EP2199015A2 - Procédé de traitement de pièces dans une machine de traitement bilatéral, ainsi qu'une machine de traitement bilatéral - Google Patents

Procédé de traitement de pièces dans une machine de traitement bilatéral, ainsi qu'une machine de traitement bilatéral Download PDF

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Publication number
EP2199015A2
EP2199015A2 EP09014386A EP09014386A EP2199015A2 EP 2199015 A2 EP2199015 A2 EP 2199015A2 EP 09014386 A EP09014386 A EP 09014386A EP 09014386 A EP09014386 A EP 09014386A EP 2199015 A2 EP2199015 A2 EP 2199015A2
Authority
EP
European Patent Office
Prior art keywords
working
workpieces
curvature
processing machine
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09014386A
Other languages
German (de)
English (en)
Other versions
EP2199015A3 (fr
EP2199015B1 (fr
Inventor
Conrad Von Bechtolsheim
Rolf Zielke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Peter Wolters GmbH
Original Assignee
Peter Wolters GmbH
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Filing date
Publication date
Application filed by Peter Wolters GmbH filed Critical Peter Wolters GmbH
Publication of EP2199015A2 publication Critical patent/EP2199015A2/fr
Publication of EP2199015A3 publication Critical patent/EP2199015A3/fr
Application granted granted Critical
Publication of EP2199015B1 publication Critical patent/EP2199015B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/28—Work carriers for double side lapping of plane surfaces

Definitions

  • the present invention relates to a method for machining workpieces in a double-side processing machine having an upper work disk with an upper work surface and a lower work disk with a lower work surface, wherein at least one of the work disks is driven in rotation, wherein the work surfaces form a working gap therebetween in which at least one rotor disc is arranged, which receives in recesses the workpieces to be machined and is rotated by means of a rolling device, whereby in the rotor disc recorded workpieces move along cycloidal paths.
  • the invention also relates to a double-side processing machine for processing workpieces, comprising an upper working disk with an upper working surface and a lower working disk with a lower working surface wherein at least one of the working disks is rotationally driven by means of a drive, and wherein the working surfaces form a working gap between them the at least one rotor disk is arranged, which can receive workpieces to be machined in recesses and can be set in rotation by means of a rolling device, whereby workpieces received in the rotor disk move along cycloidal paths.
  • double-side processing machines for machining workpieces with two plane-parallel surfaces.
  • flat workpieces can be processed.
  • a corresponding machine for lapping, grinding or polishing is known, for example DE 195 47 085 A1 .
  • the workpieces are stress-free in so-called rotor discs between an upper working disk and a coaxial with the upper working disk arranged lower working disk guided on cycloidal paths. In this way, a very uniform wear of the working wheels or their working surfaces in contact with the workpiece during machining is achieved. This in turn allows very high machining accuracies to be achieved, in particular with regard to the evenness, plane parallelism and thickness tolerance of the workpieces.
  • a variety of workpieces can be processed simultaneously with the known machines, depending on the size and type of workpieces and size of the device up to several hundred workpieces. The known double-side processing machines are therefore very economical to operate.
  • Devices for producing workpieces with spherical surfaces for example lenses, are known, inter alia DE 27 21 553 C3 .
  • DE 198 46 260 A1 or DE 10 2006 017 685 A1 With the known devices desired spherical surfaces can be produced with high precision, as is usually required for optical elements. The disadvantage here, however, that only one side of the workpiece can be edited. In addition, with the known devices often only a workpiece or a small number of workpieces can be processed simultaneously.
  • the object of the invention is to provide a method and a double-side processing machine of the type mentioned above, with which workpieces can be provided in a simple and effective manner with spherical surfaces.
  • the invention solves the problem in that the workpieces are machined with spherically shaped work surfaces. Accordingly, the invention solves the problem for a double-side processing machine of the type mentioned in that the upper and lower working surface are spherical.
  • both working disks are thus spherically formed during machining.
  • the surfaces of the working disks which are in contact with the workpieces are therefore not brought into the most level possible form, as is usual in double-side machining according to the prior art. Rather, targeted spherical work surfaces are used for machining the workpieces.
  • the surface shape of each of the spherical work surfaces can thus be described as part of the surface of a sphere with a radius r and a center point M.
  • the machined with these work surfaces workpieces then have after machining a shape corresponding to the shape of the work surfaces. According to the invention, therefore, workpieces can be provided on both sides with spherical surfaces.
  • double-sided processing machines known per se for plane-parallel processing can be In addition, achieve a particularly high machining accuracy, the upper and lower sides of the workpieces can be processed simultaneously. In addition, can be processed simultaneously and quickly with double side processing machines and in particular the rotor disk assembly in the working gap a variety of workpieces. Depending on the size of the workpieces and the processing machine, several hundred workpieces can be processed simultaneously.
  • the working wheels are usually arranged coaxially with each other, wherein the working surfaces of the working disks face each other and form the working gap between them.
  • a working force is exerted on the workpieces by the working disks.
  • one of the work surfaces may be concave spherical while the other may be convex spherical, for example.
  • the machining of the workpieces is material removal.
  • the machining may be grinding, lapping, polishing or honing.
  • the workpieces can be thin workpieces and, for example, consist of a metal, ceramic or glass material. Basically come as workpieces and semiconductor wafers in question.
  • optical elements such as lenses (eg glass lenses) or similar workpieces are suitable for spherical processing.
  • the spherical working surface of the respective working surface can form the entire working disk together with its working surface in a spherical shape.
  • the work surfaces or work disks can be permanently spherical.
  • the radii of curvature of the work surfaces may differ according to an embodiment of the invention.
  • the radii of curvature of the working surfaces can differ according to a further embodiment by the thickness of the workpieces to be machined (after their processing).
  • the centers of curvature that is to say the centers of the spherical surfaces described by the working surfaces or working disks, can coincide in one point when the working surfaces are in contact with the workpieces to be machined.
  • the working gap then corresponds to the parallel gap desired during the plan machining, which, however, is curved overall spherically.
  • the gap width then corresponds to the workpiece thickness.
  • the workpieces to be machined are also free of stress in recesses of at least one carrier, in particular of several carriers, which are moved between the work surfaces or work disks and guide the workpieces on cycloidal paths.
  • the carriers can in a conventional manner have an external toothing, with which they engage in an inner and outer pin collar or ring gear and are driven in this way. It is thereby generated the cycloidal movement of the workpieces in the working gap.
  • carriers with plane-parallel surfaces can no longer be arranged in the working gap.
  • the at least one rotor disc on at least one of their processing surfaces facing the work surfaces may also be formed spherically.
  • the at least one Rotor disc be spherical on both sides.
  • the radius of curvature of at least one spherical side of the at least one rotor disk, in particular of each spherical side of the rotor disk corresponds in each case to the radius of curvature of the working surface facing this side.
  • the carriers also have upper and lower spherical surfaces formed with a different radius of curvature. As a result, the carriers are precisely in the working gap.
  • the radius of curvature of at least one spherical side of the at least one rotor disk has a value which lies between the values of the different radii of curvature of the two work surfaces.
  • the carriers can be made with the same radii of curvature of their spherical upper and lower sides.
  • one of the working surfaces may be designed as a sliding surface, which does not allow for processing leads to a removal of material of the workpieces. On this completely or partially designed as a sliding surface working surface, the workpieces slide during machining without material is removed.
  • the double-side processing machine according to the invention can be designed to carry out the method according to the invention.
  • Fig. 1 schematically shows the basic structure of a double-sided machining machine 10 with planetary kinematics.
  • the Double-side processing machine 10 has an upper pivot arm 12, which can be pivoted about a mounted on a lower base 18 pivoting device 14 about a vertical axis.
  • an upper working disk 16 is supported on the pivot arm 12.
  • the upper working disk 16 via an in Fig. 1 not shown drive motor rotatably driven.
  • the upper working disk 16 has a work surface. On this example, a grinding or a polishing pad or the like may be arranged.
  • the lower base 18 has a support portion 19 which carries a lower working disk 20 having on its upper side one of the working surface of the upper working disk 16 corresponding work surface.
  • the upper working disk 16 are aligned coaxially with the lower working disk 20.
  • the lower working disk 20 can likewise be driven in rotation by means of a drive motor, not shown, in particular in opposite directions to the upper disk 16.
  • a drive motor not shown, in particular in opposite directions to the upper disk 16.
  • sliders 22 On the lower work disk 20 more sliders 22 are shown, each having recesses for workpieces to be machined.
  • the carriers 22 each engage with an external toothing in an inner pin ring 24 and an outer pin ring 26.
  • a rolling device is formed, wherein the carriers 22 are also set in rotation of the lower working disk 20, for example via the inner pin ring 24 in rotation.
  • the arranged in the recesses of the carriers 22 workpieces then move on the lower working disk 20 along cycloid trajectories.
  • the workpieces to be machined are inserted into the carriers 22 (not shown).
  • the two working wheels 16, 20 coaxially aligned with each other so that they form a working gap between them.
  • the upper working disk 16 is then pressed onto the workpieces with a contact pressure force.
  • a highly accurate loading system is arranged in the pivot arm 12. It then acts from the upper and lower working disk 16, 20 each exerted a contact pressure on the workpieces to be machined and the workpieces are processed on both sides.
  • the construction and the function of such a double-side processing machine are known per se to those skilled in the art.
  • Fig. 2 shows a greatly simplified sectional view of some elements of the Fig. 1 shown double side processing machine.
  • the upper working disk 16 has an upper working surface 28.
  • the working surfaces 28, 30 facing each other and form between them a working gap 32.
  • runners 22 with inserted in them workpieces 34 can be seen.
  • the carriers 22 in turn roll with their external teeth between the inner pin ring 24 and the outer pin ring 26 from.
  • the working disks 16, 20 and with them the working surfaces 28, 30 are driven, for example, counter-rotating about the axis of rotation 36.
  • construction can be done in a conventional manner a plane-parallel machining of the workpieces 34.
  • Fig. 3 shows the in Fig. 2 shown components of the machine 10 according to a first embodiment of the invention.
  • the upper working disk 16 has a spherically convex working surface 28 owns.
  • the lower working disk 20 has a spherically concave working surface 30.
  • the radii of curvature of the working surfaces 28, 30 differ by the thickness d of the workpieces 34 to be machined.
  • the centers of the spherical surfaces described by the working surfaces 28, 30 coincide in one point. In this way, the working gap 32 formed between the working disks 16, 20 has the same gap width s everywhere.
  • the guided in the carriers 22 workpieces 34 are thus in mutual contact with the work surfaces 28, 30.
  • the carriers 22 are likewise spherically formed on their two sides facing the work surfaces 28, 30. With the arrangement shown, a plurality of workpieces can be provided simultaneously and on both sides with spherical surfaces in a simple and effective manner.
  • Fig. 4 is the in Fig. 3 shown arrangement according to another embodiment of the invention. It largely corresponds to the arrangement according to Fig. 3 , In contrast to Fig. 3 is at the in Fig. 4 shown arrangement, however, the working surface 28 'of the upper working disk 16 as a sliding surface 28' is formed. On this sliding surface 28 ', the workpieces 34 can slide during processing, without resulting in a material removal. The shape of the workpieces 34 on their sliding surface 28 'facing side is therefore not changed in the course of processing. In the in Fig. 4 As shown, the workpieces 34 have a convex top surface. This convex shape is retained even after processing.
  • the underside of the workpieces 34 is machined with the lower working surface 30 of the lower working disk 20, wherein the underside of the workpieces assumes the shape of the lower working surface 30.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Turning (AREA)
EP09014386A 2008-12-22 2009-11-18 Procédé de traitement de pièces dans une machine de traitement bilatéral, ainsi qu'une machine de traitement bilatéral Not-in-force EP2199015B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008063227A DE102008063227A1 (de) 2008-12-22 2008-12-22 Verfahren zum Bearbeiten von Werkstücken in einer Doppelseitenbearbeitungsmaschine sowie Doppelseitenbearbeitungsmaschine

Publications (3)

Publication Number Publication Date
EP2199015A2 true EP2199015A2 (fr) 2010-06-23
EP2199015A3 EP2199015A3 (fr) 2011-01-12
EP2199015B1 EP2199015B1 (fr) 2012-04-18

Family

ID=41800390

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09014386A Not-in-force EP2199015B1 (fr) 2008-12-22 2009-11-18 Procédé de traitement de pièces dans une machine de traitement bilatéral, ainsi qu'une machine de traitement bilatéral

Country Status (3)

Country Link
EP (1) EP2199015B1 (fr)
AT (1) ATE553882T1 (fr)
DE (1) DE102008063227A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2721553C3 (de) 1977-05-13 1980-11-13 Prontor-Werk Alfred Gauthier Gmbh, 7547 Wildbad Maschine zum Schleifen und Polieren von Werkstücken mit sphärischer Oberfläche, insbesondere von Linsen
DE19547085A1 (de) 1995-12-15 1997-06-19 Wolters Peter Werkzeugmasch Poliermaschine
DE19846260A1 (de) 1998-10-07 2000-04-13 Schneider Gmbh & Co Kg Vorrichtung zum Bearbeiten optischer Linsen durch Schleifen und Polieren
DE102006017685A1 (de) 2006-04-15 2007-10-18 Carl Zeiss Ag Vorrichtung zum Bearbeiten, insbesondere zum Schleifen und Polieren, eines Werkstückes
DE102006037490A1 (de) 2006-08-10 2008-02-14 Peter Wolters Ag Doppelseiten-Bearbeitungsmaschine

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3984945A (en) * 1972-01-18 1976-10-12 Sebastian Messerschmidt Spezial-Maschinenfabrik Device for lapping balls in continuous operation
DD200319B1 (de) * 1981-07-09 1986-03-26 Amlong Hans Juergen Vorrichtung zur oberflaechenbearbeitung von piezoelektrischen resonatoren
US20050164605A1 (en) * 2003-12-18 2005-07-28 Carl Zeiss Smt Ag Device and method for surface working
DE102007056627B4 (de) * 2007-03-19 2023-12-21 Lapmaster Wolters Gmbh Verfahren zum gleichzeitigen Schleifen mehrerer Halbleiterscheiben

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2721553C3 (de) 1977-05-13 1980-11-13 Prontor-Werk Alfred Gauthier Gmbh, 7547 Wildbad Maschine zum Schleifen und Polieren von Werkstücken mit sphärischer Oberfläche, insbesondere von Linsen
DE19547085A1 (de) 1995-12-15 1997-06-19 Wolters Peter Werkzeugmasch Poliermaschine
DE19846260A1 (de) 1998-10-07 2000-04-13 Schneider Gmbh & Co Kg Vorrichtung zum Bearbeiten optischer Linsen durch Schleifen und Polieren
DE102006017685A1 (de) 2006-04-15 2007-10-18 Carl Zeiss Ag Vorrichtung zum Bearbeiten, insbesondere zum Schleifen und Polieren, eines Werkstückes
DE102006037490A1 (de) 2006-08-10 2008-02-14 Peter Wolters Ag Doppelseiten-Bearbeitungsmaschine

Also Published As

Publication number Publication date
DE102008063227A1 (de) 2010-06-24
ATE553882T1 (de) 2012-05-15
EP2199015A3 (fr) 2011-01-12
EP2199015B1 (fr) 2012-04-18

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