EP2458222A3 - Turbomolecular pump - Google Patents

Turbomolecular pump Download PDF

Info

Publication number
EP2458222A3
EP2458222A3 EP11008602.2A EP11008602A EP2458222A3 EP 2458222 A3 EP2458222 A3 EP 2458222A3 EP 11008602 A EP11008602 A EP 11008602A EP 2458222 A3 EP2458222 A3 EP 2458222A3
Authority
EP
European Patent Office
Prior art keywords
turbomolecular pump
discs
part discs
abutting edges
support ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11008602.2A
Other languages
German (de)
French (fr)
Other versions
EP2458222A2 (en
EP2458222B1 (en
Inventor
Michael Schweighöfer
Herbert Stammler
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2458222A2 publication Critical patent/EP2458222A2/en
Publication of EP2458222A3 publication Critical patent/EP2458222A3/en
Application granted granted Critical
Publication of EP2458222B1 publication Critical patent/EP2458222B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Abstract

Die Erfindung betrifft eine Turbomolekularpumpe (1) mit einem Rotor (10), welcher einen Schaufelkranz aufweist, einer Statorscheibe (14, 16, 18), welche einen Tragring (50, 60), einen mit diesem verbundenen Schaufelkranz und zwei Teilscheiben (140, 142) umfasst, wobei jede Teilscheibe einen Tragringabschnitt (52, 56, 62, 66; 62'; 62"; 62"', 66"'; 62"", 66"") und eine an diesem angeordnete Stoßkante (54, 58, 64, 68, 70, 72, 74, 76; 64', 74'; 64", 74"; 64"', 74"') aufweist und sich die Stoßkanten der Teilscheiben berühren. Um ein Überlappen der Teilscheiben zu verhindern, wird vorgeschlagen, dass die Stoßkanten der Teilscheiben derart geformt sind, dass sie wenigstens abschnittsweise gekreuzt aufeinanderstoßen, so dass ein Überlappen der Teilscheiben verhindert wird.

Figure imgaf001
The invention relates to a turbomolecular pump (1) having a rotor (10) which has a blade ring, a stator disk (14, 16, 18) which has a support ring (50, 60), a blade ring connected thereto and two part disks (140, 140). 142), each divider comprising a support ring portion (52, 56, 62, 66, 62 ', 62 ", 62"', 66 "', 62"",66"") and a butting edge (54, 58 , 64, 68, 70, 72, 74, 76, 64 ', 74', 64 ", 74", 64 "', 74"') and touching the abutting edges of the part discs. To prevent overlapping of the part discs, It is proposed that the abutting edges of the part discs are shaped such that they abut at least partially crossed, so that an overlapping of the part discs is prevented.
Figure imgaf001
EP11008602.2A 2010-11-26 2011-10-27 Turbomolecular pump Active EP2458222B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010052660A DE102010052660A1 (en) 2010-11-26 2010-11-26 Turbo molecular pump

Publications (3)

Publication Number Publication Date
EP2458222A2 EP2458222A2 (en) 2012-05-30
EP2458222A3 true EP2458222A3 (en) 2016-03-09
EP2458222B1 EP2458222B1 (en) 2017-09-27

Family

ID=45531123

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11008602.2A Active EP2458222B1 (en) 2010-11-26 2011-10-27 Turbomolecular pump

Country Status (2)

Country Link
EP (1) EP2458222B1 (en)
DE (1) DE102010052660A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6236806B2 (en) * 2013-03-07 2017-11-29 株式会社島津製作所 Vacuum pump
JP6241223B2 (en) * 2013-03-13 2017-12-06 株式会社島津製作所 Vacuum pump
DE102013110251A1 (en) 2013-09-17 2015-03-19 Pfeiffer Vacuum Gmbh Arrangement with a vacuum pump and method for compensating a magnetic field of at least one arranged in a vacuum pump, generating a magnetic interference field component
DE102013022539B3 (en) 2013-11-06 2022-04-14 Pfeiffer Vacuum Gmbh vacuum pump
DE102013112185B4 (en) 2013-11-06 2022-04-14 Pfeiffer Vacuum Gmbh Vacuum pump and vacuum pump with at least one turbomolecular pump stage
DE102013114576A1 (en) * 2013-12-19 2015-06-25 Pfeiffer Vacuum Gmbh stator
DE102014100207B4 (en) * 2014-01-09 2020-07-09 Pfeiffer Vacuum Gmbh STATOR DISC
EP3051140B1 (en) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Stator disc for a vacuum pump
EP3916235B1 (en) * 2020-05-27 2023-04-26 Pfeiffer Vacuum Technology AG Method for producing a vacuum pump

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0967395A2 (en) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Turbomolecular pump
JP2004353652A (en) * 2003-05-01 2004-12-16 Osaka Vacuum Ltd Molecular drag pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0967395A2 (en) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Turbomolecular pump
JP2004353652A (en) * 2003-05-01 2004-12-16 Osaka Vacuum Ltd Molecular drag pump

Also Published As

Publication number Publication date
DE102010052660A1 (en) 2012-05-31
EP2458222A2 (en) 2012-05-30
EP2458222B1 (en) 2017-09-27

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