EP2228544B1 - Piston et dispositif actionné par fluide equipé avec ledit piston - Google Patents

Piston et dispositif actionné par fluide equipé avec ledit piston Download PDF

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Publication number
EP2228544B1
EP2228544B1 EP10006849A EP10006849A EP2228544B1 EP 2228544 B1 EP2228544 B1 EP 2228544B1 EP 10006849 A EP10006849 A EP 10006849A EP 10006849 A EP10006849 A EP 10006849A EP 2228544 B1 EP2228544 B1 EP 2228544B1
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EP
European Patent Office
Prior art keywords
piston
permanent magnet
segments
piston according
magnet segments
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP10006849A
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German (de)
English (en)
Other versions
EP2228544A1 (fr
Inventor
Michael Rau
Wolfgang Rammler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
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Festo SE and Co KG
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Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Publication of EP2228544A1 publication Critical patent/EP2228544A1/fr
Application granted granted Critical
Publication of EP2228544B1 publication Critical patent/EP2228544B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
    • F15B15/2861—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using magnetic means

Definitions

  • the invention relates to a piston of a fluid operable adjusting device, in particular a linear drive or a shock absorber, having a support body which has a longitudinal axis coaxial to the piston annular recess in which at least one annular permanent magnet assembly is arranged, which is segmented in its circumferential direction and out at least two arcuate magnet segments, wherein the annular recess is designed as an annular groove with a radially outwardly oriented groove opening into which the magnet segments are inserted to form an annular configuration from radially outward, wherein at least two adjacent magnet segments at their mutually facing end portions in overlap the circumferential direction of the permanent magnet arrangement, wherein the magnet segments at the mutually facing end portions in each case one in a first radial plane in the circumferential direction of the permanent magnet arrangement with respect to a Ref Erenzstelle projecting nose and having in a second radial plane in the circumferential direction of the permanent magnet assembly with respect to the reference point recess, such that at overlapping end portions of
  • a linear drive in the form of a fluid-actuated working cylinder is described with a transmission of the driving force serving, attached to a piston rod piston described.
  • a permanent magnet assembly in the form of an annular permanent magnet, which can cooperate with externally arranged on the housing position detection means.
  • the permanent magnet is seated in an annular recess, which is defined in the region of the joining surface of two axially interconnected piston parts.
  • the assembly of the piston takes place during assembly on the piston rod, whereby the annular permanent magnet between the two piston parts is inserted.
  • the problem with such a design is mainly due to the necessary integration of the permanent magnet assembly attributable complexity of the piston assembly and the associated assembly costs.
  • From the DE-PS 1 185 276 shows a special construction of a stator of an electric motor.
  • This stator includes a plurality of magnetic segments, which are partially elastic and which are inserted axially into a cylindrical iron jacket.
  • a fluid-actuated actuator having a housing equipped with position detection means defining a receiving chamber in which a piston of the type defined above is arranged linearly displaceable, which is coupled for the force picking with an accessible outside of the housing Kraftabgriffsteil.
  • the piston assembly according to the invention enables the simple realization of a ring magnet construction without a mandatory requirement of a piston pitch in the region of the recess receiving the permanent magnet arrangement.
  • the annular permanent magnet assembly is composed of a plurality of arcuate magnet segments, which can be used in the manufacture of the piston from radially outside into the annular groove designed as an annular recess, to then define a segmented, but nevertheless annular permanent magnet assembly.
  • Such a piston can be relatively easily assembled independently of the mounting on a Kraftabgriffsteil, which reduces the storage costs and improved availability. It can also be used for special cost reduction to an even one-piece support body, because the assembly of the permanent magnet assembly does not require a division of the support body.
  • the magnet segments are polarized with one another with the same orientation in order to ensure, in spite of the segmentation, a magnetic field which is as uniform as possible along the entire circumference of the ring.
  • a magnetic field which is as uniform as possible along the entire circumference of the ring.
  • an axial polarization of the magnet segments has been found.
  • the number of magnet segments for forming the annularly configured permanent magnet arrangement is in principle arbitrary. It is expedient in any case, only to use magnetic segments with the same arc length, preferably with identical structure.
  • the permanent magnet arrangement is composed of exactly two magnet segments whose end sections are assigned to one another in pairs. The assembly in the context of the production of the piston can be done here in particular by insertion into the recess designed as an annular groove of diametrically opposite sides.
  • the preferably axially polarized magnet segments may overlap at their mutually facing end sections in the circumferential direction of the permanent magnet arrangement.
  • a magnetic force compressing the magnet segments in particular transversely to the circumferential direction of the permanent magnet arrangement, is produced.
  • the active surface of this magnetic holding force can be relatively large run relatively simple that the magnet segments according to the invention at the mutually facing end portions each one in a first radial plane in the circumferential direction the permanent magnet arrangement with respect to a reference point projecting nose and in a spaced-apart from the first radial plane parallel second radial plane opposite to Having the nose with respect to the reference point recessed recess, so that in the assembled state overlapping end portions of the nose of one end portion in the recess of the other end portion is immersed and in the circumferential direction of the permanent magnet arrangement is a relatively large overlap length.
  • the permanent magnet arrangement can be exposed radially on the outside. Alternatively, however, it may also be covered by a piston component. If the piston is equipped with a guide ring which makes sliding contact with the piston running surface in the state installed in the housing of an adjusting device, the permanent magnet arrangement can be coaxially enclosed by this guide ring.
  • the FIG. 1 shows a total of a fluid-operated adjusting device 1 in one embodiment as a fluid operated linear drive.
  • the adjusting device 1 comprises a housing 2, which defines a linearly extending and preferably circular cross-section receiving chamber 3, in which a corresponding circular outer contour having piston 4 is arranged linearly displaceable back and forth.
  • the piston longitudinal axis 5 extends in the direction of movement of the piston 4 and coincides with the longitudinal axis of the receiving chamber 3.
  • the receiving chamber 3 is closed at the two end sides by a respective end wall 6a, 6b of the housing 2.
  • the peripheral boundary of the receiving chamber 3 assumes a between the two end walls 6a, 6b extending one or more parts tubular body 7, whose inner surface defines a cylindrical piston tread 8, on which the piston 4 slides in its linear movement.
  • the end walls 6a, 6b are expediently designed as a housing cover.
  • the receiving chamber 3 is divided axially into two working chambers 12a, 12b, in each of which a fluid channel 13a, 13b opens, via which a controlled fluid admission is possible. According to the pressure difference prevailing between the two working chambers 12a, 12b, the piston 4 moves in one or the other direction or remains in place.
  • the fluid used for the operation is preferably compressed air.
  • the use is also another gaseous medium or a hydraulic medium possible.
  • the linear movement of the piston 4 can be tapped outside of the housing 2 on a force-tapping part 14 coupled in a motion-coupled manner to the piston 4.
  • the latter is in the embodiment of a piston rod which passes at least one of the end walls 6a guided under sealing and slidably guided and with its lying within the receiving chamber 3 section on the piston 4.
  • the piston 4 expediently has a central, continuous attachment hole 15 with which it is plugged onto the piston rod 14 until it is stepped.
  • the axial fixation is done by way of example by a screw 16, wherein a nut 17 is screwed onto an outstanding from the mounting hole 15 threaded portion 18 of the piston rod 14.
  • the adjusting device 1 could in principle also be designed as a shock absorber or other passive device.
  • the piston 4 would be displaced by a non-fluidically introduced into it driving force, displacing the fluid contained in the receiving chamber 3.
  • the piston 4 has a preferably one-piece and in particular made of metal circular disk-shaped support body 22 in which the mounting hole 15 is formed.
  • annular groove 23 designed as an annular recess which is arranged coaxially to the piston longitudinal axis 5 and extends around the support body 22.
  • the corresponding to the peripheral contour of the piston 4 curved slot-shaped Groove opening 24 is oriented radially outward relative to the piston longitudinal axis 5 and faces the piston running surface 8.
  • Axial on both sides of the annular groove 23 is bounded by a respective groove flank 25a, 25b and radially inwardly by a preferably circular cylindrical groove base 26.
  • the cross section of the annular groove 23 is rectangular.
  • annular permanent magnet assembly 27 In the annular groove 23 is coaxially seated an annular permanent magnet assembly 27. It extends along the entire piston circumference and generates a continuous magnetic field, which passes through the tubular body 7.
  • FIG. 1 dash-dotted lines indicated position detection means 28 fixed to the housing. They are expediently attached to the outer circumference of the tubular body 7, for example in one or more longitudinal grooves. An adjustability in the direction of movement of the piston 4 may be provided.
  • the position detecting means 28 is responsive to the magnetic field of the permanent magnet assembly 27 when the latter passes by appropriate movement of the piston 4 in a certain position, for example, the position detecting means 28 radially inwardly opposite. Thereby, the position of the piston 4 can be detected.
  • the position detection means 28 contain, for example, at least one so-called reed switch or Hall sensor, but may also be designed as a displacement measuring system.
  • the permanent magnet arrangement 27 is covered in the region of its outer circumference by a component arranged on the piston 4.
  • a component acts in the embodiment of an existing plastic material, hollow cylindrical guide ring 32 which sits on the axial height of the annular groove 23 coaxially on the outer circumference of the support body 22.
  • it is interrupted at one point of its circumference (interruption 33). Due to its elasticity, it can therefore be temporarily expanded during assembly.
  • the piston 4 slides with its guide ring 32 on the piston tread 8 from.
  • Axial on both sides of the annular groove 23 is on the support body 22 each one to the piston longitudinal axis 5 coaxial annular piston seal 34a, 34b arranged. They are expediently formed by injection molding on the support body 22. Incidentally, the latter expediently consists of non-magnetizable material, such as aluminum or stainless steel, so as not to impair the propagation of the magnetic field generated by the permanent magnet arrangement 27.
  • the piston seals 34a, 34b may be an integral part of two elastomer components 35a, 35b, which are integrally formed on the support body 22 and in addition to each associated piston seal 34a, 34b, for example, also on the end faces of the piston 4 arranged buffer structures 36 can form the impact in able to reduce the final positions.
  • the permanent magnet assembly 27 is segmented in its circumferential direction. Said circumferential direction is illustrated in the drawing by a double arrow at 37 and extends along the circumference of the piston longitudinal axis fifth
  • the permanent magnet assembly 27 is composed of a plurality of arcuate magnet segments 38, 39, which are preceded by their concavity through the slot opening 24 according to arrows 42 from radially outside into the annular groove 23 inserted so that they in the circumferential direction 37 successively lie and form an annular configuration, which represents the permanent magnet assembly 27.
  • the arc length of the individual magnet segments 38, 39 is suitably chosen so that the mutually facing end portions 38 a, 39 a; 38b, 39b of the in the circumferential direction 37 each directly successively arranged magnet segments 38, 39 are immediately adjacent in a transition region 43 and expediently even touch.
  • the annular permanent magnet assembly 27 consists of only two magnetic segments 38, 39 with mutually same arc length, which expediently corresponds to at least 180 °.
  • the magnetic segments 38 are expediently also designed circular arc. you Internal radius corresponds at least substantially to the radius of the groove base 26th
  • the magnet segments 38, 39 are preferably axially, that is polarized in the direction of the piston longitudinal axis 5, with mutually identical orientation. So it's the in FIG. 4 North poles of all magnet segments 38, 39 marked “N” on one side and those in FIG. 4 The south pole of all magnetic segments 38, 39 on the opposite other axial side of the permanent magnet arrangement 27 is denoted by "S”. The latter therefore corresponds, in terms of the mode of action, to a one-piece, axially polarized ring magnet.
  • the identical orientation has the advantage that a constant magnetic field is achieved along the entire circumference of the permanent magnet arrangement 27 and thus also in the transition region 43. As a result, an always reliable position query can be ensured even with non-rotating piston 4.
  • the described segmentation of the permanent magnet assembly 27 simplifies the manufacture of the piston.
  • the support body 22 in the annular groove 23 defining region and preferably integrally formed in total, without affecting the mountability of the permanent magnet assembly 27.
  • the individual magnet segments 38, 39 are easy to insert over the slot opening 24 in the annular groove 23 during assembly. A subdivision of the support body 22 in the region of the annular groove 23 is thus not required.
  • the magnet segments 38, 39 are designed so that they are in the respective transition region 43 with their end portions there 38a, 39a; 38b, 39b overlap a piece in the circumferential direction 37.
  • the width of the magnet segments 38, 39 measured in the direction of the piston longitudinal axis 5 is locally reduced in a coordinated manner in the region of the mentioned end sections, so that a constant width of the permanent magnet arrangement 27 is also established overall over the respective transition region.
  • the overlapping portions of the magnet segments 38, 39 are in the axial direction of the permanent magnet assembly 27, ie in the direction of the piston longitudinal axis 5, side by side.
  • the strength of the attraction force can also be well influenced and executed so that the mutually facing end portion 38a, 39a; 38b, 39b are firmly held together by the magnetic forces prevailing in the transitional area by latching.
  • To the magnet segments 38, 39 in the annular groove 23 to can fix additional fastening measures can be provided.
  • the magnet segments 38, 39 are in the region of the overlapping end portions 38a, 39a; 38b, 39b each provided with a respect to a reference point 52 in the circumferential direction 37 projecting nose 53 and a recess 52 with respect to the reference point 52.
  • the recess 54 is designed to be complementary to the nose 53. Nose 53 and recess 54 of a respective end portion 38a, 38b, 39a, 39b extend in two axially spaced radial planes 55, 56, so that in the united state of the magnet segments 38, 39 at the individual transition regions 43, the nose 53 of one end portion in the Recess 54 of the respective other end portion in the circumferential direction 37 dips.
  • the recess 54 on the adjacent nose 53 opposite axial side is suitably open.
  • the radially extending side surface 57 of a respective recess 54 expediently adjoins the identically oriented axial side surface 58 of the adjacent lug 53 in one and the same radial plane.
  • the overlapping surface extending in a radial plane of two end sections 38a, 39a; 38b, 39b thus corresponds to the sum of the two aforementioned side surfaces 57, 58 and is therefore relatively large.
  • the side surfaces 57, 58 expediently extend in the first radial plane 44 passing through the middle of the permanent magnet arrangement 27. This results in identical width dimensions of the lugs 53 and cutouts 54. This results in a symmetrical arrangement which enables alignment of the magnetic segments 38, 39.
  • the permanent magnet arrangement 27 is composed of mutually identical magnet segments 38, 39.
  • the lugs 53 are at a radial distance "a" to the extended inner circumferential surface of the associated magnet segment 38 or 39 arranged.
  • This radial distance "a” causes when using only two magnet segments 38, 39, each having to enclose a half of the piston circumference, that the width "W" between the two end portions 38 a, 38 b and 39 a, 39 b of a respective magnet segment 38, 39 defined mounting opening 63 is larger than the diameter of the annular groove 23 in the region of the groove base 26. This allows the magnetic segments 38, 39 with the mounting hole 63 ahead even in the annular groove 23 used when their arc length due to the intended overlap noses 53 each greater than 180 °.
  • each magnet segment 38, 39 expediently has a closure surface 64 oriented in the circumferential direction 37, which extends radially outward from the inner peripheral surface 62 to the root region of the nose 53.
  • the leading to the desired polarization magnetization of the magnet segments 38, 39 either before or even after insertion into the annular groove 23 can be made.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Actuator (AREA)
  • Fluid-Damping Devices (AREA)

Claims (15)

  1. Piston d'un dispositif de réglage pouvant être actionné par fluide, en particulier d'un entraînement linéaire ou d'un amortisseur de chocs, comportant un corps porteur (22) qui présente un évidement annulaire coaxial par rapport à l'axe longitudinal de piston (5), dans lequel est disposé au moins un agencement à aimants permanents (27) annulaire qui est segmenté dans son sens périphérique (37) et se compose d'au moins deux segments permanents (38, 39) en forme d'arche, l'évidement annulaire étant réalisé comme une rainure annulaire (23) avec une ouverture (24) orientée dans le sens radial vers l'extérieur, dans laquelle ouverture les segments magnétiques (38, 39) sont insérés en formant une configuration annulaire depuis l'extérieur dans le sens radial, au moins deux segments magnétiques (38, 39) contigus se chevauchant sur leurs sections d'extrémité tournées les unes vers les autres (38a, 39a ; 38b, 39b) dans le sens périphérique (37) de l'agencement à aimants permanents (27), les segments magnétiques (38, 39) présentant, sur leurs sections d'extrémité tournées les unes vers les autres (38a, 39a ; 38b, 39b), respectivement un nez (53) saillant dans un premier plan radial (55) dans le sens périphérique (37) de l'agencement à aimants permanents (27) par rapport à un point de référence (52) et un évidement (54) en retrait dans un second plan radial (56) dans le sens périphérique (37) de l'agencement à aimants permanents (27) par rapport au point de référence (52) de telle manière qu'en cas de sections d'extrémité se chevauchant (38a, 39a ; 38b, 39b), le nez (53) d'une section d'extrémité respective s'enfonce dans l'évidement (54) de l'autre section d'extrémité respective, caractérisé en ce que le nez (53) et l'évidement (54) sont disposés à une distance radiale par rapport à la surface périphérique intérieure (62) rallongée du segment magnétique associé (38, 39).
  2. Piston selon la revendication 1, caractérisé en ce que les segments magnétiques (38, 39) sont polarisés entre eux avec une orientation identique.
  3. Piston selon la revendication 1 ou 2, caractérisé en ce que les segments magnétiques (38, 39) sont polarisés dans le sens axial.
  4. Piston selon l'une quelconque des revendications 1 à 3, caractérisé en ce que l'agencement à aimants permanents (27) se compose précisément de deux segments magnétiques (38, 39) avec une longueur d'arche appropriée qui est identique.
  5. Piston selon l'une quelconque des revendications 1 à 4, caractérisé en ce que les zones se chevauchant des sections d'extrémité (38a, 39a ; 38b, 39b) se trouvent les unes à côté des autres dans le sens axial de l'agencement à aimants permanents (27).
  6. Piston selon l'une quelconque des revendications 1 à 5, caractérisé en ce que chaque segment magnétique (38, 39) présente, dans la zone du point de référence (52), une surface terminale (64) s'étendant radialement vers l'extérieur en partant de la surface périphérique intérieure (62) du segment magnétique (38, 39), orientée dans le sens périphérique (37) de l'agencement à aimants permanents (27), à laquelle se raccordent l'évidement (54) et le nez (53), les surfaces terminales (64) fonctionnant comme des surfaces d'appui des segments magnétiques combinés les uns aux autres se faisant face par paires.
  7. Piston selon l'une quelconque des revendications 1 à 6, caractérisé en ce qu'en cas d'agencement à aimants permanents (27) se composant juste de deux segments magnétiques (38, 39), les points de référence (52) associés aux deux sections d'extrémité (38a, 38b ; 39a, 39b) d'un segment magnétique (38, 39) respectif se trouvent sur une droite (65) coupant l'axe longitudinal de piston (5).
  8. Piston selon l'une quelconque des revendications 1 à 7, caractérisé en ce que des segments magnétiques (38, 39) se succédant sont collés entre eux sur les sections d'extrémité tournées les unes vers les autres (38a, 39a ; 38b, 39b).
  9. Piston selon l'une quelconque des revendications 1 à 8, caractérisé en ce que l'agencement à aimants permanents (27) se compose de segments magnétiques (38, 39) identiques entre eux.
  10. Piston selon l'une quelconque des revendications 1 à 9, caractérisé en ce que le corps porteur (22) est réalisé d'un seul tenant au moins dans la zone définissant la rainure annulaire (23).
  11. Piston selon l'une quelconque des revendications 1 à 10, caractérisé en ce que l'agencement à aimants permanents (27) est entouré de manière coaxiale par un anneau de guidage (32).
  12. Piston selon l'une quelconque des revendications 1 à 11, caractérisé en ce que le corps porteur (22) porte dans le sens axial de part et d'autre de la rainure annulaire (23), une garniture de piston (34a, 34b) annulaire coaxiale par rapport à l'axe longitudinal de piston (5).
  13. Piston selon l'une quelconque des revendications 1 à 12, caractérisé par un contour extérieur circulaire.
  14. Piston selon l'une quelconque des revendications 1 à 13, caractérisé par une forme en arc de cercle des segments magnétiques individuels (38, 39).
  15. Dispositif de réglage actionné par fluide, en particulier entraînement linéaire ou amortisseur de chocs, comportant un boîtier (2) équipé de moyens de détection de la position (28) qui définit une chambre de réception (3), dans laquelle un piston (4) réalisé selon l'une quelconque des revendications 1 à 14, est disposé de manière à se déplacer linéairement, lequel est couplé en déplacement avec une partie de prise de force (14) permettant une prise de force en dehors du boîtier (2).
EP10006849A 2005-04-07 2006-02-23 Piston et dispositif actionné par fluide equipé avec ledit piston Not-in-force EP2228544B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200520005508 DE202005005508U1 (de) 2005-04-07 2005-04-07 Kolben und damit ausgestattete fluidbetätigte Stellvorrichtung
EP06707196A EP1866548B1 (fr) 2005-04-07 2006-02-23 Piston et dispositif de reglage commande par un fluide et equipe de ce piston

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP06707196.9 Division 2006-02-23

Publications (2)

Publication Number Publication Date
EP2228544A1 EP2228544A1 (fr) 2010-09-15
EP2228544B1 true EP2228544B1 (fr) 2011-06-08

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ID=34639185

Family Applications (2)

Application Number Title Priority Date Filing Date
EP10006849A Not-in-force EP2228544B1 (fr) 2005-04-07 2006-02-23 Piston et dispositif actionné par fluide equipé avec ledit piston
EP06707196A Not-in-force EP1866548B1 (fr) 2005-04-07 2006-02-23 Piston et dispositif de reglage commande par un fluide et equipe de ce piston

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP06707196A Not-in-force EP1866548B1 (fr) 2005-04-07 2006-02-23 Piston et dispositif de reglage commande par un fluide et equipe de ce piston

Country Status (5)

Country Link
US (1) US7650828B2 (fr)
EP (2) EP2228544B1 (fr)
CN (1) CN101151468B (fr)
DE (2) DE202005005508U1 (fr)
WO (1) WO2006105828A1 (fr)

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EP3164609B1 (fr) * 2014-11-12 2019-08-28 Festo AG & Co. KG Piston et dispositif de controle équipé de celui-ci
EP3353426B1 (fr) 2015-09-22 2021-05-19 Kongsberg Automotive As Cylindre à double action
JP6558583B2 (ja) 2016-08-10 2019-08-14 Smc株式会社 流体圧装置及びピストン組立体の製造方法
JP6598079B2 (ja) * 2016-12-06 2019-10-30 Ｓｍｃ株式会社 ロッド組立体及び流体圧装置
DE102017206298A1 (de) * 2017-04-12 2018-10-18 Festo Ag & Co. Kg Antriebseinheit, damit ausgestatteter fluidbetätigter Arbeitszylinder und diesbezügliches Herstellungsverfahren
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CH674058A5 (fr) * 1986-10-22 1990-04-30 Festo Kg
JP3084074B2 (ja) * 1991-01-11 2000-09-04 太陽鉄工株式会社 永久磁石の固定方法
JPH08270614A (ja) * 1995-03-30 1996-10-15 Matsui Seisakusho:Kk 流体圧アクチュエータ
DE29607993U1 (de) * 1996-05-03 1996-08-01 Festo Kg, 73734 Esslingen Kolben für einen Arbeitszylinder
DE19925083A1 (de) 1999-06-01 2000-12-14 Festo Ag & Co Kolben für einen Arbeitszylinder und Verfahren zu seiner Herstellung
WO2003093682A1 (fr) * 2002-05-04 2003-11-13 Imi Vision Limited Ameliorations apportees a un appareil de controle de position

Also Published As

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DE502006008708D1 (de) 2011-02-24
CN101151468B (zh) 2012-06-20
US7650828B2 (en) 2010-01-26
DE202005005508U1 (de) 2005-06-02
US20070279045A1 (en) 2007-12-06
CN101151468A (zh) 2008-03-26
WO2006105828A1 (fr) 2006-10-12
EP2228544A1 (fr) 2010-09-15
EP1866548B1 (fr) 2011-01-12
EP1866548A1 (fr) 2007-12-19

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