EP2467628A1 - Soupape pour interrompre de manière pratiquement étanche aux gaz une voie d'écoulement - Google Patents

Soupape pour interrompre de manière pratiquement étanche aux gaz une voie d'écoulement

Info

Publication number
EP2467628A1
EP2467628A1 EP10734142A EP10734142A EP2467628A1 EP 2467628 A1 EP2467628 A1 EP 2467628A1 EP 10734142 A EP10734142 A EP 10734142A EP 10734142 A EP10734142 A EP 10734142A EP 2467628 A1 EP2467628 A1 EP 2467628A1
Authority
EP
European Patent Office
Prior art keywords
valve
seal
seal carrier
coupling
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10734142A
Other languages
German (de)
English (en)
Inventor
Michael Lamprecht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VAT Holding AG
Original Assignee
VAT Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VAT Holding AG filed Critical VAT Holding AG
Priority to EP10734142A priority Critical patent/EP2467628A1/fr
Publication of EP2467628A1 publication Critical patent/EP2467628A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/44—Details of seats or valve members of double-seat valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
    • F16K3/08—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages with circular plates rotatable around their centres
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
    • F16K3/08—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages with circular plates rotatable around their centres
    • F16K3/085—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages with circular plates rotatable around their centres the axis of supply passage and the axis of discharge passage being coaxial and parallel to the axis of rotation of the plates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Definitions

  • the invention relates to a valve for substantially
  • valves in particular in the form of shuttle valves or slide valves, are mainly used in vacuum technology.
  • Valves of the type mentioned are known in different embodiments of the prior art and are particularly in vacuum chamber systems in the field of IC, semiconductor or substrate production, in a
  • Such vacuum chamber systems include in particular
  • evacuable vacuum chamber having at least one vacuum chamber opening through which the
  • Semiconductor elements or other substrates in and out of the vacuum chamber are feasible, and at least one vacuum pump for evacuating the vacuum chamber. For example, go through in a semiconductor wafer manufacturing plant or
  • Liquid crystal substrates, the highly sensitive semiconductor or liquid crystal elements sequentially multiple process vacuum chambers in which the located within the process vacuum chambers parts by means of a respective
  • the vacuum valves which have passed through semiconductor parts are also known as rectangular valves and, due to their usual functioning, also as slide valves, rectangular slides or
  • Peripheral valves are used in particular for controlling or regulating the gas flow between a vacuum chamber and a vacuum pump or a further vacuum chamber.
  • Peripheral valves are located, for example, within a piping system between a process vacuum chamber or a transfer chamber and a vacuum pump, the atmosphere or another process vacuum chamber.
  • Opening cross-section of such valves is usually smaller than in a vacuum transfer valve. Because peripheral valves depend on the
  • Open position and a gas-tight closed position are used, they are also used as control valves
  • One possible peripheral valve for controlling or regulating the gas flow is the shuttle valve.
  • a typical shuttle valve as known, for example, from US Pat. No. 6,089,537 (Olmsted)
  • a generally round valve disk is rotationally pivoted via an opening, which is generally also round, from an opening-releasing position into an intermediate position covering the opening.
  • a spool valve such as in US 6,416,037 (Geiser) or the US
  • valve plate 6,056,266 (Blecha) described, the valve plate, as well as the opening, usually rectangular in shape and is linear in this first step of an opening
  • Pushed intermediate position In this intermediate position is the valve plate of the pendulum or
  • Movement preferably takes place essentially in one
  • the seal may e.g. either via an arranged on the closure side of the valve disc sealing ring on which the opening
  • Sealing ring between the valve disk and the valve seat hardly shear forces that would destroy the sealing ring
  • Valve seat takes place. From the prior art are different
  • the valve includes a
  • Valve housing having a first wall having a first opening and a first valve seat, a valve plate having a closure side with a sealing ring and at least one drive.
  • the valve disk is pivotable or displaceable from an open position essentially parallel to the first valve seat, and the vertical distance between the valve disk and the first valve seat can be reduced such that it can be axially sealed
  • the valve plate comprises an outer plate portion which is connected to the drive and the sealing ring in the direction perpendicular to the first
  • Valve seat fixed, and an inner plate portion having an outer peripheral surface and relative to
  • outer cup portion is movably mounted in a direction substantially perpendicular to the first valve seat.
  • the outer peripheral surface is surrounded by the sealing ring substantially gas-tight inner sealing.
  • Valve housing in particular the first valve seat or a lateral groove, supported.
  • Closing and sealing process via a single linear movement takes place.
  • a suitable material for sealing rings is, for example, the elastic known under the trade name Viton®
  • Static seals are not directly involved in the process of gas tight closure of a valve. They are located in particular at the connections of the vacuum valve, for example between the vacuum valve connection and a vacuum device, e.g. a process chamber, one
  • Transport chamber Transport chamber, a vacuum pump or a
  • Static seals are usually subject to less mechanical stress than dynamic seals, because after mounting the vacuum valve to the
  • Vacuum device the forces acting on the seal forces are substantially constant and the gas-tight contact after installation of the vacuum valve over a longer
  • Period is preserved.
  • they are the - possibly aggressive - flowing medium inside the
  • Valve body less exposed. Chemical and abrasive influences on static seals are usually lower than with dynamic seals.
  • Dynamic seals are used in particular for gas-tight sealing between the valve seat and the movable
  • Valve closure such as the valve plate.
  • valve preferably used a shuttle valve.
  • the control of the flow of the aggressive gas is carried out by reducing and increasing the opening cross section of the valve.
  • the valve is indeed
  • Valve plate with the seal in the intermediate positions between the open position and the closed position always protrudes into the opening cross-section of the valve and the
  • Vacuum valve in even shorter intervals.
  • the previously known from the prior art vacuum valves allow partial replacement of the seal, for example, by replacing the designed as a static seal O-ring.
  • Vacuum valves whose connections on the other hand
  • vacuum valves of the type mentioned are regularly constructed so that a simple replacement of the dynamic seal is possible, for example by removing the valve disk on which the seal
  • valve disk is arranged, and replacing the valve disk with a new valve disk.
  • Vacuum slide valve which has a maintenance opening for easy removal of the valve disk and one for quick Replacement suitable interface between the valve plate and the push rod of the valve drive, as well as a suitable multi-function tool is described in US 7,134,642 (Seitz).
  • Valve closure requires an interruption of the
  • An object of the invention is therefore to provide a valve for substantially gas-tight interruption of a flow path to
  • Another object of the invention is to provide such
  • a further object of the invention is to provide a valve whose dynamic seal in the open position and in the intermediate position of the valve disk is only partially or not at all attacked by the medium through which the valve flows.
  • the invention is based on providing a seal carrier associated with the valve disk and with a
  • valve opening can be pressed on the valve seat. If, however, no gas-tight closure by means of the valve disk is required, but the cross-section of the valve opening is only reduced and the flow path are only partially interrupted, the seal carrier can be decoupled with the first seal from the valve disk and in the so-called parking position with the park portion of
  • Valve plate can now to control the flow by at least partially covering the cross section of
  • Valve opening and thus be used by reducing and enlarging the opening cross-section, the first
  • the valve according to the invention can thus be operated in two modes, namely a first operating mode for reducing and enlarging the opening cross-section, wherein a
  • the first seal in this mode is subject to little or no chemical or abrasive wear by the medium flowing through.
  • inventive valve thus characterized, depending on the shares of the modes, by a significant
  • the inventive valve for substantially gas-tight interruption of a flow path has a valve housing, in which at least one valve opening is provided for the flow path.
  • Under the flow path is generally to be closed opening path between two areas - in particular between a process chamber for
  • the flow path is for example a
  • valve Connecting passage between a process chamber and a pump or two interconnected process chambers.
  • the valve can be a peripheral valve, for example a shuttle valve, for the passage of gases or a transfer valve for the transfer of semiconductor parts from one to the next process chamber or to the outside world.
  • peripheral valve for example a shuttle valve, for the passage of gases or a transfer valve for the transfer of semiconductor parts from one to the next process chamber or to the outside world.
  • Opening cross section also referred to as a rectangular slide.
  • the valve opening has, for example, a substantially round, oval or rectangular cross section and has a central axis which extends in the region of the valve opening in the middle of the flow path parallel thereto. This opening axis is for example perpendicular to the plane defined by the valve opening surface.
  • the valve opening is enclosed by a valve seat which surrounds the valve seat
  • Opening extends. For example, the area of the
  • Valve seat at least partially in a direction parallel to the opening axis.
  • the valve has an adjustable valve plate with a closure side and at least one drive, by means of which the valve plate can be adjusted between an open position and a closed position.
  • Closed position takes place via the drive by means of an at least partially transverse to the opening axis
  • valve disk is pivotable or displaceable by means of the drive in at least one direction, which is at least one directional component has perpendicular to the opening axis.
  • Valve seat provided that it extends perpendicular to the opening axis.
  • the invention includes not only a valve with a uniaxial drive, by means of which
  • Valve disk along an axis or about an axis is movable, but preferably also multi-axis drives, by means of which the valve disc along at least one or at least a second axis is movable.
  • the closure side of the valve disk is that side which, in the closed position of the valve disk, faces the valve opening and in particular the valve seat. In the open position, the valve disk is arranged in a parking section of the module arranged laterally next to the valve opening
  • the parking section is generally that region of the valve in which the valve disk moved out of the opening cross-section is located next to the opening. In the open position, the valve opening and the flow path are released. The valve is fully open in the open position. In the closed position, the valve plate overlaps with one on the closure side
  • Closing area is any
  • Valve opening can be at least partially covered.
  • the closing surface is either fixed to the valve plate
  • valve plate connected and forms a part of the valve plate extending on the closure side, or it is movable - in particular in the direction parallel to
  • a first seal which acts as a dynamic seal, contacts the valve seat in a gas-tight manner, so that a gas-tight contact between the first seal and the
  • valve seat exists. The valve plate closes the
  • the valve has a seal carrier which can assume at least two typical positions. In the first position of the seal carrier with the
  • the first position is called the coupling position.
  • the coupling position of the seal carrier In the coupling position of the seal carrier, the same is coupled to a first receptacle of the valve disk on the valve disk.
  • the first receptacle is generally an element or a section on the valve disk, by means of which a connection between the seal carrier and the valve disk can be produced.
  • the valve In order to releasably fix this connection, the valve has first coupling means, by means of which the seal carrier releasably coupled to the first receptacle of the valve disk and thus in the
  • Coupling position is fixable.
  • the terms first record and first coupling means are to be understood functionally. It is possible the first shot and the first coupling means
  • Valve plate is arranged for receiving the seal carrier, whereas the first coupling means, For example, a spring-loaded catch, can be located on the seal carrier and / or on the valve disk.
  • the second position is called parking position. In this parking position of the seal carrier selbiger is coupled to a second receptacle of the parking section in the park portion of the valve housing.
  • the second shot is an element or section in the park section at
  • Valve housing by means of which a connection between the
  • the valve has second coupling means, by means of which the seal carrier can be releasably coupled to the second receptacle of the parking section and thus can be fixed in the parking position.
  • the terms second recording and second coupling means are to be understood functionally, because the second recording and the second
  • Coupling means may be formed by one or more functional units.
  • the first seal acting as a dynamic seal is arranged on the seal carrier such that the first seal gas-tightly contacts the valve seat when the seal carrier is on the valve disk and thus in the coupling position and when the valve disk has been moved into the closed position by means of the drive.
  • the first seal is arranged on the seal carrier and the seal carrier and the Schliessflache are formed such that in this coupling position and in the simultaneous closed position, a gas-tight Connection between the first seal and the
  • Direct contact between the first seal and the closure surface can be effected, for example, by arranging the closure surface on the seal carrier and thus ensuring gastight contact between the first seal and the closure surface on the sealing surface
  • Seal is arranged directly on the Schliessflache by the first seal vulcanized for example on this Schliessflache or fixed in a groove on the Schliessflache. Is the closure area part of the
  • a seal carrier equipped with the closure surface has, in particular, a disk-shaped, plate-like or plate-like shape which is closed in a flat manner so that it can serve as a closure for the valve opening.
  • An indirect contact between the first seal and the closing surface can be effected, for example, by the fact that the closing surface is not part of the
  • Seal carrier is, but is fixed or movable on the valve disk.
  • the sealing means on an at least partially radially inwardly facing inner surface of the particular annular seal carrier in such a way
  • sealing means in the coupling position an at least partially radially outwardly facing
  • This closing surface can be fixedly arranged on the valve disk and in particular
  • Closing surface acts.
  • the closing surface is movably arranged on the valve disk.
  • the closure surface is mounted movably on the valve disk in a direction perpendicular to the closure side relative to the valve disk and in the coupling position relative to the seal carrier within a movement range.
  • the storage is resilient, so that the
  • the movable mounting of the closing surface allows that the closing surface can be supported directly on the valve seat or on another portion of the valve housing in case of over or under pressure on one of the valve sides.
  • Closure surface is known for example from US 2007/0138424 (Geiser). Thus, at least in a portion of this range of motion of the gas-tight contact between the
  • the outer surface of the closing surface is dimensioned such that it gas-tight at least within a portion of the movement range of the closing surface of the sealing means in the coupling position
  • the outer surface is in Direction perpendicular to the closure side dimensioned at least according to the range of motion.
  • the above sealant can from a second
  • Seal are formed, which is arranged on an at least partially radially inwardly facing inner surface of the seal carrier and at least partially inwards in
  • this second seal thus encloses an outer surface of the closure surface which faces at least partially radially outward
  • This second seal may be, for example, an O-ring arranged in a circumferential groove, another sealing ring or a vulcanised seal.
  • said sealing means are formed by the first seal.
  • the first one has
  • the first seal is for this purpose in an inner edge portion of an at least partially radially inwardly facing inner surface of the
  • This sealing function corresponds to the usual dynamic seal, as already described above. Due to the arrangement in the edge portion, however, the first seal also encloses with a part in the in the radial direction at least partially inward in the
  • Coupling position an at least partially radially outwardly facing outer surface of the closing surface in a substantially radially gas-tight manner.
  • Radial is generally understood to mean a directional component that is substantially parallel in one plane to the plane Closure side extends, these planes being pierced in particular perpendicularly from the opening axis, whereas axially generally a direction component is understood to be perpendicular to the closure side and in particular parallel to the opening axis.
  • the term is radial in the context of
  • Closing surface arranged on the valve plate and the valve has sealing means, the seal carrier and the closing surface in the coupling position and in the
  • Sealing means are arranged on an at least partially radially inwardly facing inner surface of the seal carrier such that the sealing means in the coupling position at least partially radially outwardly facing
  • the sealing means may be formed by the first seal or a second seal as described above.
  • the first coupling means are in this embodiment by non-positive first coupling means in the form of
  • Sealants that are elastic in the radial direction formed.
  • the sealing means enclose the outer surface of the closing surface in the coupling position so elastically that the seal carrier is releasably fixable in the coupling position in a non-positive manner.
  • the sealants in this embodiment have not only one Abdichtfunktion, but also a coupling function in terms of the first coupling means.
  • Coupling means and the second receptacle formed such that the coupling of the seal carrier in the
  • valve disk is movable by means of the drive in such a way that the seal carrier can be brought from its coupling position on the valve disk into its parking position in the park portion, and vice versa.
  • the drive is designed, for example, such that the
  • Valve plate at least in the open position in the form of a
  • Valve disk along an axis or about an axis is movable, but multiaxial, so that the valve disc along at least one or at least a second
  • Axis namely in the form of a vertical movement in the direction perpendicular to the closure side, is movable.
  • valve seat is used.
  • the second receptacle of the parking section is designed such that the seal carrier can be guided at least partially out of the parking position by this vertical movement into the second receptacle into the parking position and out of the second receptacle.
  • the second coupling means as Baj onettver gleich with at least one slot having an introduction, and formed at least one button.
  • the Baj onettver gleich is like that
  • the first receptacle of the valve disk is a translatory first receptacle
  • Coupling means designed as non-positive first coupling means, the seal carrier in the first receptacle in the coupling position with a holding force to the
  • the holding force is such that it by the vertical movement of the
  • these non-positive first coupling means are formed by a spring-loaded catch which is arranged in the seal carrier or in the first receptacle on the valve disk.
  • the invention is not limited to any particular
  • valve types As a particularly advantageous, the invention but proven in the form of a shuttle valve.
  • the valve opening and the valve disk have in particular a substantially round cross-section.
  • the seal carrier has an annular or plate-shaped cross section.
  • the transverse movement effected by means of the drive is a particularly arcuate pivotal movement about one in the
  • Pivot axis The vertical movement takes place in the form of a linear movement substantially parallel to the opening axis.
  • the valve plate is by means of the drive between the open position and an intermediate position by the
  • valve disk with the closure side at least partially covers the valve opening and is arranged in spaced opposition to the valve seat.
  • the valve disk reduces the valve opening and does not completely interrupt the flow path due to the spaced opposing position to the valve seat, but partially.
  • the drive is designed such that the valve disk is adjustable by means of the drive between this intermediate position and the closed position by the vertical movement.
  • inventive valve can also as
  • Valve opening and the valve plate for example, a substantially rectangular cross-section.
  • the seal carrier has a rectangular frame-like or rectangular
  • the transverse movement of the drive is a linear movement along a substantially
  • the vertical movement is one
  • valve disk with the closure side at least partially covers the valve opening and is arranged in spaced opposition to the valve seat.
  • the valve disc reduces the valve opening and partially interrupts the flow path, without interrupting it completely, since the valve disk is arranged in a spaced opposite position to the valve seat.
  • the valve plate is adjustable by means of the drive between the intermediate position and the closed position by the vertical movement.
  • the valve may also be a valve which can be closed by means of only a single transverse movement and which can be completely closed without vertical movement,
  • a wedge valve for example, a wedge valve
  • the invention provides a protective surface in a further development in the park section. This protection area is like this
  • the valve according to the invention makes it possible to use two
  • a first mode for controlling the opening cross-section of the valve wherein the opening cross-section completely open and substantially reduced, in particular almost - but not gas-tight - can be closed
  • a second mode for controlling the opening cross-section of the valve wherein the opening cross-section completely open and substantially reduced, in particular almost - but not gas-tight - can be closed
  • an embodiment of the invention has a control device which is so connected to the drive and which is designed such that the valve in the first mode and the second mode of operation is operable.
  • the seal carrier In the first mode, the seal carrier is arranged in the parking position and the
  • Valve disc is between the open position and one
  • the valve plate covers the side with the closure
  • Valve opening at least partially, it is arranged in spaced opposition to the valve seat and it reduces the valve opening, wherein the flow path is partially interrupted.
  • the seal carrier In the second operating mode, the seal carrier is arranged in the coupling position and the valve disk is adjustable between the open position and the closed position. The change of the modes is done by such adjustment of the drive that in
  • Seal carrier is achieved by overcoming positive first coupling means of the valve disk. By loosening the seal carrier from the valve plate, it is thus arranged in the parking section in the parking position.
  • Seal carrier can by reverse moving the
  • Fig. 1 is an oblique view of an inventive
  • Fig. 2 is a detailed oblique view of the
  • Fig. 3 is a side cross-sectional view of the
  • Valve disc in the closed position and the seal carrier in the coupling position
  • valve disk 4a is a cross-sectional view of the valve disk in
  • FIG. 4b shows the cross-sectional view of the valve disk in FIG.
  • FIG. 4c shows the cross-sectional view of the valve disk in FIG.
  • FIG. 4d shows the cross-sectional view of the valve disk in FIG.
  • Fig. 5a is a plan view of the parking section, the second
  • Fig. 5b is a plan view of the parking section, the second
  • FIG. 6 shows a cross-sectional view of the first receptacle and the first coupling means designed as a spring-loaded catch
  • Fig. 7 is a side cross-sectional view of the
  • Fig. 8 is a side cross-sectional view of the
  • Valve plate in the closed position and an alternative seal carrier with a closed Schliessflache in
  • Figures 1, 2, 3, 4a, 4b, 4c, 4d, 5a, 5b, 6 and 7 show a common, exemplary embodiment of a
  • Valve housing 1 In this valve housing 1 is a
  • Valve opening 2 for the flow path F provided.
  • Valve opening 2 has a substantially circular cross section and extends straight through the valve housing 1 along a rectilinear opening axis 3, shown in Figure 1 by the dashed line 3.
  • valve opening 2 two leading into the valve interior openings in the valve housing 1, namely an upper opening and a lower opening, only the lower opening is referred to as the valve opening 2, since this valve opening 2 is closed gas-tight.
  • Valve opening 2 is enclosed by a valve seat 4, which is formed by a flat surface around the valve opening 2.
  • the plane of the valve seat 4 is shown in FIG.
  • valve housing 1 In the valve housing 1 is a movable valve disc. 5
  • valve disk 5 has a strut-like basic structure and a swivel arm, by means of which the valve disk is coupled to the drive 7.
  • a closing surface 13 is arranged, as in FIG. 3
  • This closing surface 13 has in the shown
  • Valve plate which serves to close the valve opening 2, which is why it is referred to below as the closure side 6, shown in Figure 3.
  • the closing surface 13 is a closed, round plate whose cross section is larger than the cross section of the valve opening 3, as can be seen in FIG. By means of the closing surface 13 so the valve opening 2 can be completely covered, wherein the closing surface 13 rests on the valve seat 4, see Figure 3.
  • the closing surface 13 is perpendicular to the direction
  • Lock side 6 relative to the valve disk 5 within a range of movement 14, shown by the arrow 14, movably mounted on the valve disk 5 resiliently.
  • the spring force acts downwards, ie in the direction of the valve seat 4 and the valve opening 2.
  • Closure surface 13 relative to the valve disk 5 it is possible that the closing surface 13 in the case of a relative overpressure on the upper side, ie on the side of the valve disk 5 and on the side to which the valve seat 4, prevails on the valve seat 4 is supported.
  • a pressure difference acts substantially on the
  • Valve plate 5 in the form of a transverse movement x, the one
  • valve plate 5 in the form of a
  • Vertical movement y is a linear movement substantially parallel to the opening axis 3.
  • the valve disk 5 can be adjusted by means of the drive 7 between an open position O, shown in Figure 1, and a closed position C, shown in Figure 3. In the open position, the valve disk 5 is positioned in a parking section 8 of the valve housing 1 arranged laterally next to the valve opening 2.
  • Valve opening 2 and the flow path F are released from the valve disk 5 and the closing surface 13.
  • Open position O is the shutter transversely pivoted out of the region of the valve opening 2, so that the
  • Open position O is visible in the park section.
  • the parking section is closed.
  • the valve disk 5 covers the valve opening 2 with the closing surface 13 arranged on the closure side 6.
  • the valve has an annular seal carrier 30 with a basic shape enclosing the closing surface 13, shown in FIG. 3, which can assume two typical positions, namely a coupling position K, FIG. 3 and FIG. 8, and a parking position P, FIGS. 4d and 5b.
  • a coupling position K FIG. 3 and FIG. 8
  • a parking position P FIGS. 4d and 5b.
  • Coupling position K is the seal carrier 30 am
  • Valve plate 5 coupled while in the parking position P of the seal carrier 30 with the parking section 8 of the
  • Valve housing 1 is coupled.
  • first seal 31 is arranged such that the first seal 31 in the coupling position K and in the
  • Sealing means 32 are arranged on an at least partially radially inwardly facing inner surface 35 of the seal carrier 30 such that the sealing means 32 in the
  • the closing surface 13 is mounted movably on the valve disk 5 within a movement region 14. To the gas-tight connection between the seal carrier 30 and the closing surface 13 in the coupling position K to
  • the said sealant 32 are in
  • annular second seal 32 is formed. This second
  • Seal 32 is on a radially inward facing Inner surface 35 of the seal carrier 30 is disposed and faces inward in the radial direction.
  • FIG. 8 corresponds to FIG. 3.
  • the first seal 31 has a double function.
  • the first seal 31 in an inner edge portion of
  • Part section encloses the first seal 31 in the
  • Coupling K the at least partially radially outwardly facing outer surface 9 of the closing surface 13 in a substantially radially gas-tight manner, as also shown in Figure 8.
  • valve can be like a conventional shuttle valve
  • valve disk 7 is by means of the drive 7 between the open position O, Figure 1, and a
  • valve disc 7 By the vertical movement y of the drive 7, the valve disc 7 between them
  • Control mode is located, in which the opening cross-section is reduced or enlarged, but should not be completely closed.
  • the first seal 31 in the coupling position K of the seal carrier 30 is constantly exposed to the medium flowing through the valve, chemically and mechanically, so that there would be an increased wear of the first seal 31. Therefore, the invention provides that the seal carrier 30 can be decoupled from the valve disk 5 and coupled to the parking section 8 of the valve housing 1 and occupies the parking position P.
  • seal carrier 30 is in the
  • Valve housing 1 can be coupled and decoupled again.
  • the valve has the respective receptacles 21 and 22 associated coupling means 33 and 34th
  • first coupling means 33 By means of first coupling means 33, the seal carrier 30 is releasably connected to the first receptacle 21 of the valve disk 5
  • Seal carrier 30 releasably coupled to the second receptacle 22 of the parking section 8 and thus releasably fixable in the parking position P.
  • the first receptacle 21 of the valve disk 5 is as
  • the first coupling means 33 are provided, which are designed as non-positive first coupling means 33, as illustrated in FIG.
  • the non-positive first coupling means 33 hold the seal carrier 30 in the first receptacle 21 in the coupling position K with a holding force up to
  • these non-positive first coupling means as a spring-loaded catch 33rd
  • the first receptacle 21 is of a variety of around the Seal carrier 30 disposed on the valve plate 5
  • Fingers 21 formed, as can be seen in Figure 7, which shows the valve plate 5 without the seal carrier 30. In these fingers 21 concave, inwardly facing recesses 33c are formed, see Figures 6 and 7. In the seal carrier 30 is one of the number of fingers 21 and the
  • Recesses 33c corresponding number of spring-loaded detents 33.
  • These spring-loaded detents 33 are each composed of a spring 33a and one of the spring 33a acted upon by force ball 33b together.
  • the ball 33b has a shape corresponding to the recess 33c and is pressed by the spring 33a during insertion of the seal carrier 30 into the first receptacle 21, so that the seal carrier 30 frictionally by means of the spring-loaded detents formed non-positive first coupling means 33 in the first receptacle 21st is fixed.
  • the seal carrier 30 is in the coupling position K.
  • the decoupling of the seal carrier 30 from the first receptacle 21 is illustrated in Figures 4c and 4d. The held by means of the second coupling means 34 in the parking section 8
  • Seal carrier 30 is formed by the vertical adjustment of the valve disk 5 by means of the upward
  • Coupling means 34 shown in Figures 4a to 5c,
  • a protective surface 12 is formed, which corresponds substantially with the shape of the first seal 31 of the seal carrier 30. This protective surface 12 is upwards in the direction of
  • the second receptacle 22 is formed in the parking section 8.
  • Four feed-ins 42 are formed around the protective surface 12 in the parking section 8, as in FIGS. 2, 5a and 5b recognizable. These four leads 42 each pass into a slot 41 which extends along the direction of the transverse movement x, see FIG.
  • the introducers 42 functionally form the second receptacle 22.
  • buttons 43 are arranged on the seal carrier, see Figures 4a, 5a and 5b.
  • the buttons 43 of the seal carrier 30 can be inserted by the vertical movement y of the drive 7 in the introductions 42. The insertion is made by the transition from Figure 4a to Figure 4b and Figure 4b to Figure 4c. Are the buttons 43 of the seal carrier 30 by the vertical movement y of the
  • Seal carrier 30 do not join this vertical movement y, but remains fixed in the second receptacle 22. Thus, the seal carrier 30 releases from the valve disk 5 and from the first receptacle 21, since the non-positive first
  • Coupling 33 solve the connection between the seal carrier 30 and valve disc 5. The state in which the seal carrier 30 is in this undercut area
  • the second coupling means 34 are formed as Baj onettver gleich with four slots 41, each having an introduction 42, in the parking section 8 and four buttons 43 on the seal carrier 30 is formed.
  • Baj onettverInstitut is arranged and designed such that the four buttons 43 can be introduced by the vertical movement y in the introduction 42 and by the transverse movement x in the four slots 41 can be guided.
  • the seal carrier 30 can thus be brought into the parking position P.
  • Receipt 22 of the parking section 8 is thus formed such that the seal carrier 30 at least partially by the vertical movement y in the second receptacle 22 in the
  • Coupling position K and parking position P takes place at least partially by the vertical movement y and by the
  • Receiving 22 are thus formed in the illustrated embodiment such that the coupling of the seal carrier 30 in the coupling position K and the parking position P and the decoupling done by moving the valve disk 5 by means of the drive 7.
  • the first seal 31 is surrounded by the protective surface 12 for protecting the first seal 31 in front of the medium flowing along the flow path F.
  • the first seal 31 is protected in the parking position P from chemical and abrasive and other mechanical influences.
  • the valve can now be operated in this mode in the so-called control mode, wherein the valve disc 5 with the closing surface 13 already a substantial closing, but not completely gas-tight closing of the valve opening 2 by adjusting the
  • Valve plate 5 by the transverse movement x and the
  • valve disk 5 is shown without the seal carrier 30, which is located in parking position P in the parking section 8. As can be seen, even without the seal carrier 30 closing the valve opening 2 by the on the
  • the valve shown also has an integrated control device 50 for the drive 7, shown in Figure 1.
  • This control device 50 is so in communication with the drive 7 and is designed such that the valve in a first mode and a second mode
  • Seal carrier 30 is arranged in the parking position P and the valve disk 5 is between the open position O and an intermediate position in which the valve disk 5 with the
  • valve opening 2 at least partially covered is arranged in spaced opposite to the valve seat 4 and in which the valve disc 5 the
  • the seal carrier 30 is arranged in the coupling position K and the valve disk 5 is adjustable between the open position O and the closed position C. The coupling of the
  • Parking position P and the decoupling, so the transition from one mode to another, is done by driving the drive 7 for adjusting the valve disk 5 in the manner described above.
  • closure surface 13 is arranged on the seal carrier 30 and for there to be direct gastight contact between the first seal 31 and the closure surface 13.
  • the seal carrier 30 points in In this case, in particular a plate-shaped cross-section.
  • a second seal can be dispensed with.
  • the remaining features correspond to those of the preceding embodiments.
  • first receptacle 21 of the valve disk 5 is formed by the outer surface 9 of the closing surface 13, which faces at least partially radially outward, and the
  • Sealant 31 or 32 in particular by the second seal 32 from the first embodiment according to Figures 1 to 7 or the first seal 31 from the second
  • Embodiment according to Figure 8 are formed.
  • the seals 31 and 32 are elastic in the radial direction, so that these sealing means 31 and 32, the outer surface 9 of the closing surface 13 in the coupling position K elastic enclose such that the seal carrier 30 releasably in the
  • Coupling position K is fixable.
  • the first coupling means 33 described in Figure 6 and the first receptacle 21 can be omitted.
  • the remaining features can remain unchanged.

Abstract

L'invention concerne une soupape pour interrompre de manière étanche aux gaz une voie d'écoulement (F). La soupape a un carter de soupape (1), une tête de soupape (5) et un entraînement (7) au moyen duquel la tête de soupape (5) peut être déplacée entre une position ouverte (O) et une position fermée (C). Selon l'invention, la soupape présente un porte-joint d'étanchéité (30) qui peut être accouplé dans une position d'accouplement (K) avec un premier logement (21) de la tête de soupape (5) sur la tête de soupape (5) et dans une position d'arrêt (P) avec un deuxième logement (22) d'une section d'arrêt (8) dans la section d'arrêt (8) du carter de soupape (1) et peut de nouveau être désaccouplé. Un premier joint d'étanchéité (31) est disposé sur le porte-joint d'étanchéité (30) de telle manière que le premier joint d'étanchéité (31) entre en contact de manière étanche aux gaz avec un siège de soupape (4) dans la position d'accouplement (K) et dans la position fermée (C), une liaison étanche aux gaz existant entre le premier joint d'étanchéité (31) et une surface de fermeture (13) disposée sur la tête de soupape (5). Le porte-joint d'étanchéité (30) peut être accouplé de manière amovible avec le premier logement (21) de la tête de soupape (5) dans la position d'accouplement (K) au moyen d'un premier moyen d'accouplement (33). Le porte-joint d'étanchéité (30) peut être accouplé de manière amovible avec le deuxième logement (22) de la section d'arrêt (8) dans la position d'arrêt (P) au moyen d'un deuxième moyen d'accouplement (34).
EP10734142A 2009-08-19 2010-07-21 Soupape pour interrompre de manière pratiquement étanche aux gaz une voie d'écoulement Withdrawn EP2467628A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP10734142A EP2467628A1 (fr) 2009-08-19 2010-07-21 Soupape pour interrompre de manière pratiquement étanche aux gaz une voie d'écoulement

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP09168142A EP2287501A1 (fr) 2009-08-19 2009-08-19 Soupape destinée à l'interruption essentiellement étanche au gaz d'un parcours d'écoulement
PCT/EP2010/060566 WO2011020672A1 (fr) 2009-08-19 2010-07-21 Soupape pour interrompre de manière pratiquement étanche aux gaz une voie d'écoulement
EP10734142A EP2467628A1 (fr) 2009-08-19 2010-07-21 Soupape pour interrompre de manière pratiquement étanche aux gaz une voie d'écoulement

Publications (1)

Publication Number Publication Date
EP2467628A1 true EP2467628A1 (fr) 2012-06-27

Family

ID=41467179

Family Applications (2)

Application Number Title Priority Date Filing Date
EP09168142A Withdrawn EP2287501A1 (fr) 2009-08-19 2009-08-19 Soupape destinée à l'interruption essentiellement étanche au gaz d'un parcours d'écoulement
EP10734142A Withdrawn EP2467628A1 (fr) 2009-08-19 2010-07-21 Soupape pour interrompre de manière pratiquement étanche aux gaz une voie d'écoulement

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP09168142A Withdrawn EP2287501A1 (fr) 2009-08-19 2009-08-19 Soupape destinée à l'interruption essentiellement étanche au gaz d'un parcours d'écoulement

Country Status (6)

Country Link
US (1) US20120205570A1 (fr)
EP (2) EP2287501A1 (fr)
JP (1) JP2013502542A (fr)
KR (1) KR20120089652A (fr)
CN (1) CN102575777A (fr)
WO (1) WO2011020672A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2551564A1 (fr) 2011-07-28 2013-01-30 VAT Holding AG Soupape destinée à l'interruption essentiellement étanche au gaz d'un parcours d'écoulement
KR101524732B1 (ko) 2012-08-16 2015-05-29 주식회사 만도 전동식 파워 스티어링 시스템 및 그의 조향각 출력 방법
EP2749798B1 (fr) * 2012-12-27 2016-03-02 VAT Holding AG Soupape à coulisse à vide
JP2014126183A (ja) * 2012-12-27 2014-07-07 Canon Anelva Corp コンダクタンスバルブ
EP3211281A1 (fr) * 2016-02-24 2017-08-30 VAT Holding AG Soupape a vide destine a fermer un parcours d'ecoulement avec des tetes de soupape en deux parties
DE102021108429A1 (de) 2021-04-01 2022-10-06 Vat Holding Ag Dichtungsträgerring für ein Ventil

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1723264A (en) * 1926-01-06 1929-08-06 Wilson Wylie Gemmel Gate valve
US3241807A (en) * 1963-01-11 1966-03-22 Oscar C Holderer Fluid pressure actuated flow control gate valve
US3237916A (en) * 1963-10-02 1966-03-01 Grove Valve & Regulator Co Disc valve
DE3209217C2 (de) * 1982-03-13 1985-10-03 Siegfried Haag Schertler Schiebeventil
DE3717724A1 (de) 1987-05-26 1988-12-08 Schertler Siegfried Ventilschieber mit einem schiebergehaeuse
DE3801998C1 (fr) 1988-01-23 1989-05-18 Schertler, Siegfried, Haag, Ch
US5577707A (en) * 1995-12-18 1996-11-26 Vat Holding Ag Slide valve
DE19746241C2 (de) 1997-10-20 2000-05-31 Vat Holding Ag Haag Einrichtung zum Verschließen einer Öffnung
US6089537A (en) 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6416037B1 (en) 2001-01-11 2002-07-09 Vat Holding Ag Vacuum pipe
US6629682B2 (en) 2001-01-11 2003-10-07 Vat Holding Ag Vacuum valve
US7086638B2 (en) * 2003-05-13 2006-08-08 Applied Materials, Inc. Methods and apparatus for sealing an opening of a processing chamber
US6902145B2 (en) * 2003-06-19 2005-06-07 Vat Holding Ag Regulating slide valve
KR100960030B1 (ko) 2004-03-12 2010-05-28 배트 홀딩 아게 진공 게이트 밸브
CN101208551B (zh) * 2005-07-29 2011-04-13 株式会社开滋Sct 滑阀
US7396001B2 (en) 2005-12-20 2008-07-08 Vat Holding Ag Valve for essentially gastight closing a flow path
TWI388754B (zh) * 2006-06-16 2013-03-11 Vat Holding Ag 真空閥
JP2008051171A (ja) * 2006-08-23 2008-03-06 S Vac Co Ltd 真空バルブ
TW201124655A (en) * 2009-09-03 2011-07-16 Ulvac Inc Gate valve

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2011020672A1 *

Also Published As

Publication number Publication date
CN102575777A (zh) 2012-07-11
WO2011020672A1 (fr) 2011-02-24
EP2287501A1 (fr) 2011-02-23
US20120205570A1 (en) 2012-08-16
JP2013502542A (ja) 2013-01-24
KR20120089652A (ko) 2012-08-13

Similar Documents

Publication Publication Date Title
EP2467628A1 (fr) Soupape pour interrompre de manière pratiquement étanche aux gaz une voie d'écoulement
EP2551564A1 (fr) Soupape destinée à l'interruption essentiellement étanche au gaz d'un parcours d'écoulement
DE60201409T2 (de) Absperrventil mit verzögerter zurückziehung der gegenplatte
DE112009002071B4 (de) Vakuumventil mit gasdichter Wellendurchführung
DE2319114A1 (de) Durchflussrichtventil
CH700100B1 (de) Ventil.
WO1988005512A1 (fr) Procede et dispositif pour reguler un espace de fuite d'une vanne
EP2913573A1 (fr) Soupape à vide
EP2315236A1 (fr) Soupape de transfert à clapets
EP0173115A2 (fr) Electrovanne pour application à vide
DE3811372B4 (de) Vorrichtung zum Einschleusen eines Gegenstands in eine Reaktionskammer
WO2017144574A1 (fr) Soupape à vide pour la fermeture d'un chemin d'écoulement comportant une tête de soupape en deux parties
WO2013013981A1 (fr) Soupape à vide et élément de fermeture servant à fermer de manière étanche au gaz un trajet d'écoulement au moyen d'un mouvement linéaire
WO2014146946A1 (fr) Vanne à vide
EP0882916B1 (fr) Ensemble de soupapes
WO2018193014A1 (fr) Soupape à vide comprenant un capteur de force
EP0337519A2 (fr) Procédé et dispositif de protection et de support d'un joint d'étanchéité d'une vanne
EP2420709A1 (fr) Soupape à vide et articulation de fermeture pour la fermeture étanche au gaz d'une trajectoire d'écoulement à l'aide d'un déplacement linéaire
EP2224153A1 (fr) Soupape à tiroir double à vide
WO2010115917A1 (fr) Soupape à dépression et système de chambre à vide
DE102006043813A1 (de) Schieberventil für eine Beschichtungsanlage und Beschichtungsanlage
EP0928915B1 (fr) Soupape à siège double pour contrôler des fuites
DE202021101739U1 (de) Einstellbares Drosselelement
DE102020001179A1 (de) Vakuumventil zur Bereitstellung eines symmetrischen Fluidflusses
CH700247B1 (de) Vakuumventil mit Dichtungsträgereinsatz.

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20120210

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20130201