EP2485095B1 - Composite balance - Google Patents

Composite balance Download PDF

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Publication number
EP2485095B1
EP2485095B1 EP12164386.0A EP12164386A EP2485095B1 EP 2485095 B1 EP2485095 B1 EP 2485095B1 EP 12164386 A EP12164386 A EP 12164386A EP 2485095 B1 EP2485095 B1 EP 2485095B1
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EP
European Patent Office
Prior art keywords
balance
additional part
hub
balance according
main faces
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EP12164386.0A
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German (de)
French (fr)
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EP2485095A1 (en
Inventor
Pierre-André Bühler
Marco Verardo
Thierry Conus
Jean-Philippe Thiébaud
Jean-Bernard Peters
Pierre Cusin
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Nivarox Far SA
Nivarox SA
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Nivarox Far SA
Nivarox SA
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Priority to EP12164386.0A priority Critical patent/EP2485095B1/en
Publication of EP2485095A1 publication Critical patent/EP2485095A1/en
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    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/063—Balance construction
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0002—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe
    • G04D3/0035—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe for components of the regulating mechanism
    • G04D3/0038—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe for components of the regulating mechanism for balances
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0069—Watchmakers' or watch-repairers' machines or tools for working materials for working with non-mechanical means, e.g. chemical, electrochemical, metallising, vapourising; with electron beams, laser beams

Definitions

  • the invention relates to a pendulum and its manufacturing method and, more particularly, to a composite pendulum.
  • the regulating member of a timepiece generally comprises an inertia flywheel called a balance wheel and a resonator called a spiral. These pieces are decisive for the running quality of the timepiece. Indeed, they regulate the movement, that is to say they control the frequency of the movement.
  • the balance and the hairspring are different in nature, which makes it extremely difficult to perfect the regulating organ, which includes the own fabrications of the balance and the hairspring and their assembly substantially in resonance.
  • the pendulum in particular has been manufactured in various materials without the difficulties of isochronism related to the influence of a temperature change of the regulating organ on which it depends, do not disappear.
  • GB 2,416,408 discloses a composite balance according to the preamble of claim 1.
  • the object of the present invention is to overcome all or part of the drawbacks mentioned above by proposing a composite balance whose characteristics as a function of temperature are more easily adjustable and which is obtained using a manufacturing process which comprises less steps.
  • the invention relates to a composite pendulum as defined in claim 1.
  • said at least one arm is slender in order to allow its axial and / or radial deformation in the event of shock transmitted on the balance.
  • the invention also relates to a timepiece characterized in that it comprises a balance according to one of the preceding variants.
  • the invention relates to a generally annotated method 1 and which is intended to manufacture a balance 45, 45 'for a timepiece movement.
  • process 1 comprises successive steps intended to form at least one type of composite beam, that is to say which is preferably formed by two different materials, such as, for example, silicon and metal.
  • the first step 3 consists in providing a substrate 21 comprising a silicon layer.
  • the substrate 21 is chosen so that, as visible at figures 1 and 3 its thickness corresponds substantially to the desired thickness of the silicon portion of the balance 45, 45 '.
  • the thickness of the substrate 21 may be, for example, between 100 and 400 microns.
  • the method 1 may comprise two embodiments 19, 20 as illustrated in FIG. figure 10 .
  • the method 1 comprises the implementation of a process of the LIGA type (also known by the German terms "röntgenLlthographie, Galvanoformung &Abformung”) comprising a succession of steps making it possible to electrodeposit, in a particular form, a metal on the substrate 21 with a selectively photostructured resin.
  • LIGA type also known by the German terms "röntgenLlthographie, Galvanoformung &Abformung”
  • the deposited metal may be, for example, gold or nickel or one of their alloys.
  • step 5 may consist in depositing a crenellated ring 23 and / or a cylinder 25.
  • the ring 23 comprises a series of pads 22 substantially in a circular arc and is intended to advantageously increase the mass of the future beam 45.
  • one of the advantages of silicon is its low sensitivity to temperature variations. However, it has the disadvantage of having a low density.
  • a first characteristic of the invention is therefore to increase the mass of the balance 45 with the aid of metal obtained by electrodeposition in order to increase the inertia of the future balance beam 45.
  • the metal deposited on the substrate 21 has a spacing between each pad 22 adapted to compensate for the thermal expansion of the ring 23 by avoiding transmitting silicon constraints related to these dilations.
  • the cylinder 25 is intended to receive, advantageously, by driving a balance shaft.
  • another disadvantage of silicon lies in its very weak elastic and plastic zones which makes it very brittle.
  • Another characteristic of the invention therefore consists in effecting the clamping of the balance shaft not against the silicon but on the inside diameter 24 of the metal cylinder 25 electrodeposited during step 5.
  • the cylinder 25 obtained by electroplating leaves full freedom as to its geometry.
  • the inner diameter 24 is not necessarily circular but, for example, polygonal which could improve the transmission of force in rotation with a corresponding shape of the axis.
  • Cavities 26 to 34 are selectively etched, for example, by a deep reactive ion etching process (also known as DRIE), in the silicon substrate 21.
  • DRIE deep reactive ion etching process
  • the cavities 26 to 34 make it possible to form the pattern 35 of the future pendulum 45.
  • the pattern 35 obtained comprises a serge 37 connected to the hub 39 by four arms 40 to 43.
  • the etching on the substrate 21 leaves complete freedom on the geometry of the pattern 35.
  • the number and the geometry of the arms can be different just as the rim is not necessarily circular but, for example, elliptical.
  • the arms may be slender in order to allow their axial and / or radial deformation in the event of shock transmitted on the balance 45.
  • the cavity 34 formed in the hub 39 forms with the inner diameter 24 of the metal cylinder 25 a hollow space adapted to receive an axis.
  • material bridges 36 are formed in order to maintain the pattern 35 on the substrate 21.
  • step 9 is simply performed by providing a force to the balance 45 able to break its material bridges 36.
  • This effort can, for example, be generated by machining or manually by an operator.
  • the balance 45 is of the composite type in that it comprises at least two types of material and monoblock in that the element 35 and the elements 23 and / or 25 are inseparable under pain of destruction.
  • the balance 45 comprises a hub 39 connected radially to the seam 37 by four arms 40, 41, 42 and 43.
  • the hub 39 is advantageously also axially connected to the metal cylinder and the seam 37 comprises, on a part of a of its main faces, the crenellated ring 23.
  • the method 1 comprises a second step 11, as visible in FIG. figure 3 , in which cavities 38 and / or 44 are selectively etched, for example, by a method of the DRIE type, in a portion of the thickness of the silicon substrate 21.
  • These cavities 38, 44 make it possible to form recesses able to serve as a container for at least one metal part 23 ', 25'.
  • the cavities 38 and 44 obtained can be respectively in the form of ring and disk.
  • cavities 38 and / or 44 obtained by etching leave all freedom as to their geometry.
  • the cavities 38 and / or 44 are not necessarily circular but, for example, polygonal.
  • the method 1 comprises the implementation of a galvanic growth type or LIGA type process for filling the cavities 38 and / or 44 in a particular metallic form.
  • the deposited metal may be, for example, gold or nickel or one of their alloys.
  • step 13 may consist in depositing a crenellated ring 23 'in the cavity 38 and / or a cylinder 25' in the cavity 44.
  • the ring 23 ' comprises a series of pads 22' substantially in a circular arc and is intended to advantageously increase the mass of the future beam 45 '. Indeed, as already explained above, a disadvantage of silicon lies in its low density.
  • a characteristic of the invention therefore consists in increasing the mass of the balance 45 'with the aid of metal obtained by electroplating, which makes it possible to increase the inertia of the future balance 45'.
  • the metal deposited on the substrate 21 comprises a spacing between each pad 22 'able to compensate for the thermal expansion of the ring 23' while avoiding transmitting to silicon the stresses associated with these expansions.
  • the cylinder 25 ' is intended to receive, advantageously, by driving a balance shaft.
  • another advantageous feature according to the invention is to achieve the clamping of the balance shaft not against the silicon but on the inner diameter 24 'of the metal cylinder 25' electrodeposited at the time of the invention.
  • Step 13 the cylinder 25 'obtained by electroplating leaves full freedom as to its geometry.
  • the inner diameter 24 ' is not necessarily circular but, for example, polygonal which could improve the transmission of rotational force with a corresponding shape axis.
  • the method 1 may comprise, in a fourth step 15, as illustrated in dashed lines at the figure 10 , polishing the metal deposit or deposits 23 ', 25' made during step 13 to make them planar.
  • cavities 26 'to 34' are selectively etched, for example, by a deep reactive ion etching process in the silicon substrate 21.
  • the cavities 26 'to 34' make it possible to form the pattern 35 'of the future arm 45'.
  • the pattern 35 'obtained comprises a serge 37' connected to the hub 39 'by four arms 40' to 43 '.
  • the etching on the substrate 21 leaves all freedom on the geometry of the pattern 35 '.
  • the number and the geometry of the arms can be different just as the rim is not necessarily circular but, for example, elliptical.
  • the arms may be slender to allow their axial deformation and / or radial in case of shock transmitted on the balance 45 '.
  • the cavity 34 'formed in the hub 39' forms with the inner diameter 24 'of the metal cylinder 25' a hollow space adapted to receive an axis.
  • material bridges 36 ' are formed in order to maintain the pattern 35' on the substrate 21.
  • Embodiment 20 terminates as Embodiment 19, i.e., by the final step 9 of releasing substrate 45 from the substrate 21 manufactured.
  • step 9 is simply performed by providing a force to the balance 45 'able to break its material bridges 36'. This effort can, for example, be generated by machining or manually by an operator.
  • the balance 45 ' is of the composite type in that it comprises at least two types of material and monoblock in that the element 35' and the elements 23 'and / or 25' are indissociable under pain of destruction.
  • the balance 45 ' comprises a hub 39' radially connected to the seam 37 'by four arms 40', 41 ', 42' and 43 '.
  • the hub 39 'advantageously comprises also the cylinder 25 'metal.
  • the serge 37 ' comprises the crenellated ring 23'.
  • the hub 39, 39 ' according to the embodiment 19, 20 may not comprise a cylinder 25, 25' metal hunting.
  • the cylinder 25, 25 'could then, for example, be replaced by elastic means etched into the silicon hub 39, 39' which can take the form of those disclosed in FIGS. 10A to 10E of the patent EP 1 655 642 or those disclosed in the figures 1 , 3 and 5 patent EP 1 584 994 .
  • the metal parts 25, 25 'electrodeposited according to the embodiments 19 and 20 are interchanged, i.e. the projecting portion 25 of the mode 19 is replaced by the integrated part 25' of the mode. 20 or conversely (which requires only a minimal adaptation of the method 1) or even that the portion 25 'integrated in the hub protrudes from the substrate 21.
  • the metallic parts 23, 23 'electrodeposited in the embodiments 19 and 20 are interchanged, that is to say that the projecting portion 23 of the mode 19 is replaced by the part integrated 23 'mode 20 or vice versa or even that the portion 23' integrated in the serge protrudes from the substrate 21.
  • the method 1 may furthermore provide, a posteriori of the release step 9, a step of adapting the inertia of the balance 45, 45 '.
  • a posteriori of the release step 9 a step of adapting the inertia of the balance 45, 45 '.
  • Such a step could then consist in engraving, by laser example, recesses made on the peripheral wall of the serge 37, 37 'and / or on one of the metal parts 23, 23' electrodeposited.
  • control structures of the flyweight type can also be envisaged to increase the inertia of the balance 45, 45 '.
  • a polishing step of the type of step 15 can also be performed between step 5 and step 7.

Description

DOMAINE DE L'INVENTIONFIELD OF THE INVENTION

L'invention se rapporte à un balancier et son procédé de fabrication et, plus particulièrement, à un balancier composite.The invention relates to a pendulum and its manufacturing method and, more particularly, to a composite pendulum.

ARRIERE PLAN DE L'INVENTIONBACKGROUND OF THE INVENTION

L'organe régulateur d'une pièce d'horlogerie comporte généralement un volant d'inertie appelé balancier et un résonateur appelé spiral. Ces pièces sont déterminantes pour la qualité de marche de la pièce d'horlogerie. En effet, elles régulent le mouvement, c'est-à-dire qu'elles contrôlent la fréquence du mouvement.The regulating member of a timepiece generally comprises an inertia flywheel called a balance wheel and a resonator called a spiral. These pieces are decisive for the running quality of the timepiece. Indeed, they regulate the movement, that is to say they control the frequency of the movement.

Le balancier et le spiral sont de nature différente ce qui rend extrêmement complexe la mise au point de l'organe régulateur, qui comprend les fabrications propres du balancier et du spiral ainsi que leur assemblage sensiblement en résonance.The balance and the hairspring are different in nature, which makes it extremely difficult to perfect the regulating organ, which includes the own fabrications of the balance and the hairspring and their assembly substantially in resonance.

Le balancier notamment a ainsi été fabriqué dans divers matériaux sans que les difficultés d'isochronisme liées à l'influence d'un changement de température de l'organe régulateur dont il dépend, ne disparaissent.The pendulum in particular has been manufactured in various materials without the difficulties of isochronism related to the influence of a temperature change of the regulating organ on which it depends, do not disappear.

GB 2 416 408 décrit un balancier composite selon le préambule de la revendication 1. GB 2,416,408 discloses a composite balance according to the preamble of claim 1.

RESUME DE L'INVENTIONSUMMARY OF THE INVENTION

Le but de la présente invention est de pallier tout ou partie les inconvénients cités précédemment en proposant un balancier composite dont les caractéristiques en fonction de la température sont plus facilement ajustables et qui est obtenu à l'aide d'un procédé de fabrication qui comporte moins d'étapes.The object of the present invention is to overcome all or part of the drawbacks mentioned above by proposing a composite balance whose characteristics as a function of temperature are more easily adjustable and which is obtained using a manufacturing process which comprises less steps.

A cet effet, l'invention se rapporte à un balancier composite tel que défini dans la revendication 1.For this purpose, the invention relates to a composite pendulum as defined in claim 1.

Conformément à d'autres caractéristiques avantageuses de l'invention :

  • ladite au moins une partie supplémentaire est montée sur une des faces principales de la serge ce qui permet d'amplifier l'ajustement d'inertie ;
  • ladite au moins une partie supplémentaire est montée dans un évidement réalisé dans une des faces principales de la serge ;
  • ladite au moins une partie supplémentaire fait saillie d'une des faces principales de la serge ;
  • ladite au moins une partie supplémentaire comporte une succession de plots écartés à intervalle régulier pour compenser la dilatation thermique de ladite au moins un partie supplémentaire ;
  • ladite au moins une partie supplémentaire est formée à partir d'un matériau métallique comme de l'or qui possède une densité très supérieure à celle du silicium ;
  • le moyeu comporte au moins une deuxième partie supplémentaire destinée à recevoir par chassage l'axe de balancier ;
  • ladite au moins une deuxième partie supplémentaire est montée sur une des faces principales du moyeu ;
  • ladite au moins une deuxième partie supplémentaire est montée dans un évidement réalisé dans une des faces principales du moyeu ;
  • ladite au moins une deuxième partie supplémentaire fait saillie d'une des faces principales du moyeu ;
  • ladite au moins une deuxième partie supplémentaire est sensiblement en forme de cylindre ;
  • ladite au moins une deuxième partie supplémentaire est formée à partir d'un matériau métallique
According to other advantageous features of the invention:
  • said at least one additional part is mounted on one of the main faces of the serge which makes it possible to amplify the inertia adjustment;
  • said at least one additional portion is mounted in a recess made in one of the main faces of the serge;
  • said at least one additional portion protrudes from one of the main faces of the serge;
  • said at least one additional portion comprises a succession of studs spaced apart at regular intervals to compensate for the thermal expansion of said at least one additional part;
  • said at least one additional portion is formed from a metallic material such as gold which has a much higher density than silicon;
  • the hub comprises at least a second additional portion intended to receive by driving the balance shaft;
  • said at least a second additional portion is mounted on one of the main faces of the hub;
  • said at least one second additional portion is mounted in a recess formed in one of the main faces of the hub;
  • said at least one additional second portion protrudes from one of the main faces of the hub;
  • said at least a second additional portion is substantially cylinder-shaped;
  • said at least one additional second portion is formed from a metallic material

ledit au moins un bras est élancé afin d'autoriser sa déformation axiale et/ou radiale en cas de choc transmis sur le balancier.said at least one arm is slender in order to allow its axial and / or radial deformation in the event of shock transmitted on the balance.

L'invention se rapporte également à une pièce d'horlogerie caractérisée en ce qu'elle comporte un balancier conforme à l'une des variantes précédentes.The invention also relates to a timepiece characterized in that it comprises a balance according to one of the preceding variants.

DESCRIPTION SOMMAIRE DES DESSINSSUMMARY DESCRIPTION OF THE DRAWINGS

D'autres particularités et avantages ressortiront clairement de la description qui en est faite ci-après, à titre indicatif et nullement limitatif, en référence aux dessins annexés, dans lesquels :

  • les figures 1 et 2 représentent des vues des étapes successives du procédé selon un premier mode de réalisation ;
  • les figures 3 à 5 représentent des vues des étapes successives du procédé selon un deuxième mode de réalisation ;
  • les figures 6 et 7 sont des représentations en perspective d'un balancier composite selon un premier mode de réalisation ;
  • les figures 8 et 9 sont des représentations en perspective d'un balancier composite selon un deuxième mode de réalisation ;
  • la figure 10 représente un schéma fonctionnel du procédé selon l'invention.
Other particularities and advantages will emerge clearly from the description which is given hereinafter, by way of indication and in no way limiting, with reference to the appended drawings, in which:
  • the Figures 1 and 2 represent views of the successive steps of the method according to a first embodiment;
  • the Figures 3 to 5 represent views of the successive steps of the method according to a second embodiment;
  • the Figures 6 and 7 are perspective representations of a composite balance according to a first embodiment;
  • the Figures 8 and 9 are perspective representations of a composite pendulum according to a second embodiment;
  • the figure 10 represents a block diagram of the process according to the invention.

DESCRIPTION DETAILLEE DES MODES DE REALISATION PREFERESDETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

L'invention se rapporte à un procédé généralement annoté 1 et qui est destiné à fabriquer un balancier 45, 45' pour un mouvement de pièce d'horlogerie. Comme illustré aux figures 1 à 5 et 10, le procédé 1 comporte des étapes successives destinées à former au moins un type de balancier composite, c'est-à-dire qui est formé préférentiellement par deux matériaux différents, comme par exemple, du silicium et du métal.The invention relates to a generally annotated method 1 and which is intended to manufacture a balance 45, 45 'for a timepiece movement. As illustrated in Figures 1 to 5 and 10 process 1 comprises successive steps intended to form at least one type of composite beam, that is to say which is preferably formed by two different materials, such as, for example, silicon and metal.

En référence aux figures 1, 3 et 10, la première étape 3 consiste à se munir d'un substrat 21 comportant une couche de silicium. Préférentiellement dans cette étape 3, le substrat 21 est choisi afin que, comme visible aux figures 1 et 3, son épaisseur corresponde sensiblement à l'épaisseur souhaitée de la partie en silicium du balancier 45, 45'. Ainsi, l'épaisseur du substrat 21 peut être, par exemple, comprise entre 100 et 400 µm.With reference to figures 1 , 3 and 10 the first step 3 consists in providing a substrate 21 comprising a silicon layer. Preferentially in this step 3, the substrate 21 is chosen so that, as visible at figures 1 and 3 its thickness corresponds substantially to the desired thickness of the silicon portion of the balance 45, 45 '. Thus, the thickness of the substrate 21 may be, for example, between 100 and 400 microns.

Avantageusement selon l'invention, après la première étape 3, le procédé 1 peut comporter deux modes de réalisation 19, 20 comme illustré à la figure 10.Advantageously according to the invention, after the first step 3, the method 1 may comprise two embodiments 19, 20 as illustrated in FIG. figure 10 .

Selon un premier mode de réalisation 19, dans une deuxième étape 5, comme visible à la figure 1, le procédé 1 comporte la mise en oeuvre d'un processus du type LIGA (également connu par les termes allemands « röntgenLlthographie, Galvanoformung & Abformung ») comportant une succession d'étapes permettant d'électrodéposer, selon une forme particulière, un métal sur le substrat 21 à l'aide d'une résine sélectivement photostructurée. Ce processus du type LIGA étant très connu, il ne sera pas d'avantage détaillé ci-après. Cependant, Préférentiellement, le métal déposé peut être, par exemple, de l'or ou du nickel ou bien encore un de leurs alliages.According to a first embodiment 19, in a second step 5, as visible in FIG. figure 1 the method 1 comprises the implementation of a process of the LIGA type (also known by the German terms "röntgenLlthographie, Galvanoformung &Abformung") comprising a succession of steps making it possible to electrodeposit, in a particular form, a metal on the substrate 21 with a selectively photostructured resin. As this process of the LIGA type is well known, it will not be more detailed below. However, preferably, the deposited metal may be, for example, gold or nickel or one of their alloys.

Dans l'exemple illustré à la figure 1, l'étape 5 peut consister à déposer un anneau crénelé 23 et/ou un cylindre 25. Dans l'exemple illustré à la figure 1, l'anneau 23 comporte une série de plots 22 sensiblement en arc de cercle et est destiné à, avantageusement, augmenter la masse du futur balancier 45. En effet, un des avantages du silicium est sa faible sensibilité aux variations de température. Cependant, il possède l'inconvénient d'avoir une faible densité.In the example shown in figure 1 , step 5 may consist in depositing a crenellated ring 23 and / or a cylinder 25. In the example illustrated in FIG. figure 1 the ring 23 comprises a series of pads 22 substantially in a circular arc and is intended to advantageously increase the mass of the future beam 45. Indeed, one of the advantages of silicon is its low sensitivity to temperature variations. However, it has the disadvantage of having a low density.

Par conséquent, une première caractéristique de l'invention consiste donc à augmenter la masse du balancier 45 à l'aide de métal obtenu par électrodéposition afin d'augmenter l'inertie du futur balancier 45. Toutefois, afin de garder les avantages du silicium, le métal déposé sur le substrat 21 comporte un écartement entre chaque plot 22 apte à compenser les dilatations thermiques de l'anneau 23 en évitant de transmettre au silicium les contraintes liées à ces dilatations.Therefore, a first characteristic of the invention is therefore to increase the mass of the balance 45 with the aid of metal obtained by electrodeposition in order to increase the inertia of the future balance beam 45. However, in order to keep the advantages of silicon, the metal deposited on the substrate 21 has a spacing between each pad 22 adapted to compensate for the thermal expansion of the ring 23 by avoiding transmitting silicon constraints related to these dilations.

Dans l'exemple illustré à la figure 1, le cylindre 25 est destiné à recevoir, avantageusement, par chassage un axe de balancier. En effet, un autre inconvénient du silicium réside dans ses très faibles zones élastique et plastique ce qui le rend très cassant. Une autre caractéristique de l'invention consiste donc à réaliser le serrage de l'axe de balancier non pas contre le silicium mais sur le diamètre intérieur 24 du cylindre métallique 25 électrodéposé lors de l'étape 5.In the example shown in figure 1 , the cylinder 25 is intended to receive, advantageously, by driving a balance shaft. Indeed, another disadvantage of silicon lies in its very weak elastic and plastic zones which makes it very brittle. Another characteristic of the invention therefore consists in effecting the clamping of the balance shaft not against the silicon but on the inside diameter 24 of the metal cylinder 25 electrodeposited during step 5.

Avantageusement selon le procédé 1, le cylindre 25 obtenu par électrodéposition laisse toute liberté quant à sa géométrie. Ainsi, notamment, le diamètre intérieur 24 n'est pas forcément circulaire mais, par exemple, polygonal ce qui pourrait permettre d'améliorer la transmission d'effort en rotation avec un axe de forme correspondante.Advantageously according to method 1, the cylinder 25 obtained by electroplating leaves full freedom as to its geometry. Thus, in particular, the inner diameter 24 is not necessarily circular but, for example, polygonal which could improve the transmission of force in rotation with a corresponding shape of the axis.

Dans une troisième étape 7, visible à la figure 2, des cavités 26 à 34 sont sélectivement gravées, par exemple, par un procédé de gravure ionique réactive profonde (également connu sous l'acronyme anglais DRIE), dans le substrat 21 en silicium.In a third step 7, visible at the figure 2 Cavities 26 to 34 are selectively etched, for example, by a deep reactive ion etching process (also known as DRIE), in the silicon substrate 21.

Préférentiellement, les cavités 26 à 34 permettent de former le motif 35 du futur balancier 45. Comme illustré dans l'exemple de la figure 2, le motif 35 obtenu comporte une serge 37 reliée au moyeu 39 par quatre bras 40 à 43. Cependant, avantageusement selon le procédé 1, la gravure sur le substrat 21 laisse toute liberté sur la géométrie du motif 35. Ainsi, notamment, le nombre et la géométrie des bras peuvent être différents tout comme la jante n'est pas forcément circulaire mais, par exemple, elliptique. De plus, les bras peuvent être plus élancés afin d'autoriser leur déformation axiale et/ou radiale en cas de choc transmis sur le balancier 45.Preferably, the cavities 26 to 34 make it possible to form the pattern 35 of the future pendulum 45. As illustrated in the example of FIG. figure 2 , the pattern 35 obtained comprises a serge 37 connected to the hub 39 by four arms 40 to 43. However, advantageously according to the method 1, the etching on the substrate 21 leaves complete freedom on the geometry of the pattern 35. Thus, in particular, the number and the geometry of the arms can be different just as the rim is not necessarily circular but, for example, elliptical. In addition, the arms may be slender in order to allow their axial and / or radial deformation in the event of shock transmitted on the balance 45.

Il faut également noter que la cavité 34 réalisée dans le moyeu 39 forme avec le diamètre intérieur 24 du cylindre métallique 25 un espace creux apte à recevoir un axe. On note enfin que des ponts de matières 36 sont formés afin de maintenir le motif 35 au substrat 21.It should also be noted that the cavity 34 formed in the hub 39 forms with the inner diameter 24 of the metal cylinder 25 a hollow space adapted to receive an axis. Finally, it is noted that material bridges 36 are formed in order to maintain the pattern 35 on the substrate 21.

Selon le mode de réalisation 19, le procédé 1 se termine par la l'étape finale 9 consistant à libérer du substrat 21 le balancier 45 fabriqué. Avantageusement, l'étape 9 est simplement réalisée en fournissant un effort au balancier 45 apte à casser ses ponts de matière 36. Cet effort peut, par exemple, être généré par usinage ou manuellement par un opérateur.According to the embodiment 19, the method 1 ends with the final step 9 of releasing the substrate 45 manufactured from the substrate 21. Advantageously, step 9 is simply performed by providing a force to the balance 45 able to break its material bridges 36. This effort can, for example, be generated by machining or manually by an operator.

A la suite de l'étape finale 9, comme illustré dans l'exemple des figures 6 et 7, on obtient donc un balancier 45 formé principalement en silicium avec une ou deux parties 23, 25 en métal. On comprend donc que le balancier 45 est du type composite en ce qu'il comporte au moins deux types de matière et monobloc en que l'élément 35 et les éléments 23 et/ou 25 sont indissociables sous peine de destruction. Le balancier 45 comprend un moyeu 39 raccordé radialement à la serge 37 par quatre bras 40, 41, 42 et 43. Le moyeu 39 est, avantageusement, également raccordé axialement au cylindre 25 métallique et la serge 37 comporte, sur une partie d'une de ses faces principales, l'anneau crénelé 23.Following the final step 9, as illustrated in the example of Figures 6 and 7 a pendulum 45 formed mainly of silicon with one or two parts 23, 25 of metal is thus obtained. It is therefore clear that the balance 45 is of the composite type in that it comprises at least two types of material and monoblock in that the element 35 and the elements 23 and / or 25 are inseparable under pain of destruction. The balance 45 comprises a hub 39 connected radially to the seam 37 by four arms 40, 41, 42 and 43. The hub 39 is advantageously also axially connected to the metal cylinder and the seam 37 comprises, on a part of a of its main faces, the crenellated ring 23.

Selon un second mode de réalisation 20, le procédé 1 comporte une deuxième étape 11, comme visible à la figure 3, dans laquelle des cavités 38 et/ou 44 sont sélectivement gravées, par exemple, par un procédé du type DRIE, dans une partie de l'épaisseur du substrat 21 en silicium. Ces cavités 38, 44 permettent de former des évidements aptes à servir de contenant pour au moins une partie métallique 23', 25'. Comme dans l'exemple illustré à la figure 3, les cavités 38 et 44 obtenues peuvent être respectivement en forme d'anneau et de disque.According to a second embodiment 20, the method 1 comprises a second step 11, as visible in FIG. figure 3 , in which cavities 38 and / or 44 are selectively etched, for example, by a method of the DRIE type, in a portion of the thickness of the silicon substrate 21. These cavities 38, 44 make it possible to form recesses able to serve as a container for at least one metal part 23 ', 25'. As in the example shown in figure 3 , the cavities 38 and 44 obtained can be respectively in the form of ring and disk.

Avantageusement selon le procédé 1, les cavités 38 et/ou 44 obtenues par gravage laisse toute liberté quant à leur géométrie. Ainsi, notamment, les cavités 38 et/ou 44 ne sont pas forcément circulaires mais, par exemple, polygonales.Advantageously according to method 1, cavities 38 and / or 44 obtained by etching leave all freedom as to their geometry. Thus, in particular, the cavities 38 and / or 44 are not necessarily circular but, for example, polygonal.

Dans une troisième étape 13, comme illustré à la figure 4, le procédé 1 comporte la mise en oeuvre d'un processus du type croissance galvanique ou du type LIGA permettant de combler les cavités 38 et/ou 44 selon une forme métallique particulière. Préférentiellement, le métal déposé peut être, par exemple, de l'or ou du nickel ou bien encore un de leurs alliages.In a third step 13, as illustrated in FIG. figure 4 , the method 1 comprises the implementation of a galvanic growth type or LIGA type process for filling the cavities 38 and / or 44 in a particular metallic form. Preferably, the deposited metal may be, for example, gold or nickel or one of their alloys.

Dans l'exemple illustré à la figure 4, l'étape 13 peut consister à déposer un anneau crénelé 23' dans la cavité 38 et/ou un cylindre 25' dans la cavité 44. De plus, dans l'exemple illustré à la figure 4, l'anneau 23' comporte une série de plots 22' sensiblement en arc de cercle et est destinée à, avantageusement, augmenter la masse du futur balancier 45'. En effet, comme déjà expliqué ci-dessus, un inconvénient du silicium réside dans sa faible densité.In the example shown in figure 4 , step 13 may consist in depositing a crenellated ring 23 'in the cavity 38 and / or a cylinder 25' in the cavity 44. In addition, in the example illustrated in FIG. figure 4 , the ring 23 'comprises a series of pads 22' substantially in a circular arc and is intended to advantageously increase the mass of the future beam 45 '. Indeed, as already explained above, a disadvantage of silicon lies in its low density.

Ainsi, comme pour le mode de réalisation 19, une caractéristique de l'invention consiste donc à augmenter la masse du balancier 45' à l'aide de métal obtenu par électrodéposition ce qui permet d'augmenter l'inertie du futur balancier 45'. Toutefois, afin de garder les avantages du silicium, le métal déposé sur le substrat 21 comporte un écartement entre chaque plot 22' apte à compenser les dilatations thermiques de l'anneau 23' en évitant de transmettre au silicium les contraintes liées à ces dilatations.Thus, as for embodiment 19, a characteristic of the invention therefore consists in increasing the mass of the balance 45 'with the aid of metal obtained by electroplating, which makes it possible to increase the inertia of the future balance 45'. However, in order to keep the advantages of silicon, the metal deposited on the substrate 21 comprises a spacing between each pad 22 'able to compensate for the thermal expansion of the ring 23' while avoiding transmitting to silicon the stresses associated with these expansions.

Dans l'exemple illustré à la figure 4, le cylindre 25' est destiné à recevoir, avantageusement, par chassage un axe de balancier. En effet, comme déjà expliqué ci-dessus, une autre caractéristique avantageuse selon l'invention consiste à réaliser le serrage de l'axe de balancier non pas contre le silicium mais sur le diamètre intérieur 24' du cylindre métallique 25' électrodéposé lors de l'étape 13. Avantageusement selon le procédé 1, le cylindre 25' obtenu par électrodéposition laisse toute liberté quant à sa géométrie. Ainsi, notamment, le diamètre intérieur 24' n'est pas forcément circulaire mais, par exemple, polygonal ce qui pourrait permettre d'améliorer la transmission d'effort en rotation avec un axe de forme correspondante.In the example shown in figure 4 , the cylinder 25 'is intended to receive, advantageously, by driving a balance shaft. Indeed, as already explained above, another advantageous feature according to the invention is to achieve the clamping of the balance shaft not against the silicon but on the inner diameter 24 'of the metal cylinder 25' electrodeposited at the time of the invention. Step 13. Advantageously according to method 1, the cylinder 25 'obtained by electroplating leaves full freedom as to its geometry. Thus, in particular, the inner diameter 24 'is not necessarily circular but, for example, polygonal which could improve the transmission of rotational force with a corresponding shape axis.

Préférentiellement, le procédé 1 peut comporter, dans une quatrième étape 15, comme illustré en traits interrompus à la figure 10, consistant à polir le ou les dépôts métalliques 23', 25' réalisés lors de l'étape 13 afin de les rendre plans.Preferably, the method 1 may comprise, in a fourth step 15, as illustrated in dashed lines at the figure 10 , polishing the metal deposit or deposits 23 ', 25' made during step 13 to make them planar.

Dans une cinquième étape 17, visible à la figure 5, des cavités 26' à 34' sont sélectivement gravées, par exemple, par un procédé de gravure ionique réactive profonde dans le substrat 21 en silicium.In a fifth step 17, visible at the figure 5 cavities 26 'to 34' are selectively etched, for example, by a deep reactive ion etching process in the silicon substrate 21.

Préférentiellement, les cavités 26' à 34' permettent de former le motif 35' du futur balancier 45'. Comme illustré dans l'exemple de la figure 5, le motif 35' obtenu comporte une serge 37' reliée au moyeu 39' par quatre bras 40' à 43'. Cependant, avantageusement selon le procédé 1, la gravure sur le substrat 21 laisse toute liberté sur la géométrie du motif 35'. Ainsi, notamment, le nombre et la géométrie des bras peuvent être différents tout comme la jante n'est pas forcément circulaire mais, par exemple, elliptique. De plus, les bras peuvent être plus élancés afin d'autoriser leur déformation axiale et/ou radiale en cas de choc transmis sur le balancier 45'.Preferably, the cavities 26 'to 34' make it possible to form the pattern 35 'of the future arm 45'. As illustrated in the example of figure 5 , the pattern 35 'obtained comprises a serge 37' connected to the hub 39 'by four arms 40' to 43 '. However, advantageously according to method 1, the etching on the substrate 21 leaves all freedom on the geometry of the pattern 35 '. Thus, in particular, the number and the geometry of the arms can be different just as the rim is not necessarily circular but, for example, elliptical. In addition, the arms may be slender to allow their axial deformation and / or radial in case of shock transmitted on the balance 45 '.

Il faut également noter que la cavité 34' réalisée dans le moyeu 39' forme avec le diamètre intérieur 24' du cylindre métallique 25' un espace creux apte à recevoir un axe. On note enfin que des ponts de matières 36' sont formés afin de maintenir le motif 35' au substrat 21.It should also be noted that the cavity 34 'formed in the hub 39' forms with the inner diameter 24 'of the metal cylinder 25' a hollow space adapted to receive an axis. Finally, it is noted that material bridges 36 'are formed in order to maintain the pattern 35' on the substrate 21.

Le mode de réalisation 20 se termine comme le mode de réalisation 19, c'est-à-dire par l'étape finale 9 consistant à libérer du substrat 21 le balancier 45' fabriqué. Avantageusement, l'étape 9 est simplement réalisée en fournissant un effort au balancier 45' apte à casser ses ponts de matière 36'. Cet effort peut, par exemple, être généré par usinage ou manuellement par un opérateur.Embodiment 20 terminates as Embodiment 19, i.e., by the final step 9 of releasing substrate 45 from the substrate 21 manufactured. Advantageously, step 9 is simply performed by providing a force to the balance 45 'able to break its material bridges 36'. This effort can, for example, be generated by machining or manually by an operator.

A la suite de l'étape finale 9, comme illustré dans l'exemple des figures 8 et 9, on obtient donc un balancier 45' formé principalement en silicium avec une ou deux parties 23', 25' en métal. On comprend donc que le balancier 45' est du type composite en ce qu'il comporte au moins deux types de matière et monobloc en que l'élément 35' et les éléments 23' et/ou 25' sont indissociables sous peine de destruction. Le balancier 45' comprend un moyeu 39' raccordé radialement à la serge 37' par quatre bras 40', 41', 42' et 43'. Le moyeu 39' comporte, avantageusement, également le cylindre 25' métallique. Enfin, la serge 37' comporte l'anneau crénelé 23'.Following the final step 9, as illustrated in the example of Figures 8 and 9 , so we get a beam 45 'formed mainly of silicon with one or two parts 23', 25 'of metal. It is therefore clear that the balance 45 'is of the composite type in that it comprises at least two types of material and monoblock in that the element 35' and the elements 23 'and / or 25' are indissociable under pain of destruction. The balance 45 'comprises a hub 39' radially connected to the seam 37 'by four arms 40', 41 ', 42' and 43 '. The hub 39 'advantageously comprises also the cylinder 25 'metal. Finally, the serge 37 'comprises the crenellated ring 23'.

Avantageusement selon le procédé 1 de l'invention expliqué ci-dessus, on comprend également qu'il est possible que plusieurs balanciers 45, 45' puissent être réalisés sur le même substrat 21 ce qui autorise une production en série.Advantageously according to the method 1 of the invention explained above, it is also understood that it is possible that several rockers 45, 45 'can be made on the same substrate 21 which allows a series production.

Bien entendu, la présente invention ne se limite pas à l'exemple illustré mais est susceptible de diverses variantes et modifications qui apparaîtront à l'homme de l'art. En particulier, le moyeu 39, 39' selon le mode de réalisation 19, 20 peut ne pas comprendre de cylindre 25, 25' métallique de chassage. Le cylindre 25, 25' pourrait alors, par exemple, être remplacé par des moyens élastiques gravés dans le moyeu 39, 39' en silicium pouvant prendre la forme de ceux divulgués dans les figures 10A à 10E du brevet EP 1 655 642 ou ceux divulgués dans les figures 1, 3 et 5 du brevet EP 1 584 994 .Of course, the present invention is not limited to the illustrated example but is susceptible of various variations and modifications that will occur to those skilled in the art. In particular, the hub 39, 39 'according to the embodiment 19, 20 may not comprise a cylinder 25, 25' metal hunting. The cylinder 25, 25 'could then, for example, be replaced by elastic means etched into the silicon hub 39, 39' which can take the form of those disclosed in FIGS. 10A to 10E of the patent EP 1 655 642 or those disclosed in the figures 1 , 3 and 5 patent EP 1 584 994 .

II est également possible que les parties métalliques 25, 25' électrodéposées selon les modes de réalisation 19 et 20 soient interverties, c'est-à-dire que la partie en saillie 25 du mode 19 soit remplacée par la partie intégrée 25' du mode 20 ou inversement (ce qui ne nécessite qu'une adaptation minime du procédé 1) ou même que la partie 25' intégrée dans le moyeu fasse saillie du substrat 21.It is also possible that the metal parts 25, 25 'electrodeposited according to the embodiments 19 and 20 are interchanged, i.e. the projecting portion 25 of the mode 19 is replaced by the integrated part 25' of the mode. 20 or conversely (which requires only a minimal adaptation of the method 1) or even that the portion 25 'integrated in the hub protrudes from the substrate 21.

Selon un raisonnement similaire, il est également possible que les parties métalliques 23, 23' électrodéposées dans les modes de réalisation 19 et 20 soient interverties, c'est-à-dire que la partie en saillie 23 du mode 19 soit remplacée par la partie intégrée 23' du mode 20 ou inversement ou même que la partie 23' intégrée dans la serge fasse saillie du substrat 21.According to similar reasoning, it is also possible that the metallic parts 23, 23 'electrodeposited in the embodiments 19 and 20 are interchanged, that is to say that the projecting portion 23 of the mode 19 is replaced by the part integrated 23 'mode 20 or vice versa or even that the portion 23' integrated in the serge protrudes from the substrate 21.

De plus, avantageusement, le procédé 1 peut prévoir en outre, a posteriori de l'étape de libération 9, une étape d'adaptation de l'inertie du balancier 45, 45'. Une telle étape pourrait alors consister à graver, par exemple par laser, des évidements réalisés sur la paroi périphérique de la serge 37, 37' et/ou sur une des parties métalliques 23, 23' électrodéposées. De manière inverse, des structures réglantes du type masselotte peuvent également être envisagées afin d'augmenter l'inertie du balancier 45, 45'.In addition, advantageously, the method 1 may furthermore provide, a posteriori of the release step 9, a step of adapting the inertia of the balance 45, 45 '. Such a step could then consist in engraving, by laser example, recesses made on the peripheral wall of the serge 37, 37 'and / or on one of the metal parts 23, 23' electrodeposited. Conversely, control structures of the flyweight type can also be envisaged to increase the inertia of the balance 45, 45 '.

Enfin, une étape de polissage du type de l'étape 15 peut également être réalisée entre l'étape 5 et l'étape 7.Finally, a polishing step of the type of step 15 can also be performed between step 5 and step 7.

Claims (14)

  1. Composite balance (45, 45') formed in a layer (21) of silicon-based material and including a hub (39, 39') connected to a felloe (37, 37') by at least one arm (40, 41, 42, 43), the felloe (37, 37') including one additional part of higher density than said silicon-based material to increase the inertia of said balance characterized in that said additional part is approximately in the shape of a notched ring (23, 23').
  2. Balance according to claim 1, characterized in that said at least one additional part (23) is mounted on one of the main faces of the felloe (37).
  3. Balance according to claim 1, characterized in that said at least one additional part (23') is mounted in a recess (38) made in one of the main faces of the felloe (37).
  4. Balance according to claim 3, characterized in that said at least one additional part (23') projects from one of the main faces of the felloe (37).
  5. Balance according to any of the preceding claims, characterized in that the notched ring (23, 23') includes a series of studs (22, 22') spaced at regular intervals to compensate for any thermal expansion in said at least one additional part (23, 23').
  6. Balance according to any of the preceding claims, characterized in that said at least one additional part (23, 23') is formed from a metal material.
  7. Balance according to any of the preceding claims, characterized in that the hub (39, 39') includes at least a second additional part (25, 25') for receiving a balance staff that is driven therein.
  8. Balance according to claim 7, characterized in that said at least one second additional part (25) is mounted on one of the main faces of the hub (39).
  9. Balance according to claim 7, characterized in that said at least one second additional part (25') is mounted in a recess (44) made in one of the main faces of the hub (39).
  10. Balance according to claim 9, characterized in that said at least one second additional part (25') projects from one of the main faces of the hub (39).
  11. Balance according to any of claims 7 to 10, characterized in that said at least one second additional part is substantially cylinder-shaped (25, 25').
  12. Balance according to any of claims 7 to 11, characterized in that said at least one second additional part (25, 25') is formed from a metal material.
  13. Balance according to any of the preceding claims, characterized in that said at least one arm (40, 41, 42, 43) is slim so as to enable the axial and/or radial deformation thereof in the event of any shock transmitted to the balance (45, 45').
  14. Timepiece, characterized in that it includes a balance (25, 25') according to any of the preceding claims.
EP12164386.0A 2008-03-20 2009-03-13 Composite balance Active EP2485095B1 (en)

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EP08153093A EP2104005A1 (en) 2008-03-20 2008-03-20 Composite balance and method of manufacturing thereof
EP09721945A EP2257855B1 (en) 2008-03-20 2009-03-13 Process of manufacturing of a composite balance
EP12164386.0A EP2485095B1 (en) 2008-03-20 2009-03-13 Composite balance

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EP2105807B1 (en) 2008-03-28 2015-12-02 Montres Breguet SA Monobloc elevated curve spiral and method for manufacturing same

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HK1154087A1 (en) 2012-04-20
JP2013068638A (en) 2013-04-18
RU2010142923A (en) 2012-04-27
JP2011525614A (en) 2011-09-22
EP2257855A1 (en) 2010-12-08
EP2104005A1 (en) 2009-09-23
RU2468405C2 (en) 2012-11-27
EP2257855B1 (en) 2012-12-05
TWI438589B (en) 2014-05-21
JP5603458B2 (en) 2014-10-08
JP2013231732A (en) 2013-11-14
JP5443626B2 (en) 2014-03-19
KR20100138927A (en) 2010-12-31
WO2009115464A1 (en) 2009-09-24
CN101978327B (en) 2012-07-18
CN101978327A (en) 2011-02-16
US8550699B2 (en) 2013-10-08
EP2485095A1 (en) 2012-08-08
US20110103196A1 (en) 2011-05-05

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