with other desired compounds. In addition, the steam generator of the present invention can rapidly generate steam, particularly superheated steam, by heating water. For example, the steam generator 10 may generate superheated steam in units of seconds compared to the minutes associated with conventional steam generators. As will be described in more detail below, the generator 10 is configured to produce near instantaneous superheated steam at temperatures in the range of 100 ° C to several hundreds of degrees Celsius at near instantaneous vapor, more specifically at about 1 atmosphere. Some examples of the amount of steam, the temperature of the steam, and the rate of steam generation are provided below.

As shown in FIG. 4, the generator 10 includes one or more incandescent lights 12 (see FIG. 1) positioned proximate the process conduit 14 for transferring heat to the process conduit. The process conduit 14 includes an inlet or input 14a for coupling to a source of liquid such as gas and / or water and an outlet 14b through which the heated product, such as steam, . For example, a gas suitable for bonding or separating may comprise, for example, a gas associated with a semiconductor process.

3 and 4, the power is coupled to a power supply (not shown) and an electrode of the lamp and delivered to one or more incandescent lamps 12 by a computer-based control system 16, Based on the flow rate and the desired superheat vapor output temperature, the power delivered to the lamp is regulated. The computer-based control system 16 includes a microprocessor-based controller and may include one or more sensors in communication with the controller to detect one or more process parameters. For example, the computer-based control system 16 may include one or more sensors for detecting the flow rate of water at or near the input and its vicinity and for detecting the vapor temperature at or near the outlet, One or more temperature sensors for detecting the temperature of the substrate. The computer-based control system 16 may also include other electronic components that are programmed to perform the functions described herein or that support microprocessors and / or other electronic devices. Other electronic components include, but are not limited to, one or more discrete circuits, an integrated circuit, an application specific integrated circuit (ASIC) and / or other hardware, software or firmware, as is known to those skilled in the art. These components may be mounted on one or more circuit boards, or they may be mounted in a single unit within a control unit within the generator, or arranged in any other manner distributed within the various control units, Lt; / RTI > Such components may be located in a generator, which may be remote from the generator, for example, from a generator. If located separately, the component can communicate using the appropriate serial or parallel communication protocol.

In the illustrated embodiment, the illumination 12 includes a plurality of tungsten halogen lamps 18 (e.g., see FIGS. 1, 3, and 4) including, for example, tungsten halogen high temperature lamps. A halogen lamp is an incandescent tungsten lamp that contains a tungsten filament and a small amount of halogen gas such as iodine or bromine. Adding a halogen gas to the tungsten filament causes a halogen cycle chemical reaction and increases the operating life of the lamp. High temperature lamps are commercially available from various companies such as Fannon in the US and Ushio in Japan.

1, the lamp 18 may be made of a fully transparent quartz cylindrical bulb or housing 18a, or may be fabricated from a portion of the interior of the housing coated with film 20, such as a partial foil film, And focuses the energy emitted from the filament inside the housing in a desired direction. Alternatively or additionally, the pressure may be applied to the exterior of the housing by an external reflective coating, such as a gold film. As is conventional, the lamp 18 may include a ceramic cap 18b at each end, and the end of the filament may be extended at each end so that each lamp is controlled by the control system 16 And to electrodes 18c and 18d for coupling to the power supply.

To support the lamp in a spaced apart relationship around the process conduit 14, the generator 10 includes first and second end bases 22 as shown in FIG. Each end base 22 may be formed of a ceramic material that includes a machinable ceramic material such as a machinable glass ceramic, available under the trademark Mica or Macor. As best seen in Figures 2 and 2A, the end base 22 includes a plurality of openings 24 through which the lamp electrode extends to connect the power supply. In the illustrated embodiment, the end base 22 includes an optional optical central opening 26 for receiving a process conduit, and an annular (not shown) annular portion 26 extending around the opening 26 for receiving a respective end cap of the lamp 18 Like member having a recess 28. The disk- It will be appreciated that the shape, size, and location of the openings in the end base may vary depending on the size and number of lamps used and the type of process conduit.

The openings 24 are located within the annular recess 28 of the end base 22 and are disposed radially spaced from the openings 26 so that when the lamps are mounted to their respective end bases 22, A ramp 18 is disposed around the opening 26 to form a central passage 30 (Figs. 3 and 4) so that the conduit 14 is received. Thus, in this embodiment, the lamp 18 surrounds the process conduit 14. Thus, the reflective coating 20 is applied to the outside of each lamp such that the heat emitted by the lamp is directed inward toward the process conduit. As shown in the illustrated embodiment, the number of lamps may be modified to include at least two lamps, at least four lamps, and optionally six or more lamps.

To increase heat transfer, the lamp 18 is positioned very close to the process conduit 14 of FIG. For example, the term proximity is in the range of 5 to 10 mm, in the range of 2 to 30 mm, or alternatively in the range of 1 to 7 mm. In this manner combined with the use of reflective coatings, the heat emitted from the lamps, if not most, is directed to the process conduits.

Referring again to Figure 4, in the illustrated embodiment, the process conduit 14 is formed of a variety of materials such as steel, stainless steel alloy, aluminum, copper, glass, quartz, alumina, silicon carbine, zirconia, ) (Figs. 3 and 4) and a tube extending through the enclosure described below. The diameter and wall thickness of the tube should be greater than or equal to about 6.35 mm (0.25 inches) in diameter, depending on the specific process requirements and the desired chemical reaction outcome desired. For example, or alternatively, when the wall thickness is in the range of 0.12 to 0.75 mm, in the range of 0.02 to 2.54 mm, alternatively in the range of 0.25 to 0.5 mm, the diameter of the tube is typically in the range of 150 to 300 mm, To 1500 mm, alternatively in the range of 300 to 600 mm.

In order to reduce heat loss and further prevent the risk of injury to a person close to the generator, the generator 10 optionally includes an enclosure 32 (FIG. 5). Enclosure 32 includes opposite end walls 34a and 34b, a peripheral wall 36 extending between two end walls 34a and 34b and surrounding and surrounding lamp 18, process conduit 14, 22). The end walls 34a and 34b include openings to the inlet and outlet ends of the process conduit 14 and the generator is fully contained within the enclosure except for the outlet and inlet ends. And may optionally be formed of a heat insulating material such as various ceramics. The enclosure may also include an inner insulation material such as quartz wools. Alternatively, the enclosure may also include an outer water-cooled jacket formed around the peripheral wall and extending around the peripheral wall 36 to provide insulation and additional insulation.

In the test of a generator constructed according to the first embodiment, namely in a 6 1000 W tungsten halogen lamp operated at 40% power and a 120 cm ³ water input flow per minute, the superheated steam was generated within approximately 15 seconds at approximately 500 ° C, It corresponds almost to the superheated steam of 200 liters per minute.

According to a second embodiment of the generator, the process conduit may be configured to surround the lamp. 6, the generator 110 includes a process conduit 114 configured as a coil having a first linear portion forming an input 114a and a second linear portion forming an output 114b, Extends through the end wall of the enclosure 130, as in the previous embodiment. In this manner, the process conduit 114 surrounds the lamp 18. With this arrangement, the surface area of the process conduit is greatly increased, so that more heat emitted from the lamp can be absorbed by the fluid flowing through the process conduit. Also with this configuration, the reflective coating can be removed or its position can be changed. For example, a reflective coating is provided on the inwardly facing surface of each lamp so that all heat deflected by the lamp is directed outward through the outwardly facing surface of the lamp.

To maximize the heat absorbed by the process conduit, the coil portion of the process conduit has a size that covers most, if not all, of the heated length of each lamp (see Figure 1).

According to another embodiment of the generator 210, the process conduit may be comprised of two parts, a first part enclosing the lamp and a second part enclosed by the lamp. Referring to Figure 7, the process conduit 214 of the generator 210 includes a first coil portion 216 that is coiled and encloses the lamp 18 and a second coil portion 216 that surrounds the lamp 18, similar to the first embodiment, And a second rectilinear section 218 extending and surrounded by the lamp. The coil portion of the process conduit is coupled to the straight portion of the process conduit by the third portion 220 having an inverted L-shape. The shape of the third portion 218 of the process conduit 214 may vary. In this embodiment, the coil portion 216 is in series with the straight portion 218 of the process conduit 214.

The coil portion 216 includes an inlet 216a in fluid communication with a water source through a peripheral wall 236 of the enclosure 230 and a straight portion 218 of the process conduit 214 And extends downwardly through the end wall 234b of the enclosure to output steam. Enclosure 232 has a similar configuration to enclosure 32 and provides an enclosure insulated for most process conduits and lamp 18, except for the inlet and outlet. Thus, the enclosure 32 is referred to for further details.

As the surface area of the process conduit increases, the generator 210 can generate superheated steam at very high temperatures at very high volumetric fluid velocities. In one test, generators of the type described herein (with six 1000 W tungsten halogen lamps) can generate 400 L of superheated steam at 60% lamp power at temperatures of approximately 500 ° C.

In another embodiment of the generator, the process conduit may include a first portion surrounding the lamp and a second portion surrounding the first portion of the process conduit. Referring to FIG. 8, reference numeral 310 generally represents another embodiment of a generator. The generator 310 includes a first coil portion 316 surrounding the lamp 18 and a second coil portion 318 surrounding the first coil portion 316 of the process conduit 314. In the illustrated embodiment, the first coil portion 316 has a size that extends beyond the heating length of each lamp, similar to the second and third embodiments. The second coil portion 318 has a size beyond the first coil portion 316, substantially extending beyond the entire length of the lamp 18. As a result, the outer coil portion has a longer coil length than the inner coil portion. The diameter of the second coil section may also be greater than the diameter of the first coil section and completely surrounds the inner coil section as shown. In addition, insulation may be added to the outer coil portion before installing it in an enclosure (not shown, but the enclosure of a previous embodiment for an embodiment of insulation may be referred to). In the illustrated embodiment, both the inlet and outlet ends of the process conduits extend through one of the end walls of the enclosure and thus exit the generator from the same side.

The outer coil portion 318 of the process conduit 314 is an insulator that reduces heat reaching the enclosure for safe handling during operation, with the outer coil portion 318 directing water against the inner coil portion 316 And increases the thermal efficiency of heat transfer from the lamp to the process conduit.

Optionally, the generator 310 may include one or more radiation shields 340. The shield 340 may include a plate such as a circular plate and may be constructed of a high temperature ceramic material including a ceramic material such as mica or machinable glass ceramic similar to the material from the end base. The shield 340 is positioned between the end of the lamp and the process conduit to protect the end of the lamp from radiation emitted by the lamp and from at least a portion of the heat emitted from the process conduit.

This radiation shield thus minimizes the direct radiant heat loss that can reach the enclosure of the outer coil and generator. Thus, with the addition of an external coil, the high temperature insulation between the coils and the radiation shielding, the lamp end can be cooled more than otherwise, thus extending the life of the lamp.

In either of the generators, a ventilation fan that draws ambient ambient air into the space between the insulation process conduit and the enclosure may be integrated within the enclosure to cool the end of the lamp and extend the lamp's life.

In either one of the generators, a thermocouple tube 350 is added, as shown with reference to generator 310, to provide a process conduit, such as an inner coil section, and a computer-based control system Which may be used in either the control system 16 and the generator. The thermocouple tube 350 provides greater control over the operation of each lamp and steam generation by providing feedback to the control system about the temperature of the process conduit, which allows for the temperature of the process conduit Can be used.

Thus, the generators described herein can generate superheated steam within seconds, e.g., within 10 seconds, depending on the percentage of lamp power used and the water input flow rate. The generator can also be turned off almost instantaneously by turning off the water flow and lamp power. It can be used in production cycles with variable cycle times or can be used to generate a continuous flow rate of superheated steam at a constant temperature. This can be easily accomplished by using the computer control system described above to control the percentage of power delivered to the lamp based on the water flow rate and the desired superheat steam outlet temperature. These generators can generate superheated steam at one atmospheric pressure and thus do not require expensive high pressure superheater generators. However, it should be understood that the generator may use a back pressure downstream from the outlet or outlet to change the pressure in the process conduit. It is also highly price competitive and can easily be installed in a variety of commercial applications ranging from steam health spa to chemical, biological and semiconductor processing.

Claims (17)

In a method for producing active species, vapors or superheated vapors,
Flowing one or more fluids through the conduit;
Positioning one or more incandescent lamps proximate the conduit; And
Heating at least one fluid flowing through the conduit using at least a portion of the heat released from the at least one incandescent lamp such that the fluid is decomposed into a chemical component, associated with a new compound, and converted to vapor To
Way.
The method according to claim 1,
Wherein positioning at least one incandescent lamp includes positioning at least one tungsten halogen lamp proximate the conduit
Way.
3. The method of claim 2,
Positioning the at least one tungsten halogen lamp proximate to the conduit comprises:
Placing at least two tungsten halogen lamps close to the conduit, or alternatively placing at least four tungsten halogen lamps close to the conduit, or alternatively placing at least six tungsten halogen lamps close to the conduit ≪ / RTI >
Way
4. The method according to any one of claims 1 to 3,
The step of locating the lamp includes positioning the lamp around the conduit
Way.
4. The method according to any one of claims 1 to 3,
Further comprising enclosing the lamp with a conduit
Way.
3. The method of claim 2,
The step of locating the lamp includes the steps of enclosing the lamp with a first portion of the conduit, and locating the lamp around the second portion of the conduit
Way.
3. The method of claim 2,
The step of locating the lamp includes enclosing the lamp with a first portion of the conduit, and surrounding the first portion of the conduit with the second portion of the conduit
Way.
8. The method of claim 7,
Flowing at least one fluid through the conduit includes flowing the at least one fluid into a second portion of the conduit, wherein the second portion of the conduit forms an inlet to the conduit
Way.
9. The method according to any one of claims 1 to 8,
The step of flowing water comprises flowing at least one fluid through the two conduits and positioning the illumination in proximity to at least one of the conduits or alternatively to two conduits
Way.
10. The method according to any one of claims 1 to 9,
Further comprising positioning the radiation shield between the end of the lamp and the conduit to shield the end of the lamp from radiation emitted by the lamp and from at least a portion of the heat emitted from the conduit
Way.
In the generator,
A conduit having an inlet and an outlet, the inlet being configured to be in fluid communication with a source of one or more fluids; And
At least one incandescent lamp located proximate to the conduit, at least a portion of the heat emitted from the at least one incandescent lamp being used to heat one or more fluids flowing through the conduit;
≪ / RTI >
12. The method of claim 11,
Wherein the one or more incandescent lamps comprise one or more tungsten halogen lamps positioned proximate the conduit
generator.
13. The method of claim 12,
Wherein at least one tungsten halogen lamp comprises at least two tungsten halogen lamps proximate the conduit and optionally at least four tungsten halogen lamps proximate the conduit or optionally at least six tungsten halogen lamps, Close to
generator.
13. The method according to claim 11 or 12,
The lamp is placed around the conduit
generator.
15. The method according to any one of claims 12 to 14,
The generator further comprises first and second mounting bases for holding opposite ends of the lamp
generator.
16. The method of claim 15,
The base is made of a ceramic material such as a machinable glass ceramic
generator.
13. The method of claim 12,
The conduit includes a first portion and a second portion, the first portion extending between lamps surrounding a first portion of the conduit, and the second portion extending between the lamps surrounding the lamp
generator.

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