EP3248254A1 - Agencement de pointes d'émission et son procédé de fonctionnement - Google Patents

Agencement de pointes d'émission et son procédé de fonctionnement

Info

Publication number
EP3248254A1
EP3248254A1 EP16701246.7A EP16701246A EP3248254A1 EP 3248254 A1 EP3248254 A1 EP 3248254A1 EP 16701246 A EP16701246 A EP 16701246A EP 3248254 A1 EP3248254 A1 EP 3248254A1
Authority
EP
European Patent Office
Prior art keywords
emission
tip
emission tip
corona
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP16701246.7A
Other languages
German (de)
English (en)
Other versions
EP3248254B1 (fr
Inventor
Franz Knopf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP3248254A1 publication Critical patent/EP3248254A1/fr
Application granted granted Critical
Publication of EP3248254B1 publication Critical patent/EP3248254B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge
    • H01T19/04—Devices providing for corona discharge having pointed electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/02—Carrying-off electrostatic charges by means of earthing connections
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/06—Carrying-off electrostatic charges by means of ionising radiation

Definitions

  • the invention relates to an emission tip arrangement of high-voltage electrodes for charging or discharging substrates, having at least one emission peak, and having a carrier body made of an insulating material, which has at least one high-impedance resistor and is arranged on a provided with an insulating potting metal profile, wherein the at least one emission peak can be connected via the series resistor to a high voltage terminal.
  • the metal profile can be grounded and provided with an insulating layer and the series resistor can be arranged electrically isolated on the metal profile.
  • the invention also relates to methods of operating such an arrangement in AC voltage at a particular peak voltage and to a method of operating an emission tip array with auxiliary air supply.
  • Passive and active discharge electrodes or active charging electrodes are known in a variety of embodiments and variants. Frequently, such electrodes have a plurality of emission peaks, which are arranged in different raster widths in a single row, in a double row, or else in such a manner as a surface-trained emission tip array that they are similar, for example, to a fakir board. Very often, such emission peaks are embedded together with a current-limiting resistor in elongated U-profiles by means of insulating casting resin. The electrical resistance is assigned to either each single peak or n-peaks. Passive discharge electrodes are often found in practice even without current-limiting resistors in use.
  • the highest possible electric field strength should be effective at an arrangement of emission peaks of active and passive high voltage electrodes at the tips.
  • the respective tip would have to protrude sufficiently far from the insulating embedding. This is quite similar to the necessarily freestanding end of a lightning rod over the object to be protected.
  • corona insert describes the voltage at which, before the tips, free charge carriers, ie electrons and ions of both polarities, are generated by impact ionization, which ultimately cause the passive discharge; the gas between the tips and the charged object surface becomes conductive.
  • the object surface to be passively discharged remains at a higher potential, or: the less the emission peak protrudes from the potting, the lower the passive discharge power of the electrode.
  • DE 10 2011 007 138 A1 discloses an embodiment of special high-voltage polymer resistors in conjunction with rigid emission tips, which are used as semifinished products in the production of high-voltage electrodes.
  • EP 1 241 755 A2 discloses an active discharge electrode with air assistance. Here you can even find emission peaks that are deeper than the insulating environment of the air duct or air nozzle.
  • Comparable unfavorable conditions are also found in the usual commercially available charging electrodes with and without air support, known for example from DE 20 2004 014 952 Ul.
  • an emission tip arrangement of the aforementioned type in which the emission tip is formed from a spring metal and forms an elastic spring element and a free end of the emission peak is spaced apart from the carrier body as a corona tip ,
  • the spring element can be formed, for example, helical spring-like. This is, however not mandatory, there are other spring training conceivable.
  • the emission tip or tips of the emission tip arrangement according to the invention are thus formed of a metallic spring material as spring tips and, for example, helical spring-like, provided that they can protrude as far as desired beyond the electrode body.
  • the emission tip or tips can be configured as a metal spring, that is, for example, as a spring element which is formed from a metal.
  • the high-voltage electrode is active or passively operable or operated as a charging and / or discharging electrode, with AC or DC voltage.
  • an embodiment of the emission tip assembly is advantageous in which an end portion of the free end of the emission peak, which acts for example as a corona tip, is bent towards the longitudinal axis of the extension direction of the spring element.
  • Such a last, relatively short, angled towards the center of the coil spring portion of the emission spring tip wears, for example, via the corona current, over the life of the electrode under almost constant geometric conditions.
  • the truncated cone would wear to ever-increasing diameter over the corona, the emission spring tip according to the invention over the life of the corona tip constant geometric conditions and thus the desired constant low corona threshold deployment.
  • a further advantage is an embodiment of the emission tip arrangement in which the free-standing emission spring tip can also work with air when needed, which is why the interior of the helical spring element forms a passage which can be connected to a channel of the carrier body, via which the emission tip a Auxiliary air quantity is feasible.
  • the free standing outside the electrode body emission spring tip can be so connected to the embedded, for example, in an insulating encapsulation carrier body that fits inside the carrier body made of insulating material of the air duct to the inner diameter of the emission spring tip air technically fitting and so the amount of auxiliary air through an air Distribution channel can get to each individual emissions feather tip.
  • the emission spring tip according to the invention is designed such that the degree of ionization of the amount of auxiliary air used in the case of AC discharge electrodes can be significantly increased in comparison with known active discharge electrodes with air assistance.
  • the latter is equivalent to considerable cost savings in generating the amount of compressed air required for operation.
  • Non-ionized large quantities of auxiliary air are undesirable or even annoying in many processes in addition to the high cost.
  • the increase of the degree of ionization of the auxiliary air quantity is due in particular to the formation of the corona tip at the free end of the emission spring tip, which is arranged as a thin conductive wire end freely above the center of the air-guiding spring tip.
  • the thin conductive end of the wire can be understood, which is arranged freely above the center of the, possibly air-bearing, spring tip.
  • the spring element for example the inner contour of the spring element, which acts as a boundary for the amount of air supplied within the spring element, can taper towards the free end of the emission tip.
  • the last turns of the helical spring-shaped spring tip then run, for example, conical, resulting in a nozzle-like air outlet.
  • Auxiliary air supports the ion wind generated by the corona tip and is thereby ionized in the best possible way, which ultimately makes the high degree of effect or ionization as well as the range effect of the offered ionized auxiliary air quantity.
  • this can be formed from a thermoplastic or duroplastic plastic or a ceramic material.
  • the carrier body can be provided with at least one receptacle located on a side wall for arranging at least one emission peak into which the emission peak can be pressed
  • the contour of the emission peak can be elastically deformed when it is arranged on the support body, wherein contour at this point means that the structure forming the shape of the emission peak is elastically deformable, so that, for example, the emission peak can be pressed into the receptacle is.
  • a secure conductive connection between the resistor and the respective emission tip can be produced in one embodiment of the emission tip arrangement according to the invention, the meandering the at least one series resistor is applied to the carrier body and / or contacted the spring element in the region of the recording by means of a conductive adhesive.
  • the arrangement with the carrier body is received by a grounded metal profile and the series resistor is electrically isolated from the metal profile, whereby the advantages of the technology of metal profiles can be used.
  • the metal profile is preferably made of an extrudable material, in particular of an aluminum material, and the insulation of the series resistance of the metal profile can be achieved, if possible, by means of an insulating encapsulation.
  • the metal profiles mentioned are always electrically grounded, which meant that a large part of the generated electrons and bipolar ions leaked to ground potential, which is why an expedient development of the invention is the mentioned metal profile with a thin, both mechanically, and electrically sufficiently resistant To provide insulating layer. If one chooses the volume resistivity of this insulating layer> 10 9 ⁇ , with sufficiently high electrical breakdown voltage, so flows for the electrode function relevant electrical resistive current through this resistance to ground potential.
  • a further advantageous embodiment of the emission tip arrangement according to the invention can be provided with a carrier body which has such a manipulatable in its production capacity relative to the metal profile, that the capacitive reactive current of the high voltage electrode compensates for the inductive reactive current of the high voltage transformer used in the operation of an active discharge electrode at least partially ,
  • the quality of the electrical insulation also increases the design-related quality of the capacitance (small loss angle tan ⁇ ) of the metal profile, both against the cast-in NEN carrier body as well as against the freestanding corona tip.
  • This is desirable in that high voltage transformers, which are inherently inductive components, are used to operate active AC discharge electrodes.
  • the required for operation of the transformer inductive reactive current is advantageously largely compensated in the present case, with suitable dimensioning of the metal profile of the capacitive reactive current of the capacitance of the entire electrode assembly. According to the laws of AC theory, this means that such modified metal profiles require smaller transformer designs for operating the AC electrodes, which form a unit when needed with the electrode.
  • the latter avoids the laying of high-voltage cables between the transformer and the electrode in an advantageous manner.
  • the primary-side AC supply voltage of the transformer can be either the usual mains voltage or the 24 VAC control voltage of electrical systems. In addition to these cost-effective solutions, supplying the transformer with electrical energy even with 24VDC control voltage is an option; however, then the necessary AC voltage for the transformer is to be generated via a semiconductor circuit.
  • the object is also achieved by a method for operating an arrangement of emission peaks with at least one emission peak, in particular an arrangement as described above, which is characterized in that the high voltage electrode is operated in AC voltage with a peak voltage which is lower than the breakdown voltage for the used geometry of the corona tip against the grounded metal profile provided with the insulating layer.
  • the capacitive coupling of the corona tip of the AC discharge electrode is exploited against ground potential.
  • the capacitive coupling between the corona tip and the electrically insulated on the surface, but internally grounded, metal profile improves the ion generation of ak- tive AC electrodes in addition, which equates to an additional substantial increase in efficiency.
  • the distance between the corona tip and the insulating layer must be selected so that the peak voltage of the AC operating high voltage is less than the breakdown voltage for the geometry of the corona tip against the grounded metal profile with the insulating layer. In this case, no further, isolated embedded earth conductors are necessary.
  • the object is achieved by a method for operating an arrangement of emission peaks with at least one emission peak, which is characterized in that the emission peak is formed as a spring element and a penetration is formed, through which the corona tip is supplied during operation, an auxiliary air quantity in that the degree of ionization of the amount of auxiliary air used can be significantly increased with AC discharge electrodes in comparison to known air-assisted active discharge electrodes.
  • the targeted directed to the corona tip auxiliary air supports the ion wind generated by the corona tip and is thus in turn ionized best possible, which ultimately makes the high degree of effect or ionization and the range effect of the offered ionized quantity of auxiliary air.
  • the emission tip forms a penetration, in particular the aforementioned penetration, through which the corona tip is supplied during operation an auxiliary air quantity or can be.
  • each freestanding spring tip with a high resistance in the order of 10 8 ⁇ , all resistors are individually connected to the common high voltage terminal, allows the use of such spring tips for both passively operated discharge, as well as active discharge electrodes, and also for DC charging electrodes in a potentially explosive environment.
  • DC charging electrodes with an arrangement of such freestanding emission spring tips also require a lower operating high voltage for generating the charging current required for the respective application.
  • auxiliary air flow With regard to the assistance by means of an auxiliary air flow, there is the advantage of a more efficient ionization of the auxiliary air quantity for increasing the range of the discharge effect of active discharge electrodes for medium and long ranges.
  • the auxiliary air can also be used only for continuous or interval efficient cleaning of the corona tip in a dirty environment. This is important for both discharge and charging electrodes.
  • Charging electrodes such as those used in so-called "top loading" ESA systems in printing presses, thereby obtain a significantly longer maintenance interval.
  • the active discharge with air support and at the same time Reduced AC operating voltage allows efficient use even in relatively tightly grounded machine environments, such as in packaging processes in the pharmaceutical industry, etc.
  • a long range of the discharge effect and the nearby grounded machine environment is no longer a contradiction.
  • 1 shows a sectional side view of two alternative electrode embodiments with the components required for the function, once without possible air support with metal profile (below) and once with metal profile and integrated air distribution channel for an optional air support (top).
  • 2 shows a carrier body with several built-in emission spring tips and applied resistors and separate air channels for each spring tip in a sectioned side view (right) and a top view from above
  • Fig. 3 is a sectional side view of the emission tip assembly according to the invention with
  • Air distribution duct from the top view of the
  • FIG. 1 shows two emission tip arrangements, designated as a whole by 100, in each of which an emission peak 1 can be seen, which is designed as a helical spring-like spring element.
  • the associated emission tip arrangement 100 has in each case a carrier body 7 made of an insulating material, this has for the emission peaks 1 only in the Fig.2 recognizable, high-impedance series resistors 13, wherein the at least one emission peak 1 respectively via the series resistor 13 to a high voltage terminal 14th is connectable.
  • the emission tips 1 with the associated carrier body 7 are each received in a metal profile 10, 10a.
  • the metal profile 10 has an air distribution channel 9 which continues into the air channel 8 of the carrier body 7 so that an auxiliary air quantity 15 (only visible in FIG. 3) of the emission peak 1 can be supplied via connected compressed air.
  • the lower view of Fig.l with the metal section 10a is missing the corresponding air distribution channel.
  • the emission tips for electrical discharging or charging ⁇ electrodes of Fig.l to 3 are operated with an AC or DC high voltage U g , the series resistor 13 is electrically insulated, for example, by a potting 6 (see Fig. 3) of the metal profile and, for example, in particular, the Carrier body 7 is arranged, which is embedded in a grounded metal profile 10.
  • the emission tip 1 is formed of spring metal and has a schhoff- spring spring-like shape.
  • the free end of the emission tip 1 is in the form of a corona tip 2, free above the carrier body 7 and / or above the respective metal profile 10, 10a and / or freely above the associated insulating encapsulation 6 (see Fig. 3), the latter facing away from the carrier body End portion 3 of the emission tip 1 is bent to the longitudinal axis of the extension direction towards. Therefore, during operation of the electrode, the end section 3 wears away from the corona tip 2 under almost constant geometrical conditions, which is to be equated with almost constant emission conditions for the corona current of the corona tip 2. It can be seen in FIGS. 2, 3 and in the upper illustration of FIG.
  • the auxiliary air amount 15 passes to improve the ion range over the air distribution channel 9 to each emission peak 1 and 1 corona peak.
  • the increase in the degree of ionization of the auxiliary air quantity 15 is effected via the geometric positioning of the corona tip 2 above the center of the emission tip 1.
  • the emission peak 1 causes; the auxiliary air quantity 15, together with the nozzle-like acting air outlet 5, if necessary, also only for cleaning or Serve to clean the corona tip 2.
  • the emission peaks 1 of the emission tip arrangement 100 shown in FIGS. 1 to 3 can protrude as far as possible beyond the casting 6 of the metal profile 10 in order to achieve the highest possible field strength at the corona tip 2. Nevertheless, there is no danger of injury since the emission peaks are designed as spring elements and are elastically flexible. It can also be seen in FIGS. 1 to 3 that the metal profiles 10, 10a connected to the ground potential 12 are provided with an insulating layer 11, so that the emission peaks 1 connected to the AC high voltage oppose the corona peak 2 via the adapted capacitive coupling the respective metal profile 10 or 10a, the bipolar ion production over conventional electrodes can more than double.
  • the support body 7 shown in Fig.l to 3 is made of an insulating plastic. 2 shows that the carrier body 7 is provided in such a way that the emission tips 1 can be pressed in each case accurately and without soldering process into receptacles 17 of the carrier body 7 which are open to one side, in that the diameter of the emission tips 1 elastically deformed.
  • the series resistor 13 is arranged meandering on the carrier body 7 and electrically contacted by means of a conductive adhesive 16, the metallic emission tip 1 in the region of the receptacle 17 open to one side.
  • the design-related capacity of the carrier body 7 against the metal profile 10 is dimensioned such that the capacitive reactive current with the electrode length largely compensates for the inductive reactive current of an AC high-voltage transformer (not shown) for operating the active discharge electrode, which enables very small transformers which together with the metal profile 10 can form a unit (not shown).
  • FIG. 3 the sectional view of a strand-like metal profile 10, which continues into the viewing plane, is provided with an insulating layer 11 and is U-shaped at its upper end for the observer.
  • a resistance body 7, for example, the mentioned carrier body 7, taken with air duct 8, at the metal profile 10 opposite end of an emission tip 1 is arranged.
  • the emission tip 1 is helically formed from a spring metal as a spring element, its free end tapers for the viewer with its last turns 4 upwards, the end portion 3 of its free end forms a corona tip 2, which is bent in the direction of the longitudinal central axis of the emission peak ,
  • the viewer's lower end of the emission tip 1 is connected with its cross section to the air channel 8, so that an auxiliary amount of air 15 can be supplied from the air distribution channel 9 in the cross section, leading to the air outlet 5 at the corona tip 2.
  • the latter has an earth connection 12.
  • the invention described above relates to an emission tip arrangement 100 on high-voltage electrodes for charging or discharging substrates, with at least one emission tip 1, and with a carrier body 7 of an insulating material, which has at least one high-impedance series resistor 13, wherein the at least one emission onsspitze 1 via the series resistor 13 to a high voltage terminal 14 can be connected.
  • the emission tip 1 is formed of a spring metal and forms an elastic spring element, and a free end of the emission tip 1 is a corona tip 2 both of the Sukör- by 7 and the respective metal profile 10, 10 a and the associated insulating grout 6 spaced freely.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Elimination Of Static Electricity (AREA)

Abstract

L'invention concerne un agencement de pointes d'émission (100), situé au niveau d'électrodes à haute tension pour charger ou décharger des substrats, qui comprend au moins une pointe d'émission (1) et un corps de support (7) en matière isolante qui comporte au moins une résistance série (13) fortement ohmique. L'au moins une pointe d'émission (1) est raccordée à une borne haute tension (14) par le biais de la résistance série (13). Pour disposer d'un agencement de pointes d'émission qui, bien qu'elles fassent saillie en principe sur une longueur quelconque de son élément de support (7) ou du profilé métallique (10, 10a) pourvu de l'enrobage isolant (6), ne cause aucune blessure en cas de contact accidentel ou intentionnel et permet ainsi une manipulation sûre avec une grande efficacité de l'agencement, la pointe d'émission (1) est constituée d'un métal à ressort et forme un élément à ressort élastique, et une extrémité libre de la pointe d'émission (1) est isolée, en tant que pointe corona (2), en étant espacée à la fois de l'élément de support (7) et du profilé métallique (10, 10a) respectif ainsi que de l'enrobage isolant (6). En outre, la portée d'une électrode de décharge est améliorée par le guidage d'une quantité d'air auxiliaire (15) directement sur la pointe corona (2).
EP16701246.7A 2015-01-22 2016-01-19 Agencement de pointes d'émission et son procédé de fonctionnement Active EP3248254B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015000800.5A DE102015000800B3 (de) 2015-01-22 2015-01-22 Emissionsspitzen-Anordnung und Verfahren zu deren Betrieb
PCT/EP2016/000082 WO2016116269A1 (fr) 2015-01-22 2016-01-19 Agencement de pointes d'émission et son procédé de fonctionnement

Publications (2)

Publication Number Publication Date
EP3248254A1 true EP3248254A1 (fr) 2017-11-29
EP3248254B1 EP3248254B1 (fr) 2021-01-06

Family

ID=55221378

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16701246.7A Active EP3248254B1 (fr) 2015-01-22 2016-01-19 Agencement de pointes d'émission et son procédé de fonctionnement

Country Status (4)

Country Link
US (1) US10727651B2 (fr)
EP (1) EP3248254B1 (fr)
DE (1) DE102015000800B3 (fr)
WO (1) WO2016116269A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019112335B4 (de) * 2019-05-10 2022-12-22 Gema Switzerland Gmbh Ionisationsvorrichtung mit einer Hochspannungswiderstandsanordnung
DE102020215523B4 (de) 2020-12-09 2023-12-21 Metallux Ag Elektrodenanordnung, Ionisationsvorrichtung und Verfahren zur Herstellung einer Elektrodenanordnung

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1735494A (en) * 1925-02-12 1929-11-12 Chapman Electric Neutralizer C Neutralizer bar
US1782340A (en) * 1929-04-06 1930-11-18 Chapman Electric Neutralizer C Discharge bar for neutralizing static electricity
US5128547A (en) * 1990-01-05 1992-07-07 Pfaff Ernest H Electrode for creating corona
US5369427A (en) * 1992-03-13 1994-11-29 Nippon Steel Corporation Electrostatic recording head
US5592357A (en) * 1992-10-09 1997-01-07 The University Of Tennessee Research Corp. Electrostatic charging apparatus and method
DE19711342C2 (de) 1997-03-18 1999-01-21 Eltex Elektrostatik Gmbh Aktive Entladeelektrode
EP0871267B1 (fr) * 1997-04-08 2001-06-13 Klaus Domschat Dispositif d'électrodes à haute tension
US5930105A (en) * 1997-11-10 1999-07-27 Ion Systems, Inc. Method and apparatus for air ionization
JP4903942B2 (ja) * 2001-03-15 2012-03-28 株式会社キーエンス イオン発生装置
JP2003284945A (ja) * 2002-03-28 2003-10-07 Sharp Corp 放電電極、非平衡プラズマ発生装置、有害物質分解装置及び空気調節装置
DE202004014952U1 (de) * 2004-09-25 2006-02-02 Dettke, Christa Elektrode für eine Rotationsdruckmaschine und elektrostatische Druckhilfe
DE102011007138B4 (de) * 2010-12-17 2018-04-05 Metallux Ag Elektrodenanordnung, Herstellungsverfahren
DE102011007136A1 (de) * 2011-04-11 2012-10-11 Hildebrand Technology AG Antistatikvorrichtung und zugehöriges Betriebsverfahren
JP2014229349A (ja) * 2013-05-17 2014-12-08 日本精密株式会社 除電器

Also Published As

Publication number Publication date
EP3248254B1 (fr) 2021-01-06
DE102015000800B3 (de) 2016-06-30
WO2016116269A1 (fr) 2016-07-28
US20170338630A1 (en) 2017-11-23
US10727651B2 (en) 2020-07-28

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