EP2910952A4 - Trägheitssensor - Google Patents

Trägheitssensor

Info

Publication number
EP2910952A4
EP2910952A4 EP12886642.3A EP12886642A EP2910952A4 EP 2910952 A4 EP2910952 A4 EP 2910952A4 EP 12886642 A EP12886642 A EP 12886642A EP 2910952 A4 EP2910952 A4 EP 2910952A4
Authority
EP
European Patent Office
Prior art keywords
inertial sensor
inertial
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12886642.3A
Other languages
English (en)
French (fr)
Other versions
EP2910952A1 (de
Inventor
Kiyoko Yamanaka
Heewon Jeong
Masahide Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Astemo Ltd
Original Assignee
Hitachi Automotive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Automotive Systems Ltd filed Critical Hitachi Automotive Systems Ltd
Publication of EP2910952A1 publication Critical patent/EP2910952A1/de
Publication of EP2910952A4 publication Critical patent/EP2910952A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
EP12886642.3A 2012-10-16 2012-10-16 Trägheitssensor Withdrawn EP2910952A4 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/076691 WO2014061099A1 (ja) 2012-10-16 2012-10-16 慣性センサ

Publications (2)

Publication Number Publication Date
EP2910952A1 EP2910952A1 (de) 2015-08-26
EP2910952A4 true EP2910952A4 (de) 2016-08-03

Family

ID=50487688

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12886642.3A Withdrawn EP2910952A4 (de) 2012-10-16 2012-10-16 Trägheitssensor

Country Status (4)

Country Link
US (1) US20150301075A1 (de)
EP (1) EP2910952A4 (de)
JP (1) JPWO2014061099A1 (de)
WO (1) WO2014061099A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013007593B4 (de) * 2013-05-02 2022-12-29 Northrop Grumman Litef Gmbh Beschleunigungssensor sowie verfahren zur herstellung eines beschleunigungssensors
JP6206651B2 (ja) * 2013-07-17 2017-10-04 セイコーエプソン株式会社 機能素子、電子機器、および移動体
GB2523320A (en) * 2014-02-19 2015-08-26 Atlantic Inertial Systems Ltd Accelerometers
US9612254B2 (en) * 2014-06-27 2017-04-04 Nxp Usa, Inc. Microelectromechanical systems devices with improved lateral sensitivity
JP2016042074A (ja) 2014-08-13 2016-03-31 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6262629B2 (ja) * 2014-09-30 2018-01-17 株式会社日立製作所 慣性センサ
US11231441B2 (en) * 2015-05-15 2022-01-25 Invensense, Inc. MEMS structure for offset minimization of out-of-plane sensing accelerometers
US10352960B1 (en) * 2015-10-30 2019-07-16 Garmin International, Inc. Free mass MEMS accelerometer
US10725068B2 (en) * 2015-12-15 2020-07-28 Invensense, Inc. Identification and compensation of MEMS accelerometer errors
TW201728905A (zh) * 2016-02-03 2017-08-16 智動全球股份有限公司 加速度計
CN107782916B (zh) * 2016-08-27 2021-07-09 深迪半导体(绍兴)有限公司 一种三轴加速计
JP6866624B2 (ja) 2016-12-07 2021-04-28 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP6863009B2 (ja) * 2017-03-31 2021-04-21 Ｉ−Ｐｅｘ株式会社 物質検出素子
GB2565295A (en) * 2017-08-07 2019-02-13 Atlantic Inertial Systems Ltd Accelerometer
JP7056099B2 (ja) * 2017-11-28 2022-04-19 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体
CN110275047B (zh) * 2018-03-14 2021-01-22 京东方科技集团股份有限公司 加速度传感器、电容检测电路、加速度处理电路及方法
US11820648B2 (en) * 2018-05-15 2023-11-21 Murata Manufacturing Co., Ltd. Vibration damping in MEMS acceleration sensors
JP6763458B2 (ja) * 2019-07-17 2020-09-30 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
DE102020210121A1 (de) 2020-08-11 2022-02-17 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches System, Verfahren zum Betreiben eines mikromechanischen Systems
DE102020211454A1 (de) 2020-09-11 2022-03-17 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Struktur und mikromechanischer Sensor
EP4047375B1 (de) 2021-02-22 2024-07-17 Murata Manufacturing Co., Ltd. Ankerstruktur zur verminderung temperaturbasierter fehler

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10111312A (ja) * 1996-09-27 1998-04-28 Robert Bosch Gmbh マイクロメカニックな構成エレメント
JP2008292363A (ja) * 2007-05-25 2008-12-04 Honeywell Internatl Inc 閉鎖ループ櫛型駆動センサ
US20110083506A1 (en) * 2009-10-06 2011-04-14 Johannes Classen Micromechanical structure and method for manufacturing a micromechanical structure

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3405219B2 (ja) * 1998-08-26 2003-05-12 松下電工株式会社 半導体加速度センサ素子及びその製造方法
DE69938658D1 (de) * 1999-09-10 2008-06-19 St Microelectronics Srl Gegen mechanische Spannungen unempfindliche mikroelektromechanische Struktur
JP2004347499A (ja) * 2003-05-23 2004-12-09 Denso Corp 半導体力学量センサ
DE602004031938D1 (de) * 2004-08-13 2011-05-05 St Microelectronics Srl Mikroelektromechanische Struktur, insbesondere Beschleunigungssensor, mit verbesserter Unempfindlichkeit gegenüber thermischen und mechanischen Spannungen
JP4600344B2 (ja) * 2006-04-28 2010-12-15 パナソニック電工株式会社 静電容量式センサ
DE102006059928A1 (de) 2006-12-19 2008-08-21 Robert Bosch Gmbh Beschleunigungssensor mit Kammelektroden
JP5284911B2 (ja) * 2009-08-31 2013-09-11 日立オートモティブシステムズ株式会社 静電容量型物理量センサ及び角速度センサ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10111312A (ja) * 1996-09-27 1998-04-28 Robert Bosch Gmbh マイクロメカニックな構成エレメント
JP2008292363A (ja) * 2007-05-25 2008-12-04 Honeywell Internatl Inc 閉鎖ループ櫛型駆動センサ
US20110083506A1 (en) * 2009-10-06 2011-04-14 Johannes Classen Micromechanical structure and method for manufacturing a micromechanical structure

Also Published As

Publication number Publication date
JPWO2014061099A1 (ja) 2016-09-05
EP2910952A1 (de) 2015-08-26
WO2014061099A1 (ja) 2014-04-24
US20150301075A1 (en) 2015-10-22

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