JP2007309892A - 静電容量型センサ - Google Patents
静電容量型センサ Download PDFInfo
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- JP2007309892A JP2007309892A JP2006141689A JP2006141689A JP2007309892A JP 2007309892 A JP2007309892 A JP 2007309892A JP 2006141689 A JP2006141689 A JP 2006141689A JP 2006141689 A JP2006141689 A JP 2006141689A JP 2007309892 A JP2007309892 A JP 2007309892A
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- back plate
- plate
- electrode
- mask
- electrode plate
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- Measuring Fluid Pressure (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
【解決手段】シリコンマイクロホン10は、音波による音圧変化に応じて振動する振動膜12を含むシリコン基板11と、振動膜12と対向配置された背面板13と、振動膜12と背面板13との間に設けられた絶縁体14aと、振動膜12とマスク板15との間に設けられた絶縁体14bと、シリコン基板11の面の一部を覆うマスク板15と、振動膜12と背面板13との間に形成された第1空隙部16とを備え、マスク板15は、絶縁体14aと同一の部材で形成された絶縁体14bに保持され、背面板13を取り囲むように背面板13の外縁から寸法dの第2空隙部17を隔てて設けられ、音響孔15aを有する。
【選択図】図1
Description
11 シリコン基板
12 振動膜(可動電極板)
12a 振動膜の外周端
12b 振動膜の周辺部
13 背面板(背面電極板)
13a 背面板の音響孔
13b 背面板のアーム部
14、14a、14b 絶縁体
15 マスク板
15a マスク板の音響孔(貫通孔)
16 第1空隙部
17 第2空隙部
18 エッチングマスク
19 開口部
21 振動膜電極
21a〜21c、23 電極材料
22 背面板電極
Claims (4)
- 外力に応じて変位する可動電極板と、この可動電極板から所定距離だけ離れて対向配置され前記可動電極板よりも面積が小さい背面電極板とを備えた静電容量型センサであって、
前記背面電極板と対向する前記可動電極板の対向面側に、前記対向面から前記背面電極板までの距離と同じ距離だけ離れた位置に、前記可動電極板及び前記背面電極板に対して電気的に絶縁されたマスク板を備えたことを特徴とする静電容量型センサ。 - 前記可動電極板が前記背面電極板と対向する領域を対向領域とし対向しない領域を対向外領域としたときに、前記マスク板は、前記対向外領域の少なくとも一部を覆うものである請求項1に記載の静電容量型センサ。
- 前記可動電極板及び前記マスク板は、同一の材料から形成されている請求項1又は2に記載の静電容量型センサ。
- 前記マスク板は、貫通孔を備えた請求項1乃至3のいずれか1項に記載の静電容量型センサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006141689A JP4944494B2 (ja) | 2006-05-22 | 2006-05-22 | 静電容量型センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006141689A JP4944494B2 (ja) | 2006-05-22 | 2006-05-22 | 静電容量型センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007309892A true JP2007309892A (ja) | 2007-11-29 |
JP4944494B2 JP4944494B2 (ja) | 2012-05-30 |
Family
ID=38842869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006141689A Expired - Fee Related JP4944494B2 (ja) | 2006-05-22 | 2006-05-22 | 静電容量型センサ |
Country Status (1)
Country | Link |
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JP (1) | JP4944494B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008053400A (ja) * | 2006-08-24 | 2008-03-06 | Matsushita Electric Ind Co Ltd | エレクトレットコンデンサ |
CN101534466A (zh) * | 2009-04-15 | 2009-09-16 | 无锡市纳微电子有限公司 | 一种硅麦克风芯片及其制作方法 |
CN111770424A (zh) * | 2020-06-24 | 2020-10-13 | 瑞声科技(南京)有限公司 | 换能器 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105142092A (zh) * | 2015-07-21 | 2015-12-09 | 合肥鑫晟光电科技有限公司 | 基板及制作方法、显示装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4626366Y1 (ja) * | 1968-06-14 | 1971-09-09 | ||
JPS4626365Y1 (ja) * | 1968-06-14 | 1971-09-09 | ||
JPS4815027B1 (ja) * | 1971-08-19 | 1973-05-11 |
-
2006
- 2006-05-22 JP JP2006141689A patent/JP4944494B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4626366Y1 (ja) * | 1968-06-14 | 1971-09-09 | ||
JPS4626365Y1 (ja) * | 1968-06-14 | 1971-09-09 | ||
JPS4815027B1 (ja) * | 1971-08-19 | 1973-05-11 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008053400A (ja) * | 2006-08-24 | 2008-03-06 | Matsushita Electric Ind Co Ltd | エレクトレットコンデンサ |
JP4567643B2 (ja) * | 2006-08-24 | 2010-10-20 | パナソニック株式会社 | コンデンサ及びその製造方法 |
CN101534466A (zh) * | 2009-04-15 | 2009-09-16 | 无锡市纳微电子有限公司 | 一种硅麦克风芯片及其制作方法 |
CN111770424A (zh) * | 2020-06-24 | 2020-10-13 | 瑞声科技(南京)有限公司 | 换能器 |
CN111770424B (zh) * | 2020-06-24 | 2021-09-07 | 瑞声科技(南京)有限公司 | 换能器 |
WO2021258478A1 (zh) * | 2020-06-24 | 2021-12-30 | 瑞声声学科技(深圳)有限公司 | 换能器 |
Also Published As
Publication number | Publication date |
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JP4944494B2 (ja) | 2012-05-30 |
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