EP2461040A1 - Pompe à vide et la connexion de l'arbre avec le piston rotatif - Google Patents

Pompe à vide et la connexion de l'arbre avec le piston rotatif Download PDF

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Publication number
EP2461040A1
EP2461040A1 EP11008599A EP11008599A EP2461040A1 EP 2461040 A1 EP2461040 A1 EP 2461040A1 EP 11008599 A EP11008599 A EP 11008599A EP 11008599 A EP11008599 A EP 11008599A EP 2461040 A1 EP2461040 A1 EP 2461040A1
Authority
EP
European Patent Office
Prior art keywords
shaft
piston
vacuum pump
pump according
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11008599A
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German (de)
English (en)
Other versions
EP2461040B1 (fr
Inventor
Christopher Kobus
Sebastian Oberbeck
Jürgen Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2461040A1 publication Critical patent/EP2461040A1/fr
Application granted granted Critical
Publication of EP2461040B1 publication Critical patent/EP2461040B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C29/0071—Couplings between rotors and input or output shafts acting by interengaging or mating parts, i.e. positive coupling of rotor and shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel

Definitions

  • the invention relates to a vacuum pump with the features of the preamble of the first claim.
  • two-shaft vacuum pumps with contactlessly rotating pistons are an indispensable component of the vacuum system.
  • These may be single-stage or multi-stage vacuum pumps whose pistons have, for example, Roots or claw profiles.
  • Roots or claw profiles For multi-stage pumps, it is quite common to select different profiles for different pumping levels.
  • shaft and piston One design feature of such vacuum pumps is the connection of shaft and piston. Basically, it is possible to manufacture shaft and piston in one piece, but this requires disadvantages in the housing design, for example, tight manufacturing tolerances. Therefore, shaft and piston are often made as separate components that must then be fastened together.
  • An example of a fastening of a piston on a shaft represents the EP 0 368 124 A1 in front.
  • the basic idea here is to push through the shaft through a bore in the piston and to achieve a clamping action by clamping conical surfaces in the direction of the shaft axis.
  • the disadvantage of this is that assembly and disassembly are difficult and expensive, especially in a multi-stage pumps.
  • the attachment is based solely on frictional engagement, so that even the smallest assembly errors can cause a rotation of the piston during operation. This can lead to a mutual contact of the pistons in one stage.
  • the piston has a bore through which the shaft is inserted.
  • Shaft and piston each have grooves that are positioned congruent.
  • a positive locking element is arranged in the resulting space, which extends over the shaft and piston.
  • the groove must be guided on the piston side to at least one of the end faces, so that the positive-locking element can be inserted.
  • Disadvantage of this solution is the complicated and therefore expensive production. This ultimately results from the fact that the piston-side groove and the piston-side profile must be aligned very precisely with each other.
  • a piston recess is formed as a channel beginning on the piston profile surface, a first section of a form-fitting element is located in a shaft recess and a second section of the form-fitting element forms a positive connection with the channel in the direction of the shaft axis and the shaft circumference.
  • the vacuum pump can be designed as a single-stage or multi-stage vacuum pump with non-contact rolling-off pistons, for example with Roots, screws or claw profile. It can also have gas inlets in more than one of the stages.
  • the piston can be made in one or more parts.
  • the vacuum pump may have more than two shafts.
  • the form-locking element forms a positive connection in the direction of the shaft axis and shaft circumference. This allows a safe and highly accurate positioning of the piston in these two directions. This is made possible by the channel, through which the positive-locking element can be brought into position.
  • the high-precision manufacturing of groove with respect to the piston profile is eliminated, so that the production is easier and less expensive.
  • the improved positioning of the piston simplifies assembly and disassembly. It also allows to provide narrower gaps between the housing of the vacuum pump and the piston or between the pistons with each other. This improves the performance of the vacuum pump as undesirable backflow through this column of discharge and suction sides is reduced.
  • the cross section of the channel is basically not limited, but is advantageously carried out round, so that the channel can be designed inexpensively as a bore.
  • the first section preferably has a maximum diameter which allows the interlocking element to be moved through the channel.
  • a securing element which positions and fixes the positive-locking element in the channel.
  • This allows a free design of the form-fitting element with a view to the introduction of force from the piston in the form-locking element or positive-locking element in the shaft.
  • Such a design comprises flat surfaces of form-fitting element and shaft.
  • a plurality of pistons are arranged along the shaft axis on the shaft. The connection makes it possible to adjust the axial gap between the housing of the vacuum pump and piston by the simple axial fixability of the piston very accurately. It is also very easy to position the pistons with very little angular offset from each other, since both the shaft recesses to each other and piston profile and channel can be made precisely oriented to each other.
  • a two-shaft vacuum pump with non-contact successive rolling piston shows Fig. 1 in a cut in the plane of the waves.
  • first shaft 4 and second shaft 6 are rotatably supported in bearings 10 and 12 and 14 and 16. As a rule, these are bearings with grease or oil circulation lubrication.
  • a synchronizing gear 22 is disposed within a gear chamber 20 on the shaft. It cooperates with a second synchronizing gear 24 on the second shaft and puts them into rotation at the same speed and solid phase but reversed sense of rotation.
  • the vacuum pump has an inlet 26 through which gas is sucked into the first pumping stage 30. There act a first, connected to the first shaft piston 40 and a second, connected to the second shaft piston 42 gas-promoting together. Between housing and piston, a sealing gap 38 is formed, between the two pistons of a pumping step, a sealing gap 38 '. The conductance of these sealing gaps determines the return flow against the conveying direction and thus the vacuum technical properties.
  • Gas is expelled from the first pumping stage and transferred by means of a first transfer channel 52 to the second pumping stage 32. In this act the pistons 44 and 46 together. Through a second transfer channel 54, the gas finally passes into the third pumping stage 34, where it is conveyed by the pistons 48 and 50 and finally expelled via the outlet 28 from the vacuum pump.
  • the number of pumping stages depends on the objective of the vacuum pump, for example pumping speed and, in particular, achievable final pressure.
  • the connection of piston and shaft described below can be used in single-stage and multi-stage vacuum pumps, but brings additional benefits in several stages. In several stages, it is important to be able to adjust the gap between the piston and the housing of the vacuum pump as closely as possible even with thermal expansion of shaft and piston, for which exact positioning is important. The connection described below allows this because it allows a very good axial positioning of the piston.
  • FIG. 2 is a section shown perpendicular to the shaft axis 100, while Fig. 3 the section along the line II 'shows. A section along line II-II 'finally shows Fig. 4 ,
  • the piston 40 has a central hole 58 in which the shaft 4 is received.
  • the piston is designed according to a Wälzkolbengeometrie and in the Fig. 2 shown with an approximately eight-shaped cross-section.
  • the piston profile surface 66 limits the piston.
  • An excellent area of the piston is the piston head 68 which forms the sealing gap along with the housing during one revolution on one part of the track and on another part of the track together with the cooperating piston.
  • a channel 60 is provided which extends to the central hole. It can advantageously be designed as a bore and have a thread 64, which is in engagement with a mating thread on a form-locking element 70.
  • the positive-locking element extends with a second section 74 in the channel and with a first section 72 it extends into the shaft recess 62.
  • the second section forms a positive connection with the channel both in the direction of the shaft axis 100 and in the circumferential direction 102, as shown in FIGS FIGS. 2 and 3 is apparent.
  • In the direction of the shaft axis of the first portion forms a frictional engagement with the shaft recess, whereby the piston is axially fixed on the shaft.
  • the extension 72 of the shaft recess in the direction of the shaft axis is greater than that of the first section, which has an approximately circular cross-section.
  • the form-fitting element fills the channel up to the piston head, so that the dead volume contained in the channel between positive-locking element and piston profile surface is kept small.
  • Fig. 5 to 8 show a second embodiment. It shows Fig. 5 a section perpendicular to the shaft axis 100 by the piston 40 and shaft 4. A section along the line III-III 'is in Fig. 6 stated while Fig. 7 the cut after the Line IV-IV 'off Fig. 6 shows. Fig. 8 Finally, a perspective and schematic representation of the positive-locking element itself.
  • Piston 40 and shaft 4 are designed as in the first embodiment.
  • the piston has a Wälzkolbengeometrie with a roughly mecanicförmigen cross-section and is limited by the piston profile surface 66 with respect to the suction chamber.
  • a channel 60 begins, which is preferably designed as a bore with a channel axis 104 and an internal thread 64.
  • a form-locking element 80 has two sections, wherein the first section 82 forms a positive connection with a shaft recess 62.
  • the second section 84 is designed and arranged in the channel so that it forms a positive connection in the circumferential direction 102 and the direction of the shaft axis 100 with this.
  • a securing element 78 is arranged in the channel.
  • This securing element has a thread which is in engagement with the thread of the channel.
  • a biasing force is generated on the positive-locking element, which presses this against the shaft.
  • the shaft recess has an extension 76 in the direction of the shaft axis, which is greater than that of the first portion, so that the piston is displaceable on the shaft before generating the biasing force.
  • the first portion forms a positive connection in the circumferential direction 102.
  • the securing element also prevents the displacement of the form-fitting element in the channel by the centrifugal forces occurring during rotation of the piston.
  • the securing element largely fills the channel up to the piston head, so that the harmful volume is kept small, in which gas is trapped and transported from the discharge side to the suction side.
  • FIG. 8 The perspective view in Fig. 8 explains further details of the positive-locking element according to the second embodiment.
  • the form-fitting element has planar contact surfaces 94 and 94 ', which cooperate with the shaft recess in the mounted state. It is advantageous to align the contact surface parallel to a plane spanned by channel axis 104 and shaft direction 100 and parallel to one another. This results in a planar contact between the first portion and shaft recess, wherein the acting forces are substantially perpendicular to the plane and act in the circumferential direction 102.
  • the surface pressure on the material is significantly lower compared to a line contact, which improves the long-term stability of the connection, since plastic deformation under continuous load is prevented.
  • a chamfer 92 on a lower end face 96 facilitates assembly, since tilting is prevented.
  • the lower end face forms a frictional engagement with the shaft recess in the mounted state.
  • the contact surfaces provide a positive connection in the circumferential direction and a frictional connection in the shaft direction.
  • the contact surface 94 and 94 ' may be flat and form an acute angle with each other.
  • the assembly is easier. If the vacuum technical requirements allow a low dynamic load of the connection of shaft and piston, the assembly advantage can outweigh the pressure disadvantage.
  • those surfaces of the shaft recess which contact the contact surfaces in the mounted state are designed parallel to these. It forms in the assembled state, a frictional engagement, which fixes the positive-locking element and above the piston in the axial direction.
  • the second section 84 is designed as a cylindrical body.
  • An upper end face 86 is in the mounted state with the securing element in contact.
  • a bore with an internal thread 88 is provided, which is accessible through the channel.
  • the interlocking element can be very easily mounted and removed by means of a standing with this internal thread engaging tool and removed from the channel. Both manufacturing and separating the connection of shaft and piston are considerably simplified.
  • a chamfer 90 between the upper face and cylinder supports this, in that it prevents jamming and jamming in the channel, in particular during disassembly.
  • the first section 82 may undergo further embodiments.
  • So cone top, truncated cone, wedge and stump are favorable designs.
  • a conical or wedge tip can be used to leave a plastic impression in the bottom of the shaft recess on the contact pressure, which prevents axial displacement by positive engagement.
  • a cylindrical or frusto-conical configuration of the positive connection can also by the design according to Fig. 9 be created.
  • the lower end face 96 of the first section 82 of the positive-locking element 80 has a cutting edge 98. By biasing the positive-locking element in the channel, this cutting edge cuts into the shaft recess and thus forms a positive connection.
  • the channel preferably begins in the region of the piston head. It may be so offset from the point with the greatest distance to the shaft axis, that it is not in the narrowest region of the sealing gap to lie comes. This reduces the influence on the vacuum properties of the piston.
  • Both embodiments are advantageous for multi-stage vacuum pumps. Due to manufacturing tolerances, an angular offset between the pistons on a shaft may occur in the prior art, i. the pistons 40, 44 and 48 are mutually twisted mounted on the shaft. This worsens the column.
  • the connection according to the embodiments prevents this, since a channel, in particular a bore can be positioned with very small tolerances and backlash relative to the piston profile. The same applies to a plurality of mutually axially offset shaft recesses.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
EP11008599.0A 2010-11-13 2011-10-27 Pompe à vide et la connexion de l'arbre avec le piston rotatif Active EP2461040B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201010051316 DE102010051316A1 (de) 2010-11-13 2010-11-13 Vakuumpumpe

Publications (2)

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EP2461040A1 true EP2461040A1 (fr) 2012-06-06
EP2461040B1 EP2461040B1 (fr) 2016-01-06

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ID=45540709

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EP11008599.0A Active EP2461040B1 (fr) 2010-11-13 2011-10-27 Pompe à vide et la connexion de l'arbre avec le piston rotatif

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EP (1) EP2461040B1 (fr)
DE (1) DE102010051316A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019039395A (ja) * 2017-08-25 2019-03-14 樫山工業株式会社 多段ルーツポンプ
CN111692092A (zh) * 2020-05-25 2020-09-22 温州市格东机械有限公司 凸轮转子泵
US11320036B2 (en) 2019-09-23 2022-05-03 Ovg Vacuum Technology (Shanghai) Co., Ltd Transmission structure of motor connection of roots pump
US11339783B2 (en) 2019-09-23 2022-05-24 OVG Vacuum Technology (Shanghai) Co., Ltd. Pump housing structure of three-axis multi-stage Roots pump
US11441564B2 (en) 2019-09-23 2022-09-13 OVG Vacuum Technology (Shanghai) Co., Ltd. Driving structure of three-axis multi-stage roots pump
US11608829B2 (en) 2019-10-10 2023-03-21 OVG Vacuum Technology (Shanghai) Co., Ltd. Structure of rotor connection of multi-axial multi-stage roots pump

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018210430A1 (de) * 2018-06-26 2020-01-02 Leybold Gmbh Verdränger, Rotor und Vorrichtung einer Vakuumpumpe sowie Verfahren zur Herstellung eines Verdrängers und eines Rotors einer Vakuumpumpe

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4142811A (en) * 1976-05-31 1979-03-06 Burnham J Kellogg One-piece locking and releasing hub actuated with thrust-multiplying screw assembly
SU724820A1 (ru) * 1978-09-06 1980-03-30 Orenbojm Boris D Шпоночное соединение
EP0368124A1 (fr) 1988-11-07 1990-05-16 Alcatel Cit Pompe roots multiétagée et procédé de montage d'une telle pompe
JPH03290082A (ja) * 1990-04-07 1991-12-19 Shuichi Kitamura 非接触回転機械の羽根と回転中心体との結合方法

Family Cites Families (5)

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Publication number Priority date Publication date Assignee Title
DE872815C (de) * 1950-04-22 1953-04-09 Gen Motors Corp Drehkolben-Geblaese oder -Pumpe mit zahnradartig ineinandergreifenden Kolbentrommeln
JPH0121192Y2 (fr) * 1985-06-07 1989-06-23
US4767233A (en) * 1987-03-20 1988-08-30 Dresser Industries, Inc. Impeller mounting apparatus
JPH06280772A (ja) * 1993-03-26 1994-10-04 Honda Motor Co Ltd ロータおよびその製造方法
US5997012A (en) * 1996-06-27 1999-12-07 Brian; Frank J. Differential thread control of chuck gripping of work

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4142811A (en) * 1976-05-31 1979-03-06 Burnham J Kellogg One-piece locking and releasing hub actuated with thrust-multiplying screw assembly
SU724820A1 (ru) * 1978-09-06 1980-03-30 Orenbojm Boris D Шпоночное соединение
EP0368124A1 (fr) 1988-11-07 1990-05-16 Alcatel Cit Pompe roots multiétagée et procédé de montage d'une telle pompe
JPH03290082A (ja) * 1990-04-07 1991-12-19 Shuichi Kitamura 非接触回転機械の羽根と回転中心体との結合方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019039395A (ja) * 2017-08-25 2019-03-14 樫山工業株式会社 多段ルーツポンプ
US11320036B2 (en) 2019-09-23 2022-05-03 Ovg Vacuum Technology (Shanghai) Co., Ltd Transmission structure of motor connection of roots pump
US11339783B2 (en) 2019-09-23 2022-05-24 OVG Vacuum Technology (Shanghai) Co., Ltd. Pump housing structure of three-axis multi-stage Roots pump
US11441564B2 (en) 2019-09-23 2022-09-13 OVG Vacuum Technology (Shanghai) Co., Ltd. Driving structure of three-axis multi-stage roots pump
US11608829B2 (en) 2019-10-10 2023-03-21 OVG Vacuum Technology (Shanghai) Co., Ltd. Structure of rotor connection of multi-axial multi-stage roots pump
CN111692092A (zh) * 2020-05-25 2020-09-22 温州市格东机械有限公司 凸轮转子泵
CN111692092B (zh) * 2020-05-25 2022-11-29 温州市格东机械有限公司 凸轮转子泵

Also Published As

Publication number Publication date
EP2461040B1 (fr) 2016-01-06
DE102010051316A1 (de) 2012-05-16

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