EP2730510B1 - Method for packaging of polycrystalline silicon - Google Patents
Method for packaging of polycrystalline silicon Download PDFInfo
- Publication number
- EP2730510B1 EP2730510B1 EP13190464.1A EP13190464A EP2730510B1 EP 2730510 B1 EP2730510 B1 EP 2730510B1 EP 13190464 A EP13190464 A EP 13190464A EP 2730510 B1 EP2730510 B1 EP 2730510B1
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- EP
- European Patent Office
- Prior art keywords
- polycrystalline silicon
- plastic bag
- metering
- filling
- polysilicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims description 70
- 238000004806 packaging method and process Methods 0.000 title claims description 26
- 238000000034 method Methods 0.000 title claims description 22
- 239000004033 plastic Substances 0.000 claims description 40
- 229920005591 polysilicon Polymers 0.000 claims description 36
- 238000012216 screening Methods 0.000 claims description 4
- 238000013016 damping Methods 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- 239000012634 fragment Substances 0.000 description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 239000000047 product Substances 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 238000011109 contamination Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005303 weighing Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000007873 sieving Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005429 filling process Methods 0.000 description 2
- 238000012858 packaging process Methods 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 235000011089 carbon dioxide Nutrition 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000011143 downstream manufacturing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011856 silicon-based particle Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
- B65B1/30—Devices or methods for controlling or determining the quantity or quality or the material fed or filled
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
- B65B1/04—Methods of, or means for, filling the material into the containers or receptacles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
- B65B1/04—Methods of, or means for, filling the material into the containers or receptacles
- B65B1/06—Methods of, or means for, filling the material into the containers or receptacles by gravity flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
- B65B1/30—Devices or methods for controlling or determining the quantity or quality or the material fed or filled
- B65B1/32—Devices or methods for controlling or determining the quantity or quality or the material fed or filled by weighing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B25/00—Packaging other articles presenting special problems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B43/00—Forming, feeding, opening or setting-up containers or receptacles in association with packaging
- B65B43/42—Feeding or positioning bags, boxes, or cartons in the distended, opened, or set-up state; Feeding preformed rigid containers, e.g. tins, capsules, glass tubes, glasses, to the packaging position; Locating containers or receptacles at the filling position; Supporting containers or receptacles during the filling operation
- B65B43/54—Means for supporting containers or receptacles during the filling operation
- B65B43/59—Means for supporting containers or receptacles during the filling operation vertically movable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B5/00—Packaging individual articles in containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, jars
- B65B5/10—Filling containers or receptacles progressively or in stages by introducing successive articles, or layers of articles
- B65B5/101—Filling containers or receptacles progressively or in stages by introducing successive articles, or layers of articles by gravity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B29/00—Packaging of materials presenting special problems
Definitions
- the invention relates to the packaging of polycrystalline silicon.
- Polycrystalline silicon hereinafter referred to as polysilicon, u. a. as starting material for the production of electronic components and solar cells.
- CVD chemical vapor deposition
- Siemens reactors On a large scale, this process is realized in so-called Siemens reactors.
- the polysilicon accumulates in the form of rods.
- the polysilicon rods are usually comminuted by manual methods.
- US 8074905 discloses a device comprising a roughing polysilicon feeder in a crusher plant, the crusher plant and a polysilicon rupture classifying plant, characterized in that the crushing plant is provided with a controller providing variable adjustment of at least one crushing parameter in the crusher plant and / or at least one sorting parameter in the sorting system allows.
- the least possible contaminated polysilicon fraction is desired. To accomplish this, various cleaning methods are used.
- US 2010/0001106 A1 describes a process for the production of highly pure classified polysilicon fracture in which a polysilicon from the Siemens process is comminuted and classified by means of a device comprising comminution tools and a screening device and the polysilicon fracture thus obtained is cleaned by means of a cleaning bath, characterized in that the crushing tools and the sieve device consistently have a surface in contact with the polysilicon of a material which contaminates the polysilicon break only with such foreign particles, which are then selectively removed by the cleaning bath.
- silicon dust adhered to the debris is considered contamination because it reduces the yield of crystal pulling.
- US 2012/0052297 A1 discloses a process for the production of polycrystalline silicon comprising fracturing polycrystalline silicon deposited on thin rods in a Siemens reactor, classifying the fractions into size classes of about 0.5 mm to greater than 45 mm, and treating the fragments by means of compressed air or dry ice Remove silicon dust from the debris with no chemical wet cleaning.
- the polycrystalline silicon must be packaged after the comminution steps and any cleaning or dedusting that may be required before it is transported to the customer.
- Tubular bag machines which are in principle suitable for packaging of silicon fracture, are commercially available.
- a corresponding packaging machine is for example in DE 36 40 520 A1 described.
- polysilicon breakage is a sharp-edged, non-free-flowing bulk material with a weight of the individual silicon fragments of up to 2500 g. Therefore, it must be ensured during packaging that the material does not puncture the usual plastic bags during filling, or even completely destroyed in the worst case.
- the commercial packaging machines are to be suitably modified for the purpose of packaging polysilicon.
- US 7013620 B2 there is known an apparatus for inexpensively fully automated transporting, weighing, portioning, filling and packaging of a high purity polysilicon fracture comprising a polysilicon breakthrough chute, a polysilicon fracture weighing device connected to a hopper, baffles made of silicon, a filling device comprising forming a plastic bag comprising a deionizer which prevents static charge and thus particle contamination of the plastic film, a plastic bag filled with polysilicon fracture, a flow box mounted above a conveyor trough, weighing device, filling device and welding device which causes particle contamination of the polysilicon fracture prevents a conveyor belt with a magnetic inductive detector for the welded polysilicon break filled plastic bag, wherein all components, ie e come in contact with the polysilicon, reinforced with silicon or covered with a highly wear-resistant plastic.
- DE 103 46 881 A1 discloses a plant for filling and closing of open plastic bags, which is equipped with a filling machine which includes a rotor rotatably driven about a vertical axis, which is equipped with a plurality of filling devices, to which the plastic bags to be filled can be attached, and the filling devices Welding units for producing the seams after removing the filled plastic bags are assigned by the filling devices, and the system is still equipped with a linear discharge belt for transporting the filled plastic bags from the filling machine, characterized in that the rotor of the filling machine with constant speed driven and with the filler neck associated VerInstitutnahtsch fashion listeningen is equipped, and also assigned to the rotor of the filling machine to the individual welding means pivotally mounted sack support means, the a from the filling means a Take over plastic bags immediately after the manufacture of the closure seams of the welding devices and transferred to a drivable with the rotational speed of the rotor, as well as tangentially arranged stationary discharge belt.
- EP 2 487 112 A1 discloses a method for dosing and packaging polysilicon fragments wherein a product stream of polysilicon fragments is transported via a chute, separated into coarse and fine debris by at least one sieve, weighed by a dosing weigher and metered to a target weight, discharged via a discharge chute and to a packaging unit transported where the polysilicon fragments are packed in plastic bags.
- the removal of polysilicon fragments from the metering unit by means of the discharge chute and their transport to the packaging unit leads to the formation of fines. Therefore, the object of the invention was to automatically pack polycrystalline silicon and reduce the resulting fines to an extremely low level.
- polycrystalline silicon to be introduced can only reach this point of the plastic bag in the vertical direction, whereby that clamping can be completely or partially released, so that the cross section of the plastic bag at this point increased again and the polycrystalline silicon from this point in the vertical direction in the plastic bag can move further down.
- the fines produced during packaging are significantly lower than in conventional automatic packaging processes.
- the fines fraction for fraction size 20-60 mm is 1400 ppmw or less.
- the invention is based on silicon fragments of specific size classes, which were produced by comminuting a rod deposited by means of the Siemens process and subsequent sorting and classification.
- the polysilicon fragments are transported via a conveyor trough and separated by means of at least one sieve into coarse and fine fragments.
- the dosing system is designed in such a way that fines, ie very fine particles and chips of the polysilicon, are removed by sieving before the filling process.
- the sieve may be a perforated plate, a bar screen, an optopneumatic sorting or any other suitable device. Depending on the size of the break, different screens can be used. For fraction sizes from 20 to 60 mm, sieves with a mesh width of 3 mm are preferably used. For break sizes 45 to 120 mm, sieves with a mesh width of 9 mm are preferably used.
- the screens used at least partially comprise a low-contamination material such as e.g. a carbide.
- a low-contamination material such as e.g. a carbide.
- hard metals sintered Carbidhartmetalle.
- hard metals which preferably include titanium carbide and titanium nitride as hard materials, the binder phase comprising nickel, cobalt and molybdenum.
- At least the mechanically stressed, wear-sensitive surface regions of sieves comprise cemented carbide or ceramic / carbides.
- at least one screen is made entirely of hard metal. You can partially or be provided over the entire surface with a coating.
- the coating used is preferably a material selected from the group consisting of titanium nitride, titanium carbide, aluminum titanium nitride and DLC (Diamond Like Carbon).
- a metering unit comprising a conveyor trough suitable for conveying a product stream of debris, at least one screen suitable for separating the product stream into coarse and fine debris, a coarse metering trough for coarse debris and a fine metering trough for fine debris ,
- a metering unit comprising a conveyor trough suitable for conveying a product stream of debris, at least one screen suitable for separating the product stream into coarse and fine debris, a coarse metering trough for coarse debris and a fine metering trough for fine debris .
- a typical fraction size distribution includes fragments of sizes 1 to 200 mm.
- fragments below a certain size can be removed from the dosing unit by means of a sieve, preferably by means of a rod sieve, in conjunction with a discharge channel. So it can be accomplished that only fragments of a very specific size class are dosed and packaged. By transporting the polysilicon on the conveyor again arise undesirable product sizes. These are separated in the dosing system by means of a sieve.
- the removed smaller fragments are reclassified in downstream processes, dosed and packaged or put to another use.
- the dosage of the polysilicon over the two dosing channels can be automated.
- the polycrystalline silicon is filled by the dosing directly into the plastic bag, in particular a PE bag, and preferably weighed together with the packaging and a gripper system.
- the weighing system is based on the system of a gross balance.
- the clamping device serves to compress the bag during filling.
- the clamping device serves as a kind of fall brake, which is pressed against the plastic bag, whereby the cross section of the plastic bag is first reduced and then released controlled.
- the product flow can be controlled and it is achieved a filling of the silicon in the prefabricated bag, in which only a small amount of fines is produced.
- the separation of fines is done via dosing, at the end Abtrennmechanismen, in particular bar screens, are attached, which accomplish the separation of the fines.
- the at least one clamping device opens when a certain filling level and a certain weight of polycrystalline silicon in the bag are reached.
- the invention it is possible to lead the product stream finely divided to the bag. This is done with low-contamination sieves on the dosing system.
- the dosing additional Feindosierrinne
- the filling takes place via an inlet funnel.
- the inlet funnel preferably consists of a low-contamination material for silicon.
- the drop height that further reduces during the filling process is detected.
- the product clamping can be released, so that the material sags down to the next clamp or the bottom of the bag.
- damping storage elements are pivoted into the product stream. These are preferably made of or coated with a low-contamination material. These elements provide some cushioning effect on the product flow, absorb energy and fill with polycrystalline silicon. After a partial filling of the plastic bag, they are emptied and removed again from the product stream. On the one hand, this is desirable for achieving the clock rate and, on the other hand, for further reducing the drop height.
- the polysilicon fragments are still detected by a camera before the dosing process, while the specific weight of the fragments is determined and further recognizes the surface texture of the fragments.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Quality & Reliability (AREA)
- Silicon Compounds (AREA)
- Basic Packing Technique (AREA)
Description
Die Erfindung betrifft die Verpackung von polykristallinem Silicium.The invention relates to the packaging of polycrystalline silicon.
Polykristallines Silicium, im Folgenden als Polysilicium bezeichnet, dient u. a. als Ausgangsmaterial für die Herstellung von elektronischen Bauteilen und Solarzellen.Polycrystalline silicon, hereinafter referred to as polysilicon, u. a. as starting material for the production of electronic components and solar cells.
Es wird durch thermische Zersetzung eines Silicium haltigen Gases oder eines Silicium haltigen Gasgemisches gewonnen. Dieser Prozess wird als Abscheidung aus der Gasphase (CVD, chemical vapor deposition) bezeichnet.It is obtained by thermal decomposition of a silicon-containing gas or a silicon-containing gas mixture. This process is referred to as chemical vapor deposition (CVD).
In großem Maßstab wird dieser Prozess in so genannten Siemens-Reaktoren realisiert. Das Polysilicium fällt dabei in Form von Stäben an. Die Polysiliciumstäbe werden in der Regel mittels händischer Verfahren zerkleinert.On a large scale, this process is realized in so-called Siemens reactors. The polysilicon accumulates in the form of rods. The polysilicon rods are usually comminuted by manual methods.
Es sind eine Reihe maschineller Verfahren bekannt, in denen händisch vorgebrochener Polysilicium-Grobbruch unter Einsatz üblicher Brecher weiter zerkleinert wird. Mechanische Brechverfahren sind beispielsweise in
Für Anwendungen in der Halbleiter- und Solarindustrie ist ein möglichst wenig kontaminierter Polysiliciumbruch erwünscht. Um dies zu bewerkstelligen, kommen auch verschiedene Reinigungsverfahren zum Einsatz.For applications in the semiconductor and solar industries, the least possible contaminated polysilicon fraction is desired. To accomplish this, various cleaning methods are used.
Auch an den Bruchstücken anhaftender Siliciumstaub wird als Kontamination angesehen, da er die Ausbeute beim Kristallziehen reduziert.Also, silicon dust adhered to the debris is considered contamination because it reduces the yield of crystal pulling.
Aus
Das polykristalline Silicium muss jedoch nach den Zerkleinerungsschritten und der gegebenenfalls durchgeführten Reinigung- oder Entstaubung verpackt werden, bevor es zum Kunden transportiert wird.However, the polycrystalline silicon must be packaged after the comminution steps and any cleaning or dedusting that may be required before it is transported to the customer.
Demzufolge ist beim Verpacken darauf zu achten, dass dieses möglichst kontaminationsarm erfolgt.Consequently, when packing it must be ensured that this takes place with as little contamination as possible.
Üblicherweise wird Polysiliciumbruch für die Elektronikindustrie in 5-kg-Beuteln mit einer Gewichtstoleranz von +/- max. 50 g verpackt. Für die Solarindustrie ist Polysiliciumbruch in Beuteln mit einer Einwaage von 10 kg und einer Gewichtstoleranz von +/- max. 100 g üblich.Usually polysilicon breakage for the electronics industry in 5-kg bags with a weight tolerance of +/- max. 50 g packed. For the solar industry, polysilicon is broken in Bags with a weight of 10 kg and a weight tolerance of +/- max. 100 g usual.
Schlauchbeutelmaschinen, die zur Verpackung von Siliciumbruch prinzipiell geeignet sind, sind kommerziell erhältlich. Eine entsprechende Verpackungsmaschine ist beispielsweise in
Bei Polysiliciumbruch handelt es sich aber um ein scharfkantiges, nicht rieselfähiges Schüttgut mit einem Gewicht der einzelnen Siliciumbruchstücke von bis zu 2500 g. Daher ist bei der Verpackung darauf zu achten, dass das Material die üblichen Kunststoffbeutel beim Befüllen nicht durchstößt oder im schlimmsten Fall sogar vollständig zerstört.However, polysilicon breakage is a sharp-edged, non-free-flowing bulk material with a weight of the individual silicon fragments of up to 2500 g. Therefore, it must be ensured during packaging that the material does not puncture the usual plastic bags during filling, or even completely destroyed in the worst case.
Um dies zu verhindern, sind die kommerziellen Verpackungsmaschinen zum Zwecke der Verpackung von Polysilicium in geeigneter Weise zu modifizieren.To prevent this, the commercial packaging machines are to be suitably modified for the purpose of packaging polysilicon.
Aus
Es hat sich gezeigt, dass bei solchen Vorrichtungen oftmals ein Verklemmen der Siliciumbruchstücke in der Abfüllvorrichtung auftritt. Dies ist nachteilig, da es dadurch zu erhöhten Stillstandszeiten der Maschine kommt.It has been found that in such devices often jamming of the silicon fragments in the filling device occurs. This is disadvantageous because it leads to increased downtime of the machine.
Auch treten Durchstoßungen des Kunststoffbeutels auf, was ebenfalls zu einem Stillstand der Anlage und zu Kontamination des Siliciums führt.Also penetrate the plastic bag, which also leads to a shutdown of the plant and contamination of the silicon.
Außerdem hat sich gezeigt, dass während des Verpackens von Bruchstücken einer bestimmten Größenklasse, z.B. Bruchgrößen von 20 bis 60 mm, auch unerwünschte kleinere Siliciumpartikel oder Bruchstücke entstehen. Der Anteil solcher unerwünschter Partikel beträgt für solche Bruchgrößen 17000-23000 ppmw.In addition, it has been found that during the packaging of fragments of a certain size class, eg fracture sizes of 20 to 60 mm, also undesirable smaller silicon particles or fragments arise. The proportion of such unwanted particles is 17000-23000 ppmw for such fraction sizes.
Nachfolgend sollen alle Bruchstücke oder Partikel aus Silicium, die eine solche Größe aufweisen, dass sie die durch ein Maschensieb mit quadratischen Maschen 8mm x 8mm abtrennen lassen, als Feinanteil bezeichnet werden. Der Feinanteil ist beim Kunden unerwünscht, da er die Kundenprozesse negativ beeinflusst. Falls der Feinanteil vom Kunden z.B. durch Sieben abgetrennt wird, bedeutet das einen erhöhten Aufwand.
Neben der automatischen Verpackung von polykristallinem Silicium wie nach
Allerdings bedeutet das händische Verpacken einen hohen Aufwand und erhöhte Personalkosten. Daher kommt ein händisches Verpacken aus wirtschaftlichen Gründen nicht in Frage. Zudem wäre es wünschenswert, den Feinanteil noch weiter zu reduzieren als durch händisches Verpacken realisierbar.
Das Abführen der Polysilicumbruchstücke aus der Dosiereinheit mittels der Abführrinne und deren Transport zu der Verpackungseinheit führt jedoch zum Entstehen von Feinanteil.
Daher bestand die Aufgabe der Erfindung darin, polykristallines Silicium automatisch zu verpacken und den dabei entstehenden Feinanteil auf ein äußerst niedriges Niveau zu reduzieren.Subsequently, all fragments or particles of silicon, which have such a size that they can be separated by a mesh screen with square mesh 8mm x 8mm, are referred to as fine fraction. The fines are undesirable for the customer as they have a negative impact on customer processes. If the fine fraction is separated from the customer, for example by sieving, this means an increased effort.
In addition to the automatic packaging of polycrystalline silicon as after
However, manual packaging means a high expenditure and increased personnel costs. Therefore, manual packaging is out of the question for economic reasons. In addition, it would be desirable to reduce the fines even further than feasible by manual packaging.
However, the removal of polysilicon fragments from the metering unit by means of the discharge chute and their transport to the packaging unit leads to the formation of fines.
Therefore, the object of the invention was to automatically pack polycrystalline silicon and reduce the resulting fines to an extremely low level.
Die Aufgabe der Erfindung wird gelöst durch ein Verfahren zum Verpacken von polykristallinem Silicium, umfassend folgende Schritte
- Bereitstellen von polykristallinem Silicium in einem Dosiersystem umfassend eine Förderrinne zum Befördern des polykristallinen Siliciums sowie Dosierrinnen, umfassend eine Grobdosierrinne für grobe Bruchstücke und eine Feindosierrinne für feine Bruchstücke, an deren Ende Abtrennmechanismen zum Absieben von Feinanteil angebracht sind;
- Einfüllen von polykristallinem Silicium aus den Dosierrinnen des Dosiersystems , durch welches Feinanteil mittels Sieben abgetrennt wird, direkt in einen unter den Dosiersystem angeordneten Kunststoffbeutel;
wobei während des gesamten Einfüllvorgangs eine Fallhöhe des polykristallinen Siliciums von Dosiersystem in Kunststoffbeutel mittels wenigstens einer Klemmvorrichtung bei weniger als 450 mm gehalten wird.
Vorzugsweise wird während des gesamten Einfüllvorgangs eine Fallhöhe des polykristallinen Siliciums von Dosiersystem in Kunststoffbeutel mittels wenigstens einer Klemmvorrichtung bei weniger als 300 mm gehalten.
Dazu eignet sich eine Klemmvorrichtung für eine Vorrichtung zum Verpacken von polykristallinem Silicium in einem Kunststoffbeutel, die derart auf den Kunststoffbeutel einwirkt, dass dieser an einer bestimmten Stelle seitlich durch eine Klemmung zusammengedrückt wird, so dass sich dort dessen Querschnitt verringert, wobei jene Klemmung jederzeit ganz oder teilweise gelöst werden kann, so dass sich der Querschnitt des Kunststoffbeutels an dieser Stelle wieder vergrößert.The object of the invention is achieved by a method for packaging polycrystalline silicon, comprising the following steps
- Providing polycrystalline silicon in a metering system comprising a conveyor trough for conveying the polycrystalline silicon, and dosing troughs comprising a coarse debris coarse feeder trough and a fine debris fine feeder trough at the end of which fine particle screening separation mechanisms are mounted;
- Filling polycrystalline silicon from the metering channels of the metering system, by means of which fine fraction is separated by sieving, directly into a plastic bag arranged below the metering system;
wherein a drop height of the polycrystalline silicon from the dosing system into plastic bags is maintained at less than 450 mm by means of at least one clamping device during the entire filling operation.
Preferably, a drop height of the polycrystalline silicon from the dosing system into plastic bags is maintained at less than 300 mm by means of at least one clamping device during the entire filling operation.
For this purpose, a clamping device for a device for packaging polycrystalline silicon in a plastic bag, which acts on the plastic bag so that it is compressed at a certain point laterally by a clamping, so that there reduces its cross-section, said clamping at any time completely or can be partially dissolved, so that the cross section of the plastic bag increases again at this point.
Wird der Kunststoffbeutel an einer bestimmten Stelle seitlich durch eine Klemmung zusammengedrückt, so dass sich dort dessen Querschnitt verringert, kann einzufüllendes polykristallines Silicium in vertikaler Richtung nur bis zu dieser Stelle des Kunststoffbeutels gelangen, wobei jene Klemmung ganz oder teilweise gelöst werden kann, so dass sich der Querschnitt des Kunststoffbeutels an dieser Stelle wieder vergrößert und das polykristalline Silicium von dieser Stelle in vertikaler Richtung im Kunststoffbeutel sich weiter nach unten bewegen kann.If the plastic bag is compressed laterally by clamping at a certain point so that its cross-section is reduced, polycrystalline silicon to be introduced can only reach this point of the plastic bag in the vertical direction, whereby that clamping can be completely or partially released, so that the cross section of the plastic bag at this point increased again and the polycrystalline silicon from this point in the vertical direction in the plastic bag can move further down.
Es hat sich gezeigt, dass der während des Verpackens neu entstehende Feinanteil deutlich niedriger als bei herkömmlichen automatischen Verpackungsverfahren ist. Beispielsweise beträgt der Feinanteil für Bruchgröße 20-60 mm 1400 ppmw oder weniger.It has been found that the fines produced during packaging are significantly lower than in conventional automatic packaging processes. For example, the fines fraction for fraction size 20-60 mm is 1400 ppmw or less.
Die Erfindung geht aus von Siliciumbruchstücken von bestimmten Größenklassen, die durch Zerkleinern eines mittels des Siemensprozess abgeschiedenen Stabs und nachfolgendem Sortieren und Klassifizieren erzeugt wurde.The invention is based on silicon fragments of specific size classes, which were produced by comminuting a rod deposited by means of the Siemens process and subsequent sorting and classification.
Die Größenklasse ist als längste Entfernung zweier Punkte auf der Oberfläche eines Siliciumbruchstücks (=max. Länge) definiert:
- Bruchgröße 0 [mm] 1 bis 5
- Bruchgröße 1 [mm] 4 bis 15
- Bruchgröße 2 [mm] 10 bis 40
- Break size 0 [mm] 1 to 5
- Break size 1 [mm] 4 to 15
- Break size 2 [mm] 10 to 40
Neben den zuvor erwähnten Größenklassen ist die Klassifizierung und Sortierung von polykristallinem Silicium in folgende Bruchgrößen ebenfalls üblich:
- Bruchgröße 3 [mm] 20 bis 60
- Bruchgröße 4 [mm] 45 bis 120
- Bruchgröße 5 [mm] 90 bis 200
- Breaking size 3 [mm] 20 to 60
- Breakage size 4 [mm] 45 to 120
- Breakage size 5 [mm] 90 to 200
Dabei liegen jeweils mindestens 90 Gew.-% der Bruchfraktion innerhalb der genannten Größenbereiche.In each case, at least 90% by weight of the fracture fraction are within the stated size ranges.
Die Polysiliciumbruchstücke werden über eine Förderrinne transportiert und mittels wenigstens eines Siebs in grobe und feine Bruchstücke getrennt.The polysilicon fragments are transported via a conveyor trough and separated by means of at least one sieve into coarse and fine fragments.
Anders als im Stand der Technik, wo die Bruchstücke mittels einer Dosierwaage abgewogen und auf ein Zielgewicht dosiert, anschließend über eine Abführrinne abgeführt und zu einer Verpackungseinheit transportiert und verpackt wurden, erfolgen im erfindungsgemäßen Verfahren Dosierung und Verpackung in einem Schritt.Unlike in the prior art, where the fragments were weighed by means of a dosing and dosed to a target weight, then discharged through a discharge chute and transported to a packaging unit and packaged, carried out in the process of the invention dosage and packaging in one step.
Das Dosiersystem ist so gestaltet, dass Feinanteil, also feinste Partikel und Absplitterungen des Polysiliciums, vor dem Einfüllvorgang mittels Sieben entfernt werden. Beim Sieb kann es sich um eine Lochplatte, ein Stangensieb, eine optopneumatische Sortierung oder eine andere geeignete Vorrichtung handeln. Je nach Bruchgröße können unterschiedliche Siebe zum Einsatz kommen. Für Bruchgrößen von 20 bis 60 mm werden vorzugsweise Siebe mit einer Siebweite von 3 mm eingesetzt. Bei Bruchgrößen 45 bis 120 mm werden vorzugsweise Siebe mit einer Siebweite von 9 mm eingesetzt.The dosing system is designed in such a way that fines, ie very fine particles and chips of the polysilicon, are removed by sieving before the filling process. The sieve may be a perforated plate, a bar screen, an optopneumatic sorting or any other suitable device. Depending on the size of the break, different screens can be used. For fraction sizes from 20 to 60 mm, sieves with a mesh width of 3 mm are preferably used. For break sizes 45 to 120 mm, sieves with a mesh width of 9 mm are preferably used.
Vorzugsweise umfassen die verwendeten Siebe an ihren Oberflächen wenigstens teilweise einen kontaminationsarmen Werkstoff wie z.B. ein Hartmetall. Unter Hartmetallen versteht man gesinterte Carbidhartmetalle. Es gibt neben den konventionellen Hartmetallen auf Wolframcarbid-Basis auch Hartmetalle, die vorzugsweise Titancarbid und Titannitrid als Hartstoffe beinhalten, wobei die Bindephase dabei Nickel, Kobalt und Molybdän umfasst.Preferably, the screens used at least partially comprise a low-contamination material such as e.g. a carbide. By hard metals is meant sintered Carbidhartmetalle. In addition to the conventional tungsten carbide-based hard metals, there are also hard metals, which preferably include titanium carbide and titanium nitride as hard materials, the binder phase comprising nickel, cobalt and molybdenum.
Vorzugsweise umfassen zumindest die mechanisch beanspruchten, verschleißempfindlichen Oberflächenbereiche von Sieben Hartmetall oder Keramik/Carbide. Vorzugsweise ist wenigstens ein Sieb komplett aus Hartmetall gefertigt. Sie können teilweise oder vollflächig mit einer Beschichtung versehen sein. Als Beschichtung wird vorzugsweise ein Material, ausgewählt aus der Gruppe bestehend aus Titannitrid, Titancarbid, Aluminiumtitannitrid und DLC (Diamond Like Carbon), verwendet.
Das Einbringen des Polysiliciumbruchs in den Kunststoffbeutel erfolgt mittels einer Dosiereinheit, umfassend eine Förderrinne, geeignet zum Befördern eines Produktstroms an Bruchstücken, wenigstens ein Sieb, geeignet zur Trennung des Produktstroms in grobe und feine Bruchstücke, eine Grobdosierrinne für grobe Bruchstücke und eine Feindosierrinne für feine Bruchstücke.
Durch Trennung des Produktstroms in Grob- und Feinteile ist ein exakteres Dosieren des Polysiliciums möglich.
Die Größenverteilung der Polysiliciumbruchstücke im Ausgangsproduktstrom hängt u.a. vom vorangegangen Zerkleinerungsprozessen ab. Die Art der Aufteilung in grobe und feine Bruchstücke sowie die Größe der groben bzw. feinen Bruchstücke hängen vom gewünschten Endprodukt ab, das zu dosieren und zu verpacken ist.
Eine typische Bruchgrößenverteilung umfasst Bruchstücke der Größen 1 bis 200 mm.
Beispielsweise können Bruchstücke unterhalb einer bestimmten Größe mittels eines Siebs, bevorzugt mittels eines Stangensiebs, in Verbindung mit einer Abführrinne aus der Dosiereinheit abgeführt werden. So lässt es sich bewerkstelligen, dass nur Bruchstücke einer ganz bestimmten Größenklasse dosiert und verpackt werden.
Durch den Transport des Polysiliciums auf den Förderinnen entstehen erneut unerwünschte Produktgrößen. Diese werden im Dosiersystem mittels eines Siebs abgetrennt.Preferably, at least the mechanically stressed, wear-sensitive surface regions of sieves comprise cemented carbide or ceramic / carbides. Preferably, at least one screen is made entirely of hard metal. You can partially or be provided over the entire surface with a coating. The coating used is preferably a material selected from the group consisting of titanium nitride, titanium carbide, aluminum titanium nitride and DLC (Diamond Like Carbon).
The introduction of the polysilicon fracture into the plastic bag takes place by means of a metering unit comprising a conveyor trough suitable for conveying a product stream of debris, at least one screen suitable for separating the product stream into coarse and fine debris, a coarse metering trough for coarse debris and a fine metering trough for fine debris ,
By separating the product stream into coarse and fine particles, a more accurate dosing of the polysilicon is possible.
The size distribution of the polysilicon fragments in the starting product stream depends inter alia on the preceding comminution processes. The type of division into coarse and fine fragments and the size of the coarse or fine fragments depend on the desired end product, which is to be dosed and packaged.
A typical fraction size distribution includes fragments of sizes 1 to 200 mm.
For example, fragments below a certain size can be removed from the dosing unit by means of a sieve, preferably by means of a rod sieve, in conjunction with a discharge channel. So it can be accomplished that only fragments of a very specific size class are dosed and packaged.
By transporting the polysilicon on the conveyor again arise undesirable product sizes. These are separated in the dosing system by means of a sieve.
Die abgeführten kleineren Bruchstücke werden in nach gelagerten Prozessen erneut klassifiziert, dosiert und verpackt oder einer anderen Verwendung zugeführt.The removed smaller fragments are reclassified in downstream processes, dosed and packaged or put to another use.
Die Dosierung des Polysiliciums über die beiden Dosierrinnen lässt sich automatisieren.The dosage of the polysilicon over the two dosing channels can be automated.
Es ist auch bevorzugt, über eine geregelte Schwenkrinne den Silicium-Produktstrom auf mehrere integrierte Dosier- und Verpackungssysteme aufzuteilen.It is also preferred to divide the silicon product stream into a plurality of integrated metering and packaging systems via a controlled swirl chute.
Das polykristalline Silicium wird vom Dosiersystem direkt in den Kunststoffbeutel, insbesondere einen PE-Beutel, gefüllt und vorzugsweise zusammen mit der Verpackung und einem Greifersystem verwogen. Das Wiegesystem basiert auf dem System einer Bruttowaage.The polycrystalline silicon is filled by the dosing directly into the plastic bag, in particular a PE bag, and preferably weighed together with the packaging and a gripper system. The weighing system is based on the system of a gross balance.
Die Klemmvorrichtung dient dazu, den Beutel während des Befüllens zusammenzudrücken. Damit kann das polykristalline Silicium nicht über die gesamte Beutellänge fallen. Die Klemmvorrichtung dient als eine Art Fallbremse, die gegen den Kunststoffbeutel gedrückt wird, wodurch der Querschnitt des Kunststoffbeutels zunächst reduziert und dann kontrolliert freigegeben wird.The clamping device serves to compress the bag during filling. Thus, the polycrystalline silicon can not fall over the entire bag length. The clamping device serves as a kind of fall brake, which is pressed against the plastic bag, whereby the cross section of the plastic bag is first reduced and then released controlled.
Damit lässt sich der Produktstrom kontrollieren und es wird ein Einfüllen des Siliciums in den vorgefertigten Beutel erreicht, bei dem nur wenig Feinanteil erzeugt wird.Thus, the product flow can be controlled and it is achieved a filling of the silicon in the prefabricated bag, in which only a small amount of fines is produced.
Die Abtrennung von Feinanteil erfolgt über Dosierrinnen, an deren Ende Abtrennmechanismen, insbesondere Stangensiebe, angebracht sind, welche die Abtrennung des Feinanteils bewerkstelligen.The separation of fines is done via dosing, at the end Abtrennmechanismen, in particular bar screens, are attached, which accomplish the separation of the fines.
Vorzugsweise öffnet sich die wenigstens eine Klemmvorrichtung, wenn eine bestimmte Füllhöhe und ein bestimmtes Gewicht an polykristallinem Silicium im Beutel erreicht sind.Preferably, the at least one clamping device opens when a certain filling level and a certain weight of polycrystalline silicon in the bag are reached.
Durch die Erfindung ist es möglich, den Produktstrom feinanteilfrei zum Beutel zu führen. Dies wird mit kontaminationsarmen Sieben am Dosiersystem bewerkstelligt. Über eine gezielte Anordnung der Dosierrinnen (zusätzliche Feindosierrinne) ist es möglich, den Produktstrom möglichst nah an den geöffneten Beutel heranzuführen. Damit kann der Materialstrom mit geringstmöglicher Fallhöhe in den Beutel gefüllt werden. Vorzugsweise erfolgt die Befüllung über einen Einlauftrichter. Der Einlauftrichter besteht vorzugsweise aus einem für Silicium kontaminationsarmen Material.By the invention it is possible to lead the product stream finely divided to the bag. This is done with low-contamination sieves on the dosing system. Through a targeted arrangement of the dosing (additional Feindosierrinne), it is possible to bring the product stream as close as possible to the opened bag. This allows the material flow to be filled into the bag with the lowest possible drop height. Preferably, the filling takes place via an inlet funnel. The inlet funnel preferably consists of a low-contamination material for silicon.
Durch geeignete Sensorik wird dabei die sich während des Befüllvorgangs weiter reduzierende Fallhöhe erfasst.By means of suitable sensors, the drop height that further reduces during the filling process is detected.
Sobald eine Fallhöhe von nahezu 0 mm erreicht ist, kann die Produktklemmung gelöst werden, so dass das Material bis zur nächsten Klemmung oder dem Beutelboden nach unten sackt.As soon as a drop height of almost 0 mm is reached, the product clamping can be released, so that the material sags down to the next clamp or the bottom of the bag.
Vorzugsweise werden Dämpfungs-Speicherelemente in den Produktstrom eingeschwenkt. Diese sind vorzugsweise aus einem kontaminationsarmen Material gefertigt oder mit einem solchen beschichtet. Diese Elemente bewerkstelligen einen gewissen Dämpfungseffekt in Bezug auf den Produktstrom, absorbieren Energie und füllen sich mit polykristallinem Silicium. Nach einer partiellen Befüllung des Kunststoffbeutels werden sie entleert und wieder aus dem Produktstrom entfernt. Dies ist einerseits zum Erreichen der Taktrate und andererseits zur weiteren Reduzierung der Fallhöhe wünschenswert.Preferably, damping storage elements are pivoted into the product stream. These are preferably made of or coated with a low-contamination material. These elements provide some cushioning effect on the product flow, absorb energy and fill with polycrystalline silicon. After a partial filling of the plastic bag, they are emptied and removed again from the product stream. On the one hand, this is desirable for achieving the clock rate and, on the other hand, for further reducing the drop height.
Vorzugsweise werden die Polysiliciumbruchstücke vor dem Dosiervorgang noch durch eine Kamera erfasst, dabei wird das spezifische Gewicht der Bruchstücke ermittelt und weiterhin die Oberflächenbeschaffenheit der Bruchstücke erkannt.Preferably, the polysilicon fragments are still detected by a camera before the dosing process, while the specific weight of the fragments is determined and further recognizes the surface texture of the fragments.
Dies ermöglicht einen noch exakteren sowie einen beutelschonenden Verpackungsprozess.This allows an even more exact and a bag gentle packaging process.
Claims (6)
- Process for packaging polycrystalline silicon in the form of chunks, comprising the following steps:- providing polycrystalline silicon in a metering system comprising a conveyor channel for conveying the polycrystalline silicon and metering channels comprising a coarse metering channel for coarse chunks and a fine metering channel for fine chunks, at the end of which there is mounted a removal mechanism for screening out fines;- filling polycrystalline silicon from the metering channels of the metering system, which removes fines by means of screening, directly into a plastic bag arranged below the metering system, characterized in that the weight of the plastic bag with the polycrystalline silicon introduced is determined during the filling operation and the filling operation is ended after the attainment of a target weight;wherein a fall height of the polycrystalline silicon from metering system into plastic bag is kept at less than 450 mm by means of at least one clamp apparatus over the entire filling operation, wherein the clamp apparatus is configured such that the plastic bag is compressed during the filling operation, as a result of which the cross section of the plastic bag is at first reduced and then released in a controlled manner.
- Process according to Claim 1, wherein several clamp apparatuses of this kind are provided over the length of the plastic bag, and these are gradually released with increasing filling of the plastic bag.
- Process according to either of Claims 1 and 2, wherein the polycrystalline silicon is filled into the plastic bag via an inlet funnel.
- Process according to any of Claims 1 to 3, wherein damping and storage elements are pivoted into a stream of polysilicon between metering system and plastic bag, are filled with chunks and are emptied and removed again after a particular fill level of the plastic bag.
- Process according to any of Claims 1 to 4, wherein the metering is preceded by recording of the polycrystalline silicon by means of a camera to determine a specific weight and surface characteristics of the polycrystalline silicon.
- Process according to any of Claims 1 to 5, wherein a fall height of the polycrystalline silicon from metering system into plastic bag is kept at less than 300 mm by means of at least one clamp apparatus over the entire filling operation.
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DE102012220422.9A DE102012220422A1 (en) | 2012-11-09 | 2012-11-09 | Packaging of polycrystalline silicon |
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