EP2721370A2 - Procédé et dispositif permettant de mesurer des surfaces assurant une réflexion homogène - Google Patents

Procédé et dispositif permettant de mesurer des surfaces assurant une réflexion homogène

Info

Publication number
EP2721370A2
EP2721370A2 EP12766922.4A EP12766922A EP2721370A2 EP 2721370 A2 EP2721370 A2 EP 2721370A2 EP 12766922 A EP12766922 A EP 12766922A EP 2721370 A2 EP2721370 A2 EP 2721370A2
Authority
EP
European Patent Office
Prior art keywords
coordinate
point
focal point
measured
sensor system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12766922.4A
Other languages
German (de)
English (en)
Inventor
Detlef Gerhard
Werner Gergen
Martin Weber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2721370A2 publication Critical patent/EP2721370A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Definitions

  • the invention relates to an apparatus and a method for measuring a particular curved, homogeneous and reflective surface of an object positioned in an orthogonal x, y, z coordinate system.
  • a confocal shape measurement of Oberflä ⁇ chen is known, depending on a mirror curvature relatively large objects are required.
  • a confocal shape measurement of a surface is very time consuming.
  • Conventional systems are relatively expensive.
  • Conventional systems are unsuitable for more curved surfaces due to their relatively large optics. Due to the size of conventional optics, not all surface parts to be measured are accessible with a conventional sensor system.
  • surfaces to be measured may be curved and reflective.
  • concave or convex curved surfaces can be measured.
  • the surfaces should be geometrically highly accurate with accuracies of 10 ⁇ maximum can be measured.
  • the surfaces should be homogeneous, in particular with regard to reflection coefficients of the surface.
  • Vermes ⁇ sen in particular curved, homogeneous, reflecting surfaces to provide, with a measuring range of a ER- summarized z-size unlimited and a resolution in the micron and submicron to be generated.
  • the device should be inexpensive and be made compact with a small lens and a Vermes ⁇ sen be quickly executed. It should be possible to measure surfaces with gradients and in particular large gradients. Surfaces should be able to be measured completely.
  • a method for measuring a homogeneously reflecting surface of an object positioned in an orthogonal x, y, z coordinate system is provided.
  • the method is characterized in that x, y, z coordinates of a plurality of points and the surface of the object are measured pointwise, with a sensor system focusing light on a focal point in known x, y, z coordinates and Coordinates a respective distance vector of a respective point to be measured to the focal point measures.
  • an apparatus for measuring a homogeneously reflecting surface of an object positioned in an orthogonal x, y, z coordinate system.
  • the device is characterized in that x, y, z coordinates of a plurality of points of the surface of the object are measured pointwise, whereby a sensor system focuses light on a focal point in known x, y, z coordinates and coordinates a respective distance vector of a respective point to be measured to the focal point measures.
  • the x, y, z coordinates of a point to be measured can be determined.
  • the sensor system can be a confocal sensor system, the light from a light source by means of a focusing device in the direction toward the top surface to a focal point on an optical axis in egg ⁇ ner internal Next focused and the x-, y-, z-coordinate of the focal point by means of measuring the spatial position of the sensor system in the coordinate system by means of a length measuring device can be measured.
  • the confocal sensor system can be adjusted by means of an adjusting device such that the optical axis is orthogonal to the x, y plane; the sensor system and the object to be adjusted in such a way by means of a relative movement means relative to each other that the optical axis passes through the to vermes ⁇ send point through and the x, y coordinates of the focal point with the x, y coordinates of the point to be measured coincide ,
  • the confocal sensor system and the object can be adjusted such by means of the Re ⁇ lativschuls adopted relative to each other, that the z-coordinate of the focal point with a
  • the z-target coordinate can be determined from a model of the surface of the object.
  • the confocal sensor system can by means of a detector is dependent on the z-coordinate of the focal point of light in ⁇ intensity of the reflected light from the surface erfas ⁇ sen with which the z-coordinate of the point can be determined by an off ⁇ values means ,
  • the z-value of the surface can be determined.
  • the z-coordinate of the focal point in the z-direction can be changed until the evaluation evaluates the detected light intensity as maximum and the z-coordinate of the focal point as coincident with the z-coordinate of the point.
  • the evaluation device can by means of a previously determined dependent on the z-coordinate of the focal point Lichtintensticiansver- run a detected light intensity as a maximum, and the z-coordinate of the point as with the z-coordinate of the focal point ⁇ rate matching. In this way, a measuring time interval can be reduced.
  • the evaluation device can by means of a previously determined dependent on the z-coordinate of the focal point Lichtintensticiansver- run a detected light intensity as a maximum, and the z-coordinate of the point as with the z-coordinate of the focal point ⁇ rate matching. In this way, a measuring time interval can be reduced.
  • the evaluation device can by means of a previously determined dependent on the z-coordinate of the focal point Lichtintensticiansver- run a detected light intensity as a maximum, and the z-coordinate of the point as with the z-coordinate of the focal point ⁇ rate matching. In this way, a measuring time interval can be reduced.
  • Evaluation device by means of a previously determined by the z-coordinate of the focal point dependent light intensity profile and by means of second detected light intensities at two different z-coordinates of the focal point
  • the evaluation device can be detected by means of two different pre-stored dependent on the z-coordinate of the focal point light intensity curves of the detection device and by means of second detected light intensities at a
  • the focal point determines the z-coordinate of vermes ⁇ send point.
  • Sensor system additionally be a chromatic confocal distance sensor, which measures a distance of the point to be measured from the sensor system in the z-direction along the optical axis, wherein a wavelength of a detected maximum light intensity of the distance and the z-coordinate of ver ⁇ measuring point are determined can.
  • the evaluation device can in each case at a point a slope of the surface in the x and / or y direction by means of a detected by the detection means detecting a shift of a detected at a slope of 0 of the
  • the x and y coordinates of the point to be measured can be defined by a measuring point pattern in the x-y plane.
  • the measuring point pattern can have mutually equidistant measuring points at corners of grid squares.
  • the z-coordinate of the focal point by means of a relative movement of the sensor caused by the Rela ⁇ tivschuls might be changed by the sensor system and object in the z-direction.
  • the z-coordinate of the focal point can be changed by means of a change in the focal length in the z-direction caused by the focusing device.
  • the length measuring device can each have a glass scale for measuring x, y, z coordinate values.
  • a change in the x, y relate z-coordinates of the focal point at most up to the end of a to be measured for all points of the same duration of measurement are carried out and the evaluation ⁇ device by means of the detected light intensity values can at least approximately determine the z-coordinate of the point.
  • Figure 2 shows a first embodiment of an intensity ⁇ course of a detection device according to the invention
  • 3 shows a first embodiment of a surface to be measured ⁇ the path; 4 shows a second embodiment of a surface to be measured ⁇ the path;
  • FIG. 5 shows an exemplary embodiment of a measured value course
  • 6 shows a second embodiment of a Lichtintensi ⁇ tuschsverlaufes a detection device
  • Figure 7 shows a third embodiment of a Lichtintensi ⁇ tösverlaufes, in particular a second Ausu- tion example of a device according to the invention
  • Figure 8 is a representation for determining a maximum
  • Figure 10 shows a second embodiment of a erfindungsge ⁇ MAESSEN device.
  • 1 shows a first embodiment of a device OF INVENTION ⁇ to the invention.
  • a homogeneously reflecting surface 7 of one in an orthogonal x, y, z Coordinate system positioned object B should be measured.
  • 1 shows a confocal sensor system A, in which a light-emitting system and a light acquiring Sys tem ⁇ are focused on a common focal point BP.
  • the confocal sensor system comprises a light source 1, the
  • the light can pass through a diaphragm 3 and is focused by ⁇ means of a focusing device 5 in a focal point BP. If the light is reflected at the focal point BP, it can be detected, for example, by means of a beam splitter 11 in a detection device 15.
  • the detection device 15 may be preceded by a diaphragm 13 for generating a defined beam path.
  • the diaphragm 3 also causes a defined beam path from the light source 1 along an optical axis 4 in the direction of the surface 7 to be measured of the object B positioned in an orthogonal x, y, z coordinate system
  • Focusing device 5 which may be an optical lens, for example, focused in known focus x, y, z coordinates. It is open ⁇ clear that may be interchanged the position of the light source 1 and the Erfas ⁇ acquisition system 15th
  • the focal point BP lies in a focal plane 9 which is parallel to or in the xy plane.
  • the focal point BP lies on the optical axis 4 at a focal length of the focusing device 5.
  • egg ⁇ ner position of the confocal sensor system A can by means of measurement in the x, y, z coordinate system by means of a length measuring device 17, the position of the focal point BP are measured in the coordinate system.
  • a length measurement can be carried out for example by means of a glass scale.
  • Figure 1 shows a Glastown ⁇ rod 19, for measuring the z-coordinate of the focal point in Ko ⁇ ordinatensystem.
  • an evaluation device 21 can use the x, y, z coordinates of a point P of the surface 7 of the object to be measured when using the measured values provided by the length measuring device 17 Determine object B.
  • FIG. 1 shows a measuring system in which a focal point BP is generated whose x, y, z coordinates can be changed and can be measured, for example, by means of the length measuring device 17.
  • the scope of protection of this application also encompasses sensor systems which may have a plurality of sensing devices 15. These can be used in parallel. In order to illustrate this, a multiplicity n of detection devices 15 are shown in FIG.
  • FIG. 2 shows a first exemplary embodiment of an intensity profile detected by a detection device according to the invention.
  • FIG. 2 shows a profile of the light intensity I detected by the detection device 15 as a function of the z-coordinate of the focal point BP, on which the light of the light source 1 is focused. The light is reflected by the surface 7 of the object B into the detection device 15.
  • the detection device hangs 15 recorded information intensity value I at a homogeneous reflecting surface of the z-coordinate of the focal point BP with respect to the z-coordinate of the point to be measured P from.
  • the intensity ⁇ extending I (z) indicates that at a large distance as relational distance vector of the focal point BP from the point to be measured P the surface 7 detected by the detection means 15 of the light intensity is small.
  • the respective intensity value I detected by the detection device 15 increases, wherein at a distance of 0, that is, when the focal point BP is generated in the point 7 to be measured, the intensity is detected intensity value I maximum.
  • the intensity curve shown here has a similarity to a Gaussian curve.
  • Figure 2 shows that by way of the known intensity curve is for example measured in advance and is stored in a storage device I (z), a z-coordinate of the point to be measured P determines who can ⁇ .
  • the focal point BP is positioned in a confocal sensor system at a coordinate Z M0 , so an associated intensity value I M o is detected.
  • the focal point BP may have either a larger or a smaller z coordinate as the point P.
  • a home detected intensity I M o can thus two z-coordinates of the point P to be sorted ⁇ .
  • a second measurement must be performed, to which the focal point BP is shifted in the z direction and a further intensity value I MA is determined.
  • the z-coordinate of the focal point BP of Z M o is increased by ⁇ ⁇ ⁇ . Since the measured intensity value Ij ⁇ greater than
  • I M o is, with knowledge of the intensity curve I (z), the z-coordinate zp of the point to be measured P of the surface
  • I MAX Intensity
  • I MB Intensity
  • the double arrow on the right in FIG. 2 shows that a relative change in the z-coordinates of the focal point BP and the point to be measured P, for example, by ⁇ means of a relative displacement of sensor systems A and B object along the z-axis can be made wide.
  • Figure 3 shows a first embodiment of a vermes ⁇ send surface profile .
  • Figure 3 shows a profile of the z-coordinates of a surface to be measured 7 as a function of the x-coordinates of points to be measured P the surface 7 of the object as surface gradients may be playing as convex or concave at ⁇ .
  • a surface 7 to be measured may have inflection points.
  • Figure 3 shows in the xz plane a focal point BP, on one to the z axis pa ⁇ rallelen optical axis 4 on the xy-coordinate of about comparable measured point P at first in a z-coordinate value ent ⁇ speaking a z-coordinate value a target surface OBg of a given model of the object B is moved.
  • first positioning is a relative movement of the sensor system A and object B along the z-axis can be carried out by means of a restriction device Relativbewe ⁇ 23rd Characterized that the focal point BP along the z-axis can be arbitrarily 29o ⁇ ben, the measurement range ⁇ an inventive apparatus is arbitrarily adjustable.
  • FIG. 4 shows a second exemplary embodiment of a surface course for determining a gradient in a point P of the surface 7 to be measured.
  • FIG. 4 initially shows the surface 7 of FIG. 3 in the xz plane.
  • the Oberflä ⁇ chenverlauf at point P has a slope of 0.
  • a detection device 15 detects a light intensity value at which the focal point BP lies, for example, in the point P to be measured. If the surface 7 is tilted by a tilt angle ⁇ ⁇ , the slope of the surface 7 changes at the point P. This is represented by the surface curve 8.
  • the tilting movement shifts the ER summed up at the surface 7 of intensity value of the detection means 15 entspre ⁇ accordingly to the tilt angle ⁇ ⁇ .
  • An evaluation device 21 may, for each point P, a slope of the surface 7 along the x- and / or y-axis by means of detecting a shift of a detected at a slope of 0 from the z-coordinate of the detected by the detection means 15
  • the evaluation device 21 may assign the respective sti ⁇ supply for the point P by means of pre-determined intensity profiles as a function of changes in the surface slope ⁇ 7 in a fixed point, the displacement of the light intensity value I (z).
  • the procedure described with reference to FIG. 4 also applies correspondingly to the yz plane.
  • FIG. 5 shows a scanning signal with which, for a multiplicity of point-by-point scanned points P of a surface 7 of an object B to be measured, measurements of
  • a sampling or pointwise measurement ei ⁇ ner surface 7 is particularly advantageous for the case that the respective measurement period is constant. In this way, the measured values can be processed more easily.
  • the width ⁇ ren it is particularly advantageous for reducing the measuring time for measuring the entire surface 7, if the x, y coordinates of all the fixed points to be measured P through a measurement point pattern in the x, y plane.
  • Figure 6 shows a second embodiment of a precisely measured ⁇ NEN intensity profile of a confocal sensor system A.
  • light intensity profiles Ii and I2 of the detection device 15 which depend on the z coordinate of the focal point BP are stored in advance in a memory device.
  • Focal point BP simultaneously two light intensity values I M I and I M 2 are detected and from the z-coordinate Zp of the point to be measured P are determined. In this single measuring position, the z-coordinate Z P is uniquely determinable.
  • Figure 7 shows a third embodiment of a Intensi ⁇ tuschsverlaufs a confocal sensor system A.
  • Such a superposition of light intensity profiles Ii, I 2 and I 3 can result, for example, if the detection devices 15 each detect different wavelength ranges of the light emitted by the light source 1.
  • the focal point BP is shifted with respect to the z-coordinate.
  • the original focal point BP in the z-coordinate Z ⁇ is displaced g
  • the Er chargedseinrichtun- detect gene 15 for a first range of wavelengths an intensity value I M i, for a second wavelength range of an in ⁇ tensticianswert I M 2 and for a third wavelength range evaluate an intensity value I M3 ⁇ with this measured intensity ⁇ and the known intensity gradients can be determined in a simple manner, the z coordinate Zp of point P, and so ⁇ probably a measuring range and a resolution ⁇ dz be increased.
  • a relative movement of sensor system A and object B for determining a distance vector between the focal point and the point P to be measured is not required.
  • Figure 8 shows the dependence of a measurement duration Tj [, to Be ⁇ humor of the x, y, z coordinates of a to be measured punk tes P of a surface 7 of an object B, from the difference of the z-coordinate Zp of the point P to the first measuring position of the
  • the measurement duration T M is directly proportional to the distance from the first measurement position of a focal point BP to the position of the to be measured
  • Point P The distance vector, and thus the measurement time j [can be thereby reduced already effective in that the first measurement position of the focal point BP in the z-coordinate Z ⁇ g egg ⁇ ner position in a desired Z coordinate Zp target corresponds.
  • Such values may be determined from a model of the upper surface 7 of the object ⁇ B. May further be a measurement and scanning a surface to be measured 7 carried out with a scanning signal, wherein a same constant time period is defined between each ⁇ the scan.
  • a change in the x, y, z coordinates of a focal point BP can be carried out maximally up to the end of a measurement duration T Mmax that is the same for all points to be measured P, wherein the evaluation unit 21 determines the z-coordinate of the point P at least approximately by means of the detected light intensity values I (z).
  • FIG. 9 shows an exemplary embodiment of a method according to the invention.
  • a confocal focusing sensor system A is used for shape measurement.
  • Embodiments ge ⁇ Frankfurtss Figure 1 and 10 are shown.
  • Such systems measure whether an approached point P of a surface 7 lies at the focal point BP. If this is not the case, it is measured in which directions the surface 7 to be measured and the sensor system A must be moved relative to each other so that the point P to be measured of the surface 7 lies at the focal point BP.
  • the focus sensor system should chen a suffi ⁇ accordingly accurate statement of the position of a focal point BP in the micrometer or sub-micrometer range enable.
  • a first step S1 the x and y positions of the point P to be measured of the surface 7 are approached, whereby highly accurate x, y axes are used.
  • a step S2 a method of the z-position of a combustion Point BP, where as well a high-precision z-axis with a high-precision measuring system, such as a glass scale, is used.
  • a step S3 it is determined that the focal point BP lies in the point P to be measured of the surface 7, and thereafter the x, y and z position values are read out from the glass scales and stored.
  • the highly accurate measurements are each carried out with a relatively fast readable glass scale.
  • FIG. 10 shows a second embodiment of a device OF INVENTION ⁇ to the invention.
  • FIG. 10 shows a chromatic confocal distance sensor.
  • a light source 1 Starting from a light source 1 is directed to an object B sk via a Y-coupler yk and a sensor head, the reflected light is returned in a spectrometer SM detected and evaluated by an evaluation device ⁇ 21st Likewise, the chromatic confocal sensor system A according to FIG 10, a measurement of a point P of a reflecting surface 7 of a Whether jektes ⁇ B is executable.
  • a device according to FIG. 1 can be combined with one or more detection devices 15, to each of which an intensity profile I (z) is assigned, and a device according to FIG. 10 for the measurement.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

L'invention concerne un procédé et un dispositif permettant de mesurer des surfaces assurant une réflexion homogène. Selon l'invention, un point focal (BP) produit par un système de détection confocal (A) est déplacé par ce dernier le long d'un axe optique (4) orthogonal à un plan x-y d'un système de coordonnées x-y-z dans une coordonnée z théorique d'un point à mesurer (P) d'une surface à mesurer (7) d'un objet (B). Une intensité lumineuse (I(z)) de la lumière réfléchie par la surface (7) fonction de la distance entre le point focal (BP) et le point (P) sur l'axe z est détectée et utilisée pour déterminer au moyen d'un dispositif d'évaluation (21) la coordonnée z réelle (Zp) du point (P).
EP12766922.4A 2011-09-26 2012-09-03 Procédé et dispositif permettant de mesurer des surfaces assurant une réflexion homogène Withdrawn EP2721370A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011083421A DE102011083421A1 (de) 2011-09-26 2011-09-26 Verfahren und Vorrichtung zum Vermessen homogen reflektierender Oberflächen
PCT/EP2012/067113 WO2013045210A2 (fr) 2011-09-26 2012-09-03 Procédé et dispositif permettant de mesurer des surfaces assurant une réflexion homogène

Publications (1)

Publication Number Publication Date
EP2721370A2 true EP2721370A2 (fr) 2014-04-23

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EP12766922.4A Withdrawn EP2721370A2 (fr) 2011-09-26 2012-09-03 Procédé et dispositif permettant de mesurer des surfaces assurant une réflexion homogène

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Country Link
US (1) US20140233040A1 (fr)
EP (1) EP2721370A2 (fr)
CN (1) CN103842770A (fr)
DE (1) DE102011083421A1 (fr)
WO (1) WO2013045210A2 (fr)

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US10145013B2 (en) 2014-01-27 2018-12-04 Veeco Instruments Inc. Wafer carrier having retention pockets with compound radii for chemical vapor desposition systems
JP5866573B1 (ja) * 2015-03-23 2016-02-17 マシンビジョンライティング株式会社 検査用照明装置及び検査システム
CN105181298B (zh) * 2015-05-13 2018-02-06 北京理工大学 多次反射式激光共焦长焦距测量方法与装置
US9627239B2 (en) * 2015-05-29 2017-04-18 Veeco Instruments Inc. Wafer surface 3-D topography mapping based on in-situ tilt measurements in chemical vapor deposition systems
WO2017102428A1 (fr) 2015-12-18 2017-06-22 Asml Netherlands B.V. Dispositif de contrôle de mise au point et appareil d'inspection doté de ce dispositif
JP7193308B2 (ja) * 2018-11-09 2022-12-20 株式会社キーエンス プロファイル測定装置
EP3798777A1 (fr) * 2019-09-24 2021-03-31 Siemens Aktiengesellschaft Transmission des valeurs mesurées de processus orientée événements

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Also Published As

Publication number Publication date
US20140233040A1 (en) 2014-08-21
WO2013045210A3 (fr) 2013-07-11
CN103842770A (zh) 2014-06-04
WO2013045210A2 (fr) 2013-04-04
DE102011083421A1 (de) 2013-03-28

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