EP2326995B1 - Gear system for a timepiece - Google Patents

Gear system for a timepiece Download PDF

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Publication number
EP2326995B1
EP2326995B1 EP09806405.8A EP09806405A EP2326995B1 EP 2326995 B1 EP2326995 B1 EP 2326995B1 EP 09806405 A EP09806405 A EP 09806405A EP 2326995 B1 EP2326995 B1 EP 2326995B1
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EP
European Patent Office
Prior art keywords
pattern
pinion
mask
substrate
wheel
Prior art date
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Application number
EP09806405.8A
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German (de)
French (fr)
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EP2326995A1 (en
Inventor
Marco Verardo
Thierry Conus
Jean-Philippe ThiƩbaud
Jean-Bernard Peters
Pierre Cusin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nivarox Far SA
Nivarox SA
Original Assignee
Nivarox Far SA
Nivarox SA
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Application filed by Nivarox Far SA, Nivarox SA filed Critical Nivarox Far SA
Priority to EP09806405.8A priority Critical patent/EP2326995B1/en
Publication of EP2326995A1 publication Critical patent/EP2326995A1/en
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    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0069—Watchmakers' or watch-repairers' machines or tools for working materials for working with non-mechanical means, e.g. chemical, electrochemical, metallising, vapourising; with electron beams, laser beams
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B13/00—Gearwork
    • G04B13/02—Wheels; Pinions; Spindles; Pivots
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B13/00—Gearwork
    • G04B13/02—Wheels; Pinions; Spindles; Pivots
    • G04B13/026—Assembly and manufacture

Definitions

  • the invention relates to a composite gear system, for example silicon - metal for a timepiece and more particularly to such a system comprising a fastening device able to avoid shear forces.
  • a composite watchmaking organ that is to say comprising two types of materials, such as a sprocket gear type gear system if one of the materials comprises a very restricted plastic zone.
  • a sprocket gear type gear system if one of the materials comprises a very restricted plastic zone.
  • crystalline silicon, crystalline alumina or crystalline silica it is difficult to attach to a polygonal axis without breaking it.
  • the document EP 1705533 discloses an assembly of a workpiece on an axis and the document EP 0732635 a method of manufacturing a micromechanical part.
  • the object of the present invention is to overcome all or part of the disadvantages mentioned above by proposing a gear system comprising a fastening device to avoid the efforts of shear while being able to adapt to a cylindrical axis with circular section.
  • the invention relates to a gear system comprising a pinion and a toothed wheel mounted coaxially with respect to a pivoting axis, characterized in that it comprises a device for fastening between said pinion and said wheel in order to avoid the relative displacement of one with respect to the other.
  • the invention also relates to a timepiece characterized in that it comprises a gear system according to one of the preceding variants.
  • the invention relates to a generally annotated gear system 1. It comprises an axis 3, a pinion 5 and a toothed wheel 7.
  • the pinion 5 and the wheel 7 are intended to be mounted coaxially on the same axis 3.
  • Such a gear system 1 may, for example, be applied to an escape wheel or a transmission mobile.
  • the invention can be applied to other watchmaking or non-watchmaking organs.
  • the axis 3 is substantially cylindrical circular section, that is to say symmetrically ideal to be mounted between two bearings (not shown) in the usual manner as explained above.
  • the pinion 5 comprises a main body of cylindrical shape whose section of the inner diameter substantially corresponds to the outer diameter of the axis 3.
  • the pinion 5 comprises wings 9 extending radially from said main body in order to cooperate with another toothed member (not shown).
  • the pinion 5 has about twenty wings 9, however, according to the application of the gear system 1, the number may be lower or higher.
  • the wheel 7 comprises a serge 11, a hub 13 pierced with a polygonal or cylindrical pinhole 15 and four arms 17 connecting said hub and said serge.
  • the serge 11 has a peripheral toothing 19 extending radially from said serge to cooperate with another toothed member (not shown).
  • the number of arms 17 which connects the serge 11 and the hub 13 may be lower or higher depending on the application.
  • the hub 13 preferably comprises an attachment device 21 intended to prevent the relative displacement of the wheel 7 relative to the pinion 5 in order to reduce the shear forces.
  • the attachment device 21 mainly comprises a cavity 23 formed at the hub 13 and intended to cooperate with the lower part of the pinion 5 by partial overlap.
  • the cavity 23 is hollowed out in the hub 13.
  • the cavity 23 has a shape at least partially corresponding to the section at the bottom of the pinion 5, that is to say a ring comprising a toothing intended for receiving by nesting at least a portion of the wings 9 and the main body of the pinion 5 over part of its height. It is therefore understood that when the lower part of the pinion 5 is slid into the cavity 23, the assembly limits the angular deflections between the pinion 5 and the wheel 7 thus making it possible to avoid the shear forces.
  • the impression 23 has a shape exactly corresponding to the section of the pinion 5.
  • the footprint 23 could comprise fewer teeth than the wings 9 of the pinion 5 while still allowing to avoid the shear forces .
  • Such a footprint could for example consist of a toothing having half the teeth than the pinion 5 has wings 9.
  • the gear system 1 is of the composite type, that is to say that it is formed by at least two types of materials.
  • one of the members is, preferably, formed of a micro-machinable material and the others of metal materials.
  • a micro-machinable material is used in order to benefit from sub-micron fabrication accuracy.
  • Such a material may comprise crystalline silicon, crystalline alumina or crystalline silica.
  • the other organs are preferably metal materials, when they did not need to have more accurate dimensions than is possible with said metal materials.
  • the wheel 7 is preferably formed from a micro-machinable material while the axis 3 and the pinion 5 are made from a metallic material such as, for example, steel or brass.
  • a configuration may in particular be useful for an application of the exhaust wheel type to obtain a set of impulse teeth 19 but also a 23 very precise fingerprint. Indeed, as visible at the figure 7 the wheel 7 has an intermediate engraving depth for the impression 23 and a total engraving for the rest of the organ.
  • the fastening device 21 further comprises an adhesive material mounted between the cavity 23 and the pinion 5 in order to improve the fastening force.
  • a material may be, for example, a solder or an adhesive.
  • the bond using an adherent material is generally performing in traction but poor performance in shear. It is therefore understood that by the configuration of the fastening device 21, the fastening force thus benefits from the tensile advantages of the adhering material and the shearing advantages of the partial overlap by the impression 23.
  • the adhering material may be, for example, mounted between the bottom of the cavity 23 and the underside of the pinion 5.
  • the adhering material may just as well be mounted between the periphery of the wings 9 and the toothing of the cavity 23. last configuration is particularly interesting when the footprint 23 is not exactly corresponding to the section of the pinion 5 as explained above.
  • the manufacturing process of the multi-level micro-machining material member will now be explained using the Figures 1 to 6 .
  • the member made of micro-machinable material is a gear wheel 7.
  • the hub 13 is shown in section.
  • other cavities are made outlets to delimit the hub 13, the arms 17, the serge 11 and its toothing 19.
  • a substrate 31 of micro-machinable material such as, preferably, crystalline silicon, crystalline alumina or crystalline silica is provided.
  • This step may comprise a phase of mechanical and / or chemical grounding of the substrate 31 in order to adapt the thickness eT of the substrate 31 to that of the final member that is to say the wheel 7.
  • a first protective mask 33 is formed on the top of the substrate 31.
  • Such a step can be carried out by performing, for example, a selective oxidation on the surface of the substrate 31 in order to increase the oxide of silicon to form said mask to a predetermined height.
  • the mask 33 represents the pattern 32 of the cavity 23 to be etched on a portion e 2 of the thickness of the substrate 31.
  • a second protective mask 35 is structured in overlap with that made in the second step.
  • Such a step can be carried out by carrying out a photolithography of a photosensitive resin.
  • a photoresist is deposited on the substrate 31 and the protective mask 33.
  • the resin is selectively exposed with radiation through a partially opaque mask.
  • the selectively illuminated photosensitive resin is developed so as to leave only a protective mask 35, as visible in FIG. figure 3 which represents the pattern 34 of the pinhole 15 and the other opening cavities of the wheel 7 to be etched in the thickness of the substrate 31.
  • the second mask 35 by selective oxidation on the surface of the substrate 31 for the purpose of growing silicon oxide to form said mask to a predetermined height.
  • anisotropic etching is carried out on the substrate 31 according to the pattern 34 of the second protective mask 35.
  • the attack may be of the dry or wet type.
  • a method of the deep reactive ion etching type (better known by the abbreviation "DRIEā€ from the terms ā€œDeep Reactive Ion Etching") will be used.
  • DRIE deep reactive ion etching type
  • the attack makes it possible to begin the etching of the axis hole 15 but also of the other emerging cavities of the wheel 7.
  • the substrate 31 is etched according to the pattern 34 on a part e 1 of its thickness e T.
  • the second mask 35 is removed. Depending on the nature of the second mask 35, this may consist in respectively removing the structured resin or etching the silicon oxide layer until the pattern 32 is discovered.
  • a second anisotropic etching is carried out on the substrate 31 according to the pattern 32 of the first protection mask 33.
  • the etching can also be of the dry or wet type.
  • the second attack makes it possible to continue the etching of the axis hole 15 but also of the other opening cavities of the wheel 7 and to start the etching of the impression 23.
  • the substrate 31 is etched throughout its thickness and in the pattern 34 and on a part e 2 of its thickness according to the pattern 32.
  • the section of the pattern 34 of the second mask 35 is smaller than that of the pattern 32 of the first mask 33. This makes it possible to engrave the pattern 34 alone and then etch the patterns 34 and 32 together. In a seventh and last time, the finished wheel 7 is released from the substrate 31.
  • the pinion 5-pin 3 assembly is mounted on the watchmaking member 7 made according to the manufacturing method explained above, in the example a toothed wheel, in order to form the composite gear system 1
  • the pinion 5-pin 3 assembly is brought closer to the member 7 so that the lower end of the pin 3 is opposite the pin hole 15 of the pin. wheel 7 as shown in the figure 7 .
  • the axis 3 slides through the pinhole 15 to friction as shown in FIG. figure 8 until, in a third phase, the bottom of the pinion 5 engages in the cavity 23 hollowed out in the hub 13 of the wheel 7.
  • an adhesive material can be used to improve the fastening force between the pinion 5 and the wheel 7.
  • two additional phases could be realized.
  • An intermediate phase between the second and third phases of the final assembly process could it consists in depositing said material in the bottom of the impression 23.
  • Such a material could be a solder and / or an adhesive such as a polymer adhesive.
  • a final phase could then follow the third phase and would activate the adherent material such as, for example, by melting said solder and / or by polymerizing said adhesive.
  • the first could consist in depositing said material between the teeth of the cavity 23 and the wings 9 of the pinion 5.
  • a material could also be a solder and / or an adhesive such as a polymer adhesive.
  • the second final phase could then enable the adhering material to be activated, for example by melting said solder and / or by polymerizing said adhesive.
  • a composite gear system 1 of the sprocket gear type that can be integrated in a timepiece and that comprises a wheel 7 made of micro-machinable material whose serge 11 has a toothing 19 and whose hub 13 is bonded, advantageously , to the axis 3 - pinion 5 assembly by means of the fastening device 21.
  • the recess 23 may be at least partially projecting from the hub 13. In fact, this would allow the increase of the contact zone between the axis 3 and the hub 13, which would allow the improvement of the guiding of the wheel 7 with respect to the axis 3. Said contact zone could even correspond to the total height of the wheel 7, the footprint 23 would then be entirely projecting from the hub 13 of the wheel 7 instead of being at least partially hollow.

Description

Domaine de l'inventionField of the invention

L'invention se rapporte Ć  un systĆØme d'engrenage composite, par exemple, silicium - mĆ©tal pour une piĆØce d'horlogerie et, plus particuliĆØrement un tel systĆØme comportant un dispositif d'attache apte Ć  Ć©viter les efforts de cisaillement.The invention relates to a composite gear system, for example silicon - metal for a timepiece and more particularly to such a system comprising a fastening device able to avoid shear forces.

ArriĆØre plan de l'inventionBackground of the invention

Dans le but d'Ć©viter les efforts de cisaillement, il est connu dans le domaine de l'horlogerie d'utiliser des axes dont la section est polygonale, c'est-Ć -dire non circulaire afin d'entraĆ®ner en rotation une piĆØce dont le trou d'axe comporte une forme correspondante Ć  ladite section polygonale. Cependant, une telle configuration, notamment dans le cas d'un rouage, induit une dissymĆ©trie de l'axe nĆ©faste Ć  l'isochronisme du mouvement horloger et oblige les autres rouages, solidaires du mĆŖme axe, Ć  adopter des trous d'axe de mĆŖme forme.In order to avoid shearing forces, it is known in the field of horology to use axes whose section is polygonal, that is to say non-circular to rotate a part of which the axis hole has a shape corresponding to said polygonal section. However, such a configuration, especially in the case of a cog, induces an asymmetry of the axis harmful to the isochronism of the watch movement and forces the other cogs, integral with the same axis, to adopt pinholes of the same form.

De plus, dans le cas d'un organe horloger composite, c'est-Ć -dire comprenant deux types de matĆ©riaux, comme un systĆØme d'engrenage du type roue dentĆ©e - pignon si l'un des matĆ©riaux comporte une zone plastique trĆØs restreinte, comme du silicium cristallin, de l'alumine cristalline ou de la silice cristalline, il est difficile de pouvoir l'attacher sur un axe polygonal sans le briser.Moreover, in the case of a composite watchmaking organ, that is to say comprising two types of materials, such as a sprocket gear type gear system if one of the materials comprises a very restricted plastic zone. Like crystalline silicon, crystalline alumina or crystalline silica, it is difficult to attach to a polygonal axis without breaking it.

Le document EP 1705533 divulgue un assemblage d'une piece sur un axe et le document EP 0732635 un procĆ©dĆ© de fabrication d'une piĆØce de micromĆ©canique.The document EP 1705533 discloses an assembly of a workpiece on an axis and the document EP 0732635 a method of manufacturing a micromechanical part.

RƩsumƩ de l'inventionSummary of the invention

Le but de la prĆ©sente invention est de pallier tout ou partie les inconvĆ©nients citĆ©s prĆ©cĆ©demment en proposant un systĆØme d'engrenage comportant un dispositif d'attache permettant d'Ć©viter les efforts de cisaillement tout en pouvant s'adapter Ć  un axe cylindrique Ć  section circulaire.The object of the present invention is to overcome all or part of the disadvantages mentioned above by proposing a gear system comprising a fastening device to avoid the efforts of shear while being able to adapt to a cylindrical axis with circular section.

A cet effet, l'invention se rapporte Ć  un systĆØme d'engrenage comprenant un pignon et une roue dentĆ©e montĆ©s coaxialement par rapport Ć  un axe pivotant caractĆ©risĆ© en ce qu'il comporte un dispositif d'attache entre ledit pignon et ladite roue afin d'Ć©viter le dĆ©placement relatif de l'un par rapport Ć  l'autre.For this purpose, the invention relates to a gear system comprising a pinion and a toothed wheel mounted coaxially with respect to a pivoting axis, characterized in that it comprises a device for fastening between said pinion and said wheel in order to avoid the relative displacement of one with respect to the other.

ConformƩment Ơ d'autres caractƩristiques avantageuses de l'invention :

  • le dispositif d'attache comporte une empreinte de forme au moins partiellement correspondante Ć  la section dudit pignon qui est rĆ©alisĆ©e sur le moyeu de ladite roue afin de les rendre solidaires en rotation ;
  • l'empreinte est rĆ©alisĆ©e dans une partie de l'Ć©paisseur dudit moyeu afin de bloquer tout dĆ©placement relatif par enveloppement partiel du pignon ;
  • l'axe est sensiblement cylindrique Ć  section circulaire ;
  • l'axe et le pignon sont rĆ©alisĆ©s Ć  partir d'un matĆ©riau mĆ©tallique ;
  • le pignon est venu de matiĆØre avec l'axe ;
  • la roue dentĆ©e est rĆ©alisĆ©e Ć  partir d'un matĆ©riau micro-usinable ;
  • le matĆ©riau micro-usinable est choisi parmi le groupe comportant du silicium cristallin, de l'alumine cristalline et de la silice cristalline ;
  • le dispositif d'attache comporte en outre un matĆ©riau adhĆ©rant montĆ© entre la roue et le pignon afin d'amĆ©liorer la force d'attache dudit dispositif.
According to other advantageous features of the invention:
  • the fastening device comprises a shape at least at least partially corresponding to the section of said pinion which is formed on the hub of said wheel to make them integral in rotation;
  • the impression is made in a portion of the thickness of said hub to block any relative displacement by partial wrapping of the pinion;
  • the axis is substantially cylindrical with a circular section;
  • the axis and the pinion are made from a metallic material;
  • the pinion came from material with the axis;
  • the toothed wheel is made from a micro-machinable material;
  • the micro-machinable material is selected from the group consisting of crystalline silicon, crystalline alumina and crystalline silica;
  • the attachment device further comprises an adhesive material mounted between the wheel and the pinion to improve the attachment force of said device.

L'invention se rapporte Ć©galement Ć  une piĆØce d'horlogerie caractĆ©risĆ©e en ce qu'elle comporte un systĆØme d'engrenage conforme Ć  l'une des variantes prĆ©cĆ©dentes.The invention also relates to a timepiece characterized in that it comprises a gear system according to one of the preceding variants.

L'invention se rapporte enfin Ơ un procƩdƩ de fabrication d'un organe horloger d'engrenage en matƩriau micro-usinable Ơ plusieurs niveaux comportant un dispositif d'attache fabriquƩ selon les Ʃtapes suivantes :

  • a) se munir d'un substrat en matĆ©riau micro-usinable ;
  • b) structurer sur la surface dudit substrat un masque comportant un premier motif ;
caractƩrisƩ en ce qu'il comporte les Ʃtapes suivantes :
  • c) structurer sur la surface dudit substrat et du premier masque, un deuxiĆØme masque comportant un deuxiĆØme motif plus petit que le premier motif dudit premier masque ;
  • d) rĆ©aliser une attaque anisotropique afin de graver selon le deuxiĆØme motif sur une premiĆØre Ć©paisseur du substrat ;
  • e) retirer le deuxiĆØme masque ;
  • f) rĆ©aliser une deuxiĆØme attaque anisotropique afin de continuer la gravure selon le deuxiĆØme motif et commencer la gravure selon le premier motif sur une deuxiĆØme Ć©paisseur du substrat ;
  • g) retirer le premier masque ;
  • h) libĆ©rer l'organe horloger du substrat.
The invention finally relates to a method of manufacturing a gear watchmaking member made of multilevelable material having several levels comprising a fastening device manufactured according to the following steps:
  • a) providing a substrate of micro-machinable material;
  • b) structuring on the surface of said substrate a mask comprising a first pattern;
characterized in that it comprises the following steps:
  • c) structuring on the surface of said substrate and the first mask, a second mask having a second pattern smaller than the first pattern of said first mask;
  • d) performing an anisotropic etching to etch in the second pattern on a first thickness of the substrate;
  • e) removing the second mask;
  • f) performing a second anisotropic etch to continue etching in the second pattern and start etching in the first pattern on a second thickness of the substrate;
  • g) removing the first mask;
  • h) releasing the watch member from the substrate.

ConformƩment Ơ d'autres caractƩristiques avantageuses de l'invention :

  • le deuxiĆØme motif est gravĆ© dans toute l'Ć©paisseur du substrat ;
  • le deuxiĆØme motif est en forme de roue dentĆ©e dont le moyeu comporte un trou d'axe ;
  • le premier motif est en forme d'anneau dentĆ© et est gravĆ© partiellement dans l'Ć©paisseur du substrat ;
  • le premier masque est rĆ©alisĆ© Ć  partir d'oxyde de silicium et, le deuxiĆØme masque, Ć  partir d'une rĆ©sine photosensible ;
  • plusieurs organes sont fabriquĆ©s sur le mĆŖme substrat.
According to other advantageous features of the invention:
  • the second pattern is etched throughout the thickness of the substrate;
  • the second pattern is in the form of a toothed wheel whose hub comprises an axis hole;
  • the first pattern is in the form of a toothed ring and is partially etched in the thickness of the substrate;
  • the first mask is made from silicon oxide and the second mask from a photosensitive resin;
  • several organs are manufactured on the same substrate.

Description sommaire des dessinsBrief description of the drawings

D'autres particularitĆ©s et avantages ressortiront clairement de la description qui en est faite ci-aprĆØs, Ć  titre indicatif et nullement limitatif, en rĆ©fĆ©rence aux dessins annexĆ©s, dans lesquels :

  • les figures 1 Ć  6 sont des reprĆ©sentations d'Ć©tapes successives de fabrication d'un organe horloger selon l'invention ;
  • les figures 7 Ć  9 sont des reprĆ©sentations d'Ć©tapes successives de montage final d'un systĆØme d'engrenage selon l'invention.
Other particularities and advantages will emerge clearly from the description which is given hereinafter, by way of indication and in no way limiting, with reference to the appended drawings, in which:
  • the Figures 1 to 6 are representations of successive steps of manufacture of a watchmaking member according to the invention;
  • the Figures 7 to 9 are representations of successive stages of final assembly of a gear system according to the invention.

Description dƩtaillƩe des modes de rƩalisation prƩfƩrƩsDetailed Description of the Preferred Embodiments

Comme illustrĆ© aux figures 7 Ć  9, l'invention se rapporte Ć  un systĆØme d'engrenage gĆ©nĆ©ralement annotĆ© 1. Il comporte un axe 3, un pignon 5 et une roue dentĆ©e 7. Dans l'exemple illustrĆ© aux figures 7 Ć  9, le pignon 5 et la roue 7 sont destinĆ©s Ć  ĆŖtre montĆ©s coaxialement sur le mĆŖme axe 3. Un tel systĆØme d'engrenage 1 peut, par exemple, ĆŖtre appliquĆ© pour une roue d'Ć©chappement ou un mobile de transmission. Bien entendu, l'invention peut ĆŖtre appliquĆ©e Ć  d'autres organes horlogers ou non horlogers.As illustrated in Figures 7 to 9 , the invention relates to a generally annotated gear system 1. It comprises an axis 3, a pinion 5 and a toothed wheel 7. In the example illustrated in FIGS. Figures 7 to 9 , the pinion 5 and the wheel 7 are intended to be mounted coaxially on the same axis 3. Such a gear system 1 may, for example, be applied to an escape wheel or a transmission mobile. Of course, the invention can be applied to other watchmaking or non-watchmaking organs.

Comme illustrĆ© aux figures 7 Ć  9, l'axe 3 est sensiblement cylindrique Ć  section circulaire, c'est-Ć -dire symĆ©triquement idĆ©al afin d'ĆŖtre montĆ© entre deux paliers (non reprĆ©sentĆ©s) de maniĆØre habituelle comme expliquĆ© ci-dessus.As illustrated in Figures 7 to 9 , the axis 3 is substantially cylindrical circular section, that is to say symmetrically ideal to be mounted between two bearings (not shown) in the usual manner as explained above.

Le pignon 5 comporte un corps principal de forme cylindrique dont la section du diamĆØtre intĆ©rieur correspond sensiblement au diamĆØtre extĆ©rieur de l'axe 3. Le pignon 5 comporte des ailes 9 s'Ć©tendant radialement dudit corps principal afin de coopĆ©rer avec un autre organe dentĆ© (non reprĆ©sentĆ©). Dans l'exemple illustrĆ© aux figures 7 Ć  9, le pignon 5 comporte une vingtaine d'ailes 9, cependant, suivant l'application du systĆØme d'engrenage 1, le nombre peut ĆŖtre infĆ©rieur ou supĆ©rieur.The pinion 5 comprises a main body of cylindrical shape whose section of the inner diameter substantially corresponds to the outer diameter of the axis 3. The pinion 5 comprises wings 9 extending radially from said main body in order to cooperate with another toothed member ( not shown). In the example shown in Figures 7 to 9 , the pinion 5 has about twenty wings 9, however, according to the application of the gear system 1, the number may be lower or higher.

La roue 7 comporte une serge 11, un moyeu 13 percĆ© d'un trou d'axe 15 polygonal ou cylindrique et quatre bras 17 reliant ledit moyeu et ladite serge. Comme illustrĆ© aux figures 7 Ć  9, la serge 11 comporte une denture pĆ©riphĆ©rique 19 s'Ć©tendant radialement de ladite serge afin de coopĆ©rer avec un autre organe dentĆ© (non reprĆ©sentĆ©). Bien entendu, le nombre de bras 17 qui relie la serge 11 et le moyeu 13 peut ĆŖtre infĆ©rieur ou supĆ©rieur suivant l'application.The wheel 7 comprises a serge 11, a hub 13 pierced with a polygonal or cylindrical pinhole 15 and four arms 17 connecting said hub and said serge. As illustrated in Figures 7 to 9 , the serge 11 has a peripheral toothing 19 extending radially from said serge to cooperate with another toothed member (not shown). Of course, the number of arms 17 which connects the serge 11 and the hub 13 may be lower or higher depending on the application.

Selon l'invention, le moyeu 13 comporte, prƩfƩrentiellement, un dispositif d'attache 21 destinƩ Ơ Ʃviter le dƩplacement relatif de la roue 7 par rapport au pignon 5 dans le but de rƩduire les efforts en cisaillement. Selon l'invention, le dispositif d'attache 21 comporte principalement une empreinte 23 formƩe au niveau du moyeu 13 et destinƩe Ơ coopƩrer avec la partie basse du pignon 5 par recouvrement partiel.According to the invention, the hub 13 preferably comprises an attachment device 21 intended to prevent the relative displacement of the wheel 7 relative to the pinion 5 in order to reduce the shear forces. According to the invention, the attachment device 21 mainly comprises a cavity 23 formed at the hub 13 and intended to cooperate with the lower part of the pinion 5 by partial overlap.

PrƩfƩrentiellement, comme illustrƩ aux figures 7 Ơ 9, l'empreinte 23 est creusƩe dans le moyeu 13. De plus, l'empreinte 23 comporte une forme au moins partiellement correspondante Ơ la section Ơ la partie basse du pignon 5 c'est-Ơ-dire un anneau comportant une denture destinƩe Ơ recevoir par emboƮtement au moins une partie des ailes 9 et le corps principal du pignon 5 sur une partie de sa hauteur. On comprend donc que, lorsque la partie basse du pignon 5 est glissƩe dans l'empreinte 23, l'assemblage limite les dƩbattements angulaires entre le pignon 5 et la roue 7 permettant en consƩquence d'Ʃviter les efforts de cisaillement.Preferably, as illustrated in Figures 7 to 9 , the cavity 23 is hollowed out in the hub 13. In addition, the cavity 23 has a shape at least partially corresponding to the section at the bottom of the pinion 5, that is to say a ring comprising a toothing intended for receiving by nesting at least a portion of the wings 9 and the main body of the pinion 5 over part of its height. It is therefore understood that when the lower part of the pinion 5 is slid into the cavity 23, the assembly limits the angular deflections between the pinion 5 and the wheel 7 thus making it possible to avoid the shear forces.

Dans l'exemple illustrƩ aux figures 7 Ơ 9, l'empreinte 23 comporte une forme exactement correspondante Ơ la section du pignon 5. Cependant, on comprend que l'empreinte 23 pourrait comprendre moins de dents que d'ailes 9 du pignon 5 tout en permettant toujours d'Ʃviter les efforts de cisaillement. Une telle empreinte pourrait par exemple consister en une denture comportant deux fois moins de dents que le pignon 5 ne comporte d'ailes 9.In the example shown in Figures 7 to 9 , the impression 23 has a shape exactly corresponding to the section of the pinion 5. However, it is understood that the footprint 23 could comprise fewer teeth than the wings 9 of the pinion 5 while still allowing to avoid the shear forces . Such a footprint could for example consist of a toothing having half the teeth than the pinion 5 has wings 9.

PrĆ©fĆ©rentiellement, le systĆØme d'engrenage 1 est du type composite, c'est-Ć -dire qu'il est formĆ© par au moins deux types de matĆ©riaux. Ainsi, un des organes est, de maniĆØre prĆ©fĆ©rĆ©e, formĆ© en un matĆ©riau micro-usinable et les autres en matĆ©riaux mĆ©talliques. Selon l'invention, on utilise un matĆ©riau micro-usinable afin de bĆ©nĆ©ficier d'une prĆ©cision de fabrication infĆ©rieure au micron. Un tel matĆ©riau peut comporter du silicium cristallin, de l'alumine cristalline ou de la silice cristalline. Les autres organes sont prĆ©fĆ©rentiellement en matĆ©riaux mĆ©talliques, lorsqu'ils n'ont pas nĆ©cessitĆ© Ć  possĆ©der des cotes plus prĆ©cises que ce qui est possible avec lesdits matĆ©riaux mĆ©talliques.Preferably, the gear system 1 is of the composite type, that is to say that it is formed by at least two types of materials. Thus, one of the members is, preferably, formed of a micro-machinable material and the others of metal materials. According to the invention, a micro-machinable material is used in order to benefit from sub-micron fabrication accuracy. Such a material may comprise crystalline silicon, crystalline alumina or crystalline silica. The other organs are preferably metal materials, when they did not need to have more accurate dimensions than is possible with said metal materials.

Selon l'invention, la roue 7 est, de maniĆØre prĆ©fĆ©rĆ©e, formĆ©e Ć  partir d'un matĆ©riau micro-usinable alors que l'axe 3 et le pignon 5 sont rĆ©alisĆ©s Ć  partir d'un matĆ©riau mĆ©tallique comme, par exemple, de l'acier ou du laiton. Une telle configuration peut notamment ĆŖtre utile pour une application du type roue d'Ć©chappement afin d'obtenir une denture d'impulsions 19 mais Ć©galement une empreinte 23 trĆØs prĆ©cises. En effet, comme visible Ć  la figure 7, la roue 7 possĆØde une profondeur intermĆ©diaire de gravure pour l'empreinte 23 et une gravure totale pour le reste de l'organe.According to the invention, the wheel 7 is preferably formed from a micro-machinable material while the axis 3 and the pinion 5 are made from a metallic material such as, for example, steel or brass. Such a configuration may in particular be useful for an application of the exhaust wheel type to obtain a set of impulse teeth 19 but also a 23 very precise fingerprint. Indeed, as visible at the figure 7 the wheel 7 has an intermediate engraving depth for the impression 23 and a total engraving for the rest of the organ.

Selon une variante de l'invention, le dispositif d'attache 21 comporte en outre un matĆ©riau adhĆ©rant montĆ© entre l'empreinte 23 et le pignon 5 afin d'en amĆ©liorer la force d'attache. Un tel matĆ©riau peut ĆŖtre, par exemple, une brasure ou un adhĆ©sif. En effet, la liaison Ć  l'aide d'un matĆ©riau adhĆ©rant est gĆ©nĆ©ralement performante en traction mais peu performante en cisaillement. On comprend donc que par la configuration du dispositif d'attache 21, la force d'attache bĆ©nĆ©ficie ainsi desdits avantages en traction du matĆ©riau adhĆ©rant et des avantages en cisaillement du recouvrement partiel par l'empreinte 23.According to a variant of the invention, the fastening device 21 further comprises an adhesive material mounted between the cavity 23 and the pinion 5 in order to improve the fastening force. Such a material may be, for example, a solder or an adhesive. Indeed, the bond using an adherent material is generally performing in traction but poor performance in shear. It is therefore understood that by the configuration of the fastening device 21, the fastening force thus benefits from the tensile advantages of the adhering material and the shearing advantages of the partial overlap by the impression 23.

Le matĆ©riau adhĆ©rant peut ĆŖtre, par exemple, montĆ© entre le fond de l'empreinte 23 et le dessous du pignon 5. Le matĆ©riau adhĆ©rant peut tout aussi bien ĆŖtre montĆ© entre la pĆ©riphĆ©rie des ailes 9 et la denture de l'empreinte 23. Cette derniĆØre configuration est particuliĆØrement intĆ©ressante quand l'empreinte 23 n'est pas de forme exactement correspondante Ć  la section du pignon 5 comme expliquĆ© ci-dessus.The adhering material may be, for example, mounted between the bottom of the cavity 23 and the underside of the pinion 5. The adhering material may just as well be mounted between the periphery of the wings 9 and the toothing of the cavity 23. last configuration is particularly interesting when the footprint 23 is not exactly corresponding to the section of the pinion 5 as explained above.

Le procĆ©dĆ© de fabrication de l'organe en matĆ©riau micro-usinable Ć  plusieurs niveaux va maintenant ĆŖtre expliquĆ© Ć  l'aide des figures 1 Ć  6. PrĆ©fĆ©rentiellement, comme expliquĆ© ci-dessus, l'organe en matĆ©riau micro-usinable est une roue dentĆ©e 7. Afin de simplifier lesdites figures et se focaliser sur l'explication de la gravure Ć  plusieurs niveaux, seule une partie du moyeu 13 est reprĆ©sentĆ©e en coupe. Bien entendu, en plus du trou d'axe 15 gravĆ© dĆ©bouchant, d'autres cavitĆ©s sont rĆ©alisĆ©es dĆ©bouchantes afin de dĆ©limiter le moyeu 13, les bras 17, la serge 11 ainsi que sa denture 19.The manufacturing process of the multi-level micro-machining material member will now be explained using the Figures 1 to 6 . Preferably, as explained above, the member made of micro-machinable material is a gear wheel 7. In order to simplify said figures and focus on the explanation of the multi-level engraving, only a part of the hub 13 is shown in section. Of course, in addition to the etched pinhole opening, other cavities are made outlets to delimit the hub 13, the arms 17, the serge 11 and its toothing 19.

Dans un premier temps, comme illustrƩ Ơ la figure 1, on se munit d'un substrat 31 en matƩriau micro-usinable tel que, prƩfƩrentiellement, du silicium cristallin, de l'alumine cristalline ou de la silice cristalline. Cette Ʃtape peut comporter une phase de rodage mƩcanique et/ou chimique du substrat 31 afin d'adapter l'Ʃpaisseur eT du substrat 31 Ơ celle de l'organe final c'est-Ơ-dire la roue 7.At first, as illustrated in figure 1 a substrate 31 of micro-machinable material such as, preferably, crystalline silicon, crystalline alumina or crystalline silica is provided. This step may comprise a phase of mechanical and / or chemical grounding of the substrate 31 in order to adapt the thickness eT of the substrate 31 to that of the final member that is to say the wheel 7.

Dans un deuxiĆØme temps, on structure un premier masque de protection 33 sur le dessus du substrat 31. Une telle Ć©tape peut ĆŖtre rĆ©alisĆ©e en effectuant par exemple une oxydation sĆ©lective Ć  la surface du substrat 31 dans le but de faire croĆ®tre de l'oxyde de silicium afin de former ledit masque jusqu'Ć  une hauteur prĆ©dĆ©terminĆ©e. Comme visible Ć  la figure 2, le masque 33 reprĆ©sente le motif 32 de l'empreinte 23 Ć  graver sur une partie e2 de l'Ć©paisseur du substrat 31.In a second step, a first protective mask 33 is formed on the top of the substrate 31. Such a step can be carried out by performing, for example, a selective oxidation on the surface of the substrate 31 in order to increase the oxide of silicon to form said mask to a predetermined height. As visible at figure 2 , the mask 33 represents the pattern 32 of the cavity 23 to be etched on a portion e 2 of the thickness of the substrate 31.

Dans un troisiĆØme temps, on structure un deuxiĆØme masque de protection 35 en recouvrement de celui 33 rĆ©alisĆ© dans le deuxiĆØme temps. Une telle Ć©tape peut ĆŖtre rĆ©alisĆ©e en effectuant une photolithographie d'une rĆ©sine photosensible. Ainsi, dans une premiĆØre phase, on dĆ©pose sur le substrat 31 et le masque de protection 33, une rĆ©sine photosensible. Puis dans une deuxiĆØme phase, on expose sĆ©lectivement la rĆ©sine Ć  l'aide d'un rayonnement au travers d'un masque partiellement opaque. Finalement, on dĆ©veloppe la rĆ©sine photosensible sĆ©lectivement illuminĆ©e afin de ne laisser qu'un masque de protection 35, comme visible Ć  la figure 3, qui reprĆ©sente le motif 34 du trou d'axe 15 et des autres cavitĆ©s dĆ©bouchantes de la roue 7 Ć  graver dans l'Ć©paisseur du substrat 31.In a third step, a second protective mask 35 is structured in overlap with that made in the second step. Such a step can be carried out by carrying out a photolithography of a photosensitive resin. Thus, in a first phase, a photoresist is deposited on the substrate 31 and the protective mask 33. Then in a second phase, the resin is selectively exposed with radiation through a partially opaque mask. Finally, the selectively illuminated photosensitive resin is developed so as to leave only a protective mask 35, as visible in FIG. figure 3 which represents the pattern 34 of the pinhole 15 and the other opening cavities of the wheel 7 to be etched in the thickness of the substrate 31.

Selon une variante, on peut Ć©galement rĆ©aliser le deuxiĆØme masque 35 par une oxydation sĆ©lective Ć  la surface du substrat 31 dans le but de faire croĆ®tre de l'oxyde de silicium afin de former ledit masque jusqu'Ć  une hauteur prĆ©dĆ©terminĆ©e.According to one variant, it is also possible to produce the second mask 35 by selective oxidation on the surface of the substrate 31 for the purpose of growing silicon oxide to form said mask to a predetermined height.

Dans un quatriĆØme temps, comme illustrĆ© Ć  la figure 4, on effectue une attaque anisotropique sur le substrat 31 selon le motif 34 du second masque de protection 35. L'attaque peut ĆŖtre du type sec ou humide. De maniĆØre prĆ©fĆ©rĆ©e, on utilisera un procĆ©dĆ© du type gravage ionique rĆ©actif profond (plus connu sous l'abrĆ©viation anglaise Ā« DRIE Ā» venant des termes Ā« Deep Reactive Ion Etching Ā»). Comme expliquĆ© ci-dessus, l'attaque permet de commencer la gravure du trou d'axe 15 mais Ć©galement des autres cavitĆ©s dĆ©bouchantes de la roue 7. Comme visible Ć  la figure 4, Ć  la fin de l'attaque, le substrat 31 est gravĆ© selon le motif 34 sur une partie e1 de son Ć©paisseur eT.In a fourth step, as illustrated in figure 4 anisotropic etching is carried out on the substrate 31 according to the pattern 34 of the second protective mask 35. The attack may be of the dry or wet type. Preferably, a method of the deep reactive ion etching type (better known by the abbreviation "DRIE" from the terms "Deep Reactive Ion Etching") will be used. As explained above, the attack makes it possible to begin the etching of the axis hole 15 but also of the other emerging cavities of the wheel 7. As can be seen in FIG. figure 4 at the end of the attack, the substrate 31 is etched according to the pattern 34 on a part e 1 of its thickness e T.

Dans un cinquiĆØme temps, on retire le deuxiĆØme masque 35. Suivant la nature du deuxiĆØme masque 35, cela peut consister Ć  respectivement retirer la rĆ©sine structurĆ©e ou attaquer la couche d'oxyde de silicium jusqu'Ć  dĆ©couvrir le motif 32.In a fifth step, the second mask 35 is removed. Depending on the nature of the second mask 35, this may consist in respectively removing the structured resin or etching the silicon oxide layer until the pattern 32 is discovered.

Dans un sixiĆØme temps, on effectue une deuxiĆØme attaque anisotropique sur le substrat 31 selon le motif 32 du premier masque de protection 33. L'attaque peut Ć©galement ĆŖtre du type sec ou humide. De maniĆØre similaire Ć  la quatriĆØme Ć©tape, la deuxiĆØme attaque permet de continuer la gravure du trou d'axe 15 mais Ć©galement des autres cavitĆ©s dĆ©bouchantes de la roue 7 et de commencer la gravure de l'empreinte 23. Comme visible Ć  la figure 5, Ć  la fin de la deuxiĆØme attaque, le substrat 31 est gravĆ© sur toute son Ć©paisseur eT selon le motif 34 et sur une partie e2 de son Ć©paisseur selon le motif 32.In the sixth step, a second anisotropic etching is carried out on the substrate 31 according to the pattern 32 of the first protection mask 33. The etching can also be of the dry or wet type. In a similar manner to the fourth step, the second attack makes it possible to continue the etching of the axis hole 15 but also of the other opening cavities of the wheel 7 and to start the etching of the impression 23. As can be seen in FIG. figure 5 at the end of the second attack, the substrate 31 is etched throughout its thickness and in the pattern 34 and on a part e 2 of its thickness according to the pattern 32.

PrĆ©fĆ©rentiellement selon l'invention, au niveau du moyeu 13 comme illustrĆ© Ć  la figure 3 ou 4, la section du motif 34 du deuxiĆØme masque 35 est plus petite que celle du motif 32 du premier masque 33. Cela permet en effet de graver le motif 34 seul puis de graver ensuite les motifs 34 et 32 ensemble. Dans un septiĆØme et dernier temps, la roue finie 7 est libĆ©rĆ©e du substrat 31.Preferably according to the invention, at the hub 13 as illustrated in FIG. figure 3 or 4 , the section of the pattern 34 of the second mask 35 is smaller than that of the pattern 32 of the first mask 33. This makes it possible to engrave the pattern 34 alone and then etch the patterns 34 and 32 together. In a seventh and last time, the finished wheel 7 is released from the substrate 31.

On comprend Ć  la lecture du procĆ©dĆ© de fabrication de l'organe horloger 7 qu'en fonction de l'Ć©paisseur totale eT du substrat 31 et de la profondeur e2 de l'empreinte 23, on en dĆ©duit la profondeur minimale e1 de gravure qui doit ĆŖtre rĆ©alisĆ©e lors du quatriĆØme temps afin que le trou d'axe 15 et les autres cavitĆ©s dĆ©limitant le moyeu 11, les bras 17, la serge 11 ainsi que sa denture 19 soient gravĆ©s dans toute l'Ć©paisseur du substrat 31. On rĆ©alise Ć©galement qu'avantageusement le procĆ©dĆ© de fabrication autorise la rĆ©alisation sur un mĆŖme substrat 31 de plusieurs organes 7.It is understood by reading the manufacturing process of the watchmaker body 7 that, as a function of the total thickness e T of the substrate 31 and the depth e 2 of the cavity 23, the minimum depth e 1 of etching to be performed in the fourth time so that the hole 15 and the other cavities defining the hub 11, the arms 17, the serge 11 and its toothing 19 are etched throughout the thickness of the substrate 31. also realizes that advantageously the manufacturing method authorizes the production on the same substrate 31 of several members 7.

Le procĆ©dĆ© de montage final va maintenant ĆŖtre expliquĆ© en relation avec les figures 7 Ć  9. Dans un premier temps, il est nĆ©cessaire de monter de maniĆØre fixe le pignon 5 sur l'axe 3. PrĆ©fĆ©rentiellement selon l'invention, dans le but de simplifier ledit procĆ©dĆ© de montage mais Ć©galement de limiter les glissements entre le pignon 5 et l'axe 3, le premier est venu de matiĆØre avec le dernier afin de former une piĆØce unique. Bien entendu, d'autres types de montage sont possibles comme, par exemple, le chassage, le collage ou le brasage.The final assembly process will now be explained in relation to the Figures 7 to 9 . In a first step, it is necessary to mount the pinion 5 axially on the axis 3. Preferably according to the invention, in order to simplify said mounting method but also to limit the sliding between the pinion 5 and the pinion 5. Axis 3, the first came from matter with the last one to form a single piece. Of course, other types of mounting are possible such as, for example, driving, gluing or brazing.

Dans un deuxiĆØme temps, l'ensemble pignon 5 - axe 3 est montĆ© sur l'organe horloger 7 rĆ©alisĆ© selon le procĆ©dĆ© de fabrication expliquĆ© ci-dessus, dans l'exemple une roue dentĆ©e, afin de former le systĆØme d'engrenage composite 1. Dans une premiĆØre phase, l'ensemble pignon 5 - axe 3 est rapprochĆ© de l'organe 7 de maniĆØre Ć  ce que l'extrĆ©mitĆ© basse de l'axe 3 fasse vis-Ć -vis avec le trou d'axe 15 de la roue 7 comme illustrĆ© Ć  la figure 7. Dans une deuxiĆØme phase, en continuant le rapprochement, l'axe 3 glisse Ć  travers le trou d'axe 15 Ć  frottement gras comme illustrĆ© Ć  la figure 8 jusqu'Ć  ce que, dans une troisiĆØme phase, le bas du pignon 5 s'emboĆ®te dans l'empreinte 23 creusĆ©e dans le moyeu 13 de la roue 7.In a second step, the pinion 5-pin 3 assembly is mounted on the watchmaking member 7 made according to the manufacturing method explained above, in the example a toothed wheel, in order to form the composite gear system 1 In a first phase, the pinion 5-pin 3 assembly is brought closer to the member 7 so that the lower end of the pin 3 is opposite the pin hole 15 of the pin. wheel 7 as shown in the figure 7 . In a second phase, continuing the approach, the axis 3 slides through the pinhole 15 to friction as shown in FIG. figure 8 until, in a third phase, the bottom of the pinion 5 engages in the cavity 23 hollowed out in the hub 13 of the wheel 7.

Comme expliquĆ© ci-dessus, selon une variante de l'invention, un matĆ©riau adhĆ©rant peut ĆŖtre utilisĆ© afin d'amĆ©liorer la force d'attache entre le pignon 5 et la roue 7. Dans une telle variante, deux phases supplĆ©mentaires pourraient ĆŖtre rĆ©alisĆ©es. Une phase intermĆ©diaire entre les deuxiĆØme et troisiĆØme phases du procĆ©dĆ© de montage final pourrait consister Ć  dĆ©poser ledit matĆ©riau dans le fond de l'empreinte 23. Un tel matĆ©riau pourrait ĆŖtre une brasure et/ou un adhĆ©sif telle qu'une colle polymĆØre. Une phase finale pourrait alors suivre la troisiĆØme phase et permettrait d'activer le matĆ©riau adhĆ©rant comme, par exemple, en rĆ©alisant la fusion de ladite brasure et/ou en polymĆ©risant ladite colle.As explained above, according to a variant of the invention, an adhesive material can be used to improve the fastening force between the pinion 5 and the wheel 7. In such a variant, two additional phases could be realized. An intermediate phase between the second and third phases of the final assembly process could it consists in depositing said material in the bottom of the impression 23. Such a material could be a solder and / or an adhesive such as a polymer adhesive. A final phase could then follow the third phase and would activate the adherent material such as, for example, by melting said solder and / or by polymerizing said adhesive.

Il peut Ć©galement ĆŖtre envisagĆ© deux phases finales. La premiĆØre pourrait consister Ć  dĆ©poser ledit matĆ©riau entre les dentures de l'empreinte 23 et les ailes 9 du pignon 5. Un tel matĆ©riau pourrait Ć©galement ĆŖtre une brasure et/ou un adhĆ©sif telle qu'une colle polymĆØre. La deuxiĆØme phase finale pourrait alors permettre d'activer le matĆ©riau adhĆ©rant comme, par exemple, en rĆ©alisant la fusion de ladite brasure et/ou en polymĆ©risant ladite colle. Ce mode de rĆ©alisation est particuliĆØrement intĆ©ressant quand l'empreinte 23 n'est pas de forme exactement correspondante Ć  la section du pignon 5 comme expliquĆ© ci-dessus.It can also be considered two final phases. The first could consist in depositing said material between the teeth of the cavity 23 and the wings 9 of the pinion 5. Such a material could also be a solder and / or an adhesive such as a polymer adhesive. The second final phase could then enable the adhering material to be activated, for example by melting said solder and / or by polymerizing said adhesive. This embodiment is particularly interesting when the footprint 23 is not exactly corresponding to the section of the pinion 5 as explained above.

On obtient ainsi comme illustrĆ© Ć  la figure 9 un systĆØme d'engrenage composite 1 du type roue dentĆ©e Ć  pignon apte Ć  ĆŖtre intĆ©grĆ© dans une piĆØce d'horlogerie et comportant une roue 7 en matĆ©riau micro-usinable dont la serge 11 comporte une denture 19 et dont le moyeu 13 est liĆ©, avantageusement, Ć  l'ensemble axe 3 - pignon 5 au moyen du dispositif d'attache 21.We thus obtain as illustrated in figure 9 a composite gear system 1 of the sprocket gear type that can be integrated in a timepiece and that comprises a wheel 7 made of micro-machinable material whose serge 11 has a toothing 19 and whose hub 13 is bonded, advantageously , to the axis 3 - pinion 5 assembly by means of the fastening device 21.

Bien entendu, la prĆ©sente invention ne se limite pas Ć  l'exemple illustrĆ© mais est susceptible de diverses variantes et modifications qui apparaĆ®tront Ć  l'homme de l'art. En particulier, l'empreinte 23 peut ĆŖtre au moins partiellement en saillie du moyeu 13. En effet, cela autoriserait l'augmentation de la zone de contact entre l'axe 3 et le moyeu 13 ce qui permettrait l'amĆ©lioration du guidage de la roue 7 par rapport Ć  l'axe 3. Ladite zone de contact pourrait mĆŖme correspondre Ć  la hauteur totale de la roue 7, l'empreinte 23 serait alors entiĆØrement en saillie du moyeu 13 de la roue 7 au lieu d'ĆŖtre au moins partiellement en creux.Of course, the present invention is not limited to the illustrated example but is susceptible of various variations and modifications that will occur to those skilled in the art. In particular, the recess 23 may be at least partially projecting from the hub 13. In fact, this would allow the increase of the contact zone between the axis 3 and the hub 13, which would allow the improvement of the guiding of the wheel 7 with respect to the axis 3. Said contact zone could even correspond to the total height of the wheel 7, the footprint 23 would then be entirely projecting from the hub 13 of the wheel 7 instead of being at least partially hollow.

Claims (16)

  1. Gear system (1) including a pinion (5) and a toothed wheel (7), coaxially mounted relative to a pivoting arbour (3), and a securing device (21) between said pinion and said wheel so as to prevent any relative movement of one with respect to the other, characterized in that the securing device (21) includes a pattern cavity (23) whose shape at least partially matches the section of said pinion, which is made on the hub (13) of said wheel so as to secure said pinion and wheel in rotation.
  2. System (1) according to claim 1, characterized in that the pattern cavity (23) is made in a part of the thickness (e2) of said hub so as to block any relative movement by partially enveloping the pinion (5).
  3. System (1) according to any of the preceding claims, characterized in that the arbour (3) is approximately cylindrical with a circular section.
  4. System (1) according to any of the preceding claims, characterized in that the arbour (3) and the pinion (5) are made from a metallic material.
  5. System (1) according to any of the preceding claims, characterized in that the pinion (5) is integral with the arbour (3).
  6. System (1) according to any of the preceding claims, characterized in that the toothed wheel (7) is made from a micro-machinable material.
  7. System (1) according to claim 6, characterized in that the micro-machinable material is chosen from among the group including crystalline silicon, crystalline alumina and crystalline silica.
  8. System (1) according to any of the preceding claims, characterized in that the securing device (21) further includes an adhesive material mounted between the wheel (7) and the pinion (5) so as to improve the securing force of said device.
  9. Timepiece, characterized in that it includes a gear system (1) according to any of the preceding claims.
  10. Method of manufacturing a member (7) of a timepiece gear in micro-machinable material on several levels, including a securing device manufactured according to the following steps:
    a) providing a substrate (31) made of micro-machinable material;
    b) structuring a mask (33) including a first pattern (32) on the surface of said substrate;
    characterized in that it includes the following steps:
    c) structuring a second mask (35) on the surface of said substrate and said first mask (33), said second mask including a second pattern (34) that is smaller than the first pattern (32) of said first mask;
    d) performing an anisotropic etch so as to etch the second pattern (34) over a first thickness (e1) of the substrate (31);
    e) removing the second mask (35);
    f) performing a second anisotropic etch so as to continue the etch along the second pattern (34) and to start the etch along the first pattern (32) over a second thickness (e2) of the substrate (31);
    g) removing the first mask (33);
    h) releasing the timepiece gear member (7) from the substrate (31).
  11. Method according to claim 10, characterized in that the second pattern (34) is etched in the entire thickness (eT) of the substrate (31).
  12. Method according to claim 11, characterized in that the second pattern (34) has the shape of a toothed wheel (7) whose hub (13) includes an arbour hole (15).
  13. Method according to any of claims 10 to 12, characterized in that the first pattern (32) has the shape of a toothed ring (23) is partially etched in the thickness (e2) of substrate (31).
  14. Method according to any of claims 10 to 13, characterized in that the first mask (33) is made from silicon oxide and the second mask (35) from a photosensitive resin.
  15. Method according to any of claims 10 to 13, characterized in that the first (33) and second (35) masks are made from silicon oxide.
  16. Method according to any of claims 10 to 15, characterized in that several members (7) are manufactured on the same substrate (31).
EP09806405.8A 2008-08-15 2009-07-23 Gear system for a timepiece Active EP2326995B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP09806405.8A EP2326995B1 (en) 2008-08-15 2009-07-23 Gear system for a timepiece

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP08162475A EP2154582A1 (en) 2008-08-15 2008-08-15 Gear method for a clock piece
PCT/EP2009/059477 WO2010018051A1 (en) 2008-08-15 2009-07-23 Gearing system for a timepiece
EP09806405.8A EP2326995B1 (en) 2008-08-15 2009-07-23 Gear system for a timepiece

Publications (2)

Publication Number Publication Date
EP2326995A1 EP2326995A1 (en) 2011-06-01
EP2326995B1 true EP2326995B1 (en) 2013-06-19

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
EP08162475A Withdrawn EP2154582A1 (en) 2008-08-15 2008-08-15 Gear method for a clock piece
EP09806405.8A Active EP2326995B1 (en) 2008-08-15 2009-07-23 Gear system for a timepiece

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP08162475A Withdrawn EP2154582A1 (en) 2008-08-15 2008-08-15 Gear method for a clock piece

Country Status (9)

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US (1) US9310770B2 (en)
EP (2) EP2154582A1 (en)
JP (1) JP5395174B2 (en)
KR (1) KR20110030692A (en)
CN (1) CN102124415B (en)
HK (1) HK1160233A1 (en)
RU (1) RU2498383C2 (en)
TW (1) TWI486729B (en)
WO (1) WO2010018051A1 (en)

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Also Published As

Publication number Publication date
HK1160233A1 (en) 2012-08-10
KR20110030692A (en) 2011-03-23
RU2011109457A (en) 2012-09-20
US9310770B2 (en) 2016-04-12
TWI486729B (en) 2015-06-01
TW201011481A (en) 2010-03-16
US20110141860A1 (en) 2011-06-16
RU2498383C2 (en) 2013-11-10
EP2154582A1 (en) 2010-02-17
CN102124415A (en) 2011-07-13
CN102124415B (en) 2012-12-19
EP2326995A1 (en) 2011-06-01
JP5395174B2 (en) 2014-01-22
JP2012500386A (en) 2012-01-05
WO2010018051A1 (en) 2010-02-18

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