EP2215454A1 - Procédé de fonctionnement d'un spectromètre ftir et spectromètre ftir lui-même - Google Patents

Procédé de fonctionnement d'un spectromètre ftir et spectromètre ftir lui-même

Info

Publication number
EP2215454A1
EP2215454A1 EP08851951A EP08851951A EP2215454A1 EP 2215454 A1 EP2215454 A1 EP 2215454A1 EP 08851951 A EP08851951 A EP 08851951A EP 08851951 A EP08851951 A EP 08851951A EP 2215454 A1 EP2215454 A1 EP 2215454A1
Authority
EP
European Patent Office
Prior art keywords
calibration
validation
spectrometer
gas
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08851951A
Other languages
German (de)
English (en)
Inventor
Norbert Will
Bernd Hielscher
Christoph Becker
Berthold Andres
Carsten Rathke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ABB AG Germany
Original Assignee
ABB AG Germany
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ABB AG Germany filed Critical ABB AG Germany
Publication of EP2215454A1 publication Critical patent/EP2215454A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G01N21/276—Calibration, base line adjustment, drift correction with alternation of sample and standard in optical path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/13—Moving of cuvettes or solid samples to or from the investigating station
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G01J2003/2879—Calibrating scan, e.g. Fabry Perot interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N2021/0357—Sets of cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N2021/0367—Supports of cells, e.g. pivotable
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N2021/3196—Correlating located peaks in spectrum with reference data, e.g. fingerprint data
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0006—Calibrating gas analysers

Definitions

  • the invention relates to a method for operating an FTIR spectrometer, and FTIR spectrometer itself, according to the preamble of claim 1 and 8.
  • FTIR spectrometers are infrared spectrometers that use the Fourier transform calculation method. Such spectrometers do not work on specific absorption lines but take up a spectrum of a whole wavelength range and thus obtain information about the absorptions over the considered frequency or wavelength spectrum by means of the mathematical spectrometer function. From the obtained distribution, a chemometric observation is subsequently performed and the distribution is assigned to the corresponding gas components. This means that several gas components can be measured simultaneously with the FTIR spectrometer.
  • FTIR spectrometers are also interesting for difficult to handle gases. These include, for example, NH 3 , HCl, HF, H 2 O. The advantage of FTIR spectrometers, however, is that many gas components can be measured simultaneously. Thus, such spectrometers are particularly suitable for emission measurement. Usually there is a daily check of the spectrometer.
  • the verification of the calibration data is usually carried out today in two steps: At regular intervals (usually daily), a reference spectrum is recorded with zero gas (usually purified ambient air) on a regular basis. This reference spectrum compensates for changes in the transmission behavior of the system. Changes in the transmission behavior can be caused, for example, by soiling in the optical path,
  • test gas generators are used for components that are difficult to handle in test gas cylinders, such as H2O or HCl. However, such handling is very difficult and difficult to accomplish in some places of use of the spectrometer.
  • US Pat. No. 5,777,735 discloses a method or a device of this type in which, as in other known methods, the calibration of the device to the respective gas component to be measured is effected by supplying the corresponding gas in pure form as a calibration gas from a reservoir. This is far too expensive for most gases.
  • the invention is therefore the object of developing a method and a spectrometer of the generic type such that at each site and at any time a calibration or validation of the spectrometer can be done.
  • the object is achieved in a method of the generic type efindungshunt by the characterizing features of claim 1.
  • the core of the invention in terms of method is that in the validation of the spectrometer in addition to or instead of the actual measurement components also easily manageable replacement gas components can be selected, covering the entire spectral range of the spectrometer.
  • gases such as HCl, HF, NH 3
  • Test gases must be provided in high purity. Instead, become simply usable gases are used as substitution for the validation, which produce an absorption effect in the region of the "difficult" gas, so to speak, as a representative, so that these substitute gases as validation or calibration gases are much easier to handle than the actual measuring gases, if they are suitable for Calibration must be available in a highly pure form and with a precise concentration, which is referred to as substitute gases that are not nearly as aggressive or difficult to handle as the gases they are intended to represent, making fuller validation and calibration easier.
  • a gas mixture consisting of a plurality of substitute gases is used for the validation, each of which covers subregions of the entire measuring spectrum.
  • the replacement gases can be brought into a gas mixture for calibration, which would be chemically questionable with the actual gas components.
  • the complete spectral range of the spectrometer can be immediately validated in one step.
  • the intensities in the validation / calibration step are also monitored with zero gas, and the entire spectrum is thus stored as reference by interpolation.
  • the Ersatgase automatically fed individually, ie from different gas reservoirs or as a substitute gas mixture from a gas reservoir by individual valve control in an automatic validation / calibration step the cuvette, and afterwards the corresponding validation or calibration steps are performed.
  • the validation step can be carried out automatically and cyclically in a simple and effective manner.
  • the determined validation or calibration values are stored in an adaptive data field, from which the validation / calibration history can also be evaluated if necessary, in order to obtain a diagnosis of the maintenance status of the spectrometer.
  • the replacement gas components are completed individually or as substitute gas mixture in a calibration cuvette, i. are enclosed, and that for carrying out the validation / calibration step they are automatically pivoted into the beam path and then swung out again.
  • the essence of the invention is that serve as calibration gases, which are only representatives of the actual measurement gases in terms of their absorption effect within the spectrometer and stored within a gas reservoir, and at the moment of automatic initiation of a calibration or Validiervorganges automatically serial successively or as a gas mixture in the beam path of the Sepktrometers are introduced.
  • the gases can be introduced by means of an automatic valve control in the measuring cuvette of the spectrometer.
  • the calibration process can be initiated automatically and the gases are introduced.
  • the gases can be automatically swiveled into the beam path of the spectrometer in one or more calibration cuvettes closed after gas filling and can be swiveled out automatically again after calibration / validation.
  • the invention is illustrated with respect to the method according to the invention, as well as in the construction of the spectrometer in the drawing and described in more detail below.
  • Figure 1 basic structure of a FTIR spectrometer with swiveling or sliding calibration cuvette.
  • FIG. 3 Spectrum with guiding components (representatives)
  • Figure 1 shows a basic structure of an FTIR spectrometer, which is constructed for example on a Michelson interferometer.
  • a parallel beam is generated by widening by means of a first optical system 4, which falls on a semitransparent mirror 3 as a beam splitter.
  • a part of the light with the fixed wavelength and frequency position (monochromatic and coherent) now falls on the fixed mirror 1 and is reflected there.
  • the other partial light beam passes through the mirror 3 in a straight line and is reflected by a movable mirror 2, back in the direction of the mirror 3, where now the two partial light beams interfere with each other.
  • the interference is controllably controlled by the adjustment of the mirror 2 along the optical axis.
  • the interfered light irradiates the measuring cuvette 8 through which the measuring gas is passed.
  • the interferometer a very precise tuning of the effective frequency position of the measuring cuvette and thus the measuring gas striking light beam is achieved.
  • a complete spectrum can be detected at the detector, and not just the absorption rate at a fixed frequency.
  • the expanded light beam is refocused via a second optical system 6, specifically to the dimension of the detector.
  • the cuvette contains a gas inlet A and a gas outlet B and is introduced by the sample gas for recording a measuring spectrum and then led out again.
  • a valve control not shown here is now activated, and calibration gas is passed through led the cuvette 8, or rinsed to initiate after calibration by valve reversal the measured gas to be measured.
  • the calibration cuvette is not filled with the respective measurement gas or the measurement gas component which is measured in this calibrated part of the spectrum, but with a replacement gas or replacement gas mixture representing this or that.
  • substitute gases ie as a representative SO 2 , CO 2 , N 2 O or methane used
  • the use of substituting gases according to the invention greatly simplifies calibration / validation because these substitute components are much easier to handle. They are so easy to handle that they can now be handled in closed calibration cuvettes instead of being calibrated in the gas passage method. This would not be possible with HCL or HF or even with water vapor H 2 O.
  • the individual gases can likewise be enclosed in a calibration cuvette and alternately swiveled in a type of aperture wheel, or a gas mixture of all substitute gases in a common calibration cuvette 9 is used, as in the gas passage method.
  • the calibration cuvette can of course be inserted with a linear movement.
  • FIG. 2 shows the control of the FTIR according to the invention in principle.
  • the operation of the light source 5 (laser) and the detector 7 is carried out via a control unit 10.
  • a time control unit 11 triggers the calibration process at an adjustable time, or by a desired drive signal.
  • the Mirror 2 the light source 5 and the detector 7 controlled, and this coordinated the Einschwenk- or Einschiebebetutz the calibration cuvette 9 controlled and so recorded the reference spectrum and stored in the adaptive memory unit 12.
  • the memory unit 12 also writes the data with temporal assignment as historical data, whereupon an evaluation of possible aging effects can be detected. This can be done in addition to the pure calibration and a sustainable self-diagnosis of the spectrometer.
  • valve controller for supplying substitute gases in the passage method can also be controlled in a coordinated manner in order to be able to carry out the calibration in this way with the use of said substitute gases.
  • FIG. 3 shows how, instead of a test gas task for all components, a validation (check) by a test gas mixture of several substitute gases is carried out.
  • the substitute gases can all be mixed together in a test gas cylinder and are stable over a longer period of time.
  • the substitute gases can also be measurement components, for example SO2 or CO2.
  • gases with many absorptions in different wavelength ranges can also be used, for example stable halogenated hydrocarbons or N 2 O and CO 2.
  • the replacement gases ideally cover the entire spectral range of the spectrometer.
  • Figure 4 shows how additionally monitors the intensities of the reference spectrum. This will also monitor the wavelength ranges that are not covered by the substitute gases.
  • the procedure of the whole procedure can be automated. That it can be given by solenoid valves as described computer controlled the test gas mixture of substitute gases and the zero gas for the reference spectrum. The results can be evaluated automatically and, if necessary, an alarm can be triggered. With smaller deviations, a pre-alarm can be triggered.
  • the storage of the history of validation results can be used as a basis for continuous quality monitoring.
  • the history of validation results can be used as a basis for continuous quality monitoring.
  • Spectra for master components and reference values are stored as already described.
  • a test gas cylinder with the mixture of substitute gas components can be completely dispensed with by stably enclosing the replacement gas components in a calibration cuvette.
  • the calibration cuvette is then pivoted as described above cyclically in the optical path.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un procédé de fonctionnement d'un spectromètre FTIR (Infrarouge à Transformée de Fourier) avec lequel une validation/un calibrage du spectromètre est effectué(e) à intervalles répétitifs cycliques par enregistrement à l'aide d'au moins deux gaz mis à disposition temporairement à la fois d'un spectre de référence par un gaz de mise à zéro et d'un spectre d'absorption par un gaz de calibrage, ainsi qu'un spectromètre proprement dit, selon les préambules des revendications 1 et 8. Conformément à l'invention, pour qu'un calibrage ou qu'une validation du spectromètre puisse ici avoir lieu quel que soit le lieu d'utilisation et à tout moment, la validation du spectromètre est réalisée en utilisant comme composantes gazeuses des gaz dits de substitution qui ne font que simuler les propriétés métrologiques des composantes réelles de gaz de mesure.
EP08851951A 2007-11-22 2008-11-21 Procédé de fonctionnement d'un spectromètre ftir et spectromètre ftir lui-même Withdrawn EP2215454A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007056345A DE102007056345B3 (de) 2007-11-22 2007-11-22 Verfahren zum Betrieb eines FTIR-Spektrometers, sowie FTIR-Spektrometer selbst
PCT/EP2008/009854 WO2009065595A1 (fr) 2007-11-22 2008-11-21 Procédé de fonctionnement d'un spectromètre ftir et spectromètre ftir lui-même

Publications (1)

Publication Number Publication Date
EP2215454A1 true EP2215454A1 (fr) 2010-08-11

Family

ID=40076286

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08851951A Withdrawn EP2215454A1 (fr) 2007-11-22 2008-11-21 Procédé de fonctionnement d'un spectromètre ftir et spectromètre ftir lui-même

Country Status (5)

Country Link
US (1) US20100282958A1 (fr)
EP (1) EP2215454A1 (fr)
CN (1) CN101918814A (fr)
DE (1) DE102007056345B3 (fr)
WO (1) WO2009065595A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2635902B1 (fr) * 2010-11-01 2018-12-12 Koninklijke Philips N.V. Procédé d'étalonnage d'un capteur d'air
DE102010056137B4 (de) * 2010-12-23 2014-03-27 Abb Ag Optische Gasanalysatoreinrichtung mit Mitteln zum Kalibrieren des Frequenzspektrums
US8467996B2 (en) 2011-02-09 2013-06-18 Jorge E Perez Spectral analysis operating system
CN103635785B (zh) * 2011-02-15 2016-11-02 勒克思马克斯科技公司 整合cmos-ftir测定及拉曼测定的光谱仪及其方法
PL2745085T3 (pl) * 2011-08-19 2019-08-30 Foss Analytical A/S Sposób kompensacji dryfu amplitudy w spektrofotometrze i spektrofotometr realizujący wymieniony sposób
DE102013101610B4 (de) * 2013-02-19 2015-10-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur Ferndetektion eines nicht infrarotaktiven Zielgases
DE102013005997B3 (de) * 2013-04-08 2014-05-15 Abb Technology Ag Optische Gasanalysatoreinrichtung
CN108072623A (zh) * 2016-11-18 2018-05-25 天津邦纳科技有限公司 一种二氧化硫含量化学传感器和光谱仪相互校验的方法
CN108072624A (zh) * 2016-11-18 2018-05-25 天津邦纳科技有限公司 一种氮氧化物含量化学传感器和光谱仪相互校验的方法
CN112540053A (zh) * 2020-09-27 2021-03-23 杭州春来科技有限公司 开放式气体检测装置
US20230014558A1 (en) * 2021-07-06 2023-01-19 Si-Ware Systems Self-calibrated spectroscopic and ai-based gas analyzer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5777735A (en) * 1996-09-30 1998-07-07 Minnesota Mining And Manufacturing Company In situ analysis apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4128912C2 (de) * 1991-08-30 1995-06-22 Deutsche Forsch Luft Raumfahrt Verfahren und Einrichtung zur Kalibrierung von Spektralradiometern
CA2267558C (fr) * 1998-04-10 2005-09-13 Her Majesty The Queen, In Right Of Canada, As Represented By The Ministe R Of National Defence Configuration d'un spectrometre par transformation de fourier optimisee pour suppression automatique et etalonnage radiometrique simplifie
US7535006B2 (en) * 2003-06-09 2009-05-19 Canberra Albuquerque, Inc. Gaseous uranium hexafluride isotope measurement by diode laser spectroscopy
JP4591105B2 (ja) * 2004-05-31 2010-12-01 横河電機株式会社 校正方法
DE102004031643A1 (de) * 2004-06-30 2006-02-02 Abb Patent Gmbh Nichtdispersiver Infrarot-Gasanalysator
US7598494B2 (en) * 2007-01-30 2009-10-06 Airgas, Inc. Automated FTIR gas analyzer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5777735A (en) * 1996-09-30 1998-07-07 Minnesota Mining And Manufacturing Company In situ analysis apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2009065595A1 *

Also Published As

Publication number Publication date
CN101918814A (zh) 2010-12-15
WO2009065595A1 (fr) 2009-05-28
DE102007056345B3 (de) 2009-01-02
US20100282958A1 (en) 2010-11-11

Similar Documents

Publication Publication Date Title
DE102007056345B3 (de) Verfahren zum Betrieb eines FTIR-Spektrometers, sowie FTIR-Spektrometer selbst
DE19925196C2 (de) Gassensoranordnung
DE102010056137B4 (de) Optische Gasanalysatoreinrichtung mit Mitteln zum Kalibrieren des Frequenzspektrums
EP1890207B1 (fr) Méthode de réaliser d'un modèle de processus
DE102016124644A1 (de) Echtzeitcharakterisierung von pharmazeutischen Tablettenbeschichtungen mittels Raman-Spektroskopie
DE102012004977B3 (de) Vorrichtung und Verfahren zum Messen eines Zielgases
DE2723939A1 (de) Vorrichtung zur atemgasanalyse
EP2503323A2 (fr) Dispositif et procédé de mesure de la répartition spatiale de gaz atmosphériques à proximité du sol
DE3023625A1 (de) System zur ueberwachung der konzentration eines spezifischen gases in einer (umwelt) probe
DE3116344C2 (fr)
AT500543B1 (de) Verfahren zur raschen spektroskopischen konzentrations-, temperatur- und druckmessung von gasförmigem wasser
EP3364169B1 (fr) Analyseur de gaz de procédé
EP4133258B1 (fr) Procédé et dispositif de détermination d'indices de réfraction dépendant de la fréquence
EP0843812A1 (fr) Procede de mesure a distance de polluants atmospheriques
WO2004003524A1 (fr) Dispositif de mesure photometrique de la teneur en une substance chimique d'une solution mesuree
EP3365659A1 (fr) Dispositif de mesure infrarouge
DE102010052471B3 (de) Messvorrichtung und Messverfahren zur Bestimmung einer optischen Qualität einer Prüfoptik
DE19960586B4 (de) Verfahren und Einrichtung zur Messung von Kenngrössen einer Probe durch Spektralanalyse
DE3021041C2 (de) Meßverfahren und -gerät zur gleichzeitigen Bestimmung des Konzentrations- und des Verdünnungsverhältnisses zweier Gase einer Gasmatrix
EP1333382A1 (fr) Méthode et dispositif de traitement de données de mesure
WO2012171786A1 (fr) Identification automatique de la longueur d'onde d'un laser
DE102008056672A1 (de) Verfahren und Vorrichtung zum Überwachen der Verbrennung eines Kraftwerks auf der Grundlage zweier realer Konzentrationsverteilungen
DE202016008496U1 (de) Spektroskopisches Messgerät
DE19809791C1 (de) Verfahren zum ortsaufgelösten Messen der Temperatur in einem Medium
DE3830834A1 (de) Verfahren und einrichtung zur dispersiven, spektral voll aufgeloesten optischen gasanalyse mit unterdrueckter querempfindlichkeit

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20100622

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA MK RS

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20170628

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20181029