EP2265407B1 - Prozessüberwachung - Google Patents

Prozessüberwachung Download PDF

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Publication number
EP2265407B1
EP2265407B1 EP09718580A EP09718580A EP2265407B1 EP 2265407 B1 EP2265407 B1 EP 2265407B1 EP 09718580 A EP09718580 A EP 09718580A EP 09718580 A EP09718580 A EP 09718580A EP 2265407 B1 EP2265407 B1 EP 2265407B1
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EP
European Patent Office
Prior art keywords
fibre
radiation
laser
fibre laser
reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP09718580A
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English (en)
French (fr)
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EP2265407A1 (de
Inventor
Stephen Keen
Steffan Lewis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novanta Technologies UK Ltd
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GSI Group Ltd
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Publication of EP2265407A1 publication Critical patent/EP2265407A1/de
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06704—Housings; Packages

Definitions

  • This invention relates to process monitoring.
  • it relates to process monitoring for a process done by a fibre laser.
  • Optical fibre lasers are very convenient for various types of material processing.
  • Lasers are used for processing materials for a wide range of applications such as welding, cutting and surface modification.
  • the interaction of the laser light with the material will vary depending on a wide range of parameters such as intensity, shield gas parameters, velocity of the workpiece relative to the beam, and so on.
  • the ratio of light absorbed and reflected will change.
  • a spectrum of shorter wavelengths will be generated as plasma is formed.
  • the characteristics of this light can be used to control a process, as described in US-A-4865683 or US-A-6670574 . All the methods used in these documents use external means for capturing light from the process and analysing it.
  • a fibre laser adapted to capture back-reflected light for enabling the back-reflected light to be analysed to control or monitor an operation performed with the fibre laser
  • the fibre is a double clad fibre and the means comprises a portion of the fibre having an outer low index coating stripped away and means for capturing back-reflected light which would have been in the outer cladding layer.
  • the stripped portion of the fibre may be potted in a relatively high index material. This may, for example, be Norland, refractive index 1.56. Preferably, the fibre is stripped over a distance of a few millimetres.
  • Any suitable opto-electronic device for example a photodiode, may be used to monitor the stripped out radiation.
  • the stripped part of the fibre laser may be a delivery fibre. This may be done anywhere but, advantageously, the stripped portion may be formed in the vicinity of a splice point in the fibre.
  • a means may be provided for isolating light scattered by the splice point itself.
  • This may comprise a component having two portals, one portal being formed or positioned to capture scattered light from the splice position and the other portal being spaced a distance away from the first portal, whereby only light captured by the second portal is used for monitoring.
  • the invention provides a method of controlling a process done by a fibre laser on a workpiece, comprising using back-reflection from the workpiece to monitor the process.
  • a device for enabling back-reflection from a workpiece acted upon by a fibre laser to be isolated from radiation emitted from a splice point comprising a body having two portals, spatially separated from one another.
  • FIG. 1 shows schematically a material processing apparatus using a fibre laser.
  • a fibre laser 1 is used to generate a laser beam in well known manner.
  • a typical fibre laser includes means for emitting pumping radiation (light) from pumping laser diode through a cladding layer to a core layer and diffraction gratings being formed to act as the resonant cavity.
  • the laser beam emitted from the fibre laser is applied via a double clad single mode delivery fibre 2 to a processing unit 3 which generally includes optics for collimation and focusing of the laser beam.
  • the laser beam is then focused through a lens arrangement 4 to a workpiece 5 where it is used for processing the workpiece. This processing may typically include cutting, welding, surface modification or other processing steps.
  • the interaction of the light with the material varies depending on a wide range of parameters as discussed.
  • the back-reflected radiation from the workpiece is, in embodiments of the invention, used to control the process.
  • Figure 1 includes schematically, as part of the fibre laser, an integral monitor 6 of back-reflection. Back-reflection from this integral monitor is applied to a system control and analysis device 7.
  • the fibre laser output is delivered via a double clad singlemode delivery fibre 2 which may, for instance, have a core diameter of 10 micrometres and a first cladding diameter of 200 ⁇ m having numerical apertures of 0.08 and 0.46 respectively.
  • Back-reflection at the laser wavelength is caused by reflection from the surface of the workpiece that the laser output is focused onto. Back-reflections at other wavelengths can be generated by the plasma formed from interaction of the beam with the workpiece. A portion of this back-reflection is collected back into the imaging optics and transmitted back into the first cladding of the delivery fibre. This back-reflection propagates in the first cladding of the delivery fibre back into the laser.
  • the single mode delivery fibre 2 comprises a core 8, a first cladding layer 9 and an outer cladding layer 10.
  • the laser output is transmitted to the workpiece in the core 8.
  • a significant proportion of the back-reflected light propagates in the first cladding 9 guided by the outer cladding 10 which has a lower refractive index.
  • the reflected signal captured by the delivery fibre can be extracted from the 10/200 ⁇ m fibre by stripping the fibre of its outer low index coating and then potting this area in a high index material.
  • the high index material may, for example, be Norland optical adhesive having a refractive index of 1.56.
  • the guided light in the multimode cladding of the delivery fibre is stripped out over a distance of a few millimetres but this may vary. The stripped light is then monitored by any convenient monitoring device. This may typically be any opto electronic device such as a photodiode.
  • This outer cladding is most preferably partially stripped somewhere in an unbroken length of the delivery fibre away from any splice points: this arrangement maximises the discrimination between the forward-going light emitted by the laser and the back-reflected light in the cladding.
  • Figure 2 is an example of the latter, where the splice is located in the stripped region 11 of the double clad single mode delivery fibre, where the outer cladding layer 10 is stripped away. This enables the back-reflected light which was in the first cladding layer to be detected by a suitable opto electronic device and used for monitoring the process.
  • the outer cladding layer is stripped in the vicinity of a splice point, it is most preferable that discrimination is made between the forward signal arising from scatter of the splice 12 itself and the reverse cladding mode. This is because inevitably at a splice point, some of the desired laser signal travelling in the forward direction F will be scattered at the splice point and this is not the radiation that it is desired to monitor. The desired radiation will be the radiation moving in the backwards direction B.
  • FIG. 5 shows one example of a discriminator.
  • This comprises a component 13 that is placed in the vicinity of the splice point and stripped portion of the fibre and which comprises two spatially displaced portals 14 and 15. It is positioned with respect to the stripped portion of the fibre so that the portal 14 overlies the splice point 12.
  • the portion 15 lies a distance away from that (typically nearer the workpiece/beam delivery end). In a typical embodiment, the distance between the centres of the portal is around 13mm and the radius of each portal is around 7mm.
  • the fibre is potted within this component.
  • the portals are generally circular in the embodiment shown. They may be elliptical, or any other shape.
  • the device 13 has a longitudinal groove 20 into which the optical delivery fibre, including the stripped portion, is located (potted).
  • the stripped portion of the fibre has between A and B in the figure, with portal 14 overlying a splice point and portal 15 spaced apart from this.
  • a light detector such as one or more photodiodes or other opto electronic means, is arranged to detect light contained by the portal 15 which is spaced from the splice.
  • the portal 14 serves to contain any light which is scattered at the splice position itself (which will be mainly laser radiation and not the back-reflection which it is intended to monitor) and this is therefore isolated from the monitor point.
  • the back-reflected light which is monitored may be used for many different purposes. Methods for monitoring radiation per se are well known and any convenient method may be used for detecting and using this information to monitor a material processing operation, perhaps in a feedback loop.
  • the back-reflected light detected in embodiments of the present invention can act as a very sensitive indicator of the state of a material process.
  • Figures 3 and 4 show monitored signals of the back-reflection signal as monitored with a photodiode when processing a stainless steel workpiece.
  • the signals R 1 and R 2 shown on the respective Figures 3 and 4 show the back-reflection signal taken from the stripped multimode fibre.
  • Figure 3 shows a typical signal that will be achieved when a laser is properly focused upon a workpiece.
  • An excitation pulse P 1 is applied.
  • There is a very small amount of back-reflection R 1 ⁇ lasting a few microseconds, before the light couples in. After this, the back-reflection reverts to a background level which is due to Fresnel reflection from the end face of the fibre delivery and is unavoidable.
  • Figure 4 shows a scenario where the material is placed out of focus. Note that the scale of this plot is different (1 graduation - 40 ms). In this case, it takes a much longer time for the light to couple into the material. In this case, with an excitation pulse P 2 , there is an elevated signal R for a period of about 120 microseconds which then collapses as the light couples in.
  • Figures 6 and 7 show how a device like that of Figure 5 can be used.
  • the figures show the discrimination device 13.
  • Figure 6 shows monitored radiation (in this case measured thermally).
  • Figure 7 shows an enhanced signal at portal 14 due to back-reflection.
  • Spectral filtering or analysis may be used at the monitor to gain further information about a process.
  • spectral filtering with the photo diode or other device light of a particular wavelength, or range of wavelengths, can be monitored.
  • light of a particular wavelength or value can on the other hand be excluded by filtering.
  • a suitable filter is applied to the photodiode, or its output.
  • the waveforms of figures 3 and 4 show that for any processing operation there will be a key 'signature' waveform generated by the back-reflection monitor which will indicate the health of the process.
  • This signature can be used as a sensitive control signal in a production line to maximise quality and yield. Additionally a library of typical signature waveforms for different process regimes can be used as a guide for users of the processing system.
  • the system can be used to protect a laser from undue back-reflection. That is, instead of being used to monitor a process, the stripping of the outer cladding layer can serve to remove undesired back-reflected radiation which might otherwise find its way into the laser itself and possibly damage or affect the operation of the laser.
  • embodiments of the invention can be used to protect a laser from failure of the delivery fibre and burn back.
  • a background signal from the device which arises due to back-reflection of an end cap of the delivery fibre. This is inevitable and generally about 4% of radiation is back-reflected in this way. If the delivery fibre fails for any reason, then this signal falls back to zero. This fall to zero can be detected by monitoring back-reflected radiation and can be used to take appropriate action, such as turning off the laser or other action to protect the laser or its environment or operators.
  • Figures 8 and 9 illustrate this.
  • respective traces R 3 and R 4 represent the signal received at a monitor from the.device.
  • the signal R3 in Figure 8 is a reference signal which is solely due to back-reflected light of the uncoated end face of the fibre.
  • Figure 9 shows a signal obtained when the fibre fails when experiencing a large amount of feedback.
  • the laser is excited with a 500 millisecond pulse P 3 , has an initial rise R 4 1 , then fails after about 100 milliseconds. This is seen because the signal goes to near zero at this failure point F.
  • This zero signal can be compared with a demand signal and if necessary used to twitch the system off or take other action to prevent damage.
  • the light which is monitored may be back-reflected infrared light from a workpiece, producing a signal that can be used for protection, process monitoring or other uses.
  • one or more grooves 30 are formed in the device for receiving an optical fibre 31.
  • the grooves are formed from port 15A to one or both side walls 32 of the device. They may preferably be formed at an acute angle to the longitudinal axis L of the device.
  • An optical fibre mounted within at least one of the grooves, such as fibre 31, is arranged to pick up infrared light from port 15A. Visible light is detected by a suitable visible photo-detector at port 15A.
  • the additional monitor fibres 31 are adapted to collect a portion of the back-reflected light from the workpiece, via the port 15A. It is found that the infrared signal collected by these is still sufficiently strong to allow monitoring with a photodiode positioned at the output end of the fibre 31.
  • the monitoring fibres are typically multimode large area fibres, dimension 220/240 for example, with a 0.22 NA glass cladding and a core size in the range of 200 ⁇ m to 1 mm. This then collects the IR light and leaves the back-reflection port 15A free to place a large area photodiode over the port with its spectral response optimised for detection of light in the visible part of the spectrum.
  • Visible light can be used to detect and monitor several features different to those which can be monitored by infrared light.
  • Figure 11 shows visible light detected during material processing operations in two different modes, CW (continuous wave) and modulated. They show typical kinds of results that might be achieved when a 200 watt fibre laser is focused onto a 1 mm thick stainless steel plate.
  • a first waveform 35 is when the fibre laser is operated at CW and the second waveform 36 when the laser is modulated at 20 kHz, 25 micro seconds 200 watt peak demand.
  • the waveforms are of detected visible light but are schematic only. It is seen that the light detected from CW operation 35 is at a generally constant level. Modulated operation however produces detective visible light 36 which has a short burst of visible light and which then decays to near zero.
  • a single mode optical fibre often generates an intense white light when it fails during operation.
  • this intense white light may be monitored for and can be used to trigger a shutdown to protect the laser.
  • An advantage of the present invention is that since monitoring can be done anywhere on the delivery fibre, this may be remote, even far remote, from the workpiece.
  • a delivery fibre can be tens of meters long so monitoring can be done anywhere along it. This enables easier process monitoring.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Claims (15)

  1. Glasfaserlaser, ausgelegt zum Extrahieren von Rückstrahllicht, um die Analyse des Rückstrahllichtes zur Steuerung oder Überwachung eines mit dem Glasfaserlaser ausgeführten Arbeitsvorgangs zu ermöglichen, wobei eine zuführende Lichtleitfaser (20) ein abisolierten Partie in der Nähe eines Spleißpunktes aufweist, dadurch gekennzeichnet, dass sie weiter eine Vorrichtung mit mindestens zwei räumlich getrennten Portalen (14, 15) umfasst, wobei die Vorrichtung in der Nähe der abisolierten Partie angeordnet und zum Abtrennen von am Spleißpunkt von der Rückstrahlung abgegebener Strahlung geeignet ist.
  2. Glasfaserlaser nach Anspruch 1, umfassend
    eine doppelt ummantelte Zuführfaser mit einem Kern und mindestens zwei Mantelschichten, wobei eine äußere Mantelschicht von einer Partie der Zuführfaser entfernt wird, um auf diese Weise das Enziehen der Rückstrahlung zur Überwachung zu ermöglichen.
  3. Glasfaserlaser nach einem der vorhergehenden Ansprüche, umfassend
    ein an geeigneter Stelle angeordnetes und einen geeigneten Reflexionsindex aufweisendes Medium zum Auskuppeln der Rückstrahlung aus der Faser.
  4. Glasfaserlaser nach Anspruch 5m, wobei
    das Medium in der Nähe einer abisiolierten Partie der Faser zum Entziehen der Rückstrahlung aus der abisolierten Partie einen hohen Index aufweist.
  5. Glasfaserlaser nach Anspruch 1, wobei
    die Vorrichtung einen Körper mit zwei räumlich getrennten Portalen aufweist.
  6. Glasfaserlaser nach Anspruch 5, wobei
    die Zentren der Portale räumlich um ungefähr 13 Millimeter voneinander getrennt sind.
  7. Glasfaserlaser nach Anspruch 5 oder 6, wobei
    die Portale jeweils einen Radius von ungefähr 7 Millimetern aufweisen.
  8. Glasfaserlaser nach einem der vorhergehenden Ansprüche, wobei das Rückstrahllicht an einer von einem Werkstück abgewandten Stelle eingefangen wird.
  9. Glasfaserlaser nach einem der vorhergehenden Ansprüche, umfassend die spektrale Filterung der überwachten Rückstrahlung.
  10. Glasfaserlaser nach einem der vorhergehenden Ansprüche, umfassend Mittel zum separaten Auffangen von sichbarer und IR-Strahlung.
  11. Verfahren zum Steuern eines an einem Werkstück ausgeführten Arbeitsvorgangs mittels eines Glasfaserlasers nach Anspruch 1, umfassend
    das Erfassen von Rückstrahlung aus einem Portal und den Einsatz der erfassten Rückstrahlung vom Werkstück zur Überwachung des Arbeitsvorgangs.
  12. Verfahren nach Anspruch 11, wobei
    die Rückstrahlung an einer Partie der Zuführfaser überwacht wird, wo mindestens ein Mantelbereich entfernt wurde.
  13. Verfahren nach Anspruch 11 oder 12, umfassend eine Analyse von den Zustand des Arbeitsvorgangs anzeigenden Kennwellenformen.
  14. Verfahren nach einem der Ansprüche 11 bis 13, umfassend das Wegführen von IR-Strahlung aus dem Portal und das Erfassen von sichtbarer Strahlung am Portal.
  15. Verfahren nach Anspruch 14, umfassend das Erfassen der geführten IR-Strahlung.
EP09718580A 2008-03-13 2009-03-09 Prozessüberwachung Active EP2265407B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0804657A GB2458304A (en) 2008-03-13 2008-03-13 Process Monitoring
PCT/GB2009/000633 WO2009112815A1 (en) 2008-03-13 2009-03-09 Process monitoring

Publications (2)

Publication Number Publication Date
EP2265407A1 EP2265407A1 (de) 2010-12-29
EP2265407B1 true EP2265407B1 (de) 2012-05-16

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WO (1) WO2009112815A1 (de)

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EP2737970A4 (de) * 2011-07-28 2015-09-30 Mitsubishi Electric Corp Laserbearbeitungsvorrichtung und laserbearbeitungssteuervorrichtung
DE102021202194A1 (de) 2021-03-08 2022-09-08 Kjellberg-Stiftung Vorrichtung und Verfahren zum Detektieren elektromagnetischer Strahlung

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EP2616209B1 (de) * 2010-09-13 2021-12-22 IPG Photonics Corporation Industrielles hochleistungs-faserlasersystem mit optischer überwachungsanordnung
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JP6767430B2 (ja) * 2018-05-29 2020-10-14 ファナック株式会社 レーザ発振器
CN113615013A (zh) * 2019-03-11 2021-11-05 株式会社藤仓 光连接器以及具备该光连接器的激光装置

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EP2737970A4 (de) * 2011-07-28 2015-09-30 Mitsubishi Electric Corp Laserbearbeitungsvorrichtung und laserbearbeitungssteuervorrichtung
US9463529B2 (en) 2011-07-28 2016-10-11 Mitsubishi Electric Corporation Laser machining apparatus that monitors material thickness and type by reflected light intensity
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WO2022189339A1 (de) * 2021-03-08 2022-09-15 Kjellberg-Stiftung Vorrichtung und verfahren zum detektieren elektromagnetischer strahlung

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WO2009112815A1 (en) 2009-09-17
GB0804657D0 (en) 2008-04-16
GB2458304A (en) 2009-09-16
EP2265407A1 (de) 2010-12-29

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