EP3383145A1 - Plasmalampe - Google Patents

Plasmalampe Download PDF

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Publication number
EP3383145A1
EP3383145A1 EP18162465.1A EP18162465A EP3383145A1 EP 3383145 A1 EP3383145 A1 EP 3383145A1 EP 18162465 A EP18162465 A EP 18162465A EP 3383145 A1 EP3383145 A1 EP 3383145A1
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EP
European Patent Office
Prior art keywords
torch
plasma
anode
cathode
gas
Prior art date
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Granted
Application number
EP18162465.1A
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English (en)
French (fr)
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EP3383145B1 (de
Inventor
Bruno VAN OOTEGEM
Maxime Labrot
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ArianeGroup SAS
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ArianeGroup SAS
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • H05H1/40Details, e.g. electrodes, nozzles using applied magnetic fields, e.g. for focusing or rotating the arc
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • H05H1/3452Supplementary electrodes between cathode and anode, e.g. cascade

Definitions

  • the invention relates to a plasma torch comprising an anode and a cathode each provided with a coil for generating a magnetic field.
  • the anode and cathode of the torch according to the invention have an increased life.
  • Plasma torches are equipment that began to appear in the early 1930s with the development of electricity for an industrial purpose.
  • the real development of these systems in the industrial world is effective since the 1970s, we find these systems in the iron and steel industry as well as process chemistry.
  • FIG. 1 a basic model of a torch 200 for generating a plasma according to the prior art.
  • This torch 200 comprises a metal anode 202 in the form of a tip and a cathode 204 in the form of a cone.
  • An electric arc A is established between the anode 202 and the cathode 204.
  • a gas is injected between the two electrodes (arrows 208) in order to form the FP plasma stream.
  • a first problem of this type of plasma torch is related to the erosion of the electrodes 202 and 204 produced by the arc A which affects the life of the latter.
  • An additional limitation related to this reduced electrode life in the prior art is that only neutral or non-oxidizing gases can be used to generate the plasma. In fact, the atomic oxygen generated in a plasma degrades the electrodes even more rapidly.
  • neutral gases, such as helium can be expensive, thus helping to make relatively high the cost of implementation torches of the prior art.
  • a second problem that can be encountered with the prior art plasma torches is that the arc A is free to hang on at any position of the cathode 204. This free positioning of the arc generates a fluctuation of its length in time. The length of the arc being directly representative of the voltage of the arc, this results in a significant fluctuation of the voltage, and therefore of the power.
  • the first and second coils can generate an induced magnetic field generating a force for rotating the electric arc formed between the anode and the cathode.
  • This rotation of the electric arc makes it possible to distribute the erosion of the electrodes on the external surface of the body and, consequently, to increase the lifetime of the electrodes.
  • each conductive body has an internal surface in communication with a coolant introduction orifice.
  • each conductive body has a toric shape.
  • each of the first and second coils is carried by a coil carrier having a toroidal shape.
  • each of the first and second coils has a U-shape in longitudinal section.
  • the torch comprises a single cathode and a single anode.
  • each conductive body is made of copper or copper alloy.
  • the plasma generation chamber is defined by at least one tubular-shaped neutrode segment.
  • the plasma generation chamber is defined by at least a first and a second tubular segment connected together removably.
  • the gas injection channel may be defined between the first and second segments.
  • the torch further comprises a plasma ejection nozzle located downstream of the anode and the cathode.
  • the gas under pressure is an oxidizing gas under pressure.
  • the gas under pressure is a neutral gas under pressure.
  • the figure 2 is a longitudinal section of an example of a plasma torch 1 according to the invention.
  • the cup of the figure 2 was performed in a first section plane intersecting the introduction ports 9 of the pressurized gas G into the torch 1.
  • the torch 1 extends along a longitudinal axis X.
  • the torch 1 comprises a chamber 3 for generating a plasma extending along the axis X.
  • the torch 1 comprises several introduction ports 9 of the gas G.
  • the ports 9 are, in the illustrated example, positioned around the axis X.
  • the ports 9 are positioned symmetrically or not with respect to the axis X.
  • the chamber 3 is in communication with each of the ports 9.
  • the gas G under pressure, intended to form the plasma, is injected through each of the ports 9. This gas G is then transferred to the chamber 3 in which the plasma is generated. .
  • Each of the ports 9 comprises an inlet 9a which is connected to a source of G gas under pressure (not shown) and an outlet 9b which opens inside the torch 1. This outlet 9b opens into a channel 11a of gas transfer G under pressure. Each of the exits 9b opens into a separate transfer channel 11a. Each transfer channel 11a extends along the axis X. The transfer channels 11a are positioned symmetrically or otherwise with respect to the axis X.
  • Each transfer channel 11a communicates with at least one injection channel 5 of the pressurized gas which opens into the chamber 3.
  • the transfer channel 11a connects the outlet 9b to at least one injection channel 5.
  • the injection channel 5 connects the transfer channel 11a to the chamber 3.
  • Two injection channels 5 connected to the same transfer channel 11a are visible on the figure 4 . As visible on the figure 4 , the injection channel 5 extends transversely with respect to the transfer channel 11a. The injection channel 5 extends transversely with respect to the X axis.
  • the chamber 3 is thus placed in communication with a port 9 via a transfer channel 11a and an injection channel 5.
  • the pressurized gas G thus initially passes through the ports 9, then the transfer channels 11a, then the injection channels 5 in order to be introduced into the chamber 3 and form the plasma.
  • the path of the gas G is indicated by the arrows G on the figures 2 and 4 .
  • the illustrated example relates to the case of a torch 1 provided with a plurality of ports 9 for introducing the gas G.
  • the torch 1 comprises a single port of introduction of the gas under pressure. In which case, it is possible to have only one transfer channel 11a.
  • a plurality of ports 9 positioned around the X axis have been included in the illustrated example.
  • the ports could, in a non-illustrated variant, be shifted along the X axis.
  • the torch 1 comprises an anode 20 and a cathode 30 which are located on either side of the plasma generation chamber 3.
  • the chamber 3 is thus located between the anode 20 and the cathode 30.
  • the anode 20, the chamber 3 and the cathode 30 follow one another as one moves along the axis X.
  • a difference of sufficient potential is applied between the anode 20 and the cathode 30 in order to generate an electric arc A.
  • the generated electric arc A extends in the chamber 3 between the anode 20 and the cathode 30 and makes it possible to generate the plasma by ionization of the gas G injected.
  • the anode 20, the cathode 30 and their coils 24 and 34 for generating the associated magnetic field will be described in more detail below.
  • the injected gas G can be a neutral gas and for example be chosen from: argon, helium, nitrogen and their mixtures.
  • the gas G may be an oxidizing gas, such as air.
  • one of the advantages of the torch according to the invention is to allow a satisfactory use, if desired, of an oxidizing gas to generate the plasma.
  • the chamber 3 is defined by a plurality of segments 13 of tubular shape positioned successively along the axis X.
  • the chamber 3 is defined inside the segments 13.
  • Each transfer channel 11a passes through the segments 13.
  • Each segment 13 constitutes a neutrode in the example under consideration.
  • the segments 13 are not polarized (electrically neutral) in order to prevent the electrical arc A from catching on these segments 13.
  • the neutrode segments 13 are not electrically connected to the anode 20 and at the cathode 30.
  • One or more electrically insulating elements may be disposed between the set of segments 13 and each electrode 20 or 30.
  • a layer of an electrically insulating material may furthermore be positioned between each segment 13 so as to electrically isolating the segments 13 from each other.
  • the illustrated example relates to a case where the chamber 3 is defined by several segments 13 positioned successively along the axis X. However, it is not beyond the scope of the invention when the chamber is defined only by a single segment. .
  • the anode 20 and the cathode 30 are thus separated by a material on which the electric arc can not cling.
  • This makes it possible to favor the attachment of the arc A at the level of the anode 20 and of the cathode 30, and this therefore contributes to reducing the fluctuations of the length of the arc in operation, thus conferring on the plasma generated a greater stability.
  • the exemplary torch 1 illustrated uses a plurality of neutrode segments 13 interconnected removably. As visible especially on figures 3 and 4 , the connection of the segments 13 is ensured by insertion of fastening elements 13a, such as pins, in housings 13c formed in each of the segments 13. The segments 13 are thus, in the illustrated example, nested with each other removably.
  • the fact of defining the chamber 3 by means of several segments 13 interconnected removably allows advantageously to adjust the distance separating the anode 20 from the cathode 30 by the number of segments used.
  • the length of the arc thus becomes a parameter that can be used to adjust the characteristics of the plasma generated, as well as the intensity of the current and the gas flow rate.
  • it is possible to generate arcs of increased length which makes it possible, for the same power, to reduce the intensity of current used and thus to further extend the service life of the electrodes.
  • the segments 13 each have substantially the same thickness. Unless otherwise stated, the thickness of a segment 13 is measured along the X axis. However, it is not beyond the scope of the invention when the chamber 3 is formed by assembling a plurality of thickness segments. different.
  • FIG. figure 4 shows a first segment 13 (lower segment in the figure) and a second segment 13 (upper segment in the figure) which is adjacent to the first segment.
  • each segment 13 comprises a first portion 132 and a second portion 133.
  • the first portion 132 may be formed of an electrically conductive material, such as copper.
  • the second portion 133 is formed of an electrically insulating material and electrically isolates two segments 13 adjacent to each other.
  • the first portion 132 has a face 130, located opposite an adjacent segment 13, on which is formed the injection channel 5.
  • the second portion 133 of the second segment covers the injection channel 5 of the first segment.
  • the second portion of the second segment defines axially along the X axis the injection channel 5 of the first segment.
  • the injection channel 5 of the first segment is defined between the first and the second segment.
  • An annular seal 131 may, as illustrated, be present between the first and second segments.
  • the seal 131 makes it possible to ensure a radial seal.
  • injection channels when there are several injection channels, these may or may not be regularly spaced along the X axis.
  • the torch 1 further comprises an envelope 15 made of an electrically insulating material which surrounds the chamber 3 and the segments 13.
  • the envelope 15 extends along the axis X.
  • fastening elements 100 such as studs, can be used (see FIG. figure 5 showing the fastening elements 100 passing through the envelope 15).
  • the envelope 15 may be divided into several parts, as illustrated.
  • the torch 1 further comprises an outer body 2 inside which are in particular present, the anode 20 and the cathode 30, the plasma generation chamber 3, the segments 13 and the envelope 15.
  • This body 2 can, as illustrated, be divided into several parts. The joining of the parts 2b and 2a can be done by screwing the part 2b on the part 2a. Parts 2b and 2d can, for their part, be secured through the ring 2c.
  • the segments 13 defining the plasma generation chamber 3 are cooled by circulation of a cooling fluid F. This aspect will now be described, particularly in relation to figure 3 .
  • the cut reproduced in figure 3 was made in a second section plane, different from the first section plane associated with the figure 2 .
  • the second cutting plane intersects in particular the ports 19 for introducing the cooling fluid.
  • the torch 1 comprises several ports 19 for introducing the cooling fluid F.
  • the ports 19 are, in the illustrated example, positioned around the axis X.
  • the ports 19 may or may not be positioned symmetrically with respect to the axis X.
  • Each of the ports 19 comprises an inlet 19a which is connected to a source of cooling fluid (not shown) and an outlet 19b opening inside the torch 1.
  • the outlet 19b opens into a plurality of cooling channels 11b.
  • the cooling channels 11b extend along the axis X.
  • the channels 11b pass through the segments 13.
  • the cooling channels 11b are, in the example shown, positioned around the axis X.
  • the channels 11b can or not be evenly distributed around the X axis.
  • the torch 1 further comprises several ports 29 for outputting the coolant F.
  • the ports 29 are, in the example shown, positioned around the axis X.
  • the ports 29 may or may not be positioned symmetrically with respect to the X axis.
  • Each of the ports 29 includes an inlet 29a which is in communication with the cooling channels 11b and an outlet 29b in communication with a cooling fluid discharge circuit (not shown).
  • the outputs 19b are positioned at a first end E1 of the chamber 3 and the inputs 29a are positioned at a second end E2 of the chamber 3, opposite the first end.
  • the segments 13 are located between the ports 19 and the ports 29.
  • Each cooling channel 11b connects an output 19b to an input 29a.
  • the fluid F is introduced through the ports 19, then flows through the cooling channels 11b, and is then discharged outside the torch 1 by the ports 29.
  • This fluid path F is materialized at the figure 3 by the arrows F.
  • the torch 1 is, moreover, provided with a convergent 60 and a divergent 70.
  • the plasma generation chamber 3 is located between the convergent 60 and the divergent 70.
  • the convergent 60 may be located upstream of the chamber 3 and the divergent 70 downstream of the chamber 3.
  • upstream and downstream are used here with reference to the flow direction of the plasma towards the outside of the torch 1 (see arrow FP on the figure 2 ).
  • the convergent 60 is located between the anode 20 and the chamber 3.
  • the convergent 60 may open opposite the anode 20.
  • the divergent 70 is located between the chamber 3 and the cathode 30.
  • the divergent 70 may end up opposite the cathode 30.
  • the convergent 60 has a sectional narrowing as it moves towards the chamber 3.
  • the section of the convergent 60 on the anode side 20 is greater than the section of the convergent 60 on the side of the chamber 3.
  • the divergent 70 has a sectional widening as it moves in the direction towards the cathode 30.
  • the section of the divergent 70 on the cathode side 30 is greater than the section of the divergent 70 on the side of the chamber 3.
  • the presence of the convergent 60 and the divergent 70 which each have an enlarged section on the side of the electrodes 20 and 30 advantageously allows the arc to attach more easily to the latter and thus to further improve the stability of the plasma generated. .
  • the central part of the torch 1 has just been described.
  • the description which follows sets out to describe in more detail the parts of this torch located on either side of this central part, and in particular the structure of the anode 20 and the cathode 30.
  • the anode 20 and the cathode 30 are located on either side of the plasma generation chamber 3.
  • the anode 20 is located on the side of the first end E1 of the chamber 3 and the cathode 30 on the side of the second end E2 of the chamber 3, opposite to the first end E1.
  • the anode 20 is located between a bottom 50 of the plasma torch 1 and the convergent 60.
  • the cathode 30 is, for its part, located between the divergent 70 and the ejection nozzle 80 of the plasma torch 1.
  • the bottom 50 may, as illustrated, be provided with an injection orifice 52 of a buffer gas GT.
  • the bottom 50 has a neck 50a intended to be connected to a buffer gas source (not shown).
  • the neck 50a defines an orifice 52 through which the buffer gas GT is intended to be injected (see GT injection arrow on the figure 2 ).
  • the injection of the buffer gas GT through the orifice 52 makes it possible to form a "cushion" of buffer gas GT upstream of the anode 20 so as to prevent the arc A from catching on the bottom 50 during the operation. This also helps to stabilize the length of the arc during operation and thus to give the plasma a greater stability.
  • the GT buffer gas used can be a neutral gas, for example chosen from: argon, helium, nitrogen and their mixtures.
  • the anode 20 and the cathode 30 each comprise an electrically conductive body, respectively 22 and 32.
  • Each conductive body 22 or 32 defines an electrically conductive outer surface, denoted S1 or S2, which is annular in shape.
  • S1 or S2 extends 360 ° about the X axis.
  • the outer surface S1 or S2 can have a shape of revolution.
  • the conductive body 22 or 32 has in the example illustrated a toroidal shape.
  • the conductive body 22 or 32 has a U-shape when the torch 1 is observed in longitudinal section.
  • Arc A comprises a central portion extending through chamber 3 and arc feet PA connecting this central portion to anode 20 and cathode 30.
  • FIG. 6 A more detailed section of anode 20 is provided at figure 6 .
  • the cathode 30 has a similar structure.
  • the conductive body 22 may be copper or copper alloy. Other electrically conductive materials are conceivable to constitute the conductive body 22. The use of copper however remains preferential in order to optimize the diffusion of calories in the body, and thus to make it possible to further increase the service life. of the electrode.
  • the conductive body 22 comprises, in the illustrated example, two separate parts 22a and 22b assembled, for example by welding, along an assembly surface 22c. Each portion 22a and 22b extends 360 ° about the axis X.
  • the portions 22a and 22b each comprise a positioning relief 22d or 22e intended to cooperate with a complementary relief, respectively 53 or 39 (see figure 2 ), to ensure the correct positioning of the electrode in the torch 1.
  • the positioning reliefs 22d and 22e can each have an annular shape and extend around the axis X.
  • the positioning reliefs 22d and 22e can each extend 360 ° around the X axis.
  • the conductive body 22 defines an internal volume 23 in which there is a first coil 24 for generating a magnetic field.
  • the inner volume 23 may also have an annular shape, and extend 360 ° about the X axis.
  • the first coil 24 comprises a winding of an electrically conductive wire 26 positioned around the surface S1.
  • the wire 26 is traversed by an electric current thus making it possible to generate an induced magnetic field.
  • This magnetic field generates a force making it possible to turn the feet PA of the electric arc A around the axis X.
  • This rotation is materialized by the arrow R on the figure 2 .
  • This rotation makes it possible to distribute the erosion of the electrodes due to the electric arc on the external surface of the body and, consequently, to increase the lifetime of the electrodes.
  • Another advantage resulting from this increased lifetime of the electrodes is the possibility of using an oxidizing gas to generate the plasma.
  • the use of an oxidizing gas makes it possible to limit the cost of using the torch 1 on applications that tolerate the presence of oxygen. In particular, it is possible, if desired, to dispense with the use of helium in the gas G, which has a relatively high cost.
  • the wire 26 may be copper or copper alloy. Other conductive materials are however usable to form the wire.
  • the wire 26 is present on a coil support 28.
  • the support 28 has a toric shape.
  • the support 28 has a U-shape when the torch 1 is observed in longitudinal section.
  • the winding of the wire 26 reproduces the curvature of the support 28.
  • the first coil 24 thus has a U shape when the torch 1 is observed in longitudinal section.
  • the wire 26 extends 360 ° about the X axis.
  • the wire 26 is wound in a spiral around the X axis.
  • the wire 26 defines a first spiral 261 in a first plane P1 transverse to the X axis and a second spiral 263 in a second plane P2 transverse to the axis X and offset from the first plane P1 along this axis (see figure 7 ).
  • the wire 26 further defines a transition zone 265 between the first 261 and second 263 spirals.
  • the radius of this winding is decreasing and increasing.
  • the radius of the winding is decreasing in the first region R1 and then increasing in the second region R2.
  • the first and second regions are shifted along the X axis.
  • the first coil 24 may or may not be symmetrical with respect to a plane P transverse to the X axis.
  • the embodiment of the anode 20, respectively of the cathode 30, comprises the winding of the wire 26, respectively 36, on the support 28, respectively 38.
  • This winding can be performed in a toroid mold whose section is shaped
  • the coil is then connected to two electrical connection terminals.
  • the first 24 and second 34 coils thus obtained are then fixed and secured to the support by injection and hardening of an insulating resin of electricity.
  • torch 1 comprises a single anode 20 and a single cathode 30. However, it is not beyond the scope of the invention if the torch comprises several anodes and / or several cathodes.
  • the anode 20 is located on the side of the bottom 50 and the cathode 30 on the side opposite the anode 20.
  • the polarization could, however, be reversed: the cathode would in this case be positioned on the side of the bottom 50 and the anode on the opposite side to the cathode.
  • the content of this detailed description is also valid in the case where the polarization is reversed.
  • the first 24 and second 34 coils can significantly improve the life of the anode 20 and the cathode 30. Another feature to further improve the life of the electrodes is relative to the circuit for cooling the these during operation. This cooling circuit will now be described for the anode 20, it being understood that the cooling of the cathode 30 is operated in a similar manner.
  • the conductive body 22 has an internal surface S3 at which the cooling of the anode 20 is intended to be realized (see figure 6 ).
  • the inner surface S3 is in communication with an orifice 46b for introducing a cooling fluid F.
  • the cooling is thus carried out as close as possible to the electric arc A, which makes it possible to optimize its efficiency, and to further improve the service life of the electrodes by limiting the erosion due to the electric arc.
  • the limitation of the erosion due to the arc is advantageous, in particular, in the case where the torch 1 is used to make a deposition of a material by plasma way in order to limit the "pollution" of the plasma flux, and therefore deposition performed by the eroded electrode material.
  • the torch 1 comprises at least one port 46 for introducing a cooling fluid F at each of the electrodes 20 and 30.
  • Port 46 comprises an inlet 46a which is connected to a source of cooling fluid (not shown) and an outlet 46b opening inside the body 22.
  • the outlet 46b opens into the internal volume 23 of the body 22.
  • the port 46 is formed of two distinct parts, namely: a first portion 48 defining the inlet 46a and a second portion 47 defining the outlet 46b and inserted inside the first portion 48.
  • the port 46 could be formed of a single piece.
  • the torch 1 further comprises at least one output port of a cooling fluid F at each of the electrodes 20 and 30.
  • the output port located at the anode 20 is noted 40 and the port located at the level of the cathode 30 is noted 140 (see figure 3 ).
  • Port 40 includes an inlet 40a in communication with the interior volume 23 and an outlet 40b in communication with a cooling fluid discharge system (not shown).
  • Port 40 and port 46 may or may not be positioned symmetrically with respect to the X axis.
  • the cooling fluid F is introduced into the internal volume 23 through the port 46.
  • the fluid F then circulates in the internal volume 23.
  • the fluid F is in contact with the inner surface S3 in order to achieve the cooling of the body 22 or 32.
  • the coil 24 is located at a non-zero distance from the body 22. This distance can typically be less than or equal to 3 mm.
  • the latter is evacuated outside the torch 1 through the port 40.
  • the path of the cooling fluid F in the body 22 is materialized, at the figure 6 , by the arrows F.
  • the presence of the coils and the electrode cooling circuit advantageously contributes to increasing the service life of the latter.
  • the following description sets out to detail another aspect of the example of torch 1 illustrated, relating to the ejection nozzle 80.
  • the ejection nozzle 80 is situated downstream of the anode 20 and the cathode 30.
  • the plasma is intended to be distributed outside the torch 1 through the ejection nozzle (FP plasma stream). figure 2 ).
  • the ejection nozzle 80 defines a plasma ejection channel 81 in communication with the chamber 3.
  • the channel 81 extends along the axis X.
  • the channel 81 opens out of the torch 1 through of the outlet port 88.
  • the ejection nozzle 80 shown has a nozzle shape.
  • the ejection nozzle 80 thus comprises a convergent 82 located on the side of the chamber 3, a diverging 86 located on the side of the outlet orifice 88 and a collar 84 between the convergent 82 and the divergent 86.
  • the section of the convergent 82 on the side of the chamber 3 is greater than the section of the convergent 82 on the side of the orifice 88.
  • the section of the divergent 86 on the side of the chamber 3 is less than the section of the divergent 86 on the side of the orifice 88.
  • the ejection nozzle can only have a convergent and be devoid of divergent.
  • the shape of the ejection channel 81 is determined according to the intended application for the plasma torch 1. It is part of the general knowledge of those skilled in the art to adapt the shape of this channel 81 to the desired application.
  • the ejection nozzle 80 is also provided with a cooling circuit.
  • the ejection nozzle 80 defines an interior volume 92 in which a cooling fluid is intended to circulate.
  • This interior volume 92 may extend 360 ° about the axis X.
  • the interior volume 92 may be located around the ejection channel 81.
  • the figure 3 illustrates the details of the cooling system of the nozzle 80.
  • the torch 1 may comprise at least one port 90 for introducing a cooling fluid F opening into the internal volume 92.
  • the port 90 comprises an inlet 90a which is connected to a coolant source (not shown) and an outlet 90b opening into the interior volume 92.
  • the torch 1 may further comprise at least one port 94 for outputting the cooling fluid F in communication with the interior volume 92.
  • the port 94 and the port 90 may or may not be positioned symmetrically with respect to the X axis.
  • 94 includes an inlet 94a in communication with the interior volume 92 and an outlet 94b connected to a cooling fluid discharge system (not shown).
  • the cooling fluid F is introduced into the internal volume 92 through the port 90.
  • the cooling fluid F then passes through the internal volume 92 in order to carry out the cooling of the ejection nozzle 80.
  • the cooling fluid F is then evacuated through the output port 94.
  • the fluid path of cooling in the interior volume 92 is indicated by the arrows F on the figure 3 .
  • the ejection nozzle 80 may be removably attached to the remainder of the torch 1 comprising the anode 20 and the cathode 30. This advantageously makes it possible to modify the flow forming element in order to adapt the same system to different applications. Note however that the presence of an ejection nozzle remains optional.
  • the torch may comprise at least one introduction channel of a material to be deposited by a plasma process opening downstream of the plasma generation chamber.
  • a plasma process opening downstream of the plasma generation chamber.
  • the material is introduced into the generated plasma stream in order to be deposited on the substrate.
  • the introduction channel may open downstream of the anode and the cathode.
  • the introduction channel may open between an electrode and the ejection nozzle.
  • the introduction channel may alternatively lead downstream of the ejection nozzle.
  • the invention is however not limited to the use of the torch for producing a plasma coating.
  • figure 8 a simplified electrical diagram showing a first electrical system 203 in which the body 22 of the anode 20 and the body 32 of the cathode 30 are connected in series across a first electrical generator GE1.
  • the first electrical system 203 makes it possible to ensure the formation of the plasma.
  • the figure 8 further shows a second electrical system 205 in which the first 24 and second 34 coils are connected in series across a second electrical generator GE2.
  • the second electrical system 205 ensures the creation of the induced magnetic field to rotate the electric arc and thus prolong the life of the electrodes.
  • the anode 20 and the cathode 30 In operation, it is possible to impose between the anode 20 and the cathode 30 a voltage of between 150 V and 400 V, for example between 200 V and 300 V.
  • the intensity of the current flowing between the anode 20 and the cathode 30 may be less than or equal to 200 A.
  • the intensity of the current flowing in the first and second coils 24 and 34 may be less than or equal to 200 A.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
EP18162465.1A 2017-03-30 2018-03-19 Plasmabrenner Active EP3383145B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1752665A FR3064876B1 (fr) 2017-03-30 2017-03-30 Torche a plasma

Publications (2)

Publication Number Publication Date
EP3383145A1 true EP3383145A1 (de) 2018-10-03
EP3383145B1 EP3383145B1 (de) 2019-06-19

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WO2021066225A1 (ko) * 2019-10-02 2021-04-08 한국수력원자력 주식회사 플라즈마 토치

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US3445191A (en) * 1965-07-14 1969-05-20 Westinghouse Electric Corp Arc heater apparatus for chemical processing
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CN114158173A (zh) * 2021-11-30 2022-03-08 西北核技术研究所 一种用于抑制预脉冲电流的丝阵负载结构
CN114158173B (zh) * 2021-11-30 2023-09-01 西北核技术研究所 一种用于抑制预脉冲电流的丝阵负载结构

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FR3064876B1 (fr) 2019-12-27
EP3383145B1 (de) 2019-06-19

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