EP3150748A1 - Undurchlässiger substratträger zur elektroplattierung - Google Patents

Undurchlässiger substratträger zur elektroplattierung Download PDF

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Publication number
EP3150748A1
EP3150748A1 EP16197330.0A EP16197330A EP3150748A1 EP 3150748 A1 EP3150748 A1 EP 3150748A1 EP 16197330 A EP16197330 A EP 16197330A EP 3150748 A1 EP3150748 A1 EP 3150748A1
Authority
EP
European Patent Office
Prior art keywords
substrate
carrier
conductive
carrier body
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP16197330.0A
Other languages
English (en)
French (fr)
Other versions
EP3150748B1 (de
Inventor
Emmanuel Chua Abas
Chen-An Chen
Diana Xiaobing Ma
Kalyana Bhargava Ganti
Edmundo Anida Divino
Jake Randal G. Ermita
Jose Francisco S. Capulong
Arnold Villamor Castillo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SunPower Corp
Original Assignee
SunPower Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US12/889,232 external-priority patent/US8221601B2/en
Priority claimed from US12/889,228 external-priority patent/US8221600B2/en
Priority claimed from US12/889,219 external-priority patent/US8317987B2/en
Application filed by SunPower Corp filed Critical SunPower Corp
Publication of EP3150748A1 publication Critical patent/EP3150748A1/de
Application granted granted Critical
Publication of EP3150748B1 publication Critical patent/EP3150748B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06—Suspending or supporting devices for articles to be coated
    • C25D17/08—Supporting racks, i.e. not for suspending
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/005—Contacting devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/007—Current directing devices
EP16197330.0A 2010-09-23 2011-07-11 Undurchlässiger substratträger zur elektroplattierung Active EP3150748B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US12/889,232 US8221601B2 (en) 2010-09-23 2010-09-23 Maintainable substrate carrier for electroplating
US12/889,228 US8221600B2 (en) 2010-09-23 2010-09-23 Sealed substrate carrier for electroplating
US12/889,219 US8317987B2 (en) 2010-09-23 2010-09-23 Non-permeable substrate carrier for electroplating
EP11827131.1A EP2619349B1 (de) 2010-09-23 2011-07-11 Nicht durchlässiger substratträger für die galvanotechnik

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP11827131.1A Division EP2619349B1 (de) 2010-09-23 2011-07-11 Nicht durchlässiger substratträger für die galvanotechnik

Publications (2)

Publication Number Publication Date
EP3150748A1 true EP3150748A1 (de) 2017-04-05
EP3150748B1 EP3150748B1 (de) 2018-05-09

Family

ID=45874099

Family Applications (2)

Application Number Title Priority Date Filing Date
EP11827131.1A Active EP2619349B1 (de) 2010-09-23 2011-07-11 Nicht durchlässiger substratträger für die galvanotechnik
EP16197330.0A Active EP3150748B1 (de) 2010-09-23 2011-07-11 Undurchlässiger substratträger zur elektroplattierung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP11827131.1A Active EP2619349B1 (de) 2010-09-23 2011-07-11 Nicht durchlässiger substratträger für die galvanotechnik

Country Status (6)

Country Link
EP (2) EP2619349B1 (de)
JP (2) JP5792820B2 (de)
KR (2) KR101764275B1 (de)
CN (2) CN203795007U (de)
ES (1) ES2605805T3 (de)
WO (3) WO2012039816A1 (de)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4796157A (en) * 1988-01-04 1989-01-03 Motorola, Inc. Substrate mounting assembly
US5078852A (en) * 1990-10-12 1992-01-07 Microelectronics And Computer Technology Corporation Plating rack
US20050061665A1 (en) * 2003-08-06 2005-03-24 Sunpower Corporation Substrate carrier for electroplating solar cells
DE102005039100A1 (de) * 2005-08-09 2007-02-15 Gebr. Schmid Gmbh & Co. Einrichtung zur Aufnahme bzw. Halterung mehrerer Substrate und Galvanisiereinrichtung
US20070151599A1 (en) * 2005-12-30 2007-07-05 Sunpower Corporation Solar cell having polymer heterojunction contacts
US20080248596A1 (en) * 2007-04-04 2008-10-09 Endicott Interconnect Technologies, Inc. Method of making a circuitized substrate having at least one capacitor therein

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4297197A (en) * 1980-11-13 1981-10-27 International Telephone And Telegraph Corp. Electroplating rack
KR100616198B1 (ko) * 1998-04-21 2006-08-25 어플라이드 머티어리얼스, 인코포레이티드 기판상에 전기도금하는 전기화학적 증착 시스템 및 방법
JP2001234397A (ja) * 2000-02-24 2001-08-31 Matsushita Electric Works Ltd 電気メッキ用冶具
JP3413185B2 (ja) * 2000-11-15 2003-06-03 古河電気工業株式会社 めっき用治具
US7930006B2 (en) * 2004-09-08 2011-04-19 Belkin International, Inc. Holder, electrical supply, and RF transmitter unit for electronic devices
EP1717351A1 (de) * 2005-04-27 2006-11-02 Enthone Inc. Galvanikbad
WO2009042669A1 (en) * 2007-09-24 2009-04-02 Chemical Specialties Manufacturing Corp. Cleaning device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4796157A (en) * 1988-01-04 1989-01-03 Motorola, Inc. Substrate mounting assembly
US5078852A (en) * 1990-10-12 1992-01-07 Microelectronics And Computer Technology Corporation Plating rack
US20050061665A1 (en) * 2003-08-06 2005-03-24 Sunpower Corporation Substrate carrier for electroplating solar cells
DE102005039100A1 (de) * 2005-08-09 2007-02-15 Gebr. Schmid Gmbh & Co. Einrichtung zur Aufnahme bzw. Halterung mehrerer Substrate und Galvanisiereinrichtung
US20070151599A1 (en) * 2005-12-30 2007-07-05 Sunpower Corporation Solar cell having polymer heterojunction contacts
US20080248596A1 (en) * 2007-04-04 2008-10-09 Endicott Interconnect Technologies, Inc. Method of making a circuitized substrate having at least one capacitor therein

Also Published As

Publication number Publication date
KR20170091755A (ko) 2017-08-09
JP2013537941A (ja) 2013-10-07
JP2016014192A (ja) 2016-01-28
WO2012039817A3 (en) 2014-03-20
EP2619349A1 (de) 2013-07-31
KR20130121704A (ko) 2013-11-06
EP2619349B1 (de) 2016-11-09
EP2619349A4 (de) 2016-01-27
JP5792820B2 (ja) 2015-10-14
KR101764275B1 (ko) 2017-08-03
CN203307439U (zh) 2013-11-27
WO2012039818A1 (en) 2012-03-29
WO2012039816A1 (en) 2012-03-29
WO2012039817A2 (en) 2012-03-29
ES2605805T3 (es) 2017-03-16
EP3150748B1 (de) 2018-05-09
CN203795007U (zh) 2014-08-27
KR101828394B1 (ko) 2018-02-12
JP6080320B2 (ja) 2017-02-15

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