EP2467628A1

EP2467628A1 - Valve for interrupting a flow path in a substantially gas-tight manner

Info

Publication number: EP2467628A1
Application number: EP10734142A
Authority: EP
Inventors: Michael Lamprecht
Original assignee: VAT Holding AG
Current assignee: VAT Holding AG
Priority date: 2009-08-19
Filing date: 2010-07-21
Publication date: 2012-06-27
Also published as: CN102575777A; EP2287501A1; US20120205570A1; JP2013502542A; WO2011020672A1; KR20120089652A

Abstract

The invention relates to a valve for interrupting a flow path (F) in a gas-tight manner. The valve has a valve housing (1), a valve plate (5), and a drive (7) by means of which the valve plate (5) can be shifted between an open position (O) and a closed position (C). According to the invention, the valve has a seal support (30) which, in a coupling position (K), can be coupled to and decoupled from a first seat (21) of the valve plate (5) on the latter and, in a parked position (P), can be coupled to and uncoupled from a second seat (22) of a parking section (8) in said section of the valve housing (1). A first seal (31) is arranged on the seal support (30) such that the first seal (31) contacts a valve seat (4) in a gas-tight manner in the coupling position (K) and in the closed position (C), a gas-tight connection being formed between the first seal (31) and a closing surface (13) that lies on the valve plate (5). The seal support (30) can be detachably coupled to the first seat (21) of the valve plate (5) in the coupling position (K) by means of first coupling means (33). The seal support (30) can be detachably coupled to the second seat (22) of the parking section (8) in the parked position (P) by means of second coupling means (34).

Description

Valve for substantially gas-tight interruption of a

flow path

The invention relates to a valve for substantially

gastight interruption of a flow path according to

The preamble of claim 1. Such valves, in particular in the form of shuttle valves or slide valves, are mainly used in vacuum technology. Valves of the type mentioned are known in different embodiments of the prior art and are particularly in vacuum chamber systems in the field of IC, semiconductor or substrate production, in a

protected atmosphere as possible without the presence of contaminating particles must be used.

Such vacuum chamber systems include in particular

at least one for receiving or to be processed semiconductor elements or substrates

provided, evacuable vacuum chamber having at least one vacuum chamber opening through which the

Semiconductor elements or other substrates in and out of the vacuum chamber are feasible, and at least one vacuum pump for evacuating the vacuum chamber. For example, go through in a semiconductor wafer manufacturing plant or

Liquid crystal substrates, the highly sensitive semiconductor or liquid crystal elements sequentially multiple process vacuum chambers in which the located within the process vacuum chambers parts by means of a respective

Machining device to be processed. Both during the processing process within the process vacuum chambers, as well as during the transport from chamber to chamber, the highly sensitive semiconductor elements or substrates must always be in a protected atmosphere - especially in a vacuum environment. For this come on the one hand peripheral valves for opening and closing a Gaszu- or -abfuhr and the other

Transfer valves for opening and closing the

Transfer openings of the vacuum chambers for the inlet and outlet

Running the parts used.

Due to the described field of application and the associated dimensions as vacuum transfer valves, due to their rectangular opening cross-section, the vacuum valves which have passed through semiconductor parts are also known as rectangular valves and, due to their usual functioning, also as slide valves, rectangular slides or

Transfer slide valve called.

Peripheral valves are used in particular for controlling or regulating the gas flow between a vacuum chamber and a vacuum pump or a further vacuum chamber.

Peripheral valves are located, for example, within a piping system between a process vacuum chamber or a transfer chamber and a vacuum pump, the atmosphere or another process vacuum chamber. Of the

Opening cross-section of such valves, also called pump valves, is usually smaller than in a vacuum transfer valve. Because peripheral valves depend on the

Field of application not only for complete opening and

Close an opening, but also to control or

Controlling a flow by continuously adjusting the opening cross-section between a complete

Open position and a gas-tight closed position are used, they are also used as control valves

designated. One possible peripheral valve for controlling or regulating the gas flow is the shuttle valve. In a typical shuttle valve, as known, for example, from US Pat. No. 6,089,537 (Olmsted), in a first step, a generally round valve disk is rotationally pivoted via an opening, which is generally also round, from an opening-releasing position into an intermediate position covering the opening. In the case of a spool valve, such as in US 6,416,037 (Geiser) or the US

6,056,266 (Blecha) described, the valve plate, as well as the opening, usually rectangular in shape and is linear in this first step of an opening

releasing position in a covering the opening

Pushed intermediate position. In this intermediate position is the valve plate of the pendulum or

Slider valve in a spaced opposite to the valve seat surrounding the opening. In a second step, the distance between the valve disk and the valve seat is reduced, so that the valve disk and the valve seat are pressed uniformly against each other and the opening is closed substantially gas-tight. This second

Movement preferably takes place essentially in one

vertical direction to the valve seat. The seal may e.g. either via an arranged on the closure side of the valve disc sealing ring on which the opening

circulating valve seat is pressed, or via a sealing ring on the valve seat, against which the

Lock side of the valve disk is pressed. Due to the two-step closing process is the

Sealing ring between the valve disk and the valve seat hardly shear forces that would destroy the sealing ring,

subjected as the movement of the valve disc in the second step is substantially rectilinearly perpendicular to the

Valve seat takes place. From the prior art are different

Drive systems to achieve this combination of a rotary valve and the gate valve

translational movement of the valve disk parallel through the opening and a substantially translational movement perpendicular to the opening known, for example from US 6,089,537 (Olmsted) for a shuttle valve and from US 6,416,037 (Geiser) for a slide valve. From US 2007/0138424 (Geiser) and the US 2007/0138425 (Geiser) is a valve, in particular a pendulum or

Slide valve, known for substantially gas-tight interruption of a flow path. The valve includes a

Valve housing having a first wall having a first opening and a first valve seat, a valve plate having a closure side with a sealing ring and at least one drive. By means of the drive, the valve disk is pivotable or displaceable from an open position essentially parallel to the first valve seat, and the vertical distance between the valve disk and the first valve seat can be reduced such that it can be axially sealed

Contact between the sealing ring and the first valve seat of the flow path is interrupted in the closed position substantially gas-tight. The valve plate comprises an outer plate portion which is connected to the drive and the sealing ring in the direction perpendicular to the first

Valve seat fixed, and an inner plate portion having an outer peripheral surface and relative to

outer cup portion is movably mounted in a direction substantially perpendicular to the first valve seat. The outer peripheral surface is surrounded by the sealing ring substantially gas-tight inner sealing. Thus, in the closed position, a pressure difference acts on the valve disk substantially on the inner plate portion, so that the inner plate portion vertically decoupled from the outer plate portion to a portion of the

Valve housing, in particular the first valve seat or a lateral groove, supported.

Furthermore, slide valves are known in which the

Closing and sealing process via a single linear movement takes place. These are for example in various

Embodiments described wedge valves or, for example, the product known under the product name "MONOVAT series 02 and 03" and configured as a rectangular insert valve

Transfer valve from VAT Vakuumventile AG in Haag,

Switzerland. The structure and operation of such a valve are described for example in US 4,809,950 (Geiser) and US 4,881,717 (Geiser).

Different sealing devices are described in the prior art, for example in US 6,629,682 B2 (Duelli). A suitable material for sealing rings is, for example, the elastic known under the trade name Viton®

Sealing material.

A distinction must be made between dynamic seals and static seals on the vacuum valve.

Static seals are not directly involved in the process of gas tight closure of a valve. They are located in particular at the connections of the vacuum valve, for example between the vacuum valve connection and a vacuum device, e.g. a process chamber, one

Transport chamber, a vacuum pump or a

Pipe system to which the vacuum valve is connected. Static seals are usually subject to less mechanical stress than dynamic seals, because after mounting the vacuum valve to the

Vacuum device, the forces acting on the seal forces are substantially constant and the gas-tight contact after installation of the vacuum valve over a longer

Period is preserved. In addition, they are the - possibly aggressive - flowing medium inside the

Valve body less exposed. Chemical and abrasive influences on static seals are usually lower than with dynamic seals.

Dynamic seals are used in particular for gas-tight sealing between the valve seat and the movable

Valve closure, such as the valve plate. at

Actuation of the valve and gas-tight closure and re-opening dynamic seals are subjected to a dynamic load and are therefore inevitably subject to a certain mechanical wear. There are also dynamic ones

Seals the medium, which flows through the valve, exposed to a substantial extent. This is especially the case with intermediate positions of the valve closure of the case, since in this case the medium directly to the dynamic

Seal over streams. To protect the dynamic seal with fully open valve closure and not directly suspend the flow of the medium, see from the prior art known vacuum valves for

Part at least partially protected areas in the valve housing before, in which the valve closure is pivoted in its fully open position out of the immediate flow area addition. However, such a valve in a

Operated position in which the valve closure in an intermediate position between the complete

Open position and the gas-tight closed position

is located, so that the opening cross-section is only reduced, the dynamic seal is inevitably the valve exposed to flowing medium, resulting in increased wear of the dynamic seal due to chemical effects and abrasion. In many processes, aggressive gases - such as an aggressive plasma stream - are used, which attack the sealant chemically to a considerable extent. Particularly in the case of etching processes or coating processes in the semiconductor industry, the flow of an aggressive gas through the process vacuum chamber, in which the etching or coating process takes place, is regulated by means of a peripheral valve. As a peripheral valve is

preferably used a shuttle valve. The control of the flow of the aggressive gas is carried out by reducing and increasing the opening cross section of the valve. During the machining process, in which the valve is in this control mode, the valve is indeed

regularly adjusted, but is a complete

Closing the valve is not required. Since the

Valve plate with the seal in the intermediate positions between the open position and the closed position always protrudes into the opening cross-section of the valve and the

aggressive gas flows past the valve disk and its seal, both the valve disk and its seal are massively chemically influenced by the aggressive gas in this control mode. Whereas in such processes the control operation accounts for about 95% of the operating time of the valve, the closing operation forms only 5% of the time proportion. The gas-tight closure must be done only during service and cleaning. Investigations have shown that in processes in the field of IC, semiconductor or

Substrate production in which used for rules

Peripheral valves are used, the ratio of the control cycles of the valve to the closing cycles about 2,000,000 to 50 is. The proportion of cycles in which the valve is thus not used for gas-tight closure, but for reducing and enlarging the valve opening cross-section, thus outweighs drastically. Despite the occasional use of the dynamic seal and even though the seal has little or no mechanical stress through it

Closure of the valve has been suspended, this must be due to these chemical attacks on a regular basis

Intervals are thus exchanged. Depending on the process, the replacement of the dynamic seal must be done weekly. This costs time and leads to an interruption of the manufacturing process.

As semiconductor technology advances, so too are the demands on vacuum valve technology

Years rose steadily. New semiconductor manufacturing processes thus require replacement of the seals of a

Vacuum valve in even shorter intervals. The previously known from the prior art vacuum valves allow partial replacement of the seal, for example, by replacing the designed as a static seal O-ring. Vacuum valves whose connections on the other hand

vulcanized static seals, but make a rapid replacement of the seal impossible, so that in part the entire valve plate must be replaced.

For this reason, vacuum valves of the type mentioned are regularly constructed so that a simple replacement of the dynamic seal is possible, for example by removing the valve disk on which the seal

is arranged, and replacing the valve disk with a new valve disk. A designed for this purpose

Vacuum slide valve, which has a maintenance opening for easy removal of the valve disk and one for quick Replacement suitable interface between the valve plate and the push rod of the valve drive, as well as a suitable multi-function tool is described in US 7,134,642 (Seitz).

But even a relatively quick and easy replacement of the seal or the seals or the whole

Valve closure requires an interruption of the

Process, under circumstances, a flooding of the chambers with

Ambient air and the use of spare parts. It would be desirable to increase the life of the seals and thus increase the maintenance and replacement intervals.

An object of the invention is therefore to provide a valve for substantially gas-tight interruption of a flow path to

To provide, whose dynamic seal has an increased life.

Another object of the invention is to provide such

Improvement of the described, known from the prior art valves that the life of the dynamic seal of the valve is increased.

A further object of the invention is to provide a valve whose dynamic seal in the open position and in the intermediate position of the valve disk is only partially or not at all attacked by the medium through which the valve flows. These tasks are achieved through the realization of

characterizing features of the independent claim solved. Features that further develop the invention in an alternative or advantageous manner are the dependent ones

To claim. The invention is based on providing a seal carrier associated with the valve disk and with a

Parking section of the valve housing coupled and again

can be decoupled. To the valve opening by means of

Closing valve discs gas-tight is the

Seal carrier with the first seal, as

dynamic seal serves, in the so-called

Coupling position arranged on the valve plate, so that the valve disc with the first seal for gas-tight

Closing the valve opening can be pressed on the valve seat. If, however, no gas-tight closure by means of the valve disk is required, but the cross-section of the valve opening is only reduced and the flow path are only partially interrupted, the seal carrier can be decoupled with the first seal from the valve disk and in the so-called parking position with the park portion of

Couple the valve body. If the seal carrier is in this parking position, the dynamic first seal is protected from the medium flowing through the valve. The decoupled from the seal carrier and the first seal

Valve plate can now to control the flow by at least partially covering the cross section of

Valve opening and thus be used by reducing and enlarging the opening cross-section, the first

Do not seal the medium flowing through the valve

is directly exposed. The valve according to the invention can thus be operated in two modes, namely a first operating mode for reducing and enlarging the opening cross-section, wherein a

gastight closure does not occur, and a second

Operating mode for complete gas-tight closure of the Valve. Since, in the first operating mode, in which the seal carrier is in the parking position, the first

Seal is not exposed to the flow of the medium, the first seal in this mode is subject to little or no chemical or abrasive wear by the medium flowing through. In particular in

Applications in which the first mode, ie the control mode, dominates and only occasionally, especially for maintenance, the second mode for

gas-tight closure of the valve, the life of the first seal is significantly increased. The

inventive valve thus characterized, depending on the shares of the modes, by a significant

Greater service life of the dynamic seal and therefore significantly longer maintenance intervals. The

Maintenance-related downtime of the system in which the valve according to the invention is used, can thus be drastically reduced. A chemical influence of the process by the presence of a sealant as well as a generation of abrasion particles of the dynamic seal in control operation can be achieved by means of the invention

Valve be avoided altogether.

The inventive valve for substantially gas-tight interruption of a flow path has a valve housing, in which at least one valve opening is provided for the flow path. Under the flow path is generally to be closed opening path between two areas - in particular between a process chamber for

Semiconductor manufacturing and a peripheral device such as a pump, another process chamber or the outside world - to understand. The flow path is for example a

Connecting passage between a process chamber and a pump or two interconnected process chambers. In which In particular, the valve can be a peripheral valve, for example a shuttle valve, for the passage of gases or a transfer valve for the transfer of semiconductor parts from one to the next process chamber or to the outside world. The latter valves are due to the

described area of application as vacuum transfer valves and because of their mostly rectangular

Opening cross section also referred to as a rectangular slide. Of course, however, any other application of the inventive vacuum valve for im

Essentially gas-tight closure of any

Fliesswegs possible.

The valve opening has, for example, a substantially round, oval or rectangular cross section and has a central axis which extends in the region of the valve opening in the middle of the flow path parallel thereto. This opening axis is for example perpendicular to the plane defined by the valve opening surface. The valve opening is enclosed by a valve seat which surrounds the valve seat

Opening extends. For example, the area of the

Valve seat at least partially in a direction parallel to the opening axis. In addition, the valve has an adjustable valve plate with a closure side and at least one drive, by means of which the valve plate can be adjusted between an open position and a closed position. The

Adjusting between the open position and the

Closed position takes place via the drive by means of an at least partially transverse to the opening axis

Transverse movement. In other words, the valve disk is pivotable or displaceable by means of the drive in at least one direction, which is at least one directional component has perpendicular to the opening axis. These

Directional component is in a possible embodiment parallel to the plane defined by the valve seat surface and the movement takes place at least partially parallel to

Valve seat, provided that it extends perpendicular to the opening axis. However, the invention includes not only a valve with a uniaxial drive, by means of which

Valve disk along an axis or about an axis is movable, but preferably also multi-axis drives, by means of which the valve disc along at least one or at least a second axis is movable.

The closure side of the valve disk is that side which, in the closed position of the valve disk, faces the valve opening and in particular the valve seat. In the open position, the valve disk is arranged in a parking section of the module arranged laterally next to the valve opening

Positioned valve housing. The parking section is generally that region of the valve in which the valve disk moved out of the opening cross-section is located next to the opening. In the open position, the valve opening and the flow path are released. The valve is fully open in the open position. In the closed position, the valve plate overlaps with one on the closure side

arranged closing the valve opening. In the

Closing area is any,

in particular disc, plate or plate-like element or segment, by means of which the cross-section of

Valve opening can be at least partially covered. The closing surface is either fixed to the valve plate

connected and forms a part of the valve plate extending on the closure side, or it is movable - in particular in the direction parallel to

Opening axis - stored on the shutter, or she is decoupled from the valve plate. In the closed position, a first seal, which acts as a dynamic seal, contacts the valve seat in a gas-tight manner, so that a gas-tight contact between the first seal and the

Valve seat exists. The valve plate closes the

Valve opening gas-tight, so that the flow path is interrupted.

According to the invention, the valve has a seal carrier which can assume at least two typical positions. In the first position of the seal carrier with the

Coupled valve disc and in the second position it is coupled to the parking section, so there are each mechanically detachable, temporarily fixed.

The first position is called the coupling position. In the coupling position of the seal carrier, the same is coupled to a first receptacle of the valve disk on the valve disk. The first receptacle is generally an element or a section on the valve disk, by means of which a connection between the seal carrier and the valve disk can be produced. In order to releasably fix this connection, the valve has first coupling means, by means of which the seal carrier releasably coupled to the first receptacle of the valve disk and thus in the

Coupling position is fixable. The terms first record and first coupling means are to be understood functionally. It is possible the first shot and the first

Form coupling means as a common mechanical element, wherein the first receptacle and the coupling means are both arranged on the valve disc. Alternatively, however, there is also the possibility that the first recording on

Valve plate is arranged for receiving the seal carrier, whereas the first coupling means, For example, a spring-loaded catch, can be located on the seal carrier and / or on the valve disk. The second position is called parking position. In this parking position of the seal carrier selbiger is coupled to a second receptacle of the parking section in the park portion of the valve housing. The second shot is an element or section in the park section at

Valve housing, by means of which a connection between the

Seal carrier and the valve housing is produced. To the recorded in the second shot in the park section

To be able to fix the seal carrier, the valve has second coupling means, by means of which the seal carrier can be releasably coupled to the second receptacle of the parking section and thus can be fixed in the parking position. The terms second recording and second coupling means are to be understood functionally, because the second recording and the second

Coupling means may be formed by one or more functional units.

According to the invention, the first seal acting as a dynamic seal is arranged on the seal carrier such that the first seal gas-tightly contacts the valve seat when the seal carrier is on the valve disk and thus in the coupling position and when the valve disk has been moved into the closed position by means of the drive. Thus, there is a gas-tight connection between the first seal and the valve seat in the coupling position and in the simultaneous closed position. In addition, the first seal is arranged on the seal carrier and the seal carrier and the Schliessflache are formed such that in this coupling position and in the simultaneous closed position, a gas-tight Connection between the first seal and the

Schliessflache exists. In other words, in this closed position there is a direct gastight contact between the valve seat and the first seal and a direct or an indirect contact between the first seal and the self-contained closure surface.

Direct contact between the first seal and the closure surface can be effected, for example, by arranging the closure surface on the seal carrier and thus ensuring gastight contact between the first seal and the closure surface on the sealing surface

Seal carrier exists. It is possible that the first

Seal is arranged directly on the Schliessflache by the first seal vulcanized for example on this Schliessflache or fixed in a groove on the Schliessflache. Is the closure area part of the

Sealant, the gas-tight sealing of the

Valve opening and the interruption of the flow path through the seal carrier with its closing surface, which covers the valve opening in the closed position, and with its first seal, which rests gas-tight on the valve seat causes. A seal carrier equipped with the closure surface has, in particular, a disk-shaped, plate-like or plate-like shape which is closed in a flat manner so that it can serve as a closure for the valve opening.

An indirect contact between the first seal and the closing surface can be effected, for example, by the fact that the closing surface is not part of the

Seal carrier is, but is fixed or movable on the valve disk. In this case, the valve on sealant, the seal carrier and the

Closing surface in the coupling position and in the Connect the closed position gas-tight. For this purpose, in one possible embodiment, the sealing means on an at least partially radially inwardly facing inner surface of the particular annular seal carrier in such a way

arranged that the sealing means in the coupling position an at least partially radially outwardly facing

Surround the outer surface of the closing surface substantially radially gas-tight. This closing surface can be fixedly arranged on the valve disk and in particular

have disc-like shape with a radially outwardly facing border, which as the outer surface of the

Closing surface acts. Alternatively, however, the closing surface is movably arranged on the valve disk. In one possible embodiment, the closure surface is mounted movably on the valve disk in a direction perpendicular to the closure side relative to the valve disk and in the coupling position relative to the seal carrier within a movement range. In particular, the storage is resilient, so that the

Closure surface in the unloaded state in one

Home position is kept within the movement range. The movable mounting of the closing surface allows that the closing surface can be supported directly on the valve seat or on another portion of the valve housing in case of over or under pressure on one of the valve sides. Such mobility of a

Closure surface is known for example from US 2007/0138424 (Geiser). Thus, at least in a portion of this range of motion of the gas-tight contact between the

Outside surface of the closing surface and the sealing means is ensured, the outer surface of the closing surface is dimensioned such that it gas-tight at least within a portion of the movement range of the closing surface of the sealing means in the coupling position

is enclosed. For example, the outer surface is in Direction perpendicular to the closure side dimensioned at least according to the range of motion.

The above sealant can from a second

Seal are formed, which is arranged on an at least partially radially inwardly facing inner surface of the seal carrier and at least partially inwards in

Radial direction points. In the coupling position, this second seal thus encloses an outer surface of the closure surface which faces at least partially radially outward

Essentially radially gas-tight manner. This second seal may be, for example, an O-ring arranged in a circumferential groove, another sealing ring or a vulcanised seal.

Alternatively, said sealing means are formed by the first seal. In this case, the first one has

Seal two sealing functions. The first seal is for this purpose in an inner edge portion of an at least partially radially inwardly facing inner surface of the

Seal carrier arranged and touched with a in

Axial pointing section in the

Closed position of the valve disc the valve seat in a gas-tight manner. This sealing function corresponds to the usual dynamic seal, as already described above. Due to the arrangement in the edge portion, however, the first seal also encloses with a part in the in the radial direction at least partially inward in the

Coupling position an at least partially radially outwardly facing outer surface of the closing surface in a substantially radially gas-tight manner.

Radial is generally understood to mean a directional component that is substantially parallel in one plane to the plane Closure side extends, these planes being pierced in particular perpendicularly from the opening axis, whereas axially generally a direction component is understood to be perpendicular to the closure side and in particular parallel to the opening axis. The term is radial in the context of

Invention not necessarily to a circular

Cross-section, but may also relate to one

rectangular, oval or other cross-section relate. In a specific embodiment of the invention is the

Closing surface arranged on the valve plate and the valve has sealing means, the seal carrier and the closing surface in the coupling position and in the

Connect the closed position gas-tight. The

Sealing means are arranged on an at least partially radially inwardly facing inner surface of the seal carrier such that the sealing means in the coupling position at least partially radially outwardly facing

Surround the outer surface of the closing surface substantially radially gas-tight, as already described above. The sealing means may be formed by the first seal or a second seal as described above. As a first recording of the valve disc is used in this

Embodiment, however, the at least partially radially outwardly facing outer surface of the Schliessflache. The first coupling means are in this embodiment by non-positive first coupling means in the form of

Sealants that are elastic in the radial direction formed. The sealing means enclose the outer surface of the closing surface in the coupling position so elastically that the seal carrier is releasably fixable in the coupling position in a non-positive manner. In other words, the sealants in this embodiment have not only one Abdichtfunktion, but also a coupling function in terms of the first coupling means.

In one embodiment of the invention, the first

Coupling agent, the first shot, the second

Coupling means and the second receptacle formed such that the coupling of the seal carrier in the

Coupling position and the parking position and decoupling done by moving the valve disk by means of the drive. In other words, the valve disk is movable by means of the drive in such a way that the seal carrier can be brought from its coupling position on the valve disk into its parking position in the park portion, and vice versa. For this purpose, the drive is designed, for example, such that the

Valve plate at least in the open position in the form of a

Vertical movement in the direction perpendicular to the closure side is movable. The coupling and decoupling of the seal carrier in and out of the coupling position and parking position takes place at least partially by the vertical movement. In other words, the drive is not just uniaxial, so the

Valve disk along an axis or about an axis is movable, but multiaxial, so that the valve disc along at least one or at least a second

Axis, namely in the form of a vertical movement in the direction perpendicular to the closure side, is movable. such

Drives are common in sliding or shuttle valves and known from the prior art, since the vertical movement for vertical pressing of the dynamic seal on the

Valve seat is used. In a further development of the invention, the second receptacle of the parking section is designed such that the seal carrier can be guided at least partially out of the parking position by this vertical movement into the second receptacle into the parking position and out of the second receptacle. For example, the second coupling means as Baj onettverschluss with at least one slot having an introduction, and formed at least one button. The Baj onettverschluss is like that

arranged and formed that the knob by means of

Drive can be introduced by the vertical movement in the introduction and can be guided by the transverse movement in the slot and thus in the parking position.

In a special embodiment, the first receptacle of the valve disk is a translatory first receptacle

is formed, wherein the seal carrier through the

Vertical movement in the first shot in the

Coupling position into and out of the first receptacle from the coupling position is feasible. In other words, the first translational image and the first

Coupling means for receiving the seal carrier by means of a substantially rectilinear vertical movement, which extends in the direction perpendicular to the closure side and in particular parallel to the opening axis formed. In a further development of this embodiment, the first

Coupling means designed as non-positive first coupling means, the seal carrier in the first receptacle in the coupling position with a holding force to the

Overcome the holding force. The holding is done

in particular by friction. The holding force is such that it by the vertical movement of the

Recording out for decoupling and into the receptacle for coupling by means of the drive can be overcome. For example, these non-positive first coupling means are formed by a spring-loaded catch which is arranged in the seal carrier or in the first receptacle on the valve disk.

The invention is not limited to any particular

Valve types. As a particularly advantageous, the invention but proven in the form of a shuttle valve. In this case, the valve opening and the valve disk have in particular a substantially round cross-section. The seal carrier has an annular or plate-shaped cross section. The transverse movement effected by means of the drive is a particularly arcuate pivotal movement about one in the

Substantially parallel to the opening axis extending

Pivot axis. The vertical movement takes place in the form of a linear movement substantially parallel to the opening axis. The valve plate is by means of the drive between the open position and an intermediate position by the

Swiveling transverse movement. In this intermediate position, the valve disk with the closure side at least partially covers the valve opening and is arranged in spaced opposition to the valve seat. Thus, in the intermediate position, the valve disk reduces the valve opening and does not completely interrupt the flow path due to the spaced opposing position to the valve seat, but partially. Of the

Opening cross-section of the valve is thus - in particular significantly - reduced. In addition, the drive is designed such that the valve disk is adjustable by means of the drive between this intermediate position and the closed position by the vertical movement. The

Fundamental structure of such a shuttle valve is described for example in US 2007/0138424 (Geiser).

However, the inventive valve can also as

Slider valve may be formed. In this case the

Valve opening and the valve plate, for example, a substantially rectangular cross-section. The seal carrier has a rectangular frame-like or rectangular

closed cross-section on. The transverse movement of the drive is a linear movement along a substantially

perpendicular to the opening axis extending, in particular straight-line thrust axis. The vertical movement is one

Linear movement substantially parallel to the opening axis. By means of the drive, the valve plate between the

Open position and an intermediate position by the

Sliding movement displaceable. In the intermediate position, the valve disk with the closure side at least partially covers the valve opening and is arranged in spaced opposition to the valve seat. Thus, the valve disc reduces the valve opening and partially interrupts the flow path, without interrupting it completely, since the valve disk is arranged in a spaced opposite position to the valve seat. In addition, the valve plate is adjustable by means of the drive between the intermediate position and the closed position by the vertical movement.

According to the invention, however, the valve may also be a valve which can be closed by means of only a single transverse movement and which can be completely closed without vertical movement,

for example, a wedge valve.

By decoupling the seal carrier and thus the first seal from the valve plate this can be used for controlling, so to reduce and enlarge the opening cross-section without the first seal, and

optionally also the second seal, the medium which flows through the valve is directly exposed. In order to completely seal off the second seal from the medium, the invention provides a protective surface in a further development in the park section. This protection area is like this

formed such that the first seal is surrounded in the park position of the seal carrier of the protective surface for protection of the first seal in front of the medium flowing along the flow path. The protective surface has, for example, a groove-like shape. The valve according to the invention makes it possible to use two

to provide different modes of operation, namely a first mode for controlling the opening cross-section of the valve, wherein the opening cross-section completely open and substantially reduced, in particular almost - but not gas-tight - can be closed, and a second

Operating mode in which the valve can be fully opened and completely closed. The advantage of the first operating mode is that the dynamic first seal in the parking position against chemical and mechanical

Protected influences and thus the life of the first seal can be dramatically increased. To implement these modes of operation, an embodiment of the invention has a control device which is so connected to the drive and which is designed such that the valve in the first mode and the second mode of operation is operable. In the first mode, the seal carrier is arranged in the parking position and the

Valve disc is between the open position and one

Adjustable position. In the intermediate position

The valve plate covers the side with the closure

Valve opening at least partially, it is arranged in spaced opposition to the valve seat and it reduces the valve opening, wherein the flow path is partially interrupted. In the second operating mode, the seal carrier is arranged in the coupling position and the valve disk is adjustable between the open position and the closed position. The change of the modes is done by such adjustment of the drive that in

Coupling position or parking position

Seal carrier of one of the coupling means in the

recording is recorded. For example, done Changing the mode by inserting a portion of the seal carrier in the Baj onettverschluss

trained second admission and in the as

Baj onettverschluss trained second coupling means, by pivoting the valve disc in one

Undercut area of the bayonet closure and by vertical adjustment of the valve disk, so that the

Seal carrier is achieved by overcoming positive first coupling means of the valve disk. By loosening the seal carrier from the valve plate, it is thus arranged in the parking section in the parking position. Of the

Seal carrier can by reverse moving the

Ventiltellers back from the parking position in the

Coupling position be brought.

The inventive valve is described below with reference to concrete in the drawings

Embodiments described purely by way of example closer. Show in detail

Fig. 1 is an oblique view of an inventive

Shuttle valve in the open position;

Fig. 2 is a detailed oblique view of the

Parking section of the opened valve housing;

Fig. 3 is a side cross-sectional view of the

Valve disc in the closed position and the seal carrier in the coupling position;

4a is a cross-sectional view of the valve disk in

Parking section and the seal carrier in

Coupling position;

4b shows the cross-sectional view of the valve disk in FIG

Parking section and the seal carrier in Coupling position at the transition into the

Park position;

4c shows the cross-sectional view of the valve disk in FIG

Parking section and the seal carrier in

Coupling position in the almost completed transition to the parking position;

4d shows the cross-sectional view of the valve disk in FIG

Park section and the seal carrier after the transition to the parking position;

Fig. 5a is a plan view of the parking section, the second

Recording and the seal carrier in

Coupling position at the transition into the

Park position;

Fig. 5b is a plan view of the parking section, the second

Recording and the seal carrier in

Coupling position after transition into the

Park position;

6 shows a cross-sectional view of the first receptacle and the first coupling means designed as a spring-loaded catch;

Fig. 7 is a side cross-sectional view of the

Valve plate in an intermediate position without the

Seal carrier;

Fig. 8 is a side cross-sectional view of the

Valve plate in the closed position and an alternative seal carrier with a single

Seal in coupling position; and

9 is a side cross-sectional view of the

Valve plate in the closed position and an alternative seal carrier with a closed Schliessflache in

Coupling position. Figures 1, 2, 3, 4a, 4b, 4c, 4d, 5a, 5b, 6 and 7 show a common, exemplary embodiment of a

according to the invention pendulum valve in different

States, from different views and in

different levels of detail. Therefore, these figures will be described together, in some cases not being discussed again on reference signs and features already explained in previous figures. The valve shown in Figures 1 to 7 is as

Shuttle valve formed. The valve for substantially gas-tight interruption of a flow path F, symbolized in Figure 1 by the arrow F, has a

Valve housing 1. In this valve housing 1 is a

Valve opening 2 for the flow path F provided. The

Valve opening 2 has a substantially circular cross section and extends straight through the valve housing 1 along a rectilinear opening axis 3, shown in Figure 1 by the dashed line 3. Although the valve in the

shown embodiment, two leading into the valve interior openings in the valve housing 1, namely an upper opening and a lower opening, only the lower opening is referred to as the valve opening 2, since this valve opening 2 is closed gas-tight. The

Valve opening 2 is enclosed by a valve seat 4, which is formed by a flat surface around the valve opening 2. The plane of the valve seat 4 is shown in FIG

Embodiment of the opening axis 3 perpendicular

punctured.

In the valve housing 1 is a movable valve disc. 5

arranged, which has a substantially round cross-section. As can be seen in FIG. 1, the valve disk 5 has a strut-like basic structure and a swivel arm, by means of which the valve disk is coupled to the drive 7. At the strut-like basic structure of the valve disk 5, a closing surface 13 is arranged, as in FIG. 3

shown. This closing surface 13 has in the shown

Alignment of the valve downwards, ie towards the valve opening 2. This page is the side of the

Valve plate, which serves to close the valve opening 2, which is why it is referred to below as the closure side 6, shown in Figure 3. The closing surface 13 is a closed, round plate whose cross section is larger than the cross section of the valve opening 3, as can be seen in FIG. By means of the closing surface 13 so the valve opening 2 can be completely covered, wherein the closing surface 13 rests on the valve seat 4, see Figure 3. The closing surface 13 is perpendicular to the direction

Lock side 6 relative to the valve disk 5 within a range of movement 14, shown by the arrow 14, movably mounted on the valve disk 5 resiliently. The spring force acts downwards, ie in the direction of the valve seat 4 and the valve opening 2. By this relative mobility of the

Closure surface 13 relative to the valve disk 5, it is possible that the closing surface 13 in the case of a relative overpressure on the upper side, ie on the side of the valve disk 5 and on the side to which the valve seat 4, prevails on the valve seat 4 is supported. Thus, such a pressure difference acts substantially on the

Closing surface 13 and the valve seat 4, but hardly on the remaining valve disk 5 and the drive 7. By means of the drive 7, shown in Figure 1, the

Valve plate 5 in the form of a transverse movement x, the one

Pivoting movement, about a substantially parallel to the opening axis 3 extending pivot axis 10 transversely to the valve opening 2 and transversely to the opening axis 3 pivotally. In addition, the valve plate 5 in the form of a

Vertical movement y in the direction perpendicular to the closure side 6 and perpendicular to the transverse movement x are moved. The

Vertical movement y is a linear movement substantially parallel to the opening axis 3. The valve disk 5 can be adjusted by means of the drive 7 between an open position O, shown in Figure 1, and a closed position C, shown in Figure 3. In the open position, the valve disk 5 is positioned in a parking section 8 of the valve housing 1 arranged laterally next to the valve opening 2. The

Valve opening 2 and the flow path F are released from the valve disk 5 and the closing surface 13. In the

Open position O is the shutter transversely pivoted out of the region of the valve opening 2, so that the

Opening cross-section is completely released. In the park section 8 is an outward

closed portion in the interior of the valve housing 1, laterally adjacent to the valve opening 2, as shown in Figure 1. For better illustration, the cover of the parking section 8 in FIG. 1 is removed, so that the valve disk is in its position

Open position O is visible in the park section. in the

Operating condition, the parking section is closed. In the closed position, shown in FIG. 3, the valve disk 5 covers the valve opening 2 with the closing surface 13 arranged on the closure side 6.

The valve has an annular seal carrier 30 with a basic shape enclosing the closing surface 13, shown in FIG. 3, which can assume two typical positions, namely a coupling position K, FIG. 3 and FIG. 8, and a parking position P, FIGS. 4d and 5b. In the

Coupling position K is the seal carrier 30 am

Valve plate 5 coupled while in the parking position P of the seal carrier 30 with the parking section 8 of the

Valve housing 1 is coupled.

On the seal carrier 30 acting as a dynamic seal first seal 31 is arranged such that the first seal 31 in the coupling position K and in the

Closed position C the gasket seat 4 gas-tight touches, as shown in Figure 3. In the coupling position K there is a gas-tight connection between the first seal 31 and arranged on the valve disk 5 closing surface 13. For this purpose, the valve sealing means 32 which the

Seal carrier 30 and the closing surface 13 in the

Connect coupling position K gastight. The

Sealing means 32 are arranged on an at least partially radially inwardly facing inner surface 35 of the seal carrier 30 such that the sealing means 32 in the

Coupling position K a radially outward facing

Surround outer surface 9 of the closing surface 13 substantially radially gas-tight, as shown in Figure 3.

As already mentioned, the closing surface 13 is mounted movably on the valve disk 5 within a movement region 14. To the gas-tight connection between the seal carrier 30 and the closing surface 13 in the coupling position K to

ensure the outer surface 9 of the closing surface 13 is dimensioned such that it is at least within a portion of the movement region 14 of the closing surface 13 enclosed by the sealing means 32 in the coupling position (K) gas-tight, as shown in a figure 3.

The said sealant 32 are in

Embodiment of Figures 1 to 7 of a

annular second seal 32 is formed. This second

Seal 32 is on a radially inward facing Inner surface 35 of the seal carrier 30 is disposed and faces inward in the radial direction. The second seal 32

encloses in the coupling position K, the radially outwardly facing outer surface 9 of the closing surface 13 substantially radially gas-tight, as shown in Figure 3.

Instead of this embodiment shown in Figure 3 with two seals 31 and 32, however, it is also possible that the sealing means is formed by the first seal 31, as shown in an alternative embodiment in Figure 8. FIG. 8 corresponds to FIG. 3. In this case, the first seal 31 has a double function. For this purpose, the first seal 31 in an inner edge portion of

arranged at least partially radially inwardly facing inner surface 35 of the seal carrier 30. It touches with a pointing in the axial direction section in the

Closed position C of the valve disc 5, the valve seat 4 in a gas-tight manner, as shown in Figure 8. With the inward pointing at least partially in the radial direction

Part section encloses the first seal 31 in the

Coupling K the at least partially radially outwardly facing outer surface 9 of the closing surface 13 in a substantially radially gas-tight manner, as also shown in Figure 8.

The embodiments according to Figure 3 and Figure 8 are interchangeable, that is, the remaining features described are applicable accordingly. If the seal carrier 30 is in the coupling position K, the valve can be like a conventional shuttle valve

operate. The valve disk 7 is by means of the drive 7 between the open position O, Figure 1, and a

Intermediate position by the transverse movement x swiveling. In the Intermediate position covers the valve disc 5 with the

Lock side 6, the valve opening 2, he is in

arranged spaced opposite to the valve seat 4 and it reduces the valve opening 2, so that the flow path F is partially interrupted. By the vertical movement y of the drive 7, the valve disc 7 between them

Between position and the gas-tight closed position C, Figures 3 and 8, to be adjusted. An advantage of this conventional operating mode, in which the seal carrier 30 is in the coupling position K, is that the valve can be closed in a gas-tight manner. In many applications, however, the complete closure of the valve is only occasionally required because the valve mainly in the so-called

Control mode is located, in which the opening cross-section is reduced or enlarged, but should not be completely closed. In control operation, the first seal 31 in the coupling position K of the seal carrier 30 is constantly exposed to the medium flowing through the valve, chemically and mechanically, so that there would be an increased wear of the first seal 31. Therefore, the invention provides that the seal carrier 30 can be decoupled from the valve disk 5 and coupled to the parking section 8 of the valve housing 1 and occupies the parking position P.

According to the invention, seal carrier 30 is in the

Coupling position K of the seal carrier 30 with a first receptacle 21 of the valve disk 5 on the valve disk 5 and in the parking position P of the seal carrier 30 with a second receptacle 22 of the parking section 8 in the parking section 8 of

Valve housing 1 can be coupled and decoupled again. To the releasable coupling in the first receptacle 21 and in the second To allow receptacle 22, the valve has the respective receptacles 21 and 22 associated coupling means 33 and 34th

By means of first coupling means 33, the seal carrier 30 is releasably connected to the first receptacle 21 of the valve disk 5

coupled and thus in the coupling position K solvable

fixable. By means of second coupling means 34 is the

Seal carrier 30 releasably coupled to the second receptacle 22 of the parking section 8 and thus releasably fixable in the parking position P.

The first receptacle 21 of the valve disk 5 is as

translational first receptacle 21 is formed, as shown in Figures 3, 4a, 4c, 4d, 6 and 7. This means that by a rectilinear movement of the valve disk 5 a

Receiving the seal carrier 30 in the first receptacle 21 takes place. The seal carrier 30 is through the

Vertical movement y in the first shot 21 in the

Coupling position K into and out of the receptacle 21 out of the coupling position K out, see Figures 4c and 4d. In order to hold the seal carrier 30 in the first receptacle 21 and thus in its coupling position K, the first coupling means 33 are provided, which are designed as non-positive first coupling means 33, as illustrated in FIG. The non-positive first coupling means 33 hold the seal carrier 30 in the first receptacle 21 in the coupling position K with a holding force up to

Overcoming the holding force, wherein the holding force by the vertical movement y out of the receptacle 21 for decoupling by means of the drive 7 can be overcome. Im in Figure 6

shown embodiment, these non-positive first coupling means as a spring-loaded catch 33rd

formed, which is arranged in the seal carrier 30. The first receptacle 21 is of a variety of around the Seal carrier 30 disposed on the valve plate 5

Fingers 21 formed, as can be seen in Figure 7, which shows the valve plate 5 without the seal carrier 30. In these fingers 21 concave, inwardly facing recesses 33c are formed, see Figures 6 and 7. In the seal carrier 30 is one of the number of fingers 21 and the

Recesses 33c corresponding number of spring-loaded detents 33. These spring-loaded detents 33 are each composed of a spring 33a and one of the spring 33a acted upon by force ball 33b together. The ball 33b has a shape corresponding to the recess 33c and is pressed by the spring 33a during insertion of the seal carrier 30 into the first receptacle 21, so that the seal carrier 30 frictionally by means of the spring-loaded detents formed non-positive first coupling means 33 in the first receptacle 21st is fixed. Thus, the seal carrier 30 is in the coupling position K. The decoupling of the seal carrier 30 from the first receptacle 21 is illustrated in Figures 4c and 4d. The held by means of the second coupling means 34 in the parking section 8

Seal carrier 30 is formed by the vertical adjustment of the valve disk 5 by means of the upward

Vertical movement y, represented by the arrow in Figure 4d, pulled by the drive 7 from the first receptacle 21 by the holding force of the spring-loaded detents 33 is overcome. This is illustrated by the transition from FIG. 4c to FIG. 4d. The coupling of the seal carrier in the coupling position K takes place in reverse order. By the described first receptacle 21 and the first

Coupling means 33, it is possible, the - on im

Below explained manner - on the valve housing. 1

held seal carrier 30 by the vertical movement y of the drive 7 from the valve disk 5 from his

Coupling position K to solve. In order to fix the seal carrier 30 on the valve housing in the protected parking section 8 releasably in its parking position P, the second receptacle 22 and the second

Coupling means 34, shown in Figures 4a to 5c,

intended .

In the parking section 8 of the valve housing 1, a protective surface 12 is formed, which corresponds substantially with the shape of the first seal 31 of the seal carrier 30. This protective surface 12 is upwards in the direction of

Lock side 6 facing the closing surface 13,

annular groove formed in the park portion 8 of the valve housing 1, as shown in Figure 2 can be seen. In Figure 2, the cover of the parking section 8 is largely removed, whereby the lying inside the valve protective surface 12 can be seen.

In the parking section 8, in addition, the second receptacle 22 is formed. This second receptacle 22, by means of which the seal carrier 30 can be received in the parking section, also forms part of a second coupling means 34 due to its advantageous embodiment. Four feed-ins 42 are formed around the protective surface 12 in the parking section 8, as in FIGS. 2, 5a and 5b recognizable. These four leads 42 each pass into a slot 41 which extends along the direction of the transverse movement x, see FIG. The introducers 42 functionally form the second receptacle 22.

Corresponding to the four inlets 42 and slots 41 four buttons 43 are arranged on the seal carrier, see Figures 4a, 5a and 5b. The buttons 43 of the seal carrier 30 can be inserted by the vertical movement y of the drive 7 in the introductions 42. The insertion is made by the transition from Figure 4a to Figure 4b and Figure 4b to Figure 4c. Are the buttons 43 of the seal carrier 30 by the vertical movement y of the

Drive 7 introduced into the introducer 42, Figures 4c and 5a, these buttons 43 by means of the drive 7 by the transverse movement x in the slot 41 and thus in a

Undercut are led, as by the

Transition from Figure 5a to Figure 5b shown. In this

Undercut area, the seal carrier 30 in

Direction of vertical movement y held. Will the

Drive 7 now adjusted in the direction of the vertical movement y, as described above and shown in Figure 4d, the

Seal carrier 30 do not join this vertical movement y, but remains fixed in the second receptacle 22. Thus, the seal carrier 30 releases from the valve disk 5 and from the first receptacle 21, since the non-positive first

Coupling 33 solve the connection between the seal carrier 30 and valve disc 5. The state in which the seal carrier 30 is in this undercut area

is the parking position P.

In other words, the second coupling means 34 are formed as Baj onettverschluss with four slots 41, each having an introduction 42, in the parking section 8 and four buttons 43 on the seal carrier 30 is formed. Of the

Baj onettverschluss is arranged and designed such that the four buttons 43 can be introduced by the vertical movement y in the introduction 42 and by the transverse movement x in the four slots 41 can be guided. The seal carrier 30 can thus be brought into the parking position P. The second

Receipt 22 of the parking section 8 is thus formed such that the seal carrier 30 at least partially by the vertical movement y in the second receptacle 22 in the

Parking position P in and out of the second receptacle 22 from the parking position (P) can be guided out. The coupling and Uncoupling the seal carrier 30 in and out of the

Coupling position K and parking position P takes place at least partially by the vertical movement y and by the

Transverse movement x. The first coupling means 33, the first receptacle 21, the second coupling means 34 and the second

Receiving 22 are thus formed in the illustrated embodiment such that the coupling of the seal carrier 30 in the coupling position K and the parking position P and the decoupling done by moving the valve disk 5 by means of the drive 7.

In the parking position P of the seal carrier 30, the first seal 31 is surrounded by the protective surface 12 for protecting the first seal 31 in front of the medium flowing along the flow path F. Thus, the first seal 31 is protected in the parking position P from chemical and abrasive and other mechanical influences. The valve can now be operated in this mode in the so-called control mode, wherein the valve disc 5 with the closing surface 13 already a substantial closing, but not completely gas-tight closing of the valve opening 2 by adjusting the

Valve plate 5 by the transverse movement x and the

Vertical movement y by means of the drive 7 allows. In FIG. 7, the valve disk 5 is shown without the seal carrier 30, which is located in parking position P in the parking section 8. As can be seen, even without the seal carrier 30 closing the valve opening 2 by the on the

Valve seat 4 resting Schliessflache 13 possible, but is not a gas-tight seal due to the missing

Guaranteed seal. However, this is not necessary for a large part of the service life of the valve in many applications. The valve shown also has an integrated control device 50 for the drive 7, shown in Figure 1. This control device 50 is so in communication with the drive 7 and is designed such that the valve in a first mode and a second mode

is operable. In the first mode is the

Seal carrier 30 is arranged in the parking position P and the valve disk 5 is between the open position O and an intermediate position in which the valve disk 5 with the

Closure 6, the valve opening 2 at least partially covered, is arranged in spaced opposite to the valve seat 4 and in which the valve disc 5 the

Valve opening 2 reduced and the flow path (F) partially interrupts, adjustable. In the second operating mode, the seal carrier 30 is arranged in the coupling position K and the valve disk 5 is adjustable between the open position O and the closed position C. The coupling of the

Seal carrier 30 in the coupling position K and the

Parking position P and the decoupling, so the transition from one mode to another, is done by driving the drive 7 for adjusting the valve disk 5 in the manner described above.

The in Figures 1 to 7 and Figure 8

illustrated and explained concrete

Embodiments serve merely to exemplify the invention with reference to schematic

Representations. Of course, the limited

Invention not on these embodiments and their combinations of features. For example, within the scope of the invention it is also possible for the closure surface 13 to be arranged on the seal carrier 30 and for there to be direct gastight contact between the first seal 31 and the closure surface 13. The seal carrier 30 points in In this case, in particular a plate-shaped cross-section. Such an embodiment is shown in FIG. In this case, a second seal can be dispensed with. The remaining features correspond to those of the preceding embodiments. Moreover, it is possible that

functionally to be understood features in the form of a single element having these functional characteristics to implement, and vice versa. Thus, for example, it is possible for the first receptacle 21 of the valve disk 5 to be formed by the outer surface 9 of the closing surface 13, which faces at least partially radially outward, and the

non-positive first coupling means 33 through the

Sealant 31 or 32, in particular by the second seal 32 from the first embodiment according to Figures 1 to 7 or the first seal 31 from the second

Embodiment according to Figure 8, are formed. The seals 31 and 32 are elastic in the radial direction, so that these sealing means 31 and 32, the outer surface 9 of the closing surface 13 in the coupling position K elastic enclose such that the seal carrier 30 releasably in the

Coupling position K is fixable. In this case, the first coupling means 33 described in Figure 6 and the first receptacle 21 can be omitted. The remaining features can remain unchanged.

Claims

claims

1. valve for substantially gas-tight interrupting a

Fliesswegs (F), with

A valve housing (1),

A valve opening (2) in the valve housing (1) for the flow path (F) with an opening axis (3),

A valve seat (4) which opens the valve (2)

surrounds,

A valve disk (5) with a closure side (6),

• at least one drive (7), by means of which the

Valve disc (5) between

- An open position (O), in which the valve disc

(5) is positioned in a parking section (8) of the valve housing (1) arranged laterally next to the valve opening (2) and releases the valve opening (2) and the flow path (F), and

- A closed position (C), in which

• the valve plate (5) with one on the

Lock side (6) arranged Schliessflache

(13) covers the valve opening (2),

A first seal (31) gas-tightly touches the valve seat (4) and

• the valve disc (5) closes the valve opening (2) in a gastight manner and interrupts the flow path (F), by means of an at least partially transverse to the

Opening axis (3) transverse movement (x)

is pivotable or movable,

marked by

a seal carrier (30), the

• in a coupling position (K) of the seal carrier (30) with a first receptacle (21) of the valve disk (5) on the valve disk (5) and In a parking position (P) of the seal carrier (30) with a second receptacle (22) of the parking section (8) in the parking section (8) of the valve housing (1)

can be coupled and decoupled, where

• the first seal (31) is arranged on the seal carrier (30) such that the first seal (31) is in the coupling position (K) and in the

Closed position (C) the valve seat (4) gas-tight touched, wherein at least in the coupling position (K) and in the closed position (C) a gas-tight

Connection between the first seal (31) and the closing surface (13),

• The valve has first coupling means (33), by means of which the seal carrier (30) releasably coupled to the first receptacle (21) of the valve disc (5) and thus in the coupling position (K) can be fixed, and

The valve has second coupling means (34),

by means of which the seal carrier (30) can be detachably coupled to the second receptacle (22) of the parking section (8) and thus can be fixed in the parking position (P).

2. Valve according to claim 1, wherein

the first coupling means (33), the first receptacle (21), the second coupling means (34) and the second receptacle (22) are formed such that the coupling of the

Seal carrier (30) in the coupling position (K) and the parking position (P) and the decoupling by moving the valve disk (5) by means of the drive (7).

3. Valve according to claim 2, wherein

• The drive (7) is designed such that the

Valve plate (5) at least in the open position (O) in Shape of a vertical movement (y) in the direction perpendicular to the closure side (6) is movable and

• The coupling and decoupling of the seal carrier (30) in and out of the coupling position (K) and parking position (P) at least partially by the vertical movement (y).

4. Valve according to claim 3, wherein

the second receptacle (22) of the parking section (8) is designed such that the seal carrier (30) at least partially into the second position (P) by the vertical movement (y) into the parking position (P) and from the second receptacle (22 ) can be guided out of the parking position (P).

5. Valve according to claim 4, wherein

the second coupling means (34) as a Baj onettverschluss with at least one slot (41) having an introduction (42), and at least one knob (43) are formed, wherein the Baj onettverschluss arranged and formed such that the knob (43 ) through the

Vertical movement (y) in the introduction (42) insertable and by the transverse movement (x) in the slot (41) and thus in the parking position (P) is feasible.

6. Valve according to one of claims 3 to 5, wherein

the first receptacle (21) of the valve disk (5) as

translational first receptacle (21) is formed, wherein the seal carrier (30) through the

Vertical movement (y) in the first receptacle (21) in the coupling position (K) and out of the receptacle (21) from the coupling position (K) can be guided out.

7. Valve according to claim 6, wherein

the first coupling means (33) are formed as non-positive first coupling means (33), which the

Seal carrier (30) in the first receptacle (21) in the coupling position (K) with a holding force to the

Overcoming the holding force, wherein the holding force by the vertical movement (y) from the receptacle (21) out for decoupling by means of the drive (7)

is surmountable.

8. Valve according to claim 7, wherein

the non-positive first coupling means as

spring-loaded detent (33) which is arranged in the seal carrier (30) or in the first receptacle (21),

is trained.

9. Valve according to one of claims 1 to 8, wherein

• the closing surface (13) is arranged on the seal carrier (30) and

• a gas-tight contact between the first seal

(31) and the closing surface (13).

10. Valve according to one of claims 1 to 8, wherein

The closing surface (13) on the valve plate (5)

is arranged and

• the valve has sealing means (31; 32) connecting the seal carrier (30) and the closure surface (13) in the coupling position (K) and in the closed position

(C) gas-tight connect.

11. A valve according to claim 10, wherein

• the sealing means (31; 32) on at least one

partially radially inwardly facing inner surface (35) of the seal carrier (30) are arranged such that the sealing means (31; 32) in the coupling position (K) at least partially radially outward

pointing outer surface (9) of the closing surface (13) enclose substantially radially gas-tight.

12. Valve according to claim 11, wherein

• the closing surface (13) in the direction perpendicular to

Closure side (6) relative to the valve plate (5) and in the coupling position (K) relative to the seal carrier

(30) within a movement range (14) movable on the valve plate (5) - in particular spring - is mounted and

• the outer surface (9) of the closing surface (13) is dimensioned such that it at least within one

Part of the range of movement (14) of

Closing surface (13) of the sealing means (31; 32) in the coupling position (K) is enclosed gas-tight.

13. Valve according to claim 7, wherein

The closing surface (13) on the valve plate (5)

is arranged

• the valve has sealing means (31; 32) connecting the seal support (30) and the closure surface (13) in the

Connect the coupling position (K) and in the closed position (C) in a gastight manner and

• the sealing means (31; 32) on at least one

partially radially inwardly facing inner surface (35) of the seal carrier (30) are arranged such that the sealing means (31; 32) in the coupling position (K) at least partially radially outward pointing outer surface (9) of the closing surface (13) enclosing substantially radially gas-tight,

• The first receptacle (21) of the valve disc (5) through the at least partially radially outwardly facing

Outer surface (9) of the closing surface (13) is formed, and

• the force-locking first coupling means (33) are formed by the sealing means (31; 32) which are elastic in the radial direction, wherein the

Sealing means (31; 32) the outer surface (9) of

Locking surface (13) in the coupling position (K) so elastically enclose that the seal carrier (30) is detachably fixable in the coupling position (K).

14. Valve according to one of claims 10 to 13, wherein the

sealant

From a second seal (32),

- Which is arranged on an at least partially radially inwardly facing inner surface (35) of the seal carrier (30) and at least partially inwards in

Radial direction points, and

- In the coupling position (K) at least one

partially radially outwardly facing outer surface (9) of the closing surface (13) encloses substantially radially gas-tight,

or

From the first seal (31),

- Is arranged in an inner edge portion of an at least partially radially inwardly facing inner surface (35) of the seal carrier (30),

- The one with an axially facing

Part section in the closed position (C) of the valve disc (5) the gasket seat (4) touched gas-tight and - those with an inside at least partially in

In the coupling position (K), an at least partially radially outwardly facing outer surface (9) of the

Closure surface (13) substantially radially

encloses gas-tight,

be formed.

15. Valve according to one of claims 3 to 8 or 13, wherein the valve as one of the following valve types

is trained:

• shuttle valve, where

the valve opening (2) and the valve disk (5) have a substantially round cross section, the seal carrier (30) has an annular or plate-shaped cross section,

- The transverse movement (x) a pivoting movement about a substantially parallel to the opening axis (3)

extending pivot axis (10),

- The vertical movement (y) a linear movement in the

Is substantially parallel to the opening axis (3),

- The valve plate (7) by means of the drive (7)

between the open position (O) and one

Intermediate position, in which the valve plate (5) with the closure side (6) at least partially covers the valve opening (2), in spaced

Opposite to the valve seat (4) is arranged and in which the valve plate (5) reduces the valve opening (2) and the flow path (F) partially

interrupts, by the transverse movement (x) is pivotal and

- The valve plate (7) by means of the drive (7)

between the intermediate position and the Closed position (C) by the vertical movement (y) is adjustable;

• gate valve, where

the valve opening (2) and the valve disk (5) have a substantially rectangular cross-section,

- The seal carrier (30) has a rectangular

frame-like or rectangular closed

Has cross section,

the transverse movement (x) is a linear movement along a thrust axis extending substantially perpendicular to the opening axis (3),

- The vertical movement (y) a linear movement in the

Is substantially parallel to the opening axis (3),

- The valve plate (7) by means of the drive (7)

between the open position (O) and one

interrupts, by the transverse movement (x) is displaceable and

- The valve plate (7) by means of the drive (7)

between the intermediate position and the

Closed position (C) by the vertical movement (y) is adjustable.

16. Valve according to one of claims 1 to 15, with

a control device (50), which is so in communication with the drive (7) and is configured such that the valve in a first mode of operation and a second mode of operation is operable, wherein • In the first mode of the seal carrier (30) in the parking position (P) is arranged and the

Valve disc (5) between the open position (O) and an intermediate position in which the valve plate (5) with the closure side (6) at least partially covers the valve opening (2), in spaced

interrupts, is adjustable and

• In the second mode of operation, the seal carrier (30) is arranged in the coupling position (K) and the

Valve plate (5) between the open position (O) and the closed position (C) is adjustable.

17. Valve according to one of claims 1 to 16, wherein

in the parking section (8) a protective surface (12) is formed such that the first seal (31) in the

Parking position (P) of the seal carrier (30) of the

Protective surface (12) - to protect the first seal (31) before the along the flow path (F) flowing medium - is surrounded.