EP3153706A1 - Pompe - Google Patents

Pompe Download PDF

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Publication number
EP3153706A1
EP3153706A1 EP15188477.2A EP15188477A EP3153706A1 EP 3153706 A1 EP3153706 A1 EP 3153706A1 EP 15188477 A EP15188477 A EP 15188477A EP 3153706 A1 EP3153706 A1 EP 3153706A1
Authority
EP
European Patent Office
Prior art keywords
pump
sliding layer
pump according
seal
piston
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15188477.2A
Other languages
German (de)
English (en)
Other versions
EP3153706B1 (fr
Inventor
Bernd Koci
Jonas Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15188477.2A priority Critical patent/EP3153706B1/fr
Priority to JP2016196997A priority patent/JP6509176B2/ja
Publication of EP3153706A1 publication Critical patent/EP3153706A1/fr
Application granted granted Critical
Publication of EP3153706B1 publication Critical patent/EP3153706B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/14—Pistons, piston-rods or piston-rod connections
    • F04B53/143—Sealing provided on the piston
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
    • C25D11/08—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing inorganic acids
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
    • C25D11/10—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing organic acids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/04—Measures to avoid lubricant contaminating the pumped fluid
    • F04B39/041—Measures to avoid lubricant contaminating the pumped fluid sealing for a reciprocating rod
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/02—Packing the free space between cylinders and pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F04B53/162—Adaptations of cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F04C18/0223—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving with symmetrical double wraps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/92—Surface treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/02—Light metals
    • F05C2201/021—Aluminium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/90—Alloys not otherwise provided for
    • F05C2201/903—Aluminium alloy, e.g. AlCuMgPb F34,37
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
    • F05C2225/04—PTFE [PolyTetraFluorEthylene]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
    • F05C2225/10—Polyimides, e.g. Aurum

Definitions

  • the present invention relates to a pump, in particular a vacuum pump, which comprises at least two relatively movable conveying elements, at least one arranged on one of the two conveying elements seal and at least partially applied to at least one of the conveying elements sliding layer.
  • the invention relates to the use of provided with a sliding layer components and at least one seal for the production of pumps, in particular vacuum pumps.
  • a piston pump for example, basically has a gap between the delivery chamber and the piston. This gap is filled in a fluid-sealed or -smiled design during operation of the pump by a fluid, usually oil or grease, wherein the fluid acts as a seal between the piston and the pumping chamber.
  • a fluid usually oil or grease
  • the fluid acts as a seal between the piston and the pumping chamber.
  • a disadvantage of such pumps is that the pumped with the pump media such as gases or vapors can react with the fluids used as a seal, which can reduce in particular the sealing effect. Another problem is especially in vacuum pumps in a contamination of the recipient by the fluids used.
  • the object of the present invention is therefore to provide a pump with a sliding seal, which overcomes the disadvantages described above, or at least represents an improvement over known solutions, so as to increase the life of the pump.
  • the pump is particularly characterized in that the seal comprises polyimide particles containing polytetrafluoroethylene material produced by hot press molding and sintering.
  • the seal is made of the polytetrafluoroethylene material.
  • the pump is characterized in that the sliding layer comprises an oxide layer formed by anodic oxidation in an oxalic acid-containing electrolyte.
  • the sliding layer is the oxide layer.
  • the sliding contact combination of the polytetrafluoroethylene material used according to the invention and the sliding layer not only generally increases the service life of pumps, but also extends the maintenance intervals provided for replacement of seals.
  • the polytetrafluoroethylene material used according to the invention as a seal, which contains polyimide particles and is produced by means of hot-forming presses or injection molding or extrusion molding and additionally subjected to a sintering process.
  • the seal has a very high dimensional stability and thus wear resistance at elevated temperatures on the one hand due to the very low porosity and on the other hand to the finely divided, non-agglomerated polyimide particles.
  • the layers according to the invention have a very low layer thickness tolerance, which lies in a range of at most ⁇ 5 ⁇ m , in particular approximately ⁇ 3 ⁇ m . That is, the oxide layer formed has a very flat surface, on the one hand, an exact seal in combination with the seal according to the invention and on the other hand results in low friction, since less unevenness must be overcome in a movement of the two conveying elements relative to each other.
  • the sliding layer shows only a slight edge effect.
  • These are bone-shaped protrusions at the edges of the layer, which prevent exact positioning of the seal on the sliding layer required for optimum sealing. Since it is basically unevenness in the Aufwerfept, these also increase the friction during the movement of the two conveying elements relative to each other.
  • the low edge effect also leads in combination with the dimensional stability of the seal according to the invention to a particularly low wear rate of both the sliding layer and the seal.
  • the pump is a spiral or scroll pump, in particular a spiral or scroll vacuum pump.
  • the conveying elements are then correspondingly two spiral elements which can be moved relative to one another and which each have a spiral shape on a carrier have an axis extending wall with a free end face and are arranged such that the walls sealingly engage to form delivery chambers.
  • the seals are arranged in this embodiment on the free end faces of the walls and the sliding layer is at least partially applied to the spiral elements.
  • sliding layer combinations each of which is formed from a seal arranged on the face side and an opposite region of a carrier provided with a sliding layer.
  • a seal for a spiral element is used, wherein the seal is preferably formed in one piece and in particular band-shaped.
  • the seals can be connected, for example, by gluing or screwing with the free end faces of the walls. It when the seals are inserted into a provided on the free end faces of the walls groove is particularly advantageous. If necessary, then a further fixation by gluing or screwing done.
  • the sliding layer is preferably applied to the surfaces of the carrier facing the conveying spaces, in particular over the entire surface. It may also be preferred if, in addition, the spirally running walls of the two spiral elements are at least partially covered with the sliding layer. The spiral elements can also be completely provided with the sliding layer.
  • a further advantageous embodiment of the pump according to the invention is a piston pump, in particular piston vacuum pump.
  • the conveying elements are then correspondingly a cylinder and a piston movable therein, wherein the seal is arranged on the piston and / or a cylinder inner wall and wherein the sliding layer is applied at least partially to the cylinder inner wall and / or the piston.
  • the sliding contact combination is preferably formed here from a piston-side seal and a cylinder inner wall provided with the sliding layer.
  • the seal is circumferentially disposed on an outer wall of the piston.
  • the seal is preferably formed in one piece and can be attached for example by gluing or screwing. It is particularly advantageous, however, if the piston outer wall has a groove which partially receives the seal. If necessary, the seal can be further fixed in the groove by means of gluing or screwing.
  • the piston may have more than one seal, it being advantageous if one seal is attached to an upper end of the piston outer wall and another is attached to a lower end of the piston outer wall.
  • the sliding layer is preferably applied only to the inner surface of the cylinder.
  • both the outer wall of the piston and the inner surface of the cylinder may be provided with the sliding layer.
  • the cylinder inner wall also has a seal, with reference being made to the above statements with regard to its attachment.
  • the polytetrafluoroethylene material of the seal has a proportion of polyimide particles between 1 and 25% by weight, preferably between 5 and 20% by weight, particularly preferably between 7 and 15% by weight, in particular between 8 and 12% by weight .-%, on.
  • the data refer to the dry weight of the material.
  • the polyimide particles have an average particle size between 1 and 50 ⁇ m , preferably between 5 and 40 ⁇ m , particularly preferably between 10 and 30 ⁇ m , in particular between 15 and 25 ⁇ m .
  • the particle size is determined by means of laser light scattering or laser diffraction. Furthermore, the determination of the particle size is carried out by measuring scanning electron micrographs.
  • the polyimide particles are present in particular in finely divided and substantially non-agglomerated form in the polytetrafluoroethylene material.
  • substantially it should be understood that only a very small number of polyimide particles are present in agglomerates of more than two polyimide particles in the material.
  • the polyimide particles are homogeneously embedded in a matrix of polytetrafluoroethylene, with no agglomerates of more than two polyimide particles occurring. The number of agglomerates is determined by evaluation of scanning electron micrographs.
  • the polytetrafluoroethylene material has a porosity between 0.1 and 5%, preferably between 0.1 and 2%, particularly preferably less than 1%.
  • the determination of the porosity takes place on the one hand by means of light micrographs and on the other hand by means of Electrochemical micrographs.
  • the homogeneous distribution of the polyimide particles in the polytetrafluoroethylene matrix and the low porosity of the polytetrafluoroethylene material are responsible in particular for its wear resistance. Both parameters can be controlled by the hot compression molding process, in which the raw material of the polytetrafluoroethylene material is heated directly in a controlled heated tool under pressure, and by the subsequent sintering process. If the porosity is less than 1%, the polytetrafluoroethylene material may have a density of up to 2.10 g / cm 3 .
  • the sliding layer has a layer thickness of between 10 and 50 ⁇ m , preferably between 15 and 40 ⁇ m , particularly preferably between 20 and 30 ⁇ m .
  • the determination of the layer thickness is made on the basis of electron micrographs.
  • the sliding layer is additionally impregnated with a dry lubricant, in particular polytetrafluoroethylene.
  • a dry lubricant in particular polytetrafluoroethylene.
  • the dry lubricant is stored in the layer, and there is no additional layer structure instead.
  • the dry lubricant in conjunction with the polytetrafluoroethylene material of the seal causes an improved sliding behavior and thus reduces the friction.
  • the incorporation of a dry lubricant offers the further advantage that, in the case of abrasive wear of the sliding layer, the sliding properties are substantially retained.
  • the sliding layer is coated with a dry lubricant, in particular polytetrafluoroethylene, whereby an additional layer structure occurs here.
  • a dry lubricant in particular polytetrafluoroethylene
  • the additionally applied dry lubricant improves the dry lubricating properties of the sliding layer and increases its service life.
  • Polytetrafluoroethylene has anti-adhesive properties and thus facilitates the cleaning of the sliding surface.
  • the sliding layer can also be aftertreated with salt solutions or with hot, in particular desalted, water. Such a treatment seals the pores in the overlay and increases their corrosion resistance.
  • the sliding layer preferably has an apparent hardness between 400 and 600 HV 0.025, in particular between 500 and 550 HV 0.025.
  • the hardness is measured according to the Vickers (HV) hardness test principle. In this case, an indenter in the form of a straight pyramid is pressed with a predetermined test force perpendicular to the surface of the sample in question. Because the base area If the pyramid is square, the Vickers hardness can be calculated from the area of the test impression. In the present case, the test load is 0.2452 Newton (HV 0.025). Since the sliding layer as described above can have a porosity between 0.1 and 5%, the hardness in the present case is also called sham or mixed hardness.
  • the apparent hardnesses of conventional layers formed, in particular, by anodic oxidation in a sulfuric acid-containing electrolyte, are generally lower by at least 50 HV 0.025.
  • a higher apparent hardness results in a higher wear resistance.
  • the abrasion stress is generated by two friction rollers, which are pressed onto the rotating sample with a defined force.
  • the sliding layer according to the invention showed at a force of 10 N (abrasive roller CS 10) only after more than 90 000 revolutions of the sample a wear of 12.5 ⁇ m. Conventional layers showed this wear after 60,000 revolutions under the same conditions.
  • the improved chemical resistance of the layer according to the invention compared to conventional layers formed in particular by anodic oxidation in a sulfuric acid containing electrolyte could be verified by the salt spray test. It is a standardized test according to DIN EN ISO 9227 for the evaluation of the corrosion protection effect of coatings. In the case of the layer according to the invention, the first detectable corrosion phenomena did not occur until after more than 2,000 hours of exposure time, whereas conventional layers showed these already after half the time.
  • the friction coefficient of the sliding layer is preferably less than 0.9, more preferably less than 0.8, in particular about 0.73, wherein the determination of the coefficient of friction with a pin-disk tribometer.
  • the contact pressure of the tribometer was 5 Newton at a speed of 6 m / min and 9000 U / min.
  • the sliding layer has a very high surface quality.
  • the mutually movable surfaces without sliding layer according to the invention have a mean roughness Ra of about 0.2 ⁇ m and an average roughness depth Rz of about 1.4 ⁇ m .
  • a slipping layer according to the invention with a typical layer thickness of about 20 ⁇ m is now distinguished in particular by the fact that the roughness Ra increases after application of the sliding layer by no more than 1.0 microns, preferably about 0.5 ⁇ m. In conventional layers, the increase in the average roughness Ra is typically at least 1.5 ⁇ m.
  • the average roughness depth Rz increases after the application of the overlay layer with a layer thickness of about 20 ⁇ m , preferably by less than 0.3 ⁇ m , more preferably by less than 0.2 ⁇ m , in particular by less than 0.1 ⁇ m , to. Typically, in conventional layers of comparable thickness, the average roughness Rz increases by at least 0.3 ⁇ m.
  • the conveying elements comprise a base material, which is formed at least partially from aluminum or an aluminum alloy and on which the sliding layer is applied.
  • the conveying elements made of aluminum or an aluminum alloy.
  • the base material is an aluminum alloy of the type AlMgSi.
  • aluminum alloys of the type AlMgSiMn, AlMgSiPb or AlZnMg Aluminum and aluminum alloys have been found to be particularly suitable for being subjected to anodic oxidation in an electrolyte containing oxalic acid and to form a sliding layer according to the invention.
  • Another aspect of the invention relates to the use of one or more seals made of a polyimide particles by hot press molding and sintered polytetrafluoroethylene material, and components which are at least partially coated with an oxide layer formed by anodic oxidation in an oxalic acid-containing electrolyte, for the production of sealing cooperating conveyor elements for pumps, in particular for vacuum pumps, as described above.
  • the conveying elements are spiral elements of a spiral or scroll pump or cylinders and pistons of a piston pump movable therein.
  • spiral or scroll pump 10 includes a housing 12 enclosed by a working space 23 having a drive portion 26.
  • working space 23 opens an inlet 11 to which a recipient or another pumping stage may be connected.
  • a fixed spiral element 13, which is connected to the housing 12 of the pump 10, and a circumferential spiral element 16 are arranged.
  • the spiral elements 13, 16 each comprise a carrier 14, 17 and connected thereto, about a respective axis spirally extending wall 15, 18.
  • the carrier 14 of the fixed scroll member 13 may also be formed as a part of the pump housing 12.
  • the outlet 22 of the pump 10 extends axially through the fixed scroll member 13.
  • the spiral elements are arranged such that the walls 15, 18 sealingly engage with the formation of delivery chambers 24.
  • the spiral walls 15, 18 each have an end face 19 on which a seal 20 is arranged.
  • the seals 20 touch the respective opposite carrier 14, 17, on which a sliding layer 21 is applied.
  • the sliding layer 21 is additionally impregnated with polytetrafluoroethylene.
  • Fig. 2 shows a detailed view of the spiral or scroll pump Fig. 1 in the region where the seal 20 contacts the carrier 14, 17 provided with the sliding layer 21.
  • the arrangement of the spiral elements 13, 16 is such that the seal 20 is pressed against the carrier 14, 17.
  • the impregnation of the sliding layer 21 is not shown because the polytetrafluoroethylene is incorporated in the sliding layer. An additional layer structure does not take place. The impregnation promotes the dry lubricating properties of the sliding layer 21 and additionally reduces their wear.
  • the supports 14, 17 and the spiral walls 15, 18 are each formed in one piece and consist of an aluminum alloy of the type AlMgSi.
  • the sliding layer 21 is an aluminum oxide layer formed by anodic oxidation in an oxalic acid electrolyte.
  • the sliding layer 21 is in particular applied to all the conveying chambers 24 facing surfaces of the spiral elements 13, 16.
  • the gaskets 20 are polytetrafluoroethylene containing 10% by weight of polyimide particles (based on the dry weight of the gasket) produced by hot press molding followed by sintering.
  • the average particle size of the polyimide particles is 25 ⁇ m .
  • an electric motor 31 which comprises a motor stator 30 (winding) and a motor rotor 32 (rotor).
  • the electric motor 31 drives a shaft 33 which defines an axis A W.
  • the orbiting scroll member 16 is coupled to the shaft 33 with an eccentric shaft 35 which defines the eccentric axis A E.
  • the axis A W of the shaft 33 and the eccentric axis A E are parallel to each other. Both shafts 33, 35 are supported by bearings 34.
  • the shaft 33 also includes balancing weights 36 to ensure optimum running smoothness of the pump 10.
  • the shaft 33 rotates, and connected to this eccentric shaft 35 performs a circulating movement about the axis A W of the shaft 33 from.
  • the spiral element 16 accordingly performs a centrally symmetric oscillation movement on a circular path about the axis A W.
  • the spiral element 16 does not rotate about its own axis A E , which is achieved by the person skilled in the known rotation prevention mechanisms.
  • sickle-shaped delivery chambers 24 that are closed off between the intermeshing spiral elements 13, 16 are formed which further reduce their volume inwards in the direction of the pump outlet 22. In this way, a compression of a gas sucked in via the inlet 11 occurs.
  • Fig. 3 shows a section of a cross section perpendicular to the shaft 33 of a spiral pump.
  • the cross-sectional plane extends through the intermeshing spiral walls 15, 18 of the spiral elements 13, 16.
  • the pump 10 according to Fig. 1 has a movable scroll member 16 whose carrier 17 is provided on one side only with a spiral wall 18, it is a one-sided pumping system, which is also referred to as a single-wrap pumping system.
  • Fig. 4 shows a partial representation of a spiral or scroll pump with a double-sided pumping system.
  • the orbiting scroll element 16 has a carrier 17, which is provided on both sides with spirally extending walls 18.
  • the fixed spiral element 13 comprises a further support 14 with a spiral wall 15. Both walls 18 of the rotating double-sided spiral element 16 engage with the walls 15 of the fixed spiral element 13 to form delivery chambers 24 in each other.
  • the end faces 19 of the walls 15, 18 are each provided with seals 20.
  • the facing to the delivery chambers 24 surfaces of the carrier 14, 17 are provided with a sliding layer 21, wherein the sliding layer 21 was additionally impregnated with polytetrafluoroethylene.
  • the materials of the spiral elements 13, 16 and the composition of the sliding layer 21 and the seal 20 as well as with regard to the operation of the pump, the comments on the Fig. 1 and 2 to get expelled.
  • the double-sided pumping system for pumping a fluid has twice the number of pumping chambers 24 available.
  • Fig. 5 shows a schematic sectional view of a piston pump 100 according to the invention.
  • a fixed to a piston rod 105 piston 104 is movably mounted in a cylinder 102.
  • the piston 104 and the cylinder 102 together form a delivery chamber 124.
  • the piston 104 has both at a lower edge 106 and at an upper edge 108 a seal 120 which grinds against an inner wall 103 of the cylinder 102.
  • the cylinder inner wall 103 is provided with a sliding layer 121, which was additionally impregnated with polytetrafluoroethylene.
  • the seal 120 is in the form of a narrow band extending circumferentially about the piston 104.
  • An inner sealing leg 120b of the seal 120 is received by a respective groove 109 at the lower and upper edges 106, 108 of the piston 104.
  • a free seal leg 120a extends outside the groove 109 and is angled since it is wider than the distance between the cylinder inner wall 103 and the piston 104.
  • Both the cylinder 102 and the piston 104 are made of AlMgSi type aluminum alloy.
  • the seal 120 and the sliding layer 121 are formed according to the invention, as described above, in particular with reference to FIG Fig. 2 , is described.
  • the piston 104 rises and falls, wherein the delivery chamber 124 is correspondingly reduced in size and enlarged, and a fluid is drawn in or expelled while timed opening and closing of unillustrated valves.
  • the free legs 120a of the seals 120 resting against the cylinder inner wall 103 are subject to constant friction.
  • the material combination according to the invention of the special sliding layer 121, which has a very smooth surface, and the special resistant polytetrafluoroethylene seal causes a reduction of this friction.
  • the abrasion on the side of the seal 120 is reduced, resulting in a longer life of the seal and thus prolonged Maintenance intervals leads.
  • the abrasion on the side of the cylinder inner wall 103 is minimized and thus the life of the pump 100 is increased overall.
  • piston pumps which had a seal and sliding layer formed according to the invention were compared with conventional piston pumps of identical construction.
  • the conventional pumps had a standard coating formed by anodic oxidation in a sulfuric acid-containing electrolyte.
  • the seals of the conventional pumps consisted of either a non-sintered polytetrafluoroethylene material or a polytetrafluoroethylene material, which differed from the embodiment according to the invention in terms of the polyimide content and / or the Polyimidpumble distress.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP15188477.2A 2015-10-06 2015-10-06 Pompe Active EP3153706B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15188477.2A EP3153706B1 (fr) 2015-10-06 2015-10-06 Pompe
JP2016196997A JP6509176B2 (ja) 2015-10-06 2016-10-05 ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15188477.2A EP3153706B1 (fr) 2015-10-06 2015-10-06 Pompe

Publications (2)

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EP3153706A1 true EP3153706A1 (fr) 2017-04-12
EP3153706B1 EP3153706B1 (fr) 2020-06-17

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EP (1) EP3153706B1 (fr)
JP (1) JP6509176B2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3617512A1 (fr) * 2018-08-28 2020-03-04 Pfeiffer Vacuum Gmbh Pompe à vide du distributeur rotatif
EP3940234A2 (fr) 2021-09-29 2022-01-19 Pfeiffer Vacuum Technology AG Pompe et procédé de fabrication d'une couche antifriction
EP4390130A1 (fr) 2022-12-21 2024-06-26 Pfeiffer Vacuum Technology AG Pompe et procédé de fabrication d'un joint

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7166075B2 (ja) * 2018-05-31 2022-11-07 サンデン株式会社 スクロール圧縮機
EP4174285B1 (fr) 2022-12-22 2024-10-23 Pfeiffer Vacuum Technology AG Pompe à vide à spirales
EP4270732A3 (fr) 2023-08-22 2024-03-06 Pfeiffer Vacuum Technology AG Pompe à vide à spirales avec moteur synchrone à aimants permanents et procédé de fabrication de la pompe à vide à spirales

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU6808381A (en) * 1975-12-24 1981-06-25 Commonwealth Scientific And Industrial Research Organisation Two-component piston ring
GB2130685A (en) * 1982-11-25 1984-06-06 Rivapompe Sa Piston pump
JP2001165072A (ja) * 1999-12-08 2001-06-19 Hitachi Ltd 圧縮機用チップシール

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JPH0631624B2 (ja) 1985-11-11 1994-04-27 株式会社豊田自動織機製作所 スクロ−ル型コンプレツサ−のシ−ル部材
JP2615284B2 (ja) 1991-08-19 1997-05-28 三菱重工業 株式会社 アルミニウム複合品の製造方法
JPH05172066A (ja) 1991-12-20 1993-07-09 Toshiba Corp スクロール流体圧縮機
JPH08261173A (ja) * 1995-03-23 1996-10-08 Matsushita Electric Ind Co Ltd スクロール圧縮機
JPH0942054A (ja) * 1995-07-28 1997-02-10 Sakushiyon Gas Kikan Seisakusho:Kk スターリング機関
JP2000257555A (ja) 1999-03-08 2000-09-19 Toyota Autom Loom Works Ltd 圧縮機
JP4128442B2 (ja) * 2002-12-27 2008-07-30 株式会社日立製作所 シール材及びそれを備えたスクロール流体機械
JP2005036198A (ja) * 2003-06-30 2005-02-10 Tokico Ltd シール材及びそれを備えたスクロール流体機械
JP2005315142A (ja) * 2004-04-28 2005-11-10 Hitachi Koki Co Ltd オイルフリースクロール形真空ポンプ
JP2009108748A (ja) * 2007-10-30 2009-05-21 Panasonic Corp スクロール圧縮機

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU6808381A (en) * 1975-12-24 1981-06-25 Commonwealth Scientific And Industrial Research Organisation Two-component piston ring
GB2130685A (en) * 1982-11-25 1984-06-06 Rivapompe Sa Piston pump
JP2001165072A (ja) * 1999-12-08 2001-06-19 Hitachi Ltd 圧縮機用チップシール

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3617512A1 (fr) * 2018-08-28 2020-03-04 Pfeiffer Vacuum Gmbh Pompe à vide du distributeur rotatif
EP3940234A2 (fr) 2021-09-29 2022-01-19 Pfeiffer Vacuum Technology AG Pompe et procédé de fabrication d'une couche antifriction
EP3940234A3 (fr) * 2021-09-29 2022-07-13 Pfeiffer Vacuum Technology AG Pompe et procédé de fabrication d'une couche antifriction
EP4390130A1 (fr) 2022-12-21 2024-06-26 Pfeiffer Vacuum Technology AG Pompe et procédé de fabrication d'un joint

Also Published As

Publication number Publication date
JP2017101655A (ja) 2017-06-08
EP3153706B1 (fr) 2020-06-17
JP6509176B2 (ja) 2019-05-08

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