EP3455663A1 - Optisches rastermikroskop und untersuchungsverfahren - Google Patents

Optisches rastermikroskop und untersuchungsverfahren

Info

Publication number
EP3455663A1
EP3455663A1 EP17723981.1A EP17723981A EP3455663A1 EP 3455663 A1 EP3455663 A1 EP 3455663A1 EP 17723981 A EP17723981 A EP 17723981A EP 3455663 A1 EP3455663 A1 EP 3455663A1
Authority
EP
European Patent Office
Prior art keywords
light
channel
beam splitter
optical
hauptpolarisationsrichtung
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP17723981.1A
Other languages
German (de)
English (en)
French (fr)
Inventor
Christian Schumann
Albrecht Weiss
Tobias Bauer
Cornell Peter Gonschior
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems CMS GmbH
Original Assignee
Leica Microsystems CMS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leica Microsystems CMS GmbH filed Critical Leica Microsystems CMS GmbH
Publication of EP3455663A1 publication Critical patent/EP3455663A1/de
Withdrawn legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F5/00Orthopaedic methods or devices for non-surgical treatment of bones or joints; Nursing devices ; Anti-rape devices
    • A61F5/01Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F5/00Orthopaedic methods or devices for non-surgical treatment of bones or joints; Nursing devices ; Anti-rape devices
    • A61F5/01Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces
    • A61F5/0102Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces specially adapted for correcting deformities of the limbs or for supporting them; Ortheses, e.g. with articulations
    • A61F5/0123Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces specially adapted for correcting deformities of the limbs or for supporting them; Ortheses, e.g. with articulations for the knees
    • A61F5/0125Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces specially adapted for correcting deformities of the limbs or for supporting them; Ortheses, e.g. with articulations for the knees the device articulating around a single pivot-point
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052Optical details of the image generation
    • G02B21/0068Optical details of the image generation arrangements using polarisation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052Optical details of the image generation
    • G02B21/0076Optical details of the image generation arrangements using fluorescence or luminescence
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/0092Polarisation microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/02Objectives
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/16Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F5/00Orthopaedic methods or devices for non-surgical treatment of bones or joints; Nursing devices ; Anti-rape devices
    • A61F5/01Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces
    • A61F5/0102Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces specially adapted for correcting deformities of the limbs or for supporting them; Ortheses, e.g. with articulations
    • A61F2005/0132Additional features of the articulation
    • A61F2005/0153Additional features of the articulation combining rotational and stretching movements
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F5/00Orthopaedic methods or devices for non-surgical treatment of bones or joints; Nursing devices ; Anti-rape devices
    • A61F5/01Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces
    • A61F5/0102Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces specially adapted for correcting deformities of the limbs or for supporting them; Ortheses, e.g. with articulations
    • A61F2005/0132Additional features of the articulation
    • A61F2005/0165Additional features of the articulation with limits of movement
    • A61F2005/0167Additional features of the articulation with limits of movement adjustable
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F5/00Orthopaedic methods or devices for non-surgical treatment of bones or joints; Nursing devices ; Anti-rape devices
    • A61F5/01Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces
    • A61F5/0102Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces specially adapted for correcting deformities of the limbs or for supporting them; Ortheses, e.g. with articulations
    • A61F2005/0132Additional features of the articulation
    • A61F2005/0172Additional features of the articulation with cushions
    • A61F2005/0174Additional features of the articulation with cushions laterally placed
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F5/00Orthopaedic methods or devices for non-surgical treatment of bones or joints; Nursing devices ; Anti-rape devices
    • A61F5/01Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces
    • A61F5/0102Orthopaedic devices, e.g. long-term immobilising or pressure directing devices for treating broken or deformed bones such as splints, casts or braces specially adapted for correcting deformities of the limbs or for supporting them; Ortheses, e.g. with articulations
    • A61F2005/0132Additional features of the articulation
    • A61F2005/0179Additional features of the articulation with spring means

Definitions

  • the invention relates to a scanning optical microscope and a corresponding
  • FRAP fluorescence recovery after photobleaching
  • FLIP fluorescence loss in photobleaching
  • uncaging and photoactivation are known.
  • the sample to be examined is typically scanned for manipulation by means of a focused laser beam, using a scanning device (used in an orthoscopic beam path).
  • TIRF Total Internal Reflection Fluorescence Microscopy
  • Laser beam is focused in the entrance pupil of the lens to obtain a flat illumination of the object field.
  • This illumination occurs at an adjustable angle determined by the position of the laser beam in the entrance pupil.
  • total reflection and a thin illumination of the interface by evanescent waves are obtained.
  • Lighting angle is a position control system of the laser beam in the entrance pupil needed.
  • a (used in a conoscopic beam path) grid device can be used.
  • Positioning of the laser beam in the entrance pupil is for example on the
  • EP 1 752 809 B2 A combination system for orthoscopic and conical illumination beam paths is known from EP 1 752 809 B2, which however has the disadvantage that only a part of the objective pupil is always accessible for a conoscopic illumination.
  • a lighting device by means of which an orthoscopic and a conoscopic beam path can be provided.
  • a ring mirror is used.
  • a centrally through the ring mirror, i. the non-mirrored region or a corresponding recess, passing illumination light beam is used to generate the orthoscopic beam path.
  • a peripheral to the ring mirror, i. whose mirrored area, striking illumination light beam is used to generate the conoscopic beam path.
  • Object of the present invention is, among other things, the control of a laser beam in the pupil and the scanning of a
  • the present invention is based on the fundamental idea, in one
  • the present invention proposes a scanning optical microscope which comprises an illumination system with a light source emanating from a light source
  • Light source section a first and a second polarization-dependent beam splitter and a first and a second optical channel between the first and the second beam splitter comprises.
  • a raster unit of known type is integrated, as it is basically known and will be explained below.
  • a polarization-dependent beam splitter (English: Polarizing Beam Splitter, PBS, commonly referred to in certain designs as “pole cube”), this is understood as an optical element, the light of different
  • a polarizing beam splitter can pass light of a first polarization direction without being deflected, while deflecting light of a second, different polarization direction in an angle defined by the design and the optical materials.
  • relevant specialist literature eg Bennett, JM: Polarizers, Chapter 3 in: Bass, ME et al. (Ed.): Handbook of Optics. Fundamentals, Techniques & Design, Volume 2, New York: McGraw-Hill, 2nd edition, 1995, referenced.
  • the light source section is configured to radiate a first illumination light beam with light of first and second main polarization directions. Under "light of a first Hauptpolarisationsraum" or "light of a second
  • Polarization directions are each in a narrow angular range of, for example, ⁇ 10 ° ⁇ 5 ° or ⁇ 1 °. Due to an incomplete polarization, smaller fractions may also be present in one or more other polarization directions.
  • the formulation according to which corresponding light comprises "mainly or exclusively" light waves which are present in the first polarization direction or the second polarization direction indicates, for example, that less than 25%, 10%, 5% or 1% in a different
  • Polarization direction present.
  • the first and second polarization directions are aligned orthogonal to each other.
  • the orthogonal orientation includes both circularly polarized light and linearly polarized light, which in two
  • Illumination beam be provided. If this is the case, that includes
  • Illumination light beam corresponding illumination light of a polarization state, which corresponds to a linear combination of orthogonal Kleinpolarisationsraumen.
  • illumination beam can also successively with the first
  • the illumination light beam comprises light with predominantly or exclusively the first in a first period of time
  • the concomitant conoscopic beam path is achieved by the use of different optical channels between the first and the second beam splitter implemented.
  • the first beam splitter in the scanning microscope according to the invention is adapted to lead the light of the first illumination light beam with the first Schopolarisationscardi at least predominantly in the first channel and the light of the first illumination light beam with the second Schopolarisationsraum at least predominantly in the second channel.
  • a different "treatment" of the light with the first or the second takes place
  • An illumination light beam that extends between the light source section and the first beam splitter in a common beam path section is therefore converted into the first or the second channel depending on polarization.
  • the light of the first channel can be influenced differently from the light of the second channel, for example already alone by different optical lengths of the two channels and / or by different optical elements in the two channels.
  • the second beam splitter is set up to form a second illumination light beam from light having the first main polarization direction from the first channel and from light having the second main polarization direction from the second channel.
  • the illumination light beam is predominantly or exclusively with light of the first
  • this light enters predominantly or exclusively in the first channel and from this in the second beam splitter.
  • the second beam splitter then forms the second illumination light beam predominantly or exclusively from the light from the first channel.
  • the second illumination light beam comprises in this way predominantly or exclusively the light with the first main polarization direction.
  • Illuminating light beam predominantly or exclusively with light of the second
  • Illuminating light beam mainly or exclusively from the light of the second
  • the illumination light beam is emitted by the light source section in such a way that it simultaneously comprises light of the first and the second main polarization direction, the light of the first main polarization direction passes predominantly or exclusively into the first and the light with the second via the first beam splitter
  • Illuminating light beam always only from light of one of the two
  • the two said optical channels are arranged to emit the light with the first main polarization direction from the first channel and the light with the second main polarization direction from the second channel with different convergence angles.
  • the first channel may be configured to receive the light of the first
  • Main polarization direction in the form of a divergent light beam and the second channel may be adapted to emit the light with the second main polarization direction from the second channel in the form of a collimated light beam.
  • different optical path lengths and / or optical elements are provided in the two channels. In principle, however, a parallel provision of an orthoscopic and a conoscopic beam path can also be effected in a different way than here and below.
  • the light source section is adapted to provide the first illumination light beam in the form of a collimated light beam, ie a light source is imaged infinitely.
  • a raster unit can later be imaged into the objective pupil either along the orthoscopic beam path and from there through an object-side telecentric objective, with the light source being imaged into the sample (front focal plane of the objective) or the raster unit along the conoscopic beam path into the sample, in which case again the light source remains at infinity.
  • the first beam splitter is preceded by a first optical element, which is set up to provide the one in the form of the collimated light beam
  • Illuminating illumination light beam in the form of a convergent light beam in the first beam splitter Since this advantageously does not have convergence-influencing properties in the context of the present invention, the light irradiated into the first beam splitter in the form of the convergent light beam is also guided convergently into the already-mentioned channels.
  • the first optical element can be formed in the simplest case, for example in the form of a converging lens, optionally with suitable optical correction means. It focuses the collimated light beam of the
  • Illuminating light beam in an image-side plane of the first optical element Illuminating light beam in an image-side plane of the first optical element.
  • the focused using the first optical element light diverges beyond the focal point of the first optical element and can be in this way without further optical interference, for example, from the first channel in the form of a divergent light beam and irradiated in the second beam splitter.
  • a corresponding light beam diverging beyond the focal point can be deflected, collimated, and collimated out of the second channel and irradiated into the second beam splitter by means of suitable optical elements and deflection devices.
  • a part of a first optical element a part of a
  • Bertrand lens system as known from DE 10 2013 222 562 A1.
  • the remainder of the Bertrand lens system is advantageously formed by a second, explained below optical element, which is located beyond the second beam splitter,
  • a tube lens for example, a tube lens.
  • the first channel is advantageously designed to radiate light at least predominantly divergently into the second beam splitter
  • the second channel is advantageously configured to radiate light at least predominantly collimated into the second beam splitter.
  • the first channel predominantly or exclusively carries light with the first main polarization direction, this is emitted from the first channel in the form of a divergent light beam and radiated into the second beam splitter.
  • the light with the second main polarization direction from the second channel is radiated into the second beam splitter in the form of a collimated light beam.
  • Corresponding light can be optically influenced after passing through the second beam splitter in any desired manner.
  • the second beam splitter is followed by an already mentioned second optical element, which is set up to divergently radiate light emitted from the second beam splitter (with predominantly or exclusively the first beam splitter)
  • this second optical element may be the tube lens of the scanning microscope.
  • correspondingly collimated light can be radiated into an objective, wherein the angle at which this collimated light strikes a rear objective pupil can be changed by means of a raster unit.
  • Raster illumination and sample manipulation are performed.
  • an evanescent lighting can be realized by the
  • the present invention is particularly advantageous in connection with an optical scanning microscope with an attachable in a lens mount and positionable in a lens position lens with a rear lens pupil, wherein the second optical element is adapted to the light with the second
  • Main polarization direction to focus in a plane of the rear lens pupil.
  • the light having the first main polarization direction collimated by the second optical element passes in collimated form through the rear lens pupil.
  • the light source section simultaneous provision of light having the first and second main polarization directions or provision of light having the first main polarization direction in a first period and light having the second main polarization direction having a second period
  • Light source section einschwenkbare or rotatably arranged in the beam path
  • Delay plate for example, a ⁇ / 2 plate or more corresponding plates include.
  • electro-optical systems and / or acousto-optical systems and / or systems realized on the basis of liquid crystals may also be used with particular advantage as delay elements.
  • Corresponding elements for providing polarized light are known in principle from the prior art, so that reference may be made to relevant specialist literature.
  • light is emitted by the light source section simultaneously with two different main polarization directions, for example by using light of two differently polarized lasers and merging in the first illumination light beam or by insufficient polarization of the light along a main polarization direction z.
  • Delay element or in addition to a fast closure may be provided in one or both of the channels. Whenever light comes with a first
  • optical elements are provided along the first channel, which are formed and arranged to form a Galilean telescope, which is one or more real or virtual deflection points of the raster device in or close the lens pupil images.
  • a "real or virtual deflection point” is used to denote a point which, on a corresponding grid unit, deflects light of a light source in a spatially limited manner ("punctiform") and thus provides a scanning light beam.
  • Real are corresponding deflection points when they are formed by actual elements, for example mirrors, "virtual" deflection points are representations of corresponding elements in space.
  • the illumination system of the present invention is designed removable, wherein in particular the first and the second beam splitter and the first and the second channel, which is formed between the first and the second beam splitter, are arranged on a withdrawable from the scanning microscope insert.
  • the optical scanning microscope has means for adaptation as a submodule to a wide field microscope.
  • the present invention also extends to a method of examining a sample by means of a scanning optical microscope comprising an illumination system comprising a light source section, first and second polarization-dependent beam splitters, and first and second optical channels between the first and second beam splitters.
  • the method according to the invention provides, using the light source section, a first illumination light beam with light of a first and a second one
  • Figure 1 shows a beam path of a scanning microscope with a
  • Figure 2 shows a beam path of a scanning microscope with a
  • Illumination system according to an embodiment of the invention in a simplified, schematic representation.
  • Figure 3 shows a beam path of a scanning microscope with a
  • Illumination system according to an embodiment of the invention in a simplified, schematic representation.
  • Embodiments include a plurality of common elements, which will be explained below with reference first to FIG. The explanations also apply to the other figures.
  • a scanning microscope illustrated in FIG. 1, which here illustrates a highly schematic illustration, which is shown in dot-dashed lines, and designated by 1, comprises an objective 12 received in an objective receptacle 11 at a lens position 10.
  • Lens shots of different types can be provided, for example
  • An objective pupil of the objective 12 is designated by 109.
  • An illumination system of a corresponding scanning microscope is denoted overall by 20.
  • An orthoscopic beam path is illustrated by 200, a conoscopic beam path by 201 (dashed).
  • the orthoscopic beam path 200 and the conoscopic beam path 201 run over certain distances of the
  • the first channel 21 and the second channel 22 are each formed between a first polarization-dependent beam splitter 105a and a second polarization-dependent beam splitter 105b.
  • a corresponding light source 100 can be used, which already provides correspondingly polarized illumination light.
  • the light source 100 may be
  • a laser light source for example, be a laser light source, a polarization-maintaining optical fiber or a suitable polarization element, or a light source for unpolarized light with a corresponding polarization element.
  • a polarization-maintaining optical fiber for example, be a laser light source, a polarization-maintaining optical fiber or a suitable polarization element, or a light source for unpolarized light with a corresponding polarization element.
  • Light source 100 provided illumination light beam can be realized by different arrangements, which are greatly simplified here with 102 illustrated.
  • a corresponding arrangement 102 may comprise a fast mechanically switchable delay element (for example a ⁇ / 2 plate), which is preferably arranged at a location of the beam path or the illumination light beam with a small beam diameter and a constant beam position.
  • a corresponding delay element or a corresponding arrangement 102 between a fast mechanically switchable delay element for example a ⁇ / 2 plate
  • Fiber collimator and in front of a beam expansion system as illustrated here in a simplified manner at 101.
  • a scanning device or scanning unit 103 is formed in a manner known per se, this includes, for example, tiltable mirrors, rotatable prisms and / or
  • Illuminating light beam here illustrated with 203, is provided which optionally has a first main polarization direction or a second main polarization direction and in the example shown is emitted in collimated form by the grid unit 103.
  • the illumination light beam 203 then passes through a first optical element 104 of one or more lenses and is focused in this way.
  • Illuminating light beam 203 having the first or the second main polarization direction focusses into the first polarization-dependent beam splitter 105a.
  • the light of the second main polarization direction as illustrated here in the form of the dashed conoscopic beam path 201, is reflected, while light of the first main polarization direction passes through the boundary layer without being deflected.
  • the first polarization-dependent beam splitter 105a guides the light with the first main polarization direction into the first optical channel 21 and the light with the second main polarization direction into the second channel 22. Beyond a respective focal point in the first channel 21 and the second channel 22, respectively the light with the first and the second polarization respectively divergent.
  • the light having the first main polarization direction in the first channel 21, as illustrated here with the orthoscopic beam path 200 diverges from the first channel and enters the second polarization-dependent beam splitter 105b.
  • a closure 110 it is possible to prevent false light from entering the second polarization-dependent beam splitter.
  • the first channel 21 no further optical elements are provided in the embodiment illustrated in FIG.
  • further optical elements 106a and 106b are provided.
  • the light in the second channel 22 extending with the second polarization is further deflected via deflecting elements 107a and 107b.
  • the optical elements 106a and 106b the light with the second main polarization direction in the second channel 22 collimated and enters in collimated form in the second polarization-dependent beam splitter 105b.
  • the light having the first main polarization direction out of the first channel 21 diverges therefrom after passing through the second polarization-dependent beam splitter 105b, the light having the second main polarization direction emerges from the second channel 22 after passing through the second channel and the second
  • the collimated light with the second main polarization direction can be focused from the second optical channel, whereas the light with the first main polarization direction from the first optical channel can be collimated.
  • the second optical element 108 forms a Bertrand lens with the already explained optical elements 106a and 106b.
  • the first optical channel 21 and the second optical channel 22 and the arrangement of the illustrated lenses the light having the first main polarization direction in collimated form can enter the rear lens pupil 109 of the lens 12, whereas the light having the second main polarization direction can enter the rear lens pupil 109 of the lens 12 are focused.
  • the second optical element 108, together with the first optical element 104, forms a Galilean telescope, which surrounds the one or more through the
  • Scanning device 103 conditional real or virtual deflection points of the
  • Illuminating light beam into or near the objective pupil 109 Illuminating light beam into or near the objective pupil 109.
  • a detection of fluorescent light of a sample, which is arranged in front of the objective 12, can be carried out by a conventional wide field fluorescence microscope.
  • Illumination system 20 of the embodiments discussed herein may be coupled in such a wide field fluorescence microscope in the fluorescence illumination beam path at a suitable location and be formed removable. It is particularly advantageous if the Bertrand lens system formed by the optical elements 106a, 106b and 108 has a variable focus, which allows focusing at different mechanical positions of the objective pupil 109, for example when using different objectives or a turret focusing.
  • the second optical element 108 which can be formed, for example, in the form of a tube lens, can be kept constant in a corresponding focusable Bertrand lens system and therefore does not have to be removed even when changing the illumination system 20, and the afocalism of the Galileo telescope consisting of elements 104 and 108 is preserved.
  • the embodiment of the scanning microscope 2 illustrated in Figure 2 differs from the embodiment illustrated in Figure 1 by the absence of the shutter 110. As mentioned, in the embodiment of the scanning microscope 1 illustrated in Figure 1, this allows blanking due to non-ideal
  • Shutter members 110 and 111 are provided.
  • the light source section 100 to 103 and the light source 100 in this case, for example, illumination light of a fixed
  • polarization-dependent beam splitter 105a illumination light in both channels 21 and 22 directed.
  • a beam path can now be selectively blocked and in this way light can pass through the only one channel to the objective 12.
  • 105a, 105b polarization-dependent beam splitter 106a, 106b further optical elements

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EP17723981.1A 2016-05-13 2017-05-12 Optisches rastermikroskop und untersuchungsverfahren Withdrawn EP3455663A1 (de)

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DE102019135521A1 (de) * 2019-12-20 2021-06-24 Carl Zeiss Microscopy Gmbh Messanordnung, Lichtmikroskop und Messverfahren zur bildgebenden Tiefenmessung
KR102572214B1 (ko) * 2020-10-30 2023-08-30 한국전자통신연구원 치매, 및 경도인지장애 진단용 이광자 여기 형광 현미경 그리고 그에 포함되는 펄스 압축기
US11921273B2 (en) 2020-10-30 2024-03-05 Electronics And Telecommunications Research Institute Two-photon excited fluorescence microscope for diagnosis of Alzheimer's disease (AD) and mild cognitive impairment (MCI), and pulse compressor including therein
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US6091523A (en) * 1989-02-07 2000-07-18 Northrop Grumman Corporation Multi-channel receiver
JP3942906B2 (ja) * 2002-02-01 2007-07-11 株式会社ニデック レーザ治療装置
JP4414722B2 (ja) 2003-10-15 2010-02-10 オリンパス株式会社 レーザー顕微鏡
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DE102006028530A1 (de) 2005-11-11 2007-05-16 Till I D Gmbh Mikroskopvorrichtung
DE102006033306A1 (de) 2006-07-17 2008-01-31 Leica Microsystems Cms Gmbh Tirf Mikroskop
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JP5551477B2 (ja) * 2010-03-15 2014-07-16 オリンパス株式会社 光源装置およびレーザ走査型顕微鏡装置
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US9721326B2 (en) * 2011-11-08 2017-08-01 UNIVERSITé LAVAL Method and system for improving resolution in laser imaging microscopy
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JP2014164097A (ja) * 2013-02-25 2014-09-08 Olympus Corp ビームスプリッタ装置、走査型観察装置、レーザ走査型顕微鏡およびレーザ走査型内視鏡
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US9606069B2 (en) * 2014-06-25 2017-03-28 Kla-Tencor Corporation Method, apparatus and system for generating multiple spatially separated inspection regions on a substrate
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JP2019517027A (ja) 2019-06-20
WO2017194742A1 (de) 2017-11-16

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