EP2438767A1 - Bauelement mit einer mikromechanischen mikrofonstruktur und verfahren zu dessen herstellung - Google Patents
Bauelement mit einer mikromechanischen mikrofonstruktur und verfahren zu dessen herstellungInfo
- Publication number
- EP2438767A1 EP2438767A1 EP10715187A EP10715187A EP2438767A1 EP 2438767 A1 EP2438767 A1 EP 2438767A1 EP 10715187 A EP10715187 A EP 10715187A EP 10715187 A EP10715187 A EP 10715187A EP 2438767 A1 EP2438767 A1 EP 2438767A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- membrane
- microphone
- sacrificial layer
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31652—Of asbestos
- Y10T428/31663—As siloxane, silicone or silane
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Lock And Its Accessories (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200910026682 DE102009026682A1 (de) | 2009-06-03 | 2009-06-03 | Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zu dessen Herstellung |
PCT/EP2010/054583 WO2010139498A1 (de) | 2009-06-03 | 2010-04-07 | Bauelement mit einer mikromechanischen mikrofonstruktur und verfahren zu dessen herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2438767A1 true EP2438767A1 (de) | 2012-04-11 |
EP2438767B1 EP2438767B1 (de) | 2013-01-30 |
Family
ID=42312804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20100715187 Not-in-force EP2438767B1 (de) | 2009-06-03 | 2010-04-07 | Bauelement mit einer mikromechanischen mikrofonstruktur und verfahren zu dessen herstellung |
Country Status (5)
Country | Link |
---|---|
US (1) | US8637945B2 (de) |
EP (1) | EP2438767B1 (de) |
JP (2) | JP2012529207A (de) |
DE (1) | DE102009026682A1 (de) |
WO (1) | WO2010139498A1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9331656B1 (en) * | 2010-06-17 | 2016-05-03 | Steven M. Gottlieb | Audio systems and methods employing an array of transducers optimized for particular sound frequencies |
US9544678B2 (en) * | 2011-01-12 | 2017-01-10 | Blackberry Limited | Printed circuit board with an acoustic channel for a microphone |
JP5775409B2 (ja) * | 2011-09-29 | 2015-09-09 | スタンレー電気株式会社 | 光スキャナの製造方法 |
JP2015502692A (ja) * | 2011-11-14 | 2015-01-22 | エプコス アクチエンゲゼルシャフトEpcos Ag | 寄生容量が低減されたmemsマイクロフォン |
US9258652B2 (en) * | 2011-11-18 | 2016-02-09 | Chuan-Wei Wang | Microphone structure |
DE102012210052B4 (de) * | 2012-06-14 | 2023-12-14 | Robert Bosch Gmbh | Hybrid integriertes Bauteil und Verfahren zu dessen Herstellung |
US9181086B1 (en) | 2012-10-01 | 2015-11-10 | The Research Foundation For The State University Of New York | Hinged MEMS diaphragm and method of manufacture therof |
DE102012218501A1 (de) * | 2012-10-11 | 2014-04-17 | Robert Bosch Gmbh | Bauelement mit einer mikromechanischen Mikrofonstruktur |
US9624091B2 (en) | 2013-05-31 | 2017-04-18 | Robert Bosch Gmbh | Trapped membrane |
DE102013212173B4 (de) | 2013-06-26 | 2016-06-02 | Robert Bosch Gmbh | MEMS-Bauelement mit einer auslenkbaren Membran und einem feststehenden Gegenelement sowie Verfahren zu dessen Herstellung |
US9439017B2 (en) * | 2014-02-10 | 2016-09-06 | Infineon Technologies Ag | Method for manufacturing a plurality of microphone structures, microphone and mobile device |
CN103888887A (zh) * | 2014-03-27 | 2014-06-25 | 上海集成电路研发中心有限公司 | 一种mems麦克风芯片切割方法 |
US9736590B2 (en) * | 2014-06-06 | 2017-08-15 | Infineon Technologies Ag | System and method for a microphone |
KR101807146B1 (ko) * | 2016-09-09 | 2017-12-07 | 현대자동차 주식회사 | 고감도 마이크로폰 및 그 제조 방법 |
KR102212575B1 (ko) | 2017-02-02 | 2021-02-04 | 현대자동차 주식회사 | 마이크로폰 및 그 제조 방법 |
KR20230158478A (ko) * | 2021-03-23 | 2023-11-20 | 니신보 마이크로 디바이즈 인크. | Mems 소자 및 그 제조 방법 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0680094B1 (de) * | 1994-04-29 | 2003-02-26 | Shell Solar GmbH | Netzunabhängiger elektrischer Energieverbraucher mit zusätzlicher photovoltaischer Stromversorgung |
JPH08230093A (ja) * | 1995-03-01 | 1996-09-10 | Lintec Corp | 表面保護シートの剥離方法 |
JPH09286971A (ja) * | 1996-04-19 | 1997-11-04 | Toray Dow Corning Silicone Co Ltd | シリコーン系ダイボンディング剤、半導体装置の製造方法および半導体装置 |
JP2000223446A (ja) * | 1998-11-27 | 2000-08-11 | Denso Corp | 半導体装置およびその製造方法 |
JP2003533871A (ja) * | 2000-04-04 | 2003-11-11 | シノヴァ エス.アー. | 対象物を切断して切断物を機械加工するための方法および対象物または切断物を保持するための支持台 |
US6535460B2 (en) | 2000-08-11 | 2003-03-18 | Knowles Electronics, Llc | Miniature broadband acoustic transducer |
ATE392790T1 (de) * | 2000-08-11 | 2008-05-15 | Knowles Electronics Llc | Erhobene mikrostrukturen |
US7053530B2 (en) * | 2002-11-22 | 2006-05-30 | General Electric Company | Method for making electrical connection to ultrasonic transducer through acoustic backing material |
JP2005244150A (ja) * | 2004-01-28 | 2005-09-08 | Ajinomoto Co Inc | 樹脂組成物、それを用いた接着フィルム及び多層プリント配線板 |
DE102004011145B4 (de) | 2004-03-08 | 2006-01-12 | Infineon Technologies Ag | Mikrophon und Verfahren zur Herstellung eines Mikrophons |
JP2005326310A (ja) * | 2004-05-14 | 2005-11-24 | Hosiden Corp | 振動センサ |
US7259106B2 (en) * | 2004-09-10 | 2007-08-21 | Versatilis Llc | Method of making a microelectronic and/or optoelectronic circuitry sheet |
DE102005004877A1 (de) * | 2005-02-03 | 2006-08-10 | Robert Bosch Gmbh | Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren |
SG127754A1 (en) * | 2005-05-16 | 2006-12-29 | Sensfab Pte Ltd | Silicon microphone |
JP2007104641A (ja) * | 2005-09-09 | 2007-04-19 | Yamaha Corp | コンデンサマイクロホン |
US7449640B2 (en) * | 2005-10-14 | 2008-11-11 | Sonosite, Inc. | Alignment features for dicing multi element acoustic arrays |
JP4811035B2 (ja) * | 2006-01-31 | 2011-11-09 | パナソニック電工株式会社 | 音響センサ |
JP2008011154A (ja) * | 2006-06-29 | 2008-01-17 | Matsushita Electric Ind Co Ltd | コンデンサマイクロホン用チップ、コンデンサマイクロホンおよびその製造方法 |
EP1931173B1 (de) * | 2006-12-06 | 2011-07-20 | Electronics and Telecommunications Research Institute | Kondensatormikrofon mit Membran mit Biegescharnier und Herstellungsverfahren dafür |
US8114248B2 (en) * | 2007-01-03 | 2012-02-14 | Asahi Kasei Kabushiki Kaisha | Roll-to-roll method and system for micro-replication of a pattern of large relief three-dimensional microstructures |
DE102007029911A1 (de) | 2007-06-28 | 2009-01-02 | Robert Bosch Gmbh | Akustisches Sensorelement |
GB2452941B (en) | 2007-09-19 | 2012-04-11 | Wolfson Microelectronics Plc | Mems device and process |
-
2009
- 2009-06-03 DE DE200910026682 patent/DE102009026682A1/de not_active Withdrawn
-
2010
- 2010-04-07 EP EP20100715187 patent/EP2438767B1/de not_active Not-in-force
- 2010-04-07 JP JP2012513519A patent/JP2012529207A/ja active Pending
- 2010-04-07 WO PCT/EP2010/054583 patent/WO2010139498A1/de active Application Filing
- 2010-04-07 US US13/259,570 patent/US8637945B2/en not_active Expired - Fee Related
-
2014
- 2014-02-04 JP JP2014019784A patent/JP2014090514A/ja active Pending
Non-Patent Citations (1)
Title |
---|
See references of WO2010139498A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP2438767B1 (de) | 2013-01-30 |
WO2010139498A1 (de) | 2010-12-09 |
JP2012529207A (ja) | 2012-11-15 |
US8637945B2 (en) | 2014-01-28 |
JP2014090514A (ja) | 2014-05-15 |
DE102009026682A9 (de) | 2013-01-03 |
DE102009026682A1 (de) | 2010-12-09 |
US20120091544A1 (en) | 2012-04-19 |
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