EP2425232A1 - Inspektionsverfahren und inspektionsvorrichtung - Google Patents
Inspektionsverfahren und inspektionsvorrichtungInfo
- Publication number
- EP2425232A1 EP2425232A1 EP10720376A EP10720376A EP2425232A1 EP 2425232 A1 EP2425232 A1 EP 2425232A1 EP 10720376 A EP10720376 A EP 10720376A EP 10720376 A EP10720376 A EP 10720376A EP 2425232 A1 EP2425232 A1 EP 2425232A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- feature
- image capture
- capture module
- features
- inspection apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
Definitions
- the present invention relates to an inspection method and an inspection apparatus.
- the invention relates to a method of capturing images in a measuring machine environment to thereby undertake optical quality control of objects under inspection.
- Video measurement machines are used to inspect manufactured parts. These machines generally have an image capture device, such as a digital camera or the like, and data processing and storage capabilities. The part is placed within the field of view of the image capture device and the design technical specification of a manufactured object, referred to in the art as the parts program, is stored within the storage device of the measuring machine.
- the parts program includes a series of features associated with the manufactured object.
- Each feature in the parts program has a series of attributes associated therewith including the feature's geometric properties and spatial location on the object and illumination, magnification and focus settings to allow the measurement machine to capture a suitable image of the feature.
- instructions are provided to the operating program of the measurement machine to control the camera and move the camera relative to the object in order to measure each of the features of the object recorded in the parts program.
- measurement machine operating programs move through the features recorded in the parts program sequentially and capture the features on the object independently to determine whether the object has been manufactured in accordance with the design specification without error.
- the invention resides in a method of inspecting an object, the object having a plurality of features, each of the features having one or more attributes associated therewith, the method including the steps of: identifying a current primary feature of the object; selecting one or more additional features, each of the one or more additional features selected having at least one common attribute with the current primary feature; and capturing an image of the selected features on an image capture module.
- the invention resides in an inspection apparatus comprising: an image capture module adapted to capture a digital image of at least a portion of an object under inspection; a data store having stored therein a parts list identifying a set of features on the object under inspection, each feature having one or more attributes associated therewith; an operating system containing computer readable instructions for: identifying a current primary feature on the object under inspection; selecting one or more additional features from the parts list, each of the one or more additional features selected having at least one common attribute with the current primary feature; and capturing an image of the selected features using the image capture module.
- FIG 1 shows a modular schematic of an inspection apparatus according to an embodiment of the invention
- FIG 2 shows an inspection method according to an embodiment of the invention.
- FIG 3 shows an embodiment of a method of selecting objects forming part of the method shown in FIG 2.
- FIG 1 shows a schematic view of modules forming part of an inspection apparatus 100 according to an embodiment of the invention.
- Inspection apparatus 100 comprises an image capture module 110, an operating system 120 and a data storage module 130.
- image capture module 110 is in the form of a digital camera or the like able to capture images of an object under inspection 200. Furthermore, image capture module 110 includes lighting and illumination devices, such as light emitting diodes or the like, to allow appropriate illumination and lighting conditions to allow the digital camera to capture an appropriate image of the object under inspection.
- lighting and illumination devices such as light emitting diodes or the like, to allow appropriate illumination and lighting conditions to allow the digital camera to capture an appropriate image of the object under inspection.
- Image capture module 110 is in communication with operating system 120 of inspection apparatus 100 and, in the embodiment, image capture module 110 communicates digital data relating to physical features of the object under inspection 200 to the operating system 120 for processing. Furthermore, operating system 120 communicates with the image capture module 120 to control the focus and magnification characteristics of the digital camera and the illumination levels and color output of the lighting and illumination devices. Operating system 120 is also in communication with data storage module
- data storage module 130 has stored therein a parts program associated with the object under inspection.
- the parts program stored within the data storage module 120 contains an identification of the physical features 210 present on the object under inspection 200 together with a series of one or more attributes associated with each feature. These attributes include feature's geometric properties and spatial location on the object and illumination, magnification and focus settings that are required to capture the physical features 210 of the object under inspection 200.
- Operating system 120 communicates the result of the inspection of the object to a user of the inspection apparatus 100 as is known in the art.
- FIG 2 shows an inspection method 300 according to an embodiment of the invention.
- the operating system 120 identifies the current primary feature from the features 210 on the object under inspection 200 (step 310).
- the primary feature may be the first feature 210 on the object under inspection 200 in the field of view of the image capture module 110.
- the primary feature may be the first feature on the parts program stored in the data storage module 130.
- the primary feature may be the feature in the parts program that is located proximal the centre of the current field of view of the image capture module. The operating system 120 then selects one or more additional features
- the operating system 120 communicates with the image capture module 110 in order that the image capture module 110 inspects the selected features (step 330). Suitably this occurs by capturing an image of the selected features for processing by the operating system 120 as will be discussed in greater detail below.
- the operating system determines whether all of the features contained in the parts list stored in the data storage module 120 have had their respective features inspected (step 340).
- the operating system 120 identifies a new primary feature and the method proceeds as previously discussed (step 310).
- the operating system prepares the results of the inspection based upon the captured images (step350). Suitably, this process occurs as is known in the art and the results of the inspection are then communicated for analysis to determine whether the object under inspection
- FIG 3 shows the step of 320 in greater detail.
- the operating system 120 parses through the parts program and identifies all features that have identical environmental attributes as the current primary feature (step 321 ).
- environmental attributes include such attributes as illumination, magnification and focus settings.
- the operating system 120 then orders the identified features based on each feature's proximity to the current primary feature (step 322) with the closest feature to the primary feature heading the list.
- the operating system 120 orders the identified features based on each feature's proximity to the current primary feature (step 322) with the closest feature to the primary feature heading the list.
- the operating system 120 then parses the list and selects the next most proximal feature (step 323) and determines whether that feature is able to be captured in the current field of view of the image capture module 110 (step 324).
- step 330 If the list has been exhausted the method continues from step 330 as previously described.
- next most proximal feature is able to be captured in the current field of view of the image capture module 110, that feature is selected for inspection (step 325).
- next most proximal feature is not able to be captured in the current field of view of the image capture module 110, that feature is discarded and returned to the parts program for later inspection (step 326).
- the method and system of the invention reduces the amount of movement of the image capture device relative to the object and the number of actual image captures is reduced. In this way, time for inspection is minimized which results in subsequent cost savings to the owner.
Landscapes
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Analysis (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU2009901899A AU2009901899A0 (en) | 2009-04-30 | An inspection method and system | |
| PCT/EP2010/055859 WO2010145881A1 (en) | 2009-04-30 | 2010-04-29 | An inspection method and an inspection apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP2425232A1 true EP2425232A1 (de) | 2012-03-07 |
| EP2425232B1 EP2425232B1 (de) | 2013-01-09 |
Family
ID=42378914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP10720376A Active EP2425232B1 (de) | 2009-04-30 | 2010-04-29 | Inspektionsverfahren und inspektionsvorrichtung |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8781208B2 (de) |
| EP (1) | EP2425232B1 (de) |
| CN (1) | CN102378909B (de) |
| AU (1) | AU2010262034B2 (de) |
| CA (1) | CA2760377C (de) |
| WO (1) | WO2010145881A1 (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10111411B2 (en) | 2013-02-06 | 2018-10-30 | Clearwater Seafoods Limited Partnership | Imaging for determination of crustacean physical attributes |
| WO2016083897A2 (en) | 2014-11-24 | 2016-06-02 | Kitov Systems Ltd. | Automated inspection |
| US10255671B1 (en) * | 2015-03-06 | 2019-04-09 | Assembly Guidance Systems, Inc. | System and method for capture of high resolution/high magnification images |
| CN107145689A (zh) * | 2017-06-12 | 2017-09-08 | 郑州云海信息技术有限公司 | 一种pcb设计中检查文字方向的方法 |
| US11933717B2 (en) * | 2019-09-27 | 2024-03-19 | Kla Corporation | Sensitive optical metrology in scanning and static modes |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4014661C2 (de) * | 1990-05-08 | 1996-03-28 | Groz & Soehne Theodor | Optische Kontrolle von Stricknadeln an Strickautomaten |
| IL99823A0 (en) * | 1990-11-16 | 1992-08-18 | Orbot Instr Ltd | Optical inspection method and apparatus |
| US5495535A (en) * | 1992-01-31 | 1996-02-27 | Orbotech Ltd | Method of inspecting articles |
| IL123473A (en) * | 1997-02-28 | 2001-08-08 | Fiekowsky Peter J | High accuracy particle dimension measurement system |
| US7617474B2 (en) * | 1997-09-17 | 2009-11-10 | Synopsys, Inc. | System and method for providing defect printability analysis of photolithographic masks with job-based automation |
| US6175644B1 (en) | 1998-05-01 | 2001-01-16 | Cognex Corporation | Machine vision system for object feature analysis and validation based on multiple object images |
| DE19852323C2 (de) * | 1998-11-12 | 2001-08-16 | Steag Hamatech Ag | Verfahren zum Bestimmen der Dicke von auf einem Substrat vorgesehenen Schichten |
| JP4206192B2 (ja) * | 2000-11-09 | 2009-01-07 | 株式会社日立製作所 | パターン検査方法及び装置 |
| US6707544B1 (en) * | 1999-09-07 | 2004-03-16 | Applied Materials, Inc. | Particle detection and embedded vision system to enhance substrate yield and throughput |
| JP4274649B2 (ja) * | 1999-10-07 | 2009-06-10 | 株式会社日立製作所 | 微細パターン検査方法及び装置 |
| US20020085761A1 (en) * | 2000-12-30 | 2002-07-04 | Gary Cao | Enhanced uniqueness for pattern recognition |
| US20030118230A1 (en) * | 2001-12-22 | 2003-06-26 | Haoshi Song | Coiled tubing inspection system using image pattern recognition |
| US9092841B2 (en) * | 2004-06-09 | 2015-07-28 | Cognex Technology And Investment Llc | Method and apparatus for visual detection and inspection of objects |
| US7016525B2 (en) * | 2002-05-02 | 2006-03-21 | Mitutoyo Corporation | Systems and methods for continuously varying wavelength illumination |
| KR100474571B1 (ko) * | 2002-09-23 | 2005-03-10 | 삼성전자주식회사 | 웨이퍼의 패턴 검사용 기준 이미지 설정 방법과 이 설정방법을 이용한 패턴 검사 방법 및 장치 |
| US7027143B1 (en) | 2002-10-15 | 2006-04-11 | Kla-Tencor Technologies Corp. | Methods and systems for inspecting reticles using aerial imaging at off-stepper wavelengths |
| JP4121849B2 (ja) * | 2002-12-26 | 2008-07-23 | オリンパス株式会社 | 欠陥検査装置及び欠陥検査方法 |
| US7508973B2 (en) * | 2003-03-28 | 2009-03-24 | Hitachi High-Technologies Corporation | Method of inspecting defects |
| US20040223053A1 (en) * | 2003-05-07 | 2004-11-11 | Mitutoyo Corporation | Machine vision inspection system and method having improved operations for increased precision inspection throughput |
| DE10330006B4 (de) * | 2003-07-03 | 2006-07-20 | Leica Microsystems Semiconductor Gmbh | Vorrichtung zur Inspektion eines Wafers |
| US20050031191A1 (en) * | 2003-08-04 | 2005-02-10 | Mitutoyo Corporation | Methods and apparatus for inspection of lines embedded in highly textured material |
| EP1738156A4 (de) * | 2004-04-19 | 2017-09-27 | Phoseon Technology, Inc. | Abbildung von halbleiterstrukturen unter verwendung von festkörperbeleuchtung |
| US7454053B2 (en) * | 2004-10-29 | 2008-11-18 | Mitutoyo Corporation | System and method for automatically recovering video tools in a vision system |
| US20080069428A1 (en) * | 2006-08-23 | 2008-03-20 | Robert Schulkin | Single mode digital video gauging system having mechanical drawing annotations and method for same |
| JP4358889B1 (ja) * | 2008-06-27 | 2009-11-04 | 日本エレクトロセンサリデバイス株式会社 | ウエーハ欠陥検査装置 |
| SG164293A1 (en) * | 2009-01-13 | 2010-09-29 | Semiconductor Technologies & Instruments Pte | System and method for inspecting a wafer |
-
2010
- 2010-04-29 AU AU2010262034A patent/AU2010262034B2/en active Active
- 2010-04-29 US US13/318,106 patent/US8781208B2/en active Active
- 2010-04-29 CN CN201080014535.4A patent/CN102378909B/zh active Active
- 2010-04-29 CA CA2760377A patent/CA2760377C/en active Active
- 2010-04-29 EP EP10720376A patent/EP2425232B1/de active Active
- 2010-04-29 WO PCT/EP2010/055859 patent/WO2010145881A1/en not_active Ceased
Non-Patent Citations (1)
| Title |
|---|
| See references of WO2010145881A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102378909B (zh) | 2014-07-02 |
| CA2760377A1 (en) | 2010-12-23 |
| AU2010262034B2 (en) | 2013-01-10 |
| EP2425232B1 (de) | 2013-01-09 |
| AU2010262034A1 (en) | 2011-09-29 |
| CA2760377C (en) | 2016-02-23 |
| US20120070063A1 (en) | 2012-03-22 |
| CN102378909A (zh) | 2012-03-14 |
| US8781208B2 (en) | 2014-07-15 |
| WO2010145881A1 (en) | 2010-12-23 |
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