EP2370780A1 - Montage optique pour la mesure ou le contrôle sans contact de la surface d'un corps - Google Patents

Montage optique pour la mesure ou le contrôle sans contact de la surface d'un corps

Info

Publication number
EP2370780A1
EP2370780A1 EP09759965A EP09759965A EP2370780A1 EP 2370780 A1 EP2370780 A1 EP 2370780A1 EP 09759965 A EP09759965 A EP 09759965A EP 09759965 A EP09759965 A EP 09759965A EP 2370780 A1 EP2370780 A1 EP 2370780A1
Authority
EP
European Patent Office
Prior art keywords
reference edge
body surface
arrangement according
gap
optical arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09759965A
Other languages
German (de)
English (en)
Inventor
Carsten Glasenapp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Industrielle Messtechnik GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of EP2370780A1 publication Critical patent/EP2370780A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Definitions

  • the invention relates to an optical arrangement for non-contact measurement or testing of properties of a body surface, such as curvature, shape, contour, roughness, position.
  • the arrangement according to the invention is suitable both for quality control of technical surfaces by measurement, comparison with reference surfaces and for measuring microstructures on surfaces.
  • the workpiece is mechanically touched, detects the movements of the probe by means of scales and closed from the measured values obtained on the workpiece shape or deviations from the desired shapes.
  • a measuring arrangement described in DD 148 982 B1 assesses the presence of permissible or impermissible gap widths in the testing of rotationally symmetrical components, in particular in connection with piston rings for internal combustion engines or compression rings for compressors.
  • the ring to be tested is clamped in a gauge ring and directed light on the gap between the ring to be tested and the teaching ring.
  • the light penetrating through the gap is converted by means of a photoreceiver into an analog electrical signal and this is based on the evaluation of the gap width.
  • the testing or measuring of body geometries and surface topographies is not possible with this arrangement.
  • the object of the invention is to create an arrangement of the type described at the outset, with which body geometries and surface topographies can be measured or tested in a relatively short time with low technical outlay.
  • an optical arrangement for the contactless determination of the property of a body surface such as curvature, course, contour, position or roughness
  • a body surface such as curvature, course, contour, position or roughness
  • Means for forming a gap between the body surface and a reference edge, the reference edge defining the direction of a tangent to the body surface, and the distances between the body surface and the reference edge, as viewed in the direction of the normal of the tangent, defining gap widths means for imaging the gap onto a spatially resolving detector, an evaluation device connected to the detector for determining gap widths lying next to one another in the direction of the tangent on the basis of the output signals of the detector, and for determining the property of the body surface, such as curvature, course, contour or roughness, based on the gap widths lying next to each other along the tangent line.
  • the optical arrangement according to the invention may be designed to measure the properties on the basis of the gap widths determined as physical variables or to check the characteristic shafts by comparing the determined gap widths with target gap widths.
  • the extension of the reference edge in the direction of the tangent corresponds in a special case to the expansion of the body surface in this direction, that is to say the gap formed between the reference edge and the body surface extends over the entire extent of the body surface in this direction.
  • the gap is overall imaged onto the detector for evaluation.
  • the arrangement according to the invention has a device for displacing the reference edge in this direction. This ensures that the reference edge facing one another temporally successive different portions of the body surface.
  • the gap that forms in each case in the direction of the tangent is imaged onto the detector for evaluation.
  • the one-dimensional contour of the body surface in the direction of the reference edge can be determined.
  • a device for parallel displacement of the reference edge perpendicular to the tangent direction is additionally provided in a corresponding embodiment of the arrangement according to the invention. This ensures that the reference edge in succession facing the most different subregions of the body surface and the time each formed gap is imaged for evaluation on the detector.
  • a forced guidance can be provided, which is designed, for example, as a mechanical straight or curved guide and serves to guide the reference edge during its movement at a constant distance from the body surface, which corresponds to a predetermined gap width. It is conceivable and is also within the scope of the invention, if, as an alternative to a forced operation or in addition to a control device is provided which is designed to maintain the distance between the reference edge and the body surface based on a continuous or periodic distance measurement.
  • the detector consists of a plurality of individual sensors, which are arranged either in one row or in several parallel rows.
  • the electronic output signals of those sensors of the detector, on which the gap is imaged or which are illuminated due to the image, are a measure of the gap width.
  • the gap width and position of the gap is determined by evaluating the intensity distribution as the equivalent of the output signal strengths.
  • To evaluate the intensity distribution subpixel algorithms are advantageously used. Such evaluation are known from the prior art and are therefore not explained here. With the subpixel evaluation, the intensity distribution can be determined more accurately than with the alternatively likewise possible evaluation of the intensity distribution taking into account the distances of individual sensors.
  • the detectors used are, for example, CCD sensors, which generally consist of light-sensitive photodiodes, also referred to as pixels, arranged in rows and columns, more rarely in one row only.
  • the reference edge is assigned a light exit opening from which the light coming from a light source, preferably through focusing optics, is directed onto the body surface opposite the reference edge.
  • the light exit opening is positioned in relation to the detector so that the exiting light serves as illuminating light in the image of the gap on the detector.
  • a light emitting diode may be provided, which preferably emits light of a specific wavelength with homogeneous intensity and is connected, for example, via a light guide to the light exit opening.
  • a broadband light source in combination with a diffractive lens is used in order to produce a different position of the focal line as a function of the wavelength.
  • measurements in the axial direction are possible.
  • the reference edge is formed on a jig, and the light source is integrated into the jig.
  • the detector should be preceded by an imaging optics with a defined magnification.
  • the width of the gap is determined by means of an image evaluation program.
  • the detector and the imaging optics are components of a camera, and the camera and the jig are fixedly connected to each other at a predetermined distance.
  • At least one deflecting mirror can be provided in the beam path between the gap and the imaging optics.
  • the imaging optics may be preceded by a polarizing filter.
  • a polarizing filter especially the reflections are not imaged on the detector, which have a polarization direction parallel to the body surface and could falsify the evaluation result.
  • the reference edge is designed as a straight line.
  • the reference edge is annular and the body surface is the inner surface of the reference edge centric enclosing circular cylinder, wherein between the reference edge and the body surface, an annular gap is formed, and - a device for imaging of the annular Spaltes on a spatially resolving detector is present.
  • the reference edge is formed on a jig, which in this case has the shape of a round gauge.
  • the light exit surface is also annular and assigned to the reference edge.
  • a device for displacing the teaching mandrel including the reference edge and the light exit surface in the direction of the center axis of the cylindrical inner surface is also present here.
  • the optical arrangement according to the invention is particularly suitable for non-contact measuring or checking of the diameter, the position, the position or the shape of boreholes.
  • a three-dimensional surface topography of the bore can be created.
  • a detector here also serves a CCD camera with optics, which is connected at a fixed distance with the teaching mandrel. From the image scale of the optics and the distance of the pixels to each other can thus be concluded from the camera image on the diameter, shape and position of the borehole.
  • reference edge is exchangeable or adjustable in size
  • embodiments in which the determination of course, contour, position or roughness of the body surface from the interpretation of the resulting due to light diffraction camera image is provided.
  • FIG. 2 shows the optical arrangement according to the invention according to FIG. 1 in an embodiment for the contactless measuring or testing of the inner surfaces of recesses, in particular of bores
  • FIG. 3 shows examples for non-contact measuring or testing of outer surfaces or on
  • FIG. 4 shows a first example of an image of the gap on the detector
  • FIG. 5 shows a second example of an image of the gap on the detector
  • FIG. 6 shows the optical arrangement according to FIG. 2 in an embodiment in which it is particularly suitable for non-contact measuring or checking of the diameter, the position, the orientation or shape, the dimensional stability or the roughness of a borehole with a particularly highly reflective inner surface
  • FIG. 7 shows the beam paths in the measurement or testing of a borehole with the embodiment shown in FIG. Detailed description of the drawings
  • FIG. 1 symbolically shows a body 1 for whose body surface 2 the curvature, course, contour or roughness is to be measured or checked. Opposite the body surface 2 is a jig 3 with a reference edge 4. Between the reference edge 4 and the body surface 2 a gap 5 with the gap width a is formed.
  • the teaching 3 is connected via a spacer 6 with a camera 7, which comprises an imaging optics 8 and a spatially resolving detector 9.
  • the body surface 2 which is substantially planar in this embodiment, is extended in the coordinate directions Y, Z of a Cartesian coordinate system X, Y, Z, while the gap width a extends in the direction X.
  • the reference edge 4 then extends in the direction Y or perpendicular to the plane X, Z, and the gap 5 lies in the plane X, Y.
  • a light-emitting diode 10 is integrated, which is preceded by a focused optics 11 in the emission of the outgoing light from her.
  • the light-emitting diode 10 preferably emits light of a specific wavelength, for example 500 nm, with a homogeneous intensity.
  • the reference edge 4 is assigned a light exit opening 12 through which the light of the light-emitting diode 10 illuminates the object under test at the height of the gap 5.
  • the illuminated gap 5 is imaged through a transparent holding plate 13 by means of the imaging optics 8 on the spatially resolving detector 9, wherein the images of the reference edge 4 and the area of the body surface 2, which is the reference edge 4 opposite, form the measuring marks for the gap width.
  • the detector 9 comprises a plurality of individual sensors, also referred to as pixels, which are arranged either in only one row or in a matrix of a plurality of rows and columns.
  • the magnification of the imaging optics 8 is adjusted to the spacings of the pixels in the detector so that the electronic output signals of the illuminated in the image of the gap 5 on the detector 9 pixels are equivalent to the gap width a.
  • the transparent holding plate 13 is designed as a polarizing filter, disturbing reflections which have a polarization direction parallel to the body surface 2 are advantageously not imaged on the detector.
  • the extent of the gap 5 in the direction Y is matched to the number of parallel juxtaposed sensor rows of the detector 9. If the detector 9 has only one sensor line, the reference edge 4 has an extent which corresponds to the reception range of the sensors of this line in the direction Y. If the detector 9 has a plurality of sensor lines lying next to one another in the direction Y, then the reference edge 4 is extended correspondingly to the reception range of these sensors.
  • the detector 9 is followed by an evaluation device, not shown graphically, which is designed to determine a plurality of juxtaposed gap widths a in the direction Y on the basis of the outputs from the detector output signals and to determine the property of the body surface on the basis of the differences in the direction Y adjacent gap widths a.
  • the curvature, course, contour, position or roughness of the body surface 2 in the region which lies opposite the reference edge 4 are determined on the basis of the gap widths a.
  • a device for displacing the arrangement according to the invention and the body 1 relative to one another in the directions Y and / or Z is provided.
  • the body 1 may be arranged fixed, while the arrangement according to the invention is movably connected to the displacement device.
  • the gap width a can be determined for areas of the body surface 2 whose extent is greater than the extent of the reference edge 4.
  • the properties already mentioned become over wide ranges of the body surface 2 such as curvature, shape, contour or roughness.
  • the displacement device is not shown in the drawing, but can be realized with linear guides, which are known per se from the prior art. In this case, a mechanical forced operation can be provided, which ensures that the distance between the body surface 2 and the reference edge 4 remains constant during the displacement.
  • FIG. 1 describes the mode of operation of the arrangement according to the invention in connection with the determination of the properties of a substantially planar body surface 2 lying on a body 1
  • FIG. 2 shows by way of a second exemplary embodiment the mode of operation for non-contact measurement or Checking the Properties of an Internal Body Surface 2.
  • FIG. 2 shows by way of a second exemplary embodiment the mode of operation for non-contact measurement or Checking the Properties of an Internal Body Surface 2.
  • the same reference numerals as in FIG. 1 are used in FIG. 2 for the same components.
  • the body 1 shown here in a cross-section has a recess 14, for example a hole or a slot.
  • the teaching 3 is here, in contrast to the embodiment of Figure 1, designed as a teaching mandrel, which dips into the recess 14.
  • the direction Y also corresponds in this case to the direction of a tangent applied to the body surface 2
  • the direction X corresponds to the direction of the normal to the tangent.
  • the gap widths a are again measured in the direction X.
  • a light-emitting diode 10 is integrated into the teaching 3, wherein in the light path from the light-emitting diode 10 to the gap 5 a focusing optics 11 is provided. Again, a light guide 15 may be provided.
  • a device for displacing the arrangement according to the invention and the body 1 relative to one another in the direction of the tangent and / or in the direction Z can also be provided , advantageous here again in conjunction with a forced operation.
  • FIG. 3 shows various embodiments for positioning and guiding the jig 3 or the arrangement according to the invention relative to different areas of the body surface 2 on the body 1.
  • the teaching 3.1 for non-contact scanning of an outer planar body surface 2.1 is provided and displaced for this purpose in the direction R1.
  • the teaching 3.2 designed as a teaching mandrel as shown in Figure 2, is provided for scanning an inner curved body surface 2.2, for example, introduced into the body 1 bore 16.
  • the teaching 3.2 is moved on a circular path in the direction R2, wherein the Distance between the reference edge 4 and the body surface 2.2 is kept constant by means of forced operation or distance control.
  • the teaching 3.3 is used to scan the inside curved body surface 2.3 introduced into the body 1 long hole 17.
  • the movement of here also trained as a teaching mandrel 3.3 takes place in the direction R3, where also the distance between the reference edge 4 and body surface 3.3 is constant is held.
  • the locomotion directions R1, R2 and R3 always correspond to the direction of the tangents to the respective body surface 2.1, 2.2, 2.3, while the gap width a is measured in the direction of the normal.
  • the scanning of the body surfaces 2.1, 2.2 and 2.3 in the drawing plane i. the curvature, course, contour or roughness of the body surfaces 2.1, 2.2 and 2.3 are determined in the illustration chosen for explanation only in the plane of the drawing.
  • the teachings 3.1, 3.2 and 3.3 are moved into the plane of the drawing or out of the plane of the drawing. By juxtaposing several contour lines, a three-dimensional topography of the body surfaces 2.1, 2.2 and 2.3 to be measured or checked is created.
  • the shape of the gauge should be matched to the contours of the specimen to be measured.
  • round shapes are to be chosen, it being expedient to use gauges with different diameters for different hole diameters, since the measuring error increases with increasing light gap.
  • the invention includes: a set of gauges with different diameters, or a gage with a changeable cover, in which the replacement of a diaphragm disc adapts the outside diameter to the diameter of the borehole to be measured, or a variable gage in which can be varied steplessly according to the principle of an inverse iris diaphragm, the outer diameter.
  • the arrangement according to the invention makes it possible to measure or test both by the light-splitting method and by the principle of triangulation measurement.
  • the reference edge has the function of the measuring edge of a known hair ruler.
  • the teaching is positioned so that the reference edge of the body surface to be measured or examined faces or is placed on this, and the gap thereby forming is imaged as described under illumination in backlight as a light gap on the spatially resolving detector and imaging by image evaluation assessed quantitatively or qualitatively.
  • the light gap sensor becomes a triangulation sensor.
  • the triangulation sensor determines its distance to the center or the reference edge of the gauge from the position of the light intensity distribution of the body surface on the camera chip.
  • the gap and the two rays which on the one hand come from the reference edge and, on the other hand, from the region of the body surface opposite the reference edge form a triangle.
  • the knowledge of the distance between the reference edge and the detector on the gauge and the positions of the images of the illuminated in the backlight reference edge and the reference edge opposite portion of the body surfaces are used on the basis of the known Triangulationsuringen to assess the gap width.
  • the determination of small gap widths according to the principle of the light gap method the determination of larger gap widths according to the principle of the triangulation method without the two methods influence each other in an undesirable manner.
  • the illumination light should be focused on the relevant area of the body surfaces in order to achieve the desired measurement accuracy.
  • the depth measurement accuracy is determined by the size of the focus line.
  • the measuring range can be expressed as a function of the accuracy as a function of the gap width a.
  • the accuracy can be influenced by the shadow of the teaching mandrel.
  • the beam waist of the illumination defines the achievable accuracy.
  • a diffractive illumination optics can be provided with a spectrally tunable light source, whereby the measuring range can be achieved without a reduction in the
  • the tunable light source can be realized in the form of multiple light sources with different wavelengths, a multispectral laser or a white light source in cooperation with a spectral filter.
  • extraneous light influences can be blocked by means of a color filter in front of the imaging optics.
  • a significant advantage of the arrangement according to the invention is the suitability for contact-free checking of the desired geometries or topographical measurement of geometries within seconds.
  • Another field of application is the use in coordinate measuring machines. Since the gap width a can be determined accurately, it is possible to quickly and non-contact determine the position, the position and the surface structure of any workpiece in the coordinate system of a coordinate.
  • the arrangement according to the invention is preferably equipped with a device for measuring and regulating the distance between the jig and the workpiece in the axial direction in order to prevent possible collisions.
  • the already mentioned distance control in the direction of the gap width a can also serve to detect a risk of collision early on.
  • the use of an axial distance sensor expands the possible use of the arrangement described in that measurements in the entire half space +/- x, +/- y and + z of the coordinate system X, Y, Z can be performed.
  • the reference edge is annularly formed on a circular teaching mandrel, and the body surface surrounds the inner surface of a reference edge centrically
  • Circular cylinder wherein between the reference edge and the body surface, an annular gap is formed, and is
  • - 12 - means for imaging the annular gap on a spatially resolving detector, a vertical light distribution within a borehole to be evaluated is imaged on the horizontal plane of the detector.
  • the intensity distribution recorded with the detector on the diameter or the shape of the borehole the light distribution in the borehole and its propagation must be defined.
  • the intensity center of gravity of the light distribution lies on the object plane of the imaging optics
  • the intensity center of gravity in the image on the detector corresponds to the position of the borehole wall. 4 shows an example of this.
  • the intensity focus of the light distribution in the borehole lies below the object plane of the imaging optics.
  • the position of the borehole wall is on the falling edge of the intensity distribution in the figure. 5 shows an example.
  • Figure 6 As far as clarity is concerned, the same reference numerals have been used in Figure 6 for the same components, which can already be seen in Figure 1 or Figure 2.
  • the teaching 3 is here as well as already described above formed as a teaching mandrel, which dips into the bore 18.
  • the camera 7 in turn comprises an imaging optics 8 and a spatially resolving detector 9. Furthermore, a light-emitting diode 10, a focusing optics 11, a light exit opening 12, a holding plate 13 and a light guide 15 are present.
  • the light emitting diode 10 is integrated in the teaching 3
  • the focusing optics 11 is located in the light path between the light emitting diode 10 and the gap 5
  • the reference edge 4 is fixed in the focal plane F of the focused optics 11.
  • the light guide 15 is used to transmit the of the
  • the direction Y in this case corresponds to the direction of a tangent to the inner surface 19 of the bore 18, while the direction X defines the direction of the normal to the tangent.
  • the respective gap width a is measured in the direction X.
  • the reference edge 4 is inserted into the bore 18, wherein the light emitted from the light emitting diode 10 via the light guide 15 homogeneous light illuminates the inner surface 19.
  • the reflective property of the inner surface 19 causes light reflected from the inner surface 19 to strike the reference edge 4 and be scattered therefrom.
  • the light scattered by the reference edge 4 is imaged on the detector 9 of the camera 7 by means of the imaging optics 8, which is fixedly arranged at a defined distance from the gauge 3.
  • annular images of the reference edge 4 are formed on the detector 9: a first annular image is produced via the beam path 20, which, starting from the position 23.3 shown in FIG. 7, the direct path of the light from the circumference of the reference edge 4 to the detector 9 describes; a second annular image is formed via the beam path 21, which, depending on the position 23.1 shown in FIG. 7, describes the path of the light scattered by the reference edge 4 and reflected at the reflecting inner surface 19 to the detector 9.
  • the diameter of the bore 18 is determined in a downstream evaluation device.
  • Fig.7 is for explaining the determination of the positions of the two images on the detector 9. Based on the center of the circular reference edge 4 may be the radius r Le hre the reference edge 4 and the radius r Re FIEX the reflection are determined on the inner surface nineteenth It follows from the laws of reflection that the distance S drawn in FIG. 7 is equal to the distance S '. Consequently, the radius r object of the bore 18 can be determined from the relationship
  • the image resulting from the beam path 22 appears on the detector 9 between the two images of the reference edge 4 and is dependent on the reflectance or roughness of the inner surface 19 with respect to their intensity. Assuming that the inner surface 19 reflects the light 100% or the roughness of the inner surface 19 is equal to "zero", this image is not visible, since the light is completely reflected by the entire inner surface 19. In contrast, depending on the roughness and the wavelength of the light, the proportion of light, the is scattered on the inner surface 19, with the result that the image of this illuminated zone becomes all the more visible.
  • positions 23.1, 23.2 and 23.3 are only positions in the plane of the illustrated cross-section of the teaching 3 and the borehole 18. Since reference edge 4 rotates circular and thus rotate the positions 23.1, 23.2 and 23.3 circular within the borehole 18 , the respective illustrations are circular.
  • a statement about the roughness of the object can be made by comparing the intensities of the images obtained from positions 23.1, 23.2 and 23.3.
  • the embodiment of the optical arrangement according to the invention shown by way of example in FIGS. 6 and 7 is particularly advantageously suitable for non-contact measurement or testing of the diameter, the position, the orientation or the shape retention of holes with surfaces of low roughness.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention porte sur un montage optique pour la mesure ou le contrôle sans contact des propriétés de la surface d'un corps, telles que la courbure, le profil, le contour, la rugosité, la position. Le montage convient tant au contrôle de qualité de surfaces techniques grâce à une mesure ou à une comparaison à des surfaces de référence, qu'à la mesure de microstructures sur la surface. C'est ainsi qu'il est possible de mesurer des rugosités qui sont inférieures à la longueur d'onde de la lumière servant à l'éclairage. Selon l'invention, un montage optique du type ci-dessus comprend des moyens pour réaliser une fente entre la surface du corps et une arête de référence, - un dispositif pour former l'image de la fente sur un détecteur, et - un dispositif d'évaluation relié au détecteur, - pour déterminer des largeurs de fente situées les unes à côté des autres, à l'aide des signaux de départ du détecteur, et pour déterminer la courbure, le profil, le contour ou la rugosité de la surface du corps à l'aide des largeurs de fente disposées les unes à côté des autres. A partir de la comparaison des images obtenues à partir de deux positions quelconques à l'intérieur de trou, on peut conclure entre autres à un défaut d'alignement entre l'objet de la mesure et le dispositif de mesure.
EP09759965A 2008-12-05 2009-12-02 Montage optique pour la mesure ou le contrôle sans contact de la surface d'un corps Withdrawn EP2370780A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008060621A DE102008060621B3 (de) 2008-12-05 2008-12-05 Optische Anordnung zum berührungslosen Messen oder Prüfen einer Körperoberfläche
PCT/EP2009/066271 WO2010063775A1 (fr) 2008-12-05 2009-12-02 Montage optique pour la mesure ou le contrôle sans contact de la surface d'un corps

Publications (1)

Publication Number Publication Date
EP2370780A1 true EP2370780A1 (fr) 2011-10-05

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EP09759965A Withdrawn EP2370780A1 (fr) 2008-12-05 2009-12-02 Montage optique pour la mesure ou le contrôle sans contact de la surface d'un corps

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US (1) US8767218B2 (fr)
EP (1) EP2370780A1 (fr)
CN (1) CN102239384B (fr)
DE (1) DE102008060621B3 (fr)
WO (1) WO2010063775A1 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013046451A1 (fr) * 2011-09-30 2013-04-04 オリンパス株式会社 Appareil de mesure de forme pour surfaces intérieures, tête de détection et appareil d'endoscope
DE102013208397B4 (de) 2013-05-07 2018-05-24 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät mit einem zusätzlichen, berührungslos messenden Oberflächenvermessungsgerät
US9316493B2 (en) * 2013-12-13 2016-04-19 Siemens Energy, Inc. Method and apparatus for determining gas turbine dampening cone inner diameter
CN104019758A (zh) * 2014-05-21 2014-09-03 朱飞虎 手机外壳翘曲变形自动检测系统及方法
DE102014218974A1 (de) 2014-09-22 2016-03-24 Carl Zeiss Industrielle Messtechnik Gmbh Beleuchtungsmodul und optischer Sensor für ein Koordinatenmessgerät zur Vermessung von Innengewinden oder Bohrlöchern eines Werkstücks
WO2017125576A1 (fr) * 2016-01-20 2017-07-27 Bühler AG Dispositif et procédé de caractérisation d'une surface d'un cylindre ou d'un cylindre cannelé
JP6839928B2 (ja) * 2016-04-26 2021-03-10 株式会社三井ハイテック 異形積層鉄心の測定方法
CN106027731A (zh) * 2016-07-18 2016-10-12 苏州派斯威尔自动化科技有限公司 一种手机外壳的检测设备
JP6859628B2 (ja) * 2016-08-10 2021-04-14 株式会社ジェイテクト 外観検査方法および外観検査装置
EP4142284A1 (fr) * 2017-03-06 2023-03-01 Gelsight, Inc. Systèmes de mesure de topographie de surface
DE102018114005A1 (de) * 2018-06-12 2019-12-12 Carl Zeiss Jena Gmbh Materialprüfung von optischen Prüflingen
CN109632826A (zh) * 2018-11-29 2019-04-16 广东骏亚电子科技股份有限公司 检测钻针磨损程度的方法
CN112344866B (zh) * 2020-02-11 2022-04-26 临沂市交通制冷工程有限公司 一种空调u型铜管自动检测装置

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH312736A (fr) 1953-12-04 1956-02-29 Genevoise Instr Physique Procédé de contrôle de la section d'une pièce prismatique au moyen d'un projecteur de profils et dispositif accessoire pour sa mise en oeuvre
US3102960A (en) * 1959-07-20 1963-09-03 Sick Erwin Photoelectric device for high precision linear measurement
DD84941A1 (de) * 1970-08-11 1971-10-05 Walter Boettger Verfahren zur bestimmung der Oberflächenbeschaffenheit, insbesondere von Beton-, Putz-, Kunststein- und Natursteinoberflächen
US3883249A (en) * 1972-05-15 1975-05-13 Timothy R Pryor Z-factor and other diffractographic displacement and profile sensors
US4305661A (en) 1979-02-27 1981-12-15 Diffracto, Ltd. Method and apparatus for determining physical characteristics of objects and object surfaces
US4315688A (en) 1979-08-08 1982-02-16 Diffracto Ltd. Electro-optical sensor systems for thread and hole inspection
DD148982B1 (de) * 1980-02-05 1986-07-09 Coors Hans Georg Messanordnung zur bestimmung unzulaessiger spalte zwischen rotationssymmetrischen bauteilen
US4453082A (en) 1980-11-14 1984-06-05 Diffracto Ltd. Coordinate measuring method and device
JPS6022614A (ja) 1983-07-18 1985-02-05 Koyo Seiko Co Ltd 光学的形状測定装置
US4863268A (en) 1984-02-14 1989-09-05 Diffracto Ltd. Diffractosight improvements
JPH03115912A (ja) 1989-09-29 1991-05-16 Nippon Telegr & Teleph Corp <Ntt> 光学式管内径測定装置
JP3115912B2 (ja) 1991-07-31 2000-12-11 オリンパス光学工業株式会社 画像記録装置
ES2106502T3 (es) * 1993-01-21 1997-11-01 Technomed Ges Fur Med Und Med Procedimiento y dispositivo para la determinacion de la topografia de una superficie reflectante.
JP3390014B2 (ja) 1995-02-14 2003-03-24 ナショナル リサーチ カウンシル オブ カナダ 表面の形態描写の向上
US5523583A (en) 1995-04-03 1996-06-04 Optical Gaging Products, Inc. Telecentric variable magnification optical system for video based inspection system
KR100267665B1 (ko) 1997-08-28 2001-01-15 하나와 요시카즈 표면검사장치
DE19816270A1 (de) 1998-04-11 1999-10-21 Werth Messtechnik Gmbh Verfahren und Anordnung zur Erfassung der Geometrie von Gegenständen mittels eines Koordinatenmeßgeräts
CN1115546C (zh) * 1999-12-29 2003-07-23 宝山钢铁股份有限公司 表面三维形貌检测方法和装置
DE10047270A1 (de) 2000-07-20 2002-02-07 Mycrona Ges Fuer Innovative Me Verfahren zur optischen Vermessung einer Oberfläche eines Objektes
WO2003008905A1 (fr) * 2001-07-16 2003-01-30 Werth Messtechnik Gmbh Procede pour mesurer des proprietes superficielles et dispositif de mesure de coordonnees
JP4742048B2 (ja) * 2003-12-10 2011-08-10 アプライド マテリアルズ イスラエル リミテッド 高度な粗さ度量衡
WO2007033702A1 (fr) * 2005-09-19 2007-03-29 Gutehoffnungshütte Radsatz Gmbh Procede pour determiner de maniere dynamique sans contact le profil d'un corps solide
JP4639135B2 (ja) * 2005-10-19 2011-02-23 株式会社ミツトヨ プローブ観察装置、表面性状測定装置
ITMI20061282A1 (it) 2006-07-03 2008-01-04 Gkn Driveline Bruneck Ag Metodo e dispositivo per la valutazione del profilo superficiale del componente di uno snodo
CN101266143A (zh) * 2007-03-13 2008-09-17 鸿富锦精密工业（深圳）有限公司 平面度检测装置及方法
JP2008233545A (ja) 2007-03-20 2008-10-02 Nsk Ltd マニピュレータ
US8004688B2 (en) * 2008-11-26 2011-08-23 Zygo Corporation Scan error correction in low coherence scanning interferometry

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2010063775A1 *

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CN102239384A (zh) 2011-11-09
US20120069351A1 (en) 2012-03-22

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