EP3152173A1 - Verfahren zur herstellung eines substrats mit einer funktionellen schicht unter verwendung einer opferschicht - Google Patents

Verfahren zur herstellung eines substrats mit einer funktionellen schicht unter verwendung einer opferschicht

Info

Publication number
EP3152173A1
EP3152173A1 EP15732834.5A EP15732834A EP3152173A1 EP 3152173 A1 EP3152173 A1 EP 3152173A1 EP 15732834 A EP15732834 A EP 15732834A EP 3152173 A1 EP3152173 A1 EP 3152173A1
Authority
EP
European Patent Office
Prior art keywords
layer
radiation
heat treatment
functional layer
sacrificial layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15732834.5A
Other languages
English (en)
French (fr)
Inventor
Andriy Kharchenko
Bernard Nghiem
Nicolas Nadaud
Lorenzo CANOVA
Arnaud Huignard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Publication of EP3152173A1 publication Critical patent/EP3152173A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
    • C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3607—Coatings of the type glass/inorganic compound/metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3689—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one oxide layer being obtained by oxidation of a metallic layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/007—Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C23C14/5813—Thermal treatment using lasers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/212—TiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/213—SiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C03C2217/425—Coatings comprising at least one inhomogeneous layer consisting of a porous layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/71—Photocatalytic coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/732—Anti-reflective coatings with specific characteristics made of a single layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/113—Deposition methods from solutions or suspensions by sol-gel processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/328—Partly or completely removing a coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/355—Temporary coating

Definitions

  • the invention relates to obtaining substrates coated with at least one functional layer.
  • Some functional layers require heat treatments, either to improve their properties or even to give them their functionality.
  • Photocatalytic layers based on titanium oxide are also more active after heat treatment because the latter promotes crystal growth. Heat treatments also create porosity in silica-based layers to lower their light reflectance.
  • Application WO 2010/139908 discloses a method of heat treatment by means of radiation, in particular infrared laser radiation focused on the layer. Such a treatment makes it possible to heat the layer very quickly without heating the substrate significantly. Typically, the temperature at any point on the face of the substrate opposite to that carrying the layer does not exceed 150 ° C., or even 100 ° C. during the treatment. Other types of radiation, such as that from flash lamps can also be used for the same purpose.
  • the application WO 2012/022874 describes a process in which a soluble layer based on halides or sulphates is deposited on the layer to be treated, and can be surmounted by an infrared absorbing layer.
  • the object of the present invention is to improve this type of technique by proposing a simplified method where a single layer, applied on the substrate before heat treatment, plays both the role of sacrificial layer and absorbent layer.
  • the Applicant has in fact discovered that certain materials, capable of absorbing the light and infrared radiation and of returning it in the form of heat to the underlying layers, were, after heat treatment, soluble or dispersible in aqueous or alcoholic solvents and therefore did not require the presence of a soluble underlayer to be removed by washing after treatment.
  • the subject of the present invention is therefore a process for obtaining a material comprising a substrate coated on at least a part of at least one of its faces with at least one functional layer, said process comprising:
  • a step of depositing a sacrificial layer on said at least one functional layer then a heat treatment step by means of a radiation chosen from laser radiation or radiation from at least one flashlamp, said radiation having at least one treatment wavelength between 200 and 2500 nm, said layer sacrificial being in contact with the air during this heat treatment step, then a step of removing the sacrificial layer using a solvent.
  • the sacrificial layer is advantageously a monolayer and is such that, before heat treatment, it is capable of absorbing at least a portion of said radiation at said at least one treatment wavelength and after heat treatment it is likely to be removed by dissolution and / or dispersion in said solvent.
  • the subject of the invention is also a material that can be obtained by the process according to the invention.
  • the process according to the invention makes it possible to improve the efficiency of the heat treatment by means of an absorbent sacrificial layer, which is then eliminated by means of a solvent.
  • the use of a monolayer sacrificial coating makes it possible to propose a simple and inexpensive method compared with the use of multilayer sacrificial coatings as described in WO 2012/022874.
  • the solvent is advantageously aqueous. It may for example be water, especially acidified water, for example using acetic acid, citric acid or any other acid.
  • the solvent may also be an alcohol, for example ethanol or propanol.
  • the step of eliminating the sacrificial layer implements the contact of the sacrificial layer with the solvent.
  • This contact may or may not be accompanied by an automated mechanical or manual treatment of the layer sacrificial, for example by means of brushes, rags, etc.
  • the sacrificial layer elimination step can for example be carried out in a glass washing installation, in particular of the type commonly used in manufacturing or processing workshops. glass.
  • the step of eliminating the sacrificial layer may in particular be carried out in a glass washing machine.
  • the step of removing the sacrificial layer can be performed just after the heat treatment step, near the heat treatment plant.
  • the removal step may alternatively be performed later or at a distance from the heat treatment plant.
  • the sacrificial layer can indeed play a role of mechanical protection of the functional layer during its transport or its handling.
  • the material when the material is intended to be used in the manufacture of a glazing, the material can be delivered still coated with its sacrificial layer to a processing plant, and the sacrificial layer can be eliminated in this workshop, either before the transformation step (cutting, insertion in an insulating glazing ...) either during or after the transformation.
  • the substrate is preferably glass or glass ceramic. It is preferably transparent, colorless (it is then a clear or extra-clear glass) or colored, for example blue, gray, green or bronze.
  • extra-clear glass is meant a glass whose weight content of iron oxide is at most 0.02% and whose light transmittance is at least 90%.
  • the glass is preferably of the silico-soda-lime type, but it can also be made of borosilicate or alumino-borosilicate type glass, in particular for high temperature applications (oven doors, chimney inserts, fireproof glazing).
  • the substrate advantageously has at least one dimension greater than or equal to 1 m, or even 2 m and even 3 m.
  • the thickness of the substrate generally varies between 0.1 mm and 19 mm, preferably between 0.7 and 9 mm, especially between 1 and 6 mm, or even between 2 and 4 mm.
  • the glass substrate is preferably of the float type, that is to say likely to have been obtained by a process of pouring the molten glass on a bath of molten tin ("float" bath).
  • the coating to be treated can be deposited on the "tin” side as well as on the "atmosphere” side of the substrate.
  • the term "atmosphere” and “tin” faces means the faces of the substrate having respectively been in contact with the atmosphere prevailing in the float bath and in contact with the molten tin.
  • the tin side contains a small surface amount of tin diffusing into the glass structure.
  • the glass substrate can also be obtained by rolling between two rollers, a technique which makes it possible in particular to print patterns on the surface of the glass.
  • the expression “on” or “above” should be understood in that the sacrificial layer is further away from the substrate than the functional layer. This expression does not however prejudge a possible direct contact between the two layers.
  • the sacrificial layer preferably absorbs at least a portion of the radiation at least one treatment wavelength between 800 and 1300 nm.
  • the absorption of the sacrificial layer at least one treatment wavelength is at least 15%, especially 20% and even 25 or 30%.
  • the absorption can, in a known manner, be deduced from measurements carried out using a spectrophotometer.
  • the absorption of the or each functional layer at the or each treatment wavelength is preferably at most 10%, especially 5%. It is especially for this type of layer that the use of an absorbent sacrificial layer is the most useful.
  • the functional layer preferably provides the coated substrate with at least one functionality selected from low emissivity, low electrical resistivity, antireflection effect, self-cleaning function or ease of cleaning.
  • the functional layer may be the only layer deposited on the substrate (in addition to the sacrificial layer). Alternatively, the functional layer may be included in a stack of thin layers. In the remainder of the text, the term "coating" refers to the assembly comprising the functional (s) and sacrificial (s) layers as well as, if appropriate, any other layer deposited on the same face of the substrate.
  • the physical thickness of the or each functional layer is typically between 1 nm and 5 ⁇ m, especially between 2 nm and 2 ⁇ m, more particularly between 10 nm and 1 ⁇ m.
  • the (or at least one) functional layer is a layer based on silica. This type of layer absorbs little in the wavelength range considered, particularly in the near infrared, so that in the absence of sacrificial sacrificial layer heat treatment is inefficient.
  • the silica-based layer is preferably, after heat treatment, essentially constituted even silica.
  • the silica-based layer is advantageously antireflective, in the sense that the light-reflection factor on the layer side is at most 6%, especially 5% after heat treatment, when the layer is deposited on a single face of the substrate (the value is therefore account for the reflection of the uncoated opposite side, which is about 4%).
  • the silica-based layer comprises, before heat treatment, silicon, oxygen, carbon and optionally hydrogen, the latter two elements being at least partially removed during the heat treatment so as to obtain porous layer consisting essentially of silica.
  • This layer is preferably deposited by magnetron cathode sputtering of a silicon or silica target or by plasma-enhanced chemical vapor deposition using, as silicon precursor, an organometallic compound such as, for example, hexamethyldisiloxane.
  • the silica-based layer comprises, before heat treatment, a silica matrix and porogenic agents, the latter being removed during the heat treatment so as to obtain a porous layer consisting essentially of silica.
  • the pore-forming agents are preferably organic, especially polymeric, for example polymethyl methacrylate, their average size preferably being in a range from 20 to 200 nm.
  • This layer is preferably deposited by a sol-gel type process.
  • the (or at least one) functional layer is a layer based on titanium oxide, in particular a layer made of or consisting essentially of titanium oxide.
  • the thin films based on titanium oxide have the particularity of being self - cleaning, facilitating the degradation of organic compounds under the action of ultraviolet radiation (photocatalysis phenomenon) and the elimination of mineral soils (dust) under the action of a water runoff.
  • Titanium dioxide crystallized in the anatase form is much more effective in terms of degradation of organic compounds than amorphous or crystallized titanium dioxide in the rutile or brookite form.
  • the titanium oxide may optionally be doped with a metal ion, for example an ion of a transition metal, or with nitrogen, carbon or fluorine atoms. Titanium oxide may also be substoichiometric or super-stoichiometric oxygen (Ti0 2 or TiO x ).
  • the titanium oxide layer is preferentially deposited by magnetron sputtering. This technique, however, does not allow to obtain very active layers, because the titanium oxide they contain is little or not crystallized. The heat treatment is then necessary to impart appreciable self-cleaning properties.
  • an underlayer having the effect of promoting the crystalline growth of titanium oxide, especially in the anatase form.
  • It may in particular be a ZrO 2 underlayer, as described in application WO 02/40417, or an underlayer promoting the hetero-epitaxial growth of titanium oxide in anatase form, such as as described for example in the application WO 2005/040058, in particular a layer made of BaTiO 3 or SrTiO 3.
  • Other sub-layers may be inserted between the substrate and the titanium dioxide layer. It may for example be barrier layers to the migration of alkali, including layers based on SiO 2 , SiOC, Al 2 O 3 alumina, silicon nitride S 1 3 N 4 .
  • Non-limiting examples include metal layers, in particular silver or molybdenum, or oxide layers, in particular of electrically conductive transparent oxide (for example layers of tin and indium oxide, layers of zinc oxide doped with aluminum or with gallium, tin oxide films doped with fluorine or with antimony, etc.).
  • metal layers in particular silver or molybdenum
  • oxide layers in particular of electrically conductive transparent oxide (for example layers of tin and indium oxide, layers of zinc oxide doped with aluminum or with gallium, tin oxide films doped with fluorine or with antimony, etc.).
  • the functional layer can be obtained by any type of thin film deposition process. It can for example be sol-gel type processes, pyrolysis (liquid or solid), chemical vapor deposition (CVD), including plasma-assisted (APCVD), possibly under atmospheric pressure (APPECVD), evaporation, spraying cathodic, in particular assisted by a magnetic field (magnetron process).
  • CVD chemical vapor deposition
  • APCVD plasma-assisted
  • APPECVD possibly under atmospheric pressure
  • evaporation spraying cathodic, in particular assisted by a magnetic field (magnetron process).
  • a plasma is created under a high vacuum near a target comprising the chemical elements to be deposited.
  • the active species of the plasma by bombarding the target, tear off said elements, which are deposited on the substrate forming the desired thin layer.
  • This process is called "reactive" when the layer consists of a material resulting from a chemical reaction between the elements torn from the target and the gas contained in the plasma.
  • the major advantage of this method lies in the ability to deposit on the same line a very complex stack of layers by successively scrolling the substrate under different targets, usually in a single device.
  • the sacrificial layer may be based on organic and / or mineral. It is chosen for its ability on the one hand to absorb the radiation used for the heat treatment and thus allow the heating of the functional layer and on the other hand to be easily removed by means of a solvent.
  • the sacrificial layer may change in chemical nature during heat treatment.
  • the sacrificial layer as deposited is not soluble in a solvent, but becomes so after the heat treatment.
  • the sacrificial layer is a layer of a metal chosen from Zn and Mg, which is at least partially oxidized during the heat treatment, or a layer of zinc oxide sub-stoichiometric oxide or magnesium.
  • This layer is preferably deposited by magnetron sputtering.
  • the sacrificial layer can be easily removed by simple contact with an acidic aqueous solution.
  • an aqueous solution containing 2 to 5% of acetic acid or citric acid makes it possible to rapidly eliminate such layers.
  • the thickness of this type of sacrificial layer is preferably in a range from 5 to 50 nm, in particular from 5 to 20 nm.
  • the sacrificial layer is an organic-based layer containing dyes or pigments.
  • organic base means that the layer comprises at least 30%, especially 50% by weight of organic material.
  • the organic-based layer is preferably deposited by liquid deposition techniques from inks, or more generally liquid solutions containing dyes or pigments of organic, plant or mineral origin dispersed or dissolved in a solvent.
  • Pigments absorbing infrared radiation include carbon black, carbon black, iron oxide or chromium, chromium spinels (eg example FeCr 2 0 4 , MgCr 2 O 4 , ZnCr 2 0 4 ) or else ytterbium salts.
  • Pigments absorbing ultraviolet radiation are chosen in particular from metal salts, cerium oxide or sulphide.
  • Dyes that absorb the infrared radiation are chosen in particular from cyanine, metal complexes (Ni, Fe, Pt, Pd %) with dithiolene ligand, organometallic complexes of ytterbium.
  • Ultraviolet radiation absorbing dyes are especially chosen from rhodamine, phthalocyanine, coumarin and fluorescein.
  • the organic-based layer can be deposited by various known techniques, such as coating, spray, roll, curtain, etc. After heat treatment, the organic-based layer can be easily removed by simple washing with a solvent. appropriate. It is understood that in the case of an organic-based sacrificial layer, some of its constituents such as the pigments may remain insoluble in the solvent without impairing the total elimination of said sacrificial layer.
  • the method is a method for obtaining a material comprising a substrate coated on at least a portion of at least one of its faces with a porous silica layer, said process comprising: a step deposition of a silica-based layer containing silicon, oxygen, carbon and optionally hydrogen, then
  • the heat treatment uses laser radiation or radiation from at least one flash lamp, said radiation having a treatment wavelength of between 200 and 2500 nm, preferably between 800 and 1300 nm.
  • the temperature at any point on the face of the substrate opposite that carrying the functional layer is preferably at most 150 ° C, in particular 100 ° C and even 50 ° C.
  • the maximum temperature experienced by each point of the functional layer during the heat treatment is preferably at least 300 ° C, especially 350 ° C or 400 ° C, and even 500 ° C or 600 ° C.
  • each point of the functional layer is subjected to this maximum temperature for a period not generally exceeding one second, preferably 0.5 seconds.
  • the radiation is derived from at least one flash lamp.
  • Such lamps are generally in the form of glass or quartz tubes sealed and filled a rare gas, provided with electrodes at their ends. Under the effect of a short-term electrical pulse, obtained by discharging a capacitor, the gas ionizes and produces a particularly intense incoherent light.
  • the emission spectrum generally comprises at least two emission lines; it is preferably a continuous spectrum having a maximum emission in the near ultraviolet and extending to near infrared. In this case, the heat treatment implements a continuum of treatment wavelengths.
  • the lamp is preferably a xenon lamp. It can also be a lamp with argon, helium or krypton.
  • the emission spectrum preferably comprises several lines, especially at wavelengths ranging from 160 to 1000 nm.
  • the duration of the flash is preferably in a range from 0.05 to 20 milliseconds, in particular from 0.1 to 5 milliseconds.
  • the repetition rate is preferably in a range from 0.1 to 5 Hz, in particular from 0.2 to 2 Hz.
  • the radiation may be from several lamps arranged side by side, for example 5 to 20 lamps, or 8 to 15 lamps, so as to simultaneously treat a wider area. In this case, all lamps can emit flashes simultaneously.
  • the or each lamp is preferably arranged transversely to the longer sides of the substrate.
  • the or each lamp has a length preferably of at least 1 m in particular 2 m and even 3 m so as to be able to treat large substrates.
  • the capacitor is typically charged at a voltage of 500 V to 500 kV.
  • the current density is preferably at least 4000 A / cm 2 .
  • the total energy density emitted by flash lamps, relative to the surface of the coating is preferably between 1 and 100 J / cm 2 , especially between 1 and 30 J / cm 2 , or between 5 and 20 J / cm 2 .
  • the radiation is laser radiation, in particular laser radiation focused on the functional layer in the form of at least one laser line.
  • the laser radiation is preferably generated by modules comprising one or more laser sources as well as optical shaping and redirection.
  • the laser sources are typically laser diodes or fiber lasers, including fiber, diode or disk lasers.
  • the laser diodes make it possible to economically achieve high power densities with respect to the electric power supply, for a small space requirement.
  • the size of the fiber lasers is even smaller, and the linear power obtained can be even higher, but at a higher cost.
  • Fiber lasers are understood to mean lasers in which the location of generation of the laser light is spatially offset from its place of delivery, the laser light being delivered by means of at least one optical fiber.
  • the laser light is generated in a resonant cavity in which is located the emitter medium which is in the form of a disk, for example a thin disk (about 0.1 mm thick) in Yb: YAG.
  • the light thus generated is coupled in at least one optical fiber directed towards the treatment site.
  • Fiber or disk lasers are preferably pumped optically by means of laser diodes.
  • the radiation from the laser sources is preferably continuous.
  • the wavelength of the laser radiation, and therefore the treatment wavelength is preferably in a range from 800 to 1300 nm, in particular from 800 to 1100 nm.
  • Power laser diodes emitting at one or more wavelengths selected from 808 nm, 880 nm, 915 nm, 940 nm or 980 nm have proved particularly suitable.
  • the treatment wavelength is, for example, 1030 nm (emission wavelength for a Yb: YAG laser).
  • the treatment wavelength is typically 1070 nm.
  • the shaping and redirecting optics preferably comprise lenses and mirrors, and are used as means for positioning, homogenization and focusing of the radiation.
  • the purpose of the positioning means is, where appropriate, to arrange the radiation emitted by the laser sources along a line. They preferably include mirrors.
  • the aim of the homogenization means is to superpose the spatial profiles of the laser sources in order to obtain a homogeneous linear power along the line.
  • the homogenization means preferably comprise lenses enabling the incident beams to be separated into secondary beams and the recombination of said secondary beams into a homogeneous line.
  • the means for focusing the radiation make it possible to focus the radiation on the coating to be treated, in the form of a line of desired length and width.
  • the focusing means preferably comprise a focusing mirror or a converging lens.
  • the shaping optics are preferably grouped together in the form of a optical head positioned at the exit of the or each optical fiber.
  • optical shaping of said optical heads preferably comprise lenses, mirrors and prisms and are used as means of transformation, homogenization and focusing of the radiation.
  • the transformation means comprise mirrors and / or prisms and serve to transform the circular beam, obtained at the output of the optical fiber, into a non-circular, anisotropic, line-shaped beam.
  • the transformation means increase the quality of the beam along one of its axes (fast axis, or axis of the width 1 of the laser line) and reduce the quality of the beam according to the other (slow axis, or axis of the length L of the laser line).
  • the homogenization means superimpose the spatial profiles of the laser sources in order to obtain a homogeneous linear power along the line.
  • the homogenization means preferably comprise lenses enabling the incident beams to be separated into secondary beams and the recombination of said secondary beams into a homogeneous line.
  • the means for focusing the radiation make it possible to focus the radiation at the level of the work plane, that is to say in the plane of the coating to be treated, in the form of a line of desired length and width.
  • the focusing means preferably comprise a focusing mirror or a converging lens.
  • the length of the line is advantageously equal to the width of the substrate. This length is typically at least 1 m, especially 2 m and even 3 m. It is also possible to use several lines, disjointed or not, but arranged so as to treat the entire width of the substrate. In this case, the length of each laser line is preferably at least 10 cm or 20 cm, especially in a range from 30 to 100 cm, especially from 30 to 75 cm, or even from 30 to 60 cm.
  • the term "length" of the line is the largest dimension of the line, measured on the surface of the coating in the first direction, and "width" the dimension in the second direction.
  • the width w of the line corresponds to the distance (in this second direction) between the beam axis (where the intensity of the radiation is maximum) and the point where the Radiation intensity is equal to 1 / e 2 times the maximum intensity.
  • the longitudinal axis of the laser line is named x, we can define a distribution of widths along this axis, named w (x).
  • the average width of the or each laser line is preferably at least 35 microns, especially in a range from 40 to 100 microns or 40 to 70 microns.
  • the difference between the largest width and the smallest width is preferably at most 10% of the average width value. This figure is preferably at most 5% and even 3%.
  • the formatting and redirection optics in particular the positioning means, can be adjusted manually or by means of actuators making it possible to adjust their positioning remotely.
  • actuators Typically motors or piezoelectric shims
  • the actuators will preferably be connected to detectors as well as to a feedback loop.
  • At least a portion of the laser modules, or all of them, is preferably arranged in a sealed box, advantageously cooled, in particular ventilated, in order to ensure their thermal stability.
  • Laser modules are preferably mounted on a rigid structure, called "bridge", based on metal elements, typically aluminum.
  • the structure preferably does not include a marble slab.
  • the bridge is preferably positioned parallel to the conveying means so that the focal plane of the or each laser line remains parallel to the surface of the substrate to be treated.
  • the bridge comprises at least four feet, the height of which can be individually adjusted to ensure parallel positioning under all circumstances. The adjustment can be provided by motors located at each foot, either manually or automatically, in relation to a distance sensor.
  • the height of the bridge can be adapted (manually or automatically) to take into account the thickness of the substrate to be treated, and thus ensure that the plane of the substrate coincides with the focal plane of the or each laser line.
  • the linear power of the laser line is preferably at least 300 W / cm, advantageously 350 or 400 W / cm, in particular 450 W / cm, or even 500 W / cm and even 550 W / cm. It is even advantageously at least 600 W / cm, especially 800 W / cm or 1000 W / cm.
  • the linear power is measured where the or each laser line is focused on the coating. She may be measured by placing a power detector along the line, for example a power-meter calorimetric, such as in particular the power meter Beam Finder S / N 2000716 Cohérent Inc.
  • the power is advantageously distributed homogeneously over any the length of the or each line. Preferably, the difference between the highest power and the lowest power is less than 10% of the average power.
  • the energy density supplied to the coating is preferably at least 20 J / cm 2 , or even 30 J / cm 2 .
  • the maximum temperature experienced by each point of the coating during the heat treatment is preferably at least 300 ° C, especially 350 ° C, or even 400 ° C, and even 500 ° C or 600 ° C.
  • the maximum temperature is especially experienced at the moment when the point of the coating considered passes under the laser line or is irradiated by the flash lamp flash.
  • only the points of the surface of the coating located under the laser line or under the flash lamp and in its immediate vicinity (for example less than a millimeter) are normally at a temperature of at least 300 ° C. .
  • the coating temperature is normally at most 50 ° C, and even 40 ° C or 30 ° C.
  • Each point of the coating undergoes the heat treatment (or is brought to the maximum temperature) during a period advantageously in a range from 0.05 to 10 ms, in particular from 0.1 to 5 ms, or from 0.1 to 2 ms. ms.
  • this time is set by both the width of the laser line and the relative speed of movement between the substrate and the laser line.
  • this duration corresponds to the duration of the flash.
  • the laser radiation is partly reflected by the coating to be treated and partly transmitted through the substrate.
  • This will typically metal housings cooled by fluid circulation, including water.
  • the propagation axis of the or each laser line forms an angle that is preferentially non-zero with the normal to the substrate, typically an angle of between 5 and 20 °.
  • At least a portion of the (main) laser radiation transmitted through the substrate and / or reflected by the coating is redirected towards said substrate to form at least secondary laser radiation , which preferably impacts the substrate at the same place as the main laser radiation, with advantageously the same depth of focus and the same profile.
  • the formation of the or each secondary laser radiation advantageously implements an optical assembly comprising only optical elements chosen from mirrors, prisms and lenses, in particular an optical assembly consisting of two mirrors and a lens, or a prism and a lens.
  • the conveyor system controls and controls the speed of travel.
  • the conveying means preferably comprises a rigid frame and a plurality of rollers.
  • the pitch of the rollers is advantageously in a range from 50 to 300 mm.
  • the rollers preferably comprise metal rings, typically made of steel, covered with plastic bandages.
  • the rollers are preferably mounted on low-clearance bearings, typically three rolls per step. In order to ensure perfect flatness of the conveying plane, the positioning of each of the rollers is advantageously adjustable.
  • the rollers are preferably driven by means of pinions or chains, preferably tangential chains, driven by at least one motor.
  • the speed of the relative displacement movement between the substrate and the or each radiation source is advantageously at least 2 m / min, in particular 5 m / min and even 6 m / min or 7 m / min, or 8 m / min and even 9 m / min or 10 m / min.
  • the speed of the relative displacement movement between the substrate and the radiation source is at least 12 m / min or 15 m / min, especially 20 m / min and even 25 or 30 m / min.
  • the speed of the relative displacement movement between the substrate and the or each radiation source varies during the treatment of at most 10 % in relative, in particular 2% and even 1% compared to its nominal value.
  • the or each radiation source (in particular laser line or flash lamp) is fixed, and the substrate is in motion, so that the relative speed of movement will correspond to the running speed of the substrate.
  • the heat treatment device may be integrated in a layer deposition line, for example a magnetic field assisted sputtering deposition line (magnetron process), or a chemical vapor deposition line (CVD), in particular assisted by plasma (PECVD), under vacuum or at atmospheric pressure (APPECVD).
  • the line generally includes substrate handling devices, a deposition facility, optical control devices, stacking devices.
  • the substrates scroll, for example on conveyor rollers, successively in front of each device or each installation.
  • the heat treatment device is preferably located just after the coating deposition installation, for example at the outlet of the deposition installation.
  • the coated substrate can thus be treated in line after deposition of the coating, at the exit of the deposition installation and before the optical control devices, or after the optical control devices and before the stacking devices of the substrates.
  • the heat treatment device can also be integrated into the deposit facility.
  • the laser or the flash lamp can be introduced into one of the chambers of a sputtering deposition installation, in particular in a chamber where the atmosphere is rarefied, in particular under a pressure of between 10 ⁇ 6 mbar and 10 ⁇ 2 mbar.
  • the heat treatment device may also be disposed outside the deposition installation, but so as to treat a substrate located inside said installation. For this purpose, it is sufficient to provide a transparent window at the wavelength of the radiation used, through which the radiation would be used to treat the layer. It is thus possible to treat a layer (for example a layer of silver) before the subsequent deposit of another layer in the same installation.
  • Processes recovery can however be of interest in cases where the implementation of the heat treatment according to the invention is made in a different location from where the deposit is made, for example in a place where is performed the transformation of glass .
  • the heat treatment device can therefore be integrated with other lines than the layer deposition line. It can for example be integrated into a production line of multiple glazing (double or triple glazing in particular), to a laminated glass manufacturing line, or to a curved and / or tempered glass production line. Glazed or curved or tempered glass can be used as building or automotive glazing.
  • the heat treatment according to the invention is preferably carried out before the production of multiple or laminated glazing.
  • the heat treatment can, however, be implemented after completion of double glazing or laminated glazing.
  • the heat treatment device is preferably disposed in a closed enclosure for securing persons by avoiding contact with the radiation and to avoid any pollution, in particular of the substrate, the optics or the treatment zone.
  • the subject of the invention is also a material that can be obtained by the process according to the invention.
  • a material can then be integrated into a glazing unit, for example a multiple glazing unit (double, triple, etc.).
  • the material may in particular constitute the first sheet of a multiple glazing unit, the functional layer being positioned in face of said glazing.
  • Such a material can still be integrated in a photovoltaic cell.
  • the material which is coated therewith may form the front face of a photovoltaic cell.
  • This type of layer is intended to form a porous antireflective silica layer after removal of the PMMA microbeads. Above the silica layer was rolled a coating about 5 ⁇ m thick consisting of an ink jet printer ink marketed under the reference LF-140 BLACK by the company Mimaki Engineering and absorbing in the near infrared.
  • the substrate thus coated was then treated with a laser line formed from InGaAs laser diode laser sources, quasi-continuous sources emitting at a wavelength of between 900 and 1000 nm.
  • the laser line has a length of 3.3 m, equal to the width 1 of the substrate, and an average width of 50 ⁇ m.
  • the substrate was disposed on a roller conveyor so as to run in a direction X parallel to its length.
  • the laser line was fixed and positioned above the coated surface of the substrate with its longitudinal direction Y extending perpendicularly to the running direction X of the substrate, that is to say according to the width of the substrate, in s' extending across this width.
  • the position of the focal plane of the laser line was adjusted to be in the thickness of the ink layer when the substrate was positioned on the conveyor, the power flux density of the laser line at the focal plane being 10 5 W / cm 2 .
  • the substrate was passed under the laser line at a speed of 8 m / min.
  • the ink was removed by passing through a washing machine.
  • the same heat treatment was applied to the same silica layer, but not covered by an ink. In this case, the PMMA beads are not removed by the treatment, so that the characteristics in reflection are unchanged.

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EP15732834.5A 2014-06-06 2015-06-02 Verfahren zur herstellung eines substrats mit einer funktionellen schicht unter verwendung einer opferschicht Withdrawn EP3152173A1 (de)

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FR1455151A FR3021967B1 (fr) 2014-06-06 2014-06-06 Procede d'obtention d'un substrat revetu d'une couche fonctionnelle
PCT/FR2015/051451 WO2015185848A1 (fr) 2014-06-06 2015-06-02 Procédé d'obtention d'un substrat revêtu d'une couche fonctionnelle à l'aide d'une couche sacrificielle

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Publication number Publication date
CN106414356A (zh) 2017-02-15
US10882781B2 (en) 2021-01-05
FR3021967B1 (fr) 2021-04-23
CA2948893A1 (fr) 2015-12-10
WO2015185848A1 (fr) 2015-12-10
US20180141858A1 (en) 2018-05-24
FR3021967A1 (fr) 2015-12-11
KR20170015906A (ko) 2017-02-10
EA033251B1 (ru) 2019-09-30
JP6764349B2 (ja) 2020-09-30
EA201692450A1 (ru) 2017-05-31
JP2017518951A (ja) 2017-07-13

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