EP2984853A4 - DIFFERENTIAL OUTPUTS IN MULTI-MOTOR MEMS DEVICES - Google Patents

DIFFERENTIAL OUTPUTS IN MULTI-MOTOR MEMS DEVICES

Info

Publication number
EP2984853A4
EP2984853A4 EP14782726.5A EP14782726A EP2984853A4 EP 2984853 A4 EP2984853 A4 EP 2984853A4 EP 14782726 A EP14782726 A EP 14782726A EP 2984853 A4 EP2984853 A4 EP 2984853A4
Authority
EP
European Patent Office
Prior art keywords
mems devices
differential outputs
multiple motor
motor mems
differential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14782726.5A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2984853A1 (en
Inventor
Jordan T Schultz
Dai Weiwen
Kessel Peter Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Knowles Electronics LLC
Original Assignee
Knowles Electronics LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Knowles Electronics LLC filed Critical Knowles Electronics LLC
Publication of EP2984853A1 publication Critical patent/EP2984853A1/en
Publication of EP2984853A4 publication Critical patent/EP2984853A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00—Circuits for transducers, loudspeakers or microphones
    • H04R3/005—Circuits for transducers, loudspeakers or microphones for combining the signals of two or more microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Circuit For Audible Band Transducer (AREA)
  • Amplifiers (AREA)
  • Soundproofing, Sound Blocking, And Sound Damping (AREA)
  • Pressure Sensors (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
EP14782726.5A 2013-04-10 2014-04-03 DIFFERENTIAL OUTPUTS IN MULTI-MOTOR MEMS DEVICES Withdrawn EP2984853A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361810387P 2013-04-10 2013-04-10
PCT/US2014/032851 WO2014168813A1 (en) 2013-04-10 2014-04-03 Differential outputs in multiple motor mems devices

Publications (2)

Publication Number Publication Date
EP2984853A1 EP2984853A1 (en) 2016-02-17
EP2984853A4 true EP2984853A4 (en) 2016-11-30

Family

ID=51686823

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14782726.5A Withdrawn EP2984853A4 (en) 2013-04-10 2014-04-03 DIFFERENTIAL OUTPUTS IN MULTI-MOTOR MEMS DEVICES

Country Status (6)

Country Link
US (1) US9503814B2 (zh)
EP (1) EP2984853A4 (zh)
JP (1) JP2016519907A (zh)
KR (1) KR20150137107A (zh)
CN (1) CN105210383A (zh)
WO (1) WO2014168813A1 (zh)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9124220B2 (en) * 2013-03-14 2015-09-01 Robert Bosch Gmbh Differential microphone with dual polarity bias
US10589987B2 (en) * 2013-11-06 2020-03-17 Infineon Technologies Ag System and method for a MEMS transducer
CN109314828B (zh) * 2016-05-26 2021-05-11 美商楼氏电子有限公司 具有集成压力传感器的麦克风装置
EP3855129B1 (en) 2017-03-22 2023-10-25 Knowles Electronics, LLC Interface circuit for a capacitive sensor
DE112019001416T5 (de) 2018-03-21 2021-02-04 Knowles Electronics, Llc Dielektrischer kamm für mems-vorrichtung
US11206494B2 (en) 2018-10-05 2021-12-21 Knowles Electronics, Llc Microphone device with ingress protection
DE112019004979T5 (de) 2018-10-05 2021-06-17 Knowles Electronics, Llc Verfahren zur Herstellung von MEMS-Membranen, die Wellungen umfassen
DE112019005007T5 (de) 2018-10-05 2021-07-15 Knowles Electronics, Llc Akustikwandler mit einer Niederdruckzone und Membranen, die eine erhöhte Nachgiebigkeit aufweisen
DE112019005790T5 (de) 2018-11-19 2021-09-09 Knowles Electronics, Llc Kraftrückkopplungskompensierter Absolutdrucksensor
EP3694222B1 (en) 2019-02-06 2024-05-15 Knowles Electronics, LLC Sensor arrangement and method
US11509980B2 (en) 2019-10-18 2022-11-22 Knowles Electronics, Llc Sub-miniature microphone
CN113784265B (zh) * 2020-06-09 2022-06-14 通用微(深圳)科技有限公司 硅基麦克风装置及电子设备
CN114205722A (zh) * 2020-09-17 2022-03-18 通用微(深圳)科技有限公司 硅基麦克风装置及电子设备
US11554953B2 (en) 2020-12-03 2023-01-17 Knowles Electronics, Llc MEMS device with electrodes and a dielectric
US11889252B2 (en) 2021-05-11 2024-01-30 Knowles Electronics, Llc Method and apparatus for balancing detection sensitivity in producing a differential signal

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WO2014160010A2 (en) * 2013-03-14 2014-10-02 Robert Bosch Gmbh Differential microphone with dual polarity bias

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US20080192963A1 (en) * 2007-02-09 2008-08-14 Yamaha Corporation Condenser microphone
EP1959711A2 (en) * 2007-02-13 2008-08-20 Sonion Nederland B.V. Microphone with dual transducers
WO2014160010A2 (en) * 2013-03-14 2014-10-02 Robert Bosch Gmbh Differential microphone with dual polarity bias
EP2974365A2 (en) * 2013-03-14 2016-01-20 Robert Bosch GmbH Differential microphone with dual polarity bias

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Title
See also references of WO2014168813A1 *

Also Published As

Publication number Publication date
US9503814B2 (en) 2016-11-22
WO2014168813A1 (en) 2014-10-16
KR20150137107A (ko) 2015-12-08
EP2984853A1 (en) 2016-02-17
JP2016519907A (ja) 2016-07-07
CN105210383A (zh) 2015-12-30
US20140307885A1 (en) 2014-10-16

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Inventor name: VAN KESSEL, PETER

Inventor name: WEIWEN, DAI

Inventor name: SCHULTZ, JORDAN T.

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A4 Supplementary search report drawn up and despatched

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