EP2730510A1 - Packaging of polycrystalline silicon - Google Patents

Packaging of polycrystalline silicon Download PDF

Info

Publication number
EP2730510A1
EP2730510A1 EP13190464.1A EP13190464A EP2730510A1 EP 2730510 A1 EP2730510 A1 EP 2730510A1 EP 13190464 A EP13190464 A EP 13190464A EP 2730510 A1 EP2730510 A1 EP 2730510A1
Authority
EP
European Patent Office
Prior art keywords
plastic bag
polycrystalline silicon
filling
dosing
clamping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13190464.1A
Other languages
German (de)
French (fr)
Other versions
EP2730510B1 (en
Inventor
Werner Lazarus
Christian Fraunhofer
Herbert Schmölz
Matthias Vietz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wacker Chemie AG
Original Assignee
Wacker Chemie AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie AG filed Critical Wacker Chemie AG
Publication of EP2730510A1 publication Critical patent/EP2730510A1/en
Application granted granted Critical
Publication of EP2730510B1 publication Critical patent/EP2730510B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/30Devices or methods for controlling or determining the quantity or quality or the material fed or filled
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/04Methods of, or means for, filling the material into the containers or receptacles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/04Methods of, or means for, filling the material into the containers or receptacles
    • B65B1/06Methods of, or means for, filling the material into the containers or receptacles by gravity flow
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/30Devices or methods for controlling or determining the quantity or quality or the material fed or filled
    • B65B1/32Devices or methods for controlling or determining the quantity or quality or the material fed or filled by weighing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B25/00Packaging other articles presenting special problems
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B43/00Forming, feeding, opening or setting-up containers or receptacles in association with packaging
    • B65B43/42Feeding or positioning bags, boxes, or cartons in the distended, opened, or set-up state; Feeding preformed rigid containers, e.g. tins, capsules, glass tubes, glasses, to the packaging position; Locating containers or receptacles at the filling position; Supporting containers or receptacles during the filling operation
    • B65B43/54Means for supporting containers or receptacles during the filling operation
    • B65B43/59Means for supporting containers or receptacles during the filling operation vertically movable
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B5/00Packaging individual articles in containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, jars
    • B65B5/10Filling containers or receptacles progressively or in stages by introducing successive articles, or layers of articles
    • B65B5/101Filling containers or receptacles progressively or in stages by introducing successive articles, or layers of articles by gravity
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B29/00Packaging of materials presenting special problems

Definitions

  • the invention relates to the packaging of polycrystalline silicon.
  • Polycrystalline silicon hereinafter referred to as polysilicon, u. a. as starting material for the production of electronic components and solar cells.
  • CVD chemical vapor deposition
  • Siemens reactors On a large scale, this process is realized in so-called Siemens reactors.
  • the polysilicon accumulates in the form of rods.
  • the polysilicon rods are usually comminuted by manual methods.
  • US 8074905 discloses a device comprising a roughing polysilicon feeder in a crusher plant, the crusher plant and a polysilicon rupture classifying plant, characterized in that the crushing plant is provided with a controller providing variable adjustment of at least one crushing parameter in the crusher plant and / or at least one sorting parameter in the sorting system allows.
  • the least possible contaminated polysilicon fraction is desired. To accomplish this, various cleaning methods are used.
  • US 2010/0001106 A1 describes a method for preparing highly pure classified polysilicon fraction, in which a polysilicon from the Siemens method comprising comminuted shredding tools, and a screening device by means of a device and is classified, and the thus obtained polysilicon fraction is purified by means of a cleaning bath, characterized in that the crushing tools and the sieve device consistently have a surface in contact with the polysilicon of a material which contaminates the polysilicon break only with such foreign particles, which are then selectively removed by the cleaning bath.
  • silicon dust adhered to the debris is considered contamination because it reduces the yield of crystal pulling.
  • US 2010/0052297 A1 discloses a process for the production of polycrystalline silicon comprising fracturing polycrystalline silicon deposited on thin rods in a Siemens reactor, classifying the fractions into size classes of about 0.5 mm to greater than 45 mm, and treating the fragments by means of compressed air or dry ice Remove silicon dust from the debris with no chemical wet cleaning.
  • the polycrystalline silicon must be packaged after the comminution steps and any cleaning or dedusting that may be performed before it is transported to the customer.
  • Tubular bag machines which are in principle suitable for packaging of silicon fracture, are commercially available.
  • a corresponding packaging machine is for example in DE 36 40 520 A1 described.
  • polysilicon breakage is a sharp-edged, non-free-flowing bulk material with a weight of the individual silicon fragments of up to 2500 g. Therefore, it must be ensured during packaging that the material does not puncture the usual plastic bags during filling, or even completely destroyed in the worst case.
  • the commercial packaging machines are to be suitably modified for the purpose of packaging polysilicon.
  • US 7013620 B2 there is known an apparatus for inexpensively fully automated transporting, weighing, portioning, filling and packaging of a high purity polysilicon fracture comprising a polysilicon breakthrough chute, a polysilicon fracture weighing device connected to a hopper, baffles made of silicon, a filling device comprising forming a plastic bag comprising a deionizer which prevents static charge and thus particle contamination of the plastic film, a plastic bag filled with polysilicon fracture, a flow box mounted above a conveyor trough, weighing device, filling device and welding device, which causes particle contamination of the polysilicon fracture prevents a conveyor belt with a magnetic inductive detector for the welded polysilicon break filled plastic bag, wherein all components, ie e come in contact with the polysilicon, reinforced with silicon or covered with a highly wear-resistant plastic.
  • DE 103 46 881 A1 discloses a plant for filling and closing of open plastic bags, which is equipped with a filling machine which includes a rotor rotatably driven about a vertical axis, which is equipped with a plurality of filling devices, to which the plastic bags to be filled can be attached, and the filling devices welding units are assigned for producing the closure seams after removal of the filled plastic sack from the filling means, and the system is still equipped with a linear discharge conveyor for transporting the filled plastic bags from the filling machine, characterized in that the rotor of the filling machine at a constant speed driven as well as with the filler neck associated VerMANnahtsch fashion vibrationen is equipped, and also assigned to the rotor of the filling machine to the individual welding means pivotally mounted sack support means, the a from the filling means a Take over plastic bags immediately after the manufacture of the closure seams of the welding equipment and transferred to a drivable with the rotational speed of the rotor, as well as tangentially arranged stationary discharge belt
  • manual packaging means a high expenditure and increased personnel costs. Therefore, manual packaging is out of the question for economic reasons. In addition, it would be desirable to reduce the fines even further than feasible by manual packaging.
  • the object of the invention was to automatically pack polycrystalline silicon and reduce the resulting fines to an extremely low level.
  • the task was also to provide a device suitable for this purpose.
  • a drop height of the polycrystalline silicon from the dosing system into plastic bags is maintained at less than 300 mm by means of at least one clamping device during the entire filling operation.
  • a clamping device for a device for packaging polycrystalline silicon in a plastic bag which acts on the plastic bag so that it is compressed laterally by a clamping at a certain point, so that there reduces its cross-section, said clamping can be solved at any time in whole or in part, so that the cross section of the plastic bag increases again at this point.
  • the object is also achieved by a method for packaging polycrystalline silicon by filling in a plastic bag, using at least one clamping device which acts on the plastic bag so that it is compressed at a certain point laterally by a clamping, so that there Cross-section reduced and constitutionalllende polycrystalline silicon in the vertical direction can reach only to this point of the plastic bag, which clamping can be dissolved in whole or in part, so that increases the cross-section of the plastic bag at this point again and the polycrystalline silicon from this point in vertical Direction in the plastic bag can continue to move down.
  • the fines produced during packaging are significantly lower than conventional ones automatic packaging process.
  • the fines fraction for fraction size 20-60 mm is 1400 ppmw or less.
  • the invention is based on silicon fragments of specific size classes, which were produced by comminuting a rod deposited by means of the Siemens process and subsequent sorting and classification.
  • the polysilicon fragments are transported via a conveyor trough and separated by means of at least one sieve into coarse and fine fragments.
  • the dosing system is designed in such a way that fines, ie very fine particles and chips of the polysilicon, are removed by sieving before the filling process.
  • the sieve may be a perforated plate, a bar screen, an optopneumatic sorting or any other suitable device. Depending on the size of the break, different screens can be used. For fraction sizes from 20 to 60 mm, sieves with a mesh width of 3 mm are preferably used. For break sizes 45 to 120 mm, sieves with a mesh width of 9 mm are preferably used.
  • the screens used at least partially comprise a low-contamination material such as e.g. a carbide.
  • a low-contamination material such as e.g. a carbide.
  • hard metals sintered Carbidhartmetalle.
  • hard metals which preferably include titanium carbide and titanium nitride as hard materials, the binder phase comprising nickel, cobalt and molybdenum.
  • At least the mechanically stressed, wear-sensitive surface regions of sieves comprise cemented carbide or ceramic / carbides.
  • at least one screen is made entirely of hard metal. They may be partially or fully provided with a coating.
  • the coating used is preferably a material selected from the group consisting of titanium nitride, titanium carbide, aluminum titanium nitride and DLC (Diamond Like Carbon).
  • the polysilicon fracture is introduced into the plastic bag by means of a metering unit, preferably comprising a conveyor trough suitable for conveying a product stream of debris, at least one screen suitable for separating the product stream into coarse and fine debris, a coarse metering trough for coarse debris and a fine metering trough for fine fragments.
  • a metering unit preferably comprising a conveyor trough suitable for conveying a product stream of debris, at least one screen suitable for separating the product stream into coarse and fine debris, a coarse metering trough for coarse debris and a fine metering trough for fine fragments.
  • the size distribution of polysilicon fragments in the output product stream depends i.a. from the previous crushing processes.
  • the type of division into coarse and fine fragments and the size of the coarse or fine fragments depend on the desired end product, which is to be dosed and packaged.
  • a typical fraction size distribution includes fragments of sizes 1 to 200 mm.
  • fragments below a certain size can be removed from the dosing unit by means of a sieve, preferably by means of a rod sieve, in conjunction with a discharge channel. So it can be accomplished that only fragments of a very specific size class are dosed and packaged.
  • the removed smaller fragments are reclassified in downstream processes, dosed and packaged or put to another use.
  • the dosage of the polysilicon over the two dosing channels can be automated.
  • the polycrystalline silicon is filled by the dosing directly into the plastic bag, in particular a PE bag, and preferably together with the packaging and a gripper system weighed.
  • the weighing system is based on the system of a gross balance.
  • the clamping device serves to compress the bag during filling.
  • the clamping device serves as a kind of fall brake, which is pressed against the plastic bag, whereby the cross section of the plastic bag is first reduced and then released controlled.
  • the product flow can be controlled and it is achieved a filling of the silicon in the prefabricated bag, in which only a small amount of fines is produced.
  • the separation of fines is preferably carried out via dosing, at the end Abtrennmechanismen, in particular bar screens, are attached, which accomplish the separation of the fines.
  • the at least one clamping device opens when a certain filling level and a certain weight of polycrystalline silicon in the bag are reached.
  • the invention it is possible to lead the product stream finely divided to the bag. This is done with low-contamination sieves on the dosing system.
  • the dosing additional Feindosierrinne
  • the filling takes place via an inlet funnel.
  • the inlet funnel preferably consists of a low-contamination material for silicon.
  • the drop height that further reduces during the filling process is detected.
  • the product clamping can be released, so that the material sags down to the next clamp or the bottom of the bag.
  • damping storage elements are pivoted into the product stream. These are preferably made of or coated with a low-contamination material. These elements provide some cushioning effect on the product flow, absorb energy and fill with polycrystalline silicon. After a partial filling of the plastic bag, they are emptied and removed again from the product stream. On the one hand, this is desirable for achieving the clock rate and, on the other hand, for further reducing the drop height.
  • the polysilicon fragments are still detected by a camera before the dosing process, while the specific weight of the fragments is determined and further recognizes the surface texture of the fragments.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Quality & Reliability (AREA)
  • Silicon Compounds (AREA)
  • Basic Packing Technique (AREA)

Abstract

The method involves supplying polycrystalline silicon in a metering system. The polycrystalline silicon transferred from the metering system is separated into fine fractions by sieving, and filling into a synthetic bag arranged under the metering system. The weight of synthetic bag filled with the polycrystalline silicon is determined. The filling operation is terminated after reaching a target weight of synthetic bag. The height of the polycrystalline silicon filled in synthetic bag is set to less than 450 mm by a clamping device during entire filling operation. An independent claim is included for a clamping device for packing polycrystalline silicon in synthetic bag.

Description

Die Erfindung betrifft die Verpackung von polykristallinem Silicium.The invention relates to the packaging of polycrystalline silicon.

Polykristallines Silicium, im Folgenden als Polysilicium bezeichnet, dient u. a. als Ausgangsmaterial für die Herstellung von elektronischen Bauteilen und Solarzellen.Polycrystalline silicon, hereinafter referred to as polysilicon, u. a. as starting material for the production of electronic components and solar cells.

Es wird durch thermische Zersetzung eines Silicium haltigen Gases oder eines Silicium haltigen Gasgemisches gewonnen. Dieser Prozess wird als Abscheidung aus der Gasphase (CVD, chemical vapor deposition) bezeichnet.It is obtained by thermal decomposition of a silicon-containing gas or a silicon-containing gas mixture. This process is referred to as chemical vapor deposition (CVD).

In großem Maßstab wird dieser Prozess in so genannten Siemens-Reaktoren realisiert. Das Polysilicium fällt dabei in Form von Stäben an. Die Polysiliciumstäbe werden in der Regel mittels händischer Verfahren zerkleinert.On a large scale, this process is realized in so-called Siemens reactors. The polysilicon accumulates in the form of rods. The polysilicon rods are usually comminuted by manual methods.

Es sind eine Reihe maschineller Verfahren bekannt, in denen händisch vorgebrochener Polysilicium-Grobbruch unter Einsatz üblicher Brecher weiter zerkleinert wird. Mechanische Brechverfahren sind beispielsweise in US 8021483 B2 beschrieben.There are a number of mechanical methods are known in which manually pre-broken polysilicon coarse fracture is further crushed using conventional crushers. Mechanical breaking methods are for example in US 8021483 B2 described.

US 8074905 offenbart eine Vorrichtung umfassend eine Aufgabeeinrichtung für einen Polysilicium-Grobbruch in eine Brecheranlage, die Brecheranlage und eine Sortieranlage zum Klassieren des Polysilicium-Bruchs, dadurch gekennzeichnet, dass die Brechanlage mit einer Steuerung versehen ist, die eine variable Einstellung mindestens eines Brechparameters in der Brecheranlage und/oder mindestens eines Sortierparameters in der Sortieranlage ermöglicht. US 8074905 discloses a device comprising a roughing polysilicon feeder in a crusher plant, the crusher plant and a polysilicon rupture classifying plant, characterized in that the crushing plant is provided with a controller providing variable adjustment of at least one crushing parameter in the crusher plant and / or at least one sorting parameter in the sorting system allows.

Für Anwendungen in der Halbleiter- und Solarindustrie ist ein möglichst wenig kontaminierter Polysiliciumbruch erwünscht. Um dies zu bewerkstelligen, kommen auch verschiedene Reinigungsverfahren zum Einsatz.For applications in the semiconductor and solar industries, the least possible contaminated polysilicon fraction is desired. To accomplish this, various cleaning methods are used.

US 2010/0001106 A1 beschreibt ein Verfahren zur Herstellung von hochreinem klassierten Polysilicium-Bruch, bei dem ein Polysilicium aus dem Siemens-Verfahren mittels einer Vorrichtung umfassend Zerkleinerungswerkzeuge und einer Siebvorrichtung zerkleinert und klassiert wird und der so erhaltene Polysilicium-Bruch mittels eines Reinigungsbades gereinigt wird, dadurch gekennzeichnet, dass die Zerkleinerungswerkzeuge und die Siebvorrichtung durchgängig eine mit dem Polysilicium in Kontakt kommende Oberfläche aus einem Werkstoff besitzen, welcher den Polysilicium-Bruch nur mit solchen Fremdpartikeln verunreinigt, welche anschließend gezielt durch das Reinigungsbad entfernt werden. US 2010/0001106 A1 describes a method for preparing highly pure classified polysilicon fraction, in which a polysilicon from the Siemens method comprising comminuted shredding tools, and a screening device by means of a device and is classified, and the thus obtained polysilicon fraction is purified by means of a cleaning bath, characterized in that the crushing tools and the sieve device consistently have a surface in contact with the polysilicon of a material which contaminates the polysilicon break only with such foreign particles, which are then selectively removed by the cleaning bath.

Auch an den Bruchstücken anhaftender Siliciumstaub wird als Kontamination angesehen, da er die Ausbeute beim Kristallziehen reduziert.Also, silicon dust adhered to the debris is considered contamination because it reduces the yield of crystal pulling.

Aus US 2010/0052297 A1 ist ein Verfahren zur Herstellung von polykristallinem Silicium bekannt, umfassend Brechen von an Dünnstäben in einem Siemensreaktor abgeschiedenem polykristallinem Silicium in Bruchstücke, Klassieren der Bruchstücke in Größenklassen von etwa 0,5 mm bis grösser als 45 mm und Behandlung der Bruchstücke mittels Druckluft oder Trockeneis, um Siliciumstaub von den Bruchstücken zu entfernen, wobei keine chemische Nassreinigung erfolgt.Out US 2010/0052297 A1 discloses a process for the production of polycrystalline silicon comprising fracturing polycrystalline silicon deposited on thin rods in a Siemens reactor, classifying the fractions into size classes of about 0.5 mm to greater than 45 mm, and treating the fragments by means of compressed air or dry ice Remove silicon dust from the debris with no chemical wet cleaning.

Das polykristalline Silicium muss jedoch nach den Zerkleinerungsschritten und der gegebenenfalls durchgeführten Reinigung-oder Entstaubung verpackt werden, bevor es zum Kunden transportiert wird.However, the polycrystalline silicon must be packaged after the comminution steps and any cleaning or dedusting that may be performed before it is transported to the customer.

Demzufolge ist beim Verpacken darauf zu achten, dass dieses möglichst kontaminationsarm erfolgt.Consequently, when packing it must be ensured that this takes place with as little contamination as possible.

Üblicherweise wird Polysiliciumbruch für die Elektronikindustrie in 5-kg-Beuteln mit einer Gewichtstoleranz von +/- max. 50 g verpackt. Für die Solarindustrie ist Polysiliciumbruch in Beuteln mit einer Einwaage von 10 kg und einer Gewichtstoleranz von +/- max. 100 g üblich.Usually polysilicon breakage for the electronics industry in 5-kg bags with a weight tolerance of +/- max. 50 g packed. For the solar industry, polysilicon is broken in Bags with a weight of 10 kg and a weight tolerance of +/- max. 100 g usual.

Schlauchbeutelmaschinen, die zur Verpackung von Siliciumbruch prinzipiell geeignet sind, sind kommerziell erhältlich. Eine entsprechende Verpackungsmaschine ist beispielsweise in DE 36 40 520 A1 beschrieben.Tubular bag machines, which are in principle suitable for packaging of silicon fracture, are commercially available. A corresponding packaging machine is for example in DE 36 40 520 A1 described.

Bei Polysiliciumbruch handelt es sich aber um ein scharfkantiges, nicht rieselfähiges Schüttgut mit einem Gewicht der einzelnen Siliciumbruchstücke von bis zu 2500 g. Daher ist bei der Verpackung darauf zu achten, dass das Material die üblichen Kunststoffbeutel beim Befüllen nicht durchstößt oder im schlimmsten Fall sogar vollständig zerstört.However, polysilicon breakage is a sharp-edged, non-free-flowing bulk material with a weight of the individual silicon fragments of up to 2500 g. Therefore, it must be ensured during packaging that the material does not puncture the usual plastic bags during filling, or even completely destroyed in the worst case.

Um dies zu verhindern, sind die kommerziellen Verpackungsmaschinen zum Zwecke der Verpackung von Polysilicium in geeigneter Weise zu modifizieren.To prevent this, the commercial packaging machines are to be suitably modified for the purpose of packaging polysilicon.

Aus US 7013620 B2 ist eine Vorrichtung zum kostengünstigen vollautomatischen Transportieren, Abwägen, Portionieren, Einfüllen und Verpacken eines hoch reinen Polysiliciumbruchs bekannt, umfassend eine Förderrinne für den Polysiliciumbruch, eine Wägevorrichtung für den Polysiliciumbruch, welche mit einem Trichter verbunden ist, Ablenkbleche aus Silicium, eine Abfüllvorrichtung, welche aus einer hochreinen Kunststofffolie einen Kunststoffbeutel formt, umfassend einen Deionisierer, der eine statische Aufladung und damit eine Partikelverunreinigung der Kunststofffolie verhindert, eine Verschweißvorrichtung für den mit Polysiliciumbruch gefüllten Kunststoffbeutel, eine oberhalb von Förderrinne, Wägevorrichtung, Abfüllvorrichtung und Verschweißvorrichtung angebrachte Flowbox, die eine Partikelverunreinigung des Polysiliciumbruchs verhindert, ein Förderband mit einem magnetisch induktiven Detektor für den verschweißten mit Polysiliciumbruch gefüllten Kunststoffbeutel, wobei alle Bauteile, die mit dem Polysiliciumbruch in Kontakt kommen, mit Silicium armiert oder mit einem hochverschleißfestem Kunststoff verkleidet sind.Out US 7013620 B2 For example, there is known an apparatus for inexpensively fully automated transporting, weighing, portioning, filling and packaging of a high purity polysilicon fracture comprising a polysilicon breakthrough chute, a polysilicon fracture weighing device connected to a hopper, baffles made of silicon, a filling device comprising forming a plastic bag comprising a deionizer which prevents static charge and thus particle contamination of the plastic film, a plastic bag filled with polysilicon fracture, a flow box mounted above a conveyor trough, weighing device, filling device and welding device, which causes particle contamination of the polysilicon fracture prevents a conveyor belt with a magnetic inductive detector for the welded polysilicon break filled plastic bag, wherein all components, ie e come in contact with the polysilicon, reinforced with silicon or covered with a highly wear-resistant plastic.

DE 103 46 881 A1 offenbart eine Anlage zum Füllen und Verschließen von offenen Kunststoffsäcken, die mit einer Füllmaschine ausgestattet ist, die einen um eine vertikale Achse rotierend antreibbaren Rotor enthält, der mit mehreren Fülleinrichtungen ausgestattet ist, an denen die zu füllenden Kunststoffsäcke anhängbar sind, und bei der den Fülleinrichtungen Schweißaggregate zum Herstellen der Verschlussnähte nach dem Abnehmen der gefüllten Kunststoffsacke von den Fülleinrichtungen zugeordnet sind, und die Anlage noch mit einem linearen Austrageband zum Abtransport der gefüllten Kunststoffsäcke von der Füllmaschine ausgerüstet ist, dadurch gekennzeichnet, dass der Rotor der Füllmaschine mit konstanter Drehzahl antreibbar sowie mit den Füllstutzen zugeordneten Verschlussnahtschweißeinrichtungen ausgerüstet ist, und außerdem am Rotor der Füllmaschine den einzelnen Schweißeinrichtungen schwenkbar gelagerte Sackstützeinrichtungen zugeordnet sind, die die von den Fülleinrichtungen abzunehmenden Kunststoffsacke unmittelbar nach dem Herstellen der Verschlussnähte von den Schweißeinrichtungen übernehmen und auf ein mit der Umlaufgeschwindigkeit des Rotors antreibbares, sowie tangential dazu stationär angeordnetes Austrageband übergeben. DE 103 46 881 A1 discloses a plant for filling and closing of open plastic bags, which is equipped with a filling machine which includes a rotor rotatably driven about a vertical axis, which is equipped with a plurality of filling devices, to which the plastic bags to be filled can be attached, and the filling devices welding units are assigned for producing the closure seams after removal of the filled plastic sack from the filling means, and the system is still equipped with a linear discharge conveyor for transporting the filled plastic bags from the filling machine, characterized in that the rotor of the filling machine at a constant speed driven as well as with the filler neck associated Verschlussnahtschweißeinrichtungen is equipped, and also assigned to the rotor of the filling machine to the individual welding means pivotally mounted sack support means, the a from the filling means a Take over plastic bags immediately after the manufacture of the closure seams of the welding equipment and transferred to a drivable with the rotational speed of the rotor, as well as tangentially arranged stationary discharge belt.

Es hat sich gezeigt, dass bei solchen Vorrichtungen oftmals ein Verklemmen der Siliciumbruchstücke in der Abfüllvorrichtung auftritt. Dies ist nachteilig, da es dadurch zu erhöhten Stillstandszeiten der Maschine kommt.It has been found that in such devices often jamming of the silicon fragments in the filling device occurs. This is disadvantageous because it leads to increased downtime of the machine.

Auch treten Durchstoßungen des Kunststoffbeutels auf, was ebenfalls zu einem Stillstand der Anlage und zu Kontamination des Siliciums führt.Also penetrate the plastic bag, which also leads to a shutdown of the plant and contamination of the silicon.

Außerdem hat sich gezeigt, dass während des Verpackens von Bruchstücken einer bestimmten Größenklasse, z.B. Bruchgrößen von 20 bis 60 mm, auch unerwünschte kleinere Siliciumpartikel oder Bruchstücke entstehen. Der Anteil solcher unerwünschter Partikel beträgt für solche Bruchgrößen 17000-23000 ppmw. Nachfolgend sollen alle Bruchstücke oder Partikel aus Silicium, die eine solche Größe aufweisen, dass sie die durch ein Maschensieb mit quadratischen Maschen 8mm x 8mm abtrennen lassen, als Feinanteil bezeichnet werden. Der Feinanteil ist beim Kunden unerwünscht, da er die Kundenprozesse negativ beeinflusst. Falls der Feinanteil vom Kunden z.B. durch Sieben abgetrennt wird, bedeutet das einen erhöhten Aufwand.In addition, it has been found that during the packaging of fragments of a certain size class, eg fracture sizes of 20 to 60 mm, also undesirable smaller silicon particles or fragments arise. The proportion of such unwanted particles is 17000-23000 ppmw for such fraction sizes. Subsequently, all fragments or particles of silicon, which have such a size that they can be separated by a mesh screen with square mesh 8mm x 8mm, are referred to as fine fraction. The fines are undesirable for the customer as they have a negative impact on customer processes. If the fine fraction is separated from the customer, for example by sieving, this means an increased effort.

Neben der automatischen Verpackung von polykristallinem Silicium wie nach US 7013620 B2 kommt auch ein händisches Verpacken des polykristallinen Siliciums in Kunststoffbeutel in Frage. Durch ein händisches Verpacken kann der Feinanteil deutlich reduziert werden, für die o.g. Bruchgröße 20-60 mm von 17000 ppmw auf bis 1400 ppmw.In addition to the automatic packaging of polycrystalline silicon as after US 7013620 B2 is also a manual packaging of polycrystalline silicon in plastic bag in question. By manual packaging, the fine fraction can be significantly reduced, for the above-mentioned fraction size 20-60 mm from 17000 ppmw to 1400 ppmw.

Allerdings bedeutet das händische Verpacken einen hohen Aufwand und erhöhte Personalkosten. Daher kommt ein händisches Verpacken aus wirtschaftlichen Gründen nicht in Frage. Zudem wäre es wünschenswert, den Feinanteil noch weiter zu reduzieren als durch händisches Verpacken realisierbar.However, manual packaging means a high expenditure and increased personnel costs. Therefore, manual packaging is out of the question for economic reasons. In addition, it would be desirable to reduce the fines even further than feasible by manual packaging.

Daher bestand die Aufgabe der Erfindung darin, polykristallines Silicium automatisch zu verpacken und den dabei entstehenden Feinanteil auf ein äußerst niedriges Niveau zu reduzieren. Die Aufgabe bestand auch darin, eine hierfür geeignete Vorrichtung bereitzustellen.Therefore, the object of the invention was to automatically pack polycrystalline silicon and reduce the resulting fines to an extremely low level. The task was also to provide a device suitable for this purpose.

Die Aufgabe der Erfindung wird gelöst durch ein Verfahren zum Verpacken von polykristallinem Silicium, umfassend folgende Schritte

  • Bereitstellen von polykristallinem Silicium in einem Dosiersystem;
  • Einfüllen von polykristallinem Silicium aus dem Dosiersystem, durch welches Feinanteil mittels Sieben abgetrennt wird, in einen unter den Dosiersystem angeordneten Kunststoffbeutel;
wobei während des Einfüllens das Gewicht des Kunststoffbeutels mit dem eingefüllten polykristallinen Silicium bestimmt und nach dem Erreichen eines Zielgewichts der Einfüllvorgang beendet wird;
wobei während des gesamten Einfüllvorgangs eine Fallhöhe des polykristallinen Siliciums von Dosiersystem in Kunststoffbeutel mittels wenigstens einer Klemmvorrichtung bei weniger als 450 mm gehalten wird.The object of the invention is achieved by a method for packaging polycrystalline silicon, comprising the following steps
  • Providing polycrystalline silicon in a dosing system;
  • Filling polycrystalline silicon from the metering system, by means of which fine fraction is separated by sieving, into a plastic bag arranged below the metering system;
wherein during filling determines the weight of the plastic bag with the filled polycrystalline silicon and after reaching a target weight of the filling process is terminated;
wherein a drop height of the polycrystalline silicon from the dosing system into plastic bags is maintained at less than 450 mm by means of at least one clamping device during the entire filling operation.

Vorzugsweise wird während des gesamten Einfüllvorgangs eine Fallhöhe des polykristallinen Siliciums von Dosiersystem in Kunststoffbeutel mittels wenigstens einer Klemmvorrichtung bei weniger als 300 mm gehalten.Preferably, a drop height of the polycrystalline silicon from the dosing system into plastic bags is maintained at less than 300 mm by means of at least one clamping device during the entire filling operation.

Die Aufgabe wird gelöst durch eine Klemmvorrichtung für eine Vorrichtung zum Verpacken von polykristallinem Silicium in einem Kunststoffbeutel, die derart auf den Kunststoffbeutel einwirkt, dass dieser an einer bestimmten Stelle seitlich durch eine Klemmung zusammengedrückt wird, so dass sich dort dessen Querschnitt verringert, wobei jene Klemmung jederzeit ganz oder teilweise gelöst werden kann, so dass sich der Querschnitt des Kunststoffbeutels an dieser Stelle wieder vergrößert.The object is achieved by a clamping device for a device for packaging polycrystalline silicon in a plastic bag, which acts on the plastic bag so that it is compressed laterally by a clamping at a certain point, so that there reduces its cross-section, said clamping can be solved at any time in whole or in part, so that the cross section of the plastic bag increases again at this point.

Die Aufgabe wird auch gelöst durch ein Verfahren zum Verpacken von polykristallinem Silicium durch Einfüllen in einen Kunststoffbeutel, unter Verwendung wenigstens einer Klemmvorrichtung, die derart auf den Kunststoffbeutel einwirkt, dass dieser an einer bestimmten Stelle seitlich durch eine Klemmung zusammengedrückt wird, so dass sich dort dessen Querschnitt verringert und einzufüllendes polykristallines Silicium in vertikaler Richtung nur bis zu dieser Stelle des Kunststoffbeutels gelangen kann, wobei jene Klemmung ganz oder teilweise gelöst werden kann, so dass sich der Querschnitt des Kunststoffbeutels an dieser Stelle wieder vergrößert und das polykristalline Silicium von dieser Stelle in vertikaler Richtung im Kunststoffbeutel sich weiter nach unten bewegen kann.The object is also achieved by a method for packaging polycrystalline silicon by filling in a plastic bag, using at least one clamping device which acts on the plastic bag so that it is compressed at a certain point laterally by a clamping, so that there Cross-section reduced and einzullende polycrystalline silicon in the vertical direction can reach only to this point of the plastic bag, which clamping can be dissolved in whole or in part, so that increases the cross-section of the plastic bag at this point again and the polycrystalline silicon from this point in vertical Direction in the plastic bag can continue to move down.

Es hat sich gezeigt, dass der während des Verpackens neu entstehende Feinanteil deutlich niedriger als bei herkömmlichen automatischen Verpackungsverfahren ist. Beispielsweise beträgt der Feinanteil für Bruchgröße 20-60 mm 1400 ppmw oder weniger.It has been shown that the fines produced during packaging are significantly lower than conventional ones automatic packaging process. For example, the fines fraction for fraction size 20-60 mm is 1400 ppmw or less.

Die Erfindung geht aus von Siliciumbruchstücken von bestimmten Größenklassen, die durch Zerkleinern eines mittels des Siemensprozess abgeschiedenen Stabs und nachfolgendem Sortieren und Klassifizieren erzeugt wurde.The invention is based on silicon fragments of specific size classes, which were produced by comminuting a rod deposited by means of the Siemens process and subsequent sorting and classification.

Die Größenklasse ist als längste Entfernung zweier Punkte auf der Oberfläche eines Siliciumbruchstücks (=max. Länge) definiert:

  • Bruchgröße 0 [mm] 1 bis 5
  • Bruchgröße 1 [mm] 4 bis 15
  • Bruchgröße 2 [mm] 10 bis 40
The size class is defined as the longest distance of two points on the surface of a silicon fragment (= maximum length):
  • Break size 0 [mm] 1 to 5
  • Break size 1 [mm] 4 to 15
  • Break size 2 [mm] 10 to 40

Neben den zuvor erwähnten Größenklassen ist die Klassifizierung und Sortierung von polykristallinem Silicium in folgende Bruchgrößen ebenfalls üblich:

  • Bruchgröße 3 [mm] 20 bis 60
  • Bruchgröße 4 [mm] 45 bis 120
  • Bruchgröße 5 [mm] 90 bis 200
In addition to the size classes mentioned above, the classification and sorting of polycrystalline silicon into the following fractions is also common:
  • Breaking size 3 [mm] 20 to 60
  • Breakage size 4 [mm] 45 to 120
  • Breakage size 5 [mm] 90 to 200

Dabei liegen jeweils mindestens 90 Gew.-% der Bruchfraktion innerhalb der genannten Größenbereiche.In each case, at least 90% by weight of the fracture fraction are within the stated size ranges.

Die Polysiliciumbruchstücke werden über eine Förderrinne transportiert und mittels wenigstens eines Siebs in grobe und feine Bruchstücke getrennt.The polysilicon fragments are transported via a conveyor trough and separated by means of at least one sieve into coarse and fine fragments.

Anders als im Stand der Technik, wo die Bruchstücke mittels einer Dosierwaage abgewogen und auf ein Zielgewicht dosiert, anschließend über eine Abführrinne abgeführt und zu einer Verpackungseinheit transportiert und verpackt wurden, erfolgen im erfindungsgemäßen Verfahren Dosierung und Verpackung in einem Schritt.Unlike in the prior art, where the fragments were weighed by means of a dosing and dosed to a target weight, then discharged through a discharge chute and transported to a packaging unit and packaged, carried out in the process of the invention dosage and packaging in one step.

Das Dosiersystem ist so gestaltet, dass Feinanteil, also feinste Partikel und Absplitterungen des Polysiliciums, vor dem Einfüllvorgang mittels Sieben entfernt werden. Beim Sieb kann es sich um eine Lochplatte, ein Stangensieb, eine optopneumatische Sortierung oder eine andere geeignete Vorrichtung handeln. Je nach Bruchgröße können unterschiedliche Siebe zum Einsatz kommen. Für Bruchgrößen von 20 bis 60 mm werden vorzugsweise Siebe mit einer Siebweite von 3 mm eingesetzt. Bei Bruchgrößen 45 bis 120 mm werden vorzugsweise Siebe mit einer Siebweite von 9 mm eingesetzt.The dosing system is designed in such a way that fines, ie very fine particles and chips of the polysilicon, are removed by sieving before the filling process. The sieve may be a perforated plate, a bar screen, an optopneumatic sorting or any other suitable device. Depending on the size of the break, different screens can be used. For fraction sizes from 20 to 60 mm, sieves with a mesh width of 3 mm are preferably used. For break sizes 45 to 120 mm, sieves with a mesh width of 9 mm are preferably used.

Vorzugsweise umfassen die verwendeten Siebe an ihren Oberflächen wenigstens teilweise einen kontaminationsarmen Werkstoff wie z.B. ein Hartmetall. Unter Hartmetallen versteht man gesinterte Carbidhartmetalle. Es gibt neben den konventionellen Hartmetallen auf Wolframcarbid-Basis auch Hartmetalle, die vorzugsweise Titancarbid und Titannitrid als Hartstoffe beinhalten, wobei die Bindephase dabei Nickel, Kobalt und Molybdän umfasst.Preferably, the screens used at least partially comprise a low-contamination material such as e.g. a carbide. By hard metals is meant sintered Carbidhartmetalle. In addition to the conventional tungsten carbide-based hard metals, there are also hard metals, which preferably include titanium carbide and titanium nitride as hard materials, the binder phase comprising nickel, cobalt and molybdenum.

Vorzugsweise umfassen zumindest die mechanisch beanspruchten, verschleißempfindlichen Oberflächenbereiche von Sieben Hartmetall oder Keramik/Carbide. Vorzugsweise ist wenigstens ein Sieb komplett aus Hartmetall gefertigt. Sie können teilweise oder vollflächig mit einer Beschichtung versehen sein. Als Beschichtung wird vorzugsweise ein Material, ausgewählt aus der Gruppe bestehend aus Titannitrid, Titancarbid, Aluminiumtitannitrid und DLC (Diamond Like Carbon), verwendet.Preferably, at least the mechanically stressed, wear-sensitive surface regions of sieves comprise cemented carbide or ceramic / carbides. Preferably, at least one screen is made entirely of hard metal. They may be partially or fully provided with a coating. The coating used is preferably a material selected from the group consisting of titanium nitride, titanium carbide, aluminum titanium nitride and DLC (Diamond Like Carbon).

Das Einbringen des Polysiliciumbruchs in den Kunststoffbeutel erfolgt mittels einer Dosiereinheit, vorzugweise umfassend eine Förderrinne, geeignet zum Befördern eines Produktstroms an Bruchstücken, wenigstens ein Sieb, geeignet zur Trennung des Produktstroms in grobe und feine Bruchstücke, eine Grobdosierrinne für grobe Bruchstücke und eine Feindosierrinne für feine Bruchstücke.The polysilicon fracture is introduced into the plastic bag by means of a metering unit, preferably comprising a conveyor trough suitable for conveying a product stream of debris, at least one screen suitable for separating the product stream into coarse and fine debris, a coarse metering trough for coarse debris and a fine metering trough for fine fragments.

Durch Trennung des Produktstroms in Grob- und Feinteile ist ein exakteres Dosieren des Polysiliciums möglich.By separating the product stream into coarse and fine particles, a more accurate dosing of the polysilicon is possible.

Die Größenverteilung der Polysiliciumbruchstücke im Ausgangsproduktstrom hängt u.a. vom vorangegangen Zerkleinerungsprozessen ab. Die Art der Aufteilung in grobe und feine Bruchstücke sowie die Größe der groben bzw. feinen Bruchstücke hängen vom gewünschten Endprodukt ab, das zu dosieren und zu verpacken ist.The size distribution of polysilicon fragments in the output product stream depends i.a. from the previous crushing processes. The type of division into coarse and fine fragments and the size of the coarse or fine fragments depend on the desired end product, which is to be dosed and packaged.

Eine typische Bruchgrößenverteilung umfasst Bruchstücke der Größen 1 bis 200 mm.A typical fraction size distribution includes fragments of sizes 1 to 200 mm.

Beispielsweise können Bruchstücke unterhalb einer bestimmten Größe mittels eines Siebs, bevorzugt mittels eines Stangensiebs, in Verbindung mit einer Abführrinne aus der Dosiereinheit abgeführt werden. So lässt es sich bewerkstelligen, dass nur Bruchstücke einer ganz bestimmten Größenklasse dosiert und verpackt werden.For example, fragments below a certain size can be removed from the dosing unit by means of a sieve, preferably by means of a rod sieve, in conjunction with a discharge channel. So it can be accomplished that only fragments of a very specific size class are dosed and packaged.

Durch den Transport des Polysiliciums auf den Förderinnen entstehen erneut unerwünschte Produktgrößen. Diese werden im Dosiersystem mittels eines Siebs abgetrennt.By transporting the polysilicon on the conveyor again arise undesirable product sizes. These are separated in the dosing system by means of a sieve.

Die abgeführten kleineren Bruchstücke werden in nach gelagerten Prozessen erneut klassifiziert, dosiert und verpackt oder einer anderen Verwendung zugeführt.The removed smaller fragments are reclassified in downstream processes, dosed and packaged or put to another use.

Die Dosierung des Polysiliciums über die beiden Dosierrinnen lässt sich automatisieren.The dosage of the polysilicon over the two dosing channels can be automated.

Es ist auch bevorzugt, über eine geregelte Schwenkrinne den Silicium-Produktstrom auf mehrere integrierte Dosier- und Verpackungssysteme aufzuteilen.It is also preferred to divide the silicon product stream into a plurality of integrated metering and packaging systems via a controlled swirl chute.

Das polykristalline Silicium wird vom Dosiersystem direkt in den Kunststoffbeutel, insbesondere einen PE-Beutel, gefüllt und vorzugsweise zusammen mit der Verpackung und einem Greifersystem verwogen. Das Wiegesystem basiert auf dem System einer Bruttowaage.The polycrystalline silicon is filled by the dosing directly into the plastic bag, in particular a PE bag, and preferably together with the packaging and a gripper system weighed. The weighing system is based on the system of a gross balance.

Die Klemmvorrichtung dient dazu, den Beutel während des Befüllens zusammenzudrücken. Damit kann das polykristalline Silicium nicht über die gesamte Beutellänge fallen. Die Klemmvorrichtung dient als eine Art Fallbremse, die gegen den Kunststoffbeutel gedrückt wird, wodurch der Querschnitt des Kunststoffbeutels zunächst reduziert und dann kontrolliert freigegeben wird.The clamping device serves to compress the bag during filling. Thus, the polycrystalline silicon can not fall over the entire bag length. The clamping device serves as a kind of fall brake, which is pressed against the plastic bag, whereby the cross section of the plastic bag is first reduced and then released controlled.

Damit lässt sich der Produktstrom kontrollieren und es wird ein Einfüllen des Siliciums in den vorgefertigten Beutel erreicht, bei dem nur wenig Feinanteil erzeugt wird.Thus, the product flow can be controlled and it is achieved a filling of the silicon in the prefabricated bag, in which only a small amount of fines is produced.

Die Abtrennung von Feinanteil erfolgt vorzugsweise über Dosierrinnen, an deren Ende Abtrennmechanismen, insbesondere Stangensiebe, angebracht sind, welche die Abtrennung des Feinanteils bewerkstelligen.The separation of fines is preferably carried out via dosing, at the end Abtrennmechanismen, in particular bar screens, are attached, which accomplish the separation of the fines.

Vorzugsweise öffnet sich die wenigstens eine Klemmvorrichtung, wenn eine bestimmte Füllhöhe und ein bestimmtes Gewicht an polykristallinem Silicium im Beutel erreicht sind.Preferably, the at least one clamping device opens when a certain filling level and a certain weight of polycrystalline silicon in the bag are reached.

Durch die Erfindung ist es möglich, den Produktstrom feinanteilfrei zum Beutel zu führen. Dies wird mit kontaminationsarmen Sieben am Dosiersystem bewerkstelligt. Über eine gezielte Anordnung der Dosierrinnen (zusätzliche Feindosierrinne) ist es möglich, den Produktstrom möglichst nah an den geöffneten Beutel heranzuführen. Damit kann der Materialstrom mit geringstmöglicher Fallhöhe in den Beutel gefüllt werden. Vorzugsweise erfolgt die Befüllung über einen Einlauftrichter. Der Einlauftrichter besteht vorzugsweise aus einem für Silicium kontaminationsarmen Material.By the invention it is possible to lead the product stream finely divided to the bag. This is done with low-contamination sieves on the dosing system. Through a targeted arrangement of the dosing (additional Feindosierrinne), it is possible to bring the product stream as close as possible to the opened bag. This allows the material flow to be filled into the bag with the lowest possible drop height. Preferably, the filling takes place via an inlet funnel. The inlet funnel preferably consists of a low-contamination material for silicon.

Durch geeignete Sensorik wird dabei die sich während des Befüllvorgangs weiter reduzierende Fallhöhe erfasst.By means of suitable sensors, the drop height that further reduces during the filling process is detected.

Sobald eine Fallhöhe von nahezu 0 mm erreicht ist, kann die Produktklemmung gelöst werden, so dass das Material bis zur nächsten Klemmung oder dem Beutelboden nach unten sackt.As soon as a drop height of almost 0 mm is reached, the product clamping can be released, so that the material sags down to the next clamp or the bottom of the bag.

Vorzugsweise werden Dämpfungs-Speicherelemente in den Produktstrom eingeschwenkt. Diese sind vorzugsweise aus einem kontaminationsarmen Material gefertigt oder mit einem solchen beschichtet. Diese Elemente bewerkstelligen einen gewissen Dämpfungseffekt in Bezug auf den Produktstrom, absorbieren Energie und füllen sich mit polykristallinem Silicium. Nach einer partiellen Befüllung des Kunststoffbeutels werden sie entleert und wieder aus dem Produktstrom entfernt. Dies ist einerseits zum Erreichen der Taktrate und andererseits zur weiteren Reduzierung der Fallhöhe wünschenswert.Preferably, damping storage elements are pivoted into the product stream. These are preferably made of or coated with a low-contamination material. These elements provide some cushioning effect on the product flow, absorb energy and fill with polycrystalline silicon. After a partial filling of the plastic bag, they are emptied and removed again from the product stream. On the one hand, this is desirable for achieving the clock rate and, on the other hand, for further reducing the drop height.

Vorzugsweise werden die Polysiliciumbruchstücke vor dem Dosiervorgang noch durch eine Kamera erfasst, dabei wird das spezifische Gewicht der Bruchstücke ermittelt und weiterhin die Oberflächenbeschaffenheit der Bruchstücke erkannt.Preferably, the polysilicon fragments are still detected by a camera before the dosing process, while the specific weight of the fragments is determined and further recognizes the surface texture of the fragments.

Dies ermöglicht einen noch exakteren sowie einen beutelschonenden Verpackungsprozess.This allows an even more exact and a bag gentle packaging process.

Claims (10)

Verfahren zum Verpacken von polykristallinem Silicium, das in Form von Bruchstücken vorliegt, umfassend folgende Schritte - Bereitstellen von polykristallinem Silicium in einem Dosiersystem; - Einfüllen von polykristallinem Silicium aus dem Dosiersystem, durch welches Feinanteil mittels Sieben abgetrennt wird, in einen unter den Dosiersystem angeordneten Kunststoffbeutel;
wobei während des Einfüllens das Gewicht des Kunststoffbeutels mit dem eingefüllten polykristallinen Silicium bestimmt und nach dem Erreichen eines Zielgewichts der Einfüllvorgang beendet wird;
wobei während des gesamten Einfüllvorgangs eine Fallhöhe des polykristallinen Siliciums von Dosiersystem in Kunststoffbeutel mittels wenigstens einer Klemmvorrichtung bei weniger als 450 mm gehalten wird.
A method of packaging polycrystalline silicon which is in the form of debris, comprising the following steps - Providing polycrystalline silicon in a dosing system; - filling polycrystalline silicon from the metering system, by which fine fraction is separated by sieving, in a plastic bag arranged below the metering system;
during filling, determining the weight of the plastic bag with the filled polycrystalline silicon and terminating the filling operation after reaching a target weight;
wherein a drop height of the polycrystalline silicon from the dosing system into plastic bags is maintained at less than 450 mm by means of at least one clamping device during the entire filling operation.
Verfahren nach Anspruch 1, wobei das Dosiersystem eine Grobdosierrinne für grobe Bruchstücke und eine Feindosierrinne für feine Bruchstücke umfasst.A method according to claim 1, wherein the dosing system comprises a coarse dosing coarse dosing chute and a fine detribution fine dosing chute. Verfahren nach einem der Ansprüche 1 oder 2, wobei die Klemmvorrichtung so gestaltet ist, dass der Kunststoffbeutel während des Befüllens zusammengedrückt wird, wodurch der Querschnitt des Kunststoffbeutels zunächst reduziert und dann kontrolliert freigegeben wird.Method according to one of claims 1 or 2, wherein the clamping device is designed so that the plastic bag is compressed during filling, whereby the cross section of the plastic bag is first reduced and then released controlled. Verfahren nach Anspruch 3, wobei über die Länge des Kunststoffbeutels mehrere derartiger Klemmvorrichtungen vorgesehen sind, die bei zunehmender Befüllung des Kunststoffbeutels nach und nach gelöst werden.A method according to claim 3, wherein over the length of the plastic bag, several such clamping devices are provided, which are gradually released with increasing filling of the plastic bag. Verfahren nach einem der Ansprüche 1 bis 4, wobei das polykristalline Silicium über einen Einlauftrichter in den Kunststoffbeutel gefüllt wird.Method according to one of claims 1 to 4, wherein the polycrystalline silicon is filled via an inlet funnel into the plastic bag. Verfahren nach einem der Ansprüche 1 bis 5, wobei Dämpfungs-und Speicherelemente in einen Strom von Polysilicium zwischen Dosiersystem und Kunststoffbeutel eingeschwenkt werden, sich mit Bruchstücken füllen und nach einem bestimmten Füllgrad des Kunststoffbeutels entleert und wieder entfernt werden.Method according to one of claims 1 to 5, wherein damping and storage elements are pivoted into a flow of polysilicon between the dosing system and plastic bag, fill with fragments and emptied after a certain degree of filling of the plastic bag and removed again. Verfahren nach einem der Ansprüche 1 bis 6, wobei vor der Dosierung das polykristalline Silicium mittels einer Kamera erfasst wird, wobei ein spezifisches Gewicht und eine Oberflächenbeschaffenheit des polykristallinen Siliciums bestimmt werden.Method according to one of claims 1 to 6, wherein prior to the metering the polycrystalline silicon is detected by means of a camera, whereby a specific weight and a surface condition of the polycrystalline silicon are determined. Verfahren nach einem der Ansprüche 1 bis 7, wobei während des gesamten Einfüllvorgangs eine Fallhöhe des polykristallinen Siliciums von Dosiersystem in Kunststoffbeutel mittels wenigstens einer Klemmvorrichtung bei weniger als 300 mm gehalten wird.Method according to one of claims 1 to 7, wherein during the entire filling process, a drop height of the polycrystalline silicon from dosing into plastic bag by means of at least one clamping device is kept less than 300 mm. Klemmvorrichtung für eine Vorrichtung zum Verpacken von polykristallinem Silicium in einem Kunststoffbeutel, die derart auf den Kunststoffbeutel einwirkt, dass dieser an einer bestimmten Stelle seitlich durch eine Klemmung zusammengedrückt wird, so dass sich dort dessen Querschnitt verringert, wobei jene Klemmung jederzeit ganz oder teilweise gelöst werden kann, so dass sich der Querschnitt des Kunststoffbeutels an dieser Stelle wieder vergrößert.Clamping device for a device for packaging polycrystalline silicon in a plastic bag, which acts on the plastic bag so that it is compressed at a certain point laterally by a clamping, so that there reduces its cross-section, which clamping are solved at any time in whole or in part can, so that increases the cross section of the plastic bag at this point again. Verfahren zum Verpacken von polykristallinem Silicium durch Einfüllen in einen Kunststoffbeutel, unter Verwendung wenigstens einer Klemmvorrichtung, die derart auf den Kunststoffbeutel einwirkt, dass dieser an einer bestimmten Stelle seitlich durch eine Klemmung zusammengedrückt wird, so dass sich dort dessen Querschnitt verringert und einzufüllendes polykristallines Silicium in vertikaler Richtung nur bis zu dieser Stelle des Kunststoffbeutels gelangen kann, wobei jene Klemmung ganz oder teilweise gelöst werden kann, so dass sich der Querschnitt des Kunststoffbeutels an dieser Stelle wieder vergrößert und das polykristalline Silicium von dieser Stelle in vertikaler Richtung im Kunststoffbeutel sich weiter nach unten bewegen kann.Method for packing polycrystalline silicon by filling in a plastic bag, using at least one clamping device which acts on the plastic bag so that it is compressed laterally by clamping at a certain point, so that there reduces the cross-section and polycrystalline silicon to be filled in vertical direction can reach only to this point of the plastic bag, which clamping can be completely or partially dissolved, so that the cross section of the plastic bag at this point increases again and the polycrystalline silicon from this point in the vertical direction in the plastic bag can continue to move down.
EP13190464.1A 2012-11-09 2013-10-28 Method for packaging of polycrystalline silicon Active EP2730510B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012220422.9A DE102012220422A1 (en) 2012-11-09 2012-11-09 Packaging of polycrystalline silicon

Publications (2)

Publication Number Publication Date
EP2730510A1 true EP2730510A1 (en) 2014-05-14
EP2730510B1 EP2730510B1 (en) 2017-08-30

Family

ID=49484230

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13190464.1A Active EP2730510B1 (en) 2012-11-09 2013-10-28 Method for packaging of polycrystalline silicon

Country Status (9)

Country Link
US (1) US9550587B2 (en)
EP (1) EP2730510B1 (en)
JP (1) JP5784683B2 (en)
KR (1) KR101578580B1 (en)
CN (1) CN103803103B (en)
CA (1) CA2831677C (en)
DE (1) DE102012220422A1 (en)
NO (1) NO2922844T3 (en)
TW (1) TWI565623B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022042815A1 (en) 2020-08-24 2022-03-03 Wacker Chemie Ag Screen plate for a separating device for classifying bulk material
WO2022199813A1 (en) 2021-03-24 2022-09-29 Wacker Chemie Ag Transport container for silicon fragments

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012208473A1 (en) * 2012-05-21 2013-11-21 Wacker Chemie Ag Polycrystalline silicon
DE102012220422A1 (en) * 2012-11-09 2014-05-15 Wacker Chemie Ag Packaging of polycrystalline silicon
DE102013214099A1 (en) * 2013-07-18 2015-01-22 Wacker Chemie Ag Packaging of polycrystalline silicon
CN104150055B (en) * 2014-07-31 2016-01-27 中国恩菲工程技术有限公司 Polysilicon automatic pulverizing packaging facilities
KR102420347B1 (en) * 2014-09-26 2022-07-13 가부시끼가이샤 도꾸야마 Polysilicon package
DE102015209629A1 (en) 2015-05-26 2016-12-01 Wacker Chemie Ag Packaging of polysilicon
DE102015211351A1 (en) 2015-06-19 2016-12-22 Siltronic Ag Sieve plate for screening equipment for the mechanical classification of polysilicon

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2197290A (en) * 1986-09-03 1988-05-18 W J Morray Engineering Limited Method and apparatus for filling bags with individual packs
DE3640520A1 (en) 1986-11-27 1988-06-09 Rovema Gmbh Process for the metering and packaging of pourable materials and packaging machine for carrying out the process
DE10346881A1 (en) 2003-10-09 2005-05-04 Haver & Boecker Plant for filling and sealing of plastic bags rotor of filling machine rotating at constant RPM and equipped with seam welding devices for filling head and pivotably mounted bag support units allocated to individual welding devices
US7013620B2 (en) 2002-02-01 2006-03-21 Wacker-Chemie Gmbh Process and apparatus for the cost-effective packaging of polysilicon fragments
DE102007027110A1 (en) * 2007-06-13 2008-12-18 Wacker Chemie Ag Method and apparatus for packaging polycrystalline silicon breakage
US20100001106A1 (en) 2006-07-28 2010-01-07 Wacker Chemie Ag Method and device for producing classified high-purity polycrystalline silicon fragments
US20100052297A1 (en) 2008-09-01 2010-03-04 Toyota Jidosha Kabushiki Kaisha Front passenger seat air bag apparatus
US8021483B2 (en) 2002-02-20 2011-09-20 Hemlock Semiconductor Corporation Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
US8074905B2 (en) 2006-04-06 2011-12-13 Wacker Chemie Ag Method and device for comminuting and sorting polysilicon
EP2487112A2 (en) * 2011-02-09 2012-08-15 Wacker Chemie AG Method and device for dosing and packaging polysilicon chunks and dosing and packaging unit

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2377937A1 (en) * 1977-01-20 1978-08-18 Alfa Laval Ag METHOD AND DEVICE FOR DEAERATION OF POWDERS, SUCH AS MILK POWDERS
DE2907015A1 (en) * 1979-02-23 1980-09-04 Hauni Werke Koerber & Co Kg DEVICE FOR FILLING UP SHOULDABLE GOETER IN PACKAGING CONTAINER
GB8621259D0 (en) * 1986-09-03 1986-10-08 W J Morray Engineering Limited Filling bag with articles
JP2601649B2 (en) * 1986-12-10 1997-04-16 大和製衡 株式会社 Weighing and packaging equipment with metal detector
DE19654612C2 (en) * 1996-12-20 1999-07-01 Korsch Pressen Ag Method and device for checking tablet parameters
US6089285A (en) * 1998-04-29 2000-07-18 Memc Electronics Materials, Inc. Method and system for supplying semiconductor source material
DE102005037916B4 (en) * 2004-11-11 2018-08-02 Windmöller & Hölscher Kg Machine for forming, filling and closing sacks and method of operating same
CN202115892U (en) 2011-05-31 2012-01-18 上海整合包装有限公司 Packing box special for single crystal silicon slices and polycrystalline silicon slices
DE102011081196A1 (en) * 2011-08-18 2013-02-21 Wacker Chemie Ag Process for packaging polycrystalline silicon
DE102012206251A1 (en) * 2012-04-17 2013-10-17 Wacker Chemie Ag Packaging of polycrystalline silicon
DE102012208473A1 (en) * 2012-05-21 2013-11-21 Wacker Chemie Ag Polycrystalline silicon
WO2014037965A1 (en) * 2012-09-05 2014-03-13 MEMC ELECTRONIC METERIALS S.p.A. Method of loading a charge of polysilicon into a crucible
DE102012220422A1 (en) * 2012-11-09 2014-05-15 Wacker Chemie Ag Packaging of polycrystalline silicon
DE102012223192A1 (en) * 2012-12-14 2014-06-18 Wacker Chemie Ag Packaging of polycrystalline silicon

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2197290A (en) * 1986-09-03 1988-05-18 W J Morray Engineering Limited Method and apparatus for filling bags with individual packs
DE3640520A1 (en) 1986-11-27 1988-06-09 Rovema Gmbh Process for the metering and packaging of pourable materials and packaging machine for carrying out the process
US7013620B2 (en) 2002-02-01 2006-03-21 Wacker-Chemie Gmbh Process and apparatus for the cost-effective packaging of polysilicon fragments
US8021483B2 (en) 2002-02-20 2011-09-20 Hemlock Semiconductor Corporation Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
DE10346881A1 (en) 2003-10-09 2005-05-04 Haver & Boecker Plant for filling and sealing of plastic bags rotor of filling machine rotating at constant RPM and equipped with seam welding devices for filling head and pivotably mounted bag support units allocated to individual welding devices
US8074905B2 (en) 2006-04-06 2011-12-13 Wacker Chemie Ag Method and device for comminuting and sorting polysilicon
US20100001106A1 (en) 2006-07-28 2010-01-07 Wacker Chemie Ag Method and device for producing classified high-purity polycrystalline silicon fragments
DE102007027110A1 (en) * 2007-06-13 2008-12-18 Wacker Chemie Ag Method and apparatus for packaging polycrystalline silicon breakage
US20100052297A1 (en) 2008-09-01 2010-03-04 Toyota Jidosha Kabushiki Kaisha Front passenger seat air bag apparatus
EP2487112A2 (en) * 2011-02-09 2012-08-15 Wacker Chemie AG Method and device for dosing and packaging polysilicon chunks and dosing and packaging unit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022042815A1 (en) 2020-08-24 2022-03-03 Wacker Chemie Ag Screen plate for a separating device for classifying bulk material
US11904361B2 (en) 2020-08-24 2024-02-20 Wacker Chemie Ag Screen plate for a separating device for classifying bulk material
WO2022199813A1 (en) 2021-03-24 2022-09-29 Wacker Chemie Ag Transport container for silicon fragments
TWI813202B (en) * 2021-03-24 2023-08-21 德商瓦克化學公司 Transport container for silicon chunks and applications thereof

Also Published As

Publication number Publication date
JP2014094882A (en) 2014-05-22
KR101578580B1 (en) 2015-12-17
TWI565623B (en) 2017-01-11
NO2922844T3 (en) 2018-06-09
JP5784683B2 (en) 2015-09-24
TW201418111A (en) 2014-05-16
CA2831677C (en) 2015-10-20
US9550587B2 (en) 2017-01-24
US20140130455A1 (en) 2014-05-15
EP2730510B1 (en) 2017-08-30
CN103803103B (en) 2017-04-12
DE102012220422A1 (en) 2014-05-15
CA2831677A1 (en) 2014-05-09
KR20140060228A (en) 2014-05-19
CN103803103A (en) 2014-05-21

Similar Documents

Publication Publication Date Title
EP2730510B1 (en) Method for packaging of polycrystalline silicon
EP2666750B1 (en) Polycrystalline silicon
EP1842595B1 (en) Method and device for comminuting and sorting polysilicon
EP2487112B1 (en) Method and device for dosing and packaging polysilicon chunks
EP2559620B1 (en) Method for packaging polycrystalline silicon
JP4988821B2 (en) Apparatus and method for flexible classification of polycrystalline silicon fragments
EP1645333B1 (en) Device and method for low-contaminating, automatic breaking of silicon fragments
DE19719698A1 (en) Optoelectronic classifying device
EP2045003A1 (en) Device for conveying and mixing bulk material
EP3554723B1 (en) Separating device for polycrystalline silicon
EP3303141A1 (en) Packaging of polysilicon
EP4200085B1 (en) Screen plate for a separating device for classifying bulk material

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20131028

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20170518

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 923279

Country of ref document: AT

Kind code of ref document: T

Effective date: 20170915

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502013008192

Country of ref document: DE

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 5

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20170830

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

REG Reference to a national code

Ref country code: NO

Ref legal event code: T2

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171230

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171130

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171201

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

Ref country code: DE

Ref legal event code: R097

Ref document number: 502013008192

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20171130

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171031

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171028

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171031

26N No opposition filed

Effective date: 20180531

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20171031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 6

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171028

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20131028

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 923279

Country of ref document: AT

Kind code of ref document: T

Effective date: 20181028

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20181028

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20191028

Year of fee payment: 7

Ref country code: FR

Payment date: 20191028

Year of fee payment: 7

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170830

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20201031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20201028

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230510

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NO

Payment date: 20231025

Year of fee payment: 11

Ref country code: DE

Payment date: 20231020

Year of fee payment: 11