EP2344769B1 - Vacuum pump rotor - Google Patents

Vacuum pump rotor Download PDF

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Publication number
EP2344769B1
EP2344769B1 EP09782947.7A EP09782947A EP2344769B1 EP 2344769 B1 EP2344769 B1 EP 2344769B1 EP 09782947 A EP09782947 A EP 09782947A EP 2344769 B1 EP2344769 B1 EP 2344769B1
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EP
European Patent Office
Prior art keywords
rotor
vacuum pump
elements
projection
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP09782947.7A
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German (de)
French (fr)
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EP2344769A1 (en
Inventor
Rainer Hölzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
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Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Priority to EP14171260.4A priority Critical patent/EP2775149A1/en
Publication of EP2344769A1 publication Critical patent/EP2344769A1/en
Application granted granted Critical
Publication of EP2344769B1 publication Critical patent/EP2344769B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Definitions

  • the invention relates to a vacuum pump rotor, in particular a turbomolecular pump rotor.
  • Vacuum pump rotors as used in particular in turbomolecular pumps, have a plurality of rotor disks arranged parallel to one another and connected to a rotor shaft. Since this is to be manufactured extremely accurately in close tolerances component, such pump rotors are often formed in one piece. The manufacture of the rotor disks, including the rotor blades having a complex geometry, takes place here from the solid. Such a production of vacuum pump rotors is extremely complex and time consuming. Furthermore, there is a high material removal, so that high Matterial- and tooling costs arise.
  • pump rotors are known in which rotor disks are shrunk onto a rotor shaft designed as a hollow or solid shaft. This has the advantage that the individual rotor disks, in particular the rotor blades of the rotor disks, can be produced easily.
  • rotors build relatively large because of the required stability of the rotor, the diameter of the shaft must be relatively large. Further a bell-shaped shape of the rotor in the bladed area is not possible.
  • a vacuum pump with a plurality of separate rotor elements is known.
  • Each rotor element has a rotor disk and a cylindrical projection.
  • the individual rotor elements are arranged on a solid shaft or are connected to each other via clamping elements to form a solid shaft.
  • the object of the invention is to provide a multi-part vacuum pump rotor with improved construction.
  • the vacuum pump rotor according to the invention which is in particular a rotor for a turbomolecular pump, has a plurality of separate rotor elements, so that the rotor disks and the rotor shaft are not formed in one piece.
  • Each of the rotor elements has a plurality, preferably a single rotor disk.
  • the rotor disk is preferably annular and has a cylindrical projection on its inside. The approach forms a shaft portion of the rotor.
  • the projections forming the shaft sections are connected to one another, in particular by shrinking methods, so that the projections form a rotor shaft.
  • the rotor shaft is then surrounded in each case by rotor disks connected to the individual lugs. Because the Rotor shaft is formed by the projections of the rotor elements, a separate rotor shaft can be omitted. As a result, the space of the pump rotor can be kept low.
  • connection of the rotor elements to form the rotor shaft by shrinking the lugs of the rotor elements.
  • an inner joining surface of a projection of a first rotor element bears against an outer joining surface of a projection of an adjacent rotor element. It is particularly preferred that the next rotor element is then formed at least with respect to the approach corresponding to the first rotor element, so that this rests with its inner joining surface on an outer joining surface of the preceding arranged between the two rotor elements rotor element.
  • each identical rotor elements can alternately be arranged so that alternately rotor elements are provided with an inner and an outer approach. The provision of particularly identical rotor elements has the advantage that the production costs can be significantly reduced.
  • the projections of the rotor elements are preferably designed such that they protrude from the rotor disk in both directions, wherein projections of adjacent rotor elements each overlap at least partially.
  • the rotor elements at the ends of the rotor have no outwardly facing lugs, this being appropriate for reasons of symmetry of the individual rotor element is expedient to avoid shrinkage during deformation of the rotor disk in the axial direction of the rotor or twisting the rotor disk.
  • the end elements of the rotor may also have a different structure.
  • the rotor elements are preferably mirror-symmetrical in the region of the projections to a center plane.
  • the median plane is the plane passing through the rotor center and perpendicular to the rotor longitudinal direction.
  • an example bell-shaped rotor carrier may be connected to the first rotor element.
  • the rotor carrier is preferably also connected to the rotor element by shrinking.
  • the rotor carrier can be designed in accordance with a rotor element, but in a preferred embodiment has a special design. This can for example consist in that the rotor carrier has a suitable guide or receptacle for a connection to the drive shaft.
  • the rotor carrier is connected to at least one rotor disk, in particular integrally formed therewith.
  • the rotor carrier is especially if it is a turbomolecular pump rotor preferably arranged on the inlet side of the rotor. With the last, ie in the direction of the outlet side last arranged rotor elements, a further pumping element, such as a drag stage can be connected. This connection can also be made by shrinkage.
  • stiffening elements such as reinforcements, which may in particular be made of CFRP, are connected to at least some of the rotor elements.
  • the stiffening elements are preferably connected to a free outer surface of the neck, i. a surface that does not abut a shoulder of an adjacent rotor element connected.
  • the stiffening elements are annular and surround the entire approach.
  • an inner diameter of the lugs is arranged close to the rotor disk, has a smaller diameter than a region of the lug which is more remote from the rotor disk. Starting from the rotor disk, the approach is thus preferably formed obliquely or conically outward.
  • FIG. 1 Vacuum pump rotor shown has three rotor elements 10, 12, 10, Here, the two rotor elements 10 are formed identically.
  • Each rotor element 10, 12 has an annular, cylindrical projection 14, 16.
  • the lugs 14, 16 are each connected to a rotor disk 18 having wings with different inner diameters.
  • the three R.otor institute 10, 12 are connected to each other via a shrinking process.
  • an inner joining surface 20 of the projection 14 of the first rotor element 10 is connected to an outer joining surface 22 of the projection 16 of the second rotor element 12.
  • the two lugs 16, 14 in this case overlap in the axial direction 24 such that the lug 14 rests against an outer side 26 of the rotor disk 18 of the second rotor element 12.
  • a further rotor element 10 the outer dimension of which substantially corresponds to the first rotor element 10, is arranged.
  • the corresponding projection 14 in turn overlaps the projection 16 in such a way that it bears against an outer side 28 of the rotor disk 18 of the second rotor element 12.
  • a rotor carrier 30 In the in FIG. 1 illustrated embodiment of the invention is connected to the first rotor element 10, a rotor carrier 30.
  • This also has a cylindrical, annular projection 32, the outer joining surface 34 rests against the inner joining surface 20 of the first rotor element 10, so that a connection by shrinking takes place.
  • the rotor carrier 30 is formed in one piece and has two rotor disks 18. Furthermore, the rotor carrier on a central to the longitudinal axis 36 of the rotor symmetrical recess 38. Through the recess 38, the rotor carrier 32 can be connected to a drive shaft.
  • FIG. 1 On the opposite side of the rotor is the in FIG. 1 lower rotor element 10 is connected to a further slightly different in geometry rotor member 40.
  • the rotor element 40 has a radially outwardly extending body 42, which is in turn connected to the inside with a lug 44.
  • An outer joining surface 46 of the projection 44 is connected to an inner joining surface 28 of the projection 14 by shrinking.
  • the rotor element 40 also has one integrally with the body 42 connected rotor disk 18.
  • the body 42 has an annular receiving surface 50 arranged symmetrically with respect to the longitudinal axis.
  • a further pumping element 52 such as a drag stage can also be connected by shrinking.
  • the lugs 14, 16, 44 each form shaft sections, which form a rotor shaft in the connected state.
  • a separate rotor shaft, to which the rotor elements are shrunk, is not required according to the invention.
  • annular stiffening elements 56 are in the in FIG. 1 illustrated embodiment formed annular stiffening elements 56. These may be annular reinforcements made of CFRP.
  • the free outer surfaces 54 of the lugs 14 are formed such that the diameters, relative to the rotor disks, are smaller in the near region 58 than in a remote region 60 with respect to the rotor disk FIG. 2 illustrated continuous transition between the different diameter thus creates a conically widening free outer surface 54.
  • a cylindrical step is provided in the distal region 60, which is related to the rotor disk 18, in order to ensure a defined edge in the region 60.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung betrifft einen Vakuumpumpenrotor, insbesondere einen Turbomolekularpumpenrotor.The invention relates to a vacuum pump rotor, in particular a turbomolecular pump rotor.

Vakuumpumpenrotoren, wie sie insbesondere bei Turbomolekularpumpen eingesetzt werden, weisen mehrere parallel zueinander angeordnete Rotorscheiben auf, die mit einer Rotorwelle verbunden sind. Da es sich hierbei um äußerst exakt in engen Toleranzen herzustellendes Bauteil handelt, sind derartige Pumpenrotoren häufig einstückig ausgebildet. Die Herstellung der Rotorscheiben einschließlich der eine komplexe Geometrie aufweisenden Rotorflügel erfolgt hierbei aus dem Vollen. Eine derartige Herstellung von Vakuumpumpenrotoren ist äußert komplex und zeitaufwendig. Ferner erfolgt ein hoher Materialabtrag, so dass hohe Mäterial- und Werkzeugkosten entstehen.Vacuum pump rotors, as used in particular in turbomolecular pumps, have a plurality of rotor disks arranged parallel to one another and connected to a rotor shaft. Since this is to be manufactured extremely accurately in close tolerances component, such pump rotors are often formed in one piece. The manufacture of the rotor disks, including the rotor blades having a complex geometry, takes place here from the solid. Such a production of vacuum pump rotors is extremely complex and time consuming. Furthermore, there is a high material removal, so that high Matterial- and tooling costs arise.

Ferner sind Pumpenrotoren bekannt, bei denen Rotorscheiben auf eine als Hohl- oder Vollwelle ausgebildete Rotorwelle aufgeschrumpft sind. Dies hat den Vorteil, dass die einzelnen Rotorscheiben, insbesondere die Rotorflügel der Rotorscheiben einfach hergestellt werden können. Allerdings bauen derartige Rotoren relativ groß, da zur Realisierung der erforderlichen Stabilität des Rotors der Durchmesser der Welle relativ groß gewählt werden muss. Ferner ist eine glockenförmige Form des Rotors im beschaufelten Bereich nicht möglich.Furthermore, pump rotors are known in which rotor disks are shrunk onto a rotor shaft designed as a hollow or solid shaft. This has the advantage that the individual rotor disks, in particular the rotor blades of the rotor disks, can be produced easily. However, such rotors build relatively large because of the required stability of the rotor, the diameter of the shaft must be relatively large. Further a bell-shaped shape of the rotor in the bladed area is not possible.

Aus CH 529 927 ist eine Vakuumpumpe mit mehreren gesonderten Rotorelementen bekannt. Jedes Rotorelement weist eine Rotorscheibe und einen zylindrischen Ansatz auf. Die einzelnen Rotorelemente sind auf einer Vollwelle angeordnet oder werden über Spannelemente zur Ausbildung einer Vollwelle miteinander verbunden.Out CH 529 927 For example, a vacuum pump with a plurality of separate rotor elements is known. Each rotor element has a rotor disk and a cylindrical projection. The individual rotor elements are arranged on a solid shaft or are connected to each other via clamping elements to form a solid shaft.

Ferner ist aus JP 60-203375 eine Vakuumpumpe mit gesonderten Rotorelementen bekannt. Zur Ausbildung der Rotorwelle werden die einzelnen Rotorelemente durch zwischen diesen angeordnete Ringe fixiert.Furthermore, it is off JP 60-203375 a vacuum pump with separate rotor elements known. To form the rotor shaft, the individual rotor elements are fixed by arranged between these rings.

Aufgabe der Erfindung ist es, einen mehrteiligen Vakuumpumpenrotor mit verbessertem Aufbau zu schaffen.The object of the invention is to provide a multi-part vacuum pump rotor with improved construction.

Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale des Anspruchs 1.The object is achieved according to the invention by the features of claim 1.

Der erfindungsgemäße Vakuumpumpenrotor, bei dem es sich insbesondere um einen Rotor für eine Turbomolekularpumpe handelt, weist mehrere gesonderte Rotorelemente auf, so dass die Rotorscheiben und die Rotorwelle nicht einstückig ausgebildet sind. Jedes der Rotorelemente weist mehrere, vorzugsweise eine einzige Rotorscheibe auf. Die Rotorscheibe ist vorzugsweise ringförmig ausgebildet und weist an ihrer Innenseite einen zylindrischen Ansatz auf. Der Ansatz bildet einen Wellenabschnitt des Rotors. Zur Ausbildung des Rotors werden die die Wellenabschnitte bildenden Ansätze insbesondere durch Schrumpfverfahren miteinander verbunden, so dass die Ansätze eine Rotorwelle ausbilden. Die Rotorwelle ist sodann jeweils von mit den einzelnen Ansätzen verbundenen Rotorscheiben umgeben. Da die Rotorwelle durch die Ansätze der Rotorelemente ausgebildet ist, kann eine gesonderte Rotorwelle entfallen. Hierdurch kann der Bauraum des Pumpenrotors gering gehalten werden.The vacuum pump rotor according to the invention, which is in particular a rotor for a turbomolecular pump, has a plurality of separate rotor elements, so that the rotor disks and the rotor shaft are not formed in one piece. Each of the rotor elements has a plurality, preferably a single rotor disk. The rotor disk is preferably annular and has a cylindrical projection on its inside. The approach forms a shaft portion of the rotor. To form the rotor, the projections forming the shaft sections are connected to one another, in particular by shrinking methods, so that the projections form a rotor shaft. The rotor shaft is then surrounded in each case by rotor disks connected to the individual lugs. Because the Rotor shaft is formed by the projections of the rotor elements, a separate rotor shaft can be omitted. As a result, the space of the pump rotor can be kept low.

Erfindungsgemäß erfolgt das Verbinden der Rotorelemente zur Ausbildung der Rotorwelle durch Aufschrumpfen der Ansätze der Rotorelemente.According to the invention, the connection of the rotor elements to form the rotor shaft by shrinking the lugs of the rotor elements.

Bei einer besonders bevorzugten Ausführungsform liegt eine innere Fügefläche eines Ansatzes eines ersten Rotorelements an einer äußeren Fügefläche eines Ansatzes eines benachbarten Rotorelements an. Besonders bevorzugt ist es, dass das nächste Rotorelement sodann zumindest bezogen auf den Ansatz entsprechend dem ersten Rotorelement ausgebildet ist, so dass dieses mit seiner inneren Fügefläche an einer äußeren Fügefläche des vorhergehenden zwischen den beiden Rotorelementen angeordneten Rotorelement anliegt. Insbesondere jeweils identische Rotorelemente können abwechselnd angeordnet sein, so dass abwechselnd Rotorelemente mit einem innenliegenden und einem außenliegenden Ansatz vorgesehen sind. Das Vorsehen von insbesondere identischen Rotorelementen hat den Vorteil, dass die Herstellungskosten erheblich reduziert werden können.In a particularly preferred embodiment, an inner joining surface of a projection of a first rotor element bears against an outer joining surface of a projection of an adjacent rotor element. It is particularly preferred that the next rotor element is then formed at least with respect to the approach corresponding to the first rotor element, so that this rests with its inner joining surface on an outer joining surface of the preceding arranged between the two rotor elements rotor element. In particular, each identical rotor elements can alternately be arranged so that alternately rotor elements are provided with an inner and an outer approach. The provision of particularly identical rotor elements has the advantage that the production costs can be significantly reduced.

Die Ansätze der Rotorelemente sind vorzugsweise derart ausgebildet, dass sie ausgehend von der Rotorscheibe in beide Richtungen vorstehen, wobei sich Ansätze benachbarter Rotorelemente jeweils zumindest teilweise überlappen. Selbstverständlich müssen die Rotorelemente an den Enden des Rotors keine nach außen weisenden Ansätze aufweisen, wobei dies gegebenenfalls aus Symmetriegründen des einzelnen Rotorelements zweckmäßig ist, um beim Aufschrumpfen ein Verformen der Rotorscheibe in axialer Richtung des Rotors bzw. Tordieren der Rotorscheibe zu vermeiden. Gegebenenfalls können die Endelemente des Rotors auch einen anderen Aufbau aufweisen.The projections of the rotor elements are preferably designed such that they protrude from the rotor disk in both directions, wherein projections of adjacent rotor elements each overlap at least partially. Of course, the rotor elements at the ends of the rotor have no outwardly facing lugs, this being appropriate for reasons of symmetry of the individual rotor element is expedient to avoid shrinkage during deformation of the rotor disk in the axial direction of the rotor or twisting the rotor disk. Optionally, the end elements of the rotor may also have a different structure.

Die Rotorelemente sind im Bereich der Ansätze vorzugsweise zu einer Mittelebene spiegelsymmetrisch. Die Mittelebene ist die durch die Rotormitte verlaufende senkrecht zur Rotorlängsrichtung angeordnete Ebene. Hierdurch kann ein Verziehen bzw. Verformen des Rotorelements während des Aufschrumpfens vermieden werden. Insbesondere eine Formveränderung in axialer Richtung der Rotorscheiben ist hierdurch vermieden.The rotor elements are preferably mirror-symmetrical in the region of the projections to a center plane. The median plane is the plane passing through the rotor center and perpendicular to the rotor longitudinal direction. As a result, warping or deformation of the rotor element during shrink-fitting can be avoided. In particular, a change in shape in the axial direction of the rotor disks is thereby avoided.

Mit dem ersten Rotorelement kann zusätzlich ein beispielsweise glockenförmiger Rotorträger verbunden sein. Der Rotorträger ist mit dem Rotorelement vorzugsweise ebenfalls durch Aufschrumpfen verbunden. Der Rotorträger kann entsprechend eines Rotorelements ausgebildet sein, weist in bevorzugter Ausführungsform jedoch eine spezielle Ausgestaltung auf. Diese kann beispielsweise darin bestehen, dass der Rotorträger eine geeignete Führung oder Aufnahme für eine Verbindung mit der Antriebswelle aufweist. Vorzugsweise ist der Rotorträger mit mindestens einer Rotorscheibe verbunden, insbesondere einstückig mit dieser ausgebildet. Der Rotorträger ist insbesondere, wenn es sich um einen Turbomolekularpumpenrotor handelt vorzugsweise an der Einlassseite des Rotors angeordnet. Mit dem letzten, d.h. in Richtung der Auslassseite als letztes angeordneten Rotorelementen kann ein weiteres Pumpelement, wie eine Drag-Stufe verbunden sein. Auch diese Verbindung kann durch Schrumpfverfahren erfolgen.In addition, an example bell-shaped rotor carrier may be connected to the first rotor element. The rotor carrier is preferably also connected to the rotor element by shrinking. The rotor carrier can be designed in accordance with a rotor element, but in a preferred embodiment has a special design. This can for example consist in that the rotor carrier has a suitable guide or receptacle for a connection to the drive shaft. Preferably, the rotor carrier is connected to at least one rotor disk, in particular integrally formed therewith. The rotor carrier is especially if it is a turbomolecular pump rotor preferably arranged on the inlet side of the rotor. With the last, ie in the direction of the outlet side last arranged rotor elements, a further pumping element, such as a drag stage can be connected. This connection can also be made by shrinkage.

Bei einer weiteren bevorzugten Ausführungsform sind zumindest mit einem Teil der Rotorelemente Versteifungselemente wie Armierungen verbunden, die insbesondere aus CFK hergestellt sein können. Die Versteifungselemente sind vorzugsweise mit einer freien Außenfläche des Ansatzes, d.h. einer Fläche, die nicht an einem Ansatz eines benachbarten Rotorelements anliegt, verbunden. Vorzugsweise sind die Versteifungselemente ringförmig ausgebildet und umgeben den gesamten Ansatz. Zur Versteifung der Ansätze des Rotorelements ist auch eine besondere geometrische Ausgestaltung der Ansätze möglich. Hierbei ist es bevorzugt, dass ein innerer Durchmesser der Ansätze der nahe der Rotorscheibe angeordnet ist, einen geringeren Durchmesser als ein auf die Rotorscheibe bezogen entfernterer Bereich des Ansatzes aufweist. Ausgehend von der Rotorscheibe ist der Ansatz somit vorzugsweise nach außen schräg oder konisch ausgebildet.In a further preferred embodiment, stiffening elements such as reinforcements, which may in particular be made of CFRP, are connected to at least some of the rotor elements. The stiffening elements are preferably connected to a free outer surface of the neck, i. a surface that does not abut a shoulder of an adjacent rotor element connected. Preferably, the stiffening elements are annular and surround the entire approach. To stiffen the approaches of the rotor element and a special geometric design of the approaches is possible. In this case, it is preferred that an inner diameter of the lugs is arranged close to the rotor disk, has a smaller diameter than a region of the lug which is more remote from the rotor disk. Starting from the rotor disk, the approach is thus preferably formed obliquely or conically outward.

Nachfolgend wird die Erfindung anhand bevorzugter Ausführungsformen unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert.The invention will be explained in more detail below with reference to preferred embodiments with reference to the accompanying drawings.

Es zeigen:

Figur 1
eine schematische Schnittansicht eines Turbomolekularpumpenrotors und
Figuren 2 und 3
Ausschnitte weiterer Ausführungsformen eines Rotorelements im Bereich des Ansatzes.
Show it:
FIG. 1
a schematic sectional view of a turbomolecular pump rotor and
FIGS. 2 and 3
Cutouts of further embodiments of a rotor element in the region of the approach.

Der in Figur 1 dargestellte Vakuumpumpenrotor weist drei Rotorelemente 10, 12, 10 auf, Hierbei sind die beiden Rotorelemente 10 identisch ausgebildet. Jedes Rotorelement 10, 12 weist einen kreisringförmigen, zylindrischen Ansatz 14, 16 auf. Die Ansätze 14, 16 sind jeweils mit einer Rotorscheibe 18 verbunden, die Flügel mit unterschiedlichen Innendurchmessern aufweisen. Die drei R.otorelemente 10, 12 sind über ein Schrumpfverfahren miteinander verbunden. Hierzu ist eine innere Fügefläche 20 des Ansatzes 14 des ersten Rotorelements 10 mit einer äußeren Fügefläche 22 des Ansatzes 16 des zweiten Rotorelements 12 verbunden. Die beiden Ansätze 16, 14 überlappen hierbei in axialer Richtung 24 derart, dass der Ansatz 14 an einer Außenseite 26 der Rotorscheibe 18 des zweiten Rotorelements 12 anliegt. Auf der gegenüberliegenden Seite der Rotorscheibe 18 des Rotorelements 12 ist ein weiteres Rotorelement 10, dessen Außenabmessung im wesentlichen dem ersten Rotorelement 10 entspricht, angeordnet. Der entsprechende Ansatz 14 überlappt den Ansatz 16 wiederum derart, dass er an einer Außenseite 28 der Rotorscheibe 18 des zweiten Rotorelements 12 anliegt.The in FIG. 1 Vacuum pump rotor shown has three rotor elements 10, 12, 10, Here, the two rotor elements 10 are formed identically. Each rotor element 10, 12 has an annular, cylindrical projection 14, 16. The lugs 14, 16 are each connected to a rotor disk 18 having wings with different inner diameters. The three R.otorelemente 10, 12 are connected to each other via a shrinking process. For this purpose, an inner joining surface 20 of the projection 14 of the first rotor element 10 is connected to an outer joining surface 22 of the projection 16 of the second rotor element 12. The two lugs 16, 14 in this case overlap in the axial direction 24 such that the lug 14 rests against an outer side 26 of the rotor disk 18 of the second rotor element 12. On the opposite side of the rotor disk 18 of the rotor element 12, a further rotor element 10, the outer dimension of which substantially corresponds to the first rotor element 10, is arranged. The corresponding projection 14 in turn overlaps the projection 16 in such a way that it bears against an outer side 28 of the rotor disk 18 of the second rotor element 12.

In dem in Figur 1 dargestellten Ausführungsbeispiel der Erfindung ist mit dem ersten Rotorelement 10 ein Rotorträger 30 verbunden. Dieser weist ebenfalls einen zylindrischen, ringförmigen Ansatz 32 auf, dessen äußere Fügefläche 34 an der inneren Fügefläche 20 des ersten Rotorelements 10 anliegt, so dass eine Verbindung durch Schrumpfverfahren erfolgt. Der Rotorträger 30 ist einstückig ausgebildet und weist zwei Rotorscheiben 18 auf. Ferner weist der Rotorträger eine zentrale zur Längsachse 36 des Rotors symmetrische Ausnehmung 38 auf. Durch die Ausnehmung 38 kann der Rotorträger 32 mit einer Antriebswelle verbunden werden.In the in FIG. 1 illustrated embodiment of the invention is connected to the first rotor element 10, a rotor carrier 30. This also has a cylindrical, annular projection 32, the outer joining surface 34 rests against the inner joining surface 20 of the first rotor element 10, so that a connection by shrinking takes place. The rotor carrier 30 is formed in one piece and has two rotor disks 18. Furthermore, the rotor carrier on a central to the longitudinal axis 36 of the rotor symmetrical recess 38. Through the recess 38, the rotor carrier 32 can be connected to a drive shaft.

Auf der gegenüberliegenden Seite des Rotors ist das in Figur 1 untere Rotorelement 10 mit einem weiteren in der Geometrie etwas anders ausgebildeten Rotorelement 40 verbunden. Das Rotorelement 40 weist einen sich radial nach außen erstreckenden Körper 42 auf, der an der Innenseite wiederum mit einem Ansatz 44 verbunden ist. Eine äußere Fügefläche 46 des Ansatzes 44 ist mit einer inneren Fügefläche 28 des Ansatzes 14 durch Aufschrumpfen verbunden. Das Rotorelement 40 weist ebenfalls eine einstückig mit dem Körper 42 verbundene Rotorscheibe 18 auf. Der Körper 42 weist eine ringförmige symmetrisch zur Längsachse angeordnete Aufnahmefläche 50 auf. Über die Aufnahmefläche 50 kann ein weiteres Pumpelement 52, wie eine Drag-Stufe ebenfalls durch Aufschrumpfen verbunden werden.On the opposite side of the rotor is the in FIG. 1 lower rotor element 10 is connected to a further slightly different in geometry rotor member 40. The rotor element 40 has a radially outwardly extending body 42, which is in turn connected to the inside with a lug 44. An outer joining surface 46 of the projection 44 is connected to an inner joining surface 28 of the projection 14 by shrinking. The rotor element 40 also has one integrally with the body 42 connected rotor disk 18. The body 42 has an annular receiving surface 50 arranged symmetrically with respect to the longitudinal axis. About the receiving surface 50, a further pumping element 52, such as a drag stage can also be connected by shrinking.

Wie aus Figur 1 ersichtlich ist, bilden die Ansätze 14, 16, 44 jeweils Wellenabschnitte, die in verbundenem Zustand eine Rotorwelle ausbilden. Eine gesonderte Rotorwelle, auf die die Rotorelementen aufgeschrumpft werden, ist erfindungsgemäß nicht erforderlich.How out FIG. 1 it can be seen, the lugs 14, 16, 44 each form shaft sections, which form a rotor shaft in the connected state. A separate rotor shaft, to which the rotor elements are shrunk, is not required according to the invention.

An freien Außenflächen 54 der Ansätze 14 der Rotorelemente 10 sind bei dem in Figur 1 dargestellten Ausführungsbeispiel ringförmig ausgebildete Versteifungselemente 56 angeordnet. Hierbei kann es sich um ringförmige Armierungen aus CFK handeln.At free outer surfaces 54 of the lugs 14 of the rotor elements 10 are in the in FIG. 1 illustrated embodiment formed annular stiffening elements 56. These may be annular reinforcements made of CFRP.

Weitere Möglichkeiten, um ein Versteifen der Ansätze 14 zu realisieren, sind in den Figuren 2 und 3 dargestellt. Diese dienen insbesondere dazu, dass beim Aufschrumpfen ein Verformen, wie Tordieren der Rotorscheiben 18 vermieden ist.Other ways to realize a stiffening of the lugs 14 are in the Figures 2 and 3 shown. These serve, in particular, to prevent deforming, such as twisting of the rotor disks 18, during shrinking.

Bei der in Figur 2 dargestellten Ausführungsform sind die freien Außenflächen 54 der Ansätze 14 derart ausgebildet, dass die Durchmesser, bezogen auf die Rotorscheiben, im nahen Bereich 58 kleiner sind als in einem, bezogen auf die Rotorscheibe, entfernten Bereich 60. Bei dem in Figur 2 dargestellten kontinuierlichen Übergang zwischen dem unterschiedlichen Durchmesser entsteht somit eine sich konisch erweiternde freie Außenfläche 54. Bei der in Figur 3 dargestellten alternativen Ausführungsform ist in dem auf die Rotorscheibe 18 bezogenen fernen Bereich 60 eine zylindrische Stufe vorgesehen, um eine definierte Kante in dem Bereich 60 zu gewährleisten.At the in FIG. 2 In the illustrated embodiment, the free outer surfaces 54 of the lugs 14 are formed such that the diameters, relative to the rotor disks, are smaller in the near region 58 than in a remote region 60 with respect to the rotor disk FIG. 2 illustrated continuous transition between the different diameter thus creates a conically widening free outer surface 54. In the in FIG. 3 In the alternative embodiment shown, a cylindrical step is provided in the distal region 60, which is related to the rotor disk 18, in order to ensure a defined edge in the region 60.

In bevorzugter Ausführungsform sind die in den Figuren 2, 3 dargestellten Rotorelemente 10 zu einer Mittelebene 62 symmetrisch ausgebildet. Dies gilt in bevorzugter Ausführungsform auch für die Rotorelemente 10, 12 gemäß der in Figur 1 dargestellten Ausführungsform.In a preferred embodiment, the in the Figures 2 . 3 Rotor elements 10 shown formed symmetrically to a center plane 62. This applies in a preferred embodiment also for the rotor elements 10, 12 according to the in FIG. 1 illustrated embodiment.

Claims (10)

  1. A vacuum pump rotor, particularly a turbomolecular pump rotor, comprising
    a plurality of separate rotor elements (10,12),
    each rotor element (10,12) comprising at least one rotor disk (18) connected to a cylindrical projection (14,16) which forms a shaft section of the rotor, and
    the rotor elements (10,12) being connected to each other in such a manner that the projections (14,16) form a rotor shaft,
    characterized in that
    the projections (14,16) are connected to each other by shrink-fitting.
  2. The vacuum pump rotor according to claim 1, characterized in that an inner joint face (22) of a projection (14) of a first rotor element (10) is in abutment on an outer joint face (20) of a projection (16) of an adjacent rotor element (12).
  3. The vacuum pump rotor according to claim 1 or 2, characterized in that the projections (14,16) of adjacent rotor elements (10,12) at least partially overlap each other.
  4. The vacuum pump rotor according to any one of claims 1 to 3, characterized in that at least part of the rotor elements (10,12) are mirrorsymmetrical relative to its center plane.
  5. The vacuum pump rotor according to any one of claims 1 to 4, characterized in that at least two rotor elements (10) are of an identical design, a further rotor element (12) being preferably arranged between two identical rotor elements (10).
  6. The vacuum pump rotor according to any one of claims 1 to 5, characterized in that, in at least part of the rotor elements (10), a free outer surface (54) of the projection (14) is connected to a preferably annular stiffening element (56) preferably surrounding the projection (14).
  7. The vacuum pump rotor according to any one of claims 1 to 6, characterized in that, in at least part of the rotor elements (10), a free outer surface (54) of the projection (14) has a smaller diameter in an area (58) close to the rotor disk (18) than in an area (60) remote from the rotor disk (18).
  8. The vacuum pump rotor according to any one of claims 1 to 7, characterized in that a rotor support (30) is connected to the first rotor element (10), preferably by shrink-fitting.
  9. The vacuum pump rotor according to claim 8, characterized in that the rotor support (30) is connected to at least one rotor disk (18), preferably by a one-pieced connection.
  10. The vacuum pump rotor according to any one of claims 1 to 9, characterized in that a further pump element (52) is connected to the last pump element (40).
EP09782947.7A 2008-11-07 2009-09-14 Vacuum pump rotor Not-in-force EP2344769B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP14171260.4A EP2775149A1 (en) 2008-11-07 2009-09-14 Vacuum pump rotor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200810056352 DE102008056352A1 (en) 2008-11-07 2008-11-07 vacuum pump rotor
PCT/EP2009/061843 WO2010052056A1 (en) 2008-11-07 2009-09-14 Vacuum pump rotor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP14171260.4A Division EP2775149A1 (en) 2008-11-07 2009-09-14 Vacuum pump rotor

Publications (2)

Publication Number Publication Date
EP2344769A1 EP2344769A1 (en) 2011-07-20
EP2344769B1 true EP2344769B1 (en) 2014-07-02

Family

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EP14171260.4A Withdrawn EP2775149A1 (en) 2008-11-07 2009-09-14 Vacuum pump rotor
EP09782947.7A Not-in-force EP2344769B1 (en) 2008-11-07 2009-09-14 Vacuum pump rotor

Family Applications Before (1)

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EP14171260.4A Withdrawn EP2775149A1 (en) 2008-11-07 2009-09-14 Vacuum pump rotor

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EP (2) EP2775149A1 (en)
JP (1) JP2012508340A (en)
DE (1) DE102008056352A1 (en)
WO (1) WO2010052056A1 (en)

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Publication number Priority date Publication date Assignee Title
DE102014100622A1 (en) * 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump

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Publication number Priority date Publication date Assignee Title
DE102009035812A1 (en) * 2009-08-01 2011-02-03 Pfeiffer Vacuum Gmbh Turbo molecular pump rotor
EP2722528B1 (en) * 2011-06-16 2018-05-30 Edwards Japan Limited Rotor assembly and vacuum pump there with
EP3034880B1 (en) 2014-12-15 2019-10-16 Pfeiffer Vacuum Gmbh Rotor assembly for a vacuum pump and method for producing the same
EP3462036B1 (en) * 2017-10-02 2024-04-03 Pfeiffer Vacuum Gmbh Turbomolecular vacuum pump

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DE2035063C3 (en) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Impeller for a turbo molecular pump
DE2554995A1 (en) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik TURBOMOLECULAR PUMP
JPS60203375A (en) * 1984-03-28 1985-10-14 Hitachi Ltd Manufacture of rotor for turbo molecular pump
JPS62265496A (en) * 1986-05-12 1987-11-18 Mitsubishi Electric Corp Provided with moving vanes
JPS62184190U (en) * 1986-05-16 1987-11-21
JP3160039B2 (en) * 1991-08-22 2001-04-23 エヌティエヌ株式会社 Turbo molecular pump and rotor blade processing method
DE10124339B4 (en) * 2001-05-18 2016-10-27 Pfeiffer Vacuum Gmbh Rotor disks with blades for a turbomolecular pump
JP2005042709A (en) * 2003-07-10 2005-02-17 Ebara Corp Vacuum pump
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JP2007071139A (en) * 2005-09-08 2007-03-22 Osaka Vacuum Ltd Composite vacuum pump rotor
JP2007107480A (en) * 2005-10-14 2007-04-26 Ebara Corp Turbo vacuum pump

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Publication number Priority date Publication date Assignee Title
DE102014100622A1 (en) * 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump

Also Published As

Publication number Publication date
WO2010052056A1 (en) 2010-05-14
EP2344769A1 (en) 2011-07-20
EP2775149A1 (en) 2014-09-10
JP2012508340A (en) 2012-04-05
DE102008056352A1 (en) 2010-05-12

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