JP6509176B2 - ポンプ - Google Patents
ポンプ Download PDFInfo
- Publication number
- JP6509176B2 JP6509176B2 JP2016196997A JP2016196997A JP6509176B2 JP 6509176 B2 JP6509176 B2 JP 6509176B2 JP 2016196997 A JP2016196997 A JP 2016196997A JP 2016196997 A JP2016196997 A JP 2016196997A JP 6509176 B2 JP6509176 B2 JP 6509176B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- sliding layer
- seal
- spiral
- piston
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012791 sliding layer Substances 0.000 claims description 67
- 239000000463 material Substances 0.000 claims description 34
- -1 polytetrafluoroethylene Polymers 0.000 claims description 32
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 31
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 31
- 239000010410 layer Substances 0.000 claims description 29
- 239000002245 particle Substances 0.000 claims description 24
- 239000004642 Polyimide Substances 0.000 claims description 20
- 229920001721 polyimide Polymers 0.000 claims description 20
- 238000012546 transfer Methods 0.000 claims description 19
- 229910000838 Al alloy Inorganic materials 0.000 claims description 10
- 239000003792 electrolyte Substances 0.000 claims description 10
- 230000003647 oxidation Effects 0.000 claims description 10
- 238000007254 oxidation reaction Methods 0.000 claims description 10
- 238000005245 sintering Methods 0.000 claims description 7
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 6
- 239000004327 boric acid Substances 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000002048 anodisation reaction Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 description 11
- 238000012360 testing method Methods 0.000 description 10
- 239000000314 lubricant Substances 0.000 description 7
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 5
- 239000000969 carrier Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 239000005871 repellent Substances 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- 230000002940 repellent Effects 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 239000012267 brine Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000002356 laser light scattering Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003534 oscillatory effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/14—Pistons, piston-rods or piston-rod connections
- F04B53/143—Sealing provided on the piston
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
- C25D11/08—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing inorganic acids
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
- C25D11/10—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing organic acids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/04—Measures to avoid lubricant contaminating the pumped fluid
- F04B39/041—Measures to avoid lubricant contaminating the pumped fluid sealing for a reciprocating rod
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/02—Packing the free space between cylinders and pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
- F04B53/162—Adaptations of cylinders
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
- F04C18/0223—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving with symmetrical double wraps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/005—Axial sealings for working fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2230/00—Manufacture
- F04C2230/90—Improving properties of machine parts
- F04C2230/92—Surface treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/02—Light metals
- F05C2201/021—Aluminium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/90—Alloys not otherwise provided for
- F05C2201/903—Aluminium alloy, e.g. AlCuMgPb F34,37
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
- F05C2225/04—PTFE [PolyTetraFluorEthylene]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
- F05C2225/10—Polyimides, e.g. Aurum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Inorganic Chemistry (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Rotary Pumps (AREA)
Description
互いに相対的に移動可能な少なくとも二つの搬送要素を有し、これらは、少なくとも一つの搬送室を形成しつつ密に構成されるよう設けられており、
両方の搬送要素に設けられた少なくとも一つのシールを有し、そして、
複数の搬送要素の少なくとも一つに少なくとも領域的に取り付けられた、各シールと協働する滑り層を有する。
11 インレット
12 ハウジング
13 固定的なスパイラル要素
14 固定的なスパイラル要素のキャリア
15 固定的なスパイラル要素のスパイラル形状の壁部
16 回転するスパイラル要素(オービター(独語:Orbiter))
17 回転するスパイラル要素のキャリア
18 回転するスパイラル要素のスパイラル形状の壁部
19 正面側
20 シール
21 滑り層
22 アウトレット
23 作動室
24 搬送室
26 作動領域
30 モーターステーター
31 電動モーター
32 モーターローター
33 シャフト
34 支承部
35 偏心部
36 バランス重り
AW シャフトの軸
AE 偏心軸
100 ピストンポンプ
102 シリンダー
103 シリンダー内壁部
104 ピストン
105 ピストンロッド
106 下方の縁部
108 上方の縁部
109 溝
120 シール
120a 自由なシール脚部
120b 内側のシール脚部
121 滑り層
124 搬送室
Claims (14)
- ポンプ(10,100)、又は真空ポンプであって、
互いに相対的に可動の少なくとも二つの搬送要素(13,16,102,104)を有し、これらが、少なくとも一つの搬送室(24,124)を形成しつつ密に構成されているよう設けられており、
両方の搬送要素(13,16,102,104)の一方に設けられた少なくとも一つのシール(20,120)を有し、そして、
搬送要素(13,16,102,104)の少なくとも一つに少なくとも領域的に取り付けられた、各シール(20,120)と協働する滑り層(21,121)を有するポンプにおいて、
シール(20,120)が、ポリイミド粒子を含み、熱間成形プレス及び焼結によって製造されるポリテトラフルオロエチレン材料を有すること、及び
滑り層(21,121)が、蓚酸を含む電解液内のアノード酸化によって形成される酸化物層を有することを特徴とするポンプ。 - ポンプが、スパイラルポンプ又はスクロールポンプ(10)であり、又はスパイラル真空ポンプ又はスクロール真空ポンプであり、
その際、搬送要素が、互いに相対的に移動可能な二つのスパイラル要素(13,16)であり、これらが其々キャリア(14,17)上に、一つの自由な正面側(19)を有しかつ軸の周りに推移するスパイラル形状の壁部(15,18)を有し、そして壁部(15,18)が、搬送室(24)を形成しつつ互いに密に係合し合うよう設けられており、
その際、シール(20)が、壁部(15,18)の自由な正面側(19)に設けられており、そして、
滑り層(21)が、少なくとも領域的に、スパイラル要素(13,16)に取り付けられていることを特徴とする請求項1に記載の真空ポンプ。 - ポンプが、ピストンポンプ(100)、又はピストン真空ポンプであり、
その際、搬送要素が、シリンダー(102)及びこの中を移動可能なピストン(104)であり、
その際、シール(120)がピストン(104)及び/又はシリンダー内壁部(103)に設けられており、及び、
その際、滑り層(121)が、シリンダー内壁部(103)及び/又はピストン(104)に少なくとも領域的に設けられていることを特徴とする請求項1に記載のポンプ。 - ポリテトラフルオロエチレン材料が、材料の乾燥重量に関し、1から25重量%、5から20重量%、7から17重量%、又は8から12重量%のポリイミド粒子の部分を有することを特徴とする請求項1から3のいずれか一項に記載のポンプ。
- ポリイミド粒子が、1から50μm、5から40μm、10から30μm、又は15から25μmの平均粒子サイズを有することを特徴とする請求項1から4のいずれか一項に記載のポンプ。
- ポリイミド粒子が、細かく分散された、基本的に集塊されていない形式でポリテトラフルオロエチレン材料に含まれていることを特徴とする請求項1から5のいずれか一項に記載のポンプ。
- ポリテトラフルオロエチレン材料が、0.1から5%、0.1から2%、又は1%よりも低い空孔率を有することを特徴とする請求項1から6のいずれか一項に記載のポンプ。
- 滑り層(21,121)が、10から50μm、15から40μm、又は20から30μmの層厚さを有することを特徴とする請求項1から7のいずれか一項に記載のポンプ。
- 滑り層(21,121)がポリテトラフルオロエチレンによってコーティング又は防水加工されていることを特徴とする請求項1から8のいずれか一項に記載のポンプ。
- 滑り層(21,121)が、400から600HV0.025、又は500から550HV0.025の見かけ硬さを有することを特徴とする請求項1から9のいずれか一項に記載のポンプ。
- 棒・円板・トライボメータによって検出した、滑り層(21,121)の摩擦係数が、0.9より低く、0.8より低く、又は約0.73であることを特徴とする請求項1から10のいずれか一項に記載のポンプ。
- 搬送要素(13,16,102,104)が、ベース材料を有し、このベース材料が、少なくとも部分的にアルミニウムから、又はアルミニウム合金から形成されており、かつこのベース材料に滑り層(21,121)が取り付けられていることを特徴とする請求項1から11のいずれか一項に記載のポンプ。
- 搬送要素(13,16,102,104)のベース材料が、AlMgSiの形式のアルミニウム合金であることを特徴とする請求項12に記載のポンプ。
- ポリイミド粒子を含み、熱間成形プレス及び焼結によって製造されるポリテトラフルオロエチレン材料からなる一または複数のシール(20,120)と、
少なくとも領域的に、蓚酸を含む電解液内のアノード酸化によって形成される滑り層によってコーティングされている部材の、
請求項1から13のいずれか一項に記載のポンプ(10,100)、又は真空ポンプの為の密に協働する複数の搬送要素(13,16,102,104)の製造のための使用。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15188477.2 | 2015-10-06 | ||
EP15188477.2A EP3153706B1 (de) | 2015-10-06 | 2015-10-06 | Pumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017101655A JP2017101655A (ja) | 2017-06-08 |
JP6509176B2 true JP6509176B2 (ja) | 2019-05-08 |
Family
ID=54260680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016196997A Active JP6509176B2 (ja) | 2015-10-06 | 2016-10-05 | ポンプ |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP3153706B1 (ja) |
JP (1) | JP6509176B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7166075B2 (ja) * | 2018-05-31 | 2022-11-07 | サンデン株式会社 | スクロール圧縮機 |
EP3617512B1 (de) * | 2018-08-28 | 2022-11-30 | Pfeiffer Vacuum Gmbh | Drehschieber-vakuumpumpe |
EP3940234B1 (de) | 2021-09-29 | 2023-08-23 | Pfeiffer Vacuum Technology AG | Pumpe und verfahren zur herstellung einer gleitschicht |
EP4390130A1 (de) | 2022-12-21 | 2024-06-26 | Pfeiffer Vacuum Technology AG | Pumpe und verfahren zur herstellung einer versiegelung |
EP4174285A1 (de) | 2022-12-22 | 2023-05-03 | Pfeiffer Vacuum Technology AG | Spiralvakuumpumpe |
EP4270732A3 (de) | 2023-08-22 | 2024-03-06 | Pfeiffer Vacuum Technology AG | Scroll-vakuumpumpe mit permanentmagnet-synchronmotor und verfahren zur herstellung der scroll-vakuumpumpe |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU6808381A (en) * | 1975-12-24 | 1981-06-25 | Commonwealth Scientific And Industrial Research Organisation | Two-component piston ring |
FR2536797B1 (fr) * | 1982-11-25 | 1987-08-21 | Rivapompe Sa | Pompe a cylindre et a piston utilisable comme pompe a vide pour asservissement des freins d'un vehicule |
JPH0631624B2 (ja) | 1985-11-11 | 1994-04-27 | 株式会社豊田自動織機製作所 | スクロ−ル型コンプレツサ−のシ−ル部材 |
JP2615284B2 (ja) | 1991-08-19 | 1997-05-28 | 三菱重工業 株式会社 | アルミニウム複合品の製造方法 |
JPH05172066A (ja) | 1991-12-20 | 1993-07-09 | Toshiba Corp | スクロール流体圧縮機 |
JPH08261173A (ja) * | 1995-03-23 | 1996-10-08 | Matsushita Electric Ind Co Ltd | スクロール圧縮機 |
JPH0942054A (ja) * | 1995-07-28 | 1997-02-10 | Sakushiyon Gas Kikan Seisakusho:Kk | スターリング機関 |
JP2000257555A (ja) | 1999-03-08 | 2000-09-19 | Toyota Autom Loom Works Ltd | 圧縮機 |
JP3572481B2 (ja) * | 1999-12-08 | 2004-10-06 | 株式会社日立製作所 | 圧縮機用チップシール |
JP4128442B2 (ja) * | 2002-12-27 | 2008-07-30 | 株式会社日立製作所 | シール材及びそれを備えたスクロール流体機械 |
JP2005036198A (ja) * | 2003-06-30 | 2005-02-10 | Tokico Ltd | シール材及びそれを備えたスクロール流体機械 |
JP2005315142A (ja) * | 2004-04-28 | 2005-11-10 | Hitachi Koki Co Ltd | オイルフリースクロール形真空ポンプ |
JP2009108748A (ja) * | 2007-10-30 | 2009-05-21 | Panasonic Corp | スクロール圧縮機 |
-
2015
- 2015-10-06 EP EP15188477.2A patent/EP3153706B1/de active Active
-
2016
- 2016-10-05 JP JP2016196997A patent/JP6509176B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2017101655A (ja) | 2017-06-08 |
EP3153706B1 (de) | 2020-06-17 |
EP3153706A1 (de) | 2017-04-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6509176B2 (ja) | ポンプ | |
US9605677B2 (en) | Anti-wear coatings for scroll compressor wear surfaces | |
EP2740974B1 (en) | Mechanical seal | |
EP3176436B1 (en) | Slide member, refrigerant compressor incorporating slide member, refrigerator and air conditioner | |
KR100934843B1 (ko) | 습동부재용 조성물, 습동부재 및 유체기계 | |
JP3918814B2 (ja) | 流体機械 | |
JP2006283706A (ja) | 摺動部材用組成物、摺動部材及び流体機械 | |
EP2863080B1 (en) | Half bearing | |
US20050181194A1 (en) | Plain bearing composite material | |
JP2013015092A (ja) | 圧縮機 | |
JP3885800B2 (ja) | 摺動部材及びその製造方法 | |
WO2015011875A1 (ja) | スクロール圧縮機 | |
KR20080042124A (ko) | 냉매 압축기, 냉각 시스템 및 냉장고 | |
JPS61197794A (ja) | 容積形オイルフリ−式ガス圧送ポンプ | |
US20200072215A1 (en) | Rotary vane vacuum pump | |
US20210222693A1 (en) | Orbiter vacuum pump capable of dry-running | |
JP2005325842A (ja) | 流体機械 | |
JP7179727B2 (ja) | 摩擦片、そのような摩擦片を含む機械システムおよび実装方法 | |
CN110701053A (zh) | 涡旋压缩机用耐磨件和涡旋压缩机 | |
US20230087184A1 (en) | Compressor | |
CN209687716U (zh) | 泵部件、液环泵、旋转叶片泵和螺杆泵 | |
EP3348833B1 (en) | Refrigerant compressor and refrigeration device including refrigerant compressor | |
JP2021014811A (ja) | スクロール型流体機械 | |
JP2004076685A (ja) | スクロール形流体機械 | |
JP2019525059A (ja) | 潤滑手段を備えた車両ブレーキ装置ピストンポンプ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170919 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170927 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20171205 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180606 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20180904 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190306 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190402 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6509176 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |