EP2339332B1 - Montage optique radiographique doté de deux éléments focalisant - Google Patents

Montage optique radiographique doté de deux éléments focalisant Download PDF

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Publication number
EP2339332B1
EP2339332B1 EP10193792.8A EP10193792A EP2339332B1 EP 2339332 B1 EP2339332 B1 EP 2339332B1 EP 10193792 A EP10193792 A EP 10193792A EP 2339332 B1 EP2339332 B1 EP 2339332B1
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EP
European Patent Office
Prior art keywords
ray
aperture
sample
optical
optical path
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Application number
EP10193792.8A
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German (de)
English (en)
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EP2339332A2 (fr
EP2339332A3 (fr
Inventor
Christoph Ollinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bruker AXS GmbH
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Bruker AXS GmbH
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Publication of EP2339332A3 publication Critical patent/EP2339332A3/fr
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    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/064—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements having a curved surface

Definitions

  • X-ray diffractometry can be used for a variety of analytical tasks, using different measurement geometries, e.g. Bragg-Brentano or parallel beam geometry.
  • various X-ray optical elements are required in the beam path for this purpose.
  • US 6,807,251 B2 is an X-ray diffractometer with a parabolic mirror for use of the diffractometer in the parallel beam geometry, as well as a slot plate with two slots known; One of the slots is used to limit the X-ray beam in the Bragg Brentano geometry known.
  • the mirror and the slotted plate are rigidly connected.
  • a rotatable path selection disc with a further slot is arranged behind the diaphragm / mirror unit and can select by rotation the X-ray beam required for the corresponding geometry (parallel or divergent).
  • An X-ray diffractometer in which the X-radiation for different tasks can be performed in sections on different beam paths, one of which runs straight from the sample through a diaphragm system with adjustable and / or replaceable diaphragm to the X-ray detector, while the other beam path is bent and first from the sample position to a dispersive or reflective X-ray optical element, and from there to the X-ray detector.
  • a shutter By means of a shutter, the bent beam path relative to the detector can be hidden.
  • the iris and the dispersive or reflective X-ray optical elements are rigidly aligned with each other and can be pivoted together relative to the sample.
  • Diffractometers are often designed to measure not only samples in reflection geometry (such as powder samples), but also samples in transmission geometry (such as films or capillaries).
  • reflection geometry such as powder samples
  • transmission geometry such as films or capillaries
  • the X-ray optical structure as indicated schematically in the aforementioned brochure of Bruker AXS GmbH on page 13 or 14, must be manually rebuilt.
  • the object of the present invention in contrast, is to propose an X-ray optical construction in which a change between reflection and transmission geometry is facilitated, in particular where conversion and adjustment work are minimized or superfluous.
  • the second focusing element splits the X-ray light emanating from the intermediate focus into two beam paths.
  • beam path can be selected, which is necessary for the illumination of the position of the sample for the respective measurement method.
  • the respectively unused beam path is shaded by the aperture system.
  • an inventive X-ray optical structure corresponds to the distance between the position of the Sample and the intermediate focus the radius R of the arc.
  • the first beam path can be used very well for reflection measurements; The X-ray light is already well focused at the detector so that good intensity and resolution of the measurement are achieved.
  • a focus aperture is arranged in the beam path of the X-ray light, which has a distance to the position of the sample corresponding to the radius R of the circular arc.
  • the focus aperture is hereby arranged between the first focusing element and the sample position. This embodiment is mainly used when the intermediate focus is not on the circular arc with radius R to the position of the sample, but for example further away from the sample position.
  • the focus aperture improves the intensity and resolution of the measurement, especially for the first beam path in reflection measurements.
  • the X-ray light emitted directly by the intermediate focus or transmitted by the focus aperture is reflected by the sample in a further development of these embodiments and focused onto the circular arc. In this way reflection measurements can be carried out on the sample.
  • the X-ray light emanating from the second focusing element is focused by the position of the sample onto the circular arc.
  • transmission measurements can be made with that with a transmissive sample, such as polymer films.
  • the illumination of the sample can be optimized with the X-ray light emanating from the second focusing element.
  • the circular arc on which the detector is movable at least 50 °, preferably at least 100 °, especially preferably at least 140 °.
  • the circular arc on which the detector is movable at least 50 °, preferably at least 100 °, especially preferably at least 140 °.
  • a motor is provided, with which a switchover between the first beam path and the second beam path can take place.
  • the motor is at least a part of the diaphragm system moved; Usually, the two beam paths associated with end stops are provided.
  • the motorization simplifies the switching process.
  • the engine can also be operated by computer. Alternatively, a manual switching of the diaphragm system may be provided.
  • the aperture width of the diaphragm system is variable for at least one of the two beam paths.
  • each of which a separate device for shading the X-ray light is provided for each of the two beam paths. This allows each of the beam paths to be shaded independently of the other. Such a structure is also relatively easy to implement, and the switching of the beam paths can be uncomplicated respectively.
  • a separate fixed diaphragm is provided for each of the two beam paths. Again, this is an easy-to-implement construction; when switching the beam paths, the respective apertures are always in the correct position.
  • the diaphragm system comprises a slotted diaphragm block rotatable about an axis which runs perpendicular to the circular arc plane, through which the second beam path is blocked by the body of the diaphragm block in a first rotational position, wherein the first beam path in the Area of the slot of the diaphragm block extends, and in a second rotational position of the diaphragm block, the first beam path is blocked by the body of the diaphragm block, wherein the second beam path passes the body of the diaphragm block.
  • an aperture block can be switched quickly between the two beam paths; other moving parts are not required.
  • the rotation of the diaphragm block can be done in a small space.
  • the aperture block for the first beam path acts as a diaphragm; by a variation of the rotation angle and the aperture width can be adjusted with a suitable design.
  • the rotation of the block can be done in a structurally simple manner by means of a motor.
  • the diaphragm system comprises a slotted diaphragm which is displaceable between two sliding positions.
  • one of the beam paths is blocked by the body of the diaphragm in each of the two sliding position and the other of the beam paths extends in the region of the slot of the diaphragm.
  • this embodiment can be switched over a simple displacement of the slotted aperture between the beam paths.
  • X-ray optical structure 1 is in Fig. 1 shown schematically.
  • X-ray light emanates from an X-ray source 2 with a source focus 2a and impinges on a first focusing element 4, which first focuses the X-ray light onto an intermediate focus 5 .
  • This is preferably positioned on a circular arc 7 with radius R, on which a detector 6 is arranged to be movable.
  • a portion of the X-ray emitted by the intermediate focus 5 strikes in the form of a first beam path 10 ' directly on the position of the sample 3, where it is reflected by the sample and focused on the circular arc 7.
  • Another part of the X-ray light emanating from the intermediate focus 5 initially strikes a second focusing element 8 and is focused from there in the form of a second beam path 10 " through the position of the sample 3 onto the circular arc 7.
  • a switchable diaphragm system 9 shadows one of the two beam paths 10 'or 10 "depending on the method of measurement Fig. 1
  • the shading by the diaphragm system 9 is chosen such that the second beam path 10 "is shaded so that the transmission 11 " does not take place through the sample.
  • FIG Fig. 2 A rotatable, slotted diaphragm block 9a as an exemplary embodiment of the diaphragm system 9 is shown in FIG Fig. 2 shown schematically.
  • the diaphragm block 9a is located in a first rotational position with respect to a rotational axis 12, in which the X-ray light emitted directly from the intermediate focus 5 extends in the region of the slit of the diaphragm block 9a.
  • the effective iris width can be varied to some extent by rotation of the iris block.
  • the second rotational position of the rotatable, slotted diaphragm block 9a is in Fig. 3 shown schematically.
  • the diaphragm block 9a is opposite Fig. 2 pivoted about the axis of rotation 12; for pivoting, a motor 13 is used.
  • the body of the diaphragm block 9a now shadows the beam path 10 'of the X-ray light emitted directly by the intermediate focus 5.
  • the X-ray light passing over the second focusing element 8 can pass the body of the diaphragm block 9a past the position of the sample 3 (not shown here).
  • FIG Fig. 4 An alternative embodiment of the diaphragm system 9 is shown in FIG Fig. 4 shown schematically.
  • the diaphragm system is designed as a slidable, slotted diaphragm 9b .
  • the X-ray light emanating directly from the intermediate focus 5 extends in the region of the slot of the diaphragm 9b.
  • the part of the X-ray light which initially strikes the second focusing element 8 is shadowed by the body of the diaphragm 9b.
  • Fig. 6 Another embodiment is in Fig. 6 shown.
  • a fixed diaphragm 9c', 9c" and a shading device 9d ', 9d " are respectively arranged Fig. 6
  • the first beam path 10 ' extends from the intermediate focus 5, first through the aperture 9c' and then past the opened shader 9d 'in the direction of the position of the sample 3 (Not shown).
  • the second beam path 10 extendends from the intermediate focus 5 initially through the aperture 9c", then hits the second focusing element 8 and is then shaded by the shader 9d ".
  • Fig. 7 shows the embodiment Fig. 6
  • the first beam path 10 ' extends from the intermediate focus 5 through the diaphragm 9c' and is shadowed by the shader 9d '.
  • the second beam path 10 "extends through the diaphragm 9c from the intermediate focus 5". , then hits the second focusing element 8 and then passes the shader 9d "in the direction of the position of the sample 3 (not shown).
  • both shaders 9d ', 9d the respective beam path 10', 10" block.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Claims (13)

  1. Montage optique à rayons X (1), comprenant
    • une position pour une source de rayons X (2),
    • une position pour un échantillon (3),
    • un premier élément de focalisation (4) avec lequel un rayonnement X est dirigé de la position de la source de rayons X (2) vers la position de l'échantillon (3) via un foyer intermédiaire (5), et
    • un détecteur de rayons X (6) qui est mobile sur un arc de cercle (7) de rayon R autour de la position de l'échantillon (3),
    caractérisé en ce que
    le montage comprend en outre :
    • un deuxième élément de focalisation (8) avec lequel une partie du rayonnement X provenant du foyer intermédiaire (5) est dirigée vers la position de l'échantillon (3), et
    • un système de diaphragme (9) qui permet de choisir entre un éclairage de la position de l'échantillon (3)
    ∘ exclusivement à partir du foyer intermédiaire (5) directement (= premier chemin optique (10')) ou
    ∘ exclusivement via le deuxième élément de focalisation (8) (= deuxième chemin optique (10")).
  2. Montage optique à rayons X (1) selon la revendication 1, caractérisé en ce que la distance entre la position de l'échantillon (3) et le foyer intermédiaire (5) correspond au rayon R de l'arc de cercle (7).
  3. Montage optique à rayons X (1) selon la revendication 1, caractérisé en ce qu'un diaphragme de focalisation est disposé dans le chemin optique du rayonnement X et présente une distance par rapport à la position de l'échantillon (3) qui correspond au rayon R de l'arc de cercle (7).
  4. Montage optique à rayons X (1) selon l'une des revendications 2 ou 3, caractérisé en ce que le rayonnement X provenant directement du foyer intermédiaire (5) ou transmis à travers le diaphragme de focalisation est réfléchi par l'échantillon et focalisé sur l'arc de cercle (7).
  5. Montage optique à rayons X (1) selon l'une des revendications 1 à 3, caractérisé en ce que le rayonnement X provenant du deuxième élément de focalisation (8) est focalisé sur l'arc de cercle (7) par la position de l'échantillon (3).
  6. Montage optique à rayons X (1) selon l'une des revendications précédentes, caractérisé en ce que l'arc de cercle (7) sur lequel le détecteur (6) peut être déplacé comprend au moins 50°, de préférence au moins 100°, particulièrement de préférence au moins 140°.
  7. Montage optique à rayons X (1) selon l'une des revendications précédentes, caractérisé en ce que le premier et/ou le deuxième élément de focalisation (4, 8) sont réalisés sous la forme d'un monochromateur de Johansson ou d'un miroir de Göbel.
  8. Montage optique à rayons X (1) selon l'une des revendications précédentes, caractérisé en ce qu'il est prévu un moteur (13) qui permet d'effectuer une commutation entre le premier chemin optique (10') et le deuxième chemin optique (10").
  9. Montage optique à rayons X (1) selon l'une des revendications précédentes, caractérisé en ce que la largeur de diaphragme du système de diaphragme (9) est variable pour au moins un des deux chemins optiques (10', 10").
  10. Montage optique à rayons X (1) selon l'une des revendications précédentes, caractérisé en ce qu'un dispositif distinct (9d', 9d") pour occulter le rayonnement X est prévu pour chacun des deux chemins optiques (10', 10").
  11. Montage optique à rayons X (1) selon l'une des revendications précédentes, caractérisé en ce qu'un diaphragme fixe distinct (9c', 9c") est prévu pour chacun des deux chemins optiques (10', 10").
  12. Montage optique à rayons X (1) selon l'une des revendications précédentes, caractérisé en ce que le système de diaphragme (9) comprend un bloc de diaphragme à fente (9a) qui peut tourner autour d'un axe (12) qui s'étend perpendiculairement au plan de l'arc de cercle,
    que, dans une première position de rotation, le deuxième chemin optique (10") est bloqué par le corps du bloc de diaphragme (9a), le premier chemin optique (10') passant dans la zone de la fente du bloc de diaphragme (9a), et
    que, dans une deuxième position de rotation, le premier chemin optique (10') est bloqué par le corps du bloc de diaphragme (9a), le deuxième chemin optique (10") passant à côté du corps du bloc de diaphragme (9a).
  13. Montage optique à rayons X (1) selon l'une des revendications 1 à 11, caractérisé en ce que le système de diaphragme (9) présente un diaphragme à fente (9b), que le diaphragme (9b) peut être déplacé entre deux positions de coulissement, et que, dans chacune des deux positions de coulissement, l'un des chemins optiques (10', 10") est bloqué par le corps du diaphragme (9b) et l'autre chemin optique respectif (10', 10") passe dans la zone du diaphragme (9b).
EP10193792.8A 2009-12-08 2010-12-06 Montage optique radiographique doté de deux éléments focalisant Active EP2339332B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009047672.5A DE102009047672C5 (de) 2009-12-08 2009-12-08 Röntgenoptischer Aufbau mit zwei fokussierenden Elementen

Publications (3)

Publication Number Publication Date
EP2339332A2 EP2339332A2 (fr) 2011-06-29
EP2339332A3 EP2339332A3 (fr) 2013-05-29
EP2339332B1 true EP2339332B1 (fr) 2018-12-05

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US (1) US8345822B2 (fr)
EP (1) EP2339332B1 (fr)
DE (1) DE102009047672C5 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015226101A1 (de) 2015-12-18 2017-06-22 Bruker Axs Gmbh Röntgenoptik-Baugruppe mit Umschaltsystem für drei Strahlpfade und zugehöriges Röntgendiffraktometer
DE102016203588A1 (de) 2016-03-04 2017-09-07 Bruker Biospin Gmbh Streufeldarme Permanentmagnetanordnung für MR-Apparaturen
AT523121B1 (de) 2019-10-21 2021-12-15 Anton Paar Gmbh Röntgenvorrichtung mit mehreren Strahlpfaden

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Publication number Priority date Publication date Assignee Title
DE10141958B4 (de) 2001-08-28 2006-06-08 Bruker Axs Gmbh Röntgen-Diffraktometer
JP3548556B2 (ja) * 2001-12-28 2004-07-28 株式会社リガク Ｘ線回折装置
JP3757199B2 (ja) * 2002-09-03 2006-03-22 株式会社リガク Ｘ線小角散乱光学系
JP2004333131A (ja) * 2003-04-30 2004-11-25 Rigaku Corp 全反射蛍光ｘａｆｓ測定装置
JP4451248B2 (ja) * 2004-08-24 2010-04-14 アイシン・エィ・ダブリュ株式会社 レゾルバ
JP4860418B2 (ja) * 2006-10-10 2012-01-25 株式会社リガク Ｘ線光学系
EP3121592A1 (fr) * 2009-07-01 2017-01-25 Rigaku Corporation Appareil à rayons x, son procédé d'utilisation et procédé de rayonnement de rayons x

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Also Published As

Publication number Publication date
DE102009047672B4 (de) 2012-09-27
EP2339332A2 (fr) 2011-06-29
US8345822B2 (en) 2013-01-01
DE102009047672A1 (de) 2011-06-09
US20110135059A1 (en) 2011-06-09
DE102009047672C5 (de) 2014-06-05
EP2339332A3 (fr) 2013-05-29

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