EP3490916A1 - Transporting system and processing system for substrates - Google Patents

Transporting system and processing system for substrates

Info

Publication number
EP3490916A1
EP3490916A1 EP17755427.6A EP17755427A EP3490916A1 EP 3490916 A1 EP3490916 A1 EP 3490916A1 EP 17755427 A EP17755427 A EP 17755427A EP 3490916 A1 EP3490916 A1 EP 3490916A1
Authority
EP
European Patent Office
Prior art keywords
substrate
support surface
compressed air
transport system
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP17755427.6A
Other languages
German (de)
French (fr)
Inventor
Florian WAMSLER
Achim Arnold
Klaus Oppelt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asys Automatisierungssysteme GmbH
Original Assignee
Asys Automatisierungssysteme GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asys Automatisierungssysteme GmbH filed Critical Asys Automatisierungssysteme GmbH
Publication of EP3490916A1 publication Critical patent/EP3490916A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Definitions

  • the invention relates to a transport system for substrates, in particular wafers, solar cells, printed circuit boards or the like, having a first device for holding and transporting the substrates, the gripper head having at least a first Auflagefiumblee on its underside for laying a substrate and at least one suction device for sucking Substrate against the support surface, and with a second device for holding and transporting the substrates, having at least a second Auflagefiambae on which a substrate is deposited, and with means for moving the deposited substrate from the second Auflagefiumblee to the first Auflagefiambae.
  • the invention relates to a processing system for substrates, in particular wafers, solar cells, printed circuit boards or the like, with at least one workstation or processing station for treating or processing the substrates and at least one transport system of the type mentioned above, which is used, for example, a substrate of a Workstation to spend another workstation.
  • Transport systems of the type mentioned are known from the prior art.
  • substrates are not manually carried from one processing station to the next, but moved automatically.
  • requirements for cleanliness and care in the manufacturing process safely guaranteed.
  • devices are necessary which allow a transport of the substrates, by which the substrates are not damaged.
  • To carry out the transport it is therefore customary, for example, to make the support surface on which the substrates can be stored for processing movable in order to move the substrate from a processing position into a transport position or transfer position. Frequently transport belts or treadmills are used, on which the substrates can be stored and conveyed through a processing station.
  • the invention has for its object to improve the transport system of the type mentioned, so that the transfer of a substrate from the first device to the second device is safe and inexpensive.
  • the problem underlying the invention is achieved by a transport system having the features of claim 1.
  • This has the advantage that the transfer of the substrates from the first device to the second device takes place without much additional effort and in particular requires no moving parts which raise the respective substrate and closer to the gripping head or move the gripping head in the direction of the second support surface to the lying there substrate to be able to access.
  • the manufacturing and assembly costs of the transport system is simplified, so that in particular production costs are reduced.
  • the device comprises at least one compressed air nozzle which is arranged below the second support surface such that a compressed air flow generated / generated by it flows in the direction of a lying on the second support surface substrate or is aligned to the Raise substrate in the direction of the first support surface, in particular, when the substrate is located in a designated transfer region of the second support surface.
  • the invention thus provides that the substrates or the respective substrate are lifted by the second device by compressed air and fed to the first device / is. In other words, the substrates or the respective substrate are blown from the second device to the first device. As a result, a particularly simple transfer of the substrates is guaranteed, the no moving mechanical parts needed.
  • first device and / or the second device dispenses in particular with elements that are subject to mechanical wear and increase the maintenance of the transport system.
  • first device and / or the second device it is not necessary for the first device and / or the second device to have actuators which move the first bearing surface or the second bearing surface downwards or upwards in order to transfer the respective substrate.
  • the manufacturing, wiring and design effort is greatly facilitated.
  • By blowing on the substrates to the gripping head a particularly gentle handling of the substrates is also ensured, as is dispensed with mechanical force even in the transfer of the substrates.
  • the first bearing surface and the second bearing surface are arranged so close to each other that is blown by the blowing of the respective substrate from the second bearing surface in the direction of the first bearing surface to the first bearing surface, or raised, or at least raised to the area, in which the negative pressure of the first device is sufficiently high to further attract / attract the substrate to the first support surface.
  • the at least one compressed air nozzle is assigned to the transfer area of the second support surface or of the transport system, in which the first support surface and the second support surface are opposite one another.
  • the device comprises a plurality of mutually parallel compressed air nozzles for lifting the substrate.
  • a plurality of compressed air nozzles is ensured that the substrate, for example, not tilted when blowing and its orientation is maintained altogether when lifting.
  • at least two compressed-air nozzles are present, which are each assigned to one longitudinal side of the substrate or the second bearing surface, in order to pressurize a substrate on both sides with compressed air and thereby lift it safely.
  • the compressed-air nozzles have a symmetrical arrangement in order to ensure a uniform supply of compressed air to the respective substrate.
  • a compressed air cushion is thereby produced, which ensures a uniform application of force to the respective substrate, so that, for example, sagging of the substrate during lifting is avoided.
  • the compressed-air nozzles are arranged next to the second bearing surface. As a result, areas of the respective substrate are subjected to the compressed air, which protrude beyond the second bearing surface. This is In particular, an advantageous solution when the second bearing surface is formed by a transport belt or a plurality of transport belts.
  • At least one compressed air nozzle is arranged centrally in an interruption of the second bearing surface.
  • the compressed-air nozzle is arranged, for example, between two transport belts which are arranged parallel to one another and spaced apart from one another and which form the second support surface.
  • a resting on the second support surface substrate is also centrally applied with compressed air and raised in the direction of the first support surface.
  • the first and / or second bearing surface is formed by at least one movably mounted transport belt.
  • the transport belt is preferably an endless traction means, which is guided in particular circumferentially by deflection rollers on the second device.
  • at least one belt tensioner is assigned to the respective transport belt, which ensures that the transport belt extends along the intended track, in particular in the running section, in which the transport belt forms the first or second bearing surface.
  • the first and / or second support surface is formed by at least two parallel and spaced from each other and movably mounted transport belt.
  • the respective substrate rests on or on two conveyor belts, so that it is securely held and guided.
  • the one or more compressed-air nozzles may be arranged centrally between the transport belts or outside the two transport belts in order to pressurize the respective substrate from below with compressed air.
  • the compressed air nozzles are fluidly connected to a common compressed air generator, so that the compressed air nozzles are acted upon by the same compressed air, whereby a simple compressed air generation and raising the respective substrate is realized cost.
  • the respective compressed-air nozzle has a controllable valve for setting a flow cross-section in the respective compressed-air nozzle.
  • the respective valve thus the flow cross sections of the particular be adapted to a plurality of compressed air nozzles, for example, to ensure that the respective substrate is raised evenly, without it loses its orientation with respect to the support surface and, for example, tilts in one direction.
  • the valves are actuated to turn on or off the pressurization by releasing or completely closing the flow area. This ensures that the compressed air cushion is generated only when the substrate is in a favorable position on the second support surface.
  • only one controllable valve is provided which, for example, downstream of the compressed air generator and upstream of the branch to the compressed air nozzles, so that the compressed air flow can be interrupted or released with a single valve.
  • the respective valve is electrically actuated and has a corresponding actuator for adjusting a valve element, which influences the flow cross-section.
  • the second device has at least one sensor for detecting the resting of a substrate on the second support surface.
  • the sensor it is then possible to detect, for example, that a substrate has been transported by means of the transport belts into a transfer region, that is to say into a position advantageous for transfer along the second support surface. If this is detected, then, for example, the one or more valves are activated in order to release the respective flow cross section, so that the respective substrate is raised in the direction of the gripping head.
  • the sensor is designed to detect only the presence of the substrate on the second bearing surface, in particular in the transfer section.
  • the senor not only detects the presence, but also the orientation of the substrate in the transfer section, wherein the alignment is to be understood in particular as the orientation of the substrate with respect to the plane of the support surface.
  • the possibility is thereby made available to detect the inclination of a substrate with respect to the second bearing surface.
  • the compressed air nozzles are driven to counteract the tilt so that the substrate is aligned parallel to the second support surface.
  • a control device is preferably present, which is signal-technically connected to the at least one sensor and the at least one valve.
  • a plurality of sensors are arranged distributed for detecting the inclination of the substrate For example, each detect a distance to the substrate, so that the inclination of the substrate is determined depending on the determined distances.
  • the senor is designed as a contact-free operating sensor, in particular as a distance sensor, for example as an optical sensor, ultrasonic sensor, radar sensor, laser sensor, lidar sensor or the like. If it is determined that a distance detected by the sensor does not correspond to a desired distance that would be detected when the substrate is in the transfer area, it is recognized that there is no substrate in the transfer area or the substrate has already been transferred to the first device. As a result, a simple control of the transport system by means of the previously mentioned control device is ensured.
  • a distance sensor for example as an optical sensor, ultrasonic sensor, radar sensor, laser sensor, lidar sensor or the like.
  • the processing system according to the invention is characterized by the transport system according to the invention.
  • the second device is integrated into the at least one processing station in order to convey a substrate through the processing station.
  • the first device operates according to the transport system according to the invention with the second device together to remove the substrate from the at least one processing station and spend, for example, at least a second processing station.
  • the gripping head is designed to be movable, for example, so that it can be moved horizontally, for example, to transfer the substrate from one processing station to another processing station, which in particular likewise has a transport device according to the second device, and place it there on the second support surface.
  • FIG. 1 shows an advantageous transport system for substrates in a perspective
  • Partial view Figure 2 is a front view of the transport system
  • Figure 3 is a side view of the transport system.
  • the transport system 1 shows a perspective partial representation of a transport system 1 of a processing system 2, not shown, for substrates, in particular printed circuit boards, solar cells, wafers or the like.
  • the substrates are thus, in particular, flat plate-like structures which must be handled, handled and transported carefully.
  • the transport system 1 serves, for example, to transport the substrates from a processing station 3 of the processing system 2 to a further processing station.
  • the transport system 1 has a first device 4 and a second device 5, which are each designed to grip or hold and transport the substrates.
  • the device 4 has a gripping head 6, which has a support structure 7, on which a suction device 8 and two circulating transport belts 9 are arranged.
  • the transport belts 9 in this case each bypass the support structure 7 as endless traction means and together form a first support surface 11 on the underside 10 of the gripper head 6.
  • a negative pressure can be generated by which substrates are sucked against the support surface 11 against the gripper head 6 and thereby can be held the gripping head 6.
  • a drive device (not shown here) is then actuated to set the transport belts 9 in a circulating motion, the sucked-in substrate with the transport belts 9 is moved along the support surface 11 in the longitudinal extent of the gripper head 6, as indicated by a double arrow 12.
  • the vacuum necessary for holding the substrate is generated, for example, by the suction device 8 between the transport belts 9.
  • the transport belts 9 each have a plurality of suction openings 13, which are fluidically connected to one or more vacuum chambers in the support structure 7.
  • the Tragpro fil has, for example, for each of the conveyor belts each have a hollow profile, which is fluidically connected to the suction device 8 to set in at least one hollow chamber or vacuum chamber of the Hohlpro fils the negative pressure.
  • the respective vacuum chamber is then fluidically connected to a running surface on which the transport belt 9 rests continuously at least on the underside 10 of the gripping head 6, the passage openings in particular opening into a longitudinal groove in the running surface, the is arranged corresponding to the suction openings 13, so that along the entire movement path of the conveyor belt 9 on the underside 10 of the gripping head 6, a negative pressure at the suction openings 13 of the conveyor belt 9 can be generated.
  • the suction openings 13 may be distributed uniformly over the respective transport belt 9, or evenly distributed in groups, as shown by way of example in FIG.
  • the second device 5 which is arranged below the gripping head 6, also has a support structure 14, on which two circulating transport belts 15 are arranged.
  • the transport belts 15 are displaceable into the circulating movement by a drive device 16, of which only one drive shaft 17 is shown here.
  • the transport belts 15 as well as the transport belts 9 are each spaced apart and arranged parallel to each other as Endloszugstoff on the support structure 14.
  • the transport belt 15 analogously, the conveyor belt 9, driven simultaneously and uniformly.
  • the transport belts 15 also run substantially horizontally, as do the transport belts 9, but are aligned with respect to their longitudinal extent according to the present embodiment perpendicular to the conveyor belt 9, as indicated by a double arrow 30.
  • the top section of the transport belt 15 forms a second support surface 18, on which substrates can be placed.
  • On the support surface 18 resting substrates can then be moved or moved by driving the conveyor belt 15 in a simple manner perpendicular to the longitudinal extent of the gripping head 6, for example, to supply them to a processing device or dissipate therefrom.
  • the devices 4 and 5 or the support structures 7 and 14 are arranged at a fixed distance from one another, so that the support surfaces 9 and 15 formed by the respective transport surfaces 18 and 11 have a fixed distance from one another.
  • the device 5 has a device 20 which is designed to lift the substrate 19 by compressed air in the direction of the gripping head 6.
  • the device 20 has two compressed-air nozzles 21, as can be seen in particular in FIG.
  • FIG. 2 shows in a simplified front view the transport system 1 from FIG. 1.
  • the support structure 14 carries a compressed air distributor 22, which on the output side is in each case fluidically connected to one of the compressed air nozzles 21.
  • the compressed air distributor 22 is fluidly connected to a compressed air generator 25 by a valve 23, which is shown only schematically here, and also by an optional pressure regulator 24, which is also shown only schematically.
  • the compressed air generator 25 may be, for example, a pump or the like.
  • the valve 23 is designed to close a flow cross-section between the pressure generator 25 and the compressed-air nozzles 21 or the compressed-air distributor 22 (switching position shown in FIG. 2) or to release them.
  • valve 23 is designed as a proportional valve in order to vary the flow cross-section so that the compressed air flow originating from the compressed-air nozzles 21 can be varied.
  • the pressure regulator 24 has a spring-loaded actuating element and a return channel in order to automatically calm or adjust the pneumatic air pressure generated by the compressed air generator 25 to a predefinable value, so that compressed air fluctuations generated by the compressed air generator 25 are compensated.
  • the compressed air nozzles 21 are arranged on the outlet side respectively below the support surface 18 on the support structure 14 and point upwards in the direction of the gripping head 6 and the Aufiagefikiee 18.
  • the compressed air nozzles 21 on both sides of the support structure 14 are arranged such that they laterally spaced from the conveyor belt 15 and are still in the range of the substrate to be transported or moved 19, so that the compressed air flow of the compressed air nozzles 21, indicated by dashed lines in Figure 2, strikes the underside of the respective substrate 19.
  • one or more compressed-air nozzles can also be arranged within the support structure 14 in the free space in which the sensor 27 is arranged.
  • the compressed air generator 25 For lifting or bringing the respective substrate 19 from the support surface 18 to the support surface 11, the compressed air generator 25 is thus activated and the valve 23 is opened so that the compressed air flow coming from the compressed air nozzles 21 lifts the substrate 19 in the direction of the gripper head 6 and against the support surface 11 pushes or at least so close to the gripping head 6 zoom in that it enters the effective range of the suction device 8 and is pulled by this against the support surface 11.
  • a control device 26 is expediently provided, which is connected at least to the compressed air generator 25 and the valve 23 in order to control it.
  • the control unit 26 is also connected to a sensor 27, which is arranged between the compressed-air nozzles 21 within the support structure 14 in a region in which there is a clearance between the sensor 27 and underside of the respective substrate 19.
  • the sensor 27 is aligned in the direction of the support surface 18 and the gripping head 6 and in particular formed as an optical distance sensor.
  • the control unit 26 detects in particular continuously the distance of the sensor 27 to the next in the detection range of the sensor 27 lying object. If the substrate 19 is located above the sensor 27, as shown in FIG. 2, it thus covers the distance to the substrate 19. If the substrate 19 is lifted by the device 22 against the gripping head 6, the detected distance 27 increases the successful lifting of the substrate 19 in a simple manner detectable.
  • the compressed air nozzles 21 are arranged at a distance from the support surface 18, in particular below the transport belt 15. This has the advantage that a uniform compressed air flow is formed, which acts on the underside of the respective substrate 19, in particular Verwirb eluations are avoided. Characterized in that the two compressed-air nozzles 21 are provided, the respective substrate 19 is acted upon uniformly in the compressed air at its side edges and raised, so that tilting of the substrate 19 is avoided.
  • two compressed air nozzles 21 are provided on each longitudinal side of the support structure 14 to bias the substrate 19 symmetrically with compressed air, so that tilting both about a transverse axis and about a longitudinal axis of the substrate 19 is reliably avoided ,
  • the sensor 27 the presence of the substrate 19 can be detected.
  • the valve 23 is opened only when the substrate 19 is in the transfer region 28. Otherwise, a one-sided lifting of the substrate 19 could occur, whereby the substrate 19 would tilt with respect to the support surface 18.
  • the device 5 has a plurality of these sensors 27 to determine the positioning and possibly inclination of the substrate 19.
  • the one or more sensors 27 are assigned to the transfer region or arranged in the region of the device 5 which lies opposite the device 4 or the gripping head 6.
  • the respective sensor 27 is designed as an optical sensor, in particular as a laser sensor, Lidarsensor, ultrasonic sensor, radar sensor or the like to detect the distance without contact.
  • each of the compressed air nozzles 21 is assigned its own controllable valve 23, so that the respective flow cross section is individually adjustable.
  • the valves 23 are then actuated such that the substrate 19 maintains its orientation parallel to the support surface 15 during lifting.
  • FIG. 3 shows a side view of the transport system 1, which shows the positioning of the two compressed-air nozzles 21 to the transfer region 28.
  • the two conveyor belt 9 can be seen, which extend perpendicular to the longitudinal extent of the conveyor belt 15, as already mentioned above. If the substrate 19 is located in the transfer region 28, it is lifted directly in the direction of the transport belts 9, as indicated by arrows 29, wherein the substrate 19 is shown by way of example by dashed lines in the transfer position applied to the transport belt 9.
  • the transport system 1 thus allows in a simple manner a transfer of the respective substrate 19 from the device 5 to the device 4 by the substrate 19 is blown up.
  • the device 5 can in particular represent a discharge device of the processing station 3 of the processing system 2.
  • the transport belt 15 can extend as far as into the processing station 3, or as shown in Figure 3, connect to a transport system of the processing station 3, so that the respective substrate 19 is passed directly to the conveyor belt 15, for example, from an integrated conveyor belt of the processing station.
  • existing processing systems can be supplemented in a simple manner by the advantageous transport system 1.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention relates to a transporting system (1) for substrates (19), in particular wafers, solar cells, printed circuit boards or the like, having a first apparatus (4) which for retaining and transporting the substrates (19), said first apparatus having a gripping head (6), with at least one first bearing surface (11) on its underside (10) on which to position a substrate (19), and at least one suction device (8) for the suction attachment of the substrate (19) against the bearing surface (11), and having a second apparatus (5) for retaining and transporting the substrates (19), said second apparatus having at least one second bearing surface (18), on which a substrate (19) can be set down, and having a device (20) for moving the set-down substrate (19) from the second bearing surface (18) to the first bearing surface (11). Provision is made here for the device (20) to have at least one compressed-air nozzle (21), which is arranged beneath the second bearing surface (18) such that a compressed-air stream generated by it flows in the direction of a substrate (19) located on the second bearing surface (18), in order to raise the substrate (19) in the direction of the first bearing surface (11).

Description

BESCHREIBUNG  DESCRIPTION
Transportsystem und Bearbeitungssystem für Substrate Transport system and processing system for substrates
Die Erfindung betrifft ein Transportsystem für Substrate, insbesondere Wafer, Solarzellen, Leiterplatten oder dergleichen, mit einer ersten Vorrichtung zum Halten und Transportieren der Substrate, die einen Greifkopf mit zumindest einer ersten Auflagefiäche an seiner Unterseite zum Auflegen eines Substrats und zumindest eine Saugeinrichtung zum Ansaugen des Substrats gegen die Auflagefläche aufweist, und mit einer zweiten Vorrichtung zum Halten und Transportieren der Substrate, die zumindest eine zweite Auflagefiäche aufweist, auf welcher ein Substrat ablegbar ist, und mit einer Einrichtung zum Bewegen des abgelegten Substrats von der zweiten Auflagefiäche zu der ersten Auflagefiäche. The invention relates to a transport system for substrates, in particular wafers, solar cells, printed circuit boards or the like, having a first device for holding and transporting the substrates, the gripper head having at least a first Auflagefiäche on its underside for laying a substrate and at least one suction device for sucking Substrate against the support surface, and with a second device for holding and transporting the substrates, having at least a second Auflagefiäche on which a substrate is deposited, and with means for moving the deposited substrate from the second Auflagefiäche to the first Auflagefiäche.
Weiterhin betrifft die Erfindung ein Bearbeitungssystem für Substrate, insbesondere Wafer, Solarzellen, Leiterplatten oder dergleichen, mit wenigstens einer Arbeitsstation beziehungsweise Bearbeitungsstation zum Behandeln oder Bearbeiten der Substrate und mit wenigstens einem Transportsystem der oben genannten Art, das beispielsweise dazu genutzt wird, ein Substrat von einer Bearbeitungsstation zu einer anderen Bearbeitungsstation zu verbringen. Furthermore, the invention relates to a processing system for substrates, in particular wafers, solar cells, printed circuit boards or the like, with at least one workstation or processing station for treating or processing the substrates and at least one transport system of the type mentioned above, which is used, for example, a substrate of a Workstation to spend another workstation.
Transportsysteme der eingangs genannten Art sind aus dem Stand der Technik bekannt. Bei der Serienfertigung werden Substrate nicht manuell von einer Bearbeitungsstation zur Nächsten getragen, sondern automatisiert bewegt. Hierdurch werden Erfordernisse an Sauberkeit und Sorgsamkeit beim Herstellungsprozess sicher gewährleistet. Um die Substrate beim Transport nicht zu beschädigen, sind insbesondere Vorrichtungen notwendig, welche einen Transport der Substrate ermöglichen, durch den die Substrate nicht beschädigt werden. Um den Transport vorzunehmen, ist es daher beispielsweise üblich, die Auflagefiäche, auf welcher die Substrate zur Bearbeitung abgelegt werden können, beweglich zu gestalten, um das Substrat von einer Bearbeitungsposition in eine Transportposition oder Übergabeposition zu verfahren. Häufig werden dabei Transportriemen oder Laufbänder verwendet, auf welchen die Substrate abgelegt und durch eine Bearbeitungsstation hindurchgefördert werden können. Dadurch, dass die Substrate einfach auf den Transportbändern aufliegen, werden Haltekräfte vermieden, die das Substrat beschädigen könnten. Um ein Lösen der Substrate von den Laufbändern zu verhindern, ist es außerdem bekannt, bei Bedarf einen Unterdruck einzustellen, welcher die Substrate gegen die Auflagefläche saugt. Durch den Unterdruck wird eine mechanische Kraftbeaufschlagung der Substrate vermieden und dennoch ein Halten gewährleistet. Transport systems of the type mentioned are known from the prior art. In mass production, substrates are not manually carried from one processing station to the next, but moved automatically. As a result, requirements for cleanliness and care in the manufacturing process safely guaranteed. In order not to damage the substrates during transport, in particular devices are necessary which allow a transport of the substrates, by which the substrates are not damaged. To carry out the transport, it is therefore customary, for example, to make the support surface on which the substrates can be stored for processing movable in order to move the substrate from a processing position into a transport position or transfer position. Frequently transport belts or treadmills are used, on which the substrates can be stored and conveyed through a processing station. The fact that the substrates simply rest on the conveyor belts, holding forces are avoided, which could damage the substrate. In order to prevent detachment of the substrates from the treadmills, it is also known, if necessary, to set a negative pressure which opposes the substrates the bearing surface sucks. Due to the negative pressure, a mechanical application of force to the substrates is avoided and still ensures a hold.
Das Arbeiten mit Unterdruck hat sich auch bei Vorrichtungen bewährt, welche ein Substrat von oben greifen, indem sie es an einer Auflagefläche eines Greifkopfs ansaugen. Wird der Greifkopf anschließend bewegt, ist das Substrat auf einfache Art und Weise von einer Bearbeitungsstation zur nächsten Bearbeitungsstation verlagerbar. Um das Substrat von der einen Vorrichtung der anderen zu übergeben, ist es bekannt, den Greifkopf auf dem Substrat abzusetzen beziehungsweise auf dieses aufzulegen, um das Substrat zu greifen. Arbeiten die beschriebenen Vorrichtungen zusammen, ist auf einfache Art und Weise ein Transportsystem bereitstellbar, das die Bearbeitung und den Transport von Substraten durch ein Bearbeitungssystem mit mehreren Bearbeitungsstationen sicher erlaubt. Working with negative pressure has also been proven in devices that grab a substrate from above by sucking it on a support surface of a gripping head. If the gripping head is subsequently moved, the substrate can be moved in a simple manner from one processing station to the next processing station. In order to transfer the substrate from one device to the other, it is known to deposit or place the gripping head on the substrate in order to grasp the substrate. If the devices described work together, a transport system can be provided in a simple manner, which reliably allows the processing and transport of substrates through a processing system having a plurality of processing stations.
Der Erfindung liegt die Aufgabe zugrunde, das Transportsystem der eingangs genannten Art zu verbessern, sodass die Übergabe eines Substrats von der ersten Vorrichtung an die zweite Vorrichtung sicher und kostengünstig erfolgt. Die der Erfindung zugrundeliegende Aufgabe wird durch ein Transportsystem mit den Merkmalen des Anspruchs 1 gelöst. Dieses hat den Vorteil, dass die Übergabe der Substrate von der ersten Vorrichtung an die zweite Vorrichtung ohne großen Mehraufwand erfolgt und insbesondere keine beweglichen Teile erfordert, die das jeweilige Substrat anheben und dem Greifkopf näherführen oder den Greifkopf in Richtung der zweiten Auflagefläche bewegen, um das dort liegende Substrat greifen zu können. Dadurch wird der Herstellungs- und Montageaufwand des Transportsystems vereinfacht, sodass insbesondere auch Herstellungskosten reduziert werden. Erfindungsgemäß wird dies dadurch erreicht, dass die Einrichtung wenigstens eine Druckluftdüse aufweist, die unterhalb der zweiten Auflagefläche derart angeordnet ist, dass ein durch sie erzeugter/erzeugbarer bzw. ausgerichteter Druckluftstrom in Richtung eines auf der zweiten Auflagefläche liegenden Substrats strömt beziehungsweise ausgerichtet ist, um das Substrat in Richtung der ersten Auflagefläche anzuheben, insbesondere, wenn sich das Substrat in einem dafür vorgesehenen Übergabebereich der zweiten Auflagefläche befindet. Die Erfindung sieht also vor, dass die Substrate bzw. das jeweilige Substrat von der zweiten Vorrichtung durch Druckluft angehoben und der ersten Vorrichtung zugeführt werden/wird. Mit anderen Worten werden die Substrate beziehungsweise das jeweilige Substrat von der zweiten Vorrichtung an die erste Vorrichtung angeblasen. Hierdurch ist eine besonders einfache Übergabe der Substrate gewährleistet, die keine beweglichen mechanischen Teile benötigt. Dadurch wird insbesondere auf Elemente verzichtet, die einem mechanischen Verschleiß unterliegen und den Wartungsaufwand des Transportsystems erhöhen. Insbesondere ist es nicht notwendig, dass die erste Vorrichtung und/oder die zweite Vorrichtung Aktoren aufweisen, welche die erste Auflagefläche oder die zweite Auflagefläche nach unten beziehungsweise nach oben bewegen, um das jeweilige Substrat zu übergeben. Der Herstellungs-, Verkabelungs- und konstruktive Aufwand wird dadurch erheblich erleichtert. Durch das Anblasen der Substrate an den Greifkopf wird darüber hinaus ein besonders schonender Umgang mit den Substraten gewährleistet, da auf mechanische Krafteinwirkung auch bei der Übergabe der Substrate verzichtet wird. Zweckmäßigerweise sind die erste Auflagefläche und die zweite Auflagefläche derart nahe zueinander angeordnet, dass durch das Anblasen des jeweiligen Substrats von der zweiten Auflagefläche in Richtung der ersten Auflagefläche bis an die erste Auflagefläche angeblasen, beziehungsweise angehoben wird, oder zumindest bis in den Bereich angehoben werden, in welchem der Unterdruck der ersten Vorrichtung ausreichend hoch ist, um das Substrat weiter an die erste Auflagefläche anzusaugen/anzuziehen. Die wenigstens eine Druckluftdüse ist dazu insbesondere dem Übergabebereich der zweiten Auflagefläche beziehungsweise des Transportsystems zugeordnet, in welchem die erste Auflagefläche und die zweite Auflagefläche einander gegenüberliegen. The invention has for its object to improve the transport system of the type mentioned, so that the transfer of a substrate from the first device to the second device is safe and inexpensive. The problem underlying the invention is achieved by a transport system having the features of claim 1. This has the advantage that the transfer of the substrates from the first device to the second device takes place without much additional effort and in particular requires no moving parts which raise the respective substrate and closer to the gripping head or move the gripping head in the direction of the second support surface to the lying there substrate to be able to access. As a result, the manufacturing and assembly costs of the transport system is simplified, so that in particular production costs are reduced. According to the invention this is achieved in that the device comprises at least one compressed air nozzle which is arranged below the second support surface such that a compressed air flow generated / generated by it flows in the direction of a lying on the second support surface substrate or is aligned to the Raise substrate in the direction of the first support surface, in particular, when the substrate is located in a designated transfer region of the second support surface. The invention thus provides that the substrates or the respective substrate are lifted by the second device by compressed air and fed to the first device / is. In other words, the substrates or the respective substrate are blown from the second device to the first device. As a result, a particularly simple transfer of the substrates is guaranteed, the no moving mechanical parts needed. This dispenses in particular with elements that are subject to mechanical wear and increase the maintenance of the transport system. In particular, it is not necessary for the first device and / or the second device to have actuators which move the first bearing surface or the second bearing surface downwards or upwards in order to transfer the respective substrate. The manufacturing, wiring and design effort is greatly facilitated. By blowing on the substrates to the gripping head, a particularly gentle handling of the substrates is also ensured, as is dispensed with mechanical force even in the transfer of the substrates. Conveniently, the first bearing surface and the second bearing surface are arranged so close to each other that is blown by the blowing of the respective substrate from the second bearing surface in the direction of the first bearing surface to the first bearing surface, or raised, or at least raised to the area, in which the negative pressure of the first device is sufficiently high to further attract / attract the substrate to the first support surface. The at least one compressed air nozzle is assigned to the transfer area of the second support surface or of the transport system, in which the first support surface and the second support surface are opposite one another.
Gemäß einer bevorzugten Weiterbildung der Erfindung ist vorgesehen, dass die Einrichtung mehrere parallel zueinander angeordnete Druckluftdüsen zum Anheben des Substrats aufweist. Durch das Vorsehen mehrerer Druckluftdüsen ist gewährleistet, dass das Substrat beim Anblasen beispielweise nicht verkippt und seine Ausrichtung insgesamt beim Anheben beibehalten wird. Insbesondere sind zumindest zwei Druckluftdüsen vorhanden, die jeweils einer Längsseite des Substrats beziehungsweise der zweiten Auflagefläche zugeordnet sind, um ein Substrat beidseitig mit Druckluft zu beaufschlagen und dadurch sicher anzuheben. Besonders bevorzugt ist vorgesehen, dass die Druckluftdüsen eine symmetrische Anordnung aufweisen, um einen gleichmäßige Druckluftbeaufschlagung des jeweiligen Substrats zu gewährleisten. Insbesondere wird dadurch ein Druckluftkissen erzeugt, welches eine gleichmäßige Kraftbeaufschlagung des jeweiligen Substrats gewährleistet, sodass beispielsweise auch ein Durchhängen des Substrats beim Anheben vermieden wird. Gemäß einer vorteilhaften Weitebildung der Erfindung ist vorgesehen, dass die Druckluftdüsen neben der zweiten Auflagefläche angeordnet sind. Dadurch werden Bereiche des jeweiligen Substrats mit der Druckluft beaufschlagt, die über die zweite Auflagefläche hinausragen. Dies ist insbesondere dann eine vorteilhafte Lösung, wenn die zweite Auflagefläche von einem Transportriemen oder mehreren Transportriemen gebildet wird. According to a preferred embodiment of the invention it is provided that the device comprises a plurality of mutually parallel compressed air nozzles for lifting the substrate. By providing a plurality of compressed air nozzles is ensured that the substrate, for example, not tilted when blowing and its orientation is maintained altogether when lifting. In particular, at least two compressed-air nozzles are present, which are each assigned to one longitudinal side of the substrate or the second bearing surface, in order to pressurize a substrate on both sides with compressed air and thereby lift it safely. It is particularly preferred that the compressed-air nozzles have a symmetrical arrangement in order to ensure a uniform supply of compressed air to the respective substrate. In particular, a compressed air cushion is thereby produced, which ensures a uniform application of force to the respective substrate, so that, for example, sagging of the substrate during lifting is avoided. According to an advantageous development of the invention, it is provided that the compressed-air nozzles are arranged next to the second bearing surface. As a result, areas of the respective substrate are subjected to the compressed air, which protrude beyond the second bearing surface. This is In particular, an advantageous solution when the second bearing surface is formed by a transport belt or a plurality of transport belts.
Weiterhin ist bevorzugt vorgesehen, dass zumindest eine Druckluftdüse mittig in einer Unterbrechung der zweiten Auflagefläche angeordnet ist. In diesem Fall ist die Druckluftdüse beispielsweise zwischen zwei parallel und beabstandet zueinander angeordneten Transportriemen angeordnet, welche die zweite Auflagefläche bilden. Dadurch wird ein auf der zweiten Auflagefläche aufliegendes Substrat auch mittig mit Druckluft beaufschlagt und in Richtung der ersten Auflagefläche angehoben. Furthermore, it is preferably provided that at least one compressed air nozzle is arranged centrally in an interruption of the second bearing surface. In this case, the compressed-air nozzle is arranged, for example, between two transport belts which are arranged parallel to one another and spaced apart from one another and which form the second support surface. As a result, a resting on the second support surface substrate is also centrally applied with compressed air and raised in the direction of the first support surface.
Gemäß einer bevorzugten Weiterbildung ist vorgesehen, wie bereits erwähnt, dass die erste und/oder zweite Auflagefläche durch wenigstens einen beweglich gelagerten Transportriemen gebildet ist. Dadurch ist ein einfacher und verschleißfreier Transport der Substrate entlang der jeweiligen Auflagefläche beziehungsweise gewährleistet. Der Transportriemen stellt dabei vorzugsweise ein Endloszugmittel dar, das insbesondere durch Umlenkrollen an der zweiten Vorrichtung umlaufend geführt ist. Vorzugsweise ist dem jeweiligen Transportriemen zumindest ein Riemenspanner zugeordnet, welcher gewährleistet, dass sich der Transportriemen entlang der vorgesehenen Laufbahn erstreckt, insbesondere in dem Laufabschnitt, in welchem der Transportriemen die erste beziehungsweise zweite Auflagefläche bildet. According to a preferred development is provided, as already mentioned, that the first and / or second bearing surface is formed by at least one movably mounted transport belt. This ensures a simple and wear-free transport of the substrates along the respective support surface or respectively. The transport belt is preferably an endless traction means, which is guided in particular circumferentially by deflection rollers on the second device. Preferably, at least one belt tensioner is assigned to the respective transport belt, which ensures that the transport belt extends along the intended track, in particular in the running section, in which the transport belt forms the first or second bearing surface.
Insbesondere ist vorgesehen, dass die erste und/oder zweite Auflagefläche durch zumindest zwei parallel und beabstandet zueinander angeordnete und beweglich gelagerte Transportriemen gebildet ist. Dadurch liegt das jeweilige Substrat auf zwei Transportriemen auf oder an, sodass es sicher gehalten und geführt ist. Hierbei kann die eine oder die mehreren Druckluftdüsen mittig zwischen den Transportriemen oder außerhalb der beiden Transportriemen angeordnet sein, um das jeweilige Substrat von unten mit Druckluft zu beaufschlagen. In particular, it is provided that the first and / or second support surface is formed by at least two parallel and spaced from each other and movably mounted transport belt. As a result, the respective substrate rests on or on two conveyor belts, so that it is securely held and guided. In this case, the one or more compressed-air nozzles may be arranged centrally between the transport belts or outside the two transport belts in order to pressurize the respective substrate from below with compressed air.
Vorzugsweise sind die Druckluftdüsen mit einem gemeinsamen Drucklufterzeuger strömungstechnisch verbunden, sodass die Druckluftdüsen mit derselben Druckluft beaufschlagt werden, wodurch eine einfache Drucklufterzeugung und Anhebung des jeweiligen Substrats kostengünstig realisiert wird. Preferably, the compressed air nozzles are fluidly connected to a common compressed air generator, so that the compressed air nozzles are acted upon by the same compressed air, whereby a simple compressed air generation and raising the respective substrate is realized cost.
Weiterhin ist bevorzugt vorgesehen, dass die jeweilige Druckluftdüse ein ansteuerbares Ventil zum Einstellen eines Durchströmungsquerschnitts in der jeweiligen Druckluftdüse aufweist. Durch das jeweilige Ventil können somit die Durchströmungsquerschnitte der insbesondere mehreren Druckluftdüsen angepasst werden, um beispielsweise zu gewährleisten, dass das jeweilige Substrat gleichmäßig angehoben wird, ohne dass es in Bezug auf die Auflagefläche seine Ausrichtung verliert und beispielsweise in eine Richtung kippt. Insbesondere werden die Ventile dazu angesteuert, die Druckluftbeaufschlagung einzuschalten oder zu deaktivieren, indem sie den Durchströmungsquerschnitt freigeben oder vollständig verschließen. Dadurch wird erreicht, dass das Druckluftkissen erst dann erzeugt wird, wenn sich das Substrat in einer dafür vorteilhaften Position auf der zweiten Auflagefläche befindet. Alternativ ist nur ein ansteuerbares Ventil vorgesehen, das beispielsweise dem Drucklufterzeuger nachgeschaltet und der Verzweigung zu den Druckluftdüsen vorgeschaltet ist, sodass mit einem einzigen Ventil der Druckluftstrom unterbrochen oder freigegeben werden kann. Zweckmäßigerweise ist das jeweilige Ventil elektrisch ansteuerbar und weist einen entsprechenden Aktor zum Verstellen eines Ventilelements auf, welches den Durchströmungsquerschnitt beeinflusst. Furthermore, it is preferably provided that the respective compressed-air nozzle has a controllable valve for setting a flow cross-section in the respective compressed-air nozzle. By the respective valve thus the flow cross sections of the particular be adapted to a plurality of compressed air nozzles, for example, to ensure that the respective substrate is raised evenly, without it loses its orientation with respect to the support surface and, for example, tilts in one direction. In particular, the valves are actuated to turn on or off the pressurization by releasing or completely closing the flow area. This ensures that the compressed air cushion is generated only when the substrate is in a favorable position on the second support surface. Alternatively, only one controllable valve is provided which, for example, downstream of the compressed air generator and upstream of the branch to the compressed air nozzles, so that the compressed air flow can be interrupted or released with a single valve. Conveniently, the respective valve is electrically actuated and has a corresponding actuator for adjusting a valve element, which influences the flow cross-section.
Gemäß einer bevorzugten Weiterbildung der Erfindung ist vorgesehen, dass die zweite Vorrichtung zumindest einen Sensor zum Erfassen des Aufliegens eines Substrats auf der zweiten Auflagefläche aufweist. Mittels des Sensors ist dann beispielsweise erfassbar, dass ein Substrat mittels der Transportriemen in einen Übergabebereich, also in eine für die Übergabe vorteilhafte Position entlang der zweiten Auflagefläche transportiert wurde. Wird dies detektiert, so werden beispielsweise das eine oder die mehreren Ventile angesteuert, um den jeweiligen Durchströmungsquerschnitt freizugeben, sodass das jeweilige Substrat in Richtung des Greifkopfs angehoben wird. Bevorzugt ist der Sensor dazu ausgebildet, lediglich das Vorhandensein des Substrats auf der zweiten Auflagefläche, insbesondere in dem Übergabeabschnitt, zu erfassen. Alternativ ist bevorzugt vorgesehen, dass der Sensor nicht nur das Vorhandensein, sondern auch die Ausrichtung des Substrats in dem Übergabeabschnitt erfasst, wobei unter der Ausrichtung insbesondere die Ausrichtung des Substrats in Bezug auf die Ebene der Auflagefläche zu verstehen ist. Insofern wird hierdurch die Möglichkeit zur Verfügung gestellt, die Neigung eines Substrats in Bezug auf die zweite Auflagefläche zu erfassen. In Abhängigkeit von der erfassten Neigung werden die Druckluftdüsen dazu angesteuert, der Neigung entgegenzuwirken, sodass das Substrat parallel zur zweiten Auflagefläche ausgerichtet wird. Zum Auswerten der Sensordaten und zum Ansteuern des jeweiligen Ventils ist vorzugsweise ein Steuergerät vorhanden, welches mit dem zumindest einen Sensor und dem zumindest einen Ventil signaltechnisch verbunden ist. Vorzugsweise sind zum Erfassen der Neigung des Substrats mehrere Sensoren verteilt angeordnet, die beispielsweise jeweils einen Abstand zu dem Substrat erfassen, sodass in Abhängigkeit der ermittelten Abstände die Neigung des Substrats bestimmt wird. According to a preferred embodiment of the invention it is provided that the second device has at least one sensor for detecting the resting of a substrate on the second support surface. By means of the sensor it is then possible to detect, for example, that a substrate has been transported by means of the transport belts into a transfer region, that is to say into a position advantageous for transfer along the second support surface. If this is detected, then, for example, the one or more valves are activated in order to release the respective flow cross section, so that the respective substrate is raised in the direction of the gripping head. Preferably, the sensor is designed to detect only the presence of the substrate on the second bearing surface, in particular in the transfer section. Alternatively, it is preferably provided that the sensor not only detects the presence, but also the orientation of the substrate in the transfer section, wherein the alignment is to be understood in particular as the orientation of the substrate with respect to the plane of the support surface. In this respect, the possibility is thereby made available to detect the inclination of a substrate with respect to the second bearing surface. Depending on the detected tilt, the compressed air nozzles are driven to counteract the tilt so that the substrate is aligned parallel to the second support surface. To evaluate the sensor data and to control the respective valve, a control device is preferably present, which is signal-technically connected to the at least one sensor and the at least one valve. Preferably, a plurality of sensors are arranged distributed for detecting the inclination of the substrate For example, each detect a distance to the substrate, so that the inclination of the substrate is determined depending on the determined distances.
Besonders bevorzugt ist vorgesehen, dass der Sensor als berührungsfrei arbeitender Sensor, insbesondere als Abstandssensor, beispielsweise als optischer Sensor, Ultraschallsensor, Radarsensor, Laser-Sensor, Lidarsensor oder dergleichen ausgebildet ist. Wird ermittelt, dass ein durch den Sensor erfasster Abstand nicht einem Sollabstand entspricht, der erfasst werden würde, wenn sich das Substrat im Übergabebereich befindet, wird darauf erkannt, dass sich kein Substrat im Übergabebereich befindet oder das Substrat bereits an die erste Vorrichtung übergeben wurde. Dadurch ist eine einfache Steuerung des Transportsystems mittels des zuvor bereits erwähnten Steuergeräts gewährleistet. Mittels des jeweiligen Sensors ist es somit auch durch Auswerten der erfassten Daten durch das Steuergerät vorgesehen, das Vorhandensein eines Substrats im Übergabebereich zu erfassen, wobei durch das Steuergerät die Druckluftdüsen erst dann aktiviert werden, wenn das Substrat den Übergabebereich erreicht hat beziehungsweise vollständig in diesem liegt. Das erfindungsgemäße Bearbeitungssystem mit den Merkmalen des Anspruchs 12 zeichnet sich durch das erfindungsgemäße Transportsystem aus. Es ergeben sich hierdurch die bereits genannten Vorteile. Dabei ist beispielsweise vorgesehen, dass die zweite Vorrichtung in die wenigstens eine Bearbeitungsstation integriert ist, um ein Substrat durch die Bearbeitungsstation zu fördern. Die erste Vorrichtung arbeitet gemäß dem erfindungsgemäßen Transportsystem mit der zweiten Vorrichtung zusammen, um das Substrat von der wenigstens einen Bearbeitungsstation zu entfernen und beispielsweise zu wenigstens einer zweiten Bearbeitungsstation zu verbringen. Dazu ist der Greifkopf beispielsweise beweglich ausgebildet, sodass er beispielsweise horizontal verfahrbar ist, um das Substrat von einer Bearbeitungsstation zu einer anderen Bearbeitungsstation, die insbesondere ebenfalls eine Transportvorrichtung gemäß der zweiten Vorrichtung aufweist, zu verbringen und dort auf die zweite Auflagefläche abzulegen. Hierdurch können komplexe Bearbeitungssysteme mit einem automatischen Transport der Substrate auf einfache und kostengünstige Art und Weise zur Verfügung gestellt werden. It is particularly preferably provided that the sensor is designed as a contact-free operating sensor, in particular as a distance sensor, for example as an optical sensor, ultrasonic sensor, radar sensor, laser sensor, lidar sensor or the like. If it is determined that a distance detected by the sensor does not correspond to a desired distance that would be detected when the substrate is in the transfer area, it is recognized that there is no substrate in the transfer area or the substrate has already been transferred to the first device. As a result, a simple control of the transport system by means of the previously mentioned control device is ensured. By means of the respective sensor, it is thus also provided by evaluating the detected data by the control unit to detect the presence of a substrate in the transfer area, wherein the compressed air nozzles are activated by the control unit only when the substrate has reached the transfer area or lies completely in this , The processing system according to the invention with the features of claim 12 is characterized by the transport system according to the invention. This results in the already mentioned advantages. It is provided, for example, that the second device is integrated into the at least one processing station in order to convey a substrate through the processing station. The first device operates according to the transport system according to the invention with the second device together to remove the substrate from the at least one processing station and spend, for example, at least a second processing station. For this purpose, the gripping head is designed to be movable, for example, so that it can be moved horizontally, for example, to transfer the substrate from one processing station to another processing station, which in particular likewise has a transport device according to the second device, and place it there on the second support surface. As a result, complex processing systems can be provided with an automatic transport of the substrates in a simple and cost-effective manner.
Im Folgenden soll die Erfindung anhand der Zeichnung näher erörtert werden. Dazu zeigen Figur 1 ein vorteilhaftes Transportsystem für Substrate in einer perspektivischen In the following, the invention will be discussed with reference to the drawing. 1 shows an advantageous transport system for substrates in a perspective
Teildarstellung, Figur 2 eine Frontansicht des Transportsystems und Partial view Figure 2 is a front view of the transport system and
Figur 3 eine Seitenansicht des Transportsystems. Figure 3 is a side view of the transport system.
Figur 1 zeigt in einer perspektivischen Teildarstellung ein Transportsystem 1 eines nicht näher dargestellten Bearbeitungssystems 2 für Substrate, wie insbesondere Leiterplatten, Solarzellen, Wafer oder dergleichen. Bei den Substraten handelt es sich somit insbesondere um flache plattenförmige Gebilde, die vorsichtig gehandhabt, bearbeitet und transportiert werden müssen. Das Transportsystem 1 dient beispielsweise dazu, die Substrate von einer Bearbeitungsstation 3 des Bearbeitungssystems 2 zu einer weiteren Bearbeitungsstation zu transportieren. 1 shows a perspective partial representation of a transport system 1 of a processing system 2, not shown, for substrates, in particular printed circuit boards, solar cells, wafers or the like. The substrates are thus, in particular, flat plate-like structures which must be handled, handled and transported carefully. The transport system 1 serves, for example, to transport the substrates from a processing station 3 of the processing system 2 to a further processing station.
Dazu weist das Transportsystem 1 eine erste Vorrichtung 4 sowie eine zweite Vorrichtung 5 auf, die jeweils zum Greifen beziehungsweise Halten und Transportieren der Substrate ausgebildet sind. For this purpose, the transport system 1 has a first device 4 and a second device 5, which are each designed to grip or hold and transport the substrates.
Die Vorrichtung 4 weist einen Greifkopf 6 auf, der eine Tragstruktur 7 aufweist, an welcher eine Saugeinrichtung 8 sowie zwei umlaufende Transportriemen 9 angeordnet sind. Die Transportriemen 9 umfahren dabei als Endloszugmittel jeweils die Tragstruktur 7 und bilden an der Unterseite 10 des Greifkopfs 6 zusammen eine erste Auflagefläche 11. Mittels der Saugeinrichtung 8 ist ein Unterdruck erzeugbar, durch welchen Substrate gegen die Auflagefläche 11 an den Greifkopf 6 angesaugt und dadurch an dem Greifkopf 6 gehalten werden können. Wird dann eine hier nicht dargestellte Antriebsvorrichtung dazu angesteuert, die Transportriemen 9 in eine Umlaufbewegung zu versetzen, so wird das angesaugte Substrat mit den Transportriemen 9 entlang der Auflagefläche 11 in Längserstreckung des Greifkopfs 6 bewegt, wie durch einen Doppelpfeil 12 angedeutet. Der zum Halten des Substrats notwendige Unterdruck wird beispielsweise durch die Saugeinrichtung 8 zwischen den Transportriemen 9 erzeugt. Alternativ ist vorgesehen, dass die Transportriemen 9 jeweils mehrere Saugöffnungen 13 aufweisen, die mit einer oder mehreren Vakuumkammern in der Tragstruktur 7 strömungstechnisch verbunden sind. Das Tragpro fil weist dazu beispielsweise für jeden der Transportriemen jeweils ein Hohlprofil auf, das strömungstechnisch mit der Saugeinrichtung 8 verbunden ist, um in zumindest einer Hohlkammer beziehungsweise Vakuumkammer des Hohlpro fils den Unterdruck einzustellen. Durch Durchgangsöffnungen ist die jeweilige Vakuumkammer dann mit einer Lauffläche, auf welcher der Transportriemen 9 zumindest auf der Unterseite 10 des Greifkopfs 6 durchgehend anliegt, strömungstechnisch verbunden, wobei die Durchgangsöffnungen insbesondere in eine Längsnut in der Lauffläche münden, die korrespondierend zu den Saugöffnungen 13 angeordnet ist, sodass entlang der gesamten Bewegungsbahn des Transportriemens 9 an der Unterseite 10 des Greifkopfs 6 ein Unterdruck an den Saugöffnungen 13 des Transportriemens 9 erzeugbar ist. Die Saugöffnungen 13 können gleichmäßig über den jeweiligen Transportriemen 9 verteilt angeordnet sein, oder gleichmäßig in Gruppen verteilt, wie in Figur 1 beispielhaft gezeigt. The device 4 has a gripping head 6, which has a support structure 7, on which a suction device 8 and two circulating transport belts 9 are arranged. The transport belts 9 in this case each bypass the support structure 7 as endless traction means and together form a first support surface 11 on the underside 10 of the gripper head 6. By means of the suction device 8, a negative pressure can be generated by which substrates are sucked against the support surface 11 against the gripper head 6 and thereby can be held the gripping head 6. If a drive device (not shown here) is then actuated to set the transport belts 9 in a circulating motion, the sucked-in substrate with the transport belts 9 is moved along the support surface 11 in the longitudinal extent of the gripper head 6, as indicated by a double arrow 12. The vacuum necessary for holding the substrate is generated, for example, by the suction device 8 between the transport belts 9. Alternatively, it is provided that the transport belts 9 each have a plurality of suction openings 13, which are fluidically connected to one or more vacuum chambers in the support structure 7. The Tragpro fil has, for example, for each of the conveyor belts each have a hollow profile, which is fluidically connected to the suction device 8 to set in at least one hollow chamber or vacuum chamber of the Hohlpro fils the negative pressure. Through passage openings, the respective vacuum chamber is then fluidically connected to a running surface on which the transport belt 9 rests continuously at least on the underside 10 of the gripping head 6, the passage openings in particular opening into a longitudinal groove in the running surface, the is arranged corresponding to the suction openings 13, so that along the entire movement path of the conveyor belt 9 on the underside 10 of the gripping head 6, a negative pressure at the suction openings 13 of the conveyor belt 9 can be generated. The suction openings 13 may be distributed uniformly over the respective transport belt 9, or evenly distributed in groups, as shown by way of example in FIG.
Wird somit ein Substrat an die Transportriemen 9 beziehungsweise die Auflagefläche 11 herangeführt, im Bereich der Saugöffnung 13, kann durch Ansteuern der Saugeinrichtung 8 ein Unterdruck erzeugt und das Substrat durch Unterdruck an der Auflagefläche 11 beziehungsweise an dem Greifkopf 6 gehalten werden. Die zweite Vorrichtung 5, die unterhalb des Greifkopfs 6 angeordnet ist, weist ebenfalls eine Tragstruktur 14 auf, an welcher zwei umlaufende Transportriemen 15 angeordnet sind. Die Transportriemen 15 sind dabei durch eine Antriebsvorrichtung 16, von der hier lediglich eine Antriebswelle 17 gezeigt ist, in die Umlaufbewegung versetzbar. Dabei sind die Transportriemen 15 wie auch die Transportriemen 9 jeweils beabstandet und parallel zueinander als Endloszugmittel an der Tragstruktur 14 angeordnet. Durch die Antriebswelle 17 werden die Transportriemen 15, analog auch die Transportriemen 9, gleichzeitig und gleichmäßig angetrieben. Die Transportriemen 15 verlaufen dabei ebenfalls im Wesentlichen horizontal, wie auch die Transportriemen 9, sind jedoch bezüglich ihrer Längserstreckung gemäß dem vorliegenden Ausführungsbeispiel senkrecht zu dem Transportriemen 9 ausgerichtet, wie durch einen Doppelpfeil 30 angedeutet. Thus, if a substrate is brought to the conveyor belts 9 or the support surface 11 in the region of the suction opening 13, a negative pressure can be generated by activating the suction device 8 and the substrate is held by vacuum on the support surface 11 or on the gripper head 6. The second device 5, which is arranged below the gripping head 6, also has a support structure 14, on which two circulating transport belts 15 are arranged. The transport belts 15 are displaceable into the circulating movement by a drive device 16, of which only one drive shaft 17 is shown here. In this case, the transport belts 15 as well as the transport belts 9 are each spaced apart and arranged parallel to each other as Endloszugmittel on the support structure 14. By the drive shaft 17, the transport belt 15, analogously, the conveyor belt 9, driven simultaneously and uniformly. The transport belts 15 also run substantially horizontally, as do the transport belts 9, but are aligned with respect to their longitudinal extent according to the present embodiment perpendicular to the conveyor belt 9, as indicated by a double arrow 30.
Der oben verlaufende Abschnitt der Transportriemen 15 bildet eine zweite Auflagefläche 18, auf welcher Substrate auflegbar sind. Auf der Auflagefläche 18 aufliegende Substrate können dann durch das Antreiben der Transportriemen 15 auf einfache Art und Weise senkrecht zur Längserstreckung des Greifkopfs 6 verfahren beziehungsweise bewegt werden, um sie beispielsweise einer Bearbeitungsvorrichtung zuzuführen oder von dieser abzuführen. The top section of the transport belt 15 forms a second support surface 18, on which substrates can be placed. On the support surface 18 resting substrates can then be moved or moved by driving the conveyor belt 15 in a simple manner perpendicular to the longitudinal extent of the gripping head 6, for example, to supply them to a processing device or dissipate therefrom.
Die Vorrichtungen 4 und 5 beziehungsweise die Tragstrukturen 7 und 14 sind in einem festen Abstand zueinander angeordnet, sodass auch die von den jeweiligen Transportriemen 9 beziehungsweise 15 gebildeten Auflageflächen 18 und 11 einen festen Abstand zueinander aufweisen. Um nun ein Substrat 19, das in Figur 1 bespielhaft gezeigt ist, von der Vorrichtung 5 an die Vorrichtung 4 zu übergeben, muss dieses nach oben in Richtung der Auflagefläche 11 bewegt werden. Hierzu weist die Vorrichtung 5 eine Einrichtung 20 auf, die dazu ausgebildet ist, das Substrat 19 durch Druckluft in Richtung des Greifkopfs 6 anzuheben. Dazu weist die Einrichtung 20 zwei Druckluftdüsen 21 auf, wie insbesondere in Figur 2 erkennbar ist. The devices 4 and 5 or the support structures 7 and 14 are arranged at a fixed distance from one another, so that the support surfaces 9 and 15 formed by the respective transport surfaces 18 and 11 have a fixed distance from one another. In order to transfer a substrate 19, which is shown as an example in FIG. 1, from the device 5 to the device 4, it must be moved upwards in the direction of the support surface 11. For this purpose, the device 5 has a device 20 which is designed to lift the substrate 19 by compressed air in the direction of the gripping head 6. For this purpose, the device 20 has two compressed-air nozzles 21, as can be seen in particular in FIG.
Figur 2 zeigt in einer vereinfachten Frontansicht das Transportsystem 1 aus Figur 1. In der Frontansicht ist erkennbar, dass die Tragstruktur 14 einen Druckluftverteiler 22 trägt, der ausgangsseitig mit jeweils einer der Druckluftdüsen 21 strömungstechnisch verbunden ist. Eingangsseitig ist der Druckluftverteiler 22 durch ein hier nur schematisch dargestelltes Ventil 23 und einen ebenfalls nur schematisch dargestellten optionalen Druckregler 24 mit einem Drucklufterzeuger 25 strömungstechnisch verbunden. Bei dem Drucklufterzeuger 25 kann es sich beispielsweise um eine Pumpe oder dergleichen handeln. Das Ventil 23 ist dazu ausgebildet, einen Durchströmungsquerschnitt zwischen dem Druckerzeuger 25 und den Druckluftdüsen 21 beziehungsweise dem Druckluftverteiler 22 zu verschließen (in Figur 2 gezeigte Schaltstellung) oder freizugeben. Insbesondere ist das Ventil 23 als Proportionalventil ausgebildet, um den Durchströmungsquerschnitt zu variieren, sodass der von den Druckluftdüsen 21 ausgehende Druckluftstrom variierbar ist. Der Druckregler 24 weist ein federbelastetes Stellelement sowie ein Rücklaufkanal auf, um selbsttätig den von dem Drucklufterzeuger 25 erzeugten pneumatischen Luftdruck auf einen vorgebbaren Wert zu beruhigen beziehungsweise einzustellen, sodass vom Drucklufterzeuger 25 erzeugte Druckluftschwankungen ausgeglichen werden. FIG. 2 shows in a simplified front view the transport system 1 from FIG. 1. In the front view, it can be seen that the support structure 14 carries a compressed air distributor 22, which on the output side is in each case fluidically connected to one of the compressed air nozzles 21. On the input side, the compressed air distributor 22 is fluidly connected to a compressed air generator 25 by a valve 23, which is shown only schematically here, and also by an optional pressure regulator 24, which is also shown only schematically. The compressed air generator 25 may be, for example, a pump or the like. The valve 23 is designed to close a flow cross-section between the pressure generator 25 and the compressed-air nozzles 21 or the compressed-air distributor 22 (switching position shown in FIG. 2) or to release them. In particular, the valve 23 is designed as a proportional valve in order to vary the flow cross-section so that the compressed air flow originating from the compressed-air nozzles 21 can be varied. The pressure regulator 24 has a spring-loaded actuating element and a return channel in order to automatically calm or adjust the pneumatic air pressure generated by the compressed air generator 25 to a predefinable value, so that compressed air fluctuations generated by the compressed air generator 25 are compensated.
Die Druckluftdüsen 21 sind auslassseitig jeweils unterhalb der Auflagefläche 18 an der Tragstruktur 14 angeordnet und weisen nach oben in Richtung des Greifkopfs 6 beziehungsweise der Aufiagefiäche 18. Dabei sind die Druckluftdüsen 21 beidseitig der Tragstruktur 14 derart angeordnet, dass sie seitlich beabstandet von den Transportriemen 15 und noch im Bereich des zu transportierenden beziehungsweise zu bewegenden Substrats 19 liegen, sodass der Druckluftstrom der Druckluftdüsen 21, in Figur 2 gestrichelt angedeutet, auf die Unterseite des jeweiligen Substrats 19 trifft. Alternativ oder zusätzlich können eine oder mehrere Druckluftdüsen auch innerhalb der Tragstruktur 14 in dem Freiraum, in welchem auch der Sensor 27 angeordnet ist, angeordnet sein. Zum Anheben beziehungsweise Verbringen des jeweiligen Substrats 19 von der Auflagefläche 18 zu der Auflagefläche 11 wird somit der Drucklufterzeuger 25 aktiviert und das Ventil 23 geöffnet, sodass der von den Druckluftdüsen 21 kommende Druckluftstrom das Substrat 19 in Richtung des Greifkopfs 6 anhebt und gegen die Auflagefläche 11 drückt oder zumindest derart nah zu dem Greifkopf 6 heranführt, dass es in den Wirkbereich der Saugeinrichtung 8 gelangt und von dieser gegen die Auflagefläche 11 gezogen wird. The compressed air nozzles 21 are arranged on the outlet side respectively below the support surface 18 on the support structure 14 and point upwards in the direction of the gripping head 6 and the Aufiagefiäche 18. The compressed air nozzles 21 on both sides of the support structure 14 are arranged such that they laterally spaced from the conveyor belt 15 and are still in the range of the substrate to be transported or moved 19, so that the compressed air flow of the compressed air nozzles 21, indicated by dashed lines in Figure 2, strikes the underside of the respective substrate 19. Alternatively or additionally, one or more compressed-air nozzles can also be arranged within the support structure 14 in the free space in which the sensor 27 is arranged. For lifting or bringing the respective substrate 19 from the support surface 18 to the support surface 11, the compressed air generator 25 is thus activated and the valve 23 is opened so that the compressed air flow coming from the compressed air nozzles 21 lifts the substrate 19 in the direction of the gripper head 6 and against the support surface 11 pushes or at least so close to the gripping head 6 zoom in that it enters the effective range of the suction device 8 and is pulled by this against the support surface 11.
Hierdurch ist eine mechanische berührungsfreie Übergabe des Substrats 19 an den Greifkopf 6 auf einfache Art und Weise gewährleistet. As a result, a mechanical non-contact transfer of the substrate 19 to the gripping head 6 is ensured in a simple manner.
Um die Übergabe zu steuern ist zweckmäßigerweise ein Steuergerät 26 vorgesehen, das zumindest mit dem Drucklufterzeuger 25 und dem Ventil 23 verbunden ist, um diese anzusteuern. Vorzugsweise ist das Steuergerät 26 außerdem mit einem Sensor 27 verbunden, welcher zwischen den Druckluftdüsen 21 innerhalb der Tragstruktur 14 in einem Bereich angeordnet ist, in welchem ein Freiraum zwischen Sensor 27 und Unterseite des jeweiligen Substrats 19 besteht. Der Sensor 27 ist in Richtung der Auflagefläche 18 beziehungsweise des Greifkopfs 6 ausgerichtet und insbesondere als optischer Abstandssensor ausgebildet. Mittels des Sensors 27 erfasst das Steuergerät 26 insbesondere laufend den Abstand des Sensors 27 zu dem nächsten im Erfassungsbereich des Sensors 27 liegenden Gegenstands. Befindet sich das Substrat 19 oberhalb des Sensors 27, wie in Figur 2 gezeigt, so erfasst es somit den Abstand zum Substrat 19. Wird das Substrat 19 durch die Einrichtung 22 gegen den Greifkopf 6 angehoben, so vergrößert sich der erfasste Abstand 27. Damit ist das erfolgreiche Anheben des Substrats 19 auf einfache Art und Weise feststellbar. In order to control the transfer, a control device 26 is expediently provided, which is connected at least to the compressed air generator 25 and the valve 23 in order to control it. Preferably, the control unit 26 is also connected to a sensor 27, which is arranged between the compressed-air nozzles 21 within the support structure 14 in a region in which there is a clearance between the sensor 27 and underside of the respective substrate 19. The sensor 27 is aligned in the direction of the support surface 18 and the gripping head 6 and in particular formed as an optical distance sensor. By means of the sensor 27, the control unit 26 detects in particular continuously the distance of the sensor 27 to the next in the detection range of the sensor 27 lying object. If the substrate 19 is located above the sensor 27, as shown in FIG. 2, it thus covers the distance to the substrate 19. If the substrate 19 is lifted by the device 22 against the gripping head 6, the detected distance 27 increases the successful lifting of the substrate 19 in a simple manner detectable.
Die Druckluftdüsen 21 sind in einem Abstand zu der Auflagefläche 18 angeordnet, insbesondere unterhalb der Transportriemen 15. Dies hat den Vorteil, dass ein gleichmäßiger Druckluftstrom entsteht, der die Unterseite des jeweiligen Substrats 19 beaufschlagt, wobei insbesondere Verwirb elungen vermieden werden. Dadurch, dass die zwei Druckluftdüsen 21 vorgesehen sind, wird das jeweilige Substrat 19 an seinen Seitenrändern gleichmäßig in der Druckluft beaufschlagt und angehoben, sodass ein Verkippen des Substrats 19 vermieden wird. Gemäß einem weiteren Ausführungsbeispiel - hier nicht dargestellt - sind auf jeder Längsseite der Tragstruktur 14 jeweils zwei Druckluftdüsen 21 vorgesehen, um das Substrat 19 symmetrisch mit Druckluft zu beaufschlagen, sodass ein Verkippen sowohl um eine Querachse als auch um eine Längsachse des Substrats 19 sicher vermieden wird. Darüber hinaus ist mittels des Sensors 27 das Vorliegen des Substrats 19 erfassbar. Insbesondere ist es dadurch ermittelbar, ob sich das Substrat 19 in dem für den Anhebevorgang mittels der Druckluftdüsen 21 vorteilhaften Übergabebereich 28 der Auflagefläche 18 befindet. Vorzugsweise wird erst dann das Ventil 23 geöffnet, wenn sich das Substrat 19 in dem Übergabebereich 28 befindet. Anderenfalls könnte ein einseitiges Anheben des Substrats 19 erfolgen, wodurch sich das Substrat 19 in Bezug auf die Auflagefläche 18 neigen würde. The compressed air nozzles 21 are arranged at a distance from the support surface 18, in particular below the transport belt 15. This has the advantage that a uniform compressed air flow is formed, which acts on the underside of the respective substrate 19, in particular Verwirb eluations are avoided. Characterized in that the two compressed-air nozzles 21 are provided, the respective substrate 19 is acted upon uniformly in the compressed air at its side edges and raised, so that tilting of the substrate 19 is avoided. According to a further embodiment - not shown here - two compressed air nozzles 21 are provided on each longitudinal side of the support structure 14 to bias the substrate 19 symmetrically with compressed air, so that tilting both about a transverse axis and about a longitudinal axis of the substrate 19 is reliably avoided , In addition, by means of the sensor 27, the presence of the substrate 19 can be detected. In particular, it is thereby possible to determine whether the substrate 19 is located in the transfer area 28 of the support surface 18 which is advantageous for the lifting operation by means of the compressed-air nozzles 21. Preferably, the valve 23 is opened only when the substrate 19 is in the transfer region 28. Otherwise, a one-sided lifting of the substrate 19 could occur, whereby the substrate 19 would tilt with respect to the support surface 18.
Gemäß einem weiteren, hier nicht dargestellten Ausführungsbeispiel, ist vorgesehen, dass die Vorrichtung 5 mehrere dieser Sensoren 27 aufweist, um die Positionierung und ggf. Neigung des Substrats 19 festzustellen. Dabei sind der eine oder die mehreren Sensoren 27 dem Übergabebereich zugeordnet beziehungsweise in dem Bereich der Vorrichtung 5 angeordnet, welcher der Vorrichtung 4 beziehungsweise dem Greifkopf 6 gegenüberliegt. Vorzugsweise ist der jeweilige Sensor 27 als optischer Sensor, insbesondere als Laser-Sensor, Lidarsensor, Ultraschallsensor, Radarsensor oder dergleichen ausgebildet, um den Abstand berührungsfrei zu erfassen. Gemäß einem weiteren Ausführungsbeispiel ist vorgesehen, dass jeder der Druckluftdüsen 21 ein eigenes ansteuerbares Ventil 23 zugeordnet ist, sodass der jeweilige Durchströmungsquerschnitt individuell einstellbar ist. Insbesondere in Abhängigkeit von einer mittels der mehreren Sensoren erfassten Ausrichtung beziehungsweise Neigung des Substrats 19 werden dann die Ventile 23 dazu angesteuert, dass das Substrat 19 beim Anheben seine Ausrichtung parallel zur Auflagefläche 15 beibehält. According to a further, not shown embodiment, it is provided that the device 5 has a plurality of these sensors 27 to determine the positioning and possibly inclination of the substrate 19. In this case, the one or more sensors 27 are assigned to the transfer region or arranged in the region of the device 5 which lies opposite the device 4 or the gripping head 6. Preferably, the respective sensor 27 is designed as an optical sensor, in particular as a laser sensor, Lidarsensor, ultrasonic sensor, radar sensor or the like to detect the distance without contact. According to a further embodiment, it is provided that each of the compressed air nozzles 21 is assigned its own controllable valve 23, so that the respective flow cross section is individually adjustable. In particular, as a function of an orientation or inclination of the substrate 19 detected by means of the plurality of sensors, the valves 23 are then actuated such that the substrate 19 maintains its orientation parallel to the support surface 15 during lifting.
Figur 3 zeigt eine Seitenansicht des Transportsystems 1, welche die Positionierung der zwei Druckluftdüsen 21 zum Übergabebereich 28 zeigt. Von der Vorrichtung 4 sind vorliegend nur die beiden Transportriemen 9 ersichtlich, die sich senkrecht zur Längserstreckung der Transportriemen 15, wie zuvor bereits erwähnt, erstrecken. Befindet sich das Substrat 19 in dem Übergabebereich 28 wird es direkt in Richtung der Transportriemen 9 angehoben, wie durch Pfeile 29 angedeutet, wobei das Substrat 19 beispielhaft gestrichelt in der an den Transportriemen 9 anliegenden übergebenden Stellung gezeichnet ist. FIG. 3 shows a side view of the transport system 1, which shows the positioning of the two compressed-air nozzles 21 to the transfer region 28. Of the device 4 are present only the two conveyor belt 9 can be seen, which extend perpendicular to the longitudinal extent of the conveyor belt 15, as already mentioned above. If the substrate 19 is located in the transfer region 28, it is lifted directly in the direction of the transport belts 9, as indicated by arrows 29, wherein the substrate 19 is shown by way of example by dashed lines in the transfer position applied to the transport belt 9.
Das Transportsystem 1 erlaubt somit auf einfache Art und Weise eine Übergabe des jeweiligen Substrats 19 von der Vorrichtung 5 an die Vorrichtung 4, indem das Substrat 19 hochgeblasen wird. Die Vorrichtung 5 kann insofern insbesondere eine Abführeinrichtung der Bearbeitungsstation 3 des Bearbeitungssystems 2 darstellen. Die Transportriemen 15 können sich dabei bis in die Bearbeitungsstation 3 hinein erstrecken, oder wie in Figur 3 gezeigt, sich an ein Transportsystem der Bearbeitungsstation 3 anschließen, sodass das jeweilige Substrat 19 beispielsweise von einem integrierten Transportband der Bearbeitungsstation auf die Transportriemen 15 direkt übergeben wird. Hierdurch lassen sich auch bestehende Bearbeitungssysteme auf einfache Art und Weise durch das vorteilhafte Transportsystem 1 ergänzen. The transport system 1 thus allows in a simple manner a transfer of the respective substrate 19 from the device 5 to the device 4 by the substrate 19 is blown up. In this respect, the device 5 can in particular represent a discharge device of the processing station 3 of the processing system 2. The transport belt 15 can extend as far as into the processing station 3, or as shown in Figure 3, connect to a transport system of the processing station 3, so that the respective substrate 19 is passed directly to the conveyor belt 15, for example, from an integrated conveyor belt of the processing station. As a result, existing processing systems can be supplemented in a simple manner by the advantageous transport system 1.

Claims
ANSPRÜCHE EXPECTATIONS
Transportsystem (1) für Substrate (19), insbesondere Wafer, Solarzellen, Leiterplatten oder dergleichen, mit einer ersten Vorrichtung Transport system (1) for substrates (19), in particular wafers, solar cells, printed circuit boards or the like, with a first device
(4) zum Halten und Transportieren der Substrate (19), die einen Greifkopf (6) mit zumindest einer ersten Auflagefläche (11) an seiner Unterseite (10) zum Auflegen eines Substrats (19) und zumindest eine Saugeinrichtung (8) zum Ansaugen des Substrats (19) gegen die Auflagefläche (11) aufweist, und mit einer zweiten Vorrichtung (4) for holding and transporting the substrates (19), which has a gripping head (6) with at least one first support surface (11) on its underside (10) for placing a substrate (19) and at least one suction device (8) for sucking the Substrate (19) against the support surface (11), and with a second device
(5) zum Halten und Transportieren der Substrate (19), die zumindest eine zweite Auflagefläche (18) aufweist, auf welcher ein Substrat (19) ablegbar ist, und mit einer Einrichtung (20) zum Bewegen des abgelegten Substrats (19) von der zweiten Auflagefläche (18) zu der ersten Auflagefläche (11), dadurch gekennzeichnet, dass die Einrichtung (20) wenigstens eine Druckluftdüse (21) aufweist, die unterhalb der zweiten Auflagefläche (18) derart angeordnet ist, das ein durch sie erzeugter/erzeugbarer Druckluftstrom in Richtung eines auf der zweiten Auflagefläche (18) liegenden Substrats (19) strömt, um das Substrat (19) in Richtung der ersten Auflagefläche (11) anzuheben. (5) for holding and transporting the substrates (19), which has at least a second support surface (18) on which a substrate (19) can be deposited, and with a device (20) for moving the deposited substrate (19) from the second support surface (18) to the first support surface (11), characterized in that the device (20) has at least one compressed air nozzle (21) which is arranged below the second support surface (18) in such a way that a compressed air flow generated/can be generated by it flows in the direction of a substrate (19) lying on the second support surface (18) in order to lift the substrate (19) in the direction of the first support surface (11).
Transportsystem nach Anspruch 1, dadurch gekennzeichnet, dass die Einrichtung (20) mehrere parallel zueinander angeordnete Druckluftdüsen (21) zum Anheben des jeweiligen Substrats (19) aufweist. Transport system according to claim 1, characterized in that the device (20) has a plurality of compressed air nozzles (21) arranged parallel to one another for lifting the respective substrate (19).
Transportsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Druckluftdüsen (21) eine symmetrische Anordnung aufweisen. Transport system according to one of the preceding claims, characterized in that the compressed air nozzles (21) have a symmetrical arrangement.
Transportsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Druckluftdüsen (21) neben der zweiten Auflagefläche (18) angeordnet sind. Transport system according to one of the preceding claims, characterized in that the compressed air nozzles (21) are arranged next to the second support surface (18).
Transportsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass zumindest eine Druckluftdüse mittig in einem Freiraum der zweiten Auflagefläche (18) angeordnet ist. Transport system according to one of the preceding claims, characterized in that at least one compressed air nozzle is arranged centrally in a free space of the second support surface (18).
6. Transportsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die erste und/oder zweite Auflagefläche (11,18) durch wenigstens einen beweglich gelagerten Transportriemen (9,15) gebildet ist. 6. Transport system according to one of the preceding claims, characterized in that the first and / or second support surface (11, 18) is formed by at least one movably mounted transport belt (9, 15).
7. Transportsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die erste und/oder zweite Auflagefläche (11,18) durch zumindest zwei parallel und beabstandet zueinander angeordnet und beweglich gelagerte Transportriemen (9,15) gebildet ist. 7. Transport system according to one of the preceding claims, characterized in that the first and / or second support surface (11, 18) is formed by at least two parallel and spaced apart and movably mounted transport belts (9, 15).
8. Transportsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Druckluftdüsen (21) mit einem gemeinsamen Drucklufterzeuger (25) strömungstechnisch verbunden sind. 8. Transport system according to one of the preceding claims, characterized in that the compressed air nozzles (21) are fluidly connected to a common compressed air generator (25).
9. Transportsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Einrichtung (20) wenigstens ein ansteuerbares Ventil (23) zum Einstellen eines Durchströmungsquerschnitts aufweist. 9. Transport system according to one of the preceding claims, characterized in that the device (20) has at least one controllable valve (23) for adjusting a flow cross section.
10. Transportsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die zweite Vorrichtung (5) zumindest einen Sensor (27) zum Erfassen des Aufliegens eines Substrats (19) auf der zweiten Auflagefläche (18), insbesondere in einem Übergabebereich (28) zu der ersten Vorrichtung (4), aufweist. 10. Transport system according to one of the preceding claims, characterized in that the second device (5) has at least one sensor (27) for detecting the resting of a substrate (19) on the second support surface (18), in particular in a transfer area (28). the first device (4).
11. Transportsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Sensor als berührungsfrei arbeitender Sensor (27), insbesondere als Abstandssensor ausgebildet ist. 11. Transport system according to one of the preceding claims, characterized in that the sensor is designed as a non-contact sensor (27), in particular as a distance sensor.
12. Bearbeitungssystem (2) für Substrate (19), insbesondere Wafer, Solarzellen, Leiterplatten oder dergleichen, mit wenigstens einer Bearbeitungsstation (3) zum Behandeln oder Bearbeiten der Substrate (19) und mit wenigstens einem Transportsystem (1) nach einem der Ansprüche 1 bis 11. 12. Processing system (2) for substrates (19), in particular wafers, solar cells, printed circuit boards or the like, with at least one processing station (3) for treating or processing the substrates (19) and with at least one transport system (1) according to one of claims 1 until 11.
EP17755427.6A 2016-08-01 2017-08-01 Transporting system and processing system for substrates Withdrawn EP3490916A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016214184.8A DE102016214184A1 (en) 2016-08-01 2016-08-01 Transport system and processing system for substrates
PCT/EP2017/069390 WO2018024707A1 (en) 2016-08-01 2017-08-01 Transporting system and processing system for substrates

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CN (1) CN109689541A (en)
DE (1) DE102016214184A1 (en)
WO (1) WO2018024707A1 (en)

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CN109689541A (en) 2019-04-26
WO2018024707A1 (en) 2018-02-08

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