EP2730510B1 - Méthode pour emballer du silicium polycristallin - Google Patents

Méthode pour emballer du silicium polycristallin Download PDF

Info

Publication number
EP2730510B1
EP2730510B1 EP13190464.1A EP13190464A EP2730510B1 EP 2730510 B1 EP2730510 B1 EP 2730510B1 EP 13190464 A EP13190464 A EP 13190464A EP 2730510 B1 EP2730510 B1 EP 2730510B1
Authority
EP
European Patent Office
Prior art keywords
polycrystalline silicon
plastic bag
metering
filling
polysilicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP13190464.1A
Other languages
German (de)
English (en)
Other versions
EP2730510A1 (fr
Inventor
Werner Lazarus
Christian Fraunhofer
Herbert Schmölz
Matthias Vietz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wacker Chemie AG
Original Assignee
Wacker Chemie AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie AG filed Critical Wacker Chemie AG
Publication of EP2730510A1 publication Critical patent/EP2730510A1/fr
Application granted granted Critical
Publication of EP2730510B1 publication Critical patent/EP2730510B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/30—Devices or methods for controlling or determining the quantity or quality or the material fed or filled
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/04—Methods of, or means for, filling the material into the containers or receptacles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/04—Methods of, or means for, filling the material into the containers or receptacles
    • B65B1/06—Methods of, or means for, filling the material into the containers or receptacles by gravity flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/30—Devices or methods for controlling or determining the quantity or quality or the material fed or filled
    • B65B1/32—Devices or methods for controlling or determining the quantity or quality or the material fed or filled by weighing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B25/00—Packaging other articles presenting special problems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B43/00—Forming, feeding, opening or setting-up containers or receptacles in association with packaging
    • B65B43/42—Feeding or positioning bags, boxes, or cartons in the distended, opened, or set-up state; Feeding preformed rigid containers, e.g. tins, capsules, glass tubes, glasses, to the packaging position; Locating containers or receptacles at the filling position; Supporting containers or receptacles during the filling operation
    • B65B43/54—Means for supporting containers or receptacles during the filling operation
    • B65B43/59—Means for supporting containers or receptacles during the filling operation vertically movable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B5/00—Packaging individual articles in containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, jars
    • B65B5/10—Filling containers or receptacles progressively or in stages by introducing successive articles, or layers of articles
    • B65B5/101—Filling containers or receptacles progressively or in stages by introducing successive articles, or layers of articles by gravity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B29/00—Packaging of materials presenting special problems

Definitions

  • the invention relates to the packaging of polycrystalline silicon.
  • Polycrystalline silicon hereinafter referred to as polysilicon, u. a. as starting material for the production of electronic components and solar cells.
  • CVD chemical vapor deposition
  • Siemens reactors On a large scale, this process is realized in so-called Siemens reactors.
  • the polysilicon accumulates in the form of rods.
  • the polysilicon rods are usually comminuted by manual methods.
  • US 8074905 discloses a device comprising a roughing polysilicon feeder in a crusher plant, the crusher plant and a polysilicon rupture classifying plant, characterized in that the crushing plant is provided with a controller providing variable adjustment of at least one crushing parameter in the crusher plant and / or at least one sorting parameter in the sorting system allows.
  • the least possible contaminated polysilicon fraction is desired. To accomplish this, various cleaning methods are used.
  • US 2010/0001106 A1 describes a process for the production of highly pure classified polysilicon fracture in which a polysilicon from the Siemens process is comminuted and classified by means of a device comprising comminution tools and a screening device and the polysilicon fracture thus obtained is cleaned by means of a cleaning bath, characterized in that the crushing tools and the sieve device consistently have a surface in contact with the polysilicon of a material which contaminates the polysilicon break only with such foreign particles, which are then selectively removed by the cleaning bath.
  • silicon dust adhered to the debris is considered contamination because it reduces the yield of crystal pulling.
  • US 2012/0052297 A1 discloses a process for the production of polycrystalline silicon comprising fracturing polycrystalline silicon deposited on thin rods in a Siemens reactor, classifying the fractions into size classes of about 0.5 mm to greater than 45 mm, and treating the fragments by means of compressed air or dry ice Remove silicon dust from the debris with no chemical wet cleaning.
  • the polycrystalline silicon must be packaged after the comminution steps and any cleaning or dedusting that may be required before it is transported to the customer.
  • Tubular bag machines which are in principle suitable for packaging of silicon fracture, are commercially available.
  • a corresponding packaging machine is for example in DE 36 40 520 A1 described.
  • polysilicon breakage is a sharp-edged, non-free-flowing bulk material with a weight of the individual silicon fragments of up to 2500 g. Therefore, it must be ensured during packaging that the material does not puncture the usual plastic bags during filling, or even completely destroyed in the worst case.
  • the commercial packaging machines are to be suitably modified for the purpose of packaging polysilicon.
  • US 7013620 B2 there is known an apparatus for inexpensively fully automated transporting, weighing, portioning, filling and packaging of a high purity polysilicon fracture comprising a polysilicon breakthrough chute, a polysilicon fracture weighing device connected to a hopper, baffles made of silicon, a filling device comprising forming a plastic bag comprising a deionizer which prevents static charge and thus particle contamination of the plastic film, a plastic bag filled with polysilicon fracture, a flow box mounted above a conveyor trough, weighing device, filling device and welding device which causes particle contamination of the polysilicon fracture prevents a conveyor belt with a magnetic inductive detector for the welded polysilicon break filled plastic bag, wherein all components, ie e come in contact with the polysilicon, reinforced with silicon or covered with a highly wear-resistant plastic.
  • DE 103 46 881 A1 discloses a plant for filling and closing of open plastic bags, which is equipped with a filling machine which includes a rotor rotatably driven about a vertical axis, which is equipped with a plurality of filling devices, to which the plastic bags to be filled can be attached, and the filling devices Welding units for producing the seams after removing the filled plastic bags are assigned by the filling devices, and the system is still equipped with a linear discharge belt for transporting the filled plastic bags from the filling machine, characterized in that the rotor of the filling machine with constant speed driven and with the filler neck associated VerInstitutnahtsch fashion listeningen is equipped, and also assigned to the rotor of the filling machine to the individual welding means pivotally mounted sack support means, the a from the filling means a Take over plastic bags immediately after the manufacture of the closure seams of the welding devices and transferred to a drivable with the rotational speed of the rotor, as well as tangentially arranged stationary discharge belt.
  • EP 2 487 112 A1 discloses a method for dosing and packaging polysilicon fragments wherein a product stream of polysilicon fragments is transported via a chute, separated into coarse and fine debris by at least one sieve, weighed by a dosing weigher and metered to a target weight, discharged via a discharge chute and to a packaging unit transported where the polysilicon fragments are packed in plastic bags.
  • the removal of polysilicon fragments from the metering unit by means of the discharge chute and their transport to the packaging unit leads to the formation of fines. Therefore, the object of the invention was to automatically pack polycrystalline silicon and reduce the resulting fines to an extremely low level.
  • polycrystalline silicon to be introduced can only reach this point of the plastic bag in the vertical direction, whereby that clamping can be completely or partially released, so that the cross section of the plastic bag at this point increased again and the polycrystalline silicon from this point in the vertical direction in the plastic bag can move further down.
  • the fines produced during packaging are significantly lower than in conventional automatic packaging processes.
  • the fines fraction for fraction size 20-60 mm is 1400 ppmw or less.
  • the invention is based on silicon fragments of specific size classes, which were produced by comminuting a rod deposited by means of the Siemens process and subsequent sorting and classification.
  • the polysilicon fragments are transported via a conveyor trough and separated by means of at least one sieve into coarse and fine fragments.
  • the dosing system is designed in such a way that fines, ie very fine particles and chips of the polysilicon, are removed by sieving before the filling process.
  • the sieve may be a perforated plate, a bar screen, an optopneumatic sorting or any other suitable device. Depending on the size of the break, different screens can be used. For fraction sizes from 20 to 60 mm, sieves with a mesh width of 3 mm are preferably used. For break sizes 45 to 120 mm, sieves with a mesh width of 9 mm are preferably used.
  • the screens used at least partially comprise a low-contamination material such as e.g. a carbide.
  • a low-contamination material such as e.g. a carbide.
  • hard metals sintered Carbidhartmetalle.
  • hard metals which preferably include titanium carbide and titanium nitride as hard materials, the binder phase comprising nickel, cobalt and molybdenum.
  • At least the mechanically stressed, wear-sensitive surface regions of sieves comprise cemented carbide or ceramic / carbides.
  • at least one screen is made entirely of hard metal. You can partially or be provided over the entire surface with a coating.
  • the coating used is preferably a material selected from the group consisting of titanium nitride, titanium carbide, aluminum titanium nitride and DLC (Diamond Like Carbon).
  • a metering unit comprising a conveyor trough suitable for conveying a product stream of debris, at least one screen suitable for separating the product stream into coarse and fine debris, a coarse metering trough for coarse debris and a fine metering trough for fine debris ,
  • a metering unit comprising a conveyor trough suitable for conveying a product stream of debris, at least one screen suitable for separating the product stream into coarse and fine debris, a coarse metering trough for coarse debris and a fine metering trough for fine debris .
  • a typical fraction size distribution includes fragments of sizes 1 to 200 mm.
  • fragments below a certain size can be removed from the dosing unit by means of a sieve, preferably by means of a rod sieve, in conjunction with a discharge channel. So it can be accomplished that only fragments of a very specific size class are dosed and packaged. By transporting the polysilicon on the conveyor again arise undesirable product sizes. These are separated in the dosing system by means of a sieve.
  • the removed smaller fragments are reclassified in downstream processes, dosed and packaged or put to another use.
  • the dosage of the polysilicon over the two dosing channels can be automated.
  • the polycrystalline silicon is filled by the dosing directly into the plastic bag, in particular a PE bag, and preferably weighed together with the packaging and a gripper system.
  • the weighing system is based on the system of a gross balance.
  • the clamping device serves to compress the bag during filling.
  • the clamping device serves as a kind of fall brake, which is pressed against the plastic bag, whereby the cross section of the plastic bag is first reduced and then released controlled.
  • the product flow can be controlled and it is achieved a filling of the silicon in the prefabricated bag, in which only a small amount of fines is produced.
  • the separation of fines is done via dosing, at the end Abtrennmechanismen, in particular bar screens, are attached, which accomplish the separation of the fines.
  • the at least one clamping device opens when a certain filling level and a certain weight of polycrystalline silicon in the bag are reached.
  • the invention it is possible to lead the product stream finely divided to the bag. This is done with low-contamination sieves on the dosing system.
  • the dosing additional Feindosierrinne
  • the filling takes place via an inlet funnel.
  • the inlet funnel preferably consists of a low-contamination material for silicon.
  • the drop height that further reduces during the filling process is detected.
  • the product clamping can be released, so that the material sags down to the next clamp or the bottom of the bag.
  • damping storage elements are pivoted into the product stream. These are preferably made of or coated with a low-contamination material. These elements provide some cushioning effect on the product flow, absorb energy and fill with polycrystalline silicon. After a partial filling of the plastic bag, they are emptied and removed again from the product stream. On the one hand, this is desirable for achieving the clock rate and, on the other hand, for further reducing the drop height.
  • the polysilicon fragments are still detected by a camera before the dosing process, while the specific weight of the fragments is determined and further recognizes the surface texture of the fragments.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Quality & Reliability (AREA)
  • Silicon Compounds (AREA)
  • Basic Packing Technique (AREA)

Claims (6)

  1. Procédé pour emballer du silicium polycristallin qui se trouve sous forme de fragments, comprenant les étapes suivantes
    - mettre à disposition le silicium polycristallin dans un système de dosage comprenant un chenal de transport pour transporter le silicium polycristallin ainsi que des chenaux de dosage, comprenant un chenal de dosage grossier pour les gros fragments et un chenal de dosage fin pour les petits fragments, à la fin desquels est disposé un mécanisme de séparation pour l'élimination par tamisage de la proportion de fines ;
    - verser le silicium polycristallin provenant des chenaux de dosage du système de dosage, via lequel la proportion de fines est séparée par tamisage, directement dans un sac en matériau synthétique disposé sous le système de dosage, caractérisé en ce que pendant le déversement, le poids du sac en matériau synthétique présentant le silicium polycristallin déversé est déterminé et le processus de déversement est terminé après avoir atteint un poids cible ;
    une hauteur de chute du silicium polycristallin du système de dosage dans le sac en matériau synthétique étant maintenue à moins de 450 mm à l'aide d'au moins un dispositif de serrage pendant l'ensemble du processus de déversement, le dispositif de serrage étant conçu de manière telle que le sac en matériau synthétique est comprimé pendant le remplissage, suite à quoi la section transversale du sac en matériau synthétique est d'abord réduite et ensuite libérée de manière contrôlée.
  2. Procédé selon la revendication 1, plusieurs de ces dispositifs de serrage étant disposés sur la longueur du sac en matériau synthétique, qui sont relâchés au fur et à mesure du remplissage croissant du sac en matériau synthétique.
  3. Procédé selon l'une quelconque des revendications 1 ou 2, le silicium polycristallin étant rempli via une buse d'entrée dans le sac en matériau synthétique.
  4. Procédé selon l'une quelconque des revendications 1 à 3, des éléments d'amortissement et d'accumulation étant pivotés dans un flux de polysilicium entre le système de dosage et le sac en matériau synthétique, qui se remplissent de fragments et qui sont vidés après un degré de remplissage déterminé du sac en matériau synthétique et de nouveau éliminés.
  5. Procédé selon l'une quelconque des revendications 1 à 4, le silicium polycristallin étant enregistré avant le dosage au moyen d'une caméra, un poids spécifique et un état de surface du silicium polycristallin étant déterminés.
  6. Procédé selon l'une quelconque des revendications 1 à 5, une hauteur de chute du silicium polycristallin du système de dosage dans le sac en matériau synthétique étant maintenue à moins de 300 mm à l'aide d'au moins un dispositif de serrage pendant l'ensemble du processus de déversement.
EP13190464.1A 2012-11-09 2013-10-28 Méthode pour emballer du silicium polycristallin Active EP2730510B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012220422.9A DE102012220422A1 (de) 2012-11-09 2012-11-09 Verpackung von polykristallinem Silicium

Publications (2)

Publication Number Publication Date
EP2730510A1 EP2730510A1 (fr) 2014-05-14
EP2730510B1 true EP2730510B1 (fr) 2017-08-30

Family

ID=49484230

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13190464.1A Active EP2730510B1 (fr) 2012-11-09 2013-10-28 Méthode pour emballer du silicium polycristallin

Country Status (9)

Country Link
US (1) US9550587B2 (fr)
EP (1) EP2730510B1 (fr)
JP (1) JP5784683B2 (fr)
KR (1) KR101578580B1 (fr)
CN (1) CN103803103B (fr)
CA (1) CA2831677C (fr)
DE (1) DE102012220422A1 (fr)
NO (1) NO2922844T3 (fr)
TW (1) TWI565623B (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012208473A1 (de) * 2012-05-21 2013-11-21 Wacker Chemie Ag Polykristallines Silicium
DE102012220422A1 (de) * 2012-11-09 2014-05-15 Wacker Chemie Ag Verpackung von polykristallinem Silicium
DE102013214099A1 (de) * 2013-07-18 2015-01-22 Wacker Chemie Ag Verpackung von polykristallinem Silicium
CN104150055B (zh) * 2014-07-31 2016-01-27 中国恩菲工程技术有限公司 多晶硅自动破碎包装设备
WO2016047574A1 (fr) * 2014-09-26 2016-03-31 株式会社トクヤマ Emballage de polysilicium
DE102015209629A1 (de) * 2015-05-26 2016-12-01 Wacker Chemie Ag Verpackung von Polysilicium
DE102015211351A1 (de) 2015-06-19 2016-12-22 Siltronic Ag Siebplatte für Siebanlagen zum mechanischen Klassieren von Polysilicium
WO2022042815A1 (fr) 2020-08-24 2022-03-03 Wacker Chemie Ag Plaque de tamis de dispositif de séparation pour classer des matériaux en vrac
JP2024510689A (ja) * 2021-03-24 2024-03-11 ワッカー ケミー アクチエンゲゼルシャフト シリコン片用輸送容器

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2377937A1 (fr) * 1977-01-20 1978-08-18 Alfa Laval Ag Procede et dispositif pour la desaeration des poudres, telles que poudres de lait
DE2907015A1 (de) * 1979-02-23 1980-09-04 Hauni Werke Koerber & Co Kg Vorrichtung zum abfuellen schuettbarer gueter in verpackungsbehaelter
GB8621259D0 (en) * 1986-09-03 1986-10-08 W J Morray Engineering Limited Filling bag with articles
GB2197290B (en) * 1986-09-03 1990-10-24 W J Morray Engineering Limited Method of apparatus for filling a bag with individual packs of articles or produce
DE3640520A1 (de) 1986-11-27 1988-06-09 Rovema Gmbh Verfahren zum dosieren und verpacken von schuettfaehigen guetern und verpackungsmaschine zur durchfuehrung des verfahrens
JP2601649B2 (ja) * 1986-12-10 1997-04-16 大和製衡 株式会社 金属検出器付き計量包装装置
DE19654612C2 (de) * 1996-12-20 1999-07-01 Korsch Pressen Ag Verfahren und Vorrichtung zur Kontrolle der Tablettenparameter
US6089285A (en) * 1998-04-29 2000-07-18 Memc Electronics Materials, Inc. Method and system for supplying semiconductor source material
DE10204176A1 (de) 2002-02-01 2003-08-14 Wacker Chemie Gmbh Vorrichtung und Verfahren zur kontaminationsarmen automatischen Verpackung von Polysiliciumbruch
US8021483B2 (en) 2002-02-20 2011-09-20 Hemlock Semiconductor Corporation Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
DE10346881A1 (de) 2003-10-09 2005-05-04 Haver & Boecker Anlage zum Füllen und Verschließen von offenen Kunststoffsäcken
DE102005037916B4 (de) * 2004-11-11 2018-08-02 Windmöller & Hölscher Kg Maschine zum Formen, Füllen und Schließen von Säcken und Verfahren zum Betrieb derselben
DE102006016323A1 (de) 2006-04-06 2007-10-11 Wacker Chemie Ag Verfahren und Vorrichtung zum Zerkleinern und Sortieren von Polysilicium
DE102006035081A1 (de) * 2006-07-28 2008-01-31 Wacker Chemie Ag Verfahren und Vorrichtung zur Herstellung von klassiertem polykristallinen Siliciumbruch in hoher Reinheit
DE102007027110A1 (de) * 2007-06-13 2008-12-18 Wacker Chemie Ag Verfahren und Vorrichtung zum Verpacken von polykristallinem Siliciumbruch
JP4539771B2 (ja) 2008-09-01 2010-09-08 トヨタ自動車株式会社 助手席用エアバッグ装置
DE102011003875A1 (de) * 2011-02-09 2012-08-09 Wacker Chemie Ag Verfahren und Vorrichtung zum Dosieren und Verpacken von Polysiliciumbruchstücken sowie Dosier- und Verpackungseinheit
CN202115892U (zh) 2011-05-31 2012-01-18 上海整合包装有限公司 一种单晶、多晶硅片专用包装盒
DE102011081196A1 (de) * 2011-08-18 2013-02-21 Wacker Chemie Ag Verfahren zur Verpackung von polykristallinem Silicium
DE102012206251A1 (de) * 2012-04-17 2013-10-17 Wacker Chemie Ag Verpackung von polykristallinem Silicium
DE102012208473A1 (de) * 2012-05-21 2013-11-21 Wacker Chemie Ag Polykristallines Silicium
WO2014037965A1 (fr) * 2012-09-05 2014-03-13 MEMC ELECTRONIC METERIALS S.p.A. Procédé de chargement d'une charge de polysilicium dans un creuset
DE102012220422A1 (de) * 2012-11-09 2014-05-15 Wacker Chemie Ag Verpackung von polykristallinem Silicium
DE102012223192A1 (de) * 2012-12-14 2014-06-18 Wacker Chemie Ag Verpackung von polykristallinem Silicium

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
US20140130455A1 (en) 2014-05-15
CN103803103B (zh) 2017-04-12
EP2730510A1 (fr) 2014-05-14
CN103803103A (zh) 2014-05-21
JP2014094882A (ja) 2014-05-22
TWI565623B (zh) 2017-01-11
KR101578580B1 (ko) 2015-12-17
DE102012220422A1 (de) 2014-05-15
US9550587B2 (en) 2017-01-24
NO2922844T3 (fr) 2018-06-09
TW201418111A (zh) 2014-05-16
CA2831677A1 (fr) 2014-05-09
KR20140060228A (ko) 2014-05-19
JP5784683B2 (ja) 2015-09-24
CA2831677C (fr) 2015-10-20

Similar Documents

Publication Publication Date Title
EP2730510B1 (fr) Méthode pour emballer du silicium polycristallin
EP2666750B1 (fr) Silicium polycristallin
EP2559620B1 (fr) Procédé d'emballage de silicium polycristallin
EP2487112B1 (fr) Procédé et dispositif de dosage et d'emballage de composants en polysilicium
EP1842595B1 (fr) Procédé et dispositif pour broyer et trier de polysilicium
EP1645333B1 (fr) Dispositif et procédé pour casser, avec faible contamination, des fragments de silicium
JP4988821B2 (ja) 多結晶シリコンの破片を柔軟に分級するための装置および方法
EP3554723B1 (fr) Dispositif de séparation pour du polysilicium
WO2016188893A1 (fr) Emballage de silicium polycristallin
EP2961658B1 (fr) Emballage de fragments de polysilicium

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20131028

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20170518

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 923279

Country of ref document: AT

Kind code of ref document: T

Effective date: 20170915

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502013008192

Country of ref document: DE

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 5

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20170830

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

REG Reference to a national code

Ref country code: NO

Ref legal event code: T2

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171230

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171130

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171201

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

Ref country code: DE

Ref legal event code: R097

Ref document number: 502013008192

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20171130

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171031

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171028

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171031

26N No opposition filed

Effective date: 20180531

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20171031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 6

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171028

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20131028

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 923279

Country of ref document: AT

Kind code of ref document: T

Effective date: 20181028

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20181028

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20191028

Year of fee payment: 7

Ref country code: FR

Payment date: 20191028

Year of fee payment: 7

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20201031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20201028

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230510

REG Reference to a national code

Ref country code: DE

Ref legal event code: R081

Ref document number: 502013008192

Country of ref document: DE

Owner name: WACKER CHEMIE AG, DE

Free format text: FORMER OWNER: WACKER CHEMIE AG, 81737 MUENCHEN, DE

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20241021

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NO

Payment date: 20241023

Year of fee payment: 12