EP3245663A1 - Porte-échantillon destiné à être utilisé dans un microscope optique et dans un microscope à particules chargées - Google Patents

Porte-échantillon destiné à être utilisé dans un microscope optique et dans un microscope à particules chargées

Info

Publication number
EP3245663A1
EP3245663A1 EP16710017.1A EP16710017A EP3245663A1 EP 3245663 A1 EP3245663 A1 EP 3245663A1 EP 16710017 A EP16710017 A EP 16710017A EP 3245663 A1 EP3245663 A1 EP 3245663A1
Authority
EP
European Patent Office
Prior art keywords
sample
substrate
conductive layer
layer
sample holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP16710017.1A
Other languages
German (de)
English (en)
Inventor
Jacob Pieter Hoogenboom
Robert Jan MOERLAND
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Delmic BV
Original Assignee
Delmic BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Delmic BV filed Critical Delmic BV
Publication of EP3245663A1 publication Critical patent/EP3245663A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/34—Microscope slides, e.g. mounting specimens on microscope slides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes

Definitions

  • Sample holder for use in both a light optical microscope and a charged particle microscope
  • the invention relates to sample holder for inspecting a sample arranged on said holder with both a light optical microscope and a charged particle microscope.
  • the invention further relates to an apparatus comprising such a sample holder, which apparatus is arranged for inspecting a sample with both a light optical microscope and a charged particle microscope.
  • the invention relates to a method for preparing a sample for inspecting said sample with both a light optical microscope and a charged particle microscope.
  • Microscopic analysis of samples increasingly relies on the complimentary capabilities of multiple imaging techniques.
  • a prominent example is correlative light and electron microscope where a sample is analysed (mostly first) with the light microscope and identified regions of interest are subsequently inspected with an electron microscope. This can be done with separate stand-alone microscopes (which can also include multiple different forms of light microscopy, or even other inspection tools such as atomic force microscopy) , but also dedicated integrated microscopes exist. Such integrated microscopes are described, for example in WO2012008836.
  • the holder or substrate onto which the sample needs to be mounted preferably is arranged to be compatible with both inspection techniques, in particular holder or substrate preferably is arranged to allow inspection with both photons and charged particles .
  • optical transparent sample holders or substrates In light optical microscopy usually optical transparent sample holders or substrates are used.
  • sample plus substrate conductive is coating with a conductive material such as gold.
  • gold is not optically transparent.
  • tissue sections are typically very thin (20 - 200 nm) and also typically stained with heavy metal substances such as osmium tetroxide or uranyl acetate. This makes that charging of this kind of sample on a conductive substrate is negligible.
  • Such a conductive substrate may be a silicon wafer.
  • a silicon substrate is not transparent at the wavelengths used in light optical microscopy.
  • ITO Indium-Tin-Oxide
  • an ITO-coated glass substrate can be used for imaging a sample in an electron microscope. Even thin unstained biological samples can be imaged in an electron microscope, using an ITO-coated glass substrate.
  • the inventors have found that when studying the fluorescence from a sample on an ITO-coated glass substrate, the intensity of the fluorescent light from the sample is much lower than expected on the basis of the density of fluorescent molecules in the sample.
  • This decrease in the fluorescence intensity also referred to as quenching, poses a problem for using fluorescence microscopy in a correlative light and electron microscope. Said quenching may result in artefacts in an image obtained by said fluorescence microscopy.
  • the invention provides a sample holder for inspecting a sample arranged on said sample holder with both a light optical microscope and a charged particle microscope, wherein said sample holder comprises :
  • a substrate having a first side which is provided with a conductive layer, wherein said substrate and said conductive layer are at least substantially optically transparent, and
  • the spacing layer is substantially electrically insulating, at least substantially optically transparent, and is arranged on said conductive layer at a side facing away from said substrate.
  • the spacing layer comprises a layer of inorganic material .
  • the present invention thus provides a sample holder with provided at least a reduction of the quenching of the fluorescence, by arranging a spacing layer between the conductive layer on the substrate, and the sample.
  • Spacing layer' in this application also encompasses a multilayer stack.
  • the spacing layer is a substantially electrically insulating layer, preferably the spacing layer is a dielectric layer.
  • transparent conductors despite their transparency and near-zero imaginary part of the refractive index, can substantially dissipate the energy of an emitter of light, such as a fluorescent molecule, nanoparticle, or protein, by near-field interaction. This dissipation may be caused by Ohmic (resistive) dissipation of the induced local currents in the conductor.
  • an emitter of light for example a fluorescent molecule, nanoparticle, or protein
  • This near field contribution is not radiated out, but as the name suggests is only contained in a local (evanescent) field.
  • a non-radiative dissipation of the energy by a conductor takes place in close proximity (0 - 20 nanometers) from such a conductor. Therefore, for emitters within this close proximity, a substantial amount of their excited state energy is quenched in this way, leading to strongly reduced fluorescence yield and thus measured intensity.
  • the fluorescence measurement is strongly biased: the fluorescence from molecules close to the surface is very dim or not emitting light at all, while the fluorescence of molecules further away from the substrate appears with normal emission intensity.
  • any material with a finite conductivity will give resistive near-field quenching of the fluorescence of molecules which are arranged close to said material, even if the material is transparent for far-field radiation.
  • the spacing layer according to the invention which is an insulating layer, provides a distance between the conductive layer and the sample, and thereby reduces the resistive quenching of the fluorescence of the molecules in the sample which are close to the sample holder.
  • the substrate, conductive layer and the spacing layer are at least substantially optically transparent to allow to obtain an light optical image from a sample through said sample holder.
  • the EP1160192 publication discloses a work substrate which is made of a glass substrate onto which a thin ITO film (189 nm thick) is evaporated, and which is then dip-coated with a thin polystyrene film (15 nm thick) to increase the adhesion force between the object and the substrate.
  • a work substrate has various disadvantages when used in both a light optical microscope and a charged particle microscope: a.
  • a polymer layer, in particular a polystyrene film degrades in time when exposed to charged particles in general, and electrons in particular.
  • dip-coating usually provides a thin film on both the upper and the lower surface of the work substrate, which has a negative influence on an optical image of a sample when the image is obtained through the work substrate.
  • the polymer layer in particular a polystyrene film, may produce cathodoluminescence light, i.e. light generated by the electron beam falling on the polymer layer, which cathodoluminescence light from the polymer layer may interfere and/or hinder the acquisition of an optical image of a sample on top of said polymer layer.
  • a spacing layer comprises a layer of inorganic material, as in the present invention, one or more of the above disadvantages are at least partially obviated.
  • the sample holder of the invention is provided with a substantially electrically insulating spacing layer to provide a distance between the conductive layer on the substrate and the sample to reduce resistive quenching.
  • a substantially electrically insulating spacing layer may also be provided on a side of the sample which is arranged in contact with the sample holder.
  • the invention provides a sample holder with a sample arranged on said sample holder, for inspecting said sample with both a light optical microscope and a charged particle microscope, wherein said sample holder comprises:
  • a substrate having a first side which is provided with a conductive layer, wherein said substrate and said conductive layer are at least substantially optically transparent, and
  • the sample wherein said sample is provided with a spacing layer, wherein said spacing layer is substantially electrically insulating and at least substantially optically transparent, and wherein the spacing layer of said sample is arranged on said conductive layer at a side facing away from said substrate.
  • the insulating spacing layer is part of the sample, and as such is only present between the sample and the conductive layer.
  • the insulating spacing layer is substantially not directly exposed to the charged particle beam.
  • the spacing layer may comprise a polymer layer.
  • the thickness of the spacing layer is in a range of 7 - 30 nanometers, preferably 8 - 20 nanometers, most preferably 10 nanometer.
  • these preferred ranges in the thickness of the spacing layer proved to provide a substantial reduction in the quenching of the fluorescence when the sample is observed with a light optical microscope and in addition to enable to image said sample in a charged particle microscope, in particular a scanning electron microscope.
  • the requirement for an insulating spacing layer is at odds with the requirement for a conductive substrate for electron microscopy.
  • the amount of charging of a sample in an electron microscope depends on the number of ejected or absorbed electrons as a result of scanning with the primary beam of electrons. For a thinner sample, less collisions of the primary and back-scattered beams of electrons will take place, resulting in less charging. It should be noted that this also depends on electron energy: for higher energy, less collisions occur in a layer of specific thickness than at lower energy with the same current. However, inspection of biological samples with a scanning electron microscope typically takes place at low electron energy ( ⁇ 2keV) .
  • This optimized thickness may depend on the amount of fluorescence quenching that one still allows, and the electron energy and current needed for imaging .
  • the spacing layer is provided with a conductive grid which extends substantially through said spacing layer and connects to said conductive layer.
  • the conductive grid provides a conductive path from the sample to conductive layer on the substrate.
  • the conductive grid may be advantageous for electron beam inspection of a sample when using a relatively thick spacing layer and/or a high current for imaging. However, when observing the fluorescence in such a sample using in a light optical microscope, quenching of the fluorescence may occur at positions close to the conductive grid.
  • the spacing layer comprises alignment markers. Said alignment markers can be used to aid alignment of images taken with the light optical microscope and with the charged particle microscope. In an embodiment, the alignment markers are embedded into the spacing layer.
  • the sample holder according to the invention is preferably optimized for Correlative Light and Electron Microscopy (CLEM) and may suitably be used in both an integrated CLEM microscope, but also when shuttling between a stand-alone light microscope and a stand-alone electron microscope. At least in the latter case, it may be beneficial that thin alignment markers are arranged at, or embedded into the spacing layer. These thin alignment markers are for example of a thickness equal to or smaller than the thickness of the insulating spacing layer.
  • CLEM Correlative Light and Electron Microscopy
  • Such markers can be arranged by nano-patterning (for example using lithography, charged particle beam lithography, charged particle beam induced deposition) , or by deposition of nanoparticles from a solution (for example by spin-coating) , preferably prior to the deposition of the insulating spacing layer.
  • the alignment markers can then be used to aid registration between images taking with both the light microscope and the electron microscope.
  • the thin insulating spacing layer may itself be patterned, providing a supporting grid for the (tissue) sample.
  • the grid may aid above mentioned microscope registration and retrieval of regions of interest.
  • a patterned spacer may provide uncovered areas of the transparent conductive layer onto which a ground potential or voltage supply can be attached. Also with such a spacing grid, charging of the spacer layer can be completely prevented when imaging the sample over the mentioned uncovered areas.
  • a type of patterned spacing layer may also consist of a single island' on top of the transparent conductor, where the sample is then placed on top of this island.
  • the conductive layer, onto which the thin insulating spacing layer is supported should be connected to a reference potential, at least when the sample is illuminated with a charged particle beam, in particular an electron beam.
  • This reference potential may be ground potential, or, for imaging with a decelerating field, a negative bias potential. It is noted that for very thin insulating spacing layers (1 - 2 nanometers) direct charge tunnelling to the ground conductive layer may advantageously take place. However this thickness is too thin to substantially prevent quenching.
  • said substrate is a rigid substrate suitable for transfer between a stand-alone light optical microscope and a charged particle microscope.
  • the substrate comprises a glass substrate, for example a glass microscope slide provided with an indium- tin-oxide coating at least at a side of said slide which is used for carrying the sample.
  • the spacing layer comprises a layer of aluminium oxide or Si0 2 .
  • Such spacing layers may be grown by atomic layer deposition, vapour deposition, or by thin-film growth from solution or in a sol-gel process. Also other solid dielectric materials can be used as the insulating spacing layer.
  • sample holder or substrate design according to the invention may also be beneficial for use in other areas of nanotechnology where optically active or emissive materials need to be placed close to a transparent conductive surface.
  • a substrate needs to be patterned with a charged particle technique such as electron beam lithography, the substrate also needs to be conductive. If the patterning is then meant to make patterned structures of emissive material, it would also be beneficial to use the invented substrate design to prevent signal loss due to quenching while still allowing high-resolution lithography without charging.
  • the invention provides an apparatus for inspecting a sample with both a light optical microscope and a charged particle microscope, wherein said apparatus comprises a sample holder as described above.
  • said apparatus comprises a light optical microscope to observe the sample, wherein the light microscope is arranged to detect luminescence or fluorescence light emitted from the sample, a charged particle microscope to observe or modify the sample with a beam of charged particles, and a sample holder to support the sample in a position in which it can be observed with both microscopes, wherein the sample holder comprises:
  • a substrate having a first side which is provided with a conductive layer, wherein said substrate and said conductive layer are at least substantially optically transparent, and
  • the spacing layer is substantially electrically insulating, at least substantially optically transparent, and is arranged on said conductive layer at a side facing away from said substrate.
  • the spacing layer comprises a layer of inorganic material .
  • said apparatus comprises a light optical microscope to observe the sample, wherein the light microscope is arranged to detect luminescence or fluorescence light emitted from the sample, a charged particle microscope to observe or modify the sample with a beam of charged particles, and a sample holder to support the sample in a position in which it can be observed with both microscopes, wherein the sample holder comprises :
  • a substrate having a first side which is provided with a conductive layer, wherein said substrate and said conductive layer are at least substantially optically transparent, and
  • said sample is provided with a spacing layer, wherein said spacing layer is substantially electrically insulating, at least substantially optically transparent, and wherein the spacing layer of said sample is arranged on said conductive layer at a side facing away from said substrate.
  • the conductive layer is connected to a supply unit which is arranged to keep the conductive layer at a substantially constant voltage, at least during illumination of the sample holder with the beam of charged particles.
  • the constant voltage is a ground potential. In an alternative embodiment, the constant voltage is a negative bias voltage.
  • the invention provides a method for preparing a sample on a sample holder for inspecting said sample with both a light optical microscope and a charged particle microscope, wherein said sample holder comprises a substrate having a first side which is provided with a conductive layer, wherein said substrate and said conductive layer are at least substantially optically transparent, and wherein said method comprises the steps of:
  • spacing layer is substantially electrically insulating, at least substantially optically transparent
  • the spacing layer is arranged between the sample and the conductive layer.
  • the spacing layer comprises one or multiple polymer layers of desired thickness, which are deposited on said one side of the sample.
  • a layer may, for example, be arranged on said one side of the sample using a so-called Langmuir-Blodgett technique, which is described in more detail below with reference to figure 4.
  • Figures 1A and IB schematically depict basic designs of an apparatus for inspecting a sample with both a light optical microscope and a charged particle microscope
  • Figure 2 is a schematic representation of a sample on a sample holder and a graph schematically showing the Intensity of the fluorescence signal as a function of the distance to the transparent conductive layer of the sample holder,
  • Figure 3 is a schematic representation of a sample on a sample holder, wherein an insulating spacing layer is arranged between the sample and the transparent conductive layer of the sample holder, and a graph schematically showing the Intensity of the fluorescence signal as a function of the distance to the conductive layer of the sample holder,
  • Figure 4 is a schematic representation of a sample on a sample holder, wherein a insulating spacing layer is arranged between the sample and the transparent conductive layer of the sample holder, and the spacing layer is provided with a conductive grid,
  • Figure 5 is a schematic representation of a sample on a sample holder, wherein a insulating spacing layer is arranged between the sample and the transparent conductive layer of the sample holder, and the spacing layer is provided with alignment markers,
  • Figure 6 is a schematic representation of a sample on a sample holder, wherein a patterned insulating spacing layer is arranged between the sample and the conductive layer of the sample holder
  • Figure 7 is a schematic representation of the steps of a method for preparing a sample on a sample holder for inspecting said sample with both a light optical microscope and a charged particle microscope
  • FIG. 1A the basic design of a first example of an inspection apparatus 1 of the invention is explained. It comprises in combination at least an optical microscope 2, 3, 4 and a charged particle microscope 7, 8, such as an ion- or electron microscope.
  • the charged particle microscope 7, 8 comprises a source 7 for emitting a primary beam 9 of charged particles to a sample supported by a sample holder 10 according to the invention.
  • the sample holder 10 comprises a substrate having a first side which is provided with a conductive layer.
  • the conductive layer of the sample holder 10 is connected to ground potential 54 to keep the conductive layer at a substantially constant voltage, at least during illumination of the sample holder 10 with the beam of charged particles 9.
  • the sample holder 10 is at least substantially optically transparent to allow the transmission of light 12 from the sample to the optical microscope 2, 3, 4.
  • the sample on the sample holder 10 is arranged on an assembly of stages 5 which are known form the prior art and are therefor not shown in detail.
  • the stages 5 are arranged for moving the sample supported by the sample holder 10 with respect to the optical microscope 2, 3, 4, and/or the charged particle microscope 7, 8.
  • the charged particle microscope further comprises a detector 8 for detection of secondary charged particles 11 backscattered from the sample 10, or emitted, transmitted, or scattered from the sample 10 and possibly induced by the primary beam 9.
  • the charged particle microscope 7, 8 is substantially arranged inside a vacuum chamber 13.
  • the optical microscope 2, 3, 4 is equipped with a light collecting device 2 to receive in use fluorescence and/or luminescence light 12 emitted by the sample 10 and induced by the primary beam 9 of radiation, and to focus it on a photon-detector 4.
  • the light collecting device 2 may be an objective lens, a mirror or a glass fiber. It may also consist of a plurality of devices to arrange for collecting and focusing of the concerning luminescence light that is emitted by the sample 10, e.g. using a known per se CCD camera.
  • the optical microscope 2, 3, 4 is of an confocal type having a pinhole 3 between the light collecting device 2 and the photon detector 4.
  • the optical microscope 2, 3, 4 in this example is placed entirely inside the vacuum chamber 13 of the charged particle microscope 7, 8.
  • a controller 15 is provided and useable as an automation unit, e.g. in the form of a computer, including a personal computer provided with dedicated software, implementing one or more methods of use of the inspection apparatus.
  • the controller 15 may typically be provided with one or more screens, e.g. one screen or screen part for depicting the recorded optical image, and the other or another part of the same screen depicting an image, in particular of the same object, i.e. substrate, recorded via the charged particle part of the inspection apparatus 1.
  • FIG. IB a second example of an integrated system 20 is presented, in particular without a confocal detection system, in which the present invention may be applied.
  • the integrated system 20 of this second example comprises a Scanning Electron Microscope (SEM) 27 comprising a vacuum chamber 23 which is connected to a vacuum pump via a connector 35. Inside said vacuum chamber 23, a sample on a sample holder 30 is arranged, which sample can be irradiated with an electron beam 29. Secondary electrons 31 backscattered from the sample, or emitted, transmitted, or scattered from the sample are detected by a detector 28.
  • SEM Scanning Electron Microscope
  • the sample holder 30 comprises a substrate having a first side which is provided with a conductive layer.
  • the conductive layer of the sample holder 30 is connected to a supply unit 55 which is arranged to keep the conductive layer at a substantially constant voltage, at least during illumination of the sample holder 30 with the beam of charged particles 29.
  • the constant voltage is a negative bias voltage.
  • sample holder 30 is at least substantially optically transparent to allow the transmission of light 38 from the sample to a microscope objective 22.
  • the sample on the sample holder 30 is arranged on an assembly of stages 5 which are known form the prior art and are therefore not shown in detail.
  • the stages 5 are arranged for moving the sample with respect to the Scanning Electron Microscope 27, and/or the light optical microscope system.
  • the illumination and detection box 24 comprises a light source 21, for example a LED.
  • the emitted light 36 from het light source 21 is directed out of the illumination and detection box 24 via a half transparent mirror or dichroic mirror 25 and is directed into the vacuum chamber 23 via a window 32.
  • This light 37, 38 is coupled into the microscope objective 22 via a mirror 26, for illuminating the sample through the sample holder 30.
  • Light 37, 38 from the sample on the sample holder 30 is collected by the microscope objective 22 and is directed via the mirror 26 and the window 32 towards the illumination and detection box 24, and is imaged 39 via the half transparent mirror or dichroic mirror 25 onto a camera 33, for example a CCD detector.
  • a camera 33 for example a CCD detector.
  • the light beams for illuminating and imaging the sample on the sample holder 30 enter into and pass from the vacuum chamber 23 via a window 32 which in this example is arranged in a door 34 of said vacuum chamber 23.
  • the illumination and detection box 24 of the light optical microscope system is arranged outside vacuum chamber 23 and may be attached to the outside of the door 34. However, the illumination and detection part of the light optical microscope system may as well be included fully inside, e.g. attached to a bottom part, of the vacuum chamber 23.
  • the illumination and detection box 24 may be configured in other manners and may comprise any kind of microscope, including e.g. cathodoluminescence microscope, laser confocal scanning microscope and wide field microscope.
  • the camera 33 can be replaced by an other type of detector, such as a photodiode or a photomultiplier which measures the light intensity originating from a spot in the image.
  • a spot measuring detector the light intensity from various spots on the sample is measured by scanning over the sample on the sample holder 30, and the combination of such point to point measurements can provide an image of the sample.
  • the sample 40 is provided with fluorescent markers 41.
  • the sample holder 50 comprises a substrate 51 having a first side 52 which is provided with a conductive layer 53. Said substrate 51 and said conductive layer 53 are at least substantially optically transparent.
  • the substrate 51 is, for example, a glass substrate, such as a microscope slide.
  • the conductive layer 53 is, for example, a layer of Indium Tin Oxide (ITO) which is transparent to light.
  • ITO Indium Tin Oxide
  • the conductive layer 53 may also be made from alternative transparent conductors, such as, but not restricted to, Zinc Oxide, Diamond-like Carbon, Graphene or other 2D materials, or stacks of 2D materials like Graphene.
  • the conductive layer 53 of the sample holder 50 is connected to ground potential 54 to keep the conductive layer 53 at a substantially constant voltage, at least during illumination of the sample 40 on the sample holder 50 with a beam of charged particles.
  • the inventors found that when fluorescence from fluorescent markers 41 in the sample 40 is observed, the intensity of fluorescence from the fluorescent markers 41 is strongly biased: fluorescent markers 41 close to the conductive layer 53 (population a' ) emit very little fluorescent light, while fluorescent markers 41 further away from the conductive layer 53 (population ' ) emit fluorescent light at substantially the normal emission intensity I n .
  • the conductive layer 53 quenches the fluorescence from the fluorescent markers 41 in close proximity, which leads to a bias and/or to artefacts in the light microscopy results.
  • the area L in the graph represents the fluorescence signal loss due to the quenching effect.
  • FIG 3 shows a more detailed view of a sample 40 on a sample holder 50 according to the present invention.
  • the sample 40 is provided with fluorescent markers 41.
  • the sample holder 50 comprises a substrate 51 having a first side 52 which is provided with a conductive layer 53 which is connected to ground potential 54. Said substrate 51 and said conductive layer 53 are at least substantially optically transparent.
  • an insulating spacing layer 60 with a thickness D is provided between the conductive layer 53 and the sample 40.
  • the intensity of fluorescence from the fluorescent markers 41 still depends on the distance of the fluorescent markers 41 to the conductive layer 53.
  • the fluorescent markers 41 and in particular the fluorescent markers 41 at the side of the sample facing the sample holder 50 (population a' ) are separated from the conductive layer 53 over a distance equal to or larger than the thickness D of the spacing layer 60.
  • all fluorescent markers 41 emit fluorescent light at substantially the normal emission intensity I n .
  • the area L' in the graph representing the fluorescence signal loss due to the quenching effect is very small, and the fluorescence signal loss due to the quenching effect is negligible.
  • the thickness D of the spacing layer 60 is preferably such that it provides sufficient distance between the fluorescent markers 41 in the sample 40 and the conductive layer 53, and it still allows for charged particle beam inspection substantially without charging.
  • a minimal thickness Z 0 , q of the spacing layer can be defined based on an amount of fluorescence quenching that one still allows.
  • a maximum thickness Z charglng of the spacing layer can be defined based on the charged particle energy and current needed for imaging.
  • the thickness D of the spacing layer should be chosen to a value in between the minimal thickness Z 0 , q and the maximum thickness Z charglng .
  • the spacing layer 60 is part of the sample holder 50.
  • the sample holder 50 comprises a substrate 51, a conductive layer 53 and a spacing layer 60 which preferably comprises a layer of inorganic material, such as aluminium oxide or Silicon dioxide, with a thickness D of approximately 10 nm.
  • the sample 40 is arranged on top of sample holder 50, in particular on top of the spacing layer 60 thereof.
  • the insulating spacing layer 60 is preferably arranged on the conductive layer 53, using atomic layer deposition of aluminium oxide, for example.
  • the spacing layer 60 can be made of Si0 2 , which is also known as Silicon dioxide or Silica, other solid, transparent, dielectric materials .
  • the spacing layer 60 is part of the sample 40.
  • the sample holder 50 comprises a substrate 51 and a conductive layer 53.
  • the sample 40 is arranged on top of the sample holder 50, wherein the spacing layer 60 of the sample 40 is arranged in contact with the conductive layer 53 of the sample holder 50.
  • An example of a method to provide a spacing layer 60 on a side of the sample 40 is described in more detail below, with reference to figure 7.
  • the spacing layer 60 is provided with conductive channels 61 to provide a conductive path from the sample 40 to the conductive layer 53.
  • the conductive channels 61 are arranged to form a conductive grid in the spacing layer 60.
  • Providing the spacing layer 60 with such conductive channels 61 may be advantageous for thick spacing layers, for example when the minimal thickness Z 0 , q is larger than the maximum thickness Z charglng , and/or for imaging using high charge particle currents.
  • the spacing layer 60 is provided with alignment markers 62.
  • said alignment markers 62 can be observed in a light optical microscope and in a charged particle microscope.
  • the alignment markers 62 are imbedded in the insulating spacing layer 60 and are thin, that is smaller than the thickness of the insulating spacing layer 60.
  • the alignment markers 62 may also be substantially equal to the thickness of the spacing layer 60.
  • the insulating spacing layer 60' is patterned. That is, the spacing layer 60' provides a supporting grid for the sample 40. This grid may, just as the alignment markers 62, be used to aid registration and/or correlation between images taken by the light optical microscope and images taken by the charged particle microscope, and/or to find and retrieve regions of interest.
  • the patterned spacing layer 60' provides uncovered areas 63 of the conductive layer 53, which can make it easier to connect the conductive layer 53 to a supply unit 55 or to ground potential 54, which supply unit 55 or ground potential 54 is arranged to keep the conductive layer 53 at a substantially constant voltage, at least during illumination of the sample 40 on the sample holder 50 with the beam of charged particles .
  • the present invention also provides a method for preparing a sample, and in particular for provide a spacing layer 60 on a side of the sample 40.
  • the sample 40 comprises a thin tissue section or slice.
  • Such sections are usually cut with a diamond knife 70 from an epon-embedded biological tissue block 42.
  • the diamond knife 70 cuts of a thin section or slice, which then falls (arrow A) in a water bath 80.
  • the thin section or slice will be the sample 40 which will be arranged on a sample holder 50 in order to enable inspecting the sample 40 arranged on said sample holder 50 with both a light optical microscope and a charged particle microscope.
  • the sample 40 floats on the surface of the water 81 and can be picked up or transferred to a sample holder 50.
  • the sample 40 is coated with a thin insulating spacer, using a so-called Langmuir-Blodgett technique:
  • a first thin polymer coating 83 is deposited on one side of the sample 40. After coating the sample 40 with one monolayer of the first polymer surfactant 83 in the initial water bath 80, the sample 40 is removed from the water bath
  • the sample 40 is arranged in a second water bath 80' (arrow C) comprising water 81' and a second surfactant 82', wherein the thin polymer coating 83 is arranged to contact the second surfactant 82' .
  • a second thin polymer coating 84 is deposited at a side of the first thin polymer coating 83 facing away from the sample 40.
  • This procedure can be repeated to coat the side of the sample 40 with a fixed number of alternating polymer monolayers 83, 84 to reach a desired thickness.
  • Sample 40 in particular a thin tissue sample
  • Spacing layer 60 comprising a number of alternating polymer monolayers 83, 84 of a desired thickness
  • Conductive layer 53 in particular a transparent conductive layer (for example ITO)
  • Substrate 51 for example glass
  • fluorescent markers 41 Although the description above is mainly describing fluorescent markers 41, the invention is not limited to particular types of fluorescent markers but comprises also fluorescent or luminescent light emitters, such as fluorescent molecules, semiconductor nanoparticles, fluorescent proteins, doped nanoparticles, etc...
  • the invention relates to a sample holder for holding a sample, or to a sample arranged on said sample holder, for inspecting said sample with both a light optical microscope and a charged particle microscope.
  • the sample holder comprises a substrate having a first side which is provided with a conductive layer, wherein said substrate and said conductive layer are at least substantially optically transparent. Also the sample is arranged at the first side of the substrate, in particular at a side of the conductive layer facing away from the substrate. Between the conductive layer and the sample a spacing layer of a predetermined thickness is provided. Said spacing layer is substantially electrically insulating and at least substantially optically transparent.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

La présente invention se rapporte à un porte-échantillon qui permet de porter un échantillon, ou à un échantillon placé sur ledit porte-échantillon, afin d'examiner de près cet échantillon avec un microscope optique et avec un microscope à particules chargées. Le porte-échantillon comprend un substrat ayant un premier côté pourvu d'une couche conductrice, ledit substrat et ladite couche conductrice étant au moins sensiblement transparents optiquement. En outre, l'échantillon est disposé sur le premier côté du substrat, en particulier sur un côté de la couche conductrice orienté à l'opposé du substrat. Une couche d'espacement ayant une épaisseur prédéfinie se trouve entre la couche conductrice et l'échantillon. Ladite couche d'espacement est sensiblement isolante électriquement et au moins sensiblement transparente optiquement.
EP16710017.1A 2015-01-12 2016-01-12 Porte-échantillon destiné à être utilisé dans un microscope optique et dans un microscope à particules chargées Withdrawn EP3245663A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL2014110 2015-01-12
PCT/NL2016/050022 WO2016114656A1 (fr) 2015-01-12 2016-01-12 Porte-échantillon destiné à être utilisé dans un microscope optique et dans un microscope à particules chargées

Publications (1)

Publication Number Publication Date
EP3245663A1 true EP3245663A1 (fr) 2017-11-22

Family

ID=52463099

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16710017.1A Withdrawn EP3245663A1 (fr) 2015-01-12 2016-01-12 Porte-échantillon destiné à être utilisé dans un microscope optique et dans un microscope à particules chargées

Country Status (2)

Country Link
EP (1) EP3245663A1 (fr)
WO (1) WO2016114656A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019216945A1 (de) * 2019-11-04 2021-05-06 Carl Zeiss Microscopy Gmbh Hierarchische Markerstruktur für die korrelative Mikroskopie
WO2023280490A1 (fr) * 2021-07-08 2023-01-12 Xeos Medical Nv Système de réceptacle d'échantillons pour appareil d'imagerie permettant de visualiser des échantillons de tissus ex vivo

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001088100A (ja) 1999-09-24 2001-04-03 Japan Science & Technology Corp マイクロマニピュレーション方法
EP1998206A3 (fr) 2007-05-31 2009-12-09 FEI Company Porte-échantillon pour un appareil à particules chargées, son procédé d'utilisation, et appareil équipé pour une telle utilisation
NL2005080C2 (en) 2010-07-14 2012-01-17 Univ Delft Tech Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus.

Also Published As

Publication number Publication date
WO2016114656A1 (fr) 2016-07-21

Similar Documents

Publication Publication Date Title
EP2593957B1 (fr) Appareil d'inspection et porte remplaçable destinée à la chambre à vide de cet appareil d'inspection, et procédé de fonctionnement d'un appareil d'inspection
US8513604B2 (en) Detection device and particle beam device having a detection device
EP0925497A1 (fr) Dispositif et procede servant a detecter des defauts microscopiques dans des semi-conducteurs
JP2010513884A (ja) 微視的な電子デバイス及び生体についての温度及び温度分布の高分解能検出
JP6169506B2 (ja) 試料ホルダ、観察システム、および画像生成方法
JP7093836B2 (ja) 超解像蛍光顕微鏡及び蛍光寿命測定のためのデバイス及び方法
US20220172921A1 (en) Integrated optical and charged particle inspection apparatus
Narváez et al. Cathodoluminescence Microscopy of nanostructures on glass substrates
WO2019123467A1 (fr) Biocapteur à nanopuits-nanopores plasmonique améliorant la lumière et utilisation associée
US9304234B2 (en) Plasmonic dark field and fluorescence microscopy
WO2016114656A1 (fr) Porte-échantillon destiné à être utilisé dans un microscope optique et dans un microscope à particules chargées
NL1040131A (en) Integrated optical and charged particle inspection apparatus.
Fukuta et al. Cell structure imaging with bright and homogeneous nanometric light source
CN108507991B (zh) 一种双光子荧光的增强方法及其应用
US20170018399A1 (en) Device for correlative scanning transmission electron microscopy (stem) and light microscopy
Keizer et al. Simple and efficient scanning tunneling luminescence detection at low-temperature
Dunlap et al. Nanoscale imaging of quantum dot dimers using time-resolved super-resolution microscopy combined with scanning electron microscopy
JP2003503753A (ja) 近視野光学的探査装置
JP6797907B2 (ja) 有機エレクトロニクスデバイスの検査方法および分析方法、並びにその利用
An et al. Scanning optical probe microscopy with submicrometer resolution using an organic photodetector
US20110186756A1 (en) Method of fabricating a single photon source
JP6252930B2 (ja) 近接場光学観察装置、試料含有環境セル作製方法、走査電子光学顕微鏡及び走査電子光学顕微鏡の使用方法
Apollon et al. A Beginner’s Guide to Different Types of Microscopes
CN117007565A (zh) 一种深亚波长立体表征光子器件光学辐射信号的方法
Wojcik New Optical Methods for Characterization of Materials and Biology

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20170726

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20180306