EP2394081A2 - Valves utilisant un moteur rotatif piézoélectrique réversible - Google Patents

Valves utilisant un moteur rotatif piézoélectrique réversible

Info

Publication number
EP2394081A2
EP2394081A2 EP10739222A EP10739222A EP2394081A2 EP 2394081 A2 EP2394081 A2 EP 2394081A2 EP 10739222 A EP10739222 A EP 10739222A EP 10739222 A EP10739222 A EP 10739222A EP 2394081 A2 EP2394081 A2 EP 2394081A2
Authority
EP
European Patent Office
Prior art keywords
piezoelectric
valve
resonator
coupled
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10739222A
Other languages
German (de)
English (en)
Other versions
EP2394081A4 (fr
Inventor
Serhiy Petrenko
Valentin Rangelov Zhelyaskov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Discovery Technology International Inc
Original Assignee
Discovery Technology International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US12/639,232 external-priority patent/US8183740B2/en
Application filed by Discovery Technology International Inc filed Critical Discovery Technology International Inc
Publication of EP2394081A2 publication Critical patent/EP2394081A2/fr
Publication of EP2394081A4 publication Critical patent/EP2394081A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
    • F16K5/06—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having spherical surfaces; Packings therefor
    • F16K5/0647—Spindles or actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/02—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with tubular diaphragm
    • F16K7/04—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with tubular diaphragm constrictable by external radial force
    • F16K7/045—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with tubular diaphragm constrictable by external radial force by electric or magnetic means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0065—Friction interface
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor

Definitions

  • the invention relates to motorized valves, and more particularly to motorized valves based on a reversible piezoelectric rotary motors.
  • Valves with piezoelectric actuators have been proposed.
  • some designs include an amplified piezoelectric actuator (APA).
  • APA amplified piezoelectric actuator
  • an elastic amplifier element is coupled to the piezoelectric element to mechanically amplify the motion of the piezoelement.
  • a disadvantage of these types of valves is that they are generally limited to a motion range on the order of a few hundred microns, even with the amplifier. Accordingly, adjustment of the amount of flow is limited and therefore the valve is not truly adjustable.
  • conventional APA valves typically provide only two positions, an open position and a closed position.
  • Other conventional designs include a piezoelectric element for directing flow of a fluid.
  • a piezoelectric element is used directly or indirectly to select between two orifices for directing flow of a liquid through a valve body.
  • the motion provided by piezoelement blocks one port and unblocks another.
  • the small range of movement available for piezoelectric elements cannot be used to directly control the amount of fluid flowing through a port. Rather, such a piezoelement controlled valve is generally used in conjunction with a pneumatic actuator to control the amount of fluid flowing through the selected port.
  • valve stem controlled by a unidirectional piezoelectric motor Such valve designs can regulate directly the flow of various fluids or isolate an evacuated area. Additionally, such valve designs provide a wide range of flow control, high accuracy and resolution, and linear control characteristics. However, the unidirectional nature of the valve limits the functional control characteristics of the valve.
  • a reversible piezoelectric valve in a first embodiment of the invention, includes a valve body including a rotatable plug and a drive body coupled to the valve body that is operable to cause the rotatable plug to rotate about a rotational axis.
  • the drive body includes a shaft disposed along the rotational axis, the shaft statically coupled to the plug and rotatably coupled to the drive body.
  • the drive body also includes a rotor assembly disposed about the rotational axis and rotatably coupled to the drive body.
  • the drive body further includes a first annular piezoelectric actuator disposed about the rotational axis and statically coupled to the drive body, the first annular piezoelectric actuator configured to frictionally engage an inner surface of the rotor assembly.
  • the drive body additionally includes a second annular piezoelectric actuator disposed about the rotational axis and statically coupled to the shaft, the second annular piezoelectric actuator configured to frictionally engage the inner surface of the rotor assembly.
  • a reversible piezoelectric valve is provided.
  • the valve includes a valve body with at least one inlet, at least one outlet, and a turning plug.
  • the valve also includes a rotation drive kinematically connected to the turning plug through a shaft, where the rotation drive includes a reversible piezoelectric motor.
  • the reversible piezoelectric motor includes a first annular piezoelectric resonator fixed with respect to the body, a first complementary generator acoustically coupled to the first piezoelectric resonator and having one or more first flexible pushers, and a first rotor mounted coaxially with respect to the first piezoelectric resonator and in frictional contact with the first flexible pushers.
  • the drive body also includes a second annular piezoelectric resonator statically coupled to the turning plug through the shaft, a second complementary generator acoustically coupled to the second piezoelectric resonator and having one or more second flexible pushers, and a second rotor mounted coaxially with respect to the second piezoelectric resonator and in frictional contact with the second flexible pushers, the second rotor being statically coupled to the first rotor through a sound-proof gasket.
  • FIG. 1 shows an exemplary ball-type piezoelectric valve, including a reversible piezoelectric motor for turning a valve plug in accordance with an embodiment of the invention.
  • FIG. 2 shows a first exemplary pinch-type piezoelectric valve, including a reversible piezoelectric motor in accordance with an embodiment of the invention.
  • FIG. 3 shows a second exemplary pinch-type piezoelectric valve, including a reversible piezoelectric motor in accordance with an embodiment of the invention.
  • FIGs. 4A and 4B show top-down and cross-section views of an annular piezoelectric resonator in accordance with an embodiment of the invention. DETAILED DESCRIPTION
  • valves in accordance with the various embodiments of the invention are configured to provide a reversible rotation of the valve stem. This new valve design will be described below with respect to FIGs. 1-4
  • FIG. 1 shows an exemplary piezoelectric valve 100, including a reversible piezoelectric motor, in accordance with an embodiment of the invention.
  • the piezoelectric valve 100 in FIG. 1 has a body 1 with at least one inlet 2 and at least one outlet 3 to connect to valve 100 a pipeline system (not shown) and a rotatable turning plug 4 for adjusting a flow of fluid.
  • Valve 1 also includes a rotation drive body 6, including a shaft 5 for kinematically connecting turning plug 4 to rotation drive body 6 and defining a rotational axis 24.
  • the rotation drive body 6 is a reversible piezoelectric motor.
  • the rotation drive body 6 includes a first annular piezoelectric resonator 7, configured for excitation of radial acoustic standing waves therein.
  • the first resonator 7 is fixed with respect to the body 1 of the valve 100 and disposed about rotational axis 24. Further, first resonator 7 can have one or more electrodes and wires (not shown) for connecting first resonator 7 to an external controller/electrical excitation source 28.
  • the rotation drive body 6 also includes a first complementary generator of mechanical vibrations 8 acoustically coupled to first resonator 7.
  • first complementary generator 8 can be in the form of an elastic wave shell or ring around an outer rim of first resonator 7.
  • first complementary generator 8 can be in the form of a disc (not shown in FIG. 1), which is acoustically coupled to a flat surface of first piezoelectric resonator 7.
  • the first complementary generator 8 can be fitted with one or more flexible pushers 9 extending at least radially and outward with respect to rotational axis 24, as shown in FIG. 1.
  • components 7, 8, and 9 provide a first radial piezoelectric actuator 25.
  • the rotation drive body 6 can further include a first rotor 10, which is mounted coaxially with respect to the first piezoelectric resonator 7 (i.e., about rotational axis 24 and surrounding an outer rim of first resonator 7) and which is in factional contact with the flexible pushers 9.
  • the rotation drive body 6 can also include a second annular piezoelectric resonator 13, also configured for excitation of radial acoustic standing waves therein.
  • the second resonator 13 can be statically linked to the turning plug 4 through the shaft 5. Further, second resonator 13 can have one or more electrodes and wires (not shown) for connecting second resonator 13 to controller/external electrical excitation source 28. Similar to the first resonator 7, the second resonator 13 can have coupled thereto a second complementary generator of mechanical vibrations 14, also in the form of an elastic ring or disc.
  • the second complementary generator 14 can also be acoustically coupled to the second piezoelectric resonator 13 and can be fitted with one or more pushers 15.
  • Rotation drive body 6 can further include a second rotor 1 1, mounted coaxially with respect to the second piezoelectric resonator 13 and which is in a frictional contact with the flexible pushers 15.
  • the rotors 10 and 11 are statically connected through a sound-proof gasket 12 to provide a rotatable rotor assembly 27.
  • resonators 7 and 13 are illustrated as being excited by a single controller 28.
  • the various embodiments of the invention are not limited in this regard. Rather, any system comprising one or more components capable of singly exciting resonators 7 and 13 can be used in the various embodiments of the invention.
  • the resonators 7 and 13 can be constructed from piezoceramics selected from the group of piezo lead-zirconate-titanate-strontium ceramics (PZT) materials.
  • PZT piezo lead-zirconate-titanate-strontium ceramics
  • the invention is not limited to the use of PZT materials. In other embodiments of the invention, other types of piezoelectric materials can be used.
  • the complementary generators 8 and 14 are configured such that elastic pushers 9 and 15, respectively, are disposed along the circumference of resonators 7 and 13, respectively, at nominally equal angular distances from one another.
  • the complementary generators 8 and 14 can be in the form of ring shells, which are tightly fitted over the piezoelectric resonators 7 and 13, respectively, around their circumferences.
  • the elastic pushers 9 and 15 are then are attached to the external surface of their respective ring shells.
  • the complementary generators comprise flexible discs
  • such discs can be in the shape of flat circular discs that are acoustically coupled to the piezoelectric resonators 7 and 13 across their plane surfaces.
  • the elastic pushers 9, 15 can then be attached to the external cylindrical surface of the discs.
  • the second piezoelectric resonator 13 or the shaft 5 can be equipped with at least one marker of angular position 16.
  • the position of the valve can then be detected using at least one sensor 17 mounted on the body of the valve.
  • Sensor 17 can also be coupled to controller 28 or another control element to control the position of shaft 5 or otherwise control valve 100.
  • Each specified marker in the valve of FIG. 1 can be in the form of an optical grating made of optical disc raster and each specified sensor is fabricated as an opto-electrical pair.
  • the various embodiments of the invention are not limited in this regard and other methods of marking and detecting position of the valve can be used.
  • the turning plug 4 can be shaped as a sphere, as shown in FIG. 1.
  • the various embodiments of the invention are not limited in this regard and a cone or cylinder-shaped plug, with a through-hole, can be configured for sitting in the corresponding saddle 18 in the valve body 1 between the inlet 2 and outlet 3.
  • the piezoelectric actuators 25 and 26 work on the principal of excitation of ultrasonic radial standing waves within an annular or ring-type piezoelectric resonator.
  • pushers 9 and 15 are attached to the piezoelectric resonators 7 and 13, respectively, through a vibrational shell or other complementary generator (8, 14).
  • the pushers 9 and 15 are arranged to primarily extend in a generally radial direction from rotational axis 24 and physically contact a portion of rotor assembly 27. Further, pushers 9 and 15 are also arranged to extend at least partially in a direction of rotation about rotation axis 27.
  • the pushers 9 comprise cantilever-type springs extending in a radial direction towards rotor 10 and in a direction of rotation about rotational axis 24.
  • the pushers 15 comprise cantilever-type springs extending in a radial direction towards rotor 1 1 and in a direction of rotation about rotational axis 24.
  • controller 28 is configured to excite the first piezoelectric resonator 7 singly.
  • the pushers 15 will apply a constant frictional force against rotor assembly 27, holding second resonator 13 fixed with respect to rotor assembly 27.
  • rotor assembly 27, second resonator 13, and shaft 5 will rotate as a single unit.
  • the excitation of first resonator 7 will however result in pushers 9 moving radially toward rotor 10 of rotor assembly 27.
  • pushers 9 deform and begin to apply a restorative force against rotor 10 via a friction contact.
  • the restorative force of the pushers 9 is preferentially applied in a counterclockwise direction about axis 24. Once a sufficient deformation of pushers 9 has occurred, the aggregate restorative force of the deformed pushers 9 becomes sufficiently large to overcome any frictional forces holding rotor assembly 27, second resonator 13, and shaft 5 in place and rotor assembly 27, second resonator 13, and shaft 5 will begin to rotate counterclockwise about axis 27. When pushers 9 move radially away from rotor 10, the pushers 9 undeform and stop applying a force against rotor 10. This process can then be repeated to maintain counterclockwise rotation of rotor assembly 27, second resonator 13, and shaft 5.
  • controller 28 is configured to singly excite the second piezoelectric resonator 13.
  • the pushers 9 will apply a constant frictional force against rotor assembly 27, holding rotor assembly 27 in a fixed position. Accordingly, rotor assembly 27 will be prevented from rotating.
  • the excitation of second resonator 13 will however result in pushers 15 moving radially toward rotor 11 of rotor assembly 27. As a result, pushers 15 deform and begin to apply a restorative force against rotor 11 via a friction contact.
  • the restorative force of the pushers 15 is preferentially applied in a counterclockwise direction about axis 24. Once a sufficient deformation of pushers 15 has occurred, the aggregate restorative force of the deformed pushers 15 becomes sufficiently large to overcome any frictional forces holding second resonator 13, and shaft 5 in place and second resonator 13 and shaft 5 will begin to rotate clockwise about axis 27. When pushers 15 move radially away from rotor 11, the pushers 13 undeform and stop applying a force against rotor 11. This process can then be repeated to maintain a clockwise rotation of second resonator 13 and shaft 5.
  • valves including solely ball-type plugs.
  • the various embodiments of the invention can be used with any type of valve, including gate, globe, pinch, diaphragm, needle, plug, ball, and butterfly valves, to name a few.
  • FIGs. 2 and 3 show how the piezoelectric motor of FIG. 1 could be used to operate pinch-type valves in accordance with embodiments of the invention.
  • FIG. 2 shows a first exemplary pinch-type piezoelectric valve 200, including a reversible piezoelectric motor in accordance with an embodiment of the invention.
  • the reversible motor for shaft 5 in FIG. 2 is substantially similar to that described in FIG. 1. Accordingly, the description therein will be sufficient for describing the operation of FIG. 2.
  • the turning plug can made in the form of an eccentrically rotatable cylinder 19 rigidly mounted to the end of shaft 5, while the curved surface of the cylinder 19 is in contact with a elastic tube 20.
  • tube 20 can comprise a silicone or rubber tube.
  • the various embodiments of the invention are not limited in this regard and other types of elastic materials can also be used. As shown in FIG.
  • the ends of the elastic tube 20 are connected to the inlet 2 and outlet 3 of valve 200 and tube 20 sits in a saddle 18 in the valve body 1.
  • the cylinder 19 presses on the elastic tube 20 and regulates the size of the internal opening of the elastic tube 20, thus regulating flow through the valve.
  • FIG. 3 shows a second exemplary pinch-type piezoelectric valve 300, including a reversible piezoelectric motor for turning a valve plug in accordance with an embodiment of the invention.
  • the reversible motor for shaft 5 in FIG. 3 is substantially similar to that described in FIG. 1. Accordingly, the description therein will be sufficient for describing the operation of FIG. 3.
  • the turning plug can be made in the form of a piston 21 with a linear guide 22, while the shaft 5 is linked to the piston 21 through a "bolt-threaded hole” pair 23.
  • valve 300 the flat side of the piston 21 rests against an elastic tube 20, which sits in the saddle 18 of the valve body 1 and is attached to the inlet 2 and outlet 3.
  • the piezoelectric valve 300 in FIG. 3 can include a screw-type drive.
  • the end of shaft 5 in FIG. 3 has a threaded hole and which is coupled to the corresponding screw 23 at the end of a piston 21.
  • Rotation of the piston 21 is prevented by a retaining device 22 mechanically coupled to piston 21 to prevent its rotation within body 1.
  • shaft 5 is rotated using a rotation drive body 6, as previously described with respect to FIG. 1.
  • Rotation of shaft 5 causes the linear position of screw 23 to move within shaft 5 and the resulting linear motion is translated to piston 21, causing piston 21 to move up or down, depending on the direction of rotation.
  • the end of piston 21 can have the threaded hole.
  • the reversible piezoelectric motor can require a high torque to provide high speed closing and opening of the valve.
  • Piezoelectric motors with increased torque can be provided by improving the motor design parameters and at the same time eliminating the undesirable effects of any decrease in the Q factor. This is achieved by increasing the diameters of the rotor and the associated piezoelectric annular generator, while switching to a different excitation frequency, which excites the first order longitudinal vibrational mode across the annular width of the annular piezoelectric resonator. That is.
  • the operating frequency of the applied voltage is selected to excite the first-order longitudinal mode of vibration radially across the annular width of the piezoelectric resonator.
  • the operating frequency (F) for the excitation voltage can be described by the equation:
  • excitation of the first order vibrational longitudinal mode can be achieved by configuring the piezoelectric resonators in the piezoelectric valve to have an outer radius (Rp) that is at least twice the inner radius (rp) (i.e., Rp > 2rp) and an annular width (h) that is at least twice a thickness (H) of said piezoelectric resonator (i.e. h > 2H).
  • Rp outer radius
  • h annular width
  • a wave shell is operable to efficiently transfer oscillations of the piezoelectric resonators in the radial direction to the pushers to effect rotary movement of an associated rotor about a rotational axis with a significantly higher amount of torque than observed in conventional piezoelectric motors including annular piezoelements.
  • the piezoelectric resonators can be polarized normal to its flat end surfaces and the electrodes can be affixed to these flat end surfaces.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

L'invention concerne une valve piézoélectrique comprenant un corps de valve comprenant un obturateur et un corps d'actionnement couplé au corps de valve et pouvant être actionné de sorte que l'obturateur rotatif tourne autour d'un axe de rotation. Le corps d'actionnement comprend un arbre disposé le long de l'axe, l'arbre étant statiquement couplé à l'obturateur et couplé en rotation au corps d'actionnement. Le corps d'actionnement comprend également un système de rotor disposé autour de l'axe et couplé en rotation au corps d'actionnement. Le corps d'actionnement comprend en outre un premier actionneur piézoélectrique disposé autour de l'axe et couplé statiquement au corps d'actionnement, le premier actionneur piézoélectrique étant configuré pour entrer en contact par frottement avec une surface interne du système de rotor. Le corps d'actionnement comprend en outre un second actionneur piézoélectrique disposé autour de l'axe et couplé statiquement à l'arbre, le second actionneur piézoélectrique étant configuré pour entrer en contact par frottement avec la surface interne du système de rotor.
EP10739222.7A 2009-02-06 2010-02-08 Valves utilisant un moteur rotatif piézoélectrique réversible Withdrawn EP2394081A4 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15070309P 2009-02-06 2009-02-06
US12/639,232 US8183740B2 (en) 2008-12-17 2009-12-16 Piezoelectric motor with high torque
PCT/US2010/023470 WO2010091343A2 (fr) 2009-02-06 2010-02-08 Valves utilisant un moteur rotatif piézoélectrique réversible

Publications (2)

Publication Number Publication Date
EP2394081A2 true EP2394081A2 (fr) 2011-12-14
EP2394081A4 EP2394081A4 (fr) 2017-09-20

Family

ID=42542673

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10739222.7A Withdrawn EP2394081A4 (fr) 2009-02-06 2010-02-08 Valves utilisant un moteur rotatif piézoélectrique réversible

Country Status (4)

Country Link
EP (1) EP2394081A4 (fr)
JP (1) JP2012517569A (fr)
CN (1) CN102308132A (fr)
WO (1) WO2010091343A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2498398B (en) * 2012-01-16 2015-09-16 Spirax Sarco Ltd Linear actuator comprising a plurality of linear piezoelectric motors
CN103375627B (zh) * 2012-04-12 2017-08-25 丹佛斯公司 致动器布置结构
CN108591584B (zh) * 2018-05-31 2024-04-12 温州大学 一种控制转阀的压电驱动装置

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Publication number Priority date Publication date Assignee Title
JPH02142371A (ja) * 1988-04-20 1990-05-31 Toyo Electric Mfg Co Ltd 超音波モータ
JPH10117486A (ja) 1996-10-11 1998-05-06 Takata Kk 超音波モータ及びシートベルトリトラクタ
DE19909482A1 (de) * 1999-03-04 2000-09-07 Bosch Gmbh Robert Piezoelektrischer Aktor
JP2000323763A (ja) * 1999-05-10 2000-11-24 Toyota Motor Corp 接合型アクチュエータおよびその製造方法
JP2001112275A (ja) * 1999-10-04 2001-04-20 Pacific Ind Co Ltd 超音波モータ及び超音波モータを利用した流量制御弁
US6867532B2 (en) * 2003-07-17 2005-03-15 The Brady Group Inc. Long life piezoelectric drive and components
JP4428281B2 (ja) * 2005-04-19 2010-03-10 いすゞ自動車株式会社 燃料噴射弁
UA84563C2 (ru) * 2005-11-29 2008-11-10 Сергей Федорович Петренко Моторный клапан с поворотной пробкой
UA84065C2 (ru) * 2006-11-09 2008-09-10 Сергей Федорович Петренко Пьезоэлектрический генератор механических колебаний и пьезоелектрический двигатель на его основе (варианты)

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Title
See references of WO2010091343A2 *

Also Published As

Publication number Publication date
JP2012517569A (ja) 2012-08-02
CN102308132A (zh) 2012-01-04
WO2010091343A3 (fr) 2010-12-02
EP2394081A4 (fr) 2017-09-20
WO2010091343A2 (fr) 2010-08-12

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