EP2458222A3 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

Info

Publication number
EP2458222A3
EP2458222A3 EP11008602.2A EP11008602A EP2458222A3 EP 2458222 A3 EP2458222 A3 EP 2458222A3 EP 11008602 A EP11008602 A EP 11008602A EP 2458222 A3 EP2458222 A3 EP 2458222A3
Authority
EP
European Patent Office
Prior art keywords
turbomolecular pump
discs
part discs
abutting edges
support ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11008602.2A
Other languages
English (en)
French (fr)
Other versions
EP2458222B1 (de
EP2458222A2 (de
Inventor
Michael Schweighöfer
Herbert Stammler
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2458222A2 publication Critical patent/EP2458222A2/de
Publication of EP2458222A3 publication Critical patent/EP2458222A3/de
Application granted granted Critical
Publication of EP2458222B1 publication Critical patent/EP2458222B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Turbomolekularpumpe (1) mit einem Rotor (10), welcher einen Schaufelkranz aufweist, einer Statorscheibe (14, 16, 18), welche einen Tragring (50, 60), einen mit diesem verbundenen Schaufelkranz und zwei Teilscheiben (140, 142) umfasst, wobei jede Teilscheibe einen Tragringabschnitt (52, 56, 62, 66; 62'; 62"; 62"', 66"'; 62"", 66"") und eine an diesem angeordnete Stoßkante (54, 58, 64, 68, 70, 72, 74, 76; 64', 74'; 64", 74"; 64"', 74"') aufweist und sich die Stoßkanten der Teilscheiben berühren. Um ein Überlappen der Teilscheiben zu verhindern, wird vorgeschlagen, dass die Stoßkanten der Teilscheiben derart geformt sind, dass sie wenigstens abschnittsweise gekreuzt aufeinanderstoßen, so dass ein Überlappen der Teilscheiben verhindert wird.
EP11008602.2A 2010-11-26 2011-10-27 Turbomolekularpumpe Active EP2458222B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010052660A DE102010052660A1 (de) 2010-11-26 2010-11-26 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP2458222A2 EP2458222A2 (de) 2012-05-30
EP2458222A3 true EP2458222A3 (de) 2016-03-09
EP2458222B1 EP2458222B1 (de) 2017-09-27

Family

ID=45531123

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11008602.2A Active EP2458222B1 (de) 2010-11-26 2011-10-27 Turbomolekularpumpe

Country Status (2)

Country Link
EP (1) EP2458222B1 (de)
DE (1) DE102010052660A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6236806B2 (ja) * 2013-03-07 2017-11-29 株式会社島津製作所 真空ポンプ
JP6241223B2 (ja) * 2013-03-13 2017-12-06 株式会社島津製作所 真空ポンプ
DE102013110251A1 (de) 2013-09-17 2015-03-19 Pfeiffer Vacuum Gmbh Anordnung mit einer Vakuumpumpe sowie Verfahren zur Kompensation eines Magnetfeldes wenigstens eines in einer Vakuumpumpe angeordneten, ein magnetisches Störfeld erzeugenden Bauteiles
DE102013022539B3 (de) 2013-11-06 2022-04-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102013112185B4 (de) 2013-11-06 2022-04-14 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Vakuumpumpe mit wenigstens einer Turbomolekularpumpstufe
DE102013114576A1 (de) * 2013-12-19 2015-06-25 Pfeiffer Vacuum Gmbh Statorscheibe
DE102014100207B4 (de) * 2014-01-09 2020-07-09 Pfeiffer Vacuum Gmbh Statorscheibe
EP3051140B1 (de) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Statorscheibe für eine vakuumpumpe
EP3916235B1 (de) * 2020-05-27 2023-04-26 Pfeiffer Vacuum Technology AG Verfahren zur herstellung einer vakuumpumpe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0967395A2 (de) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Turbomolekularpumpe
JP2004353652A (ja) * 2003-05-01 2004-12-16 Osaka Vacuum Ltd 分子ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0967395A2 (de) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Turbomolekularpumpe
JP2004353652A (ja) * 2003-05-01 2004-12-16 Osaka Vacuum Ltd 分子ポンプ

Also Published As

Publication number Publication date
DE102010052660A1 (de) 2012-05-31
EP2458222B1 (de) 2017-09-27
EP2458222A2 (de) 2012-05-30

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