EP2808421B1 - Pompe à vide avec fonction d'élimination - Google Patents

Pompe à vide avec fonction d'élimination Download PDF

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Publication number
EP2808421B1
EP2808421B1 EP14020041.1A EP14020041A EP2808421B1 EP 2808421 B1 EP2808421 B1 EP 2808421B1 EP 14020041 A EP14020041 A EP 14020041A EP 2808421 B1 EP2808421 B1 EP 2808421B1
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EP
European Patent Office
Prior art keywords
vacuum pump
pipe
abatement
inert gas
heat exchanger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14020041.1A
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German (de)
English (en)
Other versions
EP2808421A1 (fr
Inventor
Kohtaro Kawamura
Toyoji Shinohara
Tetsuro Sugiura
Hideo Arai
Takashi Kyotani
Toshiharu Nakazawa
Keiichi Ishikawa
Seiji Kashiwagi
Yasuhiko Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
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Publication date
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Publication of EP2808421A1 publication Critical patent/EP2808421A1/fr
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/343—Heat recovery
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Definitions

  • the present invention relates to a vacuum pump for use in an exhaust system of a manufacturing apparatus for manufacturing semiconductor devices, liquid crystal panels, LEDs, or the like, and more particularly to a vacuum pump with abatement function which comprises a vacuum pump, for evacuating a chamber of the manufacturing apparatus, to which an abatement function for treating an exhaust gas discharged from the chamber to make the exhaust gas harmless is added.
  • a process gas is introduced into a process chamber which is being evacuated to perform various processes such as an etching process, a CVD process or the like.
  • the process chamber for performing several processes such as an etching process, a CVD process or the like is evacuated by a vacuum pump. Further, the process chamber and exhaust apparatuses connected to the process chamber are cleaned periodically by supplying a cleaning gas thereto.
  • exhaust gases such as the process gas, the cleaning gas or the like contain a silane-based gas (SiH 4 , TEOS or the like), a halogen-based gas (NF 3 , ClF 3 , SF 6 , CHF 3 or the like), a PFC gas (CF 4 , C 2 F 6 or the like) or the like
  • silane-based gas SiH 4 , TEOS or the like
  • a halogen-based gas NF 3 , ClF 3 , SF 6 , CHF 3 or the like
  • a PFC gas CF 4 , C 2 F 6 or the like
  • the vacuum pump and the exhaust gas treatment apparatus are housed respectively in individual housings, and hence they are installed in distant positions and are required to be connected to each other by a connecting pipe.
  • the vacuum pump and the exhaust gas treatment apparatus have not been an optimum system from the standpoint of saving energy by interchanging necessary heat between the vacuum pump and the exhaust gas treatment apparatus. Therefore, a system comprising a vacuum pump and an exhaust gas treatment apparatus which are accommodated in one housing and connected by a short pipe has been developed, and such system has been sold as an integrated-type exhaust system.
  • the pipe interconnecting the vacuum pump and the exhaust gas treatment apparatus is several meters long, and is kept warm or heated by a heater or the like for preventing a product generated by gas treatment from being attached to the pipe.
  • the vacuum pump device has a main pump, a second booster pump, and a first booster pump serially connected with each other.
  • the first booster pump and the second booster pump are arranged to an upstream side of the main pump in a hydrogen gas exhausting direction in an exhaust passage.
  • nitrogen gas with higher viscosity coefficient than that of the hydrogen gas is supplied to an exhaust port of the first booster pump, in which the hydrogen gas from a semiconductor manufacturing device is first sucked, via an introduction port and an introduction pipe, so as to improve a transferring property of the hydrogen gas using the viscosity of the nitrogen gas.
  • a conventional exhaust gas treating system comprising a vacuum pump and a separated combustion-type abatement apparatus is disclosed.
  • the present invention has been made in view of the above drawbacks. It is therefore an object of the present invention to provide a vacuum pump with abatement function which can utilize the heat of an exhaust gas heated by compression heat of a vacuum pump for abatement treatment of the exhaust gas to make the exhaust gas harmless, and can utilize the heat generated by the abatement treatment in an abatement part for heating an inert gas supplied to the vacuum pump.
  • a vacuum pump with abatement function as set forth in claim 1.
  • the vacuum pump inter alia comprises: a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached; and a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part: wherein the inert gas heated by the heat exchanger is introduced into the vacuum pump.
  • the exhaust gas discharged from the vacuum pump has been heated by compression heat in the vacuum pump to a temperature of about 200°C, and the heated exhaust gas is introduced from the discharge pipe directly into the abatement part wherein the exhaust gas is treated to be made harmless. Therefore, it is not necessary to warm the exhaust gas from normal temperature, and an amount of fuel used in the abatement part can be reduced, thus achieving energy saving.
  • waste heat generated by abatement treatment of the exhaust gas is utilized to heat the inert gas such as an N 2 in the abatement part, and the heated inert gas is supplied to the vacuum pump. Therefore, purging of the vacuum pump can be performed by the heated inert gas, and thus a product can be prevented from being attached to the interior of vacuum pump. According to the present invention, it is not necessary to install a dedicated heater for heating the inert gas, thus achieving energy saving.
  • a pipe for connecting the discharge port of the vacuum pump and the abatement part has a piping length of 100 mm to 500 mm.
  • the discharge pipe which connects vacuum pump and the abatement part has a piping length of not more than 500 mm, and hence the product can be prevented from being attached to the discharge pipe.
  • the heat exchanger comprises a heat exchanger provided around or inside a gas treatment portion of the abatement part.
  • the inert gas can be heated by using the heat generated by the abatement treatment of the exhaust gas.
  • the heat exchanger comprises a heat exchange part which is divided into a plurality of stages, and the number of stages of the plural-stage heat exchange part is switched to control a temperature of the heated inert gas.
  • a heat insulating material is provided between a gas treatment portion of the abatement part and the heat exchanger.
  • the inner wall of the abatement part may comprise a wall containing a heat insulating material.
  • a heater for further heating the inert gas heated by the heat exchanger is provided, and the inert gas heated by the heater is introduced into the vacuum pump.
  • the inert gas heated by the heat exchanger which utilizes waste heat of the abatement part is further heated by the heater.
  • the temperature of the inert gas can be equal to the internal temperature of the vacuum pump, and a change in dimension of the rotor and the casing can be minimized.
  • a pipe for introducing the inert gas from the heat exchanger to the vacuum pump comprises a double pipe, and an inner pipe of the double pipe serves as a passage for the inert gas and a space between the inner pipe and an outer pipe is evacuated by the vacuum pump.
  • the inert gas can be kept warm.
  • a pipe for connecting the discharge port of the vacuum pump and the abatement part comprises a double pipe, and an inner pipe of the double pipe serves as a passage for the exhaust gas and a space between the inner pipe and an outer pipe serves as a passage for the inert gas heated by the heat exchanger to introduce the inert gas into the vacuum pump.
  • a pipe for connecting the discharge port of the vacuum pump and the abatement part comprises a triple pipe, and an innermost pipe of the triple pipe serves as a passage for the exhaust gas, an outer space around the innermost pipe serves as a passage for the inert gas heated by the heat exchanger to introduce the inert gas to the vacuum pump, and an outermost space between the pipes is evacuated by the vacuum pump.
  • the outermost space of the triple pipe serves as a vacuum jacket, and this vacuum jacket is evacuated to perform vacuum insulation. Therefore, the inert gas and the exhaust gas which flow inside the vacuum insulation can be kept warm.
  • the abatement part comprises a combustion-type abatement part configured to treat the exhaust gas by combustion or a heating-decomposition-type abatement part configured to treat the exhaust gas by heating and decomposition; a second heat exchanger configured to heat air by using heat generated when the exhaust gas is treated to be made harmless in the abatement part is provided; and the air heated by the second heat exchanger is introduced as preheated air into the abatement part.
  • a vacuum pump apparatus comprising: a plurality of vacuum pumps with abatement function according to claim 1; and a switching mechanism configured to distribute the inert gas heated by one of the plural abatement parts to any of the plurality of vacuum pumps.
  • purging routes of the inert gas can be switched depending on operational situation of the process. For example, in the case where an increase of internal temperature of the vacuum pump is required to allow the vacuum pump immediately after its start to become operational, the heated inert gas discharged from the pair of the vacuum pump and the abatement part which have been already operated is supplied to another vacuum pump immediately after the start. Thus, the internal temperature of the vacuum pump immediately after the start can be increased.
  • FIGS. 1A through 10 A vacuum pump with abatement function according to embodiments of the present invention will be described below with reference to FIGS. 1A through 10 .
  • identical or corresponding parts are denoted by identical or corresponding reference numerals throughout views, and will not be described in duplication.
  • FIGS. 1A and 1B are views showing a configuration example of a vacuum pump with abatement function according to the present invention.
  • FIG.1A is a schematic front view of the vacuum pump with abatement function
  • FIG. 1B is a schematic plan view of the vacuum pump with abatement function.
  • a vacuum pump with abatement function has a configuration wherein an abatement part 10 is attached to a discharge pipe 1a of a vacuum pump 1.
  • the vacuum pump 1 may comprise a single dry vacuum pump or two dry vacuum pumps connected in series.
  • the single dry vacuum pump or the two dry vacuum pumps comprise a roots-type dry vacuum pump, a screw-type dry vacuum pump, or the like which is well known in the art and will not be shown and described in detail below.
  • the vacuum pump 1 is illustrated as a vacuum pump having a housing C.
  • FIGS. 2A and 2B are views showing another configuration example of a vacuum pump with abatement function according to the present invention.
  • FIG.2A is a schematic front view of the vacuum pump with abatement function
  • FIG. 2B is a schematic plan view of the vacuum pump with abatement function.
  • a vacuum pump with abatement function according to the present invention has a configuration wherein two abatement parts 10, 10 are attached to respective portions branched from the discharge pipe 1a of the vacuum pump 1.
  • the discharge pipe 1a which connects a discharge port of the vacuum pump 1 and a gas introduction port of the abatement part 10 has a piping length of not more than 500 mm, specifically 200 mm to 400mm.
  • FIG. 3 is a schematic cross-sectional view showing a configuration of the abatement part 10 of the vacuum pump with abatement function. As shown in FIG. 3 , the abatement part 10 is composed of a cylindrical container as a whole.
  • the cylindrical container-shaped abatement part 10 is disposed in a vertical direction so that its central axis extends in a vertical direction.
  • the abatement part 10 comprises a cylindrical member 11 which has a bottom and forms a combustion chamber S therein for forming flames by a burner and combusting an exhaust gas, and an outer cylinder 12 provided so as to surround the cylindrical member 11 with a predetermined distance therebetween.
  • a heating chamber 13 for holding and heating an inert gas such as an N 2 gas is formed between the cylindrical member 11 and the outer cylinder 12.
  • the inert gas such as an N 2 gas flows into the heating chamber 13 from an inlet port PIN provided at an upper part of the outer cylinder 12 and flows out from an outlet port P OUT provided at a lower part of the outer cylinder 12.
  • the heating chamber 13 having a double-pipe-structure constitutes a heat exchanger.
  • the inert gas heated in the heating chamber 13 can be supplied to the vacuum pump 1.
  • the abatement part (or abatement parts) 10 and the vacuum pump 1 are connected by a pipe (or pipes) 14, and an inert gas such as an N 2 gas heated in the heating chamber 13 can be supplied to the vacuum pump 1 by the pipe 14.
  • the inert gas is heated in the heating chamber 13 to a temperature which is substantially equal to an internal temperature of the vacuum pump 1, for example, to a temperature of 190°C to 220°C.
  • a gas introduction port 10 IN for introducing the exhaust gas to be treated into the combustion chamber is formed at a lower part of a circumferential wall of the abatement part 10.
  • a gas outlet 10 OUT for discharging the gases after treatment is formed at the upper end of the abatement part 10.
  • a plurality of air nozzles 15 for supplying air into the combustion chamber S and a plurality of fuel nozzles 16 for supplying a fuel into the combustion chamber S are provided in the abatement part 10.
  • the air nozzles 15 extend at a predetermined angle to the tangential direction of the abatement part 10 to blow off air so as to form swirling flows along an inner circumferential surface of the circumferential wall of the cylindrical member 11.
  • the fuel nozzles 16 extend at a predetermined angle to the tangential direction of the cylindrical member 11 to blow off the fuel so as to form swirling flows along the inner circumferential surface of the circumferential wall of the cylindrical member 11.
  • the air nozzles 15 and the fuel nozzles 16 are disposed respectively at predetermined intervals in the circumferential direction of the cylindrical member 11.
  • a UV sensor 18 for detecting flames and a plug 19 for ignition are provided on the bottom of the cylindrical member 11.
  • FIG. 4 is an enlarged view of FIG. 3 .
  • the plug 19 is provided on the bottom of the cylindrical member 11, and a cylindrical pilot burner part 20 is provided so as to surround the plug 19.
  • a fuel supply port 21 for supplying a fuel for forming a flame and an air supply port 22 for supplying semi-premixed air are formed in the pilot burner part 20.
  • a pilot burner flame PB is formed by igniting the fuel supplied from the fuel supply port 21 with the plug 19.
  • the fuel is blown off from the plural fuel nozzles 16 provided in the abatement part 10 toward the combustion chamber S so as to form the swirling flows. Further, air is blown off from the plural air nozzles 15 toward the combustion chamber S so as to form the swirling flows. Then, the mixture gas of fuel and air is ignited by the pilot burner PB, and thus the swirling flows of flames (swirling flames) are formed along the inner circumferential surface of the cylindrical member 11.
  • the exhaust gas to be treated is blown off toward the combustion chamber S from the exhaust gas introduction port 10 IN which opens on the inner circumferential surface of the cylindrical member 11.
  • the blown-off exhaust gas mixes with the swirling flames of the mixture gas and is combusted.
  • combustion efficiency of the exhaust gas becomes high.
  • the air ejected from the air nozzles 15 is also swirling, while the air flows mix with the flames to accelerate the swirling flows of the flames, the exhaust gas is oxidatively decomposed.
  • the treated gas is discharged from the gas outlet 10 OUT at the upper end of the abatement part 10, and is then discharged to the exhaust duct.
  • the exhaust gas discharged from the vacuum pump 1 has been heated by compression heat in the vacuum pump 1 to a temperature of about 200°C, and the heated exhaust gas is introduced from the discharge pipe 1a directly into the abatement part 10 wherein the exhaust gas is treated to be made harmless by combustion. Therefore, it is not necessary to warm the exhaust gas from normal temperature, and an amount of fuel used in the abatement part 10 can be reduced, thus achieving energy saving. Since the exhaust gas heated to a temperature of about 200°C flows through the discharge pipe 1a of the vacuum pump 1, it is not necessary to heat the discharge pipe 1a by a heater for piping. Therefore, it is not necessary to install the heater for piping, and thus energy saving can be achieved. Further, since the discharge pipe 1a which connects the vacuum pump 1 and the abatement part 10 has a piping length of not more than 500 mm, and hence the product can be prevented from being attached to the discharge pipe 1a.
  • combustion waste heat generated by abatement treatment of the exhaust gas is utilized to heat the inert gas such as an N 2 in the heating chamber 13 of the abatement part 10, and the heated inert gas is supplied to the vacuum pump through the pipe 14. Therefore, purging of the vacuum pump 1 can be performed by the heated inert gas, and thus a product can be prevented from being attached to the interior of vacuum pump 1. According to the present invention, it is not necessary to install a dedicated heater for heating the inert gas, thus achieving energy saving.
  • the inert gas may be a gas which does not react with the contained gases, other than N 2 .
  • the inert gas may be a noble gas such as He, Ar or Kr, or CO 2 .
  • the flow passage for allowing the inert gas to flow in the abatement part 10 is provided outside the combustion chamber S, but may be provided inside the combustion chamber S.
  • the combustion-type abatement part 10 is exemplified.
  • the abatement part 10 may be an electrothermal-type gas treatment part.
  • a gas to be heated (inert gas) is allowed to flow on the inner side of the combustion-type or electrothermal-type abatement part 10.
  • the flow passage may have the same configuration as a single-tubular heat exchanger or multi-tubular heat exchanger.
  • the flow passage of the gas to be heated may pass through the side wall of the gas treatment part and run through the treatment part.
  • fins or fillers may be disposed on the outer side and/or the inner side of the flow passage.
  • heat exchange may be performed in a multiple-stage manner to increase the heat-exchange efficiency.
  • single-tubular or multi-tubular heat exchangers may be provided in a multiple-stage manner. From the standpoint of efficiency of the heat exchange, as shown in FIG. 3 , it is desirable that the inert gas is introduced from the low-temperature part and the heated inert gas is taken out from the high-temperature part of the abatement part. However, the inert gas may be introduced from the high-temperature part and the heated inert gas may be taken out from the low-temperature part of the abatement part.
  • the flow direction of the exhaust gas (or combustion gas) and the flow direction of the gas to be heated (inert gas) may be perpendicular to each other or parallel to each other or opposed to each other.
  • the introduction position of the inert gas into the vacuum pump may be selected from anywhere as long as the introduction position is effective to prevent the product from being attached.
  • the introduction of the inert gas into an intermediate stage of compression stages is effective to obtain temperature increase. Therefore, the introduction of the inert gas into the intermediate stage is desirable from the standpoint of energy saving.
  • the inert gas should be introduced into the intermediate stage.
  • the temperature of the inert gas is substantially equal to the internal temperature of the vacuum pump. This temperature adjustment of the inert gas allows a change in dimension of the rotor and the casing to be minimized.
  • FIGS. 5A and 5B are views showing a configuration example in which an inner wall of the abatement part 10 is composed of a heat insulating material to prevent the heat exchanger disposed on the outer side of the abatement part 10 from being heated more than necessary.
  • FIG. 5A is a schematic cross-sectional view of the abatement 10
  • FIG. 5B is a side view of the abatement part 10.
  • the abatement part 10 has an inner wall composed of a heat insulating material 25 in a high-temperature part serving as a gas treatment portion.
  • a cylindrical heat exchanger 26 is disposed at an outer circumferential side of the heat insulating material 25 to heat the inert gas.
  • the heat exchanger 26 has the same structure as the heating chamber 13 shown in FIG. 3 .
  • components of the heat exchanger 26 for example, seal materials
  • the inner wall of the abatement part 10 may comprise a wall containing a heat insulating material.
  • FIGS. 6A and 6B are views showing a configuration example in which the heat exchanger 26 is disposed on the outer side of the abatement part 10 and divided into a plurality of segments in an axial direction of the abatement part 10.
  • FIG. 6A is a schematic cross-sectional view of the heat exchanger 26 and
  • FIG. 6B is a side view of the heat exchanger 26.
  • the heat exchanger 26 is divided into three chambers, i.e., a first heat exchanger part 26A, a second heat exchanger part 26B and a third heat exchanger part 26C.
  • Valves V1, V2, V3 are provided in the respective heat exchanger parts 26A, 26B, 26C, and connecting valves Vc, Vc are provided between the adjacent chambers.
  • the number of chambers to be used are changed to control the temperature of the gas to be heated (inert gas). Specifically, when a low-temperature gas is sufficient, the heated gas (inert gas) is supplied from the outlet A to the vacuum pump 1.
  • the heated gas (inert gas) is supplied from the outlet B to the vacuum pump 1.
  • the heated gas (inert gas) is supplied from the outlet C to the vacuum pump 1.
  • the chamber of the heat exchanger may be divided in a vertical direction or a lateral direction or an oblique direction.
  • the gas having a constant temperature can be supplied to the vacuum pump 1.
  • the configuration shown in FIGS. 6A and 6B can cope with the case where the optimum temperature of the pump is changed. For example, at the time of forming a film in an SiN process, it is necessary to keep the pump warm to a temperature of 180°C or higher, thereby preventing NH 4 Cl from being attached to the pump. In the case of performing ClF 3 cleaning, it is necessary to lower the temperature of the pump. In these cases also, by changing the number of chambers in the heat exchanger 26 suitably, the inert gas having a desired temperature can be supplied to the pump.
  • the increase or decrease of the purging amount of the gas can be performed by increasing or decreasing the amount of the gas while the heated gas (inert gas) is maintained at a desired temperature.
  • FIG. 7 is a schematic perspective view showing a configuration example in which the inert gas heated by the heat exchanger 26 installed in the abatement part 10 is further heated by a heater.
  • a heater 28 is provided in the middle of the pipe 14 which connects the heat exchanger 26 installed in the abatement part 10 and the vacuum pump 1.
  • the inert gas heated by the heat exchanger 26 which utilizes waste heat of the abatement part 10 is further heated by the heater 28.
  • the temperature of the inert gas can be equal to the internal temperature of the vacuum pump 1, and a change in dimension of the rotor and the casing can be minimized.
  • FIG. 8 is a schematic perspective view showing a configuration example in which a heat exchange mechanism for preheating air for oxidization is provided in the abatement part 10.
  • a heat exchange mechanism 27 is provided immediately below the heat exchanger 26 to preheat air for oxidization.
  • the preheated air is supplied to the air nozzles 15 of the combustion-type abatement part 10 (see FIG. 3 ).
  • a heater required for preheating can be eliminated, thus promoting energy saving.
  • FIG. 9 is a schematic perspective view showing a system which comprises a plurality of vacuum pumps 1 connected to a plurality of process apparatuses, and a plurality of abatement parts 10 attached to the respective vacuum pumps 1. This system is configured to distribute the inert gas heated by the abatement part 10 to the plural vacuum pumps 1.
  • the system has a plurality of process apparatuses PA which are connected respectively to the vacuum pumps 1.
  • the abatements parts 10 are attached to the respective discharge pipes 1a of the vacuum pumps 1.
  • the heat exchangers 26 are provided in the respective abatement parts 10, and outlet pipes of the respective heat exchangers 26 are connected to a switching mechanism 30.
  • the respective process apparatuses PA and the switching mechanism 30 are connected to a control mechanism 31. According to the system configured as shown in FIG. 9 , purging routes of the inert gas can be switched depending on operational situation of the process.
  • the heated inert gas discharged from the pair of the vacuum pump and the abatement part which have been already operated is supplied to another vacuum pump 1 immediately after the start.
  • the internal temperature of the vacuum pump 1 immediately after the start can be increased.
  • the abatement part 10 attached to the vacuum pump 1 comprises a combustion-type abatement part
  • measures to prevent a flame from being extinguished can be taken.
  • the combustion-type abatement part 10 has the UV sensor 18.
  • signal intensity of the UV sensor 18 becomes lower than a reference value
  • discharge ignition is performed by the plug 19.
  • a flame can be prevented from being extinguished in the combustion chamber S.
  • a valve for supplying the inert gas is opened in conjunction with the detection of stop of the vacuum pump 1 to perform the inert gas purging of the abatement part and the vacuum pump, thereby preventing the countercurrent and the backfire to the process apparatus PA from occurring.
  • the rotational speed of the vacuum pump 1 is detected by a change in voltage and/or current of the motor, and if the rotational speed of the vacuum pump 1 is lower than a reference value, it is judged that there is a possibility of stop of the vacuum pump 1. Then, the inert gas purging of the vacuum pump 1 and the abatement part 10 is performed. Further, simultaneously with the above operation, a signal for closing a gate valve provided between the vacuum chamber and the vacuum pump is outputted to close the gate valve.
  • FIG. 10A is a schematic partial cross-sectional view showing a configuration example in which as heat-retention measures of the discharge pipe 1a which connects the vacuum pump 1 and the abatement part 10, the discharge pipe 1a comprises a double pipe for performing vacuum insulation.
  • FIG. 10B is a view showing a modified example of FIG. 10A .
  • the discharge pipe 1a comprises a double pipe, and an inner pipe 1a-1 of the double pipe serves as a pipe for the exhaust gas between the vacuum pump and the abatement part and an interior of an outer pipe 1a-2 serves as a vacuum jacket. Then, the outer pipe 1a-2 is connected to the inlet of the vacuum pump 1 to evacuate the vacuum jacket around the inner pipe 1a-1, thereby performing vacuum insulation. By the vacuum insulation, the discharge pipe 1a can be kept warm.
  • the degree of vacuum is lowered to lower heat insulation performance. Therefore, it is necessary to perform vacuum evacuation of the vacuum jacket periodically. As shown in FIG. 10A , by connecting the vacuum jacket to the inlet of the vacuum pump 1, the vacuum jacket can be evacuated at all times. Thus, it is not necessary to perform periodic vacuum evacuation. Further, since vacuum evacuation is performed at all times, a high degree of vacuum can be maintained to enhance the heat insulation performance.
  • FIG. 10B shows a configuration example in which a heater 29 is provided around the inner pipe 1a-1 shown in FIG 10A .
  • a heater 29 is provided around the inner pipe 1a-1 shown in FIG 10A .
  • the discharge pipe 1a which connects the discharge port of the vacuum pump 1 and the abatement part 10 may comprise a double pipe.
  • An inner pipe 1a-1 of the double pipe may serve as a pipe for the exhaust gas between the vacuum pump and the abatement part, and a space between the inner pipe 1a-1 and the outer pipe 1a-2 may serve as a flow passage of the inert gas heated by the above heat exchange mechanism to introduce the inert gas into the vacuum pump 1.
  • the discharge pipe 1a which connect the discharge port of the vacuum pump 1 and the abatement part 10 may comprise a triple pipe.
  • An innermost pipe of the triple pipe may serve as a pipe for the exhaust gas between the vacuum pump and the abatement part, and an outer space of the innermost pipe may serve as a flow passage of the inert gas heated by the above heat exchange mechanism to introduce the inert gas into the vacuum pump 1, and then an outermost space between the pipes may be evacuated by the vacuum pump.
  • the outermost space of the triple pipe may serve as a vacuum jacket, and this vacuum jacket may be evacuated to perform vacuum insulation. Therefore, the inert gas and the exhaust gas which flow inside the vacuum insulation can be kept warm.

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Claims (12)

  1. Pompe à vide (1) munie d'une fonction de réduction, comprenant :
    une pompe à vide (1) comportant un accès de refoulement (la) auquel est fixée une partie de réduction (10) destinée à traiter du gaz d'échappement refoulé par la pompe à vide (1) pour rendre le gaz d'échappement inoffensif ; la partie de réduction (10) comprenant :
    un conteneur cylindrique fixé à l'accès de refoulement de la pompe à vide (1) et agencé pour y traiter le gaz d'échappement par combustion, le conteneur comportant un élément cylindrique intérieur (11) et un élément cylindrique extérieur entourant (12), et étant fixé à l'accès de refoulement de la pompe à vide (1) de sorte que du gaz d'échappement qui a été chauffé par la chaleur de compression dans la pompe à vide (1) est introduit à partir de l'accès de refoulement directement dans l'élément cylindrique intérieur (11) du conteneur de la partie de réduction (10) dans laquelle le gaz d'échappement est traité par combustion, utilisant ainsi la chaleur de compression générée dans la pompe à vide pour traiter le gaz d'échappement dans la partie de réduction ; et
    un échangeur de chaleur (13, 26) situé entre l'élément cylindrique intérieur (11) et l'élément cylindrique extérieur (12), l'échangeur de chaleur (13, 26) étant agencé pour chauffer un gaz inerte en utilisant la chaleur générée lorsque le gaz d'échappement est traité dans le conteneur, et l'échangeur de chaleur (13, 26) étant agencé de telle sorte que du gaz inerte chauffé par l'échangeur de chaleur (13, 26) est introduit dans la pompe à vide (1).
  2. Pompe à vide munie d'une fonction de réduction selon la revendication 1, comprenant un tuyau pour connecter l'accès de refoulement de la pompe à vide au conteneur, le tuyau ayant une longueur de tuyau de 100 mm à 500 mm.
  3. Pompe à vide (1) munie d'une fonction de réduction selon la revendication 1, dans laquelle l'échangeur de chaleur (13, 26) comprend un échangeur de chaleur prévu autour ou à l'intérieur d'une portion de traitement de gaz de la partie de réduction (10).
  4. Pompe à vide (1) munie d'une fonction de réduction selon la revendication 1, dans laquelle l'échangeur de chaleur (13, 26) comprend une partie d'échange de chaleur qui est divisée en une pluralité d'étages (26A, 26B, 26C), et le nombre d'étages de la partie d'échange de chaleur à plusieurs étages est commuté pour contrôler la température du gaz inerte chauffé.
  5. Pompe à vide (1) munie d'une fonction de réduction selon la revendication 1, dans laquelle un matériau isolant thermique (25) est prévu entre une portion de traitement de gaz de la partie de réduction (10) et l'échangeur de chaleur (26).
  6. Pompe à vide (1) munie d'une fonction de réduction selon la revendication 1, dans laquelle est prévu un dispositif de chauffe (28) pour chauffer encore davantage le gaz inerte chauffé par l'échangeur de chaleur (26), et le gaz inerte chauffé par le dispositif de chauffe (28) est introduit dans la pompe à vide (1).
  7. Pompe à vide (1) munie d'une fonction de réduction selon la revendication 1, comprenant un tuyau pour introduire le gaz inerte provenant de l'échangeur de chaleur (13, 26) dans la pompe à vide (1), le tuyau comprenant un double tuyau, un tuyau intérieur du double tuyau servant de passage pour le gaz inerte vers le conteneur et un espace entre le tuyau intérieur et un tuyau extérieur étant évacué par la pompe à vide (1).
  8. Pompe à vide munie d'une fonction de réduction selon la revendication 1, comprenant un tuyau pour connecter l'accès de refoulement de la pompe à vide et le conteneur de la partie de réduction, le tuyau comprenant un double tuyau, un tuyau intérieur du double tuyau servant de passage pour le gaz d'échappement et un espace entre le tuyau intérieur et un tuyau extérieur servant de passage pour le gaz inerte chauffé par l'échangeur de chaleur pour introduire le gaz inerte dans la pompe à vide.
  9. Pompe à vide munie d'une fonction de réduction selon la revendication 1, comprenant un tuyau pour connecter l'accès de refoulement de la pompe à vide et le conteneur de la partie de réduction, le tuyau comprenant un triple tuyau, et un tuyau le plus à l'intérieur du triple tuyau servant de passage pour le gaz d'échappement, un espace extérieur autour du tuyau le plus à l'intérieur servant de passage pour le gaz inerte chauffé par l'échangeur de chaleur pour introduire le gaz inerte dans la pompe à vide, et un espace le plus à l'extérieur entre les tuyaux étant évacué par la pompe à vide.
  10. Pompe à vide (1) munie d'une fonction de réduction selon la revendication 1, comprenant
    un deuxième échangeur de chaleur (27) agencé pour chauffer de l'air en utilisant la chaleur générée lorsque le gaz d'échappement est traité pour le rendre inoffensif dans le conteneur de la partie de réduction (10), le deuxième échangeur de chaleur (27) étant agencé de telle sorte que l'air chauffé par le deuxième échangeur de chaleur (27) est introduit comme air préchauffé dans la partie de réduction (10).
  11. Pompe à vide (1) munie d'une fonction de réduction selon l'une quelconque des revendications précédentes, comprenant en outre :
    un tuyau pour connecter l'accès de refoulement de la pompe à vide et le conteneur de la partie de réduction, le tuyau comprenant un double tuyau, un tuyau intérieur du double tuyau servant de passage pour le gaz d'échappement et un espace entre le tuyau intérieur et un tuyau extérieur servant de passage pour le gaz inerte chauffé par l'échangeur de chaleur pour introduire le gaz inerte dans la pompe à vide.
  12. Dispositif de pompe à vide comprenant :
    une pluralité de pompes à vide (1) munies d'une fonction de réduction selon l'une quelconque des revendications précédentes ; et
    un mécanisme de commutation (30) agencé pour distribuer le gaz inerte chauffé par l'une de la pluralité de parties de réduction (10) à l'une quelconque de la pluralité de pompes à vide (1).
EP14020041.1A 2013-03-28 2014-03-21 Pompe à vide avec fonction d'élimination Active EP2808421B1 (fr)

Applications Claiming Priority (1)

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JP2013069730A JP6153754B2 (ja) 2013-03-28 2013-03-28 除害機能付真空ポンプ

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EP (1) EP2808421B1 (fr)
JP (1) JP6153754B2 (fr)
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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6151945B2 (ja) * 2013-03-28 2017-06-21 株式会社荏原製作所 除害機能付真空ポンプ
WO2016204522A1 (fr) * 2015-06-15 2016-12-22 한국기계연구원 Laveur de type à catalyseur au plasma
DE102015213527A1 (de) * 2015-07-17 2017-01-19 Leybold Gmbh Pumpensystem
JP6685204B2 (ja) * 2016-08-26 2020-04-22 東京エレクトロン株式会社 安全装置、安全システム及び燃焼除害装置の安全化方法
GB201718752D0 (en) 2017-11-13 2017-12-27 Edwards Ltd Vacuum and abatement systems
CN108679631B (zh) * 2018-04-23 2019-06-25 成都之和环保科技有限公司 环保节能型工业废气燃烧处理装置
CN108754455A (zh) * 2018-07-04 2018-11-06 惠科股份有限公司 一种防真空泵管路堵塞的方法及化学气相镀膜机
JP6990207B2 (ja) * 2019-03-22 2022-01-12 大陽日酸株式会社 加熱分解式排ガス除害装置及び逆流防止方法
CN112032022B (zh) * 2020-09-10 2024-04-26 北京通嘉宏瑞科技有限公司 一种无死角吹扫气体的干式真空泵及其使用方法
CN116428157A (zh) * 2023-04-13 2023-07-14 北京通嘉宏瑞科技有限公司 气体加热控制系统及气体加热控制方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5183646A (en) * 1989-04-12 1993-02-02 Custom Engineered Materials, Inc. Incinerator for complete oxidation of impurities in a gas stream
US5301701A (en) * 1992-07-30 1994-04-12 Nafziger Charles P Single-chamber cleaning, rinsing and drying apparatus and method therefor
IL117775A (en) * 1995-04-25 1998-10-30 Ebara Germany Gmbh Inhalation system with gas exhaust cleaner and operating process for it
JP2004200364A (ja) * 2002-12-18 2004-07-15 Seiko Epson Corp 排ガス処理装置および排ガス処理方法
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
GB0521944D0 (en) * 2005-10-27 2005-12-07 Boc Group Plc Method of treating gas
GB0602506D0 (en) * 2006-02-08 2006-03-22 Boc Group Plc Method of treating a gas stream
US20080206445A1 (en) * 2007-02-22 2008-08-28 John Peck Selective separation processes
GB0902234D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Method of treating an exhaust gas stream
JP5661249B2 (ja) * 2009-03-04 2015-01-28 株式会社荏原製作所 排ガス処理システム及びその運転方法
JP2011163150A (ja) * 2010-02-05 2011-08-25 Toyota Industries Corp 水素ガスの排気方法及び真空ポンプ装置
US9625168B2 (en) * 2010-08-05 2017-04-18 Ebara Corporation Exhaust system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
CN104074717B (zh) 2017-05-24
KR20140118902A (ko) 2014-10-08
EP2808421A1 (fr) 2014-12-03
CN104074717A (zh) 2014-10-01
JP2014190684A (ja) 2014-10-06
KR101955738B1 (ko) 2019-03-07
TWI614407B (zh) 2018-02-11
US20140290919A1 (en) 2014-10-02
US9364786B2 (en) 2016-06-14
JP6153754B2 (ja) 2017-06-28
TW201502375A (zh) 2015-01-16

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